A device and method for detecting and controlling bubbles in a thin film manufacturing process

Abstract

The application discloses a kind of bubble detection device and control method in thin film preparation process, the detection device includes multilayer light shielding and environmental parameter control device, substrate moving feed device, two stable balance adjusting device, light emitting device, adjustable slit coating head, color temperature illuminance receiver, transparent substrate, coating machine control base, high-frequency data line, data acquisition card, data processor and display device.The application is cooperated by color temperature illuminance receiver, data acquisition card, data processor, and introduces the phase function theory of single bubble and bubble group mie scattering theory, so that the parameters such as bubble size, bubble group density and bubble position can be mastered in real time.The application can realize real-time control and adjustment of bubble by negative feedback closed-loop control system of substrate moving feed device and data processor, greatly improves the performance of granular film and the matching of subsequent process.The application is suitable for various thin film preparation modes.

Description

Technical Field

[0001] This invention relates to the field of thin film bubble detection, specifically to a device and method for detecting and controlling bubbles during thin film preparation. Background Technology

[0002] Thin film preparation processes are crucial for producing high-quality thin films, thus their importance is increasingly evident. Based on different processing methods and material properties, thin film preparation processes can be categorized into various types, including physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, and ion beam assisted deposition (IBAD).

[0003] Bubbles are a significant defect in thin film fabrication, impacting the overall quality of the film, including its mechanical, optical, and electrical properties. For example, the presence of bubbles reduces surface smoothness, transparency, and light absorption, while also affecting resistivity and conductivity. Therefore, the presence of bubbles can significantly increase scrap rates in industrial production, necessitating real-time control during the fabrication process. However, in the first stage of bubble control—real-time monitoring—designing a detection device to eliminate stray light and ensure stable reception is challenging and computationally complex, making it difficult to obtain a rapid and accurate rigorous mathematical solution. Furthermore, the fixed depth of focus in imaging equipment inevitably leads to overlap, preventing direct control over parameters such as bubble size and density. Additionally, bubbles in liquids can instantly change shape or dissolve, further complicating real-time bubble detection. In the second stage of bubble control—bubble feedback control—the physicochemical properties of the film significantly influence bubble behavior. Parameters such as surface tension, temperature, and humidity affect bubble size and quantity, thus posing a considerable challenge to real-time bubble control. Meanwhile, the stability of the real-time bubble control system is crucial for achieving precise control. However, the stability of the thin-film system is easily affected by environmental and other factors, which can lead to instability in the control system and affect the precise control of the bubbles.

[0004] Therefore, there is an urgent need for a detection device and a method for precise bubble control that can be widely applied to various thin film preparation processes to achieve real-time determination of bubble status during the thin film coating stage. Summary of the Invention

[0005] To address the aforementioned problems in the existing technology, this invention aims to design a bubble detection device and control method for the thin film preparation process that can perform real-time and rapid bubble detection during the thin film preparation process.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows: a device for detecting bubbles during the thin film preparation process, comprising a multi-layer light-shielding and environmental parameter control device, a substrate moving and feeding device, two stable balance adjustment devices, a light emitting device, an adjustable slit coating head, a color temperature illuminance receiver, a transparent substrate, a coating machine control base, a high-frequency data cable, a data acquisition card, a data processor, and a display device.

[0007] The substrate moving and feeding device is installed above the control base of the coating machine;

[0008] The transparent substrate is connected to the substrate moving and feeding device via a connector and is located above the substrate moving and feeding device;

[0009] The first stabilizing and balancing device is mounted below the transparent substrate via an adjustable bearing and is located above the substrate moving and feeding device. It is used to control the balance and stability of the substrate and the receiver.

[0010] The color temperature illuminance receiver is attached to the bottom of the transparent substrate and is located between the transparent substrate and the first stable balance adjustment device.

[0011] The adjustable slit coating head is located above the transparent substrate and is used for thin film preparation. The height of the slit coating head is adjusted in real time by computer control.

[0012] The second stabilizing and balancing device and the adjustable slit coating head are mounted on the main support to control the balance and stability of the light emitting device;

[0013] The light emitting device is installed below the second stabilizing and balancing device, above the transparent substrate, and in front of the adjustable slit coating head.

[0014] The multi-layer shading and environmental parameter control device includes multiple layers of red and black thick curtains, which form a closed space, and a temperature and humidity regulating device is installed in the closed space.

[0015] The substrate moving feed device, two stabilizing and balancing adjustment devices, light emitting device, adjustable slit coating head, color temperature and illuminance receiver, transparent substrate, and coating machine control base are placed inside the enclosed space.

[0016] The data acquisition card is connected to the color temperature and illuminance receiver via a first high-frequency data line, converting the analog information acquired by the color temperature and illuminance receiver into digital signals;

[0017] The data processor and the data acquisition card are connected via a second high-frequency data line. By combining the phase function theory of a single bubble with the Mie scattering theory of a bubble group, the size and position of the bubble are inversely determined using the acquired digital signals.

[0018] The display device is connected to the data processor via a fourth high-frequency data line to display the final result.

[0019] Furthermore, the light emitting device is configured to set the intensity and angle of the emitted light according to actual requirements.

[0020] Furthermore, the color temperature and illuminance receiver divides the real-time receiving area into N color temperature and illuminance receiving areas, where the value of N is set according to process requirements.

[0021] Furthermore, the data processor, by using the obtained bubble size and position, and the relationship between various parameters obtained through deep learning and the bubble, reversely calculates the required thin film preparation parameters for real-time control.

[0022] Furthermore, the substrate moving feed device, the multi-layer shading and environmental parameter control device, and the data processor form a negative feedback closed-loop control system. That is, the substrate moving feed device adjusts the feed speed in real time according to the bubble generation situation calculated by the data processor, the multi-layer shading and environmental parameter control device adjusts the internal temperature and humidity in real time according to the bubble generation situation calculated by the data processor, and the adjustable slit coating head adjusts the cutter head height in real time according to the bubble generation situation calculated by the data processor.

[0023] A method for controlling bubbles during thin film preparation, utilizing a bubble detection device, includes the following steps:

[0024] A. Adjust the first stabilizing balance device above the light emitting device according to requirements, and select a suitable angle and light intensity to emit incident light. The incident light passes through the freshly prepared thin film and transparent substrate and enters the color temperature illuminance receiver.

[0025] B. Color temperature and illuminance data collected from different areas of the color temperature and illuminance receiver are imported into the data acquisition card through the first high-frequency data line, converting the analog information collected by the color temperature and illuminance receiver into digital signals.

[0026] C. The data is imported into the data processor via the second high-frequency data line. The size, position, and density function of the bubble are then determined by using the phase function theory of a single bubble and the Mie scattering theory of a bubble swarm.

[0027] D. The bubble size, position, and bubble cluster density function obtained by reverse calculation are imported into the display device for real-time display via the fourth high-frequency data line, and fed back to the substrate moving feed device, adjustable slit coating head, and multi-layer light-shielding and environmental parameter control device via the third high-frequency data line. The substrate moving speed, blade height, temperature, humidity and other parameters are adjusted in real time to finally obtain an ideal bubble-free film.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. This invention utilizes the combination of a color temperature illuminance receiver, a data acquisition card, and a data processor, and introduces the phase function theory of a single bubble and the Mie scattering theory of a bubble swarm, thereby enabling real-time monitoring of parameters such as bubble size, bubble swarm density, and bubble position.

[0030] 2. The present invention, through the negative feedback closed-loop control system of the substrate moving feed device and the data processor, can realize real-time control and adjustment of bubbles, which greatly improves the performance of particulate films and the compatibility with subsequent processes.

[0031] 3. This invention is a non-contact optical thin film measurement method that avoids damaging existing thin films and has a wide testing range, applicable to various thin film preparation methods. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of the present invention;

[0033] Figure 2 for Figure 1 Schematic diagram of a medium color temperature illuminance receiver.

[0034] In the diagram: 1-Multi-layer light-shielding and environmental parameter control device; 2-Substrate moving and feeding device; 3-First stabilizing and balancing adjustment device; 4-Light emitting device; 5-Second stabilizing and balancing adjustment device; 6-Adjustable slit coating head; 7-Color temperature and illuminance receiver; 8-Transparent substrate; 9-Coating machine control base; 10-First high-frequency data line; 11-Data acquisition card; 12-Second high-frequency data line; 13-Third high-frequency data line; 14-Data processor; 15-Fourth high-frequency data line; 16-Display device. Detailed Implementation

[0035] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the invention, and should not be construed as limiting the invention. Rather, embodiments of the present invention include all variations, modifications, and equivalents falling within the spirit and scope of the appended claims.

[0036] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation. It is constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0038] like Figure 1 As shown, a device and method for detecting and controlling bubbles during thin film preparation includes a multi-layer light-shielding and environmental parameter control device 1, a substrate moving and feeding device 2, a first stabilizing and balancing adjustment device 3, a light emitting device 4, a second stabilizing and balancing adjustment device 5, an adjustable slit coating head 6, a color temperature and illuminance receiver 7, a transparent substrate 8, a coating machine control base 9, a first high-frequency data line 10, a data acquisition card 11, a second high-frequency data line 12, a third high-frequency data line 13, a data processor 14, a fourth high-frequency data line 15, and a display device 16.

[0039] The substrate moving and feeding device 2 is located above the coating machine control base 9;

[0040] The first stabilizing and balancing adjustment device 3 is located in the substrate moving and feeding device 2 and is used to control the balance and stability of the substrate and the receiver.

[0041] The transparent substrate 8 is located above the first stabilizing and balancing device 3 and is connected via a connector;

[0042] The color temperature illuminance receiver 7 is attached to the bottom of the transparent substrate 8 and is located between the transparent substrate 8 and the first stable balance adjustment device 3;

[0043] The adjustable slit coating head 6 is located above the transparent substrate 8 and is used for thin film preparation. Its head height can be adjusted in real time by computer control.

[0044] The light emitting device 4 is located above the transparent substrate 8 and in front of the adjustable slit coating head 6;

[0045] The second stabilizing and balancing device 5 is located above the emitting device and is used to control the balance and stability of the light emitting device 4;

[0046] The multi-layer shading and environmental parameter control device 1 includes multiple layers of red and black thick curtains that cover the entire film preparation equipment and bubble detection equipment, eliminating interference from external light sources on the data, while also allowing real-time control of internal parameters such as temperature and humidity.

[0047] The data acquisition card 11 and the color temperature and illuminance receiver 7 are connected via the first high-frequency data line 10;

[0048] Furthermore, the light emitting device 4 will set the intensity and emission angle of the emitted light according to actual requirements;

[0049] Furthermore, such as Figure 2 As shown, the color temperature and illuminance receiver 7 divides the real-time receiving area into N color temperature and illuminance receiving areas, where the value of N is set according to process requirements. Each color temperature and illuminance receiving area receives independently, and the color temperature and illuminance of each area are measured.

[0050] Furthermore, the data acquisition card 11 is connected to the color temperature and illuminance receiver 7 via the first high-frequency data line 10, converting the analog information acquired by the color temperature and illuminance receiver 7 into digital signals.

[0051] Furthermore, the data processor 14 and the data acquisition card 11 are connected via a second high-frequency data line 12. By combining the phase function theory of a single bubble with the Mie scattering theory of a bubble group, the size and position of the bubble are inversely determined using the acquired digital signal.

[0052] Furthermore, the display device 16 is connected to the data processor 14 via a fourth high-frequency data line 15, which can display the final result.

[0053] Furthermore, the data processor 14 uses the obtained bubble size and position, along with the relationship between various parameters obtained through deep learning and the bubble, to inversely determine the required thin film preparation parameters for real-time control.

[0054] Furthermore, the substrate moving feed device 2, the multi-layer shading and environmental parameter control device 1, and the data processor 14 form a negative feedback closed-loop control system. That is, the substrate moving feed device 2 adjusts the feed speed in real time according to the bubble generation situation calculated by the data processor 14, the multi-layer shading and environmental parameter control device 1 adjusts the internal temperature and humidity in real time according to the bubble generation situation calculated by the data processor 14, and the adjustable slit coating head 6 adjusts the blade height in real time according to the bubble generation situation calculated by the data processor.

[0055] The working principle of this invention is as follows:

[0056] In the particulate thin film preparation process, the first stable balance adjustment device 3 above the light emitting device 4 is adjusted according to requirements, and the appropriate angle and light intensity are selected to emit incident light. The incident light passes through the newly prepared thin film and transparent substrate 8 and enters the color temperature and illuminance receiver 7. Subsequently, the color temperature and illuminance data collected from different areas of the color temperature and illuminance receiver 7 are imported into the data acquisition card 11 through the first high-frequency data line 10, converting the analog information collected by the color temperature and illuminance receiver 7 into digital signals. Then, it is imported into the data processor 14 through the second high-frequency data line 12, and the size, position, and density function of the bubble are calculated by using the phase function theory of a single bubble and the Mie scattering theory of a bubble swarm. Finally, the results are imported into the display device 16 for real-time display through the fourth high-frequency data line 15, and fed back to the substrate moving feed device 2, the adjustable slit coating head 6, and the multi-layer light-shielding and environmental parameter control device 1 through the third high-frequency data line 13, so as to adjust the substrate moving speed, blade height, temperature, humidity, and other parameters in real time, and finally obtain an ideal bubble-free thin film.

[0057] As described above, those skilled in the art can make various other corresponding changes and modifications based on the technical solutions and concepts of this invention, and all such changes and modifications should fall within the protection scope of the claims of this invention.

Claims

1. A device for detecting bubbles during thin film preparation, characterized in that: It includes a multi-layer light-shielding and environmental parameter control device (1), a substrate moving and feeding device (2), two stable balance adjustment devices, a light emitting device (4), an adjustable slit coating head (6), a color temperature and illuminance receiver (7), a transparent substrate (8), a coating machine control base (9), a high-frequency data cable, a data acquisition card (11), a data processor (14), and a display device (16). The substrate moving and feeding device (2) is installed above the coating machine control base (9); The transparent substrate (8) is connected to the substrate moving and feeding device (2) via a connector and is located above the substrate moving and feeding device (2); The first stabilizing balance adjustment device (3) is installed below the transparent substrate (8) via an adjustable bearing and above the substrate moving feed device (2) to control the balance and stability of the substrate and receiver; The color temperature illuminance receiver (7) is attached to the bottom of the transparent substrate (8) and is located between the transparent substrate (8) and the first stable balance adjustment device (3); The adjustable slit coating head (6) is located above the transparent substrate (8) and is used for thin film preparation. The height of the slit coating head (6) is adjusted in real time by computer control. The second stabilizing balance adjustment device (5) and the adjustable slit coating head (6) are installed on the main support to control the balance and stability of the light emitting device (4); The light emitting device (4) is installed below the second stable balance adjustment device (5), above the transparent substrate (8), and in front of the adjustable slit coating head (6); The multi-layer shading and environmental parameter control device (1) includes multiple layers of red and black thick curtains, which form a closed space, and a temperature and humidity regulating device is installed in the closed space. The substrate moving feed device (2), two stable balance adjustment devices, light emitting device (4), adjustable slit coating head (6), color temperature illuminance receiver (7), transparent substrate (8), and coating machine control base (9) are placed inside the enclosed space. The data acquisition card (11) is connected to the color temperature and illuminance receiver (7) through the first high-frequency data line (10) to convert the analog information acquired by the color temperature and illuminance receiver (7) into digital signals; The data processor (14) and the data acquisition card (11) are connected through the second high-frequency data line (12). By combining the phase function theory of a single bubble with the Mie scattering theory of a bubble group, the size and position of the bubble are calculated by using the acquired digital signal. The display device (16) and the data processor (14) are connected via a fourth high-frequency data line (15) to display the final result; The color temperature and illuminance receiver (7) divides the real-time receiving area into N color temperature and illuminance receiving areas, where the value of N is set according to the process requirements. The substrate moving feed device (2), the multi-layer shading and environmental parameter control device (1) and the data processor (14) are a negative feedback closed-loop control system. That is, the substrate moving feed device (2) adjusts the feed speed in real time according to the bubble generation situation calculated by the data processor (14), the multi-layer shading and environmental parameter control device (1) adjusts the internal temperature and humidity in real time according to the bubble generation situation calculated by the data processor (14), and the adjustable slit coating head (6) adjusts the blade height in real time according to the bubble generation situation calculated by the data processor (14).

2. The bubble detection device in the thin film preparation process according to claim 1, characterized in that: The light emitting device (4) sets the intensity and angle of the emitted light according to actual requirements.

3. The bubble detection device in the thin film preparation process according to claim 1, characterized in that: The data processor (14) uses the obtained bubble size and position, and the relationship between the parameters obtained by deep learning and the bubble, to reverse the real-time control of the required thin film preparation parameters.

4. A method for controlling bubbles during thin film preparation, comprising using a bubble detection device for thin film preparation as described in any one of claims 1-3, characterized in that: Includes the following steps: A. Adjust the first stable balance adjustment device (3) below the light emitting device (4) according to the requirements, and select the appropriate angle and light intensity to emit incident light; the incident light passes through the newly prepared thin film and transparent substrate (8) and enters the color temperature illuminance receiver (7). B. Color temperature and illuminance data collected from different areas of the color temperature and illuminance receiver (7) are imported into the data acquisition card (11) through the first high-frequency data line (10) to convert the analog information collected by the color temperature and illuminance receiver (7) into digital signals. C. The data is imported into the data processor (14) through the second high-frequency data line (12), and the size, position and density function of the bubble are obtained by using the phase function theory of a single bubble and the Mie scattering theory of a bubble swarm. D. The bubble size, position and bubble group density function obtained by reverse calculation are imported into the display device (16) through the fourth high frequency data line (15) for real-time display, and fed back to the substrate moving feed device (2), adjustable slit coating head (6) and multi-layer light shielding and environmental parameter control device (1) through the third high frequency data line (13) to adjust the substrate moving speed, blade height, temperature and humidity parameters in real time, and finally obtain a film without bubble defects.

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