Coupled type standing wave linear ultrasonic motor with compound driving foot

Abstract

The application provides a coupled standing wave linear ultrasonic motor with composite driving feet, comprising a stator, an upper mover and a lower mover, the stator comprises a metal elastic body, a left piezoelectric ceramic, a right piezoelectric ceramic and composite driving feet, the metal elastic body is provided with the left piezoelectric ceramic and the right piezoelectric ceramic at two ends respectively, the metal elastic body adopts a non-uniform beam structure, the upper and lower surfaces of the metal elastic body are respectively provided with a right upper groove and a left lower groove, the upper and lower surfaces of the metal elastic body are respectively provided with a composite driving foot group, the composite driving foot group comprises a near-groove composite driving foot and a far-groove composite driving foot, and the near-groove composite driving foot and the far-groove composite driving foot are both elliptical motion trajectories; the application can realize the elliptical driving foot trajectory, improve the driving capacity of the motor, provide smoother motion, improve the stability and output performance of the motor by setting the composite driving foot group without changing the excitation mode and working mode.

Description

Technical Field

[0001] This invention relates to a coupled standing wave linear ultrasonic motor with a composite drive foot, belonging to the field of ultrasonic motor technology. Background Technology

[0002] Beam-type standing wave linear ultrasonic motors are characterized by their simple structure, offering advantages such as small size and minimal structural complexity. Currently, commonly used beam-type standing wave linear ultrasonic motors include single-mode linear ultrasonic motors, composite linear ultrasonic motors, and coupled linear ultrasonic motors. Among these, the conventional composite linear ultrasonic motor exhibits an elliptical motion trajectory for its driving foot, resulting in a relatively complex excitation structure and drive mechanism. In contrast, single-mode and coupled linear ultrasonic motors employ a slanted linear trajectory for their driving foot, leading to simpler excitation structures and drives.

[0003] In current single-mode linear ultrasonic motors, the vibration of the driving foot end of the coupled standing wave linear ultrasonic motor in the horizontal and vertical directions, although the deformation of the driving foot itself will produce a certain phase difference, the phase difference is small, so the motion trajectory of the driving foot end is close to an oblique straight line.

[0004] However, for small linear ultrasonic motors, due to the influence of size, drive foot arrangement, and manufacturing processes, the drive feet are generally relatively soft, and the driving capability of the inclined linear trajectory at the end of the drive foot is lower than that of the elliptical trajectory. Existing coupled standing wave linear ultrasonic motors have relatively low driving capability of the inclined linear trajectory at the end of the drive foot.

[0005] The above-mentioned problems should be considered and solved in the design process of coupled standing wave linear ultrasonic motors with composite drive feet. Summary of the Invention

[0006] The purpose of this invention is to provide a coupled standing wave linear ultrasonic motor with a composite drive foot to solve the problem in the prior art where the drive foot has an oblique linear motion trajectory and the motor's driving capability needs to be improved.

[0007] The technical solution of this invention is:

[0008] A coupled standing wave linear ultrasonic motor with a composite drive foot includes a stator, an upper mover, and a lower mover, with the stator positioned between the upper and lower movers. The stator comprises a metallic elastomer, a left-side piezoelectric ceramic, a right-side piezoelectric ceramic, and a composite drive foot. The metallic elastomer has a left-side piezoelectric ceramic and a right-side piezoelectric ceramic at its two ends, respectively. The metallic elastomer employs a non-uniform beam structure. The upper and lower surfaces of the metallic elastomer are respectively provided with an upper right groove and a lower left groove. Composite drive foot assemblies are provided on the upper and lower surfaces of the metallic elastomer, and each composite drive foot assembly includes a near-groove composite drive foot. The driving foot and the distal groove composite driving foot, the near groove composite driving foot and the distal groove composite driving foot all have elliptical motion trajectories. The near groove composite driving foot and the distal groove composite driving foot are respectively provided on both sides of the upper right groove and the lower left groove. The distance from the distal groove composite driving foot on the upper surface of the metal elastomer to the upper right groove is greater than the distance from the near groove composite driving foot on the upper surface of the metal elastomer to the upper right groove. The distance from the distal groove composite driving foot on the lower surface of the metal elastomer to the lower left groove is greater than the distance from the near groove composite driving foot on the lower surface of the metal elastomer to the lower left groove.

[0009] Furthermore, the near-groove composite drive foot includes a near-groove metal plate, a near-groove thin damping structure, and a near-groove small mass block. One end of the near-groove metal plate serves as the connecting end of the near-groove composite drive foot and is connected to a metal elastomer. The other end of the near-groove metal plate serves as the driving end of the near-groove composite drive foot and is provided with a near-groove small mass block. The near-groove thin damping structure is provided in the middle of the near-groove metal plate.

[0010] Furthermore, a gap is provided between the near-groove thin damping structure and the metal elastomer, and between the near-groove small mass block and the metal elastomer. Furthermore, the far-groove composite drive foot includes a far-groove metal plate, a far-groove thick damping structure, and a far-groove large mass block. One end of the far-groove metal plate serves as the connecting end of the far-groove composite drive foot and is connected to the metal elastomer. The other end of the far-groove metal plate serves as the driving end of the far-groove composite drive foot and is provided with the far-groove large mass block. The far-groove thick damping structure is provided in the middle of the far-groove metal plate.

[0011] Furthermore, gap two is provided between the thick damping structure of the far groove and the metal elastomer and the large mass block of the far groove, respectively.

[0012] Furthermore, the thickness of the thick damping structure in the far groove is greater than the thickness of the thin damping structure in the near groove, and the volume of the large mass block in the far groove is greater than the volume of the small mass block in the near groove.

[0013] Furthermore, the two ends of the metal elastomer are respectively provided with a left groove and a right groove, with the left piezoelectric ceramic disposed in the left groove and the right piezoelectric ceramic disposed in the right groove.

[0014] Furthermore, the metal elastomer has a coupled vibration working mode of one longitudinal and two bending directions. The surface particles of the metal elastomer vibrate synchronously in the horizontal and vertical directions, which drives the roots of the far groove metal plate and the near groove metal plate of the composite drive foot assembly connected to the metal elastomer to vibrate synchronously in the horizontal and vertical directions. The damping effect of the far groove thick damping structure on the far groove metal plate and the near groove thin damping structure on the near groove metal plate in the horizontal and vertical directions are different, respectively. This causes different hysteresis effects in the horizontal and vertical vibrations of the drive end of the far groove composite drive foot and the drive end of the near groove composite drive foot, respectively, forming a phase difference. As a result, the motion trajectory of the ends of the far groove composite drive foot and the ends of the near groove composite drive foot is an elliptical motion trajectory.

[0015] The beneficial effects of this invention are:

[0016] I. This type of coupled standing wave linear ultrasonic motor with composite drive feet can achieve an elliptical drive foot trajectory without changing the excitation method or working mode, by setting up a composite drive foot group. This can improve the driving capability of the motor, provide smoother motion, reduce impact and vibration on the motor, and improve the stability and output performance of the motor.

[0017] II. Based on the traditional straight beam coupled standing wave linear ultrasonic motor, this invention optimizes the elliptic trajectory of the driving foot by designing a composite driving foot assembly containing a near-slot thin damping structure and a far-slot thick damping structure. It has the advantages of simple design, compact structure and convenient excitation, and can improve the output trajectory of the driving foot and enhance the driving performance of the motor.

[0018] Third, this type of coupled standing wave linear ultrasonic motor with composite drive feet is designed with a composite drive foot assembly containing a large mass block in the far slot and a small mass block in the near slot. This can further reduce the influence of the thick damping structure in the far slot and the thin damping structure in the near slot on the amplitude, effectively improve the amplitude at the end of the motor drive foot, and improve the driving performance of the motor. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a coupled standing wave linear ultrasonic motor with a composite drive foot according to an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the stator structure in the embodiment;

[0021] Figure 3 This is a schematic diagram illustrating the inverse piezoelectric effect of the piezoelectric ceramic on the left side of the embodiment during excitation;

[0022] Figure 4 This is a vibration cloud diagram of a coupled standing wave linear ultrasonic motor with a composite drive foot in an embodiment;

[0023] Figure 5 This is a schematic diagram of the running trajectory of the far-groove composite driving foot on the upper surface of the metal elastomer in the embodiment;

[0024] Figure 6 This is a schematic diagram of the running trajectory of the near-groove composite drive foot on the lower surface of the metal elastomer in the embodiment;

[0025] Wherein: 1-upper mover, 2-lower mover, 3-metal elastomer, 4-left piezoelectric ceramic, 5-right piezoelectric ceramic, 6-upper right groove, 7-lower left groove, 8-near groove composite drive foot, 9-far groove composite drive foot, 10-left groove, 11-right groove.

[0026] 81-Near groove metal plate, 82-Near groove thin damping structure, 83-Near groove small mass block, 84-Gap one;

[0027] 91-Long-slot metal plate, 92-Long-slot thick damping structure, 93-Long-slot large mass block, 94-Gap II;

[0028] 1L, 2L, 3L, 4L, 5L, 6L - six degrees of freedom of the excitation piezoelectric ceramic, XYZ - spatial coordinate system, E - direction of applied electric field, P - ceramic polarization direction, V1 - direction of movement of the upper mover, V2 - direction of movement of the lower mover. Detailed Implementation

[0029] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0030] Example

[0031] A coupled standing wave linear ultrasonic motor with a composite drive foot, such as Figure 1The system includes a stator, an upper mover 1, and a lower mover 2, with the stator positioned between the upper mover 1 and the lower mover 2. The stator comprises a metallic elastomer 3, a left-side piezoelectric ceramic 4, a right-side piezoelectric ceramic 5, and composite drive feet. The metallic elastomer 3 has a left-side piezoelectric ceramic 4 and a right-side piezoelectric ceramic 5 at its two ends. The metallic elastomer 3 employs a non-uniform beam structure. The upper and lower surfaces of the metallic elastomer 3 are respectively provided with an upper right groove 6 and a lower left groove 7. The upper and lower surfaces of the metallic elastomer 3 are respectively provided with composite drive foot assemblies, which include a near-groove composite drive foot 8 and a far-groove composite drive foot 9. Both the near-groove composite drive foot 8 and the far-groove composite drive foot 9 have elliptical motion trajectories. The near-groove composite drive foot 8 and the far-groove composite drive foot 9 are respectively provided on both sides of the upper right groove 6 and the lower left groove 7. The distance from the far-groove composite drive foot 9 on the upper surface of the metal elastomer 3 to the upper right groove 6 is greater than the distance from the near-groove composite drive foot 8 on the upper surface of the metal elastomer 3 to the upper right groove 6. The distance from the far-groove composite drive foot 9 on the lower surface of the metal elastomer 3 to the lower left groove 7 is greater than the distance from the near-groove composite drive foot 8 on the lower surface of the metal elastomer 3 to the lower left groove 7.

[0032] This type of coupled standing wave linear ultrasonic motor with a composite drive foot can achieve an elliptical drive foot trajectory without changing the excitation method or working mode. By setting the composite drive foot group, it can improve the driving capability of the motor, provide smoother motion, reduce impact and vibration on the motor, and improve the stability and output performance of the motor.

[0033] like Figure 2 The near-groove composite driving foot 8 includes a near-groove metal plate 81, a near-groove thin damping structure 82, and a near-groove small mass block 83. One end of the near-groove metal plate 81 serves as the connecting end of the near-groove composite driving foot 8, connected to the metal elastic body 3. The other end of the near-groove metal plate 81 serves as the driving end of the near-groove composite driving foot 8 and is equipped with the near-groove small mass block 83. The near-groove thin damping structure 82 is located in the middle of the near-groove metal plate 81. The near-groove small mass block 83 at the end of the near-groove metal plate 81 of the near-groove composite driving foot 8 can increase the amplitude of the elliptical trajectory at the end of the near-groove composite driving foot 8. A gap 84 is provided between the near-groove thin damping structure 82 and the metal elastic body 3 and the near-groove small mass block 83, respectively, which can reduce the influence of the near-groove thin damping structure 82 on the amplitude of the end of the near-groove composite driving foot 8.

[0034] like Figure 2The distal groove composite drive foot 9 includes a distal groove metal plate 91, a distal groove thick damping structure 92, and a distal groove large mass block 93. One end of the distal groove metal plate 91 serves as the connecting end of the distal groove composite drive foot 9 and is connected to the metal elastic body 3. The other end of the distal groove metal plate 91 serves as the driving end of the distal groove composite drive foot 9 and is equipped with the distal groove large mass block 93. The distal groove thick damping structure 92 is located in the middle of the distal groove metal plate 91. A gap 94 is provided between the distal groove thick damping structure 92 and the metal elastic body 3 and the distal groove large mass block 93, which can reduce the influence of the distal groove thick damping structure 92 on the end amplitude of the distal groove composite drive foot 9.

[0035] like Figure 2 A right-upper groove 6 and a left-lower groove 7 are provided on the metal elastomer 3, making the metal elastomer 3 an asymmetric beam, thus giving the metal elastomer 3 a coupled mode of one longitudinal direction and two bends. The connecting ends of the near-groove composite driving foot 8 and the far-groove composite driving foot 9 are connected to the metal elastomer 3, and the connecting ends of the near-groove composite driving foot 8 and the far-groove composite driving foot 9 vibrate together with the metal elastomer 3. The time phase difference between the horizontal and vertical vibrations of the connecting ends of the near-groove composite driving foot 8 and the far-groove composite driving foot 9 is 0. Due to the influence of the right-upper groove 6 and the left-lower groove 7, the horizontal and vertical amplitudes of the connecting ends of the near-groove composite driving foot 8 and the far-groove composite driving foot 9 are not consistent, with the connecting end of the far-groove driving foot 9 having a larger horizontal amplitude and a smaller vertical amplitude.

[0036] like Figure 2 To achieve optimal driving trajectory and driving effect for the near-groove composite drive foot 8 and the far-groove composite drive foot 9, the thickness of the damping material and the size of the mass block of the far-groove composite drive foot 9 are both greater than those of the near-groove composite drive foot 8. This ensures that the near-groove composite drive foot 8 and the far-groove composite drive foot 9 have similar horizontal and vertical amplitudes. At the same time, the phase difference between the horizontal and vertical vibrations is increased to bring them closer to 90°, thereby making the motion trajectory of the near-groove composite drive foot 8 and the far-groove composite drive foot 9 an elliptical motion trajectory that is close to a perfect circle.

[0037] like Figure 2 The metal elastomer 3 has a left groove 10 and a right groove 11 at its two ends, respectively. The piezoelectric ceramic 4 on the left side is disposed in the left groove 10, and the piezoelectric ceramic 5 on the right side is disposed in the right groove 11. The metal elastomer 3 includes a middle part of the elastomer, a left upper end protruding structure and a left lower end protruding structure disposed at one end of the middle part of the elastomer, and a right upper end protruding structure and a right lower end protruding structure disposed at the other end of the middle part of the elastomer. The middle part of the elastomer, the left upper end protruding structure and the left lower end protruding structure together form the left groove 10, and the middle part of the elastomer, the right upper end protruding structure and the right lower end protruding structure together form the right groove 11.

[0038] like Figure 4 The metallic elastomer 3 exhibits a coupled vibration mode with one longitudinal and two bending phases. The surface particles of the metallic elastomer 3 vibrate synchronously in both the horizontal and vertical directions, driving the synchronous vibration of the distal slot metal plate 91 and the proximal slot metal plate 81 of the composite drive foot assembly connected to the metallic elastomer 3 in both directions. The thick damping structure 92 in the distal slot and the thin damping structure 82 in the proximal slot exert different damping effects on the distal slot metal plate 91 and the proximal slot metal plate 81, respectively, resulting in different hysteresis effects on the driving ends of the distal slot composite drive foot 9 and the proximal slot composite drive foot 8 in the horizontal and vertical directions, creating a phase difference. Consequently, the motion trajectories of the ends of the distal slot composite drive foot 9 and the proximal slot composite drive foot 8 are elliptical. Elliptical trajectories provide smoother motion, reduce impact and vibration on the motor, and improve the motor's stability and output performance.

[0039] This invention, based on the traditional straight beam coupled standing wave linear ultrasonic motor, optimizes the ellipticity of the drive foot trajectory by designing a composite drive foot assembly containing a near-slot thin damping structure 82 and a far-slot thick damping structure 92. It has the advantages of simple design, compact structure and convenient excitation, and can improve the output trajectory of the drive foot and enhance the drive performance of the motor.

[0040] This type of coupled standing wave linear ultrasonic motor with a composite drive foot has piezoelectric ceramics 4 and 5 with vertical polarization directions. When an alternating electric field is applied in the horizontal direction, under the action of the inverse piezoelectric effect, the piezoelectric ceramics 4 and 5 undergo d-axis polarization. 15 Torsional vibration excites bending vibration in the metallic elastomer 3. Due to the coupling effect, longitudinal vibration in the metallic elastomer 3 is also excited synchronously. Since the longitudinal and bending vibrations are in phase, the motion trajectories of the connecting ends of the far-slot composite drive foot 9 and the near-slot composite drive foot 8 are both oblique straight lines. Because the far-slot thick damping structure 92 and the near-slot thin damping structure 82 have different damping effects on both longitudinal and bending vibrations, a large phase difference is generated between the longitudinal and bending vibrations at the driving ends of the far-slot composite drive foot 9 and the near-slot composite drive foot 8, respectively. The running trajectories of the driving ends of the far-slot composite drive foot 9 and the near-slot composite drive foot 8 change from approximately oblique straight lines to elliptical motion trajectories. This reduces the impact and vibration on the motor, improving the motor's stability and output performance.

[0041] This coupled standing wave linear ultrasonic motor with a composite drive foot is designed with a composite drive foot assembly containing a large mass block 93 in the far slot and a small mass block 83 in the near slot. This can further reduce the influence of the thick damping structure 92 in the far slot and the thin damping structure 82 in the near slot on the amplitude, effectively improve the amplitude at the end of the motor drive foot, and enhance the motor's driving performance.

[0042] This type of coupled standing wave linear ultrasonic motor with composite drive feet has a distal slot composite drive foot 9 and a proximal slot composite drive foot 8, each composed of a vibrating metal plate and a damping material bonded to it. The vibrating metal plate is a thin sheet structure, with one end connected to the stator metal elastic body 3 and the other end having an additional mass block. The damping material is only bonded to the metal plate and not to the metal elastic body 3 or the mass block. When the metal elastic body 3 vibrates, the difference in damping effect in different directions will change the original oblique linear motion of the metal plate end into elliptical motion, thus improving the driving capability of the motor.

[0043] The near-slot composite drive foot 8 and the far-slot composite drive foot 9 in this embodiment of the coupled standing wave linear ultrasonic motor with composite drive feet achieve an elliptical motion trajectory as detailed below:

[0044] This coupled standing wave linear ultrasonic motor with a composite drive foot uses a left piezoelectric ceramic 4 and a right piezoelectric ceramic 5 as excitation piezoelectric ceramics. Both piezoelectric ceramics 4 and 5 are polarized along the +Z axis and are connected to a power source, applying an electric field with a 180° phase difference. Under the inverse piezoelectric effect, the left and right piezoelectric ceramics 4 and 5 undergo torsional vibrations with a 180° phase difference, generating incident traveling waves within the metallic elastic body 3. These traveling waves superimpose within the metallic elastic body 3 to form a standing wave, exciting the second-order bending vibration of the metallic elastic body 3. Due to the coupling effect, the first-order longitudinal vibration is synchronously excited.

[0045] like Figure 3 The piezoelectric ceramics 4 on the left and 5 on the right are located in a Cartesian coordinate system XYZ, with the polarization direction being the positive direction of the 3L degree of freedom and the applied electric field direction being the positive direction of the 1L degree of freedom. The deformation of the piezoelectric ceramic 4 on the left is as follows: Figure 3 The dashed line in the middle indicates the negative direction of the 5L degree of freedom. The piezoelectric ceramics 4 on the left and 5 on the right always twist in the same direction under the action of the same alternating electric field, thereby driving the second-order bending vibration component of the metal elastic body 3 and coupling out the first-order longitudinal vibration component.

[0046] Figure 4 This is a vibration contour map of a coupled standing wave linear ultrasonic motor with a composite drive foot in an embodiment, where a darker color indicates a larger vertical amplitude. For example... Figure 4Under the influence of the metal elastic body 3, the connecting ends of the far-groove composite drive foot 9 and the near-groove composite drive foot 8 also undergo longitudinal and flexural vibrations, with their trajectories being oblique straight lines. Under the respective action of the far-groove thick damping structure 92 and the near-groove thin damping structure 82, the longitudinal and flexural phases of the driving ends of the far-groove composite drive foot 9 and the near-groove composite drive foot 8 are shifted, with inconsistent magnitudes of shift, thus forming a phase difference. Therefore, the motion trajectories of the driving ends of the far-groove composite drive foot 9 and the near-groove composite drive foot 8 are both elliptical motion trajectories.

[0047] like Figure 4 To obtain a larger amplitude, a large mass block 93 in the far groove and a small mass block 83 in the near groove are added to the driving end of the far groove composite driving foot 9 and the driving end of the near groove composite driving foot 8, respectively.

[0048] Figure 5 This is a schematic diagram of the running trajectory of the far-groove composite drive foot 9 on the upper surface of the metal elastomer 3 in the embodiment. For example... Figure 5 At the upper tangent of the elliptical trajectory of the far-groove composite drive foot 9, its movement direction is to the right, which can drive the upper mover 1 to move to the right. The movement trajectory of the far-groove composite drive foot 9 on the lower surface is the same, and its movement direction at the lower tangent is to the left, which can drive the lower mover 2 to move to the left.

[0049] Figure 6 This is a schematic diagram of the running trajectory of the near-groove composite drive foot 8 on the lower surface of the metal elastomer 3 in the embodiment. For example... Figure 6 At the lower tangent of the elliptical trajectory of the near-groove composite drive foot 8, its movement direction is to the left, which can drive the lower mover 2 to move to the left. The movement trajectory of the near-groove composite drive foot 8 on the upper surface is the same, and its movement direction at the upper tangent is to the right, which can drive the upper mover 1 to move to the right.

[0050] The above embodiments are merely illustrative of the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solution based on the technical concept proposed in this invention shall fall within the scope of protection of this invention.

Claims

1. A coupled standing wave linear ultrasonic motor with a composite driving foot, comprising a stator, an upper mover, and a lower mover, the stator being disposed between the upper and lower movers, the stator comprising a metallic elastomer, a left piezoelectric ceramic, a right piezoelectric ceramic, and a composite driving foot, wherein the two ends of the metallic elastomer are respectively provided with left and right piezoelectric ceramics, characterized in that: The metal elastomer adopts a non-uniform beam structure. The upper and lower surfaces of the metal elastomer are respectively provided with an upper right groove and a lower left groove. The upper and lower surfaces of the metal elastomer are respectively provided with a composite driving foot group. The composite driving foot group includes a near groove composite driving foot and a far groove composite driving foot. Both the near groove composite driving foot and the far groove composite driving foot have elliptical motion trajectories. Near groove composite driving feet and far groove composite driving feet are provided on both sides of the upper right groove and both sides of the lower left groove, respectively. The distance from the far groove composite driving foot on the upper surface of the metal elastomer to the upper right groove is greater than the distance from the near groove composite driving foot on the upper surface of the metal elastomer to the upper right groove. The distance from the far groove composite driving foot on the lower surface of the metal elastomer to the lower left groove is greater than the distance from the near groove composite driving foot on the lower surface of the metal elastomer to the lower left groove. The near-groove composite drive foot includes a near-groove metal plate, a near-groove thin damping structure, and a near-groove small mass block. One end of the near-groove metal plate serves as the connecting end of the near-groove composite drive foot and is connected to a metal elastomer. The other end of the near-groove metal plate serves as the driving end of the near-groove composite drive foot and is provided with a near-groove small mass block. The near-groove thin damping structure is provided in the middle of the near-groove metal plate. The far-groove composite drive foot includes a far-groove metal plate, a far-groove thick damping structure, and a far-groove large mass block. One end of the far-groove metal plate serves as the connecting end of the far-groove composite drive foot and is connected to a metal elastomer. The other end of the far-groove metal plate serves as the driving end of the far-groove composite drive foot and is provided with a far-groove large mass block. The far-groove thick damping structure is provided in the middle of the far-groove metal plate. The thickness of the thick damping structure in the far groove is greater than the thickness of the thin damping structure in the near groove, and the volume of the large mass block in the far groove is greater than the volume of the small mass block in the near groove.

2. The coupled standing wave linear ultrasonic motor with a composite drive foot as described in claim 1, characterized in that: A gap is provided between the near-groove thin damping structure and the metal elastomer, and between the near-groove small mass block and the gap.

3. The coupled standing wave linear ultrasonic motor with a composite drive foot as described in claim 1, characterized in that: Gap 2 is provided between the thick damping structure of the far groove and the metal elastomer and the large mass block of the far groove.

4. The coupled standing wave linear ultrasonic motor with a composite drive foot as described in any one of claims 1-3, characterized in that: The metal elastomer has a left groove and a right groove at both ends, with the piezoelectric ceramic on the left side located in the left groove and the piezoelectric ceramic on the right side located in the right groove.

5. The coupled standing wave linear ultrasonic motor with a composite drive foot as described in claim 3, characterized in that: The metallic elastomer has a coupled vibration working mode of one longitudinal and two bending directions. The surface particles of the metallic elastomer vibrate synchronously in the horizontal and vertical directions, which drives the roots of the far slot metal plate and near slot metal plate of the composite drive foot assembly connected to the metallic elastomer to vibrate synchronously in the horizontal and vertical directions. The damping effect of the thick damping structure of the far slot on the far slot metal plate and the thin damping structure of the near slot on the near slot metal plate in the horizontal and vertical directions are different, respectively. This causes different hysteresis effects in the horizontal and vertical vibrations of the drive end of the far slot composite drive foot and the drive end of the near slot composite drive foot, respectively, forming a phase difference. As a result, the motion trajectories of the ends of the far slot composite drive foot and the ends of the near slot composite drive foot are elliptical motion trajectories.

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