一种高分辨光热显微测量装置和测量方法
By combining ring-pumped vertical focusing with a coaxial fiber probe nanolight source, the problem of measuring the absorption distribution and invisible defects of optical materials in existing technologies has been solved, achieving high-resolution and high-sensitivity photothermal microscopy measurements.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
- Filing Date
- 2023-08-28
- Publication Date
- 2026-07-17
AI Technical Summary
Existing high spatial resolution measurement techniques cannot effectively measure the absorption distribution and invisible defects of optical materials, and fluorescence microscopy is limited by the fluorescence effect of materials, with measurement resolution only reaching the submicron level.
High-resolution photothermal microscopy is achieved by using ring-pumped vertical focusing excitation, combined with a coaxial fiber probe nanolight source and coaxial backscattering detection signal collection. The ring-pumped beam is focused on the sample and the photothermal effect is detected by the fiber probe. The absorption value is demodulated by combining transmission and scattering signals.
It achieves high-resolution photothermal absorption detection in the range of 10nm to 100nm, and can measure the absorption distribution of transparent and opaque samples. It avoids the parasitic effect of transmission pump light on the detection signal, and improves the sensitivity and accuracy of the measurement.
Smart Images
Figure CN117074372B_ABST