A diffuser plate device and a method of manufacturing the same, a vehicle-mounted laser radar system

Abstract

The application provides a diffusion plate device and a method for manufacturing the same, and a vehicle-mounted laser radar system. The diffusion plate device comprises a substrate and a microlens array. The microlens array comprises multiple rows and multiple columns of microlenses arranged on the surface of the substrate. The slope of the surface profile of each microlens gradually increases from the center to the edge in the direction of a first axis and / or a second axis. The direction of the first axis and the direction of the second axis are orthogonal. The above diffusion plate structure of the application can produce a position space diffusion with distortion. When the above diffusion plate structure is applied to the transmitting end of the vehicle-mounted laser radar, it is equivalent to introducing a distortion in the transmitting end which can complement the distortion generated by the receiving end lens, so that the final receiving image after passing through the receiving end lens has no distortion, and the detection effect of the vehicle-mounted laser radar is improved.

Description

Technical Field

[0001] This application relates to the field of optical device design and manufacturing, and more specifically, to a diffuser plate device and a method for manufacturing the same, and an automotive lidar system. Background Technology

[0002] Vehicle-mounted lidar typically consists of two parts: a transmitter and a receiver. A laser emits a beam of light towards the target area, which reflects the beam back to the detector. The reflected beam carries image information, and the detector receives both the beam and the information to detect the target area.

[0003] However, due to the distortion in the imaging of most receiving lenses, the imaging effect of the receiving lenses is affected, which in turn affects the detection effect of the vehicle-mounted lidar. Summary of the Invention

[0004] This application provides a diffuser plate device and its fabrication method that can at least partially solve the above-mentioned problems existing in the related technologies, as well as an on-vehicle lidar system.

[0005] This application provides a diffuser plate device, comprising: a substrate and a microlens array. The microlens array includes multiple rows and columns of microlenses disposed on the surface of the substrate; wherein the slope of the surface profile of each microlens gradually increases from the center to the edge in the direction of its first axis and / or the direction of its second axis; the directions of the first axis and the second axis are orthogonal.

[0006] In some embodiments, each microlens projects a square along its optical axis; wherein the projection includes a first region and a second region. The first region is a region whose distance from the center of the projection is less than or equal to half the side length of the square, and the second region is a region whose distance from the center of the projection is greater than half the side length of the square. The portion of the microlens corresponding to the first region adopts a first surface shape; the portion of the microlens corresponding to the second region adopts a second surface shape; wherein the slope of the first surface shape is less than the slope of the second surface shape.

[0007] In some implementations, the first surface shape satisfies the following functional formula:

[0008]

[0009] The second face satisfies the following functional formula:

[0010]

[0011] Where z represents the height of a point in the microlens surface from the reference plane, X represents the distance from the central axis in the direction of the first axis, Y represents the distance from the central axis in the direction of the second axis, and C... xC represents the curvature in the direction of the first axis. y K represents the curvature in the direction of the second axis. x K represents the conic coefficient in the direction of the first axis. y The conic coefficient is represented in the direction of the second axis; A represents the distortion coefficient of the surface function.

[0012] In some implementations, the surface distortion coefficient A is greater than 0.

[0013] In some implementations, the surface distortion coefficient A is greater than or equal to and less than or equal to Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0014] In some implementations, the surface distortion coefficient A is less than 0.

[0015] In some implementations, the surface distortion coefficient A is greater than or equal to and less than or equal to Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0016] A method for manufacturing a diffuser plate device includes: forming a plurality of microlenses in the form of a microlens array on the surface of a substrate, the microlens array including multiple rows and multiple columns of microlenses; wherein, during the formation process, the slope of the surface profile of each microlens in the direction of its first axis and / or the direction of its second axis gradually increases from the center position to the edge; the directions of the first axis and the second axis are orthogonal.

[0017] In some embodiments, each microlens projects a square along its optical axis. The projection includes a first region and a second region. The first region is located at a distance from the center of the projection that is less than or equal to half the side length of the square, and the second region is located at a distance from the center of the projection that is greater than half the side length of the square. The portion of the microlens corresponding to the first region adopts a first surface shape; the portion of the microlens corresponding to the second region adopts a second surface shape; wherein the slope of the first surface shape is less than the slope of the second surface shape.

[0018] In some implementations, the first surface shape satisfies the following functional formula:

[0019]

[0020] The second face satisfies the following functional formula:

[0021]

[0022] Where z represents the height of a point in the microlens surface from the reference plane, X represents the distance from the central axis in the direction of the first axis, Y represents the distance from the central axis in the direction of the second axis, and C... x C represents the curvature in the direction of the first axis. y K represents the curvature in the direction of the second axis. x K represents the conic coefficient in the direction of the first axis. y The conic coefficient is represented in the direction of the second axis; A represents the distortion coefficient of the surface function.

[0023] In some implementations, the surface distortion coefficient A is greater than 0.

[0024] In some implementations, the surface distortion coefficient A is greater than or equal to and less than or equal to Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0025] In some implementations, the surface distortion coefficient A is less than 0.

[0026] In some implementations, the surface distortion coefficient A is greater than or equal to and less than or equal to Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0027] A vehicle-mounted lidar system includes a transmitter and a receiver. The transmitter includes the diffuser device described above for emitting a detection laser. The receiver receives the information light carrying image information after the detection laser is reflected by the target area.

[0028] At least one embodiment of this application provides a diffuser device that, by setting the surface shape of the microlens so that the slope gradually increases approximately linearly from the center to the edge, enables the diffuser device to generate spatial diffusion with distortion. In particular, when the above-mentioned diffuser structure is applied to the transmitting end of an automotive LiDAR, it is equivalent to introducing a distortion at the transmitting end that can complement the distortion generated by the receiving end lens, thereby ensuring that the received image after passing through the receiving end lens is distortion-free and improving the detection effect of the automotive LiDAR. Attached Figure Description

[0029] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings.

[0030] Figure 1A This is a schematic diagram of the structure of a diffuser plate device according to one embodiment of this application;

[0031] Figure 1BThis is a schematic diagram of the structure of a microlens according to one embodiment of this application;

[0032] Figure 2 yes Figure 1B Top view of the microlens structure;

[0033] Figure 3 This is a diffusion pattern in angular space of a diffusion plate device according to one embodiment of this application;

[0034] Figure 4 This is a diffusion pattern in position space of a diffusion plate device according to one embodiment of this application;

[0035] Figure 5 This is the diffusion pattern in angular space of the diffusion plate device structure in Embodiment 1 of this application;

[0036] Figure 6 This is the diffusion pattern in the position space of the diffusion plate device structure in Embodiment 1 of this application;

[0037] Figure 7 This is the diffusion pattern in angular space of the diffusion plate device structure in Embodiment 2 of this application;

[0038] Figure 8 This is the diffusion pattern in the position space of the diffusion plate device structure in Embodiment 2 of this application;

[0039] Figure 9 This is the diffusion pattern in angular space of the diffusion plate device structure in Embodiment 3 of this application;

[0040] Figure 10 This is the diffusion pattern in the position space of the diffusion plate device structure in Embodiment 3 of this application;

[0041] Figure 11 This is a schematic diagram illustrating the acquisition of the diffusion image distortion coefficient of a diffusion plate device according to one embodiment of this application; and

[0042] Figure 12 This is a schematic diagram of obtaining the diffusion image distortion coefficient of a diffusion plate device according to another embodiment of this application. Detailed Implementation

[0043] To better understand this application, various aspects of this application will be described in more detail with reference to the accompanying drawings. It should be understood that these detailed descriptions are merely illustrative of exemplary embodiments of this application and are not intended to limit the scope of this application in any way. Throughout the specification, the same reference numerals refer to the same elements. The expression "and / or" includes any and all combinations of one or more of the associated listed items.

[0044] It should be noted that in this specification, the terms "first," "second," "third," etc., are used only to distinguish one feature from another and do not imply any limitation on the features, especially not any order of precedence. Therefore, without departing from the teachings of this application, the first part discussed herein may also be referred to as the second part, and vice versa.

[0045] In the accompanying drawings, the thickness, dimensions, and shapes of the parts have been slightly adjusted for ease of illustration. The drawings are for illustrative purposes only and are not drawn to scale. As used herein, the terms “approximately,” “about,” and similar terms are used as expressions of approximation, not as expressions of degree, and are intended to illustrate inherent deviations in measured or calculated values ​​that will be recognized by one of ordinary skill in the art.

[0046] It should also be understood that expressions such as "comprising," "including," "having," "containing," and / or "comprising" are open-ended rather than closed-ended expressions in this specification, indicating the presence of the stated features, elements, and / or components, but not excluding the presence of one or more other features, elements, components, and / or combinations thereof. Furthermore, when expressions such as "at least one of..." appear after a list of listed features, they modify the entire list of features, not just individual elements in the list. Additionally, when describing embodiments of this application, the word "may" is used to mean "one or more embodiments of this application." And the term "exemplary" is intended to refer to examples or illustrations.

[0047] Unless otherwise specified, all terms used herein (including engineering and technical terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It should also be understood that, unless expressly stated herein, terms defined in common dictionaries shall be interpreted as having the meaning consistent with their meaning in the context of the relevant art, and not as having an idealized or overly formalized meaning.

[0048] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0049] Figure 1A A schematic diagram of the structure of a diffuser plate device 100 according to one embodiment of this application is shown; Figure 1B The diagram shown is a schematic diagram of the structure of the microlens 121 in a diffuser plate device 100 according to one embodiment of the present application. Figure 2 What is shown is Figure 1B A top view of the microlens 121 structure.

[0050] In some embodiments, the diffuser device 100 includes a substrate 110 and a microlens array 120.

[0051] In the exemplary embodiments, the material of the substrate 110 is not particularly limited in this application. For example, resin, quartz glass, borosilicate glass, whiteboard glass and other optical glass can be used as the substrate 110.

[0052] A microlens array 120 is formed on the surface of a substrate 110. The microlens array 120 includes a plurality of microlenses 121. The plurality of microlenses 121 are arranged in rows and columns on the surface of the substrate 110 to form an array. Exemplarily, the horizontal direction can be the row direction of the microlens array 120 and the vertical direction can be the column direction of the microlens array 120.

[0053] like Figure 1A As shown, when forming a microlens array 120 on the surface of the substrate 110, the slope of the surface profile of each microlens 121 in the direction of its first axis x and / or second axis y gradually increases from the center to the edge. Wherein, as... Figure 1B As shown, the direction of the first axis x is orthogonal to the direction of the second axis y.

[0054] Figure 3 and Figure 4 The diffusion patterns of the aforementioned diffuser plate device 100 in angular space and position space are shown respectively. From Figure 3 and Figure 4 As can be seen, the aforementioned diffuser device 100 can generate spatial diffusion with distortion. When the aforementioned diffuser device 100 is applied to the transmitting end of a vehicle-mounted lidar, it is equivalent to introducing a distortion at the transmitting end that can complement the distortion generated by the receiving end lens, thereby ensuring that the received image after passing through the receiving end lens is distortion-free and improving the detection effect of the vehicle-mounted lidar.

[0055] Alternatively, the projection of each microlens 121 along its optical axis can be either square or rectangular. For example... Figure 2 As shown, taking a square as an example, the side length of the square is 2a.

[0056] The projection includes a first region M and a second region N. The first region M is a region whose distance from the center of the projection is less than or equal to half the side length of the square, and the second region N is a region whose distance from the center of the projection is greater than half the side length of the square. The portion of the microlens 121 corresponding to the first region M adopts a first surface shape, and the portion of the microlens 121 corresponding to the second region N adopts a second surface shape. The slope of the first surface shape is less than the slope of the second surface shape.

[0057] It should be noted that the slope of the surface refers to the average normal slope of the microlens surface.

[0058] For example, the first face shape satisfies the following functional formula (1):

[0059]

[0060] The second facet satisfies the following function formula (2):

[0061]

[0062] In the surface shape functions shown in equations (1) and (2), the direction of the central axis (optical axis of the microlens) of the microlens having a surface shape represented by the surface shape function can be set as the z-axis direction, referring to... Figure 1B A reference plane can be established using the lower surface perpendicular to the central axis and passing through the midpoint, and a three-dimensional rectangular coordinate system can be created. The central axis of the microlens can be used as the origin in the reference plane.

[0063] In equations (1) and (2) above, z represents the height of a point in the microlens surface from the reference plane, [μm], X represents the distance from the central axis in the direction of the first axis, [μm], Y represents the distance from the central axis in the direction of the second axis, [μm], and C... x The curvature in the direction of the first axis, [1 / μm], C y K represents the curvature [1 / μm] in the direction of the second axis. x K represents the conic coefficient in the direction of the first axis. y The conic coefficient is represented in the direction of the second axis; A represents the distortion coefficient of the surface function.

[0064] Refer again Figure 3 As can be seen from the diagram, the first surface shape produces a rectangular diffusion in the middle, while the second surface shape produces diffusion at the four corners. Therefore, the microlens 121 of this application is designed as a surface shape synthesized from the first and second surface shapes, which can first generate a diffusion with a certain distortion in the angular space; then, based on this distorted angular space diffusion, the required distorted diffusion can be generated in the position space, such as... Figure 4 As shown.

[0065] In some embodiments, the surface distortion coefficient A in equation (1) is a number greater than 0. Therefore, the diffused light field of the diffuser device 100 formed by the microlens 121 with this surface shape exhibits a "pincushion distortion" in the row direction, being wider at both ends and narrower in the middle. Figure 4 As shown.

[0066] In some implementations, the distortion coefficient A of the above-mentioned surface function satisfies:

[0067]

[0068] Where B represents the diffusion image distortion coefficient of the diffuser device. (Refer to...) Figure 11 As shown, the diffusion image distortion coefficient B of the diffuser plate device can be obtained by the following formula:

[0069]

[0070] Among them, D a D represents the vertical spread angle of point a. b This represents the vertical spread angle of point b.

[0071] In some other embodiments, the surface distortion coefficient A in equation (1) is a number less than 0. Then, the diffused light field of the diffuser device 100 formed by the microlens 121 with this surface shape exhibits a "drum-shaped distortion" that is narrow at both ends and wide in the middle in the row direction.

[0072] In some implementations, the distortion coefficient A of the above-mentioned surface function satisfies:

[0073]

[0074] Where B represents the diffusion image distortion coefficient of the diffuser device. (Refer to...) Figure 12 As shown, the diffusion image distortion coefficient B of the diffuser plate device can be obtained by the following formula:

[0075]

[0076] Among them, D a D represents the vertical spread angle of point a. b This represents the vertical spread angle of point b.

[0077] In the above scheme, the surface shape of the microlens 121 can be adjusted by changing the value of the surface shape function distortion coefficient, and the corresponding diffused light field also has different shapes. Therefore, at the transmitting end of the vehicle-mounted lidar, drum-shaped or pincushion-shaped distortion can be flexibly selected to complement the distortion at the lidar receiving end.

[0078] Example 1

[0079] In this embodiment, the following parameters of each microlens in formulas (1) and (2) are set as follows:

[0080] Conic coefficient K x K is -0.99. y The curvature C of the surface profile of microlens 121 in the direction of the first axis x is -0.75. x Approximately 125 [1 / μm]; the curvature C of the surface profile of microlens 121 in the direction of the second axis y is... yThe value is approximately 26.32 [1 / μm]; the surface distortion coefficient A is 3*E10. The size of the microlens is approximately 30μm.

[0081] Figure 5 The diffusion pattern of the diffuser plate device 100 structure in angular space is shown in Embodiment 1 of this application; Figure 6 The diffusion pattern of the diffuser plate device 100 structure in position space is shown in Embodiment 1 of this application.

[0082] from Figure 5 As can be seen, the first surface shape creates a rectangular diffusion pattern at the center of the diffuser device 100, while the second surface shape creates diffusion at the four corners of the diffuser device 100. Therefore, the combined surface shape of the first and second surface shapes, based on the aforementioned parameters, first generates a diffusion with a certain degree of distortion in angular space; only based on this distorted angular space diffusion can the required distorted diffusion be generated in position space. Furthermore, since the distortion coefficient of the surface shape function is a number greater than 0, the diffused light field of the diffuser device 100 exhibits a "pincushion-shaped distortion" in the row direction, being wider at both ends and narrower in the middle, as shown below. Figure 6 As shown.

[0083] Example 2

[0084] In this embodiment, the following parameters of each microlens in formulas (1) and (2) are set as follows:

[0085] Conic coefficient K x K is -0.99. y The curvature C of the surface profile of microlens 121 in the direction of the first axis x is -0.75. x Approximately 100 [1 / μm]; the curvature C of the surface profile of microlens 121 in the direction of the second axis y is... y The size is approximately 25 [1 / μm]; the surface distortion coefficient A is 5*E10. The size of the microlens 121 is approximately 30 μm.

[0086] Figure 7 The diffusion pattern of the diffuser plate device 100 structure in angular space is shown in Embodiment 2 of this application; Figure 8 The diffusion pattern of the diffuser plate device 100 structure in position space is shown in Embodiment 2 of this application.

[0087] from Figure 7As can be seen, the first surface shape creates a rectangular diffusion pattern at the center of the diffuser device 100, while the second surface shape creates diffusion at the four corners of the diffuser device 100. Therefore, the combined surface shape of the first and second surface shapes, based on the aforementioned parameters, first generates a diffusion with a certain degree of distortion in angular space; only based on this distorted angular space diffusion can the required distorted diffusion be generated in position space. Furthermore, since the distortion coefficient of the surface shape function is a number greater than 0, the diffused light field of the diffuser device 100 exhibits a "pincushion-shaped distortion" in the row direction, being wider at both ends and narrower in the middle, as shown below. Figure 8 As shown.

[0088] Example 3

[0089] In this embodiment, the following parameters of each microlens in formulas (1) and (2) are set as follows:

[0090] Conic coefficient K x K is -0.99. y The curvature C of the surface profile of microlens 121 in the direction of the first axis x is -0.75. x Approximately 125 [1 / μm]; the curvature C of the surface profile of microlens 121 in the direction of the second axis y is... y The area of ​​the microlens 121 is approximately 26.32 [1 / μm]; the surface distortion coefficient A is -1.5*E7. The size of the microlens 121 is approximately 30 μm.

[0091] Figure 9 The diffusion pattern of the diffuser plate device 100 structure in angular space is shown in Embodiment 3 of this application; Figure 10 The diffusion pattern of the diffuser plate device 100 structure in position space is shown in Embodiment 3 of this application.

[0092] from Figure 9 As can be seen, the first surface shape creates a rectangular diffusion pattern at the center of the diffuser device 100, while the second surface shape creates diffusion at the four corners of the diffuser device 100. Therefore, the combined surface shape of the first and second surface shapes, based on the aforementioned parameters, first generates a diffusion with a certain degree of distortion in angular space; only based on this distorted angular space diffusion can the required distorted diffusion be generated in position space. Furthermore, since the distortion coefficient of the surface shape function is less than 0, the diffused light field of the diffuser device 100 exhibits a "pincushion-shaped distortion" in the row direction, narrow at both ends and wide in the middle, as shown below. Figure 10 As shown.

[0093] As shown in Figure 1 and Figure 2As shown, another aspect of this application provides a method for manufacturing a diffuser plate device 100. The method includes: forming a microlens array on the surface of a substrate, the microlens array comprising multiple rows and columns of microlenses. During the formation process, the slope of the surface profile of each microlens gradually increases from its center position to its edge in the direction of its first axis and / or second axis; the directions of the first axis and the second axis are orthogonal. Exemplarily, the microlens array can be formed using photolithography.

[0094] In some implementations, such as Figure 2 As shown, the projection of each microlens along its optical axis is a square. The projection includes a first region M and a second region N. The first region M is the region whose distance from the center of the projection is less than or equal to half the side length of the square, and the second region N is the region whose distance from the center of the projection is greater than half the side length of the square.

[0095] The portion of the microlens corresponding to the first region M adopts a first surface shape; the portion of the microlens corresponding to the second region N adopts a second surface shape; wherein, the slope of the first surface shape is less than the slope of the second surface shape.

[0096] In some implementations, the first surface shape satisfies the following functional formula:

[0097]

[0098] The second face satisfies the following functional formula:

[0099]

[0100] Where z represents the height of a point in the microlens surface from the reference plane, [μm], X represents the distance from the central axis in the direction of the first axis, [μm], Y represents the distance from the central axis in the direction of the second axis, [μm], and C... x The curvature in the direction of the first axis, [1 / μm], C y K represents the curvature [1 / μm] in the direction of the second axis. x K represents the conic coefficient in the direction of the first axis. y The conic coefficient is represented in the direction of the second axis; A represents the distortion coefficient of the surface function.

[0101] In some implementations, the surface distortion coefficient A is greater than 0.

[0102] In some implementations, the surface distortion coefficient A satisfies: Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0103] In some implementations, the surface distortion coefficient A is less than 0.

[0104] In some implementations, the surface distortion coefficient A satisfies: Where B represents the diffusion image distortion coefficient of the diffusion plate device.

[0105] Since the content described above regarding the structure of the diffuser device 100 is applicable in whole or in part to the method described herein, related or similar content will not be repeated.

[0106] Another aspect of this application provides a vehicle-mounted lidar system, including a transmitter and a receiver.

[0107] The transmitting end includes the diffuser plate device 100 as described above, which is used to emit a detection laser; the receiving end is used to receive the information light carrying image information after the detection laser is reflected by the target area.

[0108] As mentioned above, when there is distortion at the receiving end, the existing distortion-free transmitting end cannot achieve a good imaging effect. This application introduces a distortion complementary to the lens at the receiving end in the diffuser plate device 100 at the transmitting end, so that the received image after passing through the receiving end is distortion-free, thereby obtaining a better imaging effect and improving the detection effect of the vehicle-mounted lidar system.

[0109] The above description is merely an illustration of the embodiments of this application and the technical principles employed. Those skilled in the art should understand that the scope of protection involved in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the technical concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A diffuser plate device, characterized in that, include: Substrate; as well as A microlens array, comprising multiple rows and columns of microlenses disposed on the surface of the substrate; Each of the microlenses has at least two different surface profiles in the direction from the center to the edge; The slope of the surface profile of each microlens gradually increases from the center to the edge in the direction of its first axis and / or the direction of its second axis, the directions of the first axis and the second axis being orthogonal; Each of the microlenses projects a square along its optical axis; The projection includes a first region and a second region. The first region is a region whose distance from the center of the projection is less than or equal to half the side length of the square, and the second region is a region whose distance from the center of the projection is greater than half the side length of the square. The portion of the microlens corresponding to the first region adopts a first surface shape; The portion of the microlens corresponding to the second region adopts a second surface shape; The slope of the first face shape is less than the slope of the second face shape.

2. The diffuser plate device according to claim 1, characterized in that, The first surface shape satisfies the following functional formula: ; The second face shape satisfies the following functional formula: ; in, z This represents the height of a point in the surface profile of a microlens from the reference plane. X This represents the distance from the central axis in the direction of the first axis. Y This indicates the distance from the central axis in the direction of the second axis. C x This represents the curvature in the direction of the first axis. C y Indicates the curvature in the direction of the second axis. K x The conicity factor in the direction of the first axis is represented. K y denoted by , which represents the conic coefficient in the direction of the second axis; A represents the distortion coefficient of the surface function.

3. The diffuser plate device according to claim 2, characterized in that, The distortion coefficient A of the surface shape function is greater than 0.

4. The diffuser plate device according to claim 3, characterized in that, The distortion coefficient A of the surface shape function is greater than or equal to 0.

9. ( (and less than or equal to 1.1) ( Wherein, B represents the diffusion image distortion coefficient of the diffusion plate device.

5. The diffuser plate device according to claim 2, characterized in that, The distortion coefficient A of the surface shape function is less than 0.

6. The diffuser plate device according to claim 5, characterized in that, The distortion coefficient A of the surface shape function is greater than or equal to 0.

9. ( (and less than or equal to 1.1) ( ); where B represents the diffusion image distortion coefficient of the diffusion plate device.

7. A method for manufacturing a diffuser plate device, characterized in that, include: Multiple microlenses are formed in the form of a microlens array on the surface of a substrate, the microlens array comprising multiple rows and multiple columns of microlenses; During the formation process, each microlens is made to have at least two different surface profiles in the direction from the center to the edge; The slope of the surface profile of each microlens gradually increases from the center to the edge in the direction of its first axis and / or the direction of its second axis, the directions of the first axis and the second axis being orthogonal; Each of the microlenses projects a square along its optical axis; The projection includes a first region and a second region. The first region is a region whose distance from the center of the projection is less than or equal to half the side length of the square, and the second region is a region whose distance from the center of the projection is greater than half the side length of the square. The portion of the microlens corresponding to the first region adopts a first surface shape; The portion of the microlens corresponding to the second region adopts a second surface shape; The slope of the first face shape is less than the slope of the second face shape.

8. The method according to claim 7, characterized in that, The first surface shape satisfies the following functional formula: ; The second face shape satisfies the following functional formula: ； in, z This represents the height of a point in the surface profile of a microlens from the reference plane. X This represents the distance from the central axis in the direction of the first axis. Y This indicates the distance from the central axis in the direction of the second axis. C x This represents the curvature in the direction of the first axis. C y Indicates the curvature in the direction of the second axis. K x The conicity factor in the direction of the first axis is represented. K y denoted by , which represents the conic coefficient in the direction of the second axis; A represents the distortion coefficient of the surface function.

9. The method according to claim 8, characterized in that, The distortion coefficient A of the surface shape function is greater than 0.

10. The method according to claim 9, characterized in that, The distortion coefficient A of the surface shape function is greater than or equal to 0.

9. ( (and less than or equal to 1.1) ( Wherein, B represents the diffusion image distortion coefficient of the diffusion plate device.

11. The method according to claim 8, characterized in that, The distortion coefficient A of the surface shape function is less than 0.

12. The method according to claim 11, characterized in that, The distortion coefficient A of the surface shape function is greater than or equal to 0.

9. ( (and less than or equal to 1.1) ( ); where B represents the diffusion image distortion coefficient of the diffusion plate device.

13. A vehicle-mounted lidar system, characterized in that, include: The transmitting end includes a diffuser plate device as described in any one of claims 1 to 6, for emitting a detection laser; as well as The receiving end is used to receive the information light carrying image information after the detection laser is reflected by the target area.

Images