A method and system for detecting gas vacuum based on thin-film capacitors

Abstract

A method and system for detecting gas vacuum based on a thin-film capacitor are disclosed. In this method, the change in capacitance of the thin-film capacitor is detected to obtain the change value; the manner in which the change value of the thin-film capacitor capacitance changes is determined; and the change value of the thin-film capacitor capacitance is output. This method solves the problem of inaccurate gas vacuum detection caused by differences in gas molecules and incomplete sealing of the vacuum container, thus improving the accuracy of gas vacuum detection.

Description

Technical Field

[0001] This application relates to the field of electronic testing, and in particular to a method and system for detecting gas vacuum based on a thin-film capacitor. Background Technology

[0002] Today, the development of science and technology requires more demanding tools and environments. In some scientific research, high vacuum environments can provide more accurate and stable experimental conditions; in some industrial production, high vacuum can be used in processes such as manufacturing electronic devices and optical coating. People generally determine whether the current environment is a high vacuum environment by measuring the gas vacuum level.

[0003] In related technologies, a suspended magnetic sphere method can be used to measure gas vacuum, utilizing the influence of a magnetic field on the motion of gas molecules to determine the gas vacuum level. By measuring the motion state of the suspended magnetic sphere, the gas vacuum level can be inferred. Alternatively, a thin-film capacitance vacuum gauge based on a diode bridge can be used to measure gas vacuum, determining the gas vacuum level by obtaining the output signal from the input sinusoidal AC excitation signal.

[0004] However, using the above method will result in inaccurate gas vacuum levels due to differences in gas molecules and the lack of a sealed vacuum container. Summary of the Invention

[0005] This application provides a gas vacuum degree detection method based on thin-film capacitors, which can solve the problem of inaccurate gas vacuum degree detection caused by different gas molecules and non-sealed vacuum containers, thereby improving the accuracy of gas vacuum degree detection.

[0006] In a first aspect, this application provides a gas vacuum degree detection method based on a thin-film capacitor, applied to gas vacuum degree detection. The method includes: determining the change patterns of N first change values ​​of the capacitance of the thin-film capacitor; when the change pattern of the capacitance of the thin-film capacitor is fluctuating up and down, sending a first instruction to the thin-film capacitor to increase the measurement time, causing the thin-film capacitor to increase the measurement time according to the first instruction; when the thin-film capacitor increases the measurement time according to the first instruction, obtaining M second change values ​​of the capacitance of the thin-film capacitor, where M is greater than N; outputting an average change value; when the change pattern of the capacitance of the thin-film capacitor is a unilateral change, sending a second instruction to the gas delivery device to increase the input rate of the gas to be tested, causing the gas delivery device to increase the input rate of the gas to be tested according to the second instruction until the change trend of the capacitance of the thin-film capacitor remains unchanged; when the gas delivery device increases the input rate of the gas to be tested according to the second instruction until the change trend of the capacitance of the thin-film capacitor remains unchanged, obtaining a third change value of the capacitance of the thin-film capacitor.

[0007] By adopting the above technical solution, the inaccuracy of gas vacuum detection caused by differences in gas molecules and non-sealed vacuum containers can be solved, thus improving the accuracy of gas vacuum detection.

[0008] In conjunction with some embodiments of the first aspect, in some embodiments, when the change in the capacitance of the thin-film capacitor is characterized by fluctuating up and down, a first instruction to increase the measurement time is sent to the thin-film capacitor, causing the thin-film capacitor to increase the measurement time according to the first instruction. Specifically, this includes: when the change in the capacitance of the thin-film capacitor is characterized by fluctuating up and down and is irregular, setting a tolerance range, which is a range of acceptable values; filtering the second change value according to the tolerance range to obtain a trust change value, which is the second change value within the tolerance range; and obtaining a fourth change value, which is the average value of the trust change values, after filtering the second change value according to the tolerance range to obtain a trust change value.

[0009] By adopting the above technical solution, when the gas to be tested contains more than two gas molecules, the change in capacitance of the thin-film capacitor is irregular and fluctuates up and down. Values ​​outside the tolerance range can be filtered out to obtain reliable change values, thus the obtained data is reliable.

[0010] In conjunction with some embodiments of the first aspect, in some embodiments, when the change in the capacitance of the thin-film capacitor is fluctuating up and down, a first instruction to increase the measurement time is sent to the thin-film capacitor, causing the thin-film capacitor to increase the measurement time according to the first instruction. The method further includes: when the gas delivery device increases the input rate of the gas to be tested to its maximum, detecting whether the trend of the change in the capacitance of the thin-film capacitor remains unchanged; if the trend of the change in the capacitance of the thin-film capacitor does not remain unchanged, sending a third instruction to the gas delivery device to reduce the output rate of the gas to be tested, causing the gas delivery device to reduce the output rate of the gas to be tested according to the third instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged; and when the gas delivery device reduces the output rate of the gas to be tested according to the third instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged, obtaining a fifth change value of the capacitance of the thin-film capacitor, which is the change value when the trend of the change in the capacitance of the thin-film capacitor remains unchanged.

[0011] By adopting the above technical solution, even when the input rate of the gas to be measured in the gas transmission device is increased to the maximum, the change trend of the capacitance of the thin film capacitor does not remain unchanged. Therefore, the output rate of the gas to be measured in the gas transmission device can be reduced to obtain a stable change value.

[0012] In conjunction with some embodiments of the first aspect, in some embodiments, after determining the change mode of the N first change values ​​of the film capacitor capacitance, the method further includes: inputting the N first change values ​​of the film capacitor capacitance into a gas vacuum degree prediction model to obtain the vacuum degree of the gas to be measured.

[0013] By adopting the above technical solution, the vacuum degree of the gas to be measured can be directly obtained through the gas vacuum degree prediction model, thereby improving the accuracy of gas vacuum degree detection.

[0014] In conjunction with some embodiments of the first aspect, in some embodiments, after determining the change method of the N first change values ​​of the film capacitor capacitance, the method further includes: inputting optical time data into an optical calculation function to obtain the vacuum degree of the gas to be measured, wherein the optical time data is the time for light to pass through the gas to be measured in the film capacitor, and the optical calculation function is: In the formula, V(ρ) is the gas vacuum degree, c is the speed of light, t is the time it takes for light to pass through the gas, χ is a constant related to the gas properties, and ρ is the gas density.

[0015] By adopting the above technical solution, the vacuum degree of the gas to be tested can be obtained quickly, with less influence from the number of gas molecules.

[0016] In conjunction with some embodiments of the first aspect, in some embodiments, after determining the change method of the N first change values ​​of the film capacitor capacitance, the method further includes: inputting acoustic time data into an acoustic calculation function to obtain the vacuum degree of the gas to be tested, wherein the acoustic time data is the time for the acoustic wave to pass through the gas to be tested in the film capacitor, and the acoustic calculation function is: In the formula, V(ρ) is the gas vacuum degree, m is the gas mass, t is the time it takes for the sound wave to travel through the gas, and v is the speed of the sound wave.

[0017] By adopting the above technical solution, the vacuum degree of the gas to be tested can be obtained quickly, with less influence from external factors, thus improving the efficiency and accuracy of gas vacuum degree detection.

[0018] In conjunction with some embodiments of the first aspect, in some embodiments, after determining the change method of the N first change values ​​of the film capacitor capacitance, the method further includes: inputting the electrical signal generated by the gas to be tested into an electrical signal calculation function to obtain the vacuum degree of the gas to be tested, wherein the electrical signal calculation function is: In the formula, V(ρ) is the gas vacuum degree, α is the gas ionization degree measured by the electrical signal, x is the highest value of the electrical signal calculation function within the measured gas vacuum degree range, and y is the lowest value of the electrical signal calculation function within the measured gas vacuum degree range.

[0019] By adopting the above technical solution, the vacuum degree of the gas to be tested can be obtained quickly without being affected by external factors, thus improving the efficiency and accuracy of gas vacuum degree detection.

[0020] Secondly, embodiments of this application provide a system for detecting gas vacuum based on a thin-film capacitor. The system includes: a control module, configured to: determine the changing patterns of N first change values ​​of the thin-film capacitor capacitance; receive data measured by the thin-film capacitor; obtain M second change values ​​of the thin-film capacitor capacitance when the measurement time is increased according to a first instruction; output an average change value; obtain a third change value of the thin-film capacitor capacitance when the gas delivery device increases the input rate of the gas to be measured according to a second instruction until the changing trend of the thin-film capacitor capacitance remains unchanged; send a first instruction to the thin-film capacitor to increase the measurement time when the change value of the thin-film capacitor capacitance is fluctuating up and down; and send a second instruction to the gas delivery device to increase the input rate of the gas to be measured when the change value of the thin-film capacitor capacitance is a unilateral change. The measurement module is used to receive a first instruction to increase the measurement time of the thin-film capacitor when the change in the capacitance of the thin-film capacitor is fluctuating up and down, so that the thin-film capacitor increases the measurement time according to the first instruction; and to send a second instruction to the gas delivery device to increase the input rate of the gas to be measured when the change in the capacitance of the thin-film capacitor is unilateral, so that the gas delivery device increases the input rate of the gas to be measured according to the second instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged.

[0021] In conjunction with some embodiments of the second aspect, some embodiments further include: a gas delivery module, used to control the input and output rate of the gas to be measured in the vacuum measuring container after receiving a second instruction sent by an external computer; a display module, used to display the processed data after the external computer has processed each data; and a direct calculation module, used to directly obtain the gas vacuum degree of the gas to be measured based on an artificial intelligence model or calculation function after the gas to be measured is input.

[0022] Thirdly, embodiments of this application provide an electronic device, which includes: one or more processors and a memory; the memory is coupled to one or more processors and is used to store computer program code, the computer program code including computer instructions.

[0023] Fourthly, embodiments of this application provide a computer-readable storage medium, including instructions.

[0024] Understandably, the virtual module provided in the second aspect, the electronic device provided in the third aspect, and the computer-readable storage medium provided in the fourth aspect are all used to execute the technology trend determination method based on the intelligent model of this application. Therefore, the beneficial effects they can achieve can be referred to the beneficial effects in the corresponding methods, and will not be repeated here.

[0025] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages: 1. By employing a method of judging the changes in N first values ​​of the film capacitor's capacitance; when the change in the film capacitor's capacitance fluctuates up and down, a first instruction to increase the measurement time is sent to the film capacitor, causing the film capacitor to increase the measurement time according to the first instruction; when the film capacitor increases the measurement time according to the first instruction, M second values ​​of the film capacitor's capacitance are obtained, where M is greater than N; the average change value is output; when the change in the film capacitor's capacitance is unilateral, a second instruction to increase the input rate of the gas to be tested is sent to the gas delivery device, causing the gas delivery device to increase the input rate of the gas to be tested according to the second instruction until the trend of the change in the film capacitor's capacitance remains unchanged; when the gas delivery device increases the input rate of the gas to be tested according to the second instruction until the trend of the change in the film capacitor's capacitance remains unchanged, a third value of the film capacitor's capacitance is obtained. This effectively solves the problem of inaccurate gas vacuum detection caused by different gas molecules and non-sealed vacuum containers, thereby improving the accuracy of gas vacuum detection.

[0026] 2. By setting a tolerance range when the capacitance of the thin-film capacitor fluctuates irregularly, a second change value is obtained by filtering the second change value within the tolerance range to obtain a reliable change value. The reliable change value is the second change value within the tolerance range. After obtaining the reliable change value by filtering the second change value within the tolerance range, a fourth change value is obtained, which is the average of the reliable change values. This effectively solves the problem of the irregular fluctuation of the capacitance of the thin-film capacitor, solves the problem in special cases, and improves the accuracy of gas vacuum detection.

[0027] 3. By employing a method that detects whether the trend of the change in the capacitance of the thin-film capacitor remains unchanged when the input rate of the gas to be tested is increased to its maximum in the gas delivery equipment; if the trend of the change in the capacitance of the thin-film capacitor does not remain unchanged, a third instruction is sent to the gas delivery equipment to reduce the output rate of the gas to be tested, causing the gas delivery equipment to reduce the output rate of the gas to be tested until the trend of the change in the capacitance of the thin-film capacitor remains unchanged; when the gas delivery equipment reduces the output rate of the gas to be tested according to the third instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged, a fifth change value of the capacitance of the thin-film capacitor is obtained. This fifth change value is the change value when the trend of the change in the capacitance of the thin-film capacitor remains unchanged, effectively solving the problem caused by the leakage rate of the gas to be tested being greater than the gas delivery rate of the gas delivery equipment, and improving the accuracy of gas vacuum detection. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of an application scenario for measuring the operating environment and architecture of a gas vacuum. Figure 2 This is an exemplary scenario diagram illustrating an error that occurs when measuring gas vacuum using related technologies; Figure 3 This is a schematic diagram of an application scenario where the main solution of this application changes by floating up and down. Figure 4 This is a schematic diagram of an application scenario where the main scheme of this application is modified in a unilateral manner. Figure 5 This is a flowchart illustrating the main scheme of this application; Figure 6 This is a flowchart illustrating one variation of an embodiment of this application; Figure 7 This is a flowchart illustrating another variation of the embodiments in this application; Figure 8 This is a schematic diagram of the functional module structure of a system provided in an embodiment of this application. Detailed Implementation

[0029] The terminology used in the following embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to include the plural expressions as well, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in this application refers to any or all possible combinations including one or more of the listed items.

[0030] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature, and in the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0031] Figure 1 This is a schematic diagram of an application scenario for measuring the operating environment and architecture of a gas vacuum.

[0032] Please see Figure 1 In laboratories or forging workshops requiring a high degree of gas vacuum for testing, the gas delivery system feeds the gas into a vacuum measuring container containing a thin-film capacitor. As the gas enters the capacitor, its molecules collide with the electrodes, attracting electrons and causing a change in capacitance. The capacitor then outputs N initial values ​​of this change to an external computer. This computer calculates the gas vacuum level based on these N values; smaller values ​​indicate a higher vacuum. The external computer then displays the measured gas vacuum level on a monitor.

[0033] It is understood that the external computer mentioned above can be a terminal device with computing and control functions, such as a tablet or desktop computer, and there is no limitation here.

[0034] It is understood that the aforementioned film capacitor can be a capacitor with measurement function, such as a metal film capacitor or a ceramic film capacitor, etc., and no limitation is made here.

[0035] It is understood that the aforementioned gas transmission equipment can be any equipment that transports and controls the gas rate, and this is not limited here.

[0036] Figure 2 This is an exemplary scenario diagram illustrating an error that occurs when measuring gas vacuum using related technologies.

[0037] like Figure 2As shown in Figure (a), the gas being tested input into the gas delivery device contains different types of gas molecules, indicating impurity. These different gas molecules vary in size and shape, leading to different interactions with the surface of the thin-film capacitor. Some gas molecules may adsorb onto the thin-film surface, forming a thin film that alters the dielectric layer structure and performance of the capacitor, resulting in unstable capacitance. The thin-film capacitor outputs its measured data to a computer, which displays the capacitance change as fluctuating up and down, a problem that cannot be resolved using the current system. Figure 2 As shown in Figure (b), a leak in the vacuum measurement container alters the gas pressure inside. A film capacitor stores charge by creating an electric field within a dielectric film. When a gas leak occurs, gas molecules may permeate into the dielectric film, changing its insulating properties and altering the electric field distribution of the capacitor, thus changing its capacitance. The film capacitor outputs its detected data to a computer, which displays the capacitance change as a unilateral change, making it impossible to resolve the issue using the current system. Both of these situations lead to inaccurate detection of the gas vacuum level.

[0038] However, existing technologies cannot solve the problem of inaccurate gas vacuum detection caused by differences in gas molecules and non-sealed vacuum containers, and the accuracy of gas vacuum detection needs to be improved.

[0039] This application provides a gas vacuum detection method based on a thin-film capacitor. The method involves determining the changing patterns of N first values ​​of the thin-film capacitor's capacitance; if the changing pattern is fluctuating up and down, a first instruction to increase the measurement time is sent to the thin-film capacitor, causing it to increase the measurement time accordingly; if the measurement time is increased according to the first instruction, M second values ​​of the thin-film capacitor's capacitance are obtained, where M is greater than N; the average value of the change is output; if the changing pattern is unilateral, a second instruction to increase the input rate of the gas to be measured is sent to the gas delivery device, causing it to increase the input rate until the changing trend of the thin-film capacitor's capacitance remains unchanged; if the gas delivery device increases the input rate until the changing trend of the thin-film capacitor's capacitance remains unchanged, a third value of the thin-film capacitor's capacitance is obtained.

[0040] Figure 3 This is a schematic diagram of an application scenario where the main solution of this application changes by floating up and down.

[0041] like Figure 3As shown in Figure (a), when the gas to be measured is impure, the computer issues a first instruction to the thin-film capacitor, which is to increase the measurement time of the thin-film capacitor. Figure 3 As shown in Figure (b), the computer continuously monitors the capacitance change value obtained from the film capacitor measurement to obtain more capacitance change data, making the gas vacuum degree of the gas to be measured reliable data. When the amount of data is large enough, the accuracy of the data can be guaranteed, and an accurate gas vacuum degree can be obtained. Figure 4 This is a schematic diagram of an application scenario where the main scheme of this application is changed in a unilateral manner.

[0042] like Figure 4 As shown in Figure (a), in the event of a leak in the vacuum measuring container, the computer issues a second command to the gas delivery device, instructing the device to increase the gas delivery rate. Figure 4 As shown in Figure (b), the computer continuously monitors the capacitance change of the thin-film capacitor until the capacitance change remains constant. Increasing the gas delivery rate of the gas delivery equipment keeps the gas pressure inside the vacuum container balanced, thus maintaining a constant capacitance change. The computer monitor displays the value of the constant capacitance change.

[0043] Based on the above scenario diagram, the following is a flowchart illustrating the main solution of this application: Please see Figure 5 This is a flowchart of the main scheme of this application.

[0044] S501. Determine the manner in which the N first change values ​​of the capacitance of a film capacitor change. A gas delivery device inputs the gas to be tested into a vacuum measuring container. A thin-film capacitor measures the gas; the input of the gas causes a change in the capacitance of the thin-film capacitor. The changes obtained from N measurements within a first time period are then sent to an external computer. The external computer determines the manner in which the N initial changes in the capacitance of the thin-film capacitor occur. These N initial changes represent the capacitance changes of the thin-film capacitor when a problem is detected. The gas delivery device includes an input pipe and an output pipe. The input pipe is the channel through which the gas to be tested enters the vacuum measuring container, and the output pipe is the channel through which the gas to be tested exits the vacuum measuring container. The gas delivery device is controlled by an external computer.

[0045] It is understandable that the external computer can be a terminal device with computing and control functions, such as a tablet or desktop computer, and there is no limitation here.

[0046] S502. When the change in the capacitance of the thin film capacitor is a fluctuating up and down, a first instruction to increase the measurement time is sent to the thin film capacitor, so that the thin film capacitor increases the measurement time according to the first instruction. When the external computer determines that the N first changes in the capacitance of the thin-film capacitor are fluctuating up and down, it sends a first instruction to the thin-film capacitor to increase the measurement time. When this first instruction is executed, the measurement time of the thin-film capacitor is increased, allowing it to measure more changes in capacitance. The fluctuating up and down pattern of the N first changes in capacitance is due to the different types of gas molecules, i.e., the gas is impure.

[0047] Understandably, the increased measurement time is determined based on the actual situation; the longer the time, the more reliable the data. No limit is set here.

[0048] S503. When the measurement time of the thin film capacitor is increased according to the first instruction, M second change values ​​of the capacitance of the thin film capacitor are obtained. After the film capacitor increases the measurement time, it sends the detected M second change values ​​to an external computer, where M is greater than N.

[0049] S504, Output the average change value; The external computer analyzes and calculates the M second change values, takes the average value of the M second change values, and outputs the average change value.

[0050] It is understandable that the data obtained by averaging the M second change values ​​can have other names, such as reliable change value, etc., and there is no restriction here.

[0051] S505. When the change in the capacitance of the thin film capacitor is a one-sided change, a second instruction to increase the input rate of the gas to be measured is sent to the gas delivery equipment, so that the gas delivery equipment increases the input rate of the gas to be measured according to the second instruction until the trend of the change in the capacitance of the thin film capacitor remains unchanged. When the external computer determines that the N first changes in the capacitance of the film capacitor are unilateral, it issues a second instruction to the film capacitor to increase the input rate of the gas to be tested. Upon execution of this second instruction, the gas delivery device increases the input rate of the gas to be tested until the trend of the change in the film capacitor capacitance remains unchanged. Maintaining the unchanged trend of the film capacitor capacitance can be achieved when the input rate is greater than or equal to the gas leakage rate.

[0052] S506. When the gas transmission equipment increases the input rate of the gas to be measured according to the second instruction until the trend of the change value of the film capacitor capacitance remains unchanged, the third change value of the film capacitor capacitance is obtained.

[0053] Once the trend of the change in the capacitance of a film capacitor remains unchanged, this constant value becomes the third change in the capacitance of the film capacitor.

[0054] In the above embodiment, the external computer issues corresponding instructions based on the change in the capacitance of the thin-film capacitor, which can effectively solve the problem of inaccurate gas vacuum detection caused by different gas molecules and non-sealed vacuum containers, and improve the accuracy of gas vacuum detection.

[0055] However, when the change in the capacitance of the aforementioned thin-film capacitor is characterized by fluctuations or unilateral changes, increasing the measurement time or the gas delivery rate cannot yield an accurate value for the change in the capacitance. In such cases, special steps are required to resolve the issue.

[0056] The following is a flowchart illustrating one variation of an embodiment of this application, illustrating an embodiment that addresses the inability to obtain accurate values ​​of the change in capacitance of a thin-film capacitor by increasing the measurement time: Please see Figure 6 This is a flowchart illustrating one variation of an embodiment of this application.

[0057] S601. When the capacitance of a film capacitor changes irregularly and fluctuates up and down, a tolerance range shall be set. The capacitance of the film capacitor fluctuates irregularly, which is caused by the presence of multiple gas molecules in the gas being tested. In this case, an external computer is used to set a tolerance range that includes reliable capacitance changes of the film capacitor. Setting this tolerance range can filter out abnormal changes, thus improving the accuracy of the measured values.

[0058] It is understandable that the tolerance range set by the external computer can have other names, such as confidence range, etc., and there are no restrictions here.

[0059] S602. Based on the tolerance range, the second change value is filtered to obtain the trust change value; The external computer filters the second change value within the tolerance range to obtain the trust change value, which is a reliable change value.

[0060] S603. After filtering the second change value according to the tolerance range to obtain the trust change value, the fourth change value is obtained.

[0061] The external computer obtains a fourth change value, which is the average of the trust change values.

[0062] In the above embodiment, the external computer obtains a trustworthy change value by filtering the second change value, which can filter out abnormal change values ​​and solve the problem that the gas to be tested contains multiple gas molecules.

[0063] The following is a flowchart illustrating another variation of this embodiment, illustrating how increasing the gas delivery rate cannot yield an accurate change in the capacitance of the thin-film capacitor: Please see Figure 7 This is a flowchart illustrating another variation of the embodiments of this application.

[0064] S701. When the input rate of the gas to be tested is increased to the maximum in the gas transmission equipment, check whether the trend of the change value of the capacitance of the film capacitor remains unchanged. When the external computer sends a second instruction to the gas delivery equipment to increase the input rate of the gas to be tested to the maximum, the change trend of the capacitance of the film capacitor is detected.

[0065] S702. If the trend of the change in the capacitance of the film capacitor does not remain unchanged, a third instruction to reduce the output rate of the gas to be tested is sent to the gas transmission equipment, so that the gas transmission equipment reduces the output rate of the gas to be tested according to the third instruction until the trend of the change in the capacitance of the film capacitor remains unchanged. The gas delivery equipment has an upper limit on the rate at which gas can be input. When the maximum input rate is reached, the external computer detects that the trend of the change in the capacitance of the thin-film capacitor is not constant. It then sends a third instruction to the gas delivery equipment to reduce the output rate of the gas being tested. This third instruction causes the gas delivery equipment to reduce the output rate of the gas being tested until the trend of the change in the capacitance of the thin-film capacitor remains constant. In essence, the gas being tested is output through the outlet pipe of the gas delivery equipment. When the input rate of the gas delivery equipment reaches its maximum, the output rate of the gas being tested can be reduced to balance the input and output, thereby maintaining the trend of the change in the capacitance of the thin-film capacitor.

[0066] Understandably, the external computer continuously monitored the film capacitor during this period.

[0067] S703. When the gas transmission equipment reduces the output rate of the gas to be measured according to the third instruction until the trend of the change value of the film capacitor capacitance remains unchanged, the fifth change value of the film capacitor capacitance is obtained.

[0068] When the trend of the change in the capacitance of the film capacitor remains unchanged, the external computer obtains the fifth change value of the capacitance of the film capacitor. This fifth change value is the change value when the trend of the change in the capacitance of the film capacitor remains unchanged.

[0069] In the above embodiment, the external computer sends a third instruction to the gas delivery device to reduce the output rate of the gas to be tested. This causes the gas delivery device to reduce the output rate of the gas to be tested according to the third instruction until the trend of the change value of the film capacitor capacitance remains unchanged. This solves the problem that increasing the gas delivery rate cannot obtain an accurate change value of the film capacitor capacitance.

[0070] The above embodiments illustrate how this gas vacuum measurement system addresses the inaccuracy of detected gas vacuum levels caused by differences in gas molecules and imperfect vacuum containers. Below, we provide an artificial intelligence model and several calculation functions to directly calculate the vacuum level of the gas to be measured: After a gas is input into a vacuum measuring container, the change in capacitance of a thin-film capacitor is input into a gas vacuum prediction model to obtain the vacuum level of the gas. This gas vacuum prediction model contains the gas vacuum levels corresponding to all changes in the capacitance of the thin-film capacitors generated after a gas is input into the vacuum measuring container. The model then uses the changes in capacitance of the thin-film capacitors as input to determine the vacuum level of the gas. The optical time data is input into the optical calculation function to obtain the vacuum degree of the gas to be measured. The optical time data is the time it takes for light to pass through the gas to be measured in the thin-film capacitor. The optical calculation function is as follows: In the formula, V(ρ) is the gas vacuum degree, c is the speed of light, t is the time for light to pass through the gas, χ is a constant related to the gas properties, and ρ is the gas density; The acoustic time data is input into the acoustic wave calculation function to obtain the vacuum degree of the gas to be measured. The acoustic time data is the time it takes for the acoustic wave to pass through the gas to be measured in the thin film capacitor. The acoustic wave calculation function is as follows: In the formula, V(ρ) represents the gas vacuum, m represents the gas mass, t represents the time it takes for the sound wave to travel through the gas, and v represents the speed of the sound wave. The electrical signal generated by the gas being measured is input into the electrical signal calculation model to obtain the vacuum level of the gas. The electrical signal calculation function is as follows: In the formula, V(ρ) is the gas vacuum degree, α is the gas ionization degree measured by the electrical signal, x is the highest value of the electrical signal calculation function within the measured gas vacuum degree range, and y is the lowest value of the electrical signal calculation function within the measured gas vacuum degree range.

[0071] The aforementioned artificial intelligence model and calculation function can directly obtain the gas vacuum degree of the gas to be measured, avoiding inaccurate gas vacuum degree measurement caused by external factors.

[0072] The system in this application embodiment is described below from a module perspective: Please see Figure 8 This is a schematic diagram of the functional module structure of a system provided in an embodiment of this application.

[0073] The system includes: The measurement module 801 is configured to receive a first instruction to increase the measurement time of the thin film capacitor when the change in the capacitance of the thin film capacitor is fluctuating up and down, so that the thin film capacitor increases the measurement time according to the first instruction; and to send a second instruction to the gas delivery device to increase the input rate of the gas to be measured when the change in the capacitance of the thin film capacitor is unilateral, so that the gas delivery device increases the input rate of the gas to be measured according to the second instruction until the trend of the change in the capacitance of the thin film capacitor remains unchanged. The control module 802 is used to determine the changing patterns of N first change values ​​of the film capacitor capacitance; to receive data measured by the film capacitor; to obtain M second change values ​​of the film capacitor capacitance when the film capacitor increases the measurement time according to a first instruction; to output an average change value; to obtain a third change value of the film capacitor capacitance when the gas delivery device increases the input rate of the gas to be measured according to a second instruction until the changing trend of the film capacitor capacitance remains unchanged; to send a first instruction to increase the measurement time to the film capacitor when the changing pattern of the film capacitor capacitance is fluctuating up and down; and to send a second instruction to increase the input rate of the gas to be measured to the gas delivery device when the changing pattern of the film capacitor capacitance is a unilateral change. Display module 803 is used to display all the measurement results of the film capacitors and the data processed by the external computer; The gas delivery module 804 is used to control the gas delivery rate of the gas delivery equipment after receiving instructions from the external display; the direct calculation module 805 is used to directly obtain the gas vacuum degree of the gas under test based on the artificial intelligence model or calculation function after the gas to be tested is input.

[0074] In some embodiments, the measurement module 801 specifically includes: The receiving unit 8011 is used to receive various instructions sent by an external computer; The transmitting unit 8012 is used to transmit the measured change in the capacitance of the thin-film capacitor; In some embodiments, the control module 802 specifically includes: The data receiving unit 8021 is used to receive the change value of the film capacitor capacitance sent by the measurement module; The data processing unit 8022 is used to process the received data. The instruction sending unit 8023 is used to send various instructions; In some embodiments, the direct calculation module 805 specifically includes: The acoustic wave calculation unit 8051 is used to calculate the gas vacuum degree of the gas to be measured using acoustic wave calculation functions; The intelligent prediction unit 8052 is used to obtain the gas vacuum degree of the gas to be measured using a gas vacuum degree prediction model. The 8053 electrical computing unit is used to calculate the gas vacuum degree of the gas under test using an electrical signal computing model. The optical computing unit 8054 is used to calculate the gas vacuum degree of the gas to be measured using optical computing functions.

[0075] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

[0076] As used in the above embodiments, depending on the context, the term "when..." can be interpreted as meaning "if...", "after...", "in response to determining...", or "in response to detecting...". Similarly, depending on the context, the phrase "when determining..." or "if (the stated condition or event) is interpreted as meaning "if determining...", "in response to determining...", "when (the stated condition or event) is detected", or "in response to detecting (the stated condition or event)".

[0077] In the above embodiments, implementation can be achieved entirely or partially through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented entirely or partially in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid-state drive), etc.

[0078] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. This program can be stored in a computer-readable storage medium, and when executed, it can include the processes described in the above method embodiments. The aforementioned storage medium includes various media capable of storing program code, such as ROM or random access memory (RAM), magnetic disks, or optical disks.

Claims

1. A method for detecting gas vacuum based on a thin-film capacitor, characterized in that, include: Determine the manner of change of N first change values ​​of the capacitance of the thin film capacitor, wherein the N first change values ​​are the change values ​​obtained by measuring the thin film capacitor N times within a first time period, and the first change values ​​are the change in capacitance value of the thin film capacitor inside the vacuum container after the gas to be tested is introduced into the vacuum container. When the change in the capacitance of the thin film capacitor is a fluctuating up and down, a first instruction to increase the measurement time is sent to the thin film capacitor, so that the thin film capacitor increases the measurement time according to the first instruction. When the film capacitor increases the measurement time according to the first instruction, M second change values ​​of the film capacitor capacitance are obtained, where M is greater than N. The M second change values ​​are the change values ​​obtained by measuring the film capacitor M times in a second time period. The second time period includes the first time period or the second time period is after the first time period. The up and down fluctuation is a change in the magnitude of the change value of the film capacitor capacitance caused by the presence of two or more gas molecules in the gas to be tested. Output the average change value, which is the average of M second change values; When the change in the capacitance of the thin-film capacitor is a one-sided change, a second instruction to increase the input rate of the gas to be tested is sent to the gas delivery device, so that the gas delivery device increases the input rate of the gas to be tested according to the second instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged. When the gas supply device increases the input rate of the gas to be tested according to the second instruction until the trend of the change value of the film capacitor capacitance remains unchanged, a third change value of the film capacitor capacitance is obtained. The third change value is the change value when the trend of the change value of the film capacitor capacitance remains unchanged. The unilateral change refers to the change value of the film capacitor capacitance that only increases or decreases due to the vacuum container not being sealed.

2. The method according to claim 1, characterized in that, When the capacitance of the thin-film capacitor changes in a fluctuating manner, a first instruction to increase the measurement time is sent to the thin-film capacitor, causing the thin-film capacitor to increase the measurement time according to the first instruction. Specifically, this includes: When the capacitance of the thin-film capacitor changes irregularly and fluctuates up and down, a tolerance range is set, which is the range of values ​​that can be taken. The second change value is filtered according to the tolerance interval to obtain the trust change value, and the trust change value is the second change value within the tolerance interval; After filtering the second change value according to the tolerance range to obtain a trust change value, a fourth change value is obtained, which is the average value of the trust change values.

3. The method according to claim 1, characterized in that, When the change in the capacitance of the thin-film capacitor is unilateral, a second instruction is sent to the gas delivery device to increase the input rate of the gas to be tested. After the gas delivery device increases the input rate of the gas to be tested according to the second instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged, the method further includes: When the gas supply equipment increases the input rate of the gas to be tested to the maximum, it is detected whether the trend of the change value of the film capacitor capacitance remains unchanged. If the trend of the change in the capacitance of the thin film capacitor does not remain unchanged, a third instruction is sent to the gas delivery device to reduce the output rate of the gas to be tested, so that the gas delivery device reduces the output rate of the gas to be tested according to the third instruction until the trend of the change in the capacitance of the thin film capacitor remains unchanged. When the gas delivery device reduces the output rate of the gas to be tested according to the third instruction until the trend of the change value of the film capacitor capacitance remains unchanged, a fifth change value of the film capacitor capacitance is obtained. The fifth change value is the change value when the trend of the change value of the film capacitor capacitance remains unchanged.

4. The method according to claim 1, characterized in that, Following the determination of the changes in the N first change values ​​of the film capacitor capacitance, the method further includes: The N first change values ​​of the capacitance of the thin-film capacitor are input into the gas vacuum degree prediction model to obtain the vacuum degree of the gas to be tested.

5. The method according to claim 1, characterized in that, Following the determination of the changes in the N first change values ​​of the film capacitor capacitance, the method further includes: The optical time data is input into the optical calculation function to obtain the vacuum degree of the gas to be tested. The optical time data is the time it takes for light to pass through the gas to be tested in the thin-film capacitor. The optical calculation function is: ； In the formula, For gas vacuum degree, At the speed of light, The time it takes for light to travel through the gas. These are constants related to the properties of the gas. The density is the gas density.

6. The method according to claim 1, characterized in that, Following the determination of the changes in the N first change values ​​of the film capacitor capacitance, the method further includes: The acoustic time data is input into the acoustic wave calculation function to obtain the vacuum degree of the gas to be tested. The acoustic time data is the time it takes for the acoustic wave to pass through the gas to be tested in the thin-film capacitor. The acoustic wave calculation function is: ； In the formula, For gas vacuum degree, For gas mass, The time it takes for a sound wave to travel through a gas. The speed of sound waves.

7. The method according to claim 1, characterized in that, Following the determination of the changes in the N first change values ​​of the film capacitor capacitance, the method further includes: The electrical signal generated by the gas to be tested is input into an electrical signal calculation function to obtain the vacuum degree of the gas to be tested. The electrical signal calculation function is as follows: ； In the formula, For gas vacuum degree, The degree of gas ionization is measured by an electrical signal. The highest value of the electrical signal calculation function within the measured gas vacuum range. The lowest value of the electrical signal calculation function within the range of the measured gas vacuum level.

8. A system for detecting gas vacuum based on a thin-film capacitor, characterized in that, include: The control module is used to determine the changing patterns of the N first change values ​​of the capacitance of the thin-film capacitor; Used to receive data measured by the thin-film capacitor; Used to obtain M second change values ​​of the capacitance of the thin-film capacitor; used to output the average change value; Used to obtain a third change value of the capacitance of the thin film capacitor; used to send a first instruction to the thin film capacitor to increase the measurement time when the change value of the capacitance of the thin film capacitor is fluctuating up and down, wherein the fluctuation is an alternating change in the magnitude of the change value of the capacitance of the thin film capacitor caused by the presence of two or more gas molecules in the gas to be measured; used to send a second instruction to the gas delivery device to increase the input rate of the gas to be measured when the change value of the capacitance of the thin film capacitor is a unilateral change. The measurement module is configured to receive a first instruction to increase the measurement time when the capacitance of the thin film capacitor changes in a fluctuating manner, and to cause the thin film capacitor to increase the measurement time according to the first instruction. When the change in the capacitance of the thin-film capacitor is unilateral, a second instruction is sent to the gas delivery device to increase the input rate of the gas to be tested, so that the gas delivery device increases the input rate of the gas to be tested according to the second instruction until the trend of the change in the capacitance of the thin-film capacitor remains unchanged.

9. An electronic device, characterized in that, include: One or more processors and memory; The memory is coupled to the one or more processors, the memory being used to store computer program code, the computer program code including computer instructions, the one or more processors invoking the computer instructions to cause the electronic device to perform the method as described in any one of claims 1-7.

10. A computer-readable storage medium comprising instructions, characterized in that, When the instructions are executed on an electronic device, the electronic device causes the electronic device to perform the method as described in any one of claims 1-7.

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