Ultrasonic flaw detection method for double-layer spray head plate target

Abstract

The present application relates to a kind of double-layer shower head plate piece target ultrasonic flaw detection method, the ultrasonic flaw detection method includes the following steps: (1) double-layer shower head plate piece target is pretreated, and the treated target is obtained;(2) the treated target of step (1) obtained is placed in water, then ultrasonic probe is inserted into underwater, and target is ultrasonic flaw detection;The ultrasonic flaw detection mode includes: ultrasonic probe is focused on the center of first welding surface or second welding surface, then from center, according to the track of spiral, is moved and is detected.The ultrasonic flaw detection method provided by the present application can only be tested by any welding surface of double-layer shower head plate piece target to complete the flaw detection of whole target, greatly improve detection rate, reduce detection time, and have good accuracy.

Description

Technical Field

[0001] This invention relates to the field of flaw detection methods, specifically to an ultrasonic flaw detection method for a double-layer spray head plate target material. Background Technology

[0002] Vacuum sputtering involves electrons being accelerated towards the substrate under the influence of an electric field, colliding with argon atoms and ionizing into a large number of argon ions and electrons. The electrons fly towards the substrate, while the argon ions are accelerated and bombard the target material under the influence of the electric field, sputtering out a large number of target atoms. The neutral target atoms (or molecules) are deposited on the substrate to form a film, ultimately achieving the purpose of coating the substrate surface.

[0003] Brazing is commonly used in the fabrication of target components. It is typically employed for products with similar physical properties, such as melting points, like aluminum targets and copper backplates. The principle involves using a brazing filler metal with a lower melting point than the workpiece metal. After appropriate heating and pressure, the filler metal melts, bonding the solid workpieces together. Post-welding inspection of the target's weld quality is crucial. Currently, the tensile test is used to inspect brazed targets (e.g., aluminum targets). This test assesses the tensile strength of a target sample to infer the weld quality. However, this method is destructive, increasing costs. Furthermore, it has limitations, as the tensile test only measures the tensile strength of the tested area and does not accurately reflect the overall weld condition of the target.

[0004] Ultrasonic testing utilizes the echo heights generated by ultrasonic waves as they enter a medium with different sound velocities to determine the presence of defects on the surface and inside of a workpiece. It boasts advantages such as high sensitivity, short cycle time, low cost, and high efficiency. However, due to the diverse types of targets, problems remain, including low testing efficiency and difficulty in determining testing parameters for specific target types. The target material for a double-layer spray head plate is an irregularly shaped target containing a cavity, with both sides of the cavity serving as the target's welding surface. Existing testing methods often involve ultrasonic testing on both sides of the target separately, but this results in a low testing rate, long testing time, complex preparation, and significant dependence on the target material itself for defect detection.

[0005] Therefore, it is of great significance to provide an ultrasonic flaw detection method for the target material of a double-layer spray head plate. Summary of the Invention

[0006] To address the above problems, the present invention aims to provide an ultrasonic flaw detection method for a double-layer spray head plate target material. Compared with the prior art, the ultrasonic flaw detection method provided by the present invention can complete the flaw detection of the entire target material by testing only any welding surface of the double-layer spray head plate target material, which greatly improves the detection rate, reduces the detection time, and has good accuracy.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] This invention provides an ultrasonic flaw detection method for a double-layer spray head plate target material, the ultrasonic flaw detection method comprising the following steps:

[0009] (1) The double-layer spray head plate target material is pretreated to obtain the treated target material; the double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other; a cavity is provided between the first welding surface and the second welding surface; and a circular through hole is provided on both the first welding surface and the second welding surface.

[0010] (2) Place the processed target material obtained in step (1) underwater, and then insert the ultrasonic probe underwater to perform ultrasonic testing on the target material.

[0011] The ultrasonic flaw detection method includes: focusing the ultrasonic probe on the center of the first weld surface or the second weld surface, and then moving it from the center along a spiral trajectory for flaw detection.

[0012] The ultrasonic flaw detection method provided by this invention is for flaw detection of target materials of double-layer spray head plates. Since the welding surfaces of the target material are a first welding surface and a second welding surface arranged opposite each other, and an air cavity is set between the two welding surfaces, the flaw detection method provided by this invention can achieve overall flaw detection of the target material by performing a spiral trajectory flaw detection on one side of the welding surface, which greatly improves the detection rate, reduces the detection time, and has good accuracy.

[0013] Preferably, the diameter of the circular through hole is 7-10mm, for example, it can be 7mm, 7.5mm, 8mm, 8.5mm, 9mm, 9.5mm or 10mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0014] Preferably, both the first welding surface and the second welding surface are circular in shape.

[0015] Preferably, the diameters of the first welding surface and the second welding surface are both 300-400mm, for example, 300mm, 320mm, 340mm, 360mm, 380mm or 400mm, but not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0016] Preferably, the target material of the double-layer spray head plate is aluminum.

[0017] Preferably, the pretreatment includes machining.

[0018] Preferably, the flatness of the processed target material is 0.1-0.2 mm, for example, it can be 0.1 mm, 0.12 mm, 0.14 mm, 0.16 mm, 0.18 mm or 0.2 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0019] Preferably, the thickness of the processed target material is 18-22 mm, for example, it can be 18 mm, 18.5 mm, 19 mm, 19.5 mm, 20 mm, 20.5 mm, 21 mm, 21.5 mm or 22 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0020] Preferably, the frequency of the ultrasonic probe is 13-17MHz, for example, it can be 13MHz, 14MHz, 15MHz, 16MHz or 17MHz, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] In this invention, it is preferable to control the frequency of the ultrasonic probe within a specific range, which can further improve the detection rate and detection accuracy.

[0022] Preferably, the linear velocity of the ultrasonic probe during scanning is 90-110 mm / s, for example, it can be 90 mm / s, 95 mm / s, 100 mm / s, 105 mm / s or 110 mm / s, but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0023] In this invention, it is preferable to control the scanning linear speed within a specific range, which can further improve the detection rate and shorten the detection time.

[0024] Preferably, the focal length of the ultrasonic probe is 70-80mm, for example, it can be 70mm, 72mm, 74mm, 76mm, 78mm or 80mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0025] Preferably, the thickness of the water layer during ultrasonic testing is 240-260 mm, for example, it can be 240 mm, 242 mm, 244 mm, 246 mm, 248 mm, 250 mm, 252 mm, 254 mm, 256 mm, 258 mm or 260 mm, but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0026] In this invention, it is preferable to control the focal length of the ultrasonic probe and the thickness of the water layer within a specific range, thereby further ensuring the accuracy of flaw detection.

[0027] In this invention, the "thickness of the water layer" refers to the vertical height of the water layer between the water surface and the bottom surface of the target material.

[0028] As a preferred embodiment of the present invention, the ultrasonic flaw detection method includes the following steps:

[0029] (1) The double-layer spray head plate target material is machined to obtain the treated target material, wherein the flatness of the treated target material is 0.1-0.2mm and the thickness is 18-22mm;

[0030] The double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other; a cavity is provided between the first welding surface and the second welding surface; and a circular through hole is provided on both the first welding surface and the second welding surface.

[0031] (2) Place the processed target material obtained in step (1) underwater, with a water layer thickness of 240-260 mm, and then insert the ultrasonic probe underwater to perform ultrasonic testing on the target material.

[0032] The ultrasonic testing method includes: focusing an ultrasonic probe on the center of the first or second weld surface, and then moving it from the center along a spiral trajectory for testing. The ultrasonic probe has a frequency of 13-17MHz, a linear velocity of 90-110mm / s, and a focal length of 70-80mm.

[0033] Compared with the prior art, the present invention has the following beneficial effects:

[0034] The ultrasonic flaw detection method provided by this invention can complete the flaw detection of the entire target material by testing only any welding surface of the target material of the double-layer spray head plate. Under optimal conditions, it can reduce the detection error to below 4.95%, greatly improve the detection rate, reduce the detection time, and has good accuracy. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the ultrasonic flaw detection method used in Embodiment 1 of the present invention.

[0036] Figure 2 This is a schematic diagram of the first welding surface of the target material of the double-layer spray head plate according to Embodiment 1 of the present invention;

[0037] Among them, 1-double-layer spray head plate target material; 2-ultrasonic probe. Detailed Implementation

[0038] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0039] Example 1

[0040] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material, the ultrasonic flaw detection method including the following steps:

[0041] (1) The double-layer spray head plate target material is machined to obtain the treated target material. The flatness of the treated target material is 0.15mm and the thickness is 20mm.

[0042] The double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other, with a cavity between the first welding surface and the second welding surface. Both the first welding surface and the second welding surface are provided with circular through holes with a diameter of 8mm. Both the first welding surface and the second welding surface are circular in shape and have a diameter of 350mm. The material of the double-layer spray head plate target material is aluminum.

[0043] (2) Place the processed target material obtained in step (1) underwater, with a water layer thickness of 250 mm, and then insert the ultrasonic probe underwater to perform ultrasonic testing on the target material.

[0044] The ultrasonic testing method includes: focusing an ultrasonic probe on the center of the first weld surface, and then moving it from the center along a spiral trajectory for testing. The ultrasonic probe has a frequency of 15MHz, a linear velocity of 100mm / s, and a focal length of 80mm.

[0045] Example 2

[0046] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material, the ultrasonic flaw detection method including the following steps:

[0047] (1) The double-layer spray head plate target material is machined to obtain the treated target material. The flatness of the treated target material is 0.1 mm and the thickness is 18 mm.

[0048] The double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other, with a cavity between the first welding surface and the second welding surface. Both the first welding surface and the second welding surface are provided with circular through holes with a diameter of 7mm. Both the first welding surface and the second welding surface are circular in shape and have a diameter of 300mm. The material of the double-layer spray head plate target material is aluminum.

[0049] (2) Place the processed target material obtained in step (1) underwater, with a water layer thickness of 240 mm, and then insert the ultrasonic probe underwater to perform ultrasonic testing on the target material.

[0050] The ultrasonic testing method includes: focusing an ultrasonic probe on the center of the first weld surface, and then moving it from the center along a spiral trajectory for testing. The ultrasonic probe has a frequency of 14MHz, a linear velocity of 95mm / s, and a focal length of 75mm.

[0051] Example 3

[0052] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material, the ultrasonic flaw detection method including the following steps:

[0053] (1) The double-layer spray head plate target material is machined to obtain the treated target material. The flatness of the treated target material is 0.2 mm and the thickness is 22 mm.

[0054] The double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other, with a cavity between the first welding surface and the second welding surface. Both the first welding surface and the second welding surface are provided with circular through holes with a diameter of 10 mm. Both the first welding surface and the second welding surface are circular in shape and have a diameter of 400 mm. The material of the double-layer spray head plate target material is aluminum.

[0055] (2) Place the processed target material obtained in step (1) underwater, with a water layer thickness of 260 mm, and then insert the ultrasonic probe underwater to perform ultrasonic testing on the target material.

[0056] The ultrasonic testing method includes: focusing an ultrasonic probe on the center of the first weld surface, and then moving it from the center along a spiral trajectory for testing. The ultrasonic probe has a frequency of 16MHz, a linear velocity of 105mm / s, and a focal length of 70mm.

[0057] Example 4

[0058] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material. The only difference from Embodiment 1 is that the linear velocity is 85 mm / s.

[0059] Example 5

[0060] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material. The only difference from Embodiment 1 is that the linear velocity is 120 mm / s.

[0061] Example 6

[0062] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material. The only difference from Embodiment 1 is that the thickness of the water layer is 300mm.

[0063] Example 7

[0064] This embodiment provides an ultrasonic flaw detection method for a double-layer spray head plate target material. The only difference from Embodiment 1 is that the thickness of the water layer is 200mm.

[0065] In Examples 1-7, the target materials for the double-layer spray head plates all used standard samples with a known defect rate of 10%. After ultrasonic testing, the defect rate was obtained, and the detection error was calculated. The detection error was calculated as follows: Detection error = (Detection defect rate - Known defect rate) / Known defect rate × 100%. The results are shown in Table 1.

[0066] Table 1

[0067] Detection error / % Example 1 0.18 Example 2 0.84 Example 3 4.95 Example 4 7.50 Example 5 10.28 Example 6 20.34 Example 7 38.73

[0068] The following points can be observed from the data in Table 1:

[0069] (1) As can be seen from the data of Examples 1-7, under better conditions, the ultrasonic flaw detection method provided by the present invention can reduce the detection error to below 4.95%.

[0070] (2) A comprehensive comparison of the data from Example 1 and Examples 4-5 shows that the linear velocity in Example 1 is 100 mm / s, which is significantly lower than the 85 mm / s and 120 mm / s in Examples 4-5, respectively. Therefore, it can be seen that by controlling the linear velocity within a specific range, the present invention can further improve the accuracy of flaw detection.

[0071] (3) A comprehensive comparison of the data from Example 1 and Examples 6-7 shows that the thickness of the water layer in Example 1 is 250 mm, which is significantly lower than the 300 mm and 200 mm in Examples 6-7, respectively. Therefore, it can be seen that by controlling the thickness of the water layer within a specific range, the present invention can further improve the accuracy of flaw detection.

[0072] In summary, the ultrasonic flaw detection method provided by this invention can complete the flaw detection of the entire target material by testing only any welding surface of the double-layer spray head plate target material, which greatly improves the detection rate, reduces the detection time, and has good accuracy.

[0073] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. An ultrasonic flaw detection method for a double-layer spray head plate target material, characterized in that, The ultrasonic flaw detection method includes the following steps: (1) The double-layer spray head plate target material is pretreated to obtain the treated target material; the double-layer spray head plate target material includes a first welding surface and a second welding surface arranged opposite to each other; a cavity is provided between the first welding surface and the second welding surface; and a circular through hole is provided on both the first welding surface and the second welding surface. (2) Place the processed target material obtained in step (1) underwater, and then insert the ultrasonic probe underwater to perform ultrasonic flaw detection on the target material. The ultrasonic flaw detection method includes: focusing the ultrasonic probe on the center of the first weld surface or the second weld surface, and then moving it from the center along a spiral trajectory for flaw detection; by performing a spiral trajectory flaw detection on one side of the weld surface, the overall flaw detection of the target material can be achieved.

2. The ultrasonic flaw detection method according to claim 1, characterized in that, The diameter of the circular through hole is 7-10 mm.

3. The ultrasonic flaw detection method according to claim 1, characterized in that, Both the first welding surface and the second welding surface are circular in shape.

4. The ultrasonic flaw detection method according to claim 3, characterized in that, The diameters of both the first and second welding surfaces are 300-400 mm.

5. The ultrasonic flaw detection method according to claim 1, characterized in that, The target material of the double-layer spray head plate is aluminum.

6. The ultrasonic flaw detection method according to claim 1, characterized in that, The pretreatment includes machining.

7. The ultrasonic flaw detection method according to claim 1, characterized in that, The flatness of the processed target material is 0.1-0.2 mm.

8. The ultrasonic flaw detection method according to claim 1, characterized in that, The thickness of the processed target material is 18-22 mm.

9. The ultrasonic flaw detection method according to claim 1, characterized in that, The frequency of the ultrasonic probe is 13-17MHz.

10. The ultrasonic flaw detection method according to claim 1, characterized in that, The ultrasonic probe performs scanning at a linear speed of 90-110 mm / s.

11. The ultrasonic flaw detection method according to claim 1, characterized in that, The focal length of the ultrasonic probe is 70-80mm.

12. The ultrasonic flaw detection method according to claim 1, characterized in that, The thickness of the water layer during ultrasonic testing is 240-260 mm.

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