Spreader tray structure

Abstract

The application discloses a tray structure of a glue uniformizing machine and relates to the technical field of the glue uniformizing machine. The tray structure of the glue uniformizing machine comprises a bearing disc and a supporting disc, the bearing disc is detachably arranged on the supporting disc through a first connecting structure, and the bearing disc and the supporting disc jointly enclose an air cavity; a substrate supporting plane is arranged on the side of the bearing disc far from the air cavity, a plurality of suction holes with the same diameter are uniformly arranged on the substrate supporting plane, the suction holes penetrate through the bearing disc and are communicated with the air cavity, and a suction hole communicated with the air cavity is arranged on the supporting disc. The suction force of the tray structure of the glue uniformizing machine is balanced, the problem that the substrate is deformed is solved, the glue uniformizing effect is guaranteed, and the glue uniformizing yield and work efficiency are improved.

Description

Technical Field

[0001] This invention relates to the field of spin coater technology, and more specifically to a spin coater tray structure. Background Technology

[0002] A spin coater is a device that drips various adhesive liquids onto a high-speed rotating substrate and uses centrifugal force to evenly coat the substrate with the adhesive liquid.

[0003] Currently, there are two main types of tray structures for spin coaters used to support substrates: concentric ring type and support column type. The concentric ring type includes a circular support plate and multiple annular protrusions coaxially arranged on the support plate from the inside out. An air extraction hole is set at the center of the support plate, and the air extraction hole draws air to adsorb the substrate onto the upper surface of the annular protrusions. The support column type includes a circular support plate and multiple support columns evenly arranged on the support plate. An air extraction hole is set at the center of the support plate, and the air extraction hole draws air to adsorb the substrate onto the upper surface of the support columns.

[0004] Although both of the above-mentioned spin coater tray structures can be used, the fact that each of them only has one air extraction hole on its support tray results in uneven suction on the substrate. Due to the influence of the suction strength, the substrate is prone to deformation, which seriously affects the spin coater effect and reduces the spin coater yield and work efficiency. Summary of the Invention

[0005] To address the aforementioned deficiencies in existing technologies, this invention provides a spin coater tray structure. This spin coater tray structure provides balanced suction, solves the problem of substrate deformation, ensures spin coater performance, and improves spin coater yield and work efficiency.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0007] The tray structure of the spin coater includes a carrier tray and a support tray. The carrier tray is detachably mounted on the support tray via a first connecting structure, and the carrier tray and the support tray together form an air cavity. A substrate support plane is provided on the side of the carrier tray away from the air cavity. Multiple suction holes of the same diameter are evenly arranged on the substrate support plane. The suction holes penetrate the carrier tray and communicate with the air cavity. An air extraction hole is provided on the support tray, which communicates with the air cavity.

[0008] The carrier disk and the support disk are two coaxially arranged disks, and the diameter of the support disk is larger than the diameter of the carrier disk.

[0009] The bearing plate has a groove on the side near the support plate, and the groove and the support plate together form the air cavity.

[0010] The first connecting structure is provided in two sets, and the two first connecting structures are arranged in a circular array with the axis of the bearing plate and the support plate as the central axis.

[0011] The first connecting structure includes a first connecting hole penetrating the carrier plate, a second connecting hole penetrating the support plate, and a cylindrical pin passing through the first connecting hole and the second connecting hole.

[0012] The coating machine tray structure further includes an adapter sleeve for connecting to the coating machine. The adapter sleeve is located on the side of the support plate away from the carrier plate. The carrier plate, the support plate, and the adapter sleeve are coaxially arranged. The air extraction hole is connected to the adapter sleeve.

[0013] The adapter sleeve is integrally formed with the support plate, and the inner hole of the adapter sleeve penetrates the support plate to form the air extraction hole.

[0014] The adapter sleeve is provided with a second connecting structure, and the adapter sleeve is connected to the rotating device of the spin coater through the second connecting structure.

[0015] The second connection structure includes a mounting through hole on the adapter sleeve and a snap-fit ​​pin passing through the mounting through hole. The axis of the mounting through hole is perpendicular to the axis of the adapter sleeve, and the snap-fit ​​pin is used to engage with a slot on the rotating device.

[0016] The adapter sleeve is fitted with a sealing sleeve at the position corresponding to the mounting through hole.

[0017] By adopting the above technical solution, the beneficial effects of the present invention are:

[0018] The spin coater tray structure provided by this invention features an air chamber and a substrate support plane on the carrier plate. Multiple suction holes of the same diameter are evenly arranged on the substrate support plane, and these holes penetrate the carrier plate and connect to the air chamber. This ensures that the suction force of each suction hole is the same, thereby guaranteeing balanced suction force on all parts of the substrate. This allows the substrate to adhere tightly to the substrate support plane of the carrier plate, maintaining a horizontal state. This achieves point adsorption and surface support, solving the problem of substrate deformation, greatly improving the uniformity of spin coater application, ensuring the spin coater effect, and increasing the spin coater yield and work efficiency. Furthermore, the detachable connection between the carrier plate and the support plate greatly improves the convenience of maintenance and cleaning. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the tray structure of the spin coater of the present invention;

[0020] Figure 2 yes Figure 1A sectional view;

[0021] In the figure: 1. Support plate; 11. Substrate support plane; 12. Suction hole; 13. First connecting hole; 2. Support plate; 21. Air extraction hole; 3. Air cavity; 4. Cylindrical pin; 5. Adapter sleeve; 6. Snap-fit ​​pin; 7. Sealing sleeve. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0023] like Figure 1 and Figure 2 As shown, the tray structure of the spin coater includes a carrier tray 1 and a support tray 2. The carrier tray 1 is detachably mounted on the support tray 2 via a first connecting structure, and the carrier tray 1 and the support tray 2 together form an air cavity 3. A substrate support plane 11 is provided on the side of the carrier tray 1 away from the air cavity 3. Multiple suction holes 12 of the same diameter are evenly arranged on the substrate support plane 11. The suction holes 12 penetrate the carrier tray 1 and are connected to the air cavity 3. An air extraction hole 21 connected to the air cavity 3 is provided on the support tray 2.

[0024] The tray structure of this spin coater incorporates an air chamber 3 and a substrate support plane 11 on a support plate 1. Multiple suction holes 12 of the same diameter are evenly arranged on the substrate support plane 11, and these holes 12 penetrate the support plate 1 and connect to the air chamber 3. This ensures that the suction force of each suction hole 12 is the same, thereby guaranteeing balanced suction force on all parts of the substrate (not shown in the figure). This allows the substrate to adhere tightly to the substrate support plane 11 of the support plate 1, maintaining a horizontal state. This achieves point adsorption and surface support, solving the problem of substrate deformation, greatly improving the uniformity of spin coater application, ensuring the spin coater effect, and increasing the spin coater yield and work efficiency. Furthermore, the detachable connection between the support plate 1 and the support plate 2 greatly improves the convenience of maintenance and cleaning.

[0025] In this embodiment, the carrier disk 1 and the support disk 2 are two coaxial disks, and the diameter of the support disk 2 is larger than the diameter of the carrier disk 1.

[0026] By setting the carrier plate 1 and the support plate 2 as circular discs, they can maintain better balance during rotation, ensuring the uniform coating effect. During the uniform coating process, excess adhesive will be thrown out from the edge of the substrate. After the thrown adhesive bounces off the side wall of the adhesive collection pot of the uniform coating machine, it will contaminate the edge of the side of the substrate that is in contact with the carrier plate. By setting the diameter of the support plate 2 to be larger than that of the carrier plate 1, on the one hand, the rebounded adhesive is blocked, reducing the risk of substrate contamination, and on the other hand, the support strength is enhanced, improving the stability during uniform coating.

[0027] In this embodiment, the carrier plate 1 has a groove on the side near the support plate 2, and the groove and the support plate 2 together form an air cavity 3. By setting the air cavity 3, the suction force of each suction hole 12 is ensured to be the same, the suction force on each part of the substrate is balanced, the possibility of substrate deformation is reduced, and the uniformity of the coating is improved.

[0028] Specifically, the upper surface of the support plate 2 is a plane, and the groove and the upper surface of the support plate 2 together form the air cavity 3. In practical applications, the air cavity 3 can also be formed by the groove provided on the support plate 2 and the bearing plate 1, or grooves can be provided on the support plate 2 and the bearing plate 1 respectively, and the two grooves together form the air cavity 3. The specific choice depends on the actual needs, and this embodiment does not limit it.

[0029] To improve the convenience of maintenance and cleaning, this embodiment sets up two sets of first connecting structures, arranged in a circular array with the axes of the bearing plate 1 and the support plate 2 as the central axis. In practical applications, the number of first connecting structures is not limited and can be set according to requirements.

[0030] Specifically, the first connecting structure includes a first connecting hole 13 penetrating the bearing plate 1, a second connecting hole penetrating the support plate 2, and a cylindrical pin 4 passing between the first connecting hole 13 and the second connecting hole. In practical applications, the first connecting structure can also adopt a bolt and threaded hole structure, depending on actual needs. This embodiment does not impose any restrictions on this.

[0031] To facilitate connection with the spin coater, the spin coater tray structure in this embodiment also includes an adapter sleeve 5 for connection with the spin coater. The adapter sleeve 5 is located on the side of the support plate 2 away from the carrier plate 1. The carrier plate 1, the support plate 2 and the adapter sleeve 5 are coaxially arranged, and the air extraction hole 21 is connected to the adapter sleeve 5.

[0032] In order to improve the connection strength between the adapter sleeve 5 and the support plate 2, in this embodiment, the adapter sleeve 5 and the support plate 2 are preferably integrally set, and the inner hole of the adapter sleeve 5 penetrates the support plate 2 to form an air extraction hole 21.

[0033] In this embodiment, the adapter sleeve 5 is provided with a second connecting structure, and the adapter sleeve 5 is connected to the rotating device of the spin coater through the second connecting structure.

[0034] Specifically, the second connecting structure includes a mounting through hole on the adapter sleeve 5 and a snap-fit ​​pin 6 passing through the mounting through hole. The axis of the mounting through hole is perpendicular to the axis of the adapter sleeve 5, and the snap-fit ​​pin 6 is used to engage with a slot on the rotating device. This structure improves assembly efficiency.

[0035] To prevent air leakage through the installation through hole and improve the adsorption effect, in this embodiment, a sealing sleeve 7 is fitted on the adapter sleeve 5 at the position corresponding to the installation through hole.

[0036] The above is a preferred embodiment of the tray structure of the spin coater of the present invention. There are many other embodiments, which will not be described in detail here.

[0037] In summary, the tray structure of the spin coater of this invention achieves point adsorption and surface support, solves the problem of substrate deformation, greatly improves the uniformity of spin coater application, ensures the spin coater effect, and improves the spin coater yield and work efficiency.

[0038] This invention is not limited to the specific embodiments described above. Any modifications made by those skilled in the art based on the above concept without creative effort are within the scope of protection of this invention.

Claims

1. A tray structure for a spin coater, characterized in that, It includes a carrier disk and a support disk, wherein the carrier disk and the support disk are two coaxially arranged disks, and the diameter of the support disk is larger than the diameter of the carrier disk; The carrier plate is detachably mounted on the support plate via a first connecting structure, and the carrier plate and the support plate together form an air cavity; The support plate has a substrate support plane on the side away from the air cavity. Multiple suction holes of the same diameter are evenly arranged on the substrate support plane. The suction holes penetrate the support plate and are connected to the air cavity. The outer substrate is in close contact with the substrate support plane to achieve point adsorption and surface support. The support plate is provided with an air extraction hole that communicates with the air chamber; The spin coater tray structure also includes an adapter sleeve for connecting to the spin coater. The adapter sleeve is integrally formed with the support plate, and the inner hole of the adapter sleeve penetrates the support plate to form the air extraction hole.

2. The tray structure of the spin coater according to claim 1, characterized in that, The bearing plate has a groove on the side near the support plate, and the groove and the support plate together form the air cavity.

3. The tray structure of the spin coater according to claim 1, characterized in that, The first connecting structure is provided in two sets, and the two first connecting structures are arranged in a circular array with the axis of the bearing plate and the support plate as the central axis.

4. The tray structure of the spin coater according to claim 3, characterized in that, The first connecting structure includes a first connecting hole penetrating the carrier plate, a second connecting hole penetrating the support plate, and a cylindrical pin passing through the first connecting hole and the second connecting hole.

5. The tray structure of the spin coater according to any one of claims 1 to 4, characterized in that, The adapter sleeve is located on the side of the support plate away from the bearing plate. The bearing plate, the support plate, and the adapter sleeve are coaxially arranged. The air extraction hole is connected to the adapter sleeve.

6. The tray structure of the spin coater according to claim 5, characterized in that, The adapter sleeve is provided with a second connecting structure, and the adapter sleeve is connected to the rotating device of the spin coater through the second connecting structure.

7. The tray structure of the spin coater according to claim 6, characterized in that, The second connection structure includes a mounting through hole on the adapter sleeve and a snap-fit ​​pin passing through the mounting through hole. The axis of the mounting through hole is perpendicular to the axis of the adapter sleeve, and the snap-fit ​​pin is used to engage with a slot on the rotating device.

8. The tray structure of the spin coater according to claim 7, characterized in that, The adapter sleeve is fitted with a sealing sleeve at the position corresponding to the mounting through hole.

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