Bulk acoustic wave gyroscope with a composite ring-disk structure

Abstract

The application relates to a bulk acoustic wave gyroscope with a composite ring-disk structure, which comprises an anchor point, a composite vibration assembly and a circuit assembly; the composite vibration assembly comprises a resonance disk, a resonance ring and a coupling structure for connecting the two; a flexible structure for connecting the resonance disk and the anchor point is arranged between the two; the circuit assembly comprises at least one driving electrode and at least one sensing electrode; the driving electrode applies voltage to the composite vibration assembly in an electrostatic mode, so as to excite the composite vibration assembly in a coupling mode; and the sensing electrode responds to the composite vibration assembly excited in the coupling mode, and measures the signal of the composite vibration assembly in an electrostatic mode. Compared with the prior art, the application uses single crystal silicon as a manufacturing material, optimizes the mechanical structure of the gyroscope, excites the coupling mode of the gyroscope ring-disk by using the electrode, reduces the frequency mismatch of the gyroscope, improves the working frequency and the angular gain of the bulk acoustic wave gyroscope, and realizes the improvement of the working performance of the bulk acoustic wave gyroscope.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) technology, and specifically to a bulk acoustic gyroscope with a composite ring disk structure. Background Technology

[0002] A gyroscope is a sensing device used to measure the angular rate of rotation or the attitude angle of an object, and it is a core component of an inertial system. In particular, bulk acoustic wave (BAW) disk gyroscopes have attracted widespread attention due to their high quality factor (Q value) and high resonant frequency. However, the use of single-crystal silicon (an anisotropic material) leads to frequency mismatch between the two operating modes of BAW disk gyroscopes, thus affecting their performance. Furthermore, the complex operating environment places higher demands on the gyroscope's operating frequency (above megahertz / MHz).

[0003] To reduce frequency mismatch and improve the performance of bulk acoustic disk gyroscopes, researchers have proposed several solutions, including the following three: (1) using isotropic materials, such as polycrystalline silicon; (2) using higher-order modes of the wine glass mode, where the use of a 3-node wine glass mode can effectively reduce the frequency mismatch between the two modes; and (3) using electrostatic adjustment, where the stiffness of the two modes is adjusted by adding external electrodes, thereby achieving frequency matching of the working modes.

[0004] Using isotropic materials increases the manufacturing cost of bulk acoustic disk gyroscopes, and polysilicon has poor circuit integration capabilities. Using a 3-node goblet mode reduces frequency mismatch but also lowers the gyroscope's angular gain, which is detrimental to achieving high-performance gyroscopes. Electrostatic adjustment can compensate for low frequency mismatch between two operating modes, but for larger frequency differences (above 10kHz), higher adjustment voltages and more sensitive voltage regulation methods are required, which places higher demands on circuit design. Summary of the Invention

[0005] The purpose of this invention is to overcome at least one of the defects in the prior art by providing a bulk acoustic wave gyroscope with a composite ring disk structure. This gyroscope uses single-crystal silicon as the manufacturing material. By optimizing the mechanical structure of the gyroscope and utilizing electrodes to excite the ring disk coupling mode, the frequency mismatch of the gyroscope is reduced, and the operating frequency and angular gain of the bulk acoustic wave gyroscope are improved, thereby enhancing the performance of the bulk acoustic wave gyroscope.

[0006] The objective of this invention can be achieved through the following technical solutions:

[0007] A bulk acoustic wave gyroscope with a composite ring disk structure is manufactured using single-crystal silicon. The designed bulk acoustic wave gyroscope can achieve single-crystal silicon asymmetry compensation, improve device operating frequency and angular gain through ring disk coupling modes. The bulk acoustic wave gyroscope includes an anchor point, a composite vibration component and a circuit component.

[0008] The composite vibration component includes: a resonant disk and a resonant ring, as well as a coupling structure for connecting the two;

[0009] A flexible structure is provided between the resonant disk and the anchor point to connect the two.

[0010] The circuit assembly includes: at least one driving electrode and at least one sensing electrode;

[0011] The driving electrode applies a voltage to the composite vibration component in an electrostatic manner, thereby exciting the composite vibration component in a coupled mode.

[0012] The sensing electrode responds to the composite vibration component excited by the coupled mode and measures the signal of the composite vibration component in an electrostatic manner.

[0013] The coupling mode is the coupling of the M-node wine glass mode and the N-node wine glass mode; wherein, M and N can be equal or unequal, and can both be 2 or 3 or higher nodes;

[0014] Preferably, the coupling modes include: coupling between two 2-node wine glass modes, coupling between two 2-node wine glass modes and three 3-node wine glass modes, coupling between three 3-node wine glass modes, or coupling between higher nodes and different modes.

[0015] Optionally, the coupling structure is a rectangular or annular flexible spoke, or other flexible structure that can connect the resonant disk and the resonant ring.

[0016] Optionally, the flexible structure is rectangular or a flexible spoke for decoupling the resonant disk from the anchor point, or other flexible decoupling structures that can connect the resonant disk to the anchor point.

[0017] Optionally, the stiffness of the resonant disk can be adjusted by controlling the width and length of the flexible structure.

[0018] Optionally, the edge of the resonant disk is provided with a slot.

[0019] Optionally, the stiffness of the resonant disk can be adjusted by controlling the width and length of the slot.

[0020] Optionally, the coupling mode is obtained by anti-phase coupling of two resonant disks and resonant rings with the same mode, or by in-phase or anti-phase coupling of two resonant disks and resonant rings with different modes. More specifically, the coupling mode can be obtained by anti-phase coupling of the vibration mode of a single resonant disk and the vibration mode of a single resonant ring, or by in-phase or anti-phase coupling of the vibration mode of a single resonant disk and the vibration mode of a single resonant ring (two identical modes or two different modes coupled in-phase or anti-phase).

[0021] Optionally, the driving electrode and the sensing electrode are both arranged on the outer side and / or the inner side of the resonant ring, and their positions are opposite each other.

[0022] Optionally, the resonant disk and the resonant ring are arranged concentrically, with the resonant ring located outside the resonant disk.

[0023] Optionally, the bulk acoustic gyroscope achieves frequency matching and angular gain enhancement through anti-phase coupled 2-node goblet modes; the anti-phase coupled 2-node goblet modes constrain each other during vibration, and this constraint compensates for the anisotropy caused by the single-crystal silicon material; at the same time, the coupled 2-node coupled modes also enhance the angular gain of the device, making it higher than that of the 3-node coupled modes.

[0024] Compared with the prior art, the present invention has the following advantages:

[0025] (1) In the bulk acoustic wave gyroscope with composite ring disk structure designed in this invention, the asymmetry compensation of single crystal silicon is achieved by using ring disk coupling mode, which reduces the frequency mismatch of bulk acoustic wave disk gyroscope and increases the working frequency of gyroscope (higher than the working frequency of 3-node wine glass mode), so that the angular gain is higher than the theoretical maximum value of 3-node wine glass mode of gyroscope.

[0026] (2) This invention further optimizes the bulk acoustic wave gyroscope with a composite ring disk structure, optimizes the stiffness of the resonant disk, and further improves the working performance of the bulk acoustic wave gyroscope. The working frequency of the bulk acoustic wave gyroscope is 1557684Hz, the frequency mismatch is 63ppm (99Hz), and the angular gain is 0.58. Attached Figure Description

[0027] Figure 1A This is a schematic layout of the bulk acoustic gyroscope with a composite ring disk structure in the embodiment.

[0028] Figure 1B for Figure 1A A magnified view of a portion of the coupling structure 103.

[0029] Figure 1C for Figure 1AFurther illustration of the schematic layout of the bulk acoustic gyroscope, which shows the connection method between the composite vibration component and the anchor point 105 and the form of the first type of adjusting the stiffness of the resonant disk 101.

[0030] Figure 1D for Figure 1A Further illustration of the schematic layout of the bulk acoustic gyroscope, which shows a second form of adjusting the stiffness of the resonant disk 101.

[0031] Figure 1E for Figure 1C A further illustration of the schematic layout of the bulk acoustic gyroscope, showing the arrangement of the electrodes.

[0032] Figure 2A for Figure 1A A first example arrangement of the driving electrode and the sensing electrode in a bulk acoustic gyroscope.

[0033] Figure 2B for Figure 1A A second example arrangement of the driving electrode and the sensing electrode in a bulk acoustic gyroscope.

[0034] Figure 3A and Figure 3B For the coupled mode of the anti-coupling 2-node goblet mode Figure 1B The intrinsic modes of the composite vibration component.

[0035] Figure 3C The normalized amplitude-frequency curve of the wine glass mode resonant ring 102 at the anti-phase coupling 2 nodes is shown. Figure 3D The normalized mode shape curves of the two-node goblet mode of a conventional ring gyroscope under uncoupled mode conditions.

[0036] Figure 4A for Figure 1C The medium-volume acoustic gyroscope is used for modal displacement and vibration energy of a two-node wine glass mode.

[0037] Figure 4B for Figure 1C The medium-volume acoustic gyroscope is used to couple the displacement and vibration energy of a two-node extended mode.

[0038] Figure 5A for Figure 1C Modal displacement and vibrational energy of a medium-volume acoustic gyroscope in a two-node wine glass mode on anisotropic silicon.

[0039] Figure 5B for Figure 1C The coupled modal displacement and vibration energy of a medium-volume acoustic gyroscope coupled with two nodes of extended modes on anisotropic silicon.

[0040] Figure 6 is Figure 1A A schematic diagram of the mode shape of the coupled mode.

[0041] Figure 7 In order to be in Figure 5B Under certain conditions, the relationship between the angular gain of the bulk acoustic gyroscope and the width of the resonant ring 102 is shown in the schematic diagram.

[0042] The numbers in the figure indicate: 101-Resonant disk 101; 102-Resonant ring; 103-Coupling structure; 104-Flexible structure; 105-Anchor point; 106-Slot; 107-Electrode; 201-Driving electrode; 202-Sensing electrode; D1-First driving electrode; D2-Second driving electrode; S1-First sensing electrode; S2-Second sensing electrode. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] The various terms appearing in this invention are for the purpose of describing particular embodiments only and are not intended to limit the invention. Unless the context clearly indicates otherwise, the singular form is intended to include the plural form as well. When the terms "comprising" and / or "including" are used in this specification, these terms specify the presence of the stated feature, integral, step, operation, element, and / or component, but do not exclude the presence and / or addition of more than one other feature, integral, step, operation, element, component, and / or group thereof.

[0045] Example

[0046] A bulk acoustic wave gyroscope with a composite ring-disk structure is disclosed, which is manufactured using single-crystal silicon as the material. Its operating mode is a wine glass mode driven by a ring-disk structure coupled with a mode. The bulk acoustic wave gyroscope may include a composite vibration component that is electrostatically excited and sensed by the coupled mode. In this embodiment, the composite vibration component may include a composite vibration component in which a single resonant disk 101 and a single resonant ring 102 are connected by a coupling structure 103. The coupling structure 103 is a rectangular or annular flexible spoke.

[0047] Conventional bulk acoustic gyroscopes typically use disk-structured vibration modes, such as the wine glass mode, as their operating modes. This embodiment optimizes the structure to achieve mode coupling within a ring-disk structure, using a new coupled mode as the gyroscope's vibration mode. Compared to single-structure vibration modes, the ring-disk coupled mode exhibits better performance in certain aspects. For example, coupling two identical second-order extended modes yields a coupled extended mode. The advantages of the coupled extended mode are that it has a higher vibration frequency compared to a second-order wine glass mode gyroscope and a higher angular gain compared to a third-order wine glass mode gyroscope. Furthermore, on anisotropic silicon, the coupled mode can achieve lower frequency mismatch by coupling structures with different stiffnesses.

[0048] A bulk acoustic wave gyroscope may include a composite vibration assembly, at least one drive electrode 201, and at least one sensing electrode 202. Preferably, if there is at least one pair of drive electrodes 201 and at least one pair of sensing electrodes 202, they may be located inside and / or outside the composite vibration assembly without being directly connected to the composite vibration assembly.

[0049] The driving electrode 201 electrostatically excites the coupled modes of the composite vibration component, and the sensing electrode 202 electrostatically senses only the coupled modes of the composite vibration component.

[0050] Figure 1A An exemplary layout of a bulk acoustic gyroscope with coupled modes is shown, which unfolds into a composite vibration assembly. In this embodiment, the composite vibration assembly includes a resonant disk 101 and a resonant ring 102, which are connected by eight coupling structures 103.

[0051] like Figure 1A As shown, the coupling structure 103 is a flexible spoke. Each coupling structure 103 is evenly distributed between the resonant disk 101 and the resonant ring 102 at a distance of 45°, connecting the resonant disk 101 and the resonant ring 102 to form a composite vibration component.

[0052] Table 1 below shows the various geometric parameters of the composite vibration component in this embodiment.

[0053] Figure 1C for Figure 1AFurther illustration of an example layout for a bulk acoustic gyroscope with a composite ring-disc structure. This layout shows the connection method between the composite vibration component and the anchor point 105. The resonant disk 101 constituting the composite vibration component is connected to the anchor point 105 through a number of flexible structures 104, suspending the entire composite vibration component on the anchor point 105. The flexible structures 104 are rectangular or flexible spokes used for decoupling the resonant disk 101 from the anchor point 105. Each flexible structure 104 is evenly distributed between the resonant disk 101 and the anchor point 105 at 90° intervals, connecting the composite vibration component to the anchor point 105. The flexible structures 104 serve as a means of adjusting the stiffness of the resonant disk 101, mainly by adjusting the width and length of the flexible structures 104, thereby adjusting the stiffness of the resonant disk 101.

[0054] Optionally, the stiffness of the resonant disk 101 can be adjusted by controlling the width and length of the slot 106, see [reference needed]. Figure 1D .

[0055] The following table 1 shows Figure 1C The geometric parameters of each structure.

[0056] Table 1 Figure 1C Geometric parameters of each structure

[0057] Inner radius (μm) of resonant disk 101 490 Outer radius (μm) of resonant disk 101 1390 Gap (μm) between resonant disk 101 and resonant ring 102 10 Inner radius of resonant ring 102 (μm) 1400 Outer radius of resonant ring 102 (μm) 1789 Width (μm) of the flexible spokes coupling resonant ring 102 and resonant disk 101 260 The width (μm) of the flexible spokes connecting the resonant disk 101 and anchor point 105. 20 The length of the spokes connecting the resonant disk 101 and the anchor point 105 (μm) 20 Device thickness (μm) 50

[0058] Optionally, Figure 1A The intermediate coupling structure 103 can be replaced by other flexible coupling structures. The number of flexible coupling structures is no longer fixed, but is determined by the composite vibration component and the coupling mode.

[0059] Optionally, Figure 1C The flexible structure 104 can be replaced by other flexible connection structures. The number of flexible connection structures is no longer fixed, but is determined by the composite vibration component and the coupled mode.

[0060] Figure 1E for Figure 1C An example layout of a coupled-mode volume acoustic gyroscope is provided, further comprising the placement of an electrode 107 configured to couple vibration modes via a composite vibration assembly of electrostatic drive and electrostatic induction. The electrode 107 includes a drive electrode and a sensing electrode, which are configured as a composite vibration assembly driven and induced by coupled modes. The driven coupled modes can be viewed as coupled modes generated by the vibration modes excited by the drive resonant disk 101 and the vibration modes excited by the drive resonant ring 102, which differs from the single modes generated by the vibration of a conventional resonant disk 101 or resonant ring 102.

[0061] Optionally, electrode 107 is located outside the composite vibration assembly. Figure 2A for Figure 1AA first example arrangement of the driving electrode and sensing electrode of a mid-body acoustic gyroscope, wherein the driving electrode 201 is arranged outside the composite vibration component; the sensing electrode 202 is arranged outside the composite vibration component, and the sensing electrode 202 corresponds to the driving electrode 201 in position. Electrode 107 may include at least one driving electrode 201 and at least one sensing electrode 202 located on the composite vibration component. The driving electrode 201 is connected to a circuit, and the sensing electrode 202 is also connected to a circuit. A single driving electrode 201 may be configured to electrostatically apply a voltage to the composite vibration component, exciting its vibration modes, and the excited modes are coupled to obtain the coupled vibration modes of a target. A single sensing electrode 202 may be configured to sense the coupled modes of the composite vibration component and output a signal that can be used to measure angular velocity.

[0062] Optionally, electrodes 107 are located on the outer and inner sides of the composite vibration assembly, and increasing the number of electrodes can improve the signal-to-noise ratio of the gyroscope. Figure 2B for Figure 1A A second example arrangement of the driving and sensing electrodes of the mid-body acoustic gyroscope, wherein the driving electrode 201 is arranged on the outer and inner sides of the composite vibration component, i.e., the gap between the resonant ring 102 and the resonant disk 101; the sensing electrode 202 is arranged on the outer and inner sides of the composite vibration component and corresponds to the position of the driving electrode 201, i.e., the gap between the resonant ring 102 and the resonant disk 101. The electrodes are not only located on the outer side of the composite vibration component but also on the inner side, increasing the number of electrodes and thus enhancing the signal output. Electrode 107 may include at least two driving electrodes 201 and at least two sensing electrodes 202 located on the composite vibration component. The first driving electrode D1 and the second driving electrode D2 are arranged together to achieve modal excitation; the first sensing electrode S1 and the second sensing electrode S2 are arranged together to sense modal signals. The driving electrode 201 is connected to a circuit, and the sensing electrode 202 is connected to a circuit. The driving electrode 201 can be configured to electrostatically apply a voltage to the composite vibration component, exciting its vibration modes, and coupling the excited modes to obtain the target coupled vibration modes. The sensing electrode 202 can be configured to sense the coupled modes of the composite vibration component and output a signal that can be used to measure angular velocity.

[0063] It should be understood that, despite Figure 1B The design is for a gyroscope with a coupling mode driven at 1557684Hz, but the coupling between the resonant ring 102 and the resonant disk 101 can be achieved at higher or lower frequencies by modifying the parameters in Table 1.

[0064] Figure 3A and 3BThis refers to a gyroscope structure excited by coupled extended modes during finite element analysis (FEA) simulation. Figure 3C The normalized amplitude-frequency response curves of the anti-phase coupled two-node goblet mode resonant ring 102 according to a non-limiting embodiment are shown, demonstrating the influence of the anti-phase coupled modes on the modes of the resonant ring 102. The anti-phase coupled modes affect the mode shapes of the resonant ring 102, causing changes in the mode shapes of the coupled two-node goblet mode. Figure 3D In contrast, the coupled modes affect the mode shapes of the uncoupled modes, mainly manifested as local changes in the mode shapes. Figure 6 shows a schematic diagram of the mode shapes of the coupled modes. Figure 6A A schematic diagram of the coupled mode shapes of the 2-node wine glass mode and the 2-node wine glass mode in anti-phase coupling; Figure 6B A schematic diagram of the coupled mode shape of the 2-node and 3-node wine glass modes is shown. Figure 6C A schematic diagram of the coupled mode shape of the 3-node wine glass mode and the 3-node wine glass mode in anti-phase coupling is shown; Figure 6D A schematic diagram of the coupled mode shape of the 4-node and 3-node wine glass modes is shown.

[0065] Simulation and Results

[0066] This embodiment describes a bulk acoustic wave gyroscope with coupled modes. However, to demonstrate the advantages of coupled modes over single modes, simulations were performed on bulk acoustic wave gyroscopes operating in coupled extended modes and wine glass modes. Finite element simulations were performed using COMSOL software, employing mechanical and thermal coupling fields. The specific structural dimensions of the devices are shown in Table 1. Frequency sweeps were performed within a certain frequency range to obtain the operating frequencies and operating modes of the wine glass mode and coupled extended mode. Figure 4A and 4B for Figure 1C The finite element simulation results of the medium-volume acoustic wave gyroscope show the direction of vibration displacement indicated by the arrows.

[0067] The angular gain was calculated using MATLAB. The displacement and volume of each micro-element in the working mode were obtained through COMSOL, and the effective mass and Coriolis mass of the gyroscope in that mode were calculated, thus obtaining the angular gain of the bulk acoustic gyroscope in that mode.

[0068] Figure 1C The operating frequency of the medium-volume acoustic wave gyroscope is 1557684Hz, the frequency mismatch is 63ppm (99Hz), and the angular gain is 0.58.

[0069] Appendix: Formula for calculating angular gain, where φ is the displacement of the infinitesimal element.

[0070]

[0071]

[0072] Figure 4A for Figure 1C Modal displacement and vibrational energy of the wine glass mode of a medium-volume acoustic gyroscope. Figure 4B for Figure 1C The modal displacements and vibrational energies of the coupled extended modes of the mid-body acoustic gyroscope are shown in Table 2 below. The vibrational frequencies of the coupled extended modes are higher than those of the wine glass mode (n=2). Figure 4A As shown, the vibrational energy in the wine glass mode is concentrated in the outermost ring, as shown in region 401, while the vibrational energy in the extended mode (such as...) Figure 4B As shown in the diagram, the vibrations are basically evenly concentrated on the inner and outer sides of the resonant disk 101, as shown in region 402, with arrows indicating the direction of vibration.

[0073] Table 2 Comparison of n=2 wine glass mode and n=2 coupled extended mode

[0074] Vibration frequency (MHz) 0.824 1.557

[0075] Figure 5A for Figure 1C Vibrational displacement of the glass mode by a medium-volume acoustic gyroscope in anisotropic silicon. Figure 5B for Figure 1C The vibration displacement of a medium-volume acoustic gyroscope in anisotropic silicon using coupled extended modes. For anisotropic materials, coupled extended modes perform better than wine glass modes in overcoming frequency mismatch, thus resulting in better accuracy for the gyroscope.

[0076] Table 3 Comparison of n=2 wine glass mode and n=2 extended mode in anisotropic silicon

[0077] Vibration frequency mismatch (Hz) 28,770 99 Mismatch rate (PPM) 35537 63

[0078] Figure 7 In order to be in Figure 5B The diagram illustrates the relationship between the angular gain of the bulk acoustic gyroscope and the width of the resonant ring 102 under certain conditions. In the coupled mode, the angular gain of the bulk acoustic gyroscope is limited and cannot reach the theoretical maximum value of 0.8 for the two-node goblet mode of the disk gyroscope, but it is still greater than the theoretical maximum value of 0.44 for the three-node goblet mode of the disk gyroscope. Meanwhile, as the width of the resonant ring 101 increases, the angular gain further increases.

[0079] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A bulk acoustic wave gyroscope with a composite ring disk structure, which is manufactured using single-crystal silicon as the material, characterized in that, The acoustic gyroscope includes an anchor point (105), a composite vibration component, and a circuit component; The composite vibration component includes: a resonant disk (101) and a resonant ring (102), and a coupling structure (103) for connecting the two. A flexible structure (104) for connecting the resonant disk (101) and the anchor point (105) is provided. The circuit assembly includes at least one driving electrode (201) and at least one sensing electrode (202). The driving electrode (201) applies a voltage to the composite vibration component in an electrostatic manner, thereby exciting the composite vibration component in a coupled mode; The sensing electrode (202) responds to the composite vibration component excited by the coupled mode and electrostatically senses and measures the signal of the composite vibration component; The coupling mode is the coupling of the M-node wine glass mode and the N-node wine glass mode; wherein M and N are equal or unequal, and can be 2, 3 or higher nodes. The coupling mode is obtained by antiphase coupling of two resonant disks (101) and resonant rings (102) with the same mode, or by in-phase or antiphase coupling of two resonant disks (101) and resonant rings (102) with different modes.

2. The bulk acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The coupling structure (103) is a rectangular or annular flexible spoke.

3. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The flexible structure (104) is rectangular or a flexible spoke for decoupling the resonant disk (101) from the anchor point (105).

4. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The stiffness of the resonant disk (101) is adjusted by controlling the width and length of the flexible structure (104).

5. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The resonant disk (101) has a slot (106) on its edge.

6. A volume acoustic gyroscope with a composite ring disk structure according to claim 5, characterized in that, The stiffness of the resonant disk (101) is adjusted by controlling the width and length of the slot (106).

7. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The driving electrode (201) and the sensing electrode (202) are both arranged on the outer side and / or inner side of the resonant ring (102), and their positions are opposite each other.

8. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The resonant disk (101) and the resonant ring (102) are arranged concentrically, with the resonant ring (102) located outside the resonant disk (101).

9. A volume acoustic gyroscope with a composite ring disk structure according to claim 1, characterized in that, The bulk acoustic gyroscope achieves frequency matching and angular gain enhancement through anti-phase coupled 2-node goblet modes. The anti-phase coupled 2-node goblet modes mutually constrain each other during vibration, and this constraint compensates for the anisotropy caused by the single-crystal silicon material. At the same time, the coupled 2-node coupled modes also improve the angular gain of the device, making it higher than that of the 3-node coupled modes.

Images