A novel femtosecond laser light guide arm structure based on sliding rail driving

Abstract

This invention discloses a novel femtosecond laser beam guide structure based on a slide rail drive, comprising a worktable, a beam guide arm, and a slide rail drive device for driving the joints of the beam guide arm to move on the worktable. The slide rail drive device includes a vertical slide rail drive mechanism and a horizontal slide rail drive mechanism disposed on the worktable. The vertical slide rail drive mechanism drives the joints of the beam guide arm to move vertically, and the horizontal slide rail drive mechanism drives the joints of the beam guide arm to move horizontally. This beam guide arm structure can reduce the impact of beam guide arm vibration on laser processing during speed changes, thereby improving the positional accuracy and processing accuracy of the beam guide arm.

Description

Technical Field

[0001] This invention relates to the field of light guide arm technology, and specifically to a novel femtosecond laser light guide arm structure based on slide rail drive. Background Technology

[0002] Femtosecond laser technology is a new processing technology developed in the 20th century, and it has the following advantages:

[0003] (1) Short processing time and high instantaneous power. One femtosecond equals 10-1 -15 Femtosecond laser pulses last for several femtoseconds, and their instantaneous power can reach 10⁻⁶. 14 W.

[0004] (2) High processing precision and extremely accurate targeting and focusing. Femtosecond lasers can be focused on tiny areas much smaller than the diameter of a human hair, with an accuracy of ±5μm.

[0005] (3) It causes minimal damage to the processed materials and can process a wide variety of materials. The intensity of a femtosecond laser after focusing can reach 10... 26 W / m 2 The atoms on the surface of the material being processed are rapidly dissociated by irradiation, and the processing is completed before the energy can be transferred to the crystal lattice. For the sample, there is almost no thermal effect or impact vibration.

[0006] Compared to traditional cutting techniques, femtosecond laser technology boasts advantages such as high cutting precision, high efficiency, and the ability to cut a wide range of materials, and is now widely used in manufacturing, life sciences, and other fields. Femtosecond laser processing is extremely rapid, therefore, the control and focusing of its optical path must be highly precise within a short time. In laser cutting technology, a light guide arm is typically used to conduct the laser beam, guiding it along a pre-defined path to cut the sample. Therefore, the movement precision of the light guide arm during sample cutting directly affects the cutting accuracy.

[0007] Existing light guide arms mainly employ linkage mechanisms. Linkage mechanisms are simple in structure, have high manufacturing precision, and offer high degrees of freedom of movement, allowing for a large cutting range for the light source. However, the motion accuracy of the light guide arm largely depends on the mechanism control at the connecting joint. Currently, direct motor drive is widely used in the market. Directly driving the light guide arm with a motor causes significant vibration during deceleration, which directly reduces the positional and machining accuracy of the light guide arm. Summary of the Invention

[0008] The purpose of this invention is to overcome the above-mentioned problems and provide a novel femtosecond laser light guide arm structure based on slide rail drive. During the speed change process, this light guide arm structure can reduce the impact of light guide arm vibration on laser processing and improve the positional accuracy and processing accuracy of the light guide arm.

[0009] The objective of this invention is achieved through the following technical solution:

[0010] A novel femtosecond laser beam guide structure based on slide rail drive includes a worktable, a beam guide arm, and a slide rail drive device for driving the joints of the beam guide arm to move on the worktable. The slide rail drive device includes a vertical slide rail drive mechanism and a horizontal slide rail drive mechanism disposed on the worktable. The vertical slide rail drive mechanism drives the joints of the beam guide arm to move vertically, and the horizontal slide rail drive mechanism drives the joints of the beam guide arm to move horizontally.

[0011] The working principle of the novel femtosecond laser beam guide arm structure based on slide rail drive described above is as follows:

[0012] During operation, the vertical slide rail drive mechanism can drive the joints of the light guide arm to move vertically, and the horizontal slide rail drive mechanism can drive the joints of the light guide arm to move horizontally. Both vertical and horizontal movements are controlled by the guide rail drive, making the movement of the light guide arm more stable, reducing the vibration of the light guide arm, reducing the impact of the vibration of the light guide arm on laser processing, and improving the positional accuracy and processing accuracy of the light guide arm.

[0013] In a preferred embodiment of the present invention, at least two slide rail driving devices are provided, with one slide rail driving device corresponding to one joint. By having multiple slide rail driving devices cooperate to drive the joint movement of the light guide arm, motion control of the light guide arm is achieved.

[0014] Preferably, there are two slide rail drive devices, each driving one of two adjacent joints. By coordinating the two slide rail drive devices to drive the joint movement, precise motion control of the light guide arm can be achieved.

[0015] Preferably, the vertical slide rail drive mechanism includes a vertical guide rail that is laterally slidably disposed on the worktable, a vertical slider that is slidably disposed on the vertical guide rail, and a vertical drive motor for driving the vertical slider to move vertically on the vertical guide rail; wherein, the joint is connected to the vertical slider. In the above structure, the vertical drive motor drives the vertical slider to move on the vertical guide rail, thereby causing the joint to also move vertically.

[0016] Preferably, the transverse slide rail drive mechanism includes a transverse guide rail disposed on the worktable, a transverse slider slidably disposed on the transverse guide rail, and a transverse drive motor for driving the transverse slider to move laterally on the transverse guide rail; wherein, the vertical guide rail is connected to the transverse slider. In the above structure, the transverse drive motor drives the transverse slider to move on the transverse guide rail, causing the vertical guide rail to move along with the transverse slider, thereby realizing that the joint also moves laterally along the vertical guide rail. By cooperating with two vertical drive motors and two transverse drive motors, motion control of the light guide arm can be achieved. Furthermore, with the cooperation of the transverse and vertical guide rails, and considering the large mass of the transverse and vertical sliders, stable motion can be achieved, effectively reducing the vibration of the light guide arm.

[0017] Preferably, the joint and the vertical slider are connected by a connecting pin. This connection allows the joint to move freely on the vertical slider, preventing it from jamming.

[0018] Preferably, a guide groove is provided on the worktable, extending laterally, and a sliding base is provided between the worktable and the vertical guide rail; the upper end of the sliding base is fixedly connected to the lower end of the vertical guide rail, and the lower end of the sliding base is slidably connected to the guide groove. By providing the guide groove and the vertical guide rail, on the one hand, the installation of the vertical guide rail is facilitated; on the other hand, due to the large mass of the vertical guide rail, the stability of the lateral movement of the vertical guide rail is further improved by the joint guidance of the guide groove and the transverse guide rail.

[0019] Preferably, the two transverse guide rails are integrally formed. The purpose of this is that integrating the two transverse guide rails allows them to function as a single transverse guide rail, resulting in a very compact structure. Mounting the two transverse sliders on a single transverse guide rail also saves costs.

[0020] Preferably, the transverse guide rail is fixedly connected to the worktable via a support frame. The support frame allows for better mounting of the transverse guide rail on the worktable.

[0021] Preferably, the vertical guide rail and the horizontal slider are connected by a connecting block, which can enhance the support rigidity.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] The novel femtosecond laser light guide arm structure of this invention drives the light guide arm to move through a vertical slide rail drive mechanism and a horizontal slide rail drive mechanism. By using a guide rail drive to control the movement of the light guide arm, the vibration of the light guide arm can be reduced during the speed change process, thereby improving the positional accuracy and processing accuracy of the light guide arm. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of one specific embodiment of a novel femtosecond laser light guide arm structure based on slide rail drive according to the present invention.

[0025] Figures 2-3 This is a three-dimensional structural diagram of the novel femtosecond laser light guide arm structure in this invention from different viewing angles.

[0026] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle.

[0027] Figure 5 This is a schematic diagram showing the connection relationship between the joint and the vertical slide rail drive mechanism in this invention.

[0028] Figure 6 for Figure 5 A magnified view of a section at point B.

[0029] Figure 7 This is a schematic diagram showing the connection relationship between the connecting pin and the vertical slide rail drive mechanism in this invention. Detailed Implementation

[0030] To enable those skilled in the art to fully understand the technical solutions of the present invention, the present invention will be further described below in conjunction with embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0031] Example 1

[0032] See Figures 1-3 This embodiment discloses a novel femtosecond laser light guide arm structure based on a slide rail drive, including a worktable 1, a light guide arm 2, and a slide rail drive device 3 for driving the joint 2-1 of the light guide arm 2 to move on the worktable 1; wherein, the slide rail drive device 3 includes a vertical slide rail drive mechanism 4 and a horizontal slide rail drive mechanism 5 disposed on the worktable 1; the vertical slide rail drive mechanism 4 is used to drive the joint 2-1 of the light guide arm 2 to move in the vertical direction; the horizontal slide rail drive mechanism 5 is used to drive the joint 2-1 of the light guide arm 2 to move in the horizontal direction.

[0033] See Figures 1-4 The light guide arm 2 includes multiple light guide tubes 2-2, and the joint 2-1 is set on the light guide tubes 2-2 to facilitate the movement of the light guide tubes 2-2. Two adjacent light guide tubes 2-2 are connected by a joint 2-1.

[0034] See Figures 1-4The slide rail drive device 3 is provided in at least two form, with one slide rail drive device 3 driving one joint 2-1. By cooperating with each other, multiple slide rail drive devices 3 drive the joint 2-1 of the light guide arm 2, thereby achieving motion control of the light guide arm 2. The movement trajectory of the light guide arm 2 is controlled by driving the joint 2-1 with the slide rail drive device 3.

[0035] See Figures 1-4 There are two slide rail drive devices 3, each driving one of the two adjacent joints 2-1. By cooperating with the two slide rail drive devices 3 to drive the joints 2-1, precise motion control of the light guide arm 2 can be achieved.

[0036] See Figures 1-7 The vertical slide rail drive mechanism 4 includes a vertical guide rail 6 that is laterally slidably disposed on the worktable 1, a vertical slider 7 that is slidably disposed on the vertical guide rail 6, and a vertical drive motor 8 for driving the vertical slider 7 to move vertically on the vertical guide rail 6; wherein, the joint 2-1 is connected to the vertical slider 7. In the above structure, the vertical drive motor 8 drives the vertical slider 7 to move on the vertical guide rail 6, thereby causing the joint 2-1 to also move vertically.

[0037] See Figures 1-4 The transverse slide rail drive mechanism 5 includes a transverse guide rail 9 mounted on the worktable 1, a transverse slider 10 slidably mounted on the transverse guide rail 9, and a transverse drive motor 11 for driving the transverse slider 10 to move laterally on the transverse guide rail 9; wherein, the vertical guide rail 6 is connected to the transverse slider 10. In the above structure, the transverse drive motor 11 drives the transverse slider 10 to move on the transverse guide rail 9, causing the vertical guide rail 6 to move along with the transverse slider 10, thereby realizing that the joint 2-1 also moves laterally along the vertical guide rail 6. In this embodiment, a redundant mechanism is used to control the movement of the light guide arm 2, and two transverse drive motors 11 are used to control the light guide arm 2 to make a horizontal transverse movement, thereby better controlling the movement accuracy of the light guide arm 2.

[0038] In this embodiment, the two vertical drive motors 8 and the two horizontal drive motors 11 (a total of four motors) work together to give the vertical slider 7 two degrees of freedom, enabling motion control of the light guide arm 2. Furthermore, with the cooperation of the horizontal guide rail 9 and the vertical guide rail 6, and considering the large mass of the horizontal slider 10 and the vertical slider 7, stable motion can be achieved, effectively reducing the vibration of the light guide arm 2. By driving the light guide arm 2 with four motors individually, this embodiment can better control the precision of the light guide arm 2 compared to traditional light guide arm 2 mechanisms.

[0039] See Figures 1-7The joint 2-1 is connected to the vertical slider 7 via a connecting pin 12. This connection via the connecting pin 12 allows the joint 2-1 to move flexibly on the vertical slider 7, preventing the joint 2-1 from jamming.

[0040] The connecting pin 12 is a cylindrical pin, and the joint 2-1 is rotatably connected to the cylindrical pin.

[0041] See Figures 1-7 From a mechanistic perspective, the light guide arm 2 in this embodiment has 2 degrees of freedom. Of the two joints 2-1 corresponding to the two vertical guide rails 6, the coordinates of the joint 2-1 connected to the left vertical guide rail 6 (left joint 2-1) are (x1, y1); the coordinates of the joint 2-1 connected to the right vertical guide rail 6 (right joint 2-1) are (x2, y2). The vertical drive motor 8 and horizontal drive motor 11 controlling x1 and y1, and the vertical drive motor 8 and horizontal drive motor 11 controlling x2 and y2, should satisfy the constraint condition f(x1,y1,x2,y2)=(x2-x1). 2 +(y2-y1) 2 -L1 2 =0, L1 is the distance between the two joints 2-1, one end of the right joint 2-1 is the guide port, and the other end is connected to the light guide tube 2-2; the x2 and y2 coordinate ranges are the lateral and longitudinal movement ranges of the light guide port. Adjusting the horizontal length of the guide arm can achieve different movement ranges. Therefore, this structure can achieve the advantage of a wide range of movement. In addition, based on the structure shown in Embodiment 1, a 3-DOF light guide arm can also be realized, which only requires the addition of a guide rail and its fixing device along the z-axis direction, as shown in Embodiment 2.

[0042] See Figures 1-3 The worktable 1 is provided with a guide groove 13, which extends laterally. A sliding base 14 is provided between the worktable 1 and the vertical guide rail 6. The upper end of the sliding base 14 is fixedly connected to the lower end of the vertical guide rail 6, and the lower end of the sliding base 14 is slidably connected to the guide groove 13. By providing the guide groove 13 and the vertical guide rail 6, the installation of the vertical guide rail 6 is facilitated. Furthermore, due to the large mass of the vertical guide rail 6, the stability of its lateral movement is further improved by the combined guidance of the guide groove 13 and the transverse guide rail 9.

[0043] See Figures 1-4The two transverse guide rails 9 are integrated into one long transverse guide rail, and the two transverse drive motors 11 are symmetrically arranged at both ends of the long transverse guide rail. The purpose of this is that by integrating the two transverse guide rails 9 into one long transverse guide rail, the structure becomes very compact, and the two transverse sliders 10 are mounted on one long transverse guide rail, thus saving costs.

[0044] See Figures 1-4 The transverse guide rail 9 is fixedly connected to the worktable 1 via a support frame 15. The support frame 15 allows for better mounting of the transverse guide rail 9 on the worktable 1. The support frame 15 is fixed to the worktable 1 with multiple screws.

[0045] See Figures 1-4 The workbench 1 is provided with a protrusion 1-1, and the support frame 15 is fixed on the protrusion 1-1.

[0046] See Figures 1-4 The vertical guide rail 6 and the horizontal slider 10 are connected by a connecting block 16, which can enhance the support rigidity.

[0047] In this embodiment, the novel femtosecond laser light guide arm structure has a laser at the end of the light guide arm 2 that is perpendicular to the table surface of the worktable 1. The vertical slide rail drive mechanism 4 plays the role of adjusting the focal length. The end of the light guide arm 2 can also be made parallel to the table surface of the worktable 1 by changing the orientation of the end manipulator. The height position of the laser can be changed by driving the vertical slide rail drive mechanism 4.

[0048] See Figures 1-4 The horizontal drive motor 11 and the horizontal slider 10, and the vertical drive motor 8 and the vertical slider 7 are both connected by a lead screw transmission mechanism. Through the lead screw transmission mechanism, the power of the horizontal drive motor 11 can be transmitted to the horizontal slider 10, and the power of the vertical drive motor 8 can be transmitted to the vertical slider 7.

[0049] See Figures 1-4 The working principle of the novel femtosecond laser beam guide structure based on rail drive is as follows:

[0050] During operation, the vertical slide rail drive mechanism 4 can drive the joint 2-1 of the light guide arm 2 to move in the vertical direction (Y-axis direction), and the horizontal slide rail drive mechanism 5 can drive the joint 2-1 of the light guide arm 2 to move in the horizontal direction (X-axis direction). Both vertical and horizontal movements are controlled by the guide rail drive, making the movement of the light guide arm 2 more stable, reducing the vibration of the light guide arm 2, reducing the impact of the vibration of the light guide arm 2 on laser processing, and improving the positional accuracy and processing accuracy of the light guide arm 2.

[0051] Example 2

[0052] See Figure 1 The other structures in this embodiment are the same as in Embodiment 1, except that the novel femtosecond laser light guide arm structure further includes a longitudinal slide rail drive mechanism for driving the light guide arm 2 to move along the longitudinal direction. The driving direction of the transverse slide rail drive mechanism 5 is the X-axis, the driving direction of the vertical slide rail drive mechanism 4 is the Y-axis, and the driving direction of the longitudinal slide rail drive mechanism is the Y-axis. By setting the longitudinal slide rail drive mechanism, the flexibility of the light guide arm 2's movement is further improved.

[0053] A base plate can be provided on the worktable 1, the guide groove 13 is provided on the base plate, and the longitudinal slide rail drive mechanism can be provided between the base plate and the worktable 1 to drive the base plate to move along the longitudinal direction, thereby driving the slide rail drive device 3 to move, and thus driving the light guide arm 2 to move.

[0054] The longitudinal slide rail drive mechanism includes a longitudinal guide rail disposed on the worktable 1, a longitudinal slider slidably disposed on the longitudinal guide rail, and a longitudinal drive motor for driving the longitudinal slider to move longitudinally on the longitudinal guide rail; wherein, the longitudinal slider is connected to the base plate.

[0055] The above are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above content. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present invention shall be considered equivalent substitutions and shall be included within the protection scope of the present invention.

Claims

1. A novel femtosecond laser beam guide structure based on a slide rail drive, characterized in that, The device includes a worktable, a light guide arm, and a slide rail drive device for driving the joints of the light guide arm to move on the worktable. The slide rail drive device includes a vertical slide rail drive mechanism and a horizontal slide rail drive mechanism disposed on the worktable. The vertical slide rail drive mechanism drives the joints of the light guide arm to move vertically, and the horizontal slide rail drive mechanism drives the joints of the light guide arm to move horizontally. The number of the slide rail drive device is at least two, and one slide rail drive device drives one of the joints; There are two slide rail drive devices, and the two slide rail drive devices drive two adjacent joints respectively; The vertical slide rail drive mechanism includes a vertical guide rail that is laterally slidably disposed on the worktable, a vertical slider that is slidably disposed on the vertical guide rail, and a vertical drive motor for driving the vertical slider to move vertically on the vertical guide rail; wherein, the joint is connected to the vertical slider; The transverse slide rail drive mechanism includes a transverse guide rail disposed on the worktable, a transverse slider slidably disposed on the transverse guide rail, and a transverse drive motor for driving the transverse slider to move laterally on the transverse guide rail; wherein, the vertical guide rail is connected to the transverse slider. The joint and the vertical slider are connected by a connecting pin.

2. The novel femtosecond laser beam guide structure based on slide rail drive according to claim 1, characterized in that, The workbench is provided with a guide groove that extends laterally, and a sliding base is provided between the workbench and the vertical guide rail; the upper end of the sliding base is fixedly connected to the lower end of the vertical guide rail, and the lower end of the sliding base is slidably connected to the guide groove.

3. The novel femtosecond laser beam guide structure based on slide rail drive according to claim 1, characterized in that, The two transverse guide rails are integrated into one unit.

4. The novel femtosecond laser beam guide structure based on slide rail drive according to claim 3, characterized in that, The transverse guide rail is fixedly connected to the workbench via a support frame.

5. The novel femtosecond laser beam guide structure based on slide rail drive according to claim 1, characterized in that, The vertical guide rail and the horizontal slider are connected by a connecting block.

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