Graphite boat warping detection device and detection method

Abstract

This invention relates to a graphite boat warping detection device and method, solving the technical problem in existing graphite boat detection devices where the strip light source used to illuminate the graphite boat cannot dissipate heat in time after long-term use, leading to a decrease in the brightness of the strip light source and ultimately affecting the warping detection results. The graphite boat warping detection device includes a detection frame, with a detection camera at the top and a strip light source at the bottom. The strip light source includes a lamp housing, a light-emitting element installed inside the lamp housing, and a controller. One wall of the lamp housing is a light-transmitting surface. The light-emitting element is located inside the lamp housing on the side closer to the light-transmitting surface, and the controller is located inside the lamp housing on the side away from the light-transmitting surface. The light-emitting element illuminates the light-transmitting surface so that the light passes through the light-transmitting surface and illuminates the graphite boat. Multiple heat sinks are provided on the outer wall of the lamp housing. A cooling fan is installed on the side of the heat sink away from the lamp housing, and the cooling fan blows or draws air towards the heat sink to remove heat from the heat sink.

Description

Technical Field

[0001] This invention relates to the field of optical inspection technology, and in particular to a graphite boat warp detection device and method. Background Technology

[0002] In the current manufacturing process of crystalline silicon solar cells, graphite boats are typically used as carriers. Silicon wafers are placed inside the graphite boat, and alumina or silicon nitride thin films are grown on the wafers using tubular PECVD. The silicon wafers and graphite boats are generally placed in a vertical, snap-fit ​​contact method. The adhesion between the silicon wafer and the graphite boat affects the radio frequency (RF) status during the coating process. Issues such as wafer warping, missing wafers, or wafer stacking can lead to electrode conduction, triggering high-frequency alarms and affecting the film quality. During wafer removal, abnormal adhesion between the silicon wafer and the graphite boat can cause fragmentation and scratches. Missing wafers during loading and unloading can result in wafer defects and require rework.

[0003] Therefore, before the coating process, it is necessary to detect wafer warping in the graphite boat. In existing technologies, the graphite boat is usually illuminated first using a light source, and then the surface of the graphite boat is photographed using a detection camera. The collected results are then transmitted to analysis software for detection to identify the wafer insertion status within the graphite boat. For example, the wafer warping detection subsystem provided in the optical detection method for a crystalline silicon solar cell graphite boat disclosed in patent CN114111620B is a system for detecting the wafer insertion status within the boat. It includes an in-boat wafer warping detection frame with an in-boat wafer warping detection station, a left row of linear scanning cameras, a right row of linear scanning cameras, a left row of bar light sources, and a right row of bar light sources fixed to the in-boat wafer warping detection frame. In the technical solution of this invention, the graphite boat is illuminated using bar light sources located on the left and right sides of the in-boat wafer warping detection frame. Then, the left and right row of linear scanning cameras scan the graphite boat and transmit the scanning results to the detection system for detection, thereby determining whether there is wafer warping within the graphite boat.

[0004] However, in this technical solution, the bar light source needs to continuously emit strong light during the scanning process. After continuously detecting a certain number of graphite boats, the light-emitting components and controller in the bar light source will generate a lot of heat. If the heat cannot be dissipated in time, the temperature at the bar light source will continue to rise. If the bar light source is in a high-temperature environment for a long time, its luminous efficiency will decrease and its brightness will gradually dim. This will result in the surface image of the graphite boat captured by the detection camera not being clear enough, and the detection system will not be able to accurately determine the state of the silicon wafer inside the graphite boat, affecting the wafer warping detection results. Summary of the Invention

[0005] This invention provides a graphite boat warping detection device and method to solve the technical problem in existing graphite boat detection devices where the strip light source used to illuminate the graphite boat cannot dissipate heat in time after long-term use, resulting in a decrease in the brightness of the strip light source and ultimately affecting the warping detection results.

[0006] To address the above problems, the present invention provides a graphite boat warping detection device and method, which adopts the following technical solution:

[0007] A graphite boat warp detection device, comprising:

[0008] The inspection frame is defined as having a length direction that is front-to-back and a width direction that is left-to-right. A row of inspection cameras is provided on each of the left and right sides of the top of the inspection frame, and a row of strip light sources is provided on each of the left and right sides of the bottom of the inspection frame.

[0009] The detection frame is provided with a conveyor track extending in the left and right direction below it. A mounting frame is slidably mounted on the conveyor track in the left and right direction. A graphite boat is placed in the mounting frame. The strip light source is used to illuminate the surface of the graphite boat. The camera is used to capture an image of the surface of the graphite boat and transmit the image to the detection system.

[0010] Its features are,

[0011] The strip light source includes a lamp housing and a light-emitting element and a controller installed inside the lamp housing;

[0012] One of the walls of the lamp housing is a light-transmitting surface, which is located on the side closer to the graphite boat. The light-emitting body is located inside the lamp housing on the side closer to the light-transmitting surface, and the controller is located inside the lamp housing on the side away from the light-transmitting surface. The light-emitting body is used to shine light toward the light-transmitting surface so that the light passes through the light-transmitting surface and shines on the graphite boat.

[0013] The outer wall of the lamp housing is provided with multiple heat sinks, and multiple cooling fans are installed on the side of the multiple heat sinks away from the lamp housing. The multiple cooling fans are used to blow or draw air towards the heat sinks to remove the heat from the heat sinks.

[0014] The beneficial effects of the above technical solution are as follows: By setting heat sinks on the outer wall of the lamp housing of the strip light source, the heat dissipation area is increased, which is conducive to improving the heat dissipation speed. A cooling fan is set on one side of the heat sink, which further improves the heat dissipation speed. This allows the strip light source to be dissipated in time during use, avoiding the strip light source from being in a high-temperature environment for a long time, which would lead to a decrease in luminous efficiency and dimming of the light source. It also ensures that the light illuminating the graphite boat by the strip light source is bright enough, so that the image of the graphite boat surface taken by the detection camera is clear enough, and the warping detection results are accurate.

[0015] Furthermore, the plurality of heat sinks extend in the front-to-back direction and are evenly distributed along the width direction of the corresponding sidewalls on the lamp housing, and the air outlets of the plurality of cooling fans are directly opposite the heat sinks, and the plurality of cooling fans are spaced apart in the front-to-back direction.

[0016] Furthermore, the outer surfaces of the two outer heat sinks are provided with mounting grooves extending in the front-to-back direction. Fan brackets are connected to these mounting grooves. The fan brackets are inverted U-shaped and include a horizontal mounting plate and vertical connecting plates connected to both ends of the horizontal mounting plate. The bottom of the vertical connecting plates has insertion plates bent inwards towards the fan bracket. These insertion plates are inserted into the corresponding mounting grooves, allowing the fan bracket to slide smoothly onto the mounting grooves. The horizontal mounting plate has a through-hole for mounting the cooling fan. The vertical connecting plate has threaded holes through which connecting bolts pass to fix the fan bracket to the heat sink.

[0017] The beneficial effects of the above technical solution are: the fan bracket is slidably assembled on the mounting groove, and the installation position of the fan can be adjusted simply by pushing the fan bracket, making the adjustment more convenient and easy to adjust the installation position of the fan according to the on-site installation conditions. The fan bracket is fixed on the mounting groove by connecting bolts, which is a simple fixing method and facilitates installation and disassembly.

[0018] Furthermore, the left and right sides of the testing frame are respectively provided with multiple connecting columns extending in the vertical direction, and the strip light source is installed at the bottom of the connecting columns in an adjustable position.

[0019] The beneficial effects of the above technical solution are: the position of the strip light source is adjustable, which makes it easy to reasonably adjust the height and angle of the strip light source according to the size and shape of the graphite boat, adjust the lighting position, and ensure that the detection camera can capture the clearest image.

[0020] Furthermore, a connecting plate is provided at the bottom of the connecting column, and the connecting plate is installed on the connecting column in an adjustable position in the vertical direction; an adjusting plate is connected to the side wall of the lamp housing, and the adjusting plate is installed at the bottom of the connecting plate in an adjustable angle.

[0021] The beneficial effects of the above technical solution are: the connecting column and the strip light source are connected by a connecting plate. By adjusting the vertical position of the connecting plate on the connecting column, the height of the strip light source can be changed. By adjusting the angle between the adjusting plate and the connecting plate, the angle of the strip light source can be changed, so that the position and angle of the strip light source in the vertical direction can be adjusted.

[0022] Furthermore, both the connecting column and the connecting plate are provided with multiple through holes evenly distributed along the vertical direction. Connecting bolts pass through the corresponding through holes on the connecting plate and the connecting column to fix the connecting plate to the connecting column. The adjusting plate is hinged to the bottom of the connecting plate. One of the connecting plate and the adjusting plate is provided with an arc-shaped elongated hole with the hinge axis as the central axis, and the other plate is provided with multiple connecting holes evenly distributed along the circumferential direction with the hinge axis as the central axis. Connecting bolts pass through the arc-shaped elongated hole and the corresponding connecting holes to fix the adjusting plate to the connecting plate.

[0023] The beneficial effects of the above technical solution are: by making different perforations correspond to each other, the vertical position of the connecting plate on the connecting column can be adjusted; by rotating the adjusting plate to match the arc-shaped elongated hole with different connecting holes, the angle of the strip light source can be adjusted, and the adjustment method is simple.

[0024] Furthermore, the strip light source is provided with L-shaped handles on both the front and rear sides. The end of the handle away from the strip light source is provided with a connector. A wire is threaded through the handle. One end of the wire is connected to the connector, and the other end is connected to the controller and the light source, so as to supply power to the controller and the light source when the power source is plugged into the connector.

[0025] The beneficial effects of the above technical solution are: when it is necessary to adjust the angle of the strip light source, the handle can be held and the strip light source can be rotated and adjusted. At the same time, the wiring is passed through the handle, and the handle hides the wiring, avoiding the wiring from being exposed and affecting the aesthetics.

[0026] Furthermore, the detection frame includes support beams located on the left and right sides of its top and extending in the front-back direction. The top of the support beams is provided with a plurality of fixed plates spaced apart in the front-back direction. Support frames are mounted on the fixed plates, and the detection camera is mounted on the support frames in an adjustable position.

[0027] The beneficial effects of the above technical solution are: the position of the detection camera is adjustable, making it easy to adjust to the most suitable shooting angle.

[0028] The present invention also provides a detection method, which uses the above-mentioned graphite boat detection device and includes the following steps:

[0029] S1. Adjust the shooting angle of the inspection camera and the lighting angle of the strip light source. Define the intersection point of the vertical line of the inspection camera lens and the surface of the graphite boat as intersection point A, and the area illuminated by the light emitted by the strip light source on the surface of the graphite boat as region B. Adjust the inspection camera and the strip light source so that intersection point A does not fall within region B, and each inspection camera can capture the state of each graphite boat sheet and silicon wafer on the graphite boat in the corresponding region.

[0030] S2. Place the graphite boat in the mounting frame and transport it along the conveyor track to the bottom of the testing frame; turn on the cooling fan so that it draws air towards the heat sink.

[0031] S3. Define the front end of the graphite boat in its direction of movement as the head end of the graphite boat, and the rear end of the graphite boat in its direction of movement as the tail end of the graphite boat. The head end of the graphite boat moves along the conveyor track to area B, and the bar light source and detection camera are turned on. The graphite boat continues to be conveyed forward along the conveyor track, and the detection camera scans and takes pictures of the graphite boat. When the tail end of the graphite boat leaves area B, the bar light source and detection camera are turned off.

[0032] S4. The camera uploads the image of the graphite boat to the AOI system. The AOI system obtains the image information and performs binarization processing on the image so that the image presents a visual effect of only black and white.

[0033] S5. Extract the outline of the silicon wafer in the graphite boat and the region where the graphite boat wafer is located.

[0034] S6. Use colored lines to show the outline of the area where the silicon wafer is located, and define the line as line c. Use a different colored line to show the edge of the graphite boat sheet that is close to the silicon wafer, and define the line as line d. Extract the position data of line c and line d.

[0035] S7. The system selects point C on line c and point D on line d corresponding to point C. The distance between point C and point D is calculated. The system extracts multiple points C and D along lines c and d respectively, and calculates the distance data between multiple points C and point D to form a data set E. The qualified distance value between point C and point D is set to a, and the maximum error is set to n. The system compares each distance data in data set E with a. When the number of distance data greater than a exceeds n, the system determines that warping has occurred. When the number of distance data greater than a does not exceed n, the system determines that warping has not occurred.

[0036] The beneficial effects of the above technical solution are: the intersection point A of the vertical line in the detection camera lens and the surface of the graphite boat does not fall within the illumination area B of the strip light source, the detection camera does not look directly at the reflective area on the surface of the graphite boat, and the captured image is avoided from being overexposed, thus affecting the image clarity. Attached Figure Description

[0037] The above and other objects, features, and advantages of exemplary embodiments of the present invention will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the invention are illustrated by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0038] Figure 1This is a schematic diagram of the structure of a graphite boat warp detection device provided by the present invention;

[0039] Figure 2 A front view of a graphite boat warp detection device provided by the present invention;

[0040] Figure 3 A left view of a graphite boat warp detection device provided by the present invention;

[0041] Figure 4 This is a top view of a graphite boat warp detection device provided by the present invention.

[0042] Explanation of reference numerals in the attached figures:

[0043] 1. Inspection frame; 2. Inspection camera; 3. Strip light source; 4. Handle lever; 5. Connector; 6. Connecting column; 7. Connecting plate; 8. Adjusting plate; 9. Support beam; 10. Fan bracket; 11. Cooling fan; 12. Heat sink; 13. Arc-shaped elongated hole; 14. Horizontal mounting plate; 15. Vertical connecting plate; 16. Plug-in plate. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Those skilled in the art should understand that the embodiments described below are only some, not all, of the embodiments disclosed. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0045] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, a graphite boat warp detection device includes a detection frame 1 made of aluminum profile. The length direction of the detection frame 1 is defined as the front-to-back direction, and the width direction as the left-to-right direction. The detection frame 1 includes four support beams 9 extending in the front-to-back direction on the left and right sides of its top. Two support beams 9 are provided on each of the left and right sides of the top of the detection frame 1, spaced apart in the front-to-back direction. Each support beam 9 has two fixed plates spaced apart in the front-to-back direction. A support frame is mounted on each fixed plate, and a detection camera 2 is mounted on the support frame. The detection camera 2 is mounted on the support frame with adjustable angle. The support frame includes two parallel vertical support plates, and a rotating plate is hinged between the two vertical support plates. An arc-shaped adjustment hole is provided on the rotating plate. A camera fixing plate is connected to the detection camera 2, and a connecting bolt passes through the arc-shaped adjustment hole and the camera fixing plate to connect the detection camera 2 to the rotating plate. The shooting angle of the inspection camera 2 in one position can be adjusted by rotating the rotating plate. The shooting angle in another position can be adjusted by rotating the camera mounting plate and fixing the connecting bolts to different positions on the arc-shaped adjustment hole. The inspection camera 2 is a 4K black-and-white line scan camera with a 25mm high-resolution lens. The inspection camera 2 is used to capture surface images of the graphite boat and transmit the images to the AOI system. The AOI system is an automated optical inspection system, which is existing technology and will not be described in detail here.

[0046] The testing frame 1 has two connecting columns 6 extending vertically on both its left and right sides. A connecting plate 7 is located at the bottom of each connecting column 6. Both the connecting plate 7 and the connecting column 6 have multiple equally spaced and corresponding through holes in the vertical direction. Connecting bolts pass through these corresponding through holes to fix the connecting plate 7 to the connecting column 6. By aligning the different through holes, the vertical position of the connecting plate 7 on the connecting column 6 can be adjusted. Each connecting plate 7 has a strip light source 3 extending in the front-back direction at its bottom. The strip light source 3 includes a lamp housing, a light-emitting element, and a controller installed inside the lamp housing. The lamp housing includes a light-transmitting plate, with the outer wall of the light-transmitting plate being the light-transmitting surface, located near the graphite boat. The light-emitting element is installed inside the lamp housing near the light-transmitting plate, and the controller is installed inside the lamp housing away from the light-transmitting plate. An adjustment plate 8 is connected to the side wall of the lamp housing adjacent to the light-transmitting plate, and the adjustment plate 8 is connected to the bottom of the connecting plate 7.

[0047] The bottom of the connecting plate 7 is provided with a first hinge hole, and around the first hinge hole are multiple connecting holes distributed circumferentially around its axis. The adjusting plate 8 is provided with a second hinge hole corresponding to the first hinge hole. A connecting pin passes through the first hinge hole on the connecting plate 7 and the second hinge hole on the adjusting plate 8 to hinge the connecting plate 7 and the adjusting plate 8. The adjusting plate 8 is provided with an arc-shaped elongated hole 13 with the axis of the second hinge hole as its central axis. A connecting bolt passes through the arc-shaped elongated hole 13 and the corresponding connecting hole to fix the adjusting plate 8 to the bottom of the connecting plate 7. By aligning the arc-shaped elongated hole 13 with different connecting holes, the angle of the strip light source 3 can be adjusted.

[0048] The lamp housing has multiple heat sinks 12 extending in the front-to-back direction and evenly spaced along the width of the corresponding side wall on the outer side wall. The outer surfaces of the two outer heat sinks 12 have mounting grooves extending in the front-to-back direction, on which fan brackets 10 are slidably mounted. The fan bracket 10 is inverted U-shaped and includes a horizontal mounting plate 14 and vertical connecting plates 15 connected to both ends of the horizontal mounting plate 14. The bottom of the vertical connecting plate 15 has a plug-in plate 16 bent inwards towards the fan bracket 10, which is inserted into the corresponding mounting groove. The horizontal mounting plate 14 has a mounting opening, in which a cooling fan 11 is installed. The cooling fan 11 draws air towards the heat sinks 12 to expel heat from the heat sinks 12 into the air, accelerating heat dissipation.

[0049] The front and rear ends of the lamp housing are connected to L-shaped handle rods 4. The end of the handle rod 4 facing away from the strip light source 3 is provided with a connector 5. A wire is threaded through the handle rod 4. One end of the wire is connected to the connector 5, and the other end extends into the lamp housing to connect to the light source and the controller, so as to supply power to the light source and the controller when the connector 5 is connected to the power supply.

[0050] The testing frame 1 has a conveyor track extending in the left and right direction below it. A mounting frame is slidably mounted on the conveyor track. The graphite boat to be tested is placed in the mounting frame. The mounting frame drives the graphite boat to be tested to pass under the testing frame 1 in the left and right direction to complete the warping test.

[0051] The present invention also provides a detection method, which uses the above-mentioned graphite boat warp detection device to perform the detection, and includes the following steps:

[0052] S1. Adjust the shooting angle of the inspection camera and the lighting angle of the strip light source. Define the intersection point of the vertical line of the inspection camera lens and the surface of the graphite boat as intersection point A, and the area illuminated by the light emitted by the strip light source on the surface of the graphite boat as region B. Adjust the inspection camera and the strip light source so that intersection point A does not fall within region B, and each inspection camera can capture the state of each graphite boat sheet and silicon wafer on the graphite boat in the corresponding region.

[0053] S2. Place the graphite boat in the mounting frame and transport it along the conveyor track to the bottom of the testing frame; turn on the cooling fan so that it draws air towards the heat sink.

[0054] S3. Define the front end of the graphite boat in its direction of movement as the head end of the graphite boat, and the rear end of the graphite boat in its direction of movement as the tail end of the graphite boat. The head end of the graphite boat moves along the conveyor track to area B, and the bar light source and detection camera are turned on. The graphite boat continues to be conveyed forward along the conveyor track, and the detection camera scans and takes pictures of the graphite boat. When the tail end of the graphite boat leaves area B, the bar light source and detection camera are turned off.

[0055] S4. The camera uploads the image of the graphite boat to the AOI system. The AOI system obtains the image information and performs binarization processing on the image so that the image presents a visual effect of only black and white.

[0056] S5. Extract the outline of the silicon wafer in the graphite boat and the region where the graphite boat wafer is located.

[0057] S6. Use colored lines to show the outline of the area where the silicon wafer is located, and define the line as line c. Use a different colored line to show the edge of the graphite boat sheet that is close to the silicon wafer, and define the line as line d. Extract the position data of line c and line d.

[0058] S7. The system selects point C on line c and point D on line d corresponding to point C. The distance between point C and point D is calculated. The system extracts multiple points C and D along lines c and d respectively, and calculates the distance data between multiple points C and point D to form a data set E. The qualified distance value between point C and point D is set to a, and the maximum error is set to n. The system compares each distance data in data set E with a. When the number of distance data greater than a exceeds n, the system determines that warping has occurred. When the number of distance data greater than a does not exceed n, the system determines that warping has not occurred.

[0059] This invention accelerates the heat dissipation of the strip light source by setting heat sinks and cooling fans on the outer wall of the lamp housing. This avoids the problem of brightness decay caused by the strip light source being in a high-temperature environment for a long time, ensuring that the strip light source is bright enough so that the detection camera can capture a clear image of the graphite boat and ensure the accuracy of the warping detection results.

[0060] Based on the above description in this specification, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "width," "horizontal," "top," "bottom," "inner," and "outer" (these terms need to be adjusted and replaced according to the specific case), are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this specification. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms should not be understood or interpreted as a limitation on the present invention.

[0061] In addition, in the description of this specification, "multiple" means at least two, such as two, three or more, etc., unless otherwise expressly and specifically defined.

Claims

1. A graphite boat warping detection device, comprising: The inspection frame is defined as having a length direction that is front-to-back and a width direction that is left-to-right. A row of inspection cameras is provided on each of the left and right sides of the top of the inspection frame, and a row of strip light sources is provided on each of the left and right sides of the bottom of the inspection frame. The inspection frame is provided with a conveyor track extending in the left and right direction below it. A mounting frame is slidably mounted on the conveyor track in the left and right direction. A graphite boat is placed in the mounting frame. The strip light source is used to illuminate the surface of the graphite boat. The inspection camera is used to capture an image of the surface of the graphite boat and transmit the image to the inspection system. Its features are, The strip light source includes a lamp housing and a light-emitting element and a controller installed inside the lamp housing; One of the walls of the lamp housing is a light-transmitting surface, which is located on the side closer to the graphite boat. The light-emitting body is located inside the lamp housing on the side closer to the light-transmitting surface, and the controller is located inside the lamp housing on the side away from the light-transmitting surface. The light-emitting body is used to shine light toward the light-transmitting surface so that the light passes through the light-transmitting surface and shines on the graphite boat. The outer wall of the lamp housing is provided with multiple heat sinks, and multiple cooling fans are installed on the side of the multiple heat sinks away from the lamp housing. The multiple cooling fans are used to blow or draw air towards the heat sinks to remove the heat from the heat sinks. The outer surfaces of the two outer heat sinks are provided with mounting grooves extending in the front-to-back direction. Fan brackets are connected to these mounting grooves. The fan brackets are inverted U-shaped and include a horizontal mounting plate and vertical connecting plates connected to both ends of the horizontal mounting plate. The bottom of the vertical connecting plates has insertion plates bent inwards towards the fan bracket. These insertion plates are inserted into the corresponding mounting grooves, allowing the fan bracket to slide smoothly onto the mounting grooves. The horizontal mounting plate has through-holes, into which the cooling fan is installed. The vertical connecting plates have threaded holes through which connecting bolts pass to fix the fan bracket to the heat sinks. The detection frame includes support beams located on the left and right sides of its top and extending in the front-back direction. The top of the support beams is provided with multiple fixing plates spaced apart in the front-back direction. Support frames are installed on the fixing plates. The detection camera is mounted on the support frames in an adjustable position. The support frame includes two parallel vertical support plates, with a rotating plate hinged between the two vertical support plates. An arc-shaped adjustment hole is provided on the rotating plate. A camera fixing plate is connected to the detection camera. Connecting bolts pass through the arc-shaped adjustment hole and the camera fixing plate to connect the detection camera to the rotating plate.

2. The graphite boat warping detection device according to claim 1, characterized in that, The plurality of heat sinks extend in the front-to-back direction and are evenly spaced along the width of the corresponding sidewalls on the lamp housing. The air outlets of the plurality of cooling fans are directly opposite the heat sinks, and the plurality of cooling fans are spaced apart in the front-to-back direction.

3. A graphite boat warping detection device according to claim 1 or 2, characterized in that, The testing frame has multiple connecting columns extending vertically on its left and right sides, and the strip light source is installed at the bottom of the connecting columns in an adjustable position.

4. The graphite boat warping detection device according to claim 3, characterized in that, The bottom of the connecting column is provided with a connecting plate, which is installed on the connecting column in an adjustable manner in the vertical direction; an adjusting plate is connected to the side wall of the lamp housing, and the adjusting plate is installed at the bottom of the connecting plate in an adjustable angle.

5. The graphite boat warping detection device according to claim 4, characterized in that, Both the connecting column and the connecting plate are provided with multiple through holes evenly distributed along the vertical direction. Connecting bolts pass through the corresponding through holes on the connecting plate and the connecting column to fix the connecting plate to the connecting column. The adjusting plate is hinged to the bottom of the connecting plate. One of the connecting plate and the adjusting plate is provided with an arc-shaped elongated hole with the hinge axis as the central axis, and the other plate is provided with multiple connecting holes evenly distributed along the circumference with the hinge axis as the central axis. Connecting bolts pass through the arc-shaped elongated hole and the corresponding connecting holes to fix the adjusting plate to the connecting plate.

6. The graphite boat warping detection device according to claim 5, characterized in that, The strip light source has L-shaped handles on both the front and rear sides. The end of the handle away from the strip light source has a connector. A wire is threaded through the handle. One end of the wire is connected to the connector, and the other end is connected to the controller and the light source, so as to supply power to the controller and the light source when the connector is plugged into a power source.

7. A detection method, using the graphite boat warp sheet detection device as described in any one of claims 1-6, comprising the following steps: S1. Adjust the shooting angle of the inspection camera and the lighting angle of the strip light source. Define the intersection point of the vertical line of the inspection camera lens and the surface of the graphite boat as intersection point A, and the area illuminated by the light emitted by the strip light source on the surface of the graphite boat as region B. Adjust the inspection camera and the strip light source so that intersection point A does not fall within region B, and each inspection camera can capture the state of each graphite boat sheet and silicon wafer on the graphite boat in the corresponding region. S2. Place the graphite boat in the mounting frame and transport it along the conveyor track to the bottom of the testing frame; turn on the cooling fan so that it draws air towards the heat sink. S3. Define the front end of the graphite boat in its direction of movement as the head end of the graphite boat, and the rear end of the graphite boat in its direction of movement as the tail end of the graphite boat. The head end of the graphite boat moves along the conveyor track to area B, and the bar light source and detection camera are turned on. The graphite boat continues to be conveyed forward along the conveyor track, and the detection camera scans and takes pictures of the graphite boat. When the tail end of the graphite boat leaves area B, the bar light source and detection camera are turned off. S4. The camera uploads the image of the graphite boat to the AOI system. The AOI system obtains the image information and performs binarization processing on the image so that the image presents a visual effect of only black and white. S5. Extract the outline of the silicon wafer in the graphite boat and the region where the graphite boat wafer is located. S6. Use colored lines to show the outline of the area where the silicon wafer is located, and define the line as line c. Use a different colored line to show the edge of the graphite boat sheet that is close to the silicon wafer, and define the line as line d. Extract the position data of line c and line d. S7. The system selects point C on line c and point D on line d corresponding to point C. The distance between point C and point D is calculated. The system extracts multiple points C and D along lines c and d respectively, and calculates the distance data between multiple points C and point D to form a data set E. The qualified distance value between point C and point D is set to a, and the maximum error is set to n. The system compares each distance data in data set E with a. When the number of distance data greater than a exceeds n, the system determines that warping has occurred. When the number of distance data greater than a does not exceed n, the system determines that warping has not occurred.

Images