An arc extinguishing circuit for an electron gun

Abstract

This invention discloses an arc-extinguishing circuit for an electron gun, comprising an electron gun EBS, a filament power supply module, a high-voltage power supply module, and an ARC arc extinguisher. The filament power supply module is connected to the input coil of transformer T2, and the output coil of transformer T2 is connected to the electron gun EBS. The high-voltage power supply module is connected to the ARC arc extinguisher and then to the output coil of transformer T2. The ARC arc extinguisher can provide a reverse high-voltage pulse to the electron gun, thereby eliminating or reducing arcing and protecting the electron gun.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating machine technology, and in particular to an arc-extinguishing circuit for an electron gun. Background Technology

[0002] During the operation of the electron gun, various reasons (such as dust in the vacuum chamber, local material venting, etc.) can cause instantaneous discharge (commonly known as "arcing") at the high voltage of the electron gun. This phenomenon is unavoidable, but it will accelerate the damage of the electron gun filament, so the occurrence of arcing should be reduced. Summary of the Invention

[0003] The purpose of this invention is to provide an arc-extinguishing circuit for an electron gun, which includes an ARC arc extinguisher that can provide a reverse high-voltage pulse to the electron gun, thereby eliminating or reducing arcing and protecting the electron gun.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] An arc-extinguishing circuit for an electron gun includes an electron gun EBS, a filament power supply module, a high-voltage power supply module, and an ARC arc extinguisher;

[0006] The filament power supply module is connected to the input coil of transformer T2, and the output coil of transformer T2 is connected to the electron gun EBS;

[0007] The high-voltage power supply module is connected to the ARC arc extinguisher and then to the output coil of transformer T2.

[0008] In some implementations, the b-terminal of the ARC arc extinguisher is connected to resistors R1 and R2 and then grounded.

[0009] In some implementations, the d-terminal of the ARC arc extinguisher is connected to a resistor R2 and then grounded.

[0010] In some implementations, the c-terminal of the ARC arc extinguisher is grounded.

[0011] In some implementations, the output coil of transformer T2 is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series.

[0012] In some implementations, the b-terminal of the ARC arc extinguisher is connected between capacitors C1 and C2 and to transformer T2.

[0013] In some implementations, the high-voltage power supply module is connected to the DC current sensor (DCCT) and then to the ARC arc extinguisher, with the DC current sensor (DCCT) connected in parallel with capacitor C3.

[0014] In some implementations, the DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2.

[0015] Induction coil NS1 and induction coil NS2 are connected in series. The input terminal of induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS.

[0016] In some implementations, the electron gun EBS includes a filament FIL connected to a transformer T2, a horizontal deflection electrode XSCAN, and a vertical deflection electrode YSCAN.

[0017] The beneficial effects of this invention are: the ARC arc extinguisher can provide a reverse high-voltage pulse to the electron gun, thereby eliminating or reducing arcing and protecting the electron gun. Attached Figure Description

[0018] Figure 1 This is a simplified structural diagram of an arc-extinguishing circuit for an electron gun according to the present invention.

[0019] Figure 2 This is a structural diagram of an arc-extinguishing circuit for an electron gun according to the present invention;

[0020] Figure 3 This is a structural diagram of another embodiment of the arc extinguishing circuit of an electron gun according to the present invention;

[0021] Figure 4 This is a circuit diagram of the DC current sensor of the present invention;

[0022] Figure 5 This is an assembly structure diagram of the DC current sensor of the present invention;

[0023] Figure 6 This is a circuit diagram of the DC current sensor of the present invention. Detailed Implementation

[0024] The present invention will now be described in further detail with reference to the accompanying drawings.

[0025] refer to Figure 1 and Figure 2 An arc-extinguishing circuit for an electron gun includes an electron gun EBS, a filament power supply module 10, a high-voltage power supply module 20, and an ARC arc extinguisher 30.

[0026] The filament power supply module 10 is connected to the input coil of transformer T2, and the output coil of transformer T2 is connected to the electron gun EBS;

[0027] The high-voltage power supply module 20 is connected to the ARC arc extinguisher 30 and then to the output coil of transformer T2.

[0028] The filament power supply module 10 provides the lighting voltage for the electron gun EBS, and the high voltage power supply module 20 provides the high voltage for the electron gun EBS, causing the filament FIL to work under high voltage and heat up, thereby releasing electrons. The ARC arc extinguisher 30 can provide a reverse high voltage pulse to the electron gun EBS, which helps to eliminate arcing or shorten the arcing time, achieving a certain arc extinguishing effect, thereby protecting the electron gun EBS.

[0029] Among them, the ARC arc extinguisher 30 is existing technology, and the model AR-10C can be selected. It is only used here. Its working principle is to use the interaction between inductance and capacitance to form an LC resonant circuit, so that the arc disappears in a short time. When the circuit is short-circuited, overloaded or sparked, the current will increase sharply, causing the arc to be generated. The ARC arc extinguisher will form a high-frequency resonant circuit through the interaction between inductance and capacitance, so as to limit the arc.

[0030] The high-voltage power supply module 20 can provide DC voltage from -4kV to -10kV, and the filament power supply module 10 can provide power parameters such as 200V / 11V 55VA. Both the high-voltage power supply module 20 and the filament power supply module 10 can be integrated or assembled in the same power supply box. The electron gun power supply of model EBSHV-10C can be selected, which is existing technology and is only applied here.

[0031] The b terminal of the ARC arc extinguisher 30 is connected to resistors R1 and R2 and then grounded. The resistors R1 and R2 are designed to draw energy from the circuit and provide protection.

[0032] The d-terminal of the ARC arc extinguisher 30 is connected to a resistor R2 and then grounded. The resistor R2 is designed to draw energy from the circuit and provide protection.

[0033] The c terminal of the ARC arc extinguisher 30 is grounded.

[0034] refer to Figure 2 The output coil of transformer T2 is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series.

[0035] The b-terminal of the ARC arc extinguisher is connected between capacitors C1 and C2 and to transformer T2. That is, the high voltage output from the high voltage power supply module 20 is connected between capacitors C1 and C2 and to transformer T2. The setting of capacitors C1 and C2 has a filtering effect, improving the stability of the circuit voltage.

[0036] refer to Figure 3 The high-voltage power supply module 20 is connected to the DC current sensor DCCT and then to the ARC arc extinguisher 30. The DC current sensor DCCT is connected in parallel with the capacitor C3.

[0037] The DC current sensor (DCCT) achieves high-voltage isolated sampling through magnetic field transmission and is a zero-flux current inductor, effectively eliminating the influence of excitation current on the measurement accuracy of the transformer. It has a fast response time, reduces delay and beam oscillation, and helps improve the control accuracy of the beam, thereby improving the control accuracy of the electron gun. It can adjust the voltage of the electron gun in a timely manner according to the value of the beam.

[0038] Capacitor C3 has a certain filtering effect, which can absorb circuit oscillations and improve the stability of circuit voltage transmission.

[0039] refer to Figure 4 The DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2.

[0040] The high-voltage coil TP is connected to the high-voltage power supply module 20;

[0041] Induction coil NS1 and induction coil NS2 are connected in series. The input terminal of induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS.

[0042] The feedback end Vo collects the beam current value to know the current Ip and voltage status of the high voltage power supply module 20, so that the value of the high voltage power supply module 20 can be adjusted according to the beam current value.

[0043] The rectifier is a full-bridge diode rectifier, which performs rectification and improves the accuracy of the beam feedback terminal Vo.

[0044] Among them, reference Figure 5 and Figure 6 The first DC current sensor DCCT is located inside the barrel 41. One end of the barrel 41 is provided with a first cover 42, and the other end of the barrel 41 is provided with a second cover 43. The high voltage coil TP, the induction coil NS1 and the induction coil NS2 are assembled inside the barrel 41, and the coils are covered with a silicone rubber layer 44.

[0045] refer to Figure 2 The electron gun EBS includes a filament FIL connected to transformer T2, a horizontal deflection electrode XSCAN, and a vertical deflection electrode YSCAN. The filament FIL operates under high voltage and is heated, thereby releasing electrons. The horizontal deflection electrode XSCAN and the vertical deflection electrode YSCAN can generate corresponding horizontal and vertical magnetic fields, causing the electrons to deflect and change their direction of motion.

[0046] The above description only discloses some embodiments of the present invention. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the invention.

Claims

1. An arc-extinguishing circuit for an electron gun, characterized in that, Includes electron gun EBS, filament power supply module, high voltage power supply module and ARC arc extinguisher; The electron gun EBS includes a filament FIL connected to the transformer T2, a horizontal deflection electrode XSCAN, and a vertical deflection electrode YSCAN. The filament power supply module is connected to the input coil of transformer T2, and the output coil of transformer T2 is connected to the electron gun EBS; The high-voltage power supply module is connected to the ARC arc extinguisher and then to the output coil of transformer T2. The b-end of the ARC arc extinguisher is connected to resistors R1 and R2 and then grounded; the d-end of the ARC arc extinguisher is connected to resistor R2 and then grounded. The output coil of the transformer T2 is connected in parallel with capacitors C1 and C2, and capacitors C1 and C2 are connected in series. The b-end of the ARC arc extinguisher is connected between capacitor C1 and capacitor C2, and is also connected to transformer T2; The high-voltage power supply module is connected to the DC current sensor DCCT and then to the ARC arc extinguisher. The DC current sensor DCCT is connected in parallel with capacitor C3.

2. The arc quenching circuit for an electron gun according to claim 1, wherein The c-terminal of the ARC arc extinguisher is grounded.

3. The arc quenching circuit for an electron gun according to claim 1, wherein The DC current sensor DCCT includes a high-voltage coil TP, an induction coil NS1, and an induction coil NS2; The induction coil NS1 and induction coil NS2 are connected in series. The input terminal of the induction coil NS1 is connected to the auxiliary power supply ES. The output terminal of the induction coil NS2 is connected to the rectifier. The output terminal of the rectifier is connected to the feedback terminal Vo. The feedback terminal Vo is connected in parallel with a resistor RS.

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