一种容积式真空泵性能测试气体引入装置
By introducing the interlocking control of mass flow controller and vacuum gauge in the performance testing of positive displacement vacuum pumps, the problem of low gas introduction accuracy is solved, realizing an automated and high-precision testing process that can be adapted to the performance evaluation of vacuum pumps of different specifications.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
- Filing Date
- 2023-08-08
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing performance testing of positive displacement vacuum pumps, the gas introduction device is not very accurate, requiring frequent manual adjustment, which is cumbersome, difficult to stabilize the control accuracy, and requires a large amount of human resources, making the testing process complex.
A mass flow controller and a vacuum gauge in the gas introduction test hood are interlocked to achieve high-precision coupling of pressure and mass flow. The intake volume is automatically controlled by an industrial control computer, and combined with an electromagnetic isolation valve and a temperature sensor, precise gas introduction under specific pressure is achieved.
It has achieved automated and fully visualized control of positive displacement vacuum pump performance testing, reduced the labor intensity of human resources, improved testing accuracy and stability, and adapted to the testing needs of vacuum pumps of different specifications.
Smart Images
Figure CN117167253B_ABST