Optical element surface shape testing device and system

Abstract

The application belongs to the field of optics and provides an optical element surface shape testing device and system, which comprises a Dewar, a support frame, an end cover and a connecting device. During testing, the support frame with the optical element fixed thereon is fixed to the second storage tank, the end cover is closed, the Dewar is fixed to the adjusting frame through the connecting device, and the Dewar is vacuumized. The low-temperature refrigerant in the first storage tank is controlled to enter the second storage tank through the flow regulating assembly, so that the temperature of the optical element reaches the required temperature. The angle and position of the optical element are adjusted through the adjusting frame, and the surface shape testing under a certain low-temperature environment is performed. The temperature of the optical element is changed for multiple times, and the angle and position of the optical element are adjusted, so that the surface shape testing under different temperatures is completed. The optical element surface shape testing device provided by the application does not need to open the Dewar when adjusting the angle and position of the optical element, does not need to repeatedly vacuumize, and the temperature can be continuously lowered, so that the operation steps are simplified, the testing efficiency is improved, and the testing difficulty is reduced.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and in particular to an optical element surface shape testing device and system. Background Technology

[0002] Low-temperature optics is an essential means to achieve high-sensitivity infrared detection. Its principle is to reduce the temperature of the optical system itself, thereby reducing its thermal radiation and decreasing the noise of the entire detection system, thus improving the signal-to-noise ratio and achieving high-sensitivity detection.

[0003] Because optical systems operate at low temperatures, they undergo significant temperature changes from room temperature to low temperatures, resulting in thermal stress on the optomechanical structure. This causes changes in the surface shape of optical elements. Whether the impact of this deformed surface shape on imaging is within acceptable limits requires measuring the surface shape of the optical elements to guide the design of the optomechanical structure.

[0004] When testing the surface shape of optical components, the position and angle of the reflector need to be adjusted multiple times. Existing optical surface shape testing devices require opening a vacuum chamber and operating the reflector inside the vacuum chamber when adjusting the position and angle of the reflector, followed by re-vacuuming and cooling, resulting in low testing efficiency and complicated operation. Summary of the Invention

[0005] This invention provides an optical element surface shape testing device and system to solve the defects of existing optical element surface shape testing devices, which require opening and closing the vacuum chamber when adjusting the position and angle of the reflector, resulting in low testing efficiency and complicated operation. The invention achieves the effect of adjusting the angle and position of the reflector without opening the vacuum chamber.

[0006] This invention provides an optical element surface shape testing device, comprising: The Dewar includes an outer cylinder and a first storage tank and a second storage tank disposed inside the outer cylinder. One end of the first storage tank is connected to the outside of the outer cylinder, and the other end of the first storage tank is connected to the second storage tank. A flow regulating component is also provided between the first storage tank and the second storage tank. The first storage tank is used to store cryogenic refrigerant. A support frame, detachably connected to the second storage tank, is used to fix the optical element to the outside of the second storage tank; The end cap is open at one end of the outer cylinder near the support frame. The end cap is detachably connected to the open end of the outer cylinder and has a window with a light-transmitting sheet. The window is positioned directly opposite the support frame. A connecting device is disposed on the outer cylinder and is used for detachable connection with the adjustment frame.

[0007] According to the optical element surface shape testing apparatus provided by the present invention, the second storage tank includes: The first cylinder is a sealed structure and is connected to the first storage tank via a conduit. The second cylinder is inserted inside the first cylinder, with both ends of the second cylinder open and passing through both ends of the first cylinder. The support frame is installed inside the second cylinder.

[0008] According to the optical element surface shape testing device provided by the present invention, a first pressure ring and a second pressure ring are provided on the inner side of the second cylinder. The first pressure ring extends radially inward along the second cylinder, and the second pressure ring is threadedly connected to one end of the inner side of the second cylinder near the window. The support frame is clamped between the first pressure ring and the second pressure ring.

[0009] According to the optical element surface shape testing device provided by the present invention, an elastic ring is provided on the side of the second pressure ring close to the first pressure ring.

[0010] According to the optical element surface shape testing device provided by the present invention, a neck tube is provided on the first storage tank, one end of the neck tube is connected to the first storage tank, and the other end of the neck tube is connected to the outside of the outer cylinder.

[0011] According to the optical element surface shape testing apparatus provided by the present invention, the flow rate adjustment component includes: An adjusting valve stem, one end of which is inserted into the first storage tank through the neck tube, and the other end of which is located outside the outer cylinder, and the adjusting valve stem is slidably connected to the neck tube; An adjusting device is disposed between the adjusting valve rod and the outer side of the outer cylinder, and the adjusting device is used to drive the adjusting valve rod to move axially along the neck tube; A conical plug is disposed at one end of the regulating valve stem located inside the first storage tank, and the larger end of the conical plug can seal the end of the conduit connected to the first storage tank.

[0012] According to the optical element surface shape testing device provided by the present invention, the adjusting valve rod is hollow inside and open at the top, and the portion of the adjusting valve rod located inside the first storage tank is provided with a through hole connecting the inner and outer sides of the adjusting valve rod.

[0013] According to the optical element surface shape testing device provided by the present invention, a thermometer connector is further provided on the outer cylinder. One end of the thermometer connector extends into the outer cylinder and is used to connect with a thermometer inside the outer cylinder. The other end of the thermometer connector is located on the outside of the outer cylinder and is used to connect with a temperature acquisition device.

[0014] According to the optical element surface shape testing device provided by the present invention, at least one support column is provided between the outer side wall of the first cylinder and the inner side wall of the outer cylinder.

[0015] The present invention also provides an optical element surface shape testing system, including a laser interferometer, an adjustment frame, and an optical element surface shape testing device as described in any of the above, wherein the optical element surface shape testing device is detachably connected to the adjustment frame, and the working end of the laser interferometer is aligned with the window of the optical element surface shape testing device.

[0016] The optical element surface shape testing device provided by this invention includes a Dewar, a support frame, an end cap, and a connecting device. During testing, the optical element under test is fixed to the support frame. Then, the end cap is opened, and the support frame with the optical element under test is fixed to a second storage tank, ensuring contact between the support frame and the second storage tank. The end cap is then closed, and the Dewar is fixed to an adjustment frame via the connecting device. Next, a vacuum operation is performed on the Dewar. Once the required vacuum level is reached, the vacuum operation is stopped. First, the surface shape of the optical element under test at room temperature is tested. The angle and position of the Dewar can be adjusted via the adjustment frame, thereby adjusting the angle and position of the optical element under test, enabling the laser interferometer to meet the surface shape testing conditions for room temperature surface shape testing. Then, cryogenic refrigerant is injected into the first storage tank of the Dewar. The flow rate adjustment component controls the flow of cryogenic refrigerant into the second storage tank, thereby controlling the temperature of the second storage tank. Since the support frame is in contact with the second storage tank, heat conduction helps the temperature of the optical element under test reach and maintain the required temperature. The angle and position of the optical element surface shape testing device are adjusted again using the adjustment frame, thereby adjusting the angle and position of the optical element under test. This enables the laser interferometer to meet the surface shape testing conditions for surface shape testing under a specific low-temperature environment. In this way, the opening of the flow control component can be continuously adjusted to change the temperature of the optical element and adjust the angle and position of the optical element under test, achieving surface shape testing at different temperatures. The optical element surface shape testing device provided by this invention eliminates the need to open the Dewar flare for adjustment and to repeat vacuuming operations when adjusting the angle and position of the optical element. Furthermore, the temperature can decrease continuously, simplifying the operation steps, improving testing efficiency, and reducing testing difficulty.

[0017] Furthermore, the optical element surface shape testing system provided by the present invention has the same advantages as described above because it has the optical element surface shape testing device described above. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural schematic diagram of the optical element surface shape testing device provided by the present invention. Figure 1 ; Figure 2 This is a cross-sectional schematic diagram of the optical element surface shape testing device provided by the present invention. Figure 1 ; Figure 3 This is a cross-sectional schematic diagram of the optical element surface shape testing device provided by the present invention. Figure 2 ; Figure 4 This is a three-dimensional structural schematic diagram of the optical element surface shape testing device provided by the present invention. Figure 2 ; Figure 5 This is a schematic diagram of the operation of the optical element surface shape testing system provided by the present invention; Figure label: 110: Outer cylinder; 111: Upper cylinder; 112: Lower cylinder; 120: First storage tank; 130: Second storage tank; 131: First cylinder; 132: Second cylinder; 140: Neck tube; 150: Guide tube; 160: Support column; 170: Vacuum extraction port; 200: Support frame; 210: Annular groove; 300: End cap; 310: Light-transmitting plate; 410: Adjusting valve stem; 411: Through hole; 420: Rotating head; 430: Conical plug; 500: Optical element; 610: First pressure ring; 620: Second pressure ring; 710: Thermometer connector mounting flange; 720: Thermometer connector; 800: Flange cover; 900: Laser interferometer. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0021] The following is combined with Figures 1-5 The optical element surface shape testing apparatus and system of the present invention are described.

[0022] The present invention provides an optical element surface shape testing device, including a Dewar, a support frame 200, an end cap 300, and a connecting device.

[0023] The Dewar includes an outer cylinder 110 and a first storage tank 120 and a second storage tank 130 disposed inside the outer cylinder 110. One end of the first storage tank 120 is connected to the outside of the outer cylinder 110, and the other end of the first storage tank 120 is connected to the second storage tank 130. A flow regulating component is also provided between the first storage tank 120 and the second storage tank 130. The first storage tank 120 is used to store cryogenic refrigerant, and the flow regulating component is used to control the opening degree of the connection between the first storage tank 120 and the second storage tank 130, thereby controlling the flow rate of the cryogenic refrigerant.

[0024] The outer cylinder 110 comprises two parts, both of which are hollow cylindrical structures, including an upper cylinder 111 and a lower cylinder 112. The axis of the upper cylinder 111 is perpendicular to the axis of the lower cylinder 112, and the bottom of the upper cylinder 111 is connected to the interior of the lower cylinder 112.

[0025] The first storage tank 120 can be a hollow cylindrical structure. The first storage tank 120 is disposed inside the upper cylinder 111, and the axis of the first storage tank 120 is collinear with the axis of the upper cylinder 111. A neck tube 140 is provided between the top of the first storage tank 120 and the top of the upper cylinder 111. The axis of the neck tube 140 is parallel to the axis of the upper cylinder 111. In a preferred embodiment, the axis of the neck tube 140 is collinear with the axis of the upper cylinder 111. The bottom of the neck tube 140 communicates with the interior of the first storage tank 120, and the top of the neck tube 140 communicates with the exterior of the upper cylinder 111 at the top of the upper cylinder 111.

[0026] The second storage tank 130 may include a first cylindrical body 131 and a second cylindrical body 132. The first cylindrical body 131 has a cylindrical structure and is a closed structure. The axis of the first cylindrical body 131 may be collinear with the axis of the lower cylindrical body 112, and the outer diameter of the first cylindrical body 131 is smaller than the inner diameter of the lower cylindrical body 112. The second cylindrical body 132 has a cylindrical structure, and its outer diameter is smaller than the inner diameter of the first cylindrical body 131. The second cylindrical body 132 is disposed inside the first cylindrical body 131, and its axis is collinear with the axis of the first cylindrical body 131. Both ends of the second cylindrical body 132 are continuous and penetrate both ends of the first cylindrical body 131. Thus, the space between the inner wall of the first cylindrical body 131 and the outer wall of the second cylindrical body 132 forms a sealed space, creating the cavity of the second storage tank 130.

[0027] A conduit 150 is provided on the outer side of the first cylinder 131 near the first storage tank 120. The bottom of the conduit 150 communicates with the interior of the first cylinder 131, and the top of the conduit 150 extends upward, communicating with the interior of the first storage tank 120 at its bottom. In an optional embodiment, the extension line of the axis of the conduit 150 is collinear with the axis of the first storage tank 120.

[0028] The flow regulation assembly includes a regulating valve stem 410, a regulating device, and a conical plug 430.

[0029] The regulating valve stem 410 can be a cylindrical rod-shaped structure, hollow inside, and open at both ends. The bottom of the regulating valve stem 410 is inserted downward into the first storage tank 120 through the neck tube 140. When the bottom of the regulating valve stem 410 reaches the bottom of the first storage tank 120, the top of the regulating valve stem 410 is located on the outer side of the top of the upper cylinder 111. Multiple through holes 411 connecting the inner and outer sides of the regulating valve stem 410 are provided on the outer side of the portion of the regulating valve stem 410 inside the first storage tank 120. When it is necessary to add cryogenic refrigerant to the first storage tank 120, it can be added from the top of the regulating valve stem 410, flowing into the first storage tank 120 through the through holes 411. Simultaneously, the vaporized cryogenic refrigerant can be discharged through the through holes 411 and the top of the regulating valve stem 410, preventing excessive pressure from damaging the first storage tank 120.

[0030] The adjusting device may include a connecting pipe and a rotating head 420. The bottom of the connecting pipe is connected to the top of the upper cylinder 111, and the axis of the connecting pipe is collinear with the axis of the neck pipe 140. An internal thread is provided on the inner wall of the connecting pipe. The bottom of the rotating head 420 is connected to the top of the adjusting valve stem 410, and an external thread that mates with the internal thread is provided on the outer side of the rotating head 420. When the rotating head 420 rotates in a first direction, the adjusting valve stem 410 moves upward under the action of the thread. When the rotating head 420 rotates in a second direction, the adjusting valve stem 410 moves downward under the action of the thread.

[0031] The conical plug 430 is located at the bottom of the regulating valve stem 410. When the regulating valve stem 410 moves downward to its lowest point, the outer side of the large end of the conical plug 430 seals the end connecting the conduit 150 and the first storage tank 120. At this time, the cryogenic refrigerant in the first storage tank 120 cannot flow into the second storage tank 130. When it is necessary to cool the optical element 500 under test, the rotating head 420 is operated, causing the regulating valve stem 410 to drive the conical plug 430 upward. Due to the structural characteristics of the conical plug 430, the higher the conical plug 430 moves, the larger the opening of the conduit 150 becomes. This achieves the effect of adjusting the opening of the conduit 150. By adjusting the opening of the conduit 150, the flow rate of the cryogenic refrigerant can be further adjusted, thereby controlling the temperature of the second storage tank 130.

[0032] The support frame 200 is detachably connected to the second storage tank 130 and is used to fix the optical element 500 to the outside of the second storage tank 130.

[0033] In one embodiment of the present invention, the optical element 500 can be a circular lens, and the support frame 200 can be a ring structure. An annular groove 210 is provided on one side of the ring structure. The axis of the annular groove 210 coincides with the axis of the ring. The inner diameter of the annular groove 210 is equal to the outer diameter of the optical element 500, and the inner diameter of the support frame 200 is smaller than the outer diameter of the optical element 500. Thus, the optical element 500 can be disposed in the annular groove 210.

[0034] The outer diameter of the support frame 200 can be equal to the inner diameter of the second cylinder 132. The support frame 200 can be coaxially arranged inside the second cylinder 132. The support frame 200 is in contact with the second cylinder 132, and the optical element 500 is in contact with the support frame 200. When the second cylinder 132 cools down, it can indirectly cool the optical element 500.

[0035] A first pressure ring 610 and a second pressure ring 620 are provided on the inner side of the second cylinder 132. The first pressure ring 610 can be integral with the second cylinder 132 and extends radially inward along the second cylinder 132. The outer diameter of the second pressure ring 620 is equal to the inner diameter of the second cylinder 132. An external thread is provided on the outer side of the second pressure ring 620, and an internal thread is provided on the inner side of the second cylinder 132 near the end cap 300.

[0036] When installing the support frame 200, the support frame 200 can be placed inside the second cylinder 132, with the end of the support frame 200 away from the end cap 300 contacting the first pressure ring 610. Then, the second pressure ring 620 is screwed into the second cylinder 132. The support frame 200 is clamped between the first pressure ring 610 and the second pressure ring 620.

[0037] To increase the preload and to prevent the second pressure ring 620 from damaging the support frame 200, an elastic ring can be provided on the side of the second pressure ring 620 away from the end cover 300. The elastic ring is clamped between the second pressure ring 620 and the support frame 200.

[0038] The outer cylinder 110 is open at one end near the support frame 200, and an end cap 300 is provided at this end. The end cap 300 and the outer cylinder 110 can be detachably connected by bolts, and a sealing ring can be provided between the end cap 300 and the outer cylinder 110 to ensure the sealing of the outer cylinder 110 after the end cap 300 and the outer cylinder 110 are connected.

[0039] A window is provided at the center of the end cap 300. The window can be a circular window. A light-transmitting sheet 310 can be installed inside the window. The light-transmitting sheet 310 is sealed to the window, which can ensure the sealing of the outer cylinder 110.

[0040] In a preferred embodiment, the light-transmitting plate 310 is positioned between the optical element under test 500 and the laser interferometer 900. To reduce the influence of the light-transmitting plate 310 on the measurement, on the one hand, the processing accuracy of the surface of the light-transmitting plate 310 is controlled, and on the other hand, the mounting surface of the light-transmitting plate 310 is processed at a certain angle so that there is an angle between the normal of the light-transmitting plate 310 and the axis of the window. In this way, the light emitted from the surface of the light-transmitting plate 310 does not enter the field of view of the laser interferometer 900.

[0041] The connecting device can be a flange cover 800. The connecting device is set on the outer cylinder 110. In a preferred embodiment, the connecting device is set at the end of the outer cylinder 110 away from the end cover 300. The optical element surface shape testing device can be installed as a whole on the adjustment frame through the connecting device. The adjustment frame can be a five-dimensional adjustment frame.

[0042] In one embodiment of the present invention, the end of the outer cylinder 110 away from the end cap 300 may also be an open structure, where a thermometer connector mounting flange 710 can be connected, and the thermometer connector mounting flange 710 is sealed to the end of the outer cylinder 110. At least one thermometer connector 720 may be provided on the thermometer connector mounting flange 710. During testing, a thermometer must be provided on at least the optical element 500 or the support frame 200. One end of the thermometer connector 720 extends into the inside of the thermometer connector mounting flange 710, and the other end remains outside the thermometer connector mounting flange 710. The thermometer located inside is connected to the inside of the thermometer connector 720, and the outside of the thermometer connector 720 is used to connect to a temperature acquisition device.

[0043] The aforementioned connecting device can be a flange cover 800, which is used to seal the end of the thermometer connector mounting flange 710 away from the end cover 300.

[0044] To prevent the outer side of the second storage tank 130 from contacting the outer cylinder 110 and to suspend the second storage tank 130 inside the outer cylinder 110, a support column 160 can be provided between the outer side of the second storage tank 130 and the inner side of the outer cylinder 110. The support column 160 can extend radially along the second storage tank 130. When there are multiple support columns 160, they can be distributed circumferentially along the second storage tank 130.

[0045] When performing optical element surface shape testing, firstly, the optical element 500 to be tested is installed in the support frame 200, and the support frame 200 is placed in the first pressure ring 610 inside the second cylinder 132. By tightening the second pressure ring 620, a certain preload is applied to the support frame 200 to ensure that the support frame 200 remains in close contact with the first pressure ring 610 and the second cylinder 132 at low temperatures.

[0046] Then, the thermometer connector mounting flange 710 is installed onto the outer cylinder 110. The thermometer is then attached to the side of the optical element 500 under test near the thermometer connector mounting flange 710 or to the side of the support frame 200 near the thermometer connector mounting flange 710. The thermometer is connected to the thermometer connector 720, and the temperature of the optical element 500 under test is monitored by the temperature acquisition device connected to the thermometer connector 720.

[0047] Then connect the end cap 300 and the flange cap 800 to finally form a low-temperature surface shape testing device.

[0048] Connect the flange cover 800 of the optical element surface shape testing device to the five-dimensional adjustment frame with bolts, and then evacuate the optical element surface shape testing device to place the optical element 500 in a vacuum environment. After the vacuum level drops to a specific value, close the valve at the vacuum port 170 on the outer cylinder 110 to disconnect it from the vacuum pump.

[0049] First, the surface shape of the optical element 500 under test is tested at room temperature. At this time, there is no low-temperature refrigerant in the second storage tank 130. By adjusting the degree of freedom of the five-dimensional adjustment frame, the optical element surface shape testing device is adjusted as a whole, thereby changing the position and angle of the optical element 500 under test, so that the laser interferometer 900 has the conditions for surface shape testing and performs surface shape testing at room temperature.

[0050] Then, the surface shape of the optical element 500 under test at low temperature is tested. At this time, liquid nitrogen can be injected into the first storage tank 120 by adjusting the valve stem 410. By operating the rotating head 420, the valve stem 410 drives the conical plug 430 to move upward, changing the opening of the top opening of the conduit 150, so that the optical element 500 under test is maintained at a certain preset temperature. At this time, the position and angle of the optical element 500 under test are changed again by adjusting the degrees of freedom of the five-dimensional adjustment frame, so that the laser interferometer 900 has the conditions for surface shape testing, and low-temperature surface shape testing is performed at this temperature.

[0051] Next, the position of the regulating valve rod 410 is adjusted again to change the opening of the top opening of the conduit 150, so that the optical element 500 under test is maintained at the next preset temperature. At this time, the position and angle of the optical element 500 under test are changed again by adjusting the degrees of freedom of the five-dimensional adjustment frame, so that the laser interferometer 900 has the conditions for surface shape testing and performs low-temperature surface shape testing at this temperature.

[0052] This process is repeated, continuously adjusting the position of the regulating valve rod 410 to change the opening degree of the top opening of the conduit 150, thereby changing the temperature of the optical element 500. The position and angle of the optical element 500 are then adjusted using a five-dimensional adjustment frame until the surface shape test of the optical element at multiple temperatures is finally completed.

[0053] In addition, the aforementioned cryogenic coolant can be not only liquid nitrogen, but also cryogenic liquids such as liquid oxygen and liquid helium.

[0054] The optical element surface shape testing device provided by this invention allows for continuous temperature variation and requires only one vacuuming operation. It eliminates the need to repeatedly open the outer cylinder 110 to adjust the angle and position of the internal optical element 500. The entire optical element surface shape testing device can be adjusted via a five-dimensional adjustment frame, achieving the effect of adjusting the position and angle of the optical element 500 without opening the outer cylinder 110, thus greatly improving testing efficiency.

[0055] The present invention also provides an optical element surface shape testing system, including a laser interferometer 900, an adjustment frame, and an optical element surface shape testing device as described above. The adjustment frame can be a five-dimensional adjustment frame, and the flange cover 800 of the optical element surface shape testing device can be connected to the five-dimensional adjustment frame. The working end of the laser interferometer 900 is aligned with the window.

[0056] Since the optical element surface shape testing system provided by the present invention has the optical element surface shape testing device as described above, it has the same advantages as described above.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical element surface shape testing device, characterized in that, include: The Dewar includes an outer cylinder and a first storage tank and a second storage tank disposed inside the outer cylinder. One end of the first storage tank is connected to the outside of the outer cylinder, and the other end of the first storage tank is connected to the second storage tank. A flow regulating component is also provided between the first storage tank and the second storage tank. The first storage tank is used to store cryogenic refrigerant. A support frame, detachably connected to the second storage tank, is used to fix the optical element to the outside of the second storage tank; The end cap is open at one end of the outer cylinder near the support frame. The end cap is detachably connected to the open end of the outer cylinder and has a window with a light-transmitting sheet. The window is positioned directly opposite the support frame. A connecting device is disposed on the outer cylinder and is used for detachable connection with the adjusting frame; The second storage tank includes: The first cylinder is a sealed structure and is connected to the first storage tank via a conduit. The second cylinder is inserted inside the first cylinder, with both ends of the second cylinder open and passing through both ends of the first cylinder. The support frame is installed inside the second cylinder. The first storage tank is provided with a neck tube, one end of which is connected to the first storage tank and the other end of which is connected to the outside of the outer cylinder. The flow regulation component includes: An adjusting valve stem, one end of which is inserted into the first storage tank through the neck tube, and the other end of which is located outside the outer cylinder, and the adjusting valve stem is slidably connected to the neck tube; An adjusting device is disposed between the adjusting valve rod and the outer side of the outer cylinder, and the adjusting device is used to drive the adjusting valve rod to move axially along the neck tube; A conical plug is disposed at one end of the regulating valve stem located inside the first storage tank, and the larger end of the conical plug can seal the end of the conduit connected to the first storage tank.

2. The optical element surface shape testing device according to claim 1, characterized in that, The inner side of the second cylinder is provided with a first pressure ring and a second pressure ring. The first pressure ring extends radially inward along the second cylinder. The second pressure ring is threaded to the inner side of the second cylinder near the window. The support frame is clamped between the first pressure ring and the second pressure ring.

3. The optical element surface shape testing device according to claim 2, characterized in that, An elastic ring is provided on the side of the second pressure ring close to the first pressure ring.

4. The optical element surface shape testing device according to claim 1, characterized in that, The regulating valve stem is hollow inside and open at the top. The portion of the regulating valve stem located inside the first storage tank is provided with a through hole connecting the inner and outer sides of the regulating valve stem.

5. The optical element surface shape testing device according to any one of claims 1 to 3, characterized in that, The outer cylinder is also provided with a thermometer connector. One end of the thermometer connector extends into the outer cylinder and is used to connect to a thermometer inside the outer cylinder. The other end of the thermometer connector is located on the outside of the outer cylinder and is used to connect to a temperature acquisition device.

6. The optical element surface shape testing device according to any one of claims 1 to 3, characterized in that, At least one support column is provided between the outer side wall of the first cylinder and the inner side wall of the outer cylinder.

7. An optical element surface shape testing system, characterized in that, The device includes a laser interferometer, an adjustment frame, and an optical element surface shape testing device as described in any one of claims 1 to 6, wherein the optical element surface shape testing device is detachably connected to the adjustment frame, and the working end of the laser interferometer is aligned with the window of the optical element surface shape testing device.

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