Gas treatment system

Abstract

Provided is a gas processing system capable of correctly detecting internal leakage of a three-way valve and capable of suppressing leakage of exhaust gas to a bypass line. A gas processing system (10) provided with a main exhaust line (22) that guides exhaust gas to a decontamination device (40), a bypass line (30) that guides exhaust gas to an emergency decontamination device (50), an upstream-side exhaust line (21), and a three-way valve (23) capable of switching flow of exhaust gas from the upstream-side exhaust line (21) to the main exhaust line (22) or the bypass line (30), the bypass line (30) having a gate valve (33), a gas introduction pipe (34) that introduces a second gas, and a pressure gauge (35) that detects pressure; in a case where the three-way valve (23) exhausts to the main exhaust line (22), internal leakage of the three-way valve (23) can be detected based on a change in pressure detected by the pressure gauge (35) in a state where the second gas is introduced from the gas introduction pipe (34) to a closed flow path (C) between the gate valve (33) and the three-way valve (23).

Description

Technical Field

[0001] This invention relates to gas handling systems. Background Technology

[0002] Semiconductor manufacturing equipment requires a high-vacuum environment inside the equipment. Vacuum pumps are used to achieve this high-vacuum state. The exhaust gas discharged from the vacuum pump contains decontamination gases that need to be purified. Therefore, the exhaust gas is transported via exhaust lines to a decontamination device for decontamination treatment.

[0003] There are cases where a three-way valve is installed in the exhaust line, from which a main exhaust line and a bypass line branch off (for example, see Patent Document 1). A purging device is installed downstream of the main exhaust line, and an emergency purging device is connected downstream of the bypass line to temporarily perform purging treatment in case of a malfunction in the purging device. Under normal circumstances, the exhaust gas flowing in the exhaust line is not transported to the bypass line via the three-way valve, but is transported to the purging device via the main exhaust line for purging treatment. Furthermore, in case of a malfunction in the purging device, the three-way valve is switched, and the exhaust gas is transported to the emergency purging device via the bypass line instead of to the main exhaust line for simplified purging treatment.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent document 1: Japanese Patent Application Publication No. 2020-25096. Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] Incidentally, the exhaust line and three-way valve are set to high temperature to prevent the harmful gases from solidifying and accumulating internally. That is, by setting the harmful gases to a high temperature, the state of the harmful gases is placed on the gas phase side of the vapor pressure curve, thus inhibiting the solidification of the harmful gases.

[0009] If the three-way valve becomes hot, its sealing performance may deteriorate, leading to internal leakage. In this case, even though the three-way valve is opened to the main exhaust line to treat the purging gas, the purging gas flows into the bypass line. Emergency purging devices connected to the bypass line generally have low purging performance, so if a large amount of purging gas flows in, it may not be completely treated.

[0010] To suppress internal leakage in a three-way valve, one could increase the heat resistance temperature of the valve's seal. However, even with increased heat resistance, the valve's sealing performance will inevitably decrease due to higher temperatures. Therefore, it is desirable to accurately detect internal leakage in a three-way valve.

[0011] The present invention was made to solve the above-mentioned problems, and the object is to provide a gas treatment system that can accurately detect internal leakage of a three-way valve that branches the flow path of exhaust gas and can suppress leakage of exhaust gas from the three-way valve to the bypass line.

[0012] Methods used to solve problems

[0013] The gas handling system of the present invention, which achieves the above-mentioned objectives, comprises: a main exhaust line for guiding exhaust gas to a gas handling device; a bypass line for guiding the exhaust gas to a device other than the gas handling device; an upstream exhaust line for guiding the exhaust gas to both the main exhaust line and the bypass line; and a three-way valve capable of switching the flow of the exhaust gas from the upstream exhaust line to either the main exhaust line or the bypass line. The gas handling system is characterized in that the bypass line comprises: a gate valve; a gas inlet pipe for introducing a second gas between the three-way valve and the gate valve; and a pressure gauge for detecting the pressure between the three-way valve and the gate valve. When the three-way valve is discharging gas to the main exhaust line, the gate valve is closed to form a closed flow path between the gate valve and the three-way valve. Internal leakage of the three-way valve can be detected based on pressure changes detected by the pressure gauge while the second gas is being introduced from the gas inlet pipe into the closed flow path.

[0014] Invention Effects

[0015] The gas handling system configured as described above can accurately detect internal leakage of the three-way valve based on the pressure change of the closed flow path detected by the pressure gauge, and can suppress leakage of exhaust gas into the bypass line by introducing a second gas into the closed flow path.

[0016] Alternatively, the aforementioned gas inlet pipe may have a second gate valve; after the aforementioned second gas is introduced from the aforementioned gas inlet pipe, by closing the aforementioned second gate valve, the pressure within the aforementioned closed flow path can be maintained, and the internal leakage of the aforementioned three-way valve can be detected based on the pressure change within the aforementioned closed flow path detected by the aforementioned pressure gauge. The gas handling system can maintain the pressure within the closed flow path by closing the second gate valve, thus easily detecting pressure changes in the closed flow path due to internal leakage, and accurately detecting the internal leakage of the three-way valve.

[0017] Alternatively, while ensuring that internal leakage of the aforementioned three-way valve can be detected, the aforementioned second gas can be continuously introduced from the aforementioned gas inlet pipe. Thus, the gas handling system can prevent the pressure within the closed-loop circuit from decreasing over time, and therefore, even after time has elapsed, it can appropriately maintain a state where pressure changes in the closed-loop circuit can be detected.

[0018] Alternatively, under conditions where internal leakage of the aforementioned three-way valve can be detected, the aforementioned second gas is introduced only through the aforementioned gas inlet pipe for a specified period of time. Therefore, the gas handling system does not need to continuously maintain the pressure within the closed loop; it only needs to maintain it at a constant level for a limited time. This makes it easy to detect pressure changes in the closed loop due to internal leakage, enabling high-precision detection of internal leakage in the three-way valve.

[0019] The aforementioned gas inlet pipe may also have a throttling mechanism to adjust the flow rate of the second gas. Thus, in the gas handling system, the flow rate of the second gas is limited to a small amount by the throttling mechanism. Therefore, the time-varying pressure changes within the closed-loop path due to the inflow of the second gas become gradual. Consequently, pressure changes within the closed-loop path due to leakage in the three-way valve are less likely to be masked by pressure changes within the closed-loop path due to the inflow of the second gas and are easily determined. Therefore, the gas handling system can detect internal leakage in the three-way valve with high precision.

[0020] The aforementioned gate valve can also be a normally open type. Therefore, if a malfunction occurs in the structure that actuates the gate valve, it will automatically open, and the gas flowing in the bypass line will be urgently released to equipment outside the gas handling unit. Thus, the gas handling system can ensure high safety. Attached Figure Description

[0021] Figure 1 This is a structural diagram of the gas processing system according to this embodiment.

[0022] Figure 2 This is a structural diagram of the three-way valve of the gas handling system according to this embodiment when an internal leak occurs.

[0023] Figure 3 This is a structural diagram of the gas treatment system of this embodiment when an adverse condition occurs in the hazard removal device.

[0024] Figure 4 This is a structural diagram of a modified example of the gas processing system according to this embodiment. Detailed Implementation

[0025] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, the dimensions in the drawings are sometimes exaggerated and differ from the actual dimensions for ease of explanation. Additionally, in this specification and the accompanying drawings, constituent elements having substantially the same functional structure are omitted from repeated description by assigning the same reference numerals.

[0026] The gas handling system 10 according to embodiments of the present invention is as follows: Figure 1As shown, the gas handling system 10 includes an upstream exhaust line 21 for conveying exhaust gas from a vacuum pump (not shown) connected to a semiconductor manufacturing apparatus, a main exhaust line 22 disposed downstream of the upstream exhaust line 21, a three-way valve 23 disposed between the upstream exhaust line 21 and the main exhaust line 22, and a purging device 40 disposed downstream of the main exhaust line 22. The gas handling system 10 also includes a bypass line 30 connected to the three-way valve 23 and an emergency purging device 50 disposed downstream of the bypass line 30. The upstream exhaust line 21, the main exhaust line 22, and the bypass line 30 have piping structures that form flow paths for the exhaust gas.

[0027] The upstream exhaust line 21 is connected to, for example, a booster pump 11 from which exhaust gas is supplied from a vacuum pump, and the exhaust gas is supplied from the booster pump 11. However, the structure located upstream of the upstream exhaust line 21 is not limited to the booster pump 11. The exhaust gas flowing in the upstream exhaust line 21 contains a purifying gas that needs to be purified. The purifying gas is a highly volatile substance that sublimates upon heating, such as ammonium chloride, but is not limited to this. The downstream end of the upstream exhaust line 21 is connected to a three-way valve 23.

[0028] The upstream end of the main exhaust line 22 is connected to the three-way valve 23, and the downstream end of the main exhaust line 22 is connected to the purifying device 40. At least one of the upstream exhaust line 21 and the main exhaust line 22 is equipped with a pipe heater 24. The pipe heater 24 heats the pipes of at least one of the upstream exhaust line 21 and the main exhaust line 22, suppressing the accumulation of purifying gases flowing inside the pipes. The set temperature of the pipe heater 24 is appropriately set according to the type and pressure of the purifying gas, for example, sometimes above 200°C, but is not limited thereto.

[0029] The three-way valve 23 is connected to the upstream exhaust line 21, the main exhaust line 22, and the bypass line 30. The three-way valve 23 can switch between a state where the flow paths of the upstream exhaust line 21 and the main exhaust line 22 are connected and a state where the flow paths of the upstream exhaust line 21 and the bypass line 30 are connected. The switching action of the three-way valve 23 is performed, for example, by an actuator that operates using air pressure supplied from the air pressure supply source 12. However, the switching method of the three-way valve 23 is not limited to this; for example, it can also be performed by a hydraulic or electric actuator.

[0030] The purging device 40 is a gas treatment device for treating harmful gases to prevent air pollution. The construction of the purging device 40 is not particularly limited; for example, it can treat harmful gases using methods such as combustion, thermal decomposition, wet scrubbing, catalytic oxidation, plasma decomposition, or adsorption. Furthermore, the gas treatment device that transports the exhaust gas may not be the purging device 40.

[0031] The bypass line 30 includes a first bypass line 31, a second bypass line 32, a gate valve 33, a gas inlet pipe 34 for introducing a second gas into the first bypass line 31 between the three-way valve 23 and the gate valve 33, and a pressure gauge 35 for detecting the pressure between the three-way valve 23 and the gate valve 33. The upstream end of the first bypass line 31 is connected to the three-way valve 23, and the downstream end of the first bypass line 31 is connected to the gate valve 33. The upstream end of the second bypass line 32 is connected to the gate valve 33, and the downstream end of the second bypass line 32 is connected to the emergency purging device 50. The emergency purging device 50 is a gas treatment device that replaces the purging device 40 in treating the purging gas when an abnormality occurs. Furthermore, the emergency purging device 50 is a simple gas treatment device with a basic structure that primarily treats the gas through dilution, and its purging performance is generally low.

[0032] Gate valve 33 is a valve capable of opening and closing the flow path between the first bypass line 31 and the second bypass line 32. The switching action of gate valve 33 is the same as that of three-way valve 23, for example, performed by an actuator operated by air pressure supplied from air pressure supply source 12. However, the switching method of gate valve 33 is not limited to this; for example, it can be performed by a hydraulic or electric actuator. Gate valve 33 and three-way valve 23 are opened and closed synchronously. That is, when the upstream exhaust line 21 of three-way valve 23 is open with the first bypass line 31, gate valve 33 is open; when the upstream exhaust line 21 of three-way valve 23 is closed with the first bypass line 31, gate valve 33 is closed. Gate valve 33 is preferably a normally open type valve that automatically becomes open in the open state without any force acting to close the valve. Gate valve 33 is, for example, a spring-loaded type valve that automatically becomes open in the open state by the action of an internal spring. Therefore, if a malfunction occurs in the structure that actuates the gate valve 33, the gate valve 33 will automatically open, and the gas flowing in the bypass line 30 will be released to the emergency purging device 50, ensuring safety.

[0033] Gas inlet pipe 34 is a piping that supplies a second gas to bypass line 30. Gas inlet pipe 34 includes a pressure regulator 36 that adjusts the pressure of the second gas supplied from gas supply source 14, and a second gate valve 37 disposed between the pressure regulator 36 and the first bypass line 31. The second gas supplied from gas supply source 14 is used to increase the pressure in the closed flow path C of bypass line 30, which is closed by three-way valve 23, gate valve 33, and second gate valve 37. Nitrogen is preferably the second gas supplied from gas supply source 14, but any inert gas is acceptable and not particularly limited; for example, argon may also be used.

[0034] The second gate valve 37 is a valve capable of opening and closing the flow path between the pressure regulator 36 and the first bypass line 31. The switching action of opening and closing the second gate valve 37 is performed manually, but it can also be performed by an actuator such as an air pressure type, hydraulic type or electric type.

[0035] The pressure gauge 35 is connected to the piping between the three-way valve 23 and the gate valve 33 of the bypass line 30, closer to the first bypass line 31 than the second gate valve 37, to detect the internal pressure of the bypass line 30. That is, the pressure gauge 35 detects the pressure within the closed flow path C of the bypass line 30, which is closed by the three-way valve 23, the gate valve 33, and the second gate valve 37. The pressure detection result from the pressure gauge 35 is used to detect leakage from the three-way valve 23 into the bypass line 30. In this embodiment, the pressure gauge 35 is connected to the gas inlet pipe 34 connected to the first bypass line 31, but it can also be connected directly to the first bypass line 31. The pressure gauge 35 sends a signal indicating the detected result to the display device 13. The display device 13 displays the result so that the operator can visually identify the pressure detection result received from the pressure gauge 35.

[0036] Next, the function of the gas handling system 10 in this embodiment will be explained.

[0037] First, the flow paths of the upstream exhaust line 21 and the main exhaust line 22 are connected by the three-way valve 23, while the flow paths of the upstream exhaust line 21 and the bypass line 30 are closed. Simultaneously, the gate valve 33 is closed. Next, the second gate valve 37 is opened, and the second gas is supplied from the gas supply source 14 to the closed flow path C of the bypass line 30 via the pressure regulator 36. The pressure P of the closed flow path C of the bypass line 30 is set to a specified pressure P0 (P = P0). Then, the operator closes the second gate valve 37. Thus, the pressure of the closed flow path C of the bypass line 30 is maintained at the specified pressure P0. For example, the pressure of the second gas supplied from the gas supply source 14 is approximately 10 kPa to 100 kPa, and the specified pressure P0 of the closed flow path C is set to approximately 1 kPa to 100 kPa.

[0038] Next, the operator uses the piping heater 24 to heat at least one of the upstream exhaust line 21 and the main exhaust line 22. Then, the exhaust gas from the booster pump 11 flows to the purifying device 40 via the upstream exhaust line 21 and the main exhaust line 22. The exhaust gas reaching the purifying device 40 undergoes purifying treatment and is released to the outside. For example, the pressure of the exhaust gas flowing in the upstream exhaust line 21 and the main exhaust line 22 is several kPa. The pressure P of the closed-loop path C is greater than the pressure of the exhaust gas flowing in the upstream exhaust line 21 and the main exhaust line 22. Therefore, if an internal leak occurs in the seal of the three-way valve 23, then... Figure 2As shown, the second gas inside the closed flow path C leaks to the main exhaust line 22 via the three-way valve 23. Since the leaked second gas is nitrogen, the impact on the gas treatment system 10 is relatively small. If the second gas inside the closed flow path C leaks from the three-way valve 23 to the inside of the main exhaust line 22, the pressure P of the closed flow path C drops from the initially set specified pressure P0 (P < P0). The operator monitors the pressure P of the closed flow path C through the display device 13 and determines the presence or absence of leakage of the three-way valve 23. For example, when the pressure P of the closed flow path C becomes below (or less than) a preset threshold value lower than the specified pressure P0, the operator can determine that an internal leakage has occurred in the three-way valve 23.

[0039] When an abnormality occurs in the decontamination device 40, as Figure 3 shown, the operator switches the three-way valve 23 to close the flow paths of the upstream exhaust line 21 and the main exhaust line 22, and opens and connects the flow paths of the upstream exhaust line 21 and the bypass line 30. Synchronously therewith, the gate valve 33 is opened. Thereby, the exhaust gas flowing in the upstream exhaust line 21 does not flow to the main exhaust line 22 but flows to the bypass line 30 and is conveyed to the emergency decontamination device 50 for decontamination treatment.

[0040] As described above, regarding the gas treatment system 10 of the present embodiment, there is provided a gas treatment system 10 including a main exhaust line 22 that guides exhaust gas to a gas treatment device (decontamination device 40), a bypass line 30 that guides exhaust gas to equipment other than the decontamination device 40 (emergency decontamination device 50), an upstream exhaust line 21 that guides exhaust gas to the main exhaust line 22 and the bypass line 30, and a three-way valve 23 that can switch the flow of the exhaust gas from the upstream exhaust line 21 to the main exhaust line 22 or the bypass line 30. The bypass line 30 has a gate valve 33, a gas introduction pipe 34 that introduces the second gas between the three-way valve 23 and the gate valve 33, and a pressure gauge 35 that detects the pressure between the three-way valve 23 and the gate valve 33; when the three-way valve 23 exhausts to the main exhaust line 22, the gate valve 33 is closed to form a closed flow path C between the gate valve 33 and the three-way valve 23, and in a state where the second gas is further introduced into the closed flow path C from the gas introduction pipe 34, the internal leakage of the three-way valve 23 can be detected based on the change in the pressure detected by the pressure gauge 35.

[0041] The gas handling system 10, configured as described above, can accurately detect internal leakage of the three-way valve 23 based on pressure changes in the closed-loop path C detected by the pressure gauge 35. Furthermore, by introducing a second gas into the closed-loop path C, leakage of exhaust gas into the bypass line 30 can be suppressed. When the pressure P in the closed-loop path C is greater than the pressure of the exhaust gas flowing in the upstream exhaust line 21 and the main exhaust line 22, the second gas inside the closed-loop path C leaks into the main exhaust line 22 via the three-way valve 23. Therefore, the leakage of exhaust gas into the bypass line 30 can be suppressed more effectively through the second gas.

[0042] Furthermore, the gas inlet pipe 34 has a second gate valve 37. After the second gas is introduced from the gas inlet pipe 34, the pressure in the closed flow path C can be maintained by closing the second gate valve 37. Based on the pressure change in the closed flow path C detected by the pressure gauge 35, internal leakage of the three-way valve 23 can be detected. Because the gas handling system 10 can maintain the pressure in the closed flow path C by closing the second gate valve 37, it is easy to detect pressure changes in the closed flow path C due to internal leakage, and thus, internal leakage of the three-way valve 23 can be accurately detected.

[0043] Furthermore, the gate valve 33 is a normally open valve. Therefore, if a malfunction occurs in the structure that actuates the gate valve 33, the gate valve 33 automatically opens, and the gas flowing in the bypass line 30 is urgently released to equipment outside the gas handling unit (in this embodiment, the emergency hazard removal device 50). Thus, the gas handling system 10 can ensure a high level of safety.

[0044] Furthermore, the present invention is not limited to the embodiments described above, and various modifications and combinations can be made by those skilled in the art within the scope of the technical concept of the present invention. For example, it can also be done as follows: Figure 4 As shown in the modified example, the gas processing system 10 has a throttling mechanism 38 for adjusting the flow rate of the second gas disposed between the pressure regulator 36 of the bypass line 30 and the second gate valve 37. The throttling mechanism 38 is a throttling orifice plate. The throttling orifice plate may have, for example, a through hole with an inner diameter of about 1 / 4 inch, but the inner diameter of the through hole is not particularly limited. Furthermore, the structure of the throttling mechanism 38 is not particularly limited as long as it can throttle the flow rate of the gas passing through it; for example, it may also be a needle valve.

[0045] When using the modified example of the above gas treatment system 10, first, the three-way valve 23 connects the flow paths of the upstream exhaust line 21 and the main exhaust line 22, and closes the flow paths of the upstream exhaust line 21 and the bypass line 30. Synchronously, the gate valve 33 is closed. Then, the second gate valve 37 is opened, and the second gas is supplied from the gas supply source 14 to the closed flow path C of the bypass line 30 via the pressure regulator 36 and the throttling mechanism 38. The pressure P of the closed flow path C of the bypass line 30 is set to a prescribed pressure P0 (P = P0). Then, with the second gate valve 37 open, the second gas is continuously supplied. Thereby, the pressure P of the closed flow path C is prevented from gradually decreasing over time, and the pressure P is maintained at the desired prescribed pressure P0. Then, the exhaust gas from the booster pump 11 is conveyed to the decontamination device 40 via the upstream exhaust line 21 and the main exhaust line 22. After reaching the decontamination device 40, the decontamination gas of the exhaust gas is decontaminated and released to the outside. The pressure P of the closed flow path C is higher than the pressure of the exhaust gas flowing in the upstream exhaust line 21 and the main exhaust line 22. Therefore, if internal leakage occurs in the seal of the three-way valve 23, the second gas inside the closed flow path C leaks to the main exhaust line 22 via the three-way valve 23. If the second gas inside the closed flow path C leaks from the three-way valve 23 to the main exhaust line 22, the pressure P of the closed flow path C drops from the initially set prescribed pressure P0 (P < P0). The operator monitors the pressure P of the closed flow path C through the display device 13, and by comparing the pressure P with a threshold value, the presence or absence of leakage of the three-way valve 23 can be determined.

[0046] As described above, in the modified example of the gas treatment system 10, the second gas is continuously introduced from the gas introduction pipe 34 in a state where internal leakage of the three-way valve 23 can be detected. Thereby, the gas treatment system 10 can prevent the pressure P of the closed flow path C from decreasing over time, so that even after a lapse of time, the state where the change in the pressure P of the closed flow path C can be detected appropriately can be maintained.

[0047] In addition, the gas introduction pipe 34 has a throttling mechanism 38 for adjusting the flow rate of the second gas. Thereby, the flow rate of the second gas in the gas treatment system 10 is limited to a small amount by the throttling mechanism 38. Therefore, the time change of the pressure inside the closed flow path C due to the inflow of the second gas becomes gentle. Therefore, the change in the pressure inside the closed flow path C due to the internal leakage of the three-way valve 23 is not easily masked by the change in the pressure inside the closed flow path C due to the inflow of the second gas and is easy to determine. Therefore, the gas treatment system 10 can detect the internal leakage of the three-way valve 23 with high precision.

[0048] Furthermore, in the various embodiments described above, the determination of whether or not there is a leak in the three-way valve 23 is performed by the operator, but it can also be performed by a control unit such as a computer with computing capabilities. The control unit receives the pressure detection results from the pressure gauge 35, and by comparing the pressure P of the closed flow path C with a preset threshold, it can determine whether or not there is an internal leak in the three-way valve 23.

[0049] Furthermore, in a variation of the gas processing system 10 described above, the second gas is continuously introduced from the gas inlet pipe 34 when the internal leakage of the three-way valve 23 can be detected. However, in other variations, the second gas may only be introduced from the gas inlet pipe 34 at predetermined intervals. To detect changes in the pressure P of the closed-loop path C due to the internal leakage of the three-way valve 23, it is necessary to maintain the pressure P of the closed-loop path C at a constant level, but it is difficult to maintain this constant level continuously. Furthermore, a lower pressure P in the closed-loop path C makes it even more difficult to make the pressure P constant. In contrast, in other variations, to enable the detection of internal leakage of the three-way valve 23, the gas processing system 10 periodically (e.g., multiple times a day) opens the second gate valve 37, introducing the second gas for inspection from the gas supply source 14 through the pressure regulator 36 and the gas inlet pipe 34 into the closed-loop path C, so that the pressure P of the closed-loop path C reaches a predetermined pressure P0. That is, the gas handling system 10 does not need to continuously maintain the pressure P of the closed-loop path C, but only maintains the pressure P of the closed-loop path C at the specified pressure P0 for a limited short time during inspection. If it is only a short time during inspection, it is easy to maintain the pressure P of the closed-loop path C at the specified pressure P0. Therefore, the gas handling system 10 can easily detect changes in the pressure P of the closed-loop path C due to internal leakage, and can detect internal leakage of the three-way valve 23 with high accuracy. Thus, the operator can monitor the pressure P of the closed-loop path C through the display device 13, and by comparing the pressure P with a threshold, can determine the presence or absence of leakage in the three-way valve 23 with high accuracy. Furthermore, at least one of the following—the periodic opening and closing of the second gate valve 37, the adjustment control performed by the pressure regulator 36, and the determination of the presence or absence of internal leakage in the three-way valve 23—can be automatically performed by a control unit such as a computer with computational capabilities.

[0050] Explanation of reference numerals in the attached figures

[0051] 10 Gas Handling System

[0052] 21. Upstream exhaust line

[0053] 22 Main exhaust line

[0054] 23 Three-way valve

[0055] 30 Bypass Lines

[0056] 31. First Bypass Line

[0057] 32 Second Bypass Line

[0058] 33 Gate valve

[0059] 34 Gas inlet tube

[0060] 35 Pressure gauge

[0061] 36 Pressure Regulator

[0062] 37 Gate Valve No. 2

[0063] 38 throttling mechanisms

[0064] 40. Pest Control Device (Gas Treatment Device)

[0065] 50 Emergency Pest Control Device (Emergency Gas Treatment Device)

[0066] C. Closed flow path.

Claims

1. A gas processing system, comprising: The main exhaust line guides the exhaust gas to the gas treatment device; A bypass line is used to direct the aforementioned exhaust gas to equipment other than the aforementioned gas treatment device; The upstream exhaust line guides the aforementioned exhaust gas to the aforementioned main exhaust line and the aforementioned bypass line; as well as The three-way valve can switch the flow of the exhaust gas from the aforementioned upstream exhaust line to the aforementioned main exhaust line or the aforementioned bypass line. The gas processing system is characterized in that... The aforementioned bypass line has the following characteristics: gate; The gas inlet pipe introduces the second gas between the aforementioned three-way valve and the aforementioned gate valve; and The pressure gauge measures the pressure between the aforementioned three-way valve and the aforementioned gate valve. The aforementioned gas inlet pipe has a second gate valve. When the aforementioned three-way valve is used to vent gas to the aforementioned main exhaust line, the aforementioned gate valve is closed, and then the aforementioned second gas is introduced from the aforementioned gas inlet pipe into the flow path formed between the aforementioned three-way valve and the aforementioned gate valve. The aforementioned second gate valve is closed, and a closed flow path is formed by the aforementioned three-way valve, the aforementioned gate valve and the aforementioned second gate valve. In this state, the internal leakage of the aforementioned three-way valve can be detected based on the pressure change detected by the aforementioned pressure gauge.

2. The gas processing system as described in claim 1, characterized in that, After the second gas is introduced from the gas inlet pipe, the pressure in the closed flow path can be maintained by closing the second gate valve, and the internal leakage of the three-way valve can be detected based on the pressure change in the closed flow path detected by the pressure gauge.

3. The gas processing system as described in claim 1, characterized in that, In order to detect internal leakage of the aforementioned three-way valve, the aforementioned second gas is continuously introduced from the aforementioned gas inlet pipe.

4. The gas processing system as described in claim 1, characterized in that, In order to detect the internal leakage of the aforementioned three-way valve, the aforementioned second gas is introduced from the aforementioned gas inlet pipe only at a specified time.

5. The gas handling system according to any one of claims 1 to 4, characterized in that, The aforementioned gas inlet pipe has a throttling mechanism for adjusting the flow rate of the aforementioned second gas.

6. The gas handling system according to any one of claims 1 to 4, characterized in that, The aforementioned gate valve is a normally open type valve.

7. The gas handling system as described in claim 5, characterized in that, The aforementioned gate valve is a normally open type valve.

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