A device for monitoring and displaying the position of a wafer boat lifting shaft

Abstract

This invention provides a crystal boat lifting shaft position monitoring and display device, comprising: a monitoring and display module located at the top and bottom of the lifting shaft; a crystal boat mounted on the lifting shaft and moving up and down via the lifting shaft; wherein the monitoring and display module monitors and displays the position of the crystal boat on the lifting shaft in real time. The monitoring and display device of this invention can accurately determine the real-time position of the crystal boat on the lifting shaft, and can avoid the problem of poor sensing by existing sensors.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a crystal boat lifting shaft position monitoring and display device. Background Technology

[0002] Currently, in semiconductor vertical diffusion furnace equipment, the position of the crystal boat on the lifting shaft needs to be observed and confirmed from outside the equipment transfer chamber. However, observing and confirming this from the outside during the operation of the diffusion furnace equipment is inconvenient and can easily lead to unnecessary dangers. Summary of the Invention

[0003] To address the problems existing in the prior art, a crystal boat lifting shaft position monitoring and display device is provided, which can monitor the real-time position of the crystal boat in the diffusion furnace and take corresponding measures immediately when an alarm occurs.

[0004] The technical solution adopted in this invention is as follows: A crystal boat lifting shaft position monitoring and display device, comprising:

[0005] The monitoring and display modules are located at the top and bottom of the lifting shaft;

[0006] The crystal boat is mounted on a lifting shaft and moves up and down via the lifting shaft.

[0007] The monitoring and display module monitors and displays the position of the crystal boat on the lifting shaft in real time.

[0008] Furthermore, the crystal boat is equipped with an interactive device that interacts with the monitoring modules at the top and bottom of the lifting shaft, respectively, and the monitoring and display module receives real-time position data of the crystal boat.

[0009] Furthermore, the monitoring and display module is equipped with a distance sensor that works in conjunction with the crystal boat to display the distance to the crystal boat.

[0010] Furthermore, the monitoring and display module located at the top of the lifting shaft displays the upper limit position data of the lifting shaft and the actual position data of the crystal boat relative to the top of the lifting shaft; the monitoring and display module located at the bottom of the lifting shaft displays the lower limit position data of the lifting shaft and the actual position data of the crystal boat relative to the bottom of the lifting shaft.

[0011] Furthermore, the monitoring and display module is equipped with a display screen for intuitively displaying the crystal boat's position data.

[0012] Furthermore, the monitoring and display module is equipped with a backlight function.

[0013] Furthermore, the monitoring and display device is installed in the longitudinal diffusion furnace.

[0014] Compared with the prior art, the beneficial effects of adopting the above technical solution are as follows: the monitoring and display device of the present invention can accurately grasp the real-time position of the crystal boat on the lifting shaft, and the device can avoid the problem of poor sensing of the original sensor. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the crystal boat lifting shaft position monitoring and display device proposed in this invention.

[0016] Attached diagram description: 1-Monitoring and display module, 2-Crystal boat, 3-Lifting shaft. Detailed Implementation

[0017] The embodiments of this application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar modules or modules having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Rather, the embodiments of this application include all variations, modifications, and equivalents falling within the spirit and scope of the appended claims.

[0018] like Figure 1 As shown, this embodiment specifically discloses a crystal boat lifting shaft position monitoring and display device, which can monitor the real-time position of the crystal boat in the diffusion furnace and take corresponding measures immediately when an alarm occurs. The specific solution is as follows:

[0019] A crystal boat lifting shaft position monitoring and display device includes:

[0020] Monitoring and display module 1 is located at the top and bottom of lifting shaft 3;

[0021] Crystal boat 2 is mounted on lifting shaft 3 and moves up and down via lifting shaft 3;

[0022] Among them, the monitoring and display module 1 monitors and displays the position of the crystal boat 2 on the lifting shaft 3 in real time.

[0023] The monitoring and display module 1 can monitor the specific position of the crystal boat 2 on the lifting shaft 3 during the transfer process of rising or falling in the transfer chamber in real time. The existing position monitoring method is to set a sensor at a certain point and obtain the position of the crystal boat when the crystal boat passes the sensor, which cannot obtain the position of the crystal boat in real time.

[0024] Specifically, the crystal boat 2 is equipped with an interactive device that interacts with the monitoring and display modules 1 at the top and bottom of the lifting shaft 3, respectively. The monitoring and display modules 1 receive real-time position data of the crystal boat 2. Through this interactive device, it is possible to communicate with the monitoring and display modules 1 at the top and bottom in real time and provide feedback on the current position of the crystal boat 2.

[0025] In this embodiment, the monitoring and display module 1 is equipped with a distance sensor for monitoring the position of the crystal boat.

[0026] In this embodiment, the monitoring and display module 1 located at the top of the lifting shaft 3 displays the upper limit position data of the lifting shaft 3 and the actual position data of the crystal boat 2 relative to the top of the lifting shaft; the monitoring and display module 1 located at the bottom of the lifting shaft 3 displays the lower limit position data of the lifting shaft 3 and the actual position data of the crystal boat 2 relative to the bottom of the lifting shaft.

[0027] Furthermore, the monitoring and display module 1 is equipped with a display screen for intuitively displaying the location data of the crystal boat 2.

[0028] In this embodiment, the monitoring and display device is installed in the transfer chamber of the semiconductor longitudinal diffusion process. Since the illumination inside the transfer chamber is low, a backlight function is added to the monitoring and display module. This ensures that the image can be clearly seen even in low-light conditions.

[0029] It should be noted that, in the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances. The accompanying drawings in the embodiments are used to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0030] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A crystal boat lifting shaft position monitoring and display device, characterized in that, include: The monitoring and display modules are located at the top and bottom of the lifting shaft; The crystal boat is mounted on a lifting shaft and moves up and down via the lifting shaft. The monitoring and display module monitors and displays the position of the crystal boat on the lifting shaft in real time. The crystal boat is equipped with an interactive device that interacts with the monitoring modules at the top and bottom of the lifting shaft, respectively. The monitoring and display module receives real-time position data of the crystal boat. The monitoring and display module is equipped with a distance sensor that works with the crystal boat to monitor and display the distance to the crystal boat; The monitoring and display module located at the top of the lifting shaft displays the upper limit position data of the lifting shaft and the actual position data of the crystal boat relative to the top of the lifting shaft; the monitoring and display module located at the bottom of the lifting shaft displays the lower limit position data of the lifting shaft and the actual position data of the crystal boat relative to the bottom of the lifting shaft.

2. The crystal boat lifting shaft position monitoring and display device according to claim 1, characterized in that, The monitoring and display module is equipped with a display screen for intuitively displaying the crystal boat's location data.

3. The crystal boat lifting shaft position monitoring and display device according to claim 1, characterized in that, The monitoring and display module is equipped with a backlight function.

4. The crystal boat lifting shaft position monitoring and display device according to claim 1, characterized in that, The monitoring and display device is installed in the longitudinal diffusion furnace.

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