Airborne transmission methods, devices and computer equipment
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MEETFUTURE TECH (SHANGHAI) CO LTD
- Filing Date
- 2023-10-16
- Publication Date
- 2026-07-17
Smart Images
Figure CN117208493B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor transmission equipment technology, and in particular to an air transmission method, apparatus and computer equipment. Background Technology
[0002] Overead Hoist Transport (OHT) is a system that assists transport devices in transporting materials in the air. In semiconductor automated factories (Fabs), a high-altitude transport operation is supported by a traveling track installed under the factory ceiling. The transport device can move on the traveling track and transport wafer cassettes as needed, thereby improving the production efficiency of the Fab.
[0003] However, due to the numerous processing steps involved in wafer manufacturing, the factories have many different functional departments and complex track layouts. Common aerial transport methods lack effective path planning capabilities, which makes the transport process of the transport devices time-consuming and inefficient, thus reducing the production efficiency of the fab. Summary of the Invention
[0004] Therefore, it is necessary to provide an air transport method, apparatus, and computer equipment that can improve transport efficiency in response to the above-mentioned technical problems.
[0005] In a first aspect, this application provides an over-the-air transmission method, comprising:
[0006] Receive a movement command; the movement command carries the location information of the picking machine and the unloading machine.
[0007] Obtain the location information of at least one transmission device;
[0008] Based on the location information of the transmission device and the location information of the pickup machine, the target device is determined from the transmission device;
[0009] Based on the pre-stored track information of the target track, the location information of the picking machine, the location information of the unloading machine, and the location information of the transmission device, path planning is performed to obtain the target movement path;
[0010] Output a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up the wafer cassette at the picking station and place the wafer cassette at the unloading station.
[0011] In one embodiment, the method further includes:
[0012] Based on the real-time status information of each of the reference devices, a replaceable device is determined;
[0013] Obtain the location information of the replaceable device;
[0014] Based on the execution status of each of the aforementioned movement instructions, determine the replaceable instructions;
[0015] Obtain the path to be moved corresponding to the replaceable instruction;
[0016] Based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replaceable command, the replacement movement path of the replaceable device is determined;
[0017] Based on the alternative movement path and the path to be moved, a second control command is issued to the replaceable device to control the replaceable device to move along the target track according to the alternative movement path and place the wafer cassette at the unloading machine corresponding to the replaceable command.
[0018] The aforementioned aerial transmission method, apparatus, and computer equipment determine the target device based on the location relationship between all selectable transmission devices and the wafer cassette location. This enables the selection of the transmission device with the fastest response and highest execution efficiency among multiple transmission devices for executing movement commands. Furthermore, it enables path planning based on the location information of the target device, the track information of the target track, the location information of the picking machine, and the location information of the unloading machine. This allows the acquisition of the target movement path with the highest transportation efficiency for the target device, thereby preventing wasted time due to ineffective movement during transportation, improving wafer cassette transportation efficiency, and ultimately improving the production efficiency of the wafer fab. Attached Figure Description
[0019] Figure 1 This is a diagram illustrating the application environment of an over-the-air transmission method in one embodiment;
[0020] Figure 2 This is a diagram illustrating the application environment of the over-the-air transmission method in another embodiment;
[0021] Figure 3 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0022] Figure 4 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0023] Figure 5 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0024] Figure 6 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0025] Figure 7 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0026] Figure 8 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0027] Figure 9 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0028] Figure 10 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0029] Figure 11 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0030] Figure 12 This is a flowchart illustrating an over-the-air transmission method in one embodiment;
[0031] Figure 13 This is a structural block diagram of an air transmission device in one embodiment;
[0032] Figure 14 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0034] The over-the-air transmission method provided in this application embodiment can be applied to, for example... Figure 1 In the application environment shown, terminal 102 communicates with server 104 via a network.
[0035] For example, the over-the-air transmission method is applied to terminal 102. After receiving a movement command, terminal 102 obtains the location information of at least one transmission device; based on the location information of the transmission device and the location information of the pickup machine carried in the movement command, it determines the target device from the transmission device; subsequently, terminal 102 can obtain the pre-stored track information of the target track from the data storage system of server 104, and perform path planning based on the track information, the location information of the pickup machine, the location information of the unloading machine carried in the movement command, and the location information of the transmission device to obtain the target movement path; terminal 102 outputs a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up wafer boxes at the pickup machine and place wafer boxes at the unloading machine. Terminal 102 can be, but is not limited to, various personal computers, laptops, smartphones, tablets, and portable wearable devices, such as smartwatches, smart bracelets, and head-mounted devices. Server 104 can be implemented using a standalone server or a server cluster composed of multiple servers. Terminal 102 and server 104 can be connected directly or indirectly via wired or wireless communication, such as through a network connection.
[0036] For example, in the over-the-air transmission method applied to server 104, after receiving a movement command, terminal 102 sends the movement command to server 104. Server 104 obtains the location information of at least one transmission device; based on the location information of the transmission devices and the location information of the pickup machine carried in the movement command, it determines the target device from the transmission devices; subsequently, server 104 obtains the pre-stored track information of the target track from the data storage system, and performs path planning based on the track information, the location information of the pickup machine, the location information of the unloading machine carried in the movement command, and the location information of the transmission devices to obtain the target movement path; terminal 102 outputs a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up wafer cassettes at the pickup machine and place wafer cassettes at the unloading machine. It is understood that the data storage system can be an independent storage device, or the data storage system can be located on a server, or the data storage system can be located on another terminal.
[0037] Typically, in actual production, the conveyor systems used in a fab may come from different manufacturers, or from the same manufacturer but with different models. Due to the differences in manufacturers, models, and operating space specifications of these conveyor systems, the programmable logic controllers (PLCs) built into these conveyor systems can only communicate with and be controlled by the corresponding Manufacturing Execution System (MES) server.
[0038] like Figure 2 As shown, under the above premise, terminal 102 may include any intelligent terminal in the wafer fab, and server 104 may include server 1042 of material control system (MCS), server 1044 of automatic material handling system (AMHS) connected to MCS server, and at least one MES server 1046 connected to AMHS system. MCS system 1042 can communicate with AMHS system 1044 through SEMI protocol, and MCS system 1042, AMHS system 1044 and at least one MES server 1046 can communicate sequentially through network. Correspondingly, when terminal 102 receives a movement command, it can send the movement command to MCS server 1042. MCS server 1042 can continue to execute the above-mentioned over-the-air transmission method and forward the generated first control command to the PLC built into the transmission device through AMHS server 1044 and MES server 1046 in sequence. Alternatively, MCS server 1042 can send the movement command to AMHS server 1044, which will continue to execute the above-mentioned over-the-air transmission method and forward the generated first control command to the PLC built into the transmission device through MES server 1046. Or, after MCS server 1042 sends the movement command to AMHS server 1044, AMHS server 1044 can send the movement command to MES server 1046, which will continue to execute the above-mentioned over-the-air transmission method and forward the generated first control command to the PLC built into the transmission device.
[0039] In one embodiment, an over-the-air transmission method is provided. This embodiment illustrates the application of this over-the-air transmission method to a terminal. It is understood that this method can also be applied to a server, and further to a system including both a terminal and a server, and is implemented through the interaction between the terminal and the server. Figure 3 As shown, the air transmission method includes:
[0040] Step 202: Receive the movement instruction; the movement instruction carries the location information of the picking machine and the unloading machine.
[0041] A move command can refer to a command that moves a wafer cassette.
[0042] As an example, the movement command can be issued by the staff through the human-computer interaction interface of the terminal. Alternatively, in application scenarios related to wafer manufacturing, the terminal can perform real-time detection of the wafer manufacturing status for manufacturing steps such as grinding and polishing, cleaning and impurity removal, photolithography, etching, and metal deposition. For example, after the terminal detects that the wafer manufacturing status is that the etching process is completed, it can automatically generate a movement command to transport the etched wafer from the etching location to the metal deposition location. The wafer manufacturing status can be input by different staff through corresponding terminals.
[0043] The sequential processing of the wafers to complete the above manufacturing steps needs to be carried out on various machines according to a specific process flow. The picking machine refers to the machine corresponding to the latest completed manufacturing step of the wafer, that is, the machine where the transfer device picks up the wafer box; the unloading machine refers to the machine corresponding to the next manufacturing step of the wafer, that is, the machine where the transfer device unloads the wafer box.
[0044] The terminal can pre-establish a coordinate system for the entire Fab. The location information of the picking machine can be the coordinate position corresponding to the actual position of the picking machine in the Fab, and the location information of the unloading machine can be the coordinate position corresponding to the actual position of the unloading machine in the Fab.
[0045] Step 204: Obtain the location information of at least one transmission device.
[0046] The location information of the transmission device can be the coordinate position corresponding to the actual position of the transmission device on the hoisting track.
[0047] Step 206: Determine the target device from the transmission device based on the location information of the transmission device and the location information of the picking machine.
[0048] The target device refers to the transmission device that executes the movement command received in step 202.
[0049] In this embodiment, the terminal can calculate the coordinate distance between each transmission device and the pickup machine based on their respective coordinate positions, and determine the target device based on the coordinate distance. For example, the terminal can select the transmission device with the smallest coordinate distance as the target device.
[0050] Step 208: Based on the pre-stored track information of the target track, the location information of the picking machine, the location information of the unloading machine, and the location information of the transmission device, perform path planning to obtain the target movement path.
[0051] The target track is the travel track suspended below the Fab ceiling.
[0052] The track information of the target track can include information such as the number of tracks, location information, direction information, track length information, and track connection relationships, which are used to describe the travel track.
[0053] The target movement path refers to the path that the target device needs to move during the process of transporting the wafer cassette from the pick-up station to the unloading station.
[0054] During path planning, the terminal can pre-determine the coordinates of the unloading machine as the endpoint of the target movement path, the coordinates of the picking machine as the necessary stopping points along the target movement path, and the coordinates of the target device as the starting point of the target movement path. It can also consider the track occupancy of other transmission devices on the target track to calculate the target movement path. The terminal can use methods such as exhaustive search or genetic algorithms to solve the trajectory optimization problem and determine the starting point, endpoint, and direction of movement of the target movement path.
[0055] The track information of the target track can be pre-stored in the server's data storage system by staff uploading electronic maps of the target track. The electronic map uploaded by the staff can be a file encrypted with MD5. The server can decrypt the file using a preset key to obtain the electronic map. Based on the electronic map and a pre-established coordinate system, the server can obtain information describing the walking track, such as the coordinates of the target track in the coordinate system, the number of tracks, the direction information, the track length information, and the track connection relationships.
[0056] Step 210: Output the first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up the wafer box at the picking machine and place the wafer box at the unloading machine.
[0057] The first control command refers to the command to control the target device to move, to control the target device to pick up the wafer cassette at the picking station, and to control the target device to unload the wafer cassette at the unloading station.
[0058] The first control command can be divided into multiple step-by-step control commands, which the terminal can sequentially issue to control the target device. For example, the terminal first issues the first step-by-step control command to the target device's PLC to control the target device to move from its current location to the picking machine. The target device's PLC can then send a first completion signal to the terminal. The terminal then generates a second step-by-step control command and sends it to the target device's PLC to control the target device to pick up the wafer cassette at the picking machine. After picking up the wafer cassette, the target device's PLC can send a second completion signal to the terminal. The terminal then generates a third step-by-step control command to the target device's PLC to control the target device to move from the picking machine to the unloading machine. The target device's PLC can then send a third completion signal to the terminal. The terminal then generates a fourth step-by-step control command to the target device's PLC to control the target device to unload the wafer cassette at the unloading machine.
[0059] In one embodiment, the terminal can also preset a preset stop position for the transmission devices. The preset stop position refers to the position where each transmission device will stop after executing the movement command, to prevent the transmission devices from stopping at the unloading platform and causing blockage of the target track. In this embodiment, when the terminal performs path planning in step 208, it can use the preset stop position as the final endpoint of the path. The target movement path can include the path required for the target device to move to the picking platform, then from the picking platform to the unloading platform, and finally from the unloading platform to the preset stop position. For example, after the target device unloads the wafer cassette at the unloading platform, the target device's PLC can send a fourth completion signal to the terminal. The terminal can then generate a fifth step control command to the target device's PLC to control the target device to move from the unloading platform to the preset stop position.
[0060] In the aforementioned aerial transport method, upon receiving a movement command for a wafer cassette, the system first determines the location of the wafer cassette and the target movement point. Then, based on the positional relationships between all available transport devices and the wafer cassette location, the target device is determined. This allows the system to identify the transport device with the fastest response and highest execution efficiency among multiple transport devices for executing the movement command. Furthermore, based on the location information of the target device, the track information of the target track, the location information of the picking machine, and the location information of the unloading machine, path planning is performed to obtain the target movement path with the highest transport efficiency. This prevents wasted time due to ineffective movement during transport, improves wafer cassette transport efficiency, and consequently improves wafer fab production efficiency. Moreover, this aerial transport method transforms the path analysis problem based on the actual track structure into a data processing problem, achieving automated planning of the transport device's trajectory, reducing the difficulty of path planning, and further improving wafer cassette transport efficiency.
[0061] like Figure 4 As shown, in some optional embodiments, the track information includes sequentially connected initial sub-paths and the position information of the initial sub-paths;
[0062] The target movement path includes a first target movement path and a second target movement path;
[0063] Step 208 includes:
[0064] Step 2082: Match the location information of the initial sub-path with the location information of the transmission device and the location information of the picking machine to determine the starting point and the first ending point on the initial sub-path;
[0065] Step 2084: Match the location information of the initial sub-path with the location information of the unloading machine to determine the second endpoint located on the initial sub-path;
[0066] Step 2086: Perform path planning based on the initial sub-path, starting point, and first endpoint to obtain the first target movement path;
[0067] Step 2088: Perform path planning based on the initial sub-path, the first endpoint, and the second endpoint to obtain the second target movement path.
[0068] Multiple initial sub-paths are connected to form the target path. The location information of the initial sub-paths can be the coordinates corresponding to the actual locations of the initial sub-paths.
[0069] The movement of the target device from its current position to the pickup station can be considered the first end of the target movement path, i.e., the first target movement path. The starting point of the first target movement path is the current position of the target device, and the ending point of the first target movement path is the pickup station, i.e., the first ending point. The movement of the target device from the pickup station to the unloading station can be considered the second end of the target movement path, i.e., the second target movement path. The starting point of the second target movement path is the first ending point, and the ending point of the first target movement path is the unloading station, i.e., the second ending point.
[0070] like Figure 5 As shown, in some optional embodiments, the over-the-air transmission method further includes:
[0071] Obtain real-time status information of the transmission device;
[0072] Step 206 includes:
[0073] Step 2062: Based on the real-time status information, select the devices to be selected from the transmission devices;
[0074] Step 2064: Determine the target device based on the location information of the device to be selected and the location information of the pickup machine.
[0075] The real-time status information of a transmission device refers to the information on the working status of the transmission device. When a transmission device is identified as the target device of a movement command, the terminal can change the real-time status information of the transmission device to "working" to indicate that the transmission device is executing the movement command. After the transmission device executing the movement command transports the wafer cassette to the picking machine and unloads the wafer cassette, the terminal can change the real-time status information of the transmission device to "idle" to indicate that the transmission device has ended the execution of the previous movement command. Alternatively, the terminal can also change the real-time status information of the transmission device according to the actual equipment status of the transmission device. When the transmission device malfunctions, the terminal can change the real-time status information of the transmission device to "fault" to indicate that the transmission device cannot execute the movement command.
[0076] The device to be selected can be a transmission device that has finished executing the previous movement command, that is, a transmission device that can directly execute the current movement command. The previous movement command refers to the movement command that the transmission device most recently finished executing.
[0077] The terminal first filters out transmission devices that are fault-free, have completed the previous execution instruction, and can directly execute the current movement instruction based on the real-time status information of the transmission devices. Then, based on the location of these transmission devices and the location of the pickup machine, for example, the transmission device closest to the pickup machine can be selected as the target device.
[0078] In some optional embodiments, the over-the-air transmission method further includes:
[0079] Based on real-time status information, obstacle devices and reference devices are selected from the transmission device;
[0080] The initial sub-path whose location information coincides with the location information of the obstacle device is taken as the obstacle sub-path;
[0081] The initial sub-path whose position information coincides with the position information of the reference device is designated as the blocking sub-path;
[0082] Step 2086 includes: performing path planning based on the initial sub-path, obstacle sub-path, blocking sub-path, starting point, and first endpoint to obtain the first target movement path;
[0083] Step 2088 includes: performing path planning based on the initial sub-path, obstacle sub-path, blocking sub-path, first endpoint and second endpoint to obtain the second target movement path.
[0084] An obstacle device refers to a transmission device that is unable to execute movement commands normally due to hardware failure or other abnormal conditions.
[0085] The reference device refers to a transmission device that is executing other movement commands and cannot directly execute the movement command received in step 202.
[0086] When the location information of the obstacle device coincides with the location information of the initial sub-path, it can be considered that the obstacle device is currently stationary on the initial sub-path. This will cause the initial sub-path to be impassable, and thus the initial sub-path is regarded as an impassable path, i.e., an obstacle sub-path.
[0087] When the location information of the reference device coincides with the location information of the initial sub-path, it can be considered that the reference device is currently on the initial sub-path. If other transmission devices need to pass through the initial sub-path, they need to pass through in the first-in-first-out queuing order. Therefore, the initial sub-path is regarded as a path with congestion, i.e., a congested sub-path.
[0088] like Figure 6 As shown, in some optional embodiments, the track information includes the path length value of each initial sub-path; the initial sub-paths are preset with initial weight values.
[0089] Before step 2086, the following are also included:
[0090] Step 2085: Remove obstacle sub-paths from the initial sub-paths to obtain the sub-paths to be selected;
[0091] Step 2086 includes: Step 2086a, performing path planning based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the starting point and the first endpoint, to obtain the first target movement path;
[0092] Step 2088 includes: Step 2088a, performing path planning based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the first endpoint and the second endpoint, to obtain the second target movement path.
[0093] The sub-path to be selected refers to the initial sub-path after removing the obstacle sub-paths.
[0094] In actual use of transmission devices, there may be situations where multiple transmission devices need to pass through the same track. In other words, the congested sub-path can be further subdivided according to the number of transmission devices on the track to distinguish the degree of congestion of different congested sub-paths.
[0095] The reference weight value refers to the path weight of the blocked sub-path. The path weight can be used as a bias indicator for different initial sub-paths to be selected. The higher the path weight, the less likely it is to be selected.
[0096] In some optional embodiments, the over-the-air transmission method further includes:
[0097] For each blocked sub-path, obtain the total number of reference devices whose location information coincides with the location information of the blocked sub-path;
[0098] Based on the total value, determine the reference weight value for the blocked sub-path.
[0099] The step of determining the reference weight value of the blocked sub-path based on the total value may specifically include: matching the target value range corresponding to the blocked sub-path from at least one preset value range based on the total value; at least one value range corresponds one-to-one with at least one preset weight value; and using the preset weight value corresponding to the target value range as the reference weight value of the blocked sub-path.
[0100] The target numerical range refers to the numerical range corresponding to the total value. As an example, the terminal pre-sets [1,2], [3,4], [5,6], and [7,+∞] as multiple numerical ranges and sets four preset weight values: 1, 1.1, 1.3, and 2. Furthermore, it establishes a mapping between the numerical range [1,2] and the preset weight value 1, between the numerical range [3,4] and the preset weight value 1.1, between the numerical range [5,6] and the preset weight value 1.3, and between the numerical range [7,+∞] and the preset weight value 2. When there are 3 reference devices on a blocked sub-path, the target numerical range of the blocked sub-path can be determined to be [3,4]. The preset weight value 1.1 corresponding to the numerical range [3,4] is then used as the reference weight value for the blocked sub-path.
[0101] In another embodiment, the track information may also include sequentially numbered track nodes and the path length value of the initial sub-path;
[0102] The steps to determine the blocking subpath may include:
[0103] Based on the preset device moving speed and path length values, determine the moving time required for the target device to reach each track node; based on the moving time and the target moving path corresponding to each reference device, determine the predicted position of each reference device; the initial sub-path where the position information coincides with the position information of the predicted position of each reference device is taken as the blocking sub-path.
[0104] Furthermore, the steps for determining the reference weight values of blocked sub-paths based on the total value specifically include:
[0105] Obtain the total number of reference devices whose location information of the predicted location coincides with the location information of the blocked sub-path; determine the reference weight value of the blocked sub-path based on the total number of reference devices.
[0106] In this embodiment, the terminal also simulates the actual movement process of the target device. Based on the actual movement speed of the target device and the path length of the initial sub-path, the terminal predicts the movement of each reference device, so that the position of the reference device in the path planning process can be closer to the actual movement position, thus ensuring the rationality of the path planning.
[0107] like Figure 7 As shown, in some optional embodiments, step 2086a includes:
[0108] Step 702: Use an exhaustive search method to obtain the first initial movement path between the starting point and the first destination;
[0109] Step 704: Determine the first bias value corresponding to each first initial moving path based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, and the path length value of the sub-path to be selected.
[0110] Step 706: Determine the first target movement path from the first initial movement path based on the first bias value.
[0111] In this embodiment, for each first initial movement path, the terminal can first determine all the sub-paths to be selected contained in the first initial movement path, wherein the sub-paths to be selected include the initial sub-paths without transmission devices and the blocking sub-paths. Then, the terminal can multiply the initial weight value corresponding to the initial sub-path contained in the first initial movement path with the path length value, multiply the reference weight value corresponding to the blocking sub-path contained in the first initial movement path with the path length value, and further add all the products to obtain the first bias value corresponding to each first initial movement path.
[0112] The first bias value can be calculated using the following formula:
[0113]
[0114] in, Indicates the first bias value; This represents the total number of initial sub-paths without a transmission device included in the first initial movement path; This represents the path length value of the i-th initial sub-path that does not contain a transmission device, which is included in the first initial movement path; The initial weight value represents the i-th initial sub-path without a transmission device included in the first initial movement path; N represents the total number of congested sub-paths included in the first initial movement path. This represents the path length of the j-th blocking sub-path contained in the first initial movement path; This represents the reference weight value of the j-th blocking sub-path contained in the first initial movement path.
[0115] As an example, the terminal can determine the first initial movement path with the lowest first bias value as the first target movement path.
[0116] like Figure 8 As shown, in some optional embodiments, step 2088a includes:
[0117] Step 802: Use an exhaustive search method to obtain the second initial movement path between the first endpoint and the second endpoint;
[0118] Step 804: Determine the second bias value corresponding to each second initial moving path based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, and the path length value of the sub-path to be selected.
[0119] Step 806: Determine the second target movement path from the second initial movement path based on the second bias value.
[0120] The second bias value can be calculated using the following formula:
[0121]
[0122] in, Indicates the second bias value; This represents the total number of initial sub-paths without a transmission device included in the second initial movement path; This represents the path length value of the kth initial sub-path containing the second initial movement path that does not have a transmission device. Q represents the initial weight value of the kth initial sub-path containing no transmission device in the second initial movement path; Q represents the total number of congested sub-paths contained in the second initial movement path. This represents the path length of the p-th blocking sub-path contained in the second initial movement path; This represents the reference weight value of the p-th blocking sub-path contained in the second initial movement path.
[0123] As an example, the terminal can determine the second initial movement path with the lowest second bias value as the second target movement path.
[0124] It should be noted that the first and second initial movement paths can also be obtained through dynamic programming using methods such as the Floyd algorithm.
[0125] like Figure 9 As shown, in some optional embodiments, the method further includes:
[0126] Step 901: Determine the replaceable device based on the real-time status information of each reference device;
[0127] Step 902: Obtain the location information of the replaceable device;
[0128] Step 903: Determine the replaceable instructions based on the execution status of each movement instruction;
[0129] Step 904: Obtain the path to be moved corresponding to the replaceable instruction;
[0130] Step 905: Determine the replacement movement path of the replaceable device based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replaceable command;
[0131] Step 906: Based on the replacement movement path and the path to be moved, issue a second control command to the replaceable device to control the replaceable device to move along the target track according to the replacement movement path and place the wafer cassette at the unloading machine corresponding to the replaceable command.
[0132] In this embodiment, the terminal can detect all transmission devices that are executing movement commands in real time. When any transmission device finishes executing the movement command, the terminal can use it as a replacement device.
[0133] A replaceable device refers to a transmission device that can replace the target device corresponding to other movement commands to move the wafer cassette.
[0134] The execution status of a move instruction indicates whether the move instruction has finished executing.
[0135] Replaceable instructions refer to movement instructions that require replacing the original target device.
[0136] The alternative movement path refers to the path that needs to be taken during the movement of the wafer cassette by using a replaceable device to replace the target device corresponding to any movement command.
[0137] The second control command refers to the command to control the movement of the replaceable device, to control the replaceable device to pick up the wafer cassette, and to control the replaceable device to unload the wafer cassette at the unloading machine.
[0138] like Figure 10 As shown, in some optional embodiments, step 901 includes:
[0139] Step 9012: Obtain the real-time status information of each reference device according to the preset frequency;
[0140] Step 9014: When the real-time status information indicates that the reference device has finished executing the previous movement command, the reference device is designated as a replaceable device.
[0141] like Figure 11 As shown, in some optional embodiments, step 903 includes:
[0142] Step 9032: Obtain the execution status of each movement command according to a preset frequency;
[0143] Step 9034: When the execution status indicates that the move instruction has not finished executing, treat the move instruction as a replaceable instruction.
[0144] like Figure 12 As shown, in some optional embodiments, step 904 includes:
[0145] Step 9042: Obtain the location information of the target device corresponding to the replaceable instruction, and the location information of the target movement path corresponding to the replaceable instruction;
[0146] Step 9044: Match the location information of the target device corresponding to the replaceable instruction with the location information of the target movement path corresponding to the replaceable instruction to determine the movement path.
[0147] The path to be moved refers to the remaining path that the target device corresponding to the replaceable instruction needs to traverse when it moves according to the corresponding target moving path.
[0148] In this embodiment, the terminal uses the location information of the target device corresponding to the replaceable instruction as the starting point of the path to be moved, determines the corresponding position of the starting point in the target path, and determines the path to be moved based on the starting point and the end point of the target path.
[0149] In some optional embodiments, the alternative movement path includes a first alternative movement path and a second alternative movement path;
[0150] Before step 905, the following are also included:
[0151] Determine the storage state of the target device corresponding to the replaceable instruction;
[0152] Then step 905 includes:
[0153] When the storage status indicates that the target device does not carry a wafer cassette, the first replacement movement path is determined based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replacement instruction.
[0154] When the storage status indicates that the target device carries a wafer cassette, the location information of the transfer station corresponding to the target device is determined, and a second replacement movement path is determined based on the location information of the replaceable device, the location information of the unloading station corresponding to the replaceable instruction, and the location information of the transfer station corresponding to the target device.
[0155] When the target device corresponding to the replaceable instruction carries a wafer cassette, the target device needs to unload the wafer cassette, and the replaceable device takes the wafer cassette and then transports it to the unloading machine position corresponding to the replaceable instruction.
[0156] When the target device corresponding to the replaceable instruction carries a wafer cassette, the replaceable device needs to first determine the location information of the transfer station of the target device corresponding to the replaceable instruction, and take the location of the transfer station as the necessary stop point in the movement path, and take the location of the unloading station corresponding to the replaceable instruction as the endpoint, and plan the replacement movement path.
[0157] In some optional embodiments, determining the location information of the transfer station corresponding to the target device includes:
[0158] Obtain the location information of available cargo terminals;
[0159] The location information of the transfer machine is determined based on the location information of the loading machine and the location information of the target device corresponding to the replacement instruction.
[0160] A "ready-to-place" machine refers to a machine capable of holding wafer cassettes. For example, after determining a replaceable instruction in step 903, the terminal can obtain the storage status information of all machines. When the storage status information of a machine is empty, the machine is designated as a ready-to-place machine. The storage status information of the machine can be input by staff through the terminal's human-machine interface.
[0161] Furthermore, the terminal can use the location information of the loading dock and the location information of the target device corresponding to the replacement instruction to select the loading dock closest to the target device as the transfer dock.
[0162] In some alternative embodiments, step 906 may include:
[0163] When the storage status indicates that the target device does not carry a wafer cassette and the path length of the path to be moved is greater than the first replacement path, a second control command is issued to the replaceable device.
[0164] When the storage status indicates that the target device carries a wafer cassette and the path length of the path to be moved is greater than the second alternative moving path, a second control command is issued to the alternative device.
[0165] When the target device does not carry a wafer cassette, it is only necessary to confirm that the path length from which the replaceable device moves to the pickup station corresponding to the replaceable instruction and then moves from the pickup station to the pickup station corresponding to the replaceable instruction is less than the path length from which the target device moves to the pickup station corresponding to the replaceable instruction. In this case, it can be considered that the replaceable device executes the replaceable instruction more efficiently.
[0166] When the target device carries a wafer cassette, it is necessary to confirm that the path length from the location of the replacement device to the transfer station and then from the location of the transfer station to the pickup station corresponding to the replacement instruction is less than the path length from the target device to the pickup station corresponding to the replacement instruction.
[0167] In another embodiment, the terminal can further calculate the bias value of the path to be moved and the bias value of the first alternative path, calculate the bias value of the path to be moved and the bias value of the second alternative path, and issue a second control command to the replaceable device when the bias value of the path to be moved is greater than the bias value of the first alternative path, or when the bias value of the path to be moved is greater than the bias value of the second alternative path. The method for calculating the path bias value can employ the process described in the above embodiments for calculating the first or second bias value, and will not be detailed here.
[0168] In some optional embodiments, step 906 is followed by:
[0169] When the storage status indicates that the target device is not carrying a wafer cassette, a third control command is sent to the target device to control the target device to stop moving;
[0170] When the storage status indicates that the target device is carrying a wafer cassette, a fourth control command is issued to the target device to control the target device to place the wafer cassette it is carrying on the transfer machine and then move it to a preset stop position.
[0171] Alternatively, when the target device does not carry a wafer cassette and the terminal issues a second control command to the replaceable device, the terminal can generate a third control command to the target device to control the target device to move to a preset stop position.
[0172] In some optional embodiments, before issuing the fourth control command to the target device, the method further includes:
[0173] Based on the location information of the transfer machine, the location information of the target device corresponding to the replaceable instruction, and the preset stop position, a path is planned to obtain the transfer movement path;
[0174] The fourth control command is also used to control the target device to move along the target track according to the transfer movement path, and to move to the preset stop position after the wafer cassette is placed on the transfer machine.
[0175] The transfer movement path refers to the path that the target device corresponding to the replaceable command must take to move to the transfer station and from the transfer station to the preset stop position.
[0176] The terminal can also change the real-time status information of the target device that has received a third control command or placed the wafer cassette it is carrying to the transfer station to indicate that the previous movement command has been completed.
[0177] In the aforementioned aerial transport method, the transport device can be divided into obstacle devices, reference devices, and candidate devices based on its status. The initial sub-paths containing obstacle devices and reference devices are further divided into obstacle sub-paths and congestion sub-paths. Furthermore, different path weights are assigned to congestion sub-paths based on the number of reference devices on them. This allows the path planning process to analyze more finely differentiated track conditions, resulting in higher transport efficiency for the final target movement path. The method also allows real-time monitoring of transport devices executing other movement commands. When a transport device finishes executing the previous movement command, the transport efficiency of that device is compared with the target devices corresponding to the other movement commands. If the transport efficiency of that device is higher, the target devices corresponding to the other movement commands are replaced. This improves overall transport efficiency, enhancing both wafer cassette transport efficiency and wafer fab production efficiency.
[0178] It should be understood that although the steps in the flowcharts of the above embodiments are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the above embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.
[0179] Based on the same inventive concept, this application also provides an air transmission apparatus for implementing the air transmission method described above. The solution provided by this apparatus is similar to the implementation described in the above method; therefore, the specific limitations in one or more air transmission apparatus embodiments provided below can be found in the limitations of the air transmission method described above, and will not be repeated here.
[0180] In one embodiment, such as Figure 13 As shown, an over-the-air transmission device 1300 is provided, including: a receiving module 1302, an acquisition module 1304, a determining module 1306, a planning module 1308, and a control module 1310, wherein:
[0181] The receiving module 1302 is used to receive a movement command; the movement command carries the location information of the picking machine and the unloading machine.
[0182] The acquisition module 1304 is used to acquire the location information of at least one transmission device;
[0183] The determining module 1306 is used to determine the target device from the transmission device based on the location information of the transmission device and the location information of the picking machine.
[0184] The planning module 1308 is used to perform path planning based on the pre-stored track information of the target track, the location information of the picking machine, the location information of the unloading machine, and the location information of the transmission device, so as to obtain the target movement path;
[0185] The control module 1310 is used to output a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up the wafer box at the picking machine and place the wafer box at the unloading machine.
[0186] Each module in the aforementioned airborne transmission device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device, or stored in the memory of a computer device as software, so that the processor can call and execute the operations corresponding to each module.
[0187] In one embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as follows: Figure 14 As shown, the computer device includes a processor, memory, input / output interfaces, a communication interface, a display unit, and an input device. The processor, memory, and input / output interfaces are connected via a system bus, and the communication interface, display unit, and input device are also connected to the system bus via the input / output interfaces. The processor provides computing and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The input / output interfaces are used for exchanging information between the processor and external devices. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, mobile cellular networks, NFC (Near Field Communication), or other technologies. When the computer program is executed by the processor, it implements an over-the-air transmission method. The display unit is used to form a visually visible image and can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be an LCD screen or an e-ink screen. The input device of the computer device can be a touch layer covering the display screen, or buttons, trackballs, or touchpads set on the casing of the computer device, or external keyboards, touchpads, or mice, etc.
[0188] Those skilled in the art will understand that Figure 14 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.
[0189] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, implements the steps of the over-the-air transmission method described in any of the above embodiments.
[0190] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the steps of the over-the-air transmission method described in any of the above embodiments.
[0191] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments described above. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.
[0192] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0193] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.
Claims
1. An airborne transmission method, characterized in that, include: Receive a movement command; the movement command carries the location information of the picking machine and the unloading machine. Obtain the location information of at least one transmission device; Obtain real-time status information of the transmission device; filter out candidate devices from the transmission devices based on the real-time status information; determine the target device based on the location information of the candidate devices and the location information of the pickup machine. The track information includes sequentially connected initial sub-paths and the position information of the initial sub-paths; The target movement path includes a first target movement path and a second target movement path; the location information of the initial sub-path is matched with the location information of the transmission device and the location information of the pickup machine to determine the starting point and the first ending point located on the initial sub-path; The location information of the initial sub-path is matched with the location information of the unloading machine to determine the second endpoint located on the initial sub-path; Based on the real-time status information, obstacle devices and reference devices are selected from the transmission device; The initial sub-path whose location information coincides with the location information of the obstacle device is taken as the obstacle sub-path; The initial sub-path whose location information coincides with the location information of the reference device is designated as the blocking sub-path; Based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the starting point, and the first ending point, path planning is performed to obtain the first target movement path; Based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the first endpoint, and the second endpoint, path planning is performed to obtain the second target movement path; Based on the pre-stored track information of the target track, the location information of the picking machine, the location information of the unloading machine, and the location information of the transmission device, path planning is performed to obtain the target movement path; Output a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up the wafer cassette at the picking station and place the wafer cassette at the unloading station.
2. The method according to claim 1, characterized in that, The track information includes the path length value of each initial sub-path; the initial sub-path is preset with an initial weight value; Before performing path planning based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the starting point, and the first ending point to obtain the first target movement path, the process includes: The obstacle sub-paths are removed from the initial sub-paths to obtain the sub-paths to be selected; The step of performing path planning based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the starting point, and the first ending point to obtain the first target movement path includes: Based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the starting point and the first ending point, path planning is performed to obtain the first target movement path; The step of performing path planning based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the first endpoint, and the second endpoint to obtain the second target movement path includes: The second target movement path is obtained by performing path planning based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the first endpoint, and the second endpoint.
3. The method according to claim 2, characterized in that, The method for determining the reference weight value of the blocked sub-path includes: For each of the blocked sub-paths, the total number of reference devices whose location information coincides with the location information of the blocked sub-path is obtained; Based on the total value, a reference weight value for the blocked sub-path is determined.
4. The method according to claim 3, characterized in that, Determining the reference weight value of the blocked sub-path based on the total value includes: Based on the total value, a target numerical range corresponding to the blocked sub-path is matched from at least one preset numerical range; at least one of the numerical ranges corresponds one-to-one with at least one preset weight value. The preset weight value corresponding to the target numerical range is used as the reference weight value for the blocked sub-path.
5. The method according to claim 2, characterized in that, The step of performing path planning based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the starting point, and the first ending point to obtain the first target movement path includes: An exhaustive search method is used to obtain the first initial movement path between the starting point and the first ending point; Based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, and the path length value of the sub-path to be selected, a first bias value corresponding to each of the first initial moving paths is determined. The first target movement path is determined from the first initial movement path based on the first bias value.
6. The method according to claim 2, characterized in that, The step of performing path planning based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, the path length value of the sub-path to be selected, the first endpoint, and the second endpoint to obtain the second target movement path includes: A second initial movement path between the first endpoint and the second endpoint is obtained using an exhaustive search method; Based on the initial weight value of the sub-path to be selected, the reference weight value of the blocked sub-path, and the path length value of the sub-path to be selected, determine the second bias value corresponding to each second initial moving path; The second target movement path is determined from the second initial movement path based on the second bias value.
7. The method according to claim 1, characterized in that, The method further includes: Based on the real-time status information of each of the reference devices, a replaceable device is determined; Obtain the location information of the replaceable device; Based on the execution status of each of the aforementioned movement instructions, determine the replaceable instructions; Obtain the path to be moved corresponding to the replaceable instruction; Based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replaceable command, the replacement movement path of the replaceable device is determined; Based on the alternative movement path and the path to be moved, a second control command is issued to the replaceable device to control the replaceable device to move along the target track according to the alternative movement path and place the wafer cassette at the unloading machine corresponding to the replaceable command.
8. The method according to claim 7, characterized in that, The step of determining a replaceable device based on the real-time status information of each of the reference devices includes: According to a preset frequency, acquire the real-time status information of each of the reference devices; When the real-time status information indicates that the reference device has finished executing the previous movement command, the reference device is used as the replaceable device.
9. The method according to claim 8, characterized in that, The step of determining replaceable instructions based on the execution status of each of the movement instructions includes: According to the preset frequency, the execution status of each movement command is obtained; When the execution status indicates that the movement instruction has not finished executing, the movement instruction is used as the replaceable instruction.
10. The method according to claim 7, characterized in that, The step of obtaining the path to be moved corresponding to the replaceable instruction includes: Obtain the location information of the target device corresponding to the replaceable instruction, and the location information of the target movement path corresponding to the replaceable instruction; The location information of the target device corresponding to the replaceable instruction and the location information of the target movement path corresponding to the replaceable instruction are matched to determine the movement path.
11. The method according to claim 10, characterized in that, The alternative movement path includes a first alternative movement path and a second alternative movement path; Before determining the replacement movement path of the replaceable device based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replaceable command, the process includes: Determine the storage state of the target device corresponding to the replaceable instruction; Determining the replacement movement path of the replaceable device based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replacement command includes: When the storage status indicates that the target device does not carry a wafer cassette, the first replacement movement path is determined based on the location information of the replaceable device and the location information of the unloading machine corresponding to the replacement instruction. When the storage state indicates that the target device carries a wafer cassette, the location information of the transfer station corresponding to the target device is determined, and the second replacement movement path is determined based on the location information of the replaceable device, the location information of the unloading station corresponding to the replaceable instruction, and the location information of the transfer station corresponding to the target device.
12. The method according to claim 11, characterized in that, Determining the location information of the transfer station corresponding to the target device includes: Obtain the location information of available cargo terminals; The location information of the transfer machine is determined based on the location information of the loading machine and the location information of the target device corresponding to the replacement instruction.
13. The method according to claim 10, characterized in that, The step of issuing a second control command to the replaceable device based on the alternative movement path and the path to be moved includes: When the storage status indicates that the target device does not carry a wafer cassette and the path length of the path to be moved is greater than the first alternative moving path, the second control command is issued to the alternative device. When the storage state indicates that the target device carries a wafer cassette and the path length of the path to be moved is greater than the second alternative moving path, the second control command is issued to the alternative device.
14. The method according to claim 10, characterized in that, After issuing the second control command to the replaceable device based on the alternative movement path and the path to be moved, the method further includes: When the storage state indicates that the target device is not carrying a wafer cassette, a third control command is issued to the target device to control the target device to stop moving; When the storage state indicates that the target device is carrying a wafer cassette, a fourth control command is issued to the target device to control the target device to place the wafer cassette it is carrying on the transfer machine and then move it to a preset stop position.
15. The method according to claim 14, characterized in that, Before issuing the fourth control command to the target device, the method further includes: Based on the location information of the transfer machine, the location information of the target device corresponding to the replaceable instruction, and the preset stop position, a path is planned to obtain the transfer movement path; The fourth control command is also used to control the target device to move along the target track according to the transfer movement path, and to move to the preset stop position after the wafer cassette is placed on the transfer machine.
16. The method according to claim 14, characterized in that, The method further includes: The real-time status information of the target device that receives the third control command or places the carried wafer cassette to the transfer station is changed to indicate that the previous movement command has been completed.
17. An aerial transmission device, characterized in that, include: The receiving module is used to receive movement instructions; the movement instructions carry the location information of the picking machine and the unloading machine. The acquisition module is used to acquire the location information of at least one transmission device; The determination module is used to obtain the real-time status information of the transmission device; Based on the real-time status information, select the devices to be selected from the transmission devices; The target device is determined based on the location information of the device to be selected and the location information of the pickup machine. The track information includes sequentially connected initial sub-paths and the position information of the initial sub-paths; The target movement path includes a first target movement path and a second target movement path; the location information of the initial sub-path is matched with the location information of the transmission device and the location information of the pickup machine to determine the starting point and the first ending point located on the initial sub-path; The location information of the initial sub-path is matched with the location information of the unloading machine to determine the second endpoint located on the initial sub-path; Based on the real-time status information, obstacle devices and reference devices are selected from the transmission device; The initial sub-path whose location information coincides with the location information of the obstacle device is taken as the obstacle sub-path; The initial sub-path whose location information coincides with the location information of the reference device is designated as the blocking sub-path; Based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the starting point, and the first ending point, path planning is performed to obtain the first target movement path; Based on the initial sub-path, the obstacle sub-path, the blockage sub-path, the first endpoint, and the second endpoint, path planning is performed to obtain the second target movement path; The planning module is used to perform path planning based on the pre-stored track information of the target track, the location information of the picking machine, the location information of the unloading machine, and the location information of the transmission device to obtain the target movement path; The control module is used to output a first control command to the target device to control the target device to move along the target track according to the target movement path, and to pick up the wafer box at the picking machine and place the wafer box at the unloading machine.
18. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the over-the-air transmission method according to any one of claims 1 to 16.