High flatness silicon crystal bar base and processing method thereof

CN117212634BActive Publication Date: 2026-09-25WUXI SHENGYIHONG PRECISION MASCH CO LTD
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Patent Information

Application Number
CN202311207065.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-09-19
Publication Date
2026-09-25
Estimated Expiration
2043-09-19

AI Technical Summary

Technical Problem

[0003]现有技术中,硅晶棒在进行加工使用时,一般会用到底座,底座在进行安装后,需要对其进行调节,使其和安装位置处于同一水平,但是当更换底座位置时,需要先将底座一个个调整,使得底座恢复初始状态,再进行水平调节,费时费力,不便于使用且效率较低

Benefits of technology

[0021]1、本发明中,在使用时,首先将安装座安装在指定位置,再推动拨板,拨板移动带动固定块移动,固定块移动带动限位卡块移动,进而解除对齿轮的固定,此时再转动手柄,手柄转动带动转杆转动,转杆转动通过限位块、齿条和齿轮使得支撑柱水平移动,进而根据水平仪,调整调节板的水平位置,当安装座更换位置时,按压按压板,按压板移动会通过梯形挤压块和梯形移动块使得两个移动杆相互靠近,进而解除固定,此时在重力的作用下,使得支撑柱复位,进而使得调节板恢复初始位置,从而使得调节板快速恢复初始状态,无需一个个进行调节,便于使用;

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Abstract

The application discloses a high-flatness silicon crystal bar base and a processing method thereof, and relates to the technical field of silicon crystal bars. The base comprises a mounting seat, four adjusting cavities are formed in the mounting seat, a sliding groove is formed in the inner wall of the side part of each adjusting cavity, and a limiting block is slidingly installed in each sliding groove. In use, the mounting seat is first installed at a specified position, the knob is then pushed to release the fixing of the gear, the handle is rotated, the handle moves the supporting column horizontally, and the horizontal position of the adjusting plate is adjusted according to the level. When the mounting seat is replaced, the pressing plate is pressed, the movement of the pressing plate makes the two moving rods approach each other through the trapezoidal extruding block and the trapezoidal moving block, and the fixing is released. At this time, the supporting column is reset under the action of gravity, the adjusting plate returns to the initial position, and the adjusting plate quickly returns to the initial state, so that the adjusting plate is adjusted one by one and is convenient to use.
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Description

Technical Field

[0001] This invention relates to the field of silicon crystal rod technology, and in particular to a silicon crystal rod base with high flatness and its processing method. Background Technology

[0002] Polycrystalline silicon is used as a raw material for monocrystalline silicon in semiconductors or silicon in solar cells. The Siemens process is widely known as a method for manufacturing polycrystalline silicon. The Siemens process typically involves contacting a silane feedstock gas with a heated silicon core wire to precipitate polycrystalline silicon on the surface of the silicon core wire using CVD (chemical vapor deposition).

[0003] In existing technologies, silicon ingots typically require a base during processing and use. After installation, the base needs to be adjusted to be level with the mounting position. However, when changing the base's position, each base must be adjusted individually to return to its initial state before horizontal adjustment, which is time-consuming, labor-intensive, inconvenient, and inefficient. This invention discloses a high-flatness silicon ingot base and its processing method to solve the above problems. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a silicon ingot base with high flatness and its processing method.

[0005] To achieve the above objectives, this application provides the following technical solution: a high-flatness silicon ingot base, comprising a mounting base, wherein the mounting base has four adjustment cavities, each of the four adjustment cavities has a sliding groove on its inner side wall, each of the four sliding grooves has a limiting block slidably mounted therein, each of the four limiting blocks has a support column mounted on its side, each of the four support columns has a rack mounted on its side, each of the four mutually distant sides of the mounting base has two rotating holes, each of the four rotating holes has a rotating rod rotatably mounted therein, each of the four rotating rods has a handle mounted at one end, and the other ends of each of the four rotating rods extend into the four adjustment cavities and are fitted with gears. The four gears mesh with the four racks respectively. Each of the four adjusting chambers has a moving hole on its inner side wall. A moving rod is slidably installed in each of the four moving holes. A fixing block is installed at one end of each of the four moving rods. Limiting blocks adapted to the four gears are installed on the sides of each of the four fixing blocks. A lever is installed on the side of each of the four fixing blocks. Two clearance grooves are provided on the mutually distant sides of the mounting base. The four levers pass through the four clearance grooves respectively. An elastic pressing mechanism is provided on the side of each of the four fixing blocks. A pressing cavity is provided on the mounting base. One end of each of the four moving rods extends to... Trapezoidal moving blocks are installed inside the extrusion chamber. A sliding hole is formed on the inner side wall of the extrusion chamber, and a sliding rod is slidably installed within the sliding hole. Two movable plates are sleeved on the sliding rod. Two trapezoidal extrusion blocks, adapted to the trapezoidal moving blocks, are installed on the sides of each of the two movable plates. A groove is formed on the side of the mounting base, and one end of the sliding rod extends into the groove and is fitted with a pressing plate. An elastic reset mechanism is installed on the side of the pressing plate. Four support holes are formed on the top of the mounting base, and four support columns extend through the four support holes to the outside of the mounting base and are collectively fitted with an adjusting plate. A level is installed on all four sides of the adjustment plate. Two first guide rails are installed on the top of the adjustment plate. A first U-shaped slide plate is slidably installed on each of the two first guide rails. A fixed plate is installed on the top of the two first U-shaped slide plates. A first moving mechanism is provided on the adjustment plate. The first moving mechanism is installed in conjunction with the first U-shaped slide plate. Two second guide rails are installed on the top of the fixed plate. A second U-shaped slide plate is slidably installed on each of the two second guide rails. A placement seat is installed on the top of the two second U-shaped slide plates. A second moving mechanism is provided on the fixed plate. The second moving mechanism is installed in conjunction with the second U-shaped slide plate.

[0006] Preferably, the first moving mechanism includes a U-shaped moving cavity formed on the adjusting plate. Two threaded rods are rotatably mounted on the inner walls of the U-shaped moving cavity. A first motor is mounted on the side of the adjusting plate. One end of one of the threaded rods extends outside the adjusting plate and is mounted on the output shaft of the first motor. First movable blocks are threaded onto the two threaded rods respectively. A moving groove is formed on the top of each of the two first guide rails. The tops of the two first movable blocks pass through the two moving grooves respectively and are mounted on the top inner walls of the two first U-shaped sliding plates respectively. The two threaded rods are installed in cooperation through a first transmission unit.

[0007] Preferably, the first transmission unit includes transmission wheels sleeved on the two threaded rods, and belts are tensioned on the two transmission wheels.

[0008] Preferably, the second moving mechanism includes a U-shaped movable cavity formed on the fixed plate. Two lead screws are rotatably mounted on the inner walls of the U-shaped movable cavity. A second motor is mounted on the side of the fixed plate. One end of one of the lead screws extends outside the fixed plate and is mounted on the output shaft of the second motor. A second movable block is threaded onto each of the two lead screws. Movable grooves are formed on the tops of the two first guide rails. The tops of the two second movable blocks pass through the two movable grooves and are respectively mounted on the top inner walls of the two second U-shaped slides. The two lead screws are installed in cooperation through a second transmission unit.

[0009] Preferably, the second transmission unit includes sprockets sleeved on the two lead screws, and a chain belt is tensioned on the two sprockets.

[0010] Preferably, the elastic compression mechanism includes a compression spring installed on the side of the fixed block, and the other end of the compression spring is installed on the inner wall of the side of the adjustment cavity.

[0011] Preferably, the elastic reset mechanism includes a reset spring installed on the side of the pressing plate, and the other end of the reset spring is installed on the inner wall of the side of the groove.

[0012] Preferably, limit rods are installed on the opposite inner walls of the four grooves, and limit holes are opened on the top of the four limit blocks, with the four limit rods passing through the four limit holes respectively.

[0013] Preferably, each of the four handles is provided with an anti-slip guide sleeve.

[0014] This invention also provides a method for processing a silicon ingot substrate with high flatness, the method comprising:

[0015] S1. When using, first install the mounting base in the designated position, then push the lever. The movement of the lever causes the fixed block to move, and the movement of the fixed block causes the limit block to move, thereby releasing the gear from the lock.

[0016] S2. Now turn the handle again. The rotation of the handle will drive the rotating rod to rotate. The rotation of the rotating rod will cause the support column to move horizontally. Then, adjust the horizontal position of the adjustment plate according to the level. At this time, release the lever. Under the elastic action of the compression spring, the moving fixed block will be reset, thereby preventing the support column from moving.

[0017] S3. When it is necessary to adjust the lateral position of the placement seat, turn on the first motor. The first motor moves the fixed plate through the threaded rod, the first movable block and the first U-shaped slide plate, thereby adjusting the lateral position of the placement seat. When it is necessary to adjust the longitudinal position of the placement seat, turn on the second motor. The second motor moves the placement seat through the screw, the second movable block and the second U-shaped slide plate, thereby adjusting the longitudinal position of the placement seat. Thus, the position of the placement seat can be adjusted without disassembly, which is convenient for use.

[0018] S4. When the mounting base is moved, press the pressing plate. The pressing plate will move the trapezoidal pressing block, which will cause the two moving rods to move closer to each other, thereby releasing the fixing block. At this time, under the action of gravity, the support column will be reset, and the adjusting plate will return to its initial position. This allows the adjusting plate to quickly return to its initial state without the need for individual adjustments, making it convenient to use.

[0019] S5. At this point, release the pressing plate. Under the action of the return spring, the pressing plate returns to its original position. At the same time, the fixing block returns to its original position under the elastic action of the compression spring, thereby limiting the support column.

[0020] In summary, the technical effects and advantages of this invention are as follows:

[0021] 1. In this invention, during use, the mounting base is first installed in the designated position, then the lever is pushed. The lever moves, causing the fixing block to move, which in turn causes the limiting block to move, thereby releasing the gear from its fixation. Then, the handle is turned, causing the rotating rod to rotate. The rotating rod, through the limiting block, rack, and gear, causes the support column to move horizontally. Then, according to the level, the horizontal position of the adjusting plate is adjusted. When the mounting base is changed, the pressing plate is pressed. The pressing plate moves, causing the two moving rods to move closer to each other through the trapezoidal squeezing block and trapezoidal moving block, thereby releasing the fixation. At this time, under the action of gravity, the support column is reset, thereby causing the adjusting plate to return to its initial position. Thus, the adjusting plate quickly returns to its initial state without the need for individual adjustments, making it convenient to use.

[0022] 2. In this invention, by setting up a first motor, a threaded rod, a first movable block, a second motor, a lead screw, and a second movable block, the lateral and longitudinal positions of the placement seat can be adjusted without disassembling the placement seat;

[0023] 3. In this invention, the anti-slip guide sleeve on the handle increases friction to prevent slippage during rotation. The limit rod provides guidance, allowing the support column to move horizontally. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram from a first perspective in an embodiment of this application;

[0025] Figure 2 This is a three-dimensional structural diagram of a partially cut section of the mounting base in an embodiment of this application;

[0026] Figure 3 for Figure 2 Enlarged structural diagram at point A in the middle;

[0027] Figure 4 This is a top-view enlarged structural diagram of a partially cut section of the mounting base in an embodiment of this application;

[0028] Figure 5 This is a top view of a partially cut section of the adjustment plate in an embodiment of this application;

[0029] Figure 6 This is a top view of a partially cut section of the fixing plate in an embodiment of this application.

[0030] In the diagram: 1. Mounting base; 2. Limiting block; 3. Limiting rod; 4. Support column; 5. Rack; 6. Rotating rod; 7. Gear; 8. Handle; 9. Moving rod; 10. Fixing block; 11. Compression spring; 12. Paddle plate; 13. Trapezoidal moving block; 14. Slide rod; 15. Movable plate; 16. Trapezoidal compression block; 17. Pressing plate; 18. Return spring; 19. Adjusting plate; 20. First motor; 21. Level; 22. First guide rail; 23. First U-shaped sliding plate; 24. Fixing plate; 25. Second guide rail; 26. Second U-shaped sliding plate; 27. Placement base; 28. Threaded rod; 29. ​​First movable block; 30. Transmission wheel; 31. Belt; 32. Lead screw; 33. Second movable block; 34. Second motor; 35. Sprocket; 36. Chain belt. Detailed Implementation

[0031] The technical solutions in the embodiments of the present invention will now be clearly and completely described in conjunction with the accompanying drawings.

[0032] Example: Figure 1-6The diagram shows a high-flatness silicon ingot base, including a mounting base 1. The mounting base 1 has four adjustment cavities. Each of the four adjustment cavities has a sliding groove on its inner side wall. A limit block 2 is slidably installed in each of the four sliding grooves. A support column 4 is installed on the side of each of the four limit blocks 2. A rack 5 is installed on the side of each of the four support columns 4. Two rotating holes are opened on the mutually distant sides of the mounting base 1. A rotating rod 6 is rotatably installed in each of the four rotating holes. A handle 8 is installed at one end of each of the four rotating rods 6. The other ends of the four rotating rods 6 extend into the four adjustment cavities and are fitted with gears 7. The four gears 7 mesh with the four racks 5 respectively. Each adjustment chamber has a movable hole on its inner side wall. A movable rod 9 is slidably installed in each of the four movable holes. A fixing block 10 is installed at one end of each of the four movable rods 9. Limiting blocks that match the four gears 7 are installed on the sides of each of the four fixing blocks 10. A lever 12 is installed on the sides of each of the four fixing blocks 10. Two clearance grooves are provided on the mutually distant sides of the mounting base 1. The four levers 12 pass through the four clearance grooves respectively. An elastic compression mechanism is provided on the sides of each of the four fixing blocks 10. A compression chamber is provided on the mounting base 1. One end of each of the four movable rods 9 extends into the compression chamber and is respectively installed with a trapezoidal movable block 13. The inner side wall of the mounting base 1 has a sliding hole, and a sliding rod 14 is slidably installed in the sliding hole. Two movable plates 15 are sleeved on the sliding rod 14. Two trapezoidal pressing blocks 16 that are adapted to the trapezoidal moving blocks 13 are installed on the sides of the two movable plates 15. The side of the mounting base 1 has a groove, and one end of the sliding rod 14 extends into the groove and is fitted with a pressing plate 17. An elastic reset mechanism is installed on the side of the pressing plate 17. The top of the mounting base 1 has four support holes, and four support columns 4 extend through the four support holes to the outside of the mounting base 1 and are fitted with an adjusting plate 19. A level 21 is installed on the four sides of the adjusting plate 19. Two first guide rails 22 are installed on the top, and a first U-shaped slide plate 23 is slidably installed on each of the two first guide rails 22. A fixed plate 24 is installed on the top of the two first U-shaped slide plates 23. A first moving mechanism is provided on the adjusting plate 19. The first moving mechanism is installed in cooperation with the first U-shaped slide plate 23. Two second guide rails 25 are installed on the top of the fixed plate 24, and a second U-shaped slide plate 26 is slidably installed on each of the two second guide rails 25. A placement seat 27 is installed on the top of the two second U-shaped slide plates 26. A second moving mechanism is provided on the fixed plate 24. The second moving mechanism is installed in cooperation with the second U-shaped slide plate 26.

[0033] Using the above mechanism, in use, first install the mounting base 1 in the designated position, then push the lever 12. The lever 12 moves, causing the fixing block 10 to move. The fixing block 10 moves, causing the limit block to move, thereby releasing the fixation of the gear 7. At this time, turn the handle 8. The turn of the handle 8 causes the rotating rod 6 to rotate. The rotation of the rotating rod 6 causes the support column 4 to move horizontally through the limit block 2, rack 5 and gear 7. Then, according to the level 21, adjust the horizontal position of the adjusting plate 19. When the mounting base 1 changes position, press the pressing plate 17. The movement of the pressing plate 17 will cause the sliding rod 14 to move. The movement of the sliding rod 14 causes the movable plate 15 to move, which in turn causes the trapezoidal pressing block 16 to move. When the inclined surfaces of the trapezoidal pressing block 16 and the trapezoidal moving block 13 come into contact, the trapezoidal pressing block 16 continues to move and press the trapezoidal moving block 13, thereby causing the two moving rods 9 to move closer to each other. The movement of the moving rods 9 causes the fixed block 10 to move, thereby releasing the fixation. At this time, under the action of gravity, the support column 4 is reset, thereby causing the adjusting plate 19 to return to its initial position. This allows the adjusting plate 19 to quickly return to its initial state without the need for individual adjustments, making it convenient to use.

[0034] like Figure 5 As shown, the first moving mechanism includes a U-shaped moving cavity opened on the adjusting plate 19. Two threaded rods 28 are rotatably mounted on the relative inner walls of the U-shaped moving cavity. A first motor 20 is mounted on the side of the adjusting plate 19. One end of one of the threaded rods 28 extends outside the adjusting plate 19 and is mounted on the output shaft of the first motor 20. First movable blocks 29 are threadedly mounted on the two threaded rods 28 respectively. The tops of the two first guide rails 22 are each provided with a moving groove. The tops of the two first movable blocks 29 pass through the two moving grooves respectively and are respectively mounted on the top inner walls of the two first U-shaped sliding plates 23. The two threaded rods 28 are installed in cooperation with the first transmission unit. The advantage of this arrangement is that the lateral position of the placement seat 27 can be easily adjusted by the arrangement of the first motor 20, the threaded rods 28 and the first movable blocks 29.

[0035] like Figure 5 As shown, the first transmission unit includes a transmission wheel 30 sleeved on two threaded rods 28, and a belt 31 is tensioned on the two transmission wheels 30. The advantage of this arrangement is that, through the arrangement of the transmission wheel 30 and the belt 31, when one threaded rod 28 rotates, the other threaded rod 28 will also rotate.

[0036] like Figure 6As shown, the second moving mechanism includes a U-shaped movable cavity opened on the fixed plate 24. Two lead screws 32 are rotatably mounted on the inner walls of the U-shaped movable cavity. A second motor 34 is installed on the side of the fixed plate 24. One end of one of the lead screws 32 extends outside the fixed plate 24 and is installed on the output shaft of the second motor 34. Two second movable blocks 33 are threadedly installed on the two lead screws 32 respectively. Movable grooves are opened on the top of the two first guide rails 22. The tops of the two second movable blocks 33 pass through the two movable grooves respectively and are installed on the top inner walls of the two second U-shaped slide plates 26 respectively. The two lead screws 32 are installed in cooperation through the second transmission unit. The advantage of this arrangement is that the longitudinal position of the placement seat 27 can be easily adjusted by the arrangement of the second motor 34, lead screws 32 and second movable blocks 33.

[0037] like Figure 6 As shown, the second transmission unit includes sprockets 35 sleeved on two lead screws 32, and a chain belt 36 is tensioned on the two sprockets 35. The advantage of this arrangement is that, through the arrangement of sprockets 35 and chain belt 36, when one lead screw 32 rotates, the other lead screw 32 will also rotate.

[0038] like Figure 3 As shown, the elastic compression mechanism includes a compression spring 11 installed on the side of the fixed block 10. The other end of the compression spring 11 is installed on the inner wall of the side of the adjustment cavity. The advantage of this arrangement is that, when the fixed block 10 is not under force, the fixed block 10 is reset under the elastic action of the compression spring 11.

[0039] like Figure 4 As shown, the elastic reset mechanism includes a reset spring 18 installed on the side of the pressing plate 17. The other end of the reset spring 18 is installed on the inner wall of the side of the groove. The advantage of this arrangement is that, by setting the reset spring 18, when the pressing plate 17 is not under force, the pressing plate 17 is reset under the elastic action of the reset spring 18.

[0040] like Figure 3 As shown, limit rods 3 are installed on the inner walls of the four sliding grooves respectively, and limit holes are opened on the top of the four limit blocks 2. The four limit rods 3 pass through the four limit holes respectively. The advantage of this setting is that the limit blocks 2 can only move horizontally by setting the limit rods 3.

[0041] like Figure 1 As shown, all four handles 8 are equipped with anti-slip guide sleeves. The advantage of this design is that the anti-slip guide sleeves increase friction and prevent slippage during rotation.

[0042] A method for fabricating a silicon ingot substrate with high flatness, the method comprising:

[0043] S1. When in use, first install the mounting base 1 in the designated position, then push the lever 12. The lever 12 moves and drives the fixing block 10 to move. The fixing block 10 moves and drives the limit block to move, thereby releasing the fixation of the gear 7.

[0044] S2. At this time, turn the handle 8. The rotation of the handle 8 will drive the rotating rod 6 to rotate. The rotation of the rotating rod 6 will cause the support column 4 to move horizontally. Then, adjust the horizontal position of the adjusting plate 19 according to the level 21. At this time, release the lever 12. Under the elastic action of the compression spring 11, the moving fixing block 10 will be reset, thereby preventing the support column 4 from moving.

[0045] S3. When it is necessary to adjust the lateral position of the placement seat 27, the first motor 20 is turned on. The first motor 20 moves the fixed plate 24 through the threaded rod 28, the first movable block 29 and the first U-shaped slide plate 23, thereby adjusting the lateral position of the placement seat 27. When it is necessary to adjust the longitudinal position of the placement seat 27, the second motor 34 is turned on. The second motor 34 moves the placement seat 27 through the screw 32, the second movable block 33 and the second U-shaped slide plate 26, thereby adjusting the longitudinal position of the placement seat 27. Thus, the position of the placement seat 27 can be adjusted without disassembly, which is convenient for use.

[0046] S4. When the mounting base 1 is moved, press the pressing plate 17. The pressing plate 17 will drive the trapezoidal pressing block 16 to move, thereby causing the two moving rods 9 to move closer to each other, thereby releasing the fixing block 10. At this time, under the action of gravity, the support column 4 is reset, thereby causing the adjusting plate 19 to return to its initial position. This allows the adjusting plate 19 to quickly return to its initial state without the need for individual adjustments, making it convenient to use.

[0047] S5. At this time, the pressing plate 17 is released. Under the action of the reset spring 18, the pressing plate 17 is reset. At the same time, the fixing block 10 is reset under the elastic action of the compression spring 11, thereby limiting the support column 4.

[0048] Working principle of this invention:

[0049] In use, first install the mounting base 1 in the designated position, then push the lever 12. The movement of the lever 12 moves the fixing block 10, which in turn moves the limiting block, thereby releasing the fixation of the gear 7. At this point, turn the handle 8. The rotation of the handle 8 moves the rotating rod 6. The rotation of the rotating rod 6 causes the support column 4 to move horizontally through the limiting block 2, the limiting rod 3, the rack 5, and the gear 7. Then, adjust the horizontal position of the adjusting plate 19 according to the level 21. At this point, release the lever 12. The fixing block 10 is no longer under force, and under the elastic action of the compression spring 11, the moving fixing block 10 returns to its original position. This fixes gear 7, preventing support column 4 from moving. When mounting base 1 changes position, pressing down on pressing plate 17 causes sliding rod 14 to move, which in turn moves movable plate 15. Movable plate 15 then moves trapezoidal pressing block 16. When the inclined surfaces of trapezoidal pressing block 16 and trapezoidal moving block 13 come into contact, trapezoidal pressing block 16 continues to move and presses trapezoidal moving block 13, causing the two moving rods 9 to move closer together. The movement of moving rods 9 causes fixing block 10 to move, thus releasing the fixation. At this point, under the influence of gravity, support column 4 returns to its original position. The adjustment plate 19 is then returned to its initial position, allowing it to quickly return to its initial state without the need for individual adjustments, thus simplifying its use. At this point, the pressing plate 17 is released, and without force, it resets under the action of the return spring 18. Simultaneously, the fixing block 10 resets under the elastic action of the compression spring 11, thereby limiting the position of the support column 4. When it is necessary to adjust the lateral position of the placement seat 27, the first motor 20 is activated. The first motor 20 drives one of the threaded rods 28 to rotate, and under the action of the transmission wheel 30 and the belt 31, both threaded rods 28 rotate. The rotation of the threaded rod 28 drives the first movable block 29 to move. The movement of the first movable block 29 causes the fixed plate 24 to move through the first U-shaped sliding plate 23, thereby adjusting the lateral position of the placement seat 27. When it is necessary to adjust the longitudinal position of the placement seat 27, the second motor 34 is turned on, and the sprocket 35 and the chain belt 36 cause the two lead screws 32 to rotate. The rotation of the lead screws 32 causes the two second movable blocks 33 to move. The second movable blocks 33 cause the placement seat 27 to move through the second U-shaped sliding plate 26, thereby adjusting the longitudinal position of the placement seat 27. Thus, the position of the placement seat 27 can be adjusted without disassembly, which is convenient for use.

[0050] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art can modify or make equivalent substitutions to the technical solutions described in the foregoing embodiments. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A silicon ingot base with high flatness, comprising a mounting base (1), characterized in that: The mounting base (1) has four adjustment cavities with grooves on their inner side walls. Each groove contains a limiting block (2) for a side-mounted support column (4). Each support column (4) has a rack (5) mounted on its side. The mounting base (1) has two rotating holes on its far-away sides, each containing a rotating rod (6). One end of each rotating rod (6) has a handle (8), and the other end extends into each of the four adjustment cavities and is fitted with a gear (7). The gear (7) meshes with each of the four racks (5). Each adjustment cavity has a moving hole on its inner side wall. Each moving hole contains a moving rod (9), and one end of each moving rod (9) is fitted with a... The mounting base (1) is equipped with a fixed block (10), and the side of the fixed block (10) is respectively equipped with a limiting block adapted to the gear (7). The side of the fixed block (10) is equipped with a lever plate (12). The side of the mounting base (1) that is far apart from each other is provided with two clearance grooves. The four lever plates (12) pass through the four clearance grooves respectively. The side of the fixed block (10) is provided with an elastic compression mechanism. The mounting base (1) is provided with a compression cavity. The other end of the moving rod (9) extends into the compression cavity and is respectively equipped with a trapezoidal moving block (13). The inner wall of the side of the compression cavity is provided with a sliding hole for a sliding rod (14). Two movable plates are sleeved on the sliding rod (14). 15), two trapezoidal pressing blocks (16) adapted to the trapezoidal moving block (13) are installed on the sides of the two movable plates (15); the mounting base (1) has a groove on its side, one end of the slide rod (14) extends into the groove and is fitted with a pressing plate (17), the pressing plate (17) is fitted with an elastic reset mechanism on its side, the mounting base (1) has four support holes on its top, the support column (4) extends through the four support holes to the outside of the mounting base (1) and is fitted with an adjusting plate (19), the adjusting plate (19) is fitted with a level (21) on its four sides, and the adjusting plate (19) is fitted with two first guide rails (22) on its top. The first U-shaped slide plate (23) is slidably installed on the first guide rail (22), and the top of the two first U-shaped slide plates (23) is jointly installed with a fixing plate (24); the adjustment plate (19) is provided with a first moving mechanism, which is installed in cooperation with the first U-shaped slide plate (23); the top of the fixing plate (24) is provided with two second guide rails (25), and the second U-shaped slide plates (26) are slidably installed on the second guide rails (25); the top of the two second U-shaped slide plates (26) is jointly installed with a placement seat (27); the fixing plate (24) is provided with a second moving mechanism, which is installed in cooperation with the second U-shaped slide plate (26).

2. The high flatness silicon ingot base according to claim 1, characterized in that: The first moving mechanism includes a U-shaped moving cavity opened on the adjusting plate (19). Two threaded rods (28) are rotatably installed on the inner wall of the U-shaped moving cavity. A first motor (20) is installed on the side of the adjusting plate (19). One end of one of the threaded rods (28) extends to the outside of the adjusting plate (19) and is installed on the output shaft of the first motor (20). A first movable block (29) is threaded on each of the two threaded rods (28). A moving groove is opened on the top of each of the two first guide rails (22). The tops of the two first movable blocks (29) pass through the two moving grooves and are respectively installed on the top inner wall of the two first U-shaped sliding plates (23). The two threaded rods (28) are installed in cooperation through a first transmission unit.

3. The high flatness silicon ingot base according to claim 2, characterized in that: The first transmission unit includes a transmission wheel (30) sleeved on two threaded rods (28), and a belt (31) is tensioned on the two transmission wheels (30).

4. The high flatness silicon ingot base according to claim 2, characterized in that: The second moving mechanism includes a U-shaped movable cavity opened on the fixed plate (24). Two lead screws (32) are rotatably installed on the inner wall of the U-shaped movable cavity. A second motor (34) is installed on the side of the fixed plate (24). One end of one of the lead screws (32) extends to the outside of the fixed plate (24) and is installed on the output shaft of the second motor (34). Two second movable blocks (33) are threaded on the two lead screws (32). Movable grooves are opened on the top of the two second guide rails (25). The tops of the two second movable blocks (33) pass through the two movable grooves and are respectively installed on the top inner wall of the two second U-shaped slide plates (26). The two lead screws (32) are installed in cooperation through a second transmission unit.

5. The high flatness silicon ingot base according to claim 4, characterized in that: The second transmission unit includes sprockets (35) sleeved on the two lead screws (32), and a chain belt (36) is tensioned on the two sprockets (35).

6. The high-flatness silicon ingot base according to claim 4, characterized in that: The elastic compression mechanism includes a compression spring (11) with one end installed on the side of the fixed block (10), and the other end of the compression spring (11) is installed on the inner wall of the side of the adjustment cavity.

7. The high flatness silicon ingot base according to claim 6, characterized in that: The elastic reset mechanism includes a reset spring (18) with one end mounted on the side of the pressing plate (17) and the other end mounted on the inner wall of the side of the groove.

8. The high flatness silicon ingot base according to claim 7, characterized in that: Limiting rods (3) are installed on the relative inner walls of the four grooves respectively, and limiting holes are opened on the top of the four limiting blocks (2). The four limiting rods (3) pass through the four limiting holes respectively.

9. The high flatness silicon ingot base according to claim 7, characterized in that: All four handles (8) are provided with anti-slip guide sleeves.

10. A method for processing a high-flatness silicon ingot base according to any one of claims 7-9, characterized in that, The method includes: S1. When using, first install the mounting base (1) in the designated position, then push the dial plate (12). The dial plate (12) moves and drives the fixing block (10) to move. The fixing block (10) moves and drives the limit block to move, thereby releasing the fixation of the gear (7). S2. At this time, turn the handle (8) again. The rotation of the handle (8) will drive the rotating rod (6) to rotate. The rotation of the rotating rod (6) will cause the support column (4) to move. Then, adjust the horizontal position of the adjusting plate (19) according to the level (21). At this time, release the lever (12). Under the elastic action of the compression spring (11), the moving fixed block (10) will be reset, thereby preventing the support column (4) from moving. S3. When it is necessary to adjust the lateral position of the placement seat (27), turn on the first motor (20). The first motor (20) moves the fixed plate (24) through the threaded rod (28), the first movable block (29) and the first U-shaped slide plate (23), thereby adjusting the lateral position of the placement seat (27). When it is necessary to adjust the longitudinal position of the placement seat (27), turn on the second motor (34). The second motor (34) moves the placement seat (27) through the lead screw (32), the second movable block (33) and the second U-shaped slide plate (26), thereby adjusting the longitudinal position of the placement seat (27). Thus, the position of the placement seat (27) can be adjusted without disassembly, which is convenient for use. S4. When the mounting base (1) changes position, press the pressing plate (17). The pressing plate (17) will drive the trapezoidal pressing block (16) to move, thereby causing the two moving rods (9) to move closer to each other, thereby causing the fixing block (10) to be released from fixation. At this time, under the action of gravity, the support column (4) will be reset, thereby causing the adjusting plate (19) to return to its initial position, thus allowing the adjusting plate (19) to quickly return to its initial state without the need for individual adjustment, making it convenient to use. S5. At this time, the pressing plate (17) is released. Under the action of the reset spring (18), the pressing plate (17) is reset. At the same time, the fixing block (10) is reset under the elastic action of the compression spring (11), thereby limiting the support column (4).

Citation Information

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