一种基于背馈式共面波导的微波探针
By using a back-fed coplanar waveguide design and a trapezoidal gradient open-circuit output terminal, the limitations of accuracy and range of traditional coplanar waveguide probes in dielectric constant testing are solved, enabling high-precision testing of small areas and simplifying structural design.
CN117214485BActive Publication Date: 2026-07-17UNIV OF ELECTRONICS SCI & TECH OF CHINA
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- UNIV OF ELECTRONICS SCI & TECH OF CHINA
- Filing Date
- 2023-08-25
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
The feeding method of traditional coplanar waveguide probes limits the accuracy and range of dielectric constant testing, makes it difficult to test the distribution performance in small areas, and has a complex structure and high design difficulty.
Method used
A back-fed coplanar waveguide design is adopted, combined with a short-circuit board and a trapezoidal tapered open-circuit output terminal to achieve dual-port feeding, extract four S-parameters, simplify the structural design, and is suitable for small-area testing.
Benefits of technology
It improves testing accuracy and range, simplifies design complexity, accurately obtains material distribution properties, avoids port matching issues, and is suitable for micron-level testing.
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Figure CN117214485B_ABST
Abstract
本发明的目的在于提供一种基于背馈式共面波导的微波探针，属于微波、毫米波材料电磁参数测试技术领域。该微波探针包括共面波导测试探针与测试夹具两部分；共面波导测试探针采用背馈式双端口设计，同时引入短路板构成谐振结构，可以避免端口匹配问题，在保证小测试区域的前提下，可以从矢量网络分析仪中提取出包括S11在内的多种S参数，便于后续介电常数的计算。
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