A support device for a planar lens

CN117215022BActive Publication Date: 2026-10-27CHANGCHUN NAT EXTREME PRECISION OPTICS CO LTD
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Patent Information

Application Number
CN202311300414.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-10-09
Publication Date
2026-10-27
Estimated Expiration
2043-10-09

AI Technical Summary

Technical Problem

[0003]在控制镜片的面形精度的过程中,镜片与镜框集成前的工作多数在检测工装上完成,通过提升检测精度等方式可确保镜片从检测工装上取下时具备良好的面形RMS值,但由于加工精度不一、结构设计不合理等原因,镜片从检测工装集成到支撑结构这一过程中可能引入较多的面形,因此需要对镜片的支撑结构进行设计优化,降低该集成过程引入的面形

Benefits of technology

[0016]相对于背景技术,本发明提供的平面镜片的支撑装置,包括支撑环,支撑环的内侧壁固设有至少两个柔性悬臂,全部柔性悬臂用于支撑平面镜片,每个柔性悬臂由两个L型单悬臂相对连接而成,相较于现有单悬臂而言,支撑刚度有所提升,能实现为平面镜片提供足够的支撑刚度,而且柔性悬臂为镂空状结构,能减小支撑装置与平面镜片之间的导热路径,确保平面镜片周边温度分布的均匀性。因此,本发明所提供的平面镜片的支撑装置能在提供足够支撑刚度的前提下提升平面镜片周边温度分布的均匀性。

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Abstract

The application discloses a support device for a plane lens, each flexible cantilever is formed by the opposite connection of two L-shaped single cantilevers, compared with the prior art single cantilever, the support rigidity is improved, sufficient support rigidity can be provided for the plane lens, and the flexible cantilever is in a hollow structure, the heat conduction path between the support device and the plane lens is reduced, and the uniformity of the temperature distribution around the plane lens is ensured. Therefore, the support device for the plane lens provided by the application can improve the uniformity of the temperature distribution around the plane lens on the premise of providing sufficient support rigidity.
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Description

Technical Field

[0001] This invention relates to the field of optical component manufacturing technology, and in particular to a support device for a planar lens. Background Technology

[0002] With the continuous development of optical processing, manufacturing, and integration technologies, the requirements for the resolution, aberrations, and other performance characteristics of optical systems are becoming increasingly stringent, and the surface accuracy requirements for optical components are also rising. Adverse factors such as gravity, thermal load, and external disturbances can all affect the surface accuracy of lenses. Various methods must be employed to strictly control these adverse factors, and corrections must be made during lens assembly and support to mitigate surface shape changes and improve lens surface accuracy.

[0003] In the process of controlling the surface shape accuracy of the lens, most of the work before the lens is integrated with the frame is done on the inspection fixture. By improving the inspection accuracy, it can be ensured that the lens has a good surface shape RMS value when it is removed from the inspection fixture. However, due to the different processing accuracy and unreasonable structural design, a lot of surface shape may be introduced during the process of integrating the lens from the inspection fixture into the support structure. Therefore, it is necessary to design and optimize the support structure of the lens to reduce the surface shape introduced during the integration process.

[0004] In the field of optics, common lenses can be classified into convex lenses, concave lenses, plane mirrors, and prisms. Existing plane lens support devices usually have a single cantilever, which has very limited support stiffness and is difficult to provide reliable support for plane lenses. Moreover, existing single cantilevers are mostly solid structures, resulting in an excessively long heat conduction path between the frame and the lens, which is not conducive to the uniformity of temperature distribution around the plane lens. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide a support device for a planar lens, wherein each flexible cantilever is formed by two L-shaped single cantilevers connected relative to each other, which can improve the uniformity of temperature distribution around the planar lens while providing sufficient support stiffness.

[0006] To achieve the above objectives, the present invention provides a support device for a planar lens, including a support ring, wherein at least two flexible cantilever arms are fixedly provided on the inner sidewall of the support ring, and the flexible cantilever arms are formed by two L-shaped single cantilever arms connected relative to each other; all the flexible cantilever arms are used to support the planar lens.

[0007] Preferably, each flexible cantilever is fixed with a support protrusion, and the planar lens is placed on the support protrusion.

[0008] Preferably, each flexible cantilever includes a first flexible arm, a second flexible arm, and a third flexible arm connected in sequence. The first flexible arm and the third flexible arm are symmetrically arranged, and the second flexible arm is arc-shaped and connected between the first flexible arm and the third flexible arm.

[0009] Preferably, the support protrusion is located on the top side of the second flexible arm and at the center of the second flexible arm.

[0010] Preferably, the support surfaces of all support protrusions are on the same plane.

[0011] Preferably, the inner wall of the support ring is provided with three flexible cantilever arms, which are distributed in an equilateral triangle.

[0012] Preferably, each flexible cantilever is integrally fixed to the inner wall of the support ring.

[0013] Preferably, the width of each flexible cantilever gradually decreases in the direction close to the central axis of the support ring.

[0014] Preferably, the planar lens is a circular lens, the support ring is circular, and a central cavity is formed between all the flexible cantilever arms. The diameter of the central cavity is smaller than the diameter of the planar lens, and the inner diameter of the support ring is larger than the diameter of the planar lens.

[0015] Preferably, it further includes at least two sets of positioning claws arranged in a circular pattern, all of which are used to define the position of the planar lens on the support ring so that the planar lens and the support ring remain coaxial.

[0016] Compared to the prior art, the planar lens support device provided by the present invention includes a support ring, with at least two flexible cantilever arms fixed to the inner wall of the support ring. All flexible cantilever arms are used to support the planar lens. Each flexible cantilever arm is formed by two L-shaped single cantilever arms connected relative to each other. Compared to existing single cantilever arms, the support stiffness is improved, providing sufficient support stiffness for the planar lens. Moreover, the flexible cantilever arms have a hollow structure, which reduces the heat conduction path between the support device and the planar lens, ensuring the uniformity of temperature distribution around the planar lens. Therefore, the planar lens support device provided by the present invention can improve the uniformity of temperature distribution around the planar lens while providing sufficient support stiffness. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a diagram showing the state of a planar lens support device provided in a specific embodiment of the present invention when supporting a planar lens;

[0019] Figure 2This is a structural diagram of a planar lens support device provided in a specific embodiment of the present invention.

[0020] The attached figures are labeled as follows:

[0021] 1. Support ring; 2. Flexible cantilever; 3. Planar mirror; 4. Support protrusion.

[0022] The first flexible arm 21, the second flexible arm 22, and the third flexible arm 23. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] This invention discloses a support device for a planar lens that can be adapted to a planar lens 3 that achieves aberration compensation by changing its internal temperature. Such planar lenses 3 are usually sensitive to changes in ambient temperature.

[0026] As attached Figure 1 and 2 As shown, the aforementioned support device includes a support ring 1, and at least two flexible cantilever arms 2 are fixed to the inner wall of the support ring 1. Each flexible cantilever arm 2 is formed by two L-shaped single cantilever arms connected relative to each other. Specifically, the two L-shaped single cantilever arms are symmetrically distributed radially along the support ring 1, with one end of each arm fixed to the inner wall of the support ring 1, and the other ends integrally connected. The support ring 1 can be a mirror frame, but is not limited to this.

[0027] All flexible cantilever arms 2 are used to support the planar lens 3. Compared with existing single cantilever arms, each flexible cantilever arm 2 has the advantages of a flexible structure and can improve its own supporting stiffness, providing sufficient supporting stiffness for the planar lens 3. In addition, each flexible cantilever arm 2 has a hollow structure with low radial stiffness and high axial stiffness, which increases the radial flexibility and decreases the axial flexibility of the flexible cantilever arm 2, reducing the heat conduction path between the support device and the planar lens 3 and ensuring the uniformity of temperature distribution around the planar lens 3. Therefore, the planar lens support device provided by the present invention can improve the uniformity of temperature distribution around the planar lens 3 while providing sufficient supporting stiffness.

[0028] Furthermore, each flexible cantilever 2, as a flexible structure, has increased axial stiffness, which can effectively reduce the surface deformation introduced during the process from the inspection fixture to the support device. Experiments have shown that the introduced surface deformation can be reduced by up to 65%. Each flexible cantilever 2 can adapt to the stress and deformation caused by uneven temperature distribution to the plane lens 3, and reduce the impact of the deflection of other lens groups on the plane lens 3.

[0029] Each flexible cantilever 2 is fixed with a support protrusion 4, and the planar lens 3 is placed on the support protrusion 4. The setting of the support protrusion 4 can reduce the contact area between the flexible cantilever 2 and the planar lens 3 to a certain extent, which is more conducive to improving the uniformity of temperature distribution around the planar lens 3. In the axial direction of the support ring 1, the thickness of each flexible cantilever 2 is equal to the wall thickness of the support ring 1, and the two sides of the flexible cantilever 2 are flush with the two end faces of the support ring 1. In this way, the support protrusion 4 is set higher than the support ring 1, further reducing the possibility of contact between the planar lens 3 and the support ring 1, which has a positive significance for improving the uniformity of temperature distribution around the planar lens 3. The axial height of each support protrusion 4 can be between 0.5 and 1 mm.

[0030] Each flexible cantilever 2 includes a first flexible arm 21, a second flexible arm 22, and a third flexible arm 23 connected in sequence. The first flexible arm 21 and the third flexible arm 23 extend radially along the support ring 1 and are symmetrically arranged radially along the support ring 1. The second flexible arm 22 is arc-shaped, and the curvature of the second flexible arm 22 is consistent with that of the support ring 1. The second flexible arm 22 connects the first flexible arm 21 and the third flexible arm 23.

[0031] The support protrusion 4 is located on the top side of the second flexible arm 22 and at the center of the second flexible arm 22, ensuring that each flexible cantilever 2 is subjected to uniform force.

[0032] Each flexible cantilever 2 has a support protrusion 4 with a support surface at its top, and the support surface is flat. The support surfaces of all support protrusions 4 are on the same plane, which effectively prevents the plane mirror 3 from tilting during the support process.

[0033] The inner wall of the support ring 1 is provided with three flexible cantilever arms 2, which are distributed in an equilateral triangle to form a three-point flexible support, making the support more stable. Of course, the number of flexible cantilever arms 2 is not limited to this, and can be adapted to the specifications of the plane lens 3. No specific limitation is made here.

[0034] Each flexible cantilever 2 is integrally fixed to the inner wall of the support ring 1, ensuring reliable fixation of each flexible cantilever 2. The integral setting of the support ring 1 and the flexible cantilever 2 can be achieved by wire cutting. Of course, the fixing method of each flexible cantilever 2 is not limited to this.

[0035] The width of each flexible cantilever 2 gradually decreases in the direction close to the central axis of the support ring 1, making the radial flexibility of each flexible cantilever 2 greater, which is more conducive to reducing the deformation and stress of the plane mirror 3 caused by uneven temperature distribution.

[0036] The planar lens 3 is a circular lens, the support ring 1 is circular, and all the flexible cantilever arms 2 surround it to form a central cavity. The diameter of the central cavity is smaller than the diameter of the planar lens 3, and the inner diameter of the support ring 1 is larger than the diameter of the planar lens 3. This ensures that all the flexible cantilever arms 2 can reliably support the planar lens 3, and also leaves a certain radial gap between the planar lens 3 and the inner wall of the support ring 1, which is also conducive to improving the uniformity of temperature distribution around the planar lens 3.

[0037] The aforementioned support device further includes at least two sets of positioning claws arranged in a circular pattern. Each positioning claw can extend and retract radially along the support ring 1, and each positioning claw has an arc-shaped positioning surface that abuts against the side of the planar lens 3, so that all positioning claws can define the position of the planar lens 3 on the support ring 1, ensuring that the planar lens 3 is reliably placed on all the flexible cantilever 2, and keeping the planar lens 3 coaxial with the support ring 1.

[0038] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0039] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A support device for a planar lens, characterized in that, Includes a support ring (1), the inner wall of which is fixed with at least two flexible cantilever (2), the flexible cantilever (2) being formed by two L-shaped single cantilever connected relative to each other; all of the flexible cantilever (2) are used to support the planar lens (3). Each of the flexible cantilever (2) is fixed with a support protrusion (4), and the planar lens (3) is placed on the support protrusion (4). Each of the flexible cantilever (2) includes a first flexible arm (21), a second flexible arm (22) and a third flexible arm (23) connected in sequence. The first flexible arm (21) and the third flexible arm (23) are symmetrically arranged. The second flexible arm (22) is arc-shaped and connected between the first flexible arm (21) and the third flexible arm (23).

2. The support device for a planar lens according to claim 1, characterized in that, The support protrusion (4) is located on the top side of the second flexible arm (22) and at the center of the second flexible arm (22).

3. The support device for a planar lens according to claim 1, characterized in that, All the support surfaces of the support protrusions (4) are on the same plane.

4. The support device for a planar lens according to any one of claims 1 to 3, characterized in that, The inner wall of the support ring (1) is provided with three flexible cantilever arms (2), which are distributed in an equilateral triangle.

5. The support device for a planar lens according to any one of claims 1 to 3, characterized in that, Each of the flexible cantilever (2) is integrally fixed to the inner wall of the support ring (1).

6. The support device for a planar lens according to any one of claims 1 to 3, characterized in that, The width of each of the flexible cantilever (2) gradually decreases in the direction of the central axis of the support ring (1).

7. The support device for a planar lens according to any one of claims 1 to 3, characterized in that, The planar lens (3) is a circular lens, the support ring (1) is circular, and a central cavity is formed between all the flexible cantilever (2). The diameter of the central cavity is smaller than the diameter of the planar lens (3), and the inner diameter of the support ring (1) is larger than the diameter of the planar lens (3).

8. The support device for a planar lens according to any one of claims 1 to 3, characterized in that, It also includes at least two sets of positioning claws arranged in a circular pattern, all of which are used to define the position of the planar lens (3) on the support ring (1) so that the planar lens (3) and the support ring (1) remain coaxial.

Citation Information

Patent Citations

  • A lens support device in a photolithography projection lens

    CN102279454A

  • Single-point support flexible structure suitable for medium-small-caliber space reflector

    CN110727078A