Liquid jet target x-ray source
CN117223081BActive Publication Date: 2026-07-21EXCILLUM
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- EXCILLUM
- Filing Date
- 2022-04-06
- Publication Date
- 2026-07-21
AI Technical Summary
Technical Problem
Existing liquid jet target X-ray sources suffer from problems such as excessive reabsorption by the target material and insufficient electron beam penetration depth when generating X-ray radiation, resulting in poor X-ray spot size and flux.
Method used
A liquid jet target is used, designed with a slender cross-section and a thickness less than the electron penetration depth. By controlling the impact position and extraction angle of the electron beam, the generation and extraction of X-ray radiation are optimized to reduce reabsorption and scattering effects.
Benefits of technology
It achieves smaller X-ray spot size and higher throughput, improving the efficiency and performance of X-ray sources and making them suitable for a variety of applications.
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Smart Images
Figure CN117223081B_ABST
Abstract
An X-ray source is provided, comprising a target generator configured to generate a liquid jet having an elongated cross-section with a long axis and a short axis; an electron source configured to generate an electron beam arranged to interact with the liquid jet in an interaction region to generate X-ray radiation; and an X-ray transparent window arranged to transmit the X-ray radiation generated in the interaction region, wherein the X-ray transparent window is positioned to extract X-ray radiation at an angle a relative to the long axis; wherein the target generator is configured to generate the liquid jet such that the jet has a thickness at the interaction region along a propagation direction of the electron beam that is less than an electron penetration depth of the electron beam in the liquid jet. A corresponding method for generating X-ray radiation is also provided.
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