Helium exploration system and vacuum calibration system

Abstract

The application provides a helium exploration system and a vacuum calibration system. The helium exploration system comprises a helium permeation assembly for separating helium in a sample to be measured; an ion source corresponding to the helium permeation assembly, the ion source being used for ionizing the helium separated by the helium permeation assembly to generate an ion current and outputting the ion current; and a data processing module electrically connected to the ion source; the data processing module being used for processing the ion current signal and converting the ion current signal into a helium concentration. The helium exploration system can accurately and efficiently explore helium resources to meet the needs of helium exploration and development.

Description

Technical Field

[0001] This invention relates to the field of helium exploration technology. More specifically, it relates to a helium exploration system and a vacuum calibration system. Background Technology

[0002] Helium is an extremely light, colorless, odorless, and tasteless monatomic inert gas. Its chemical reactivity is poor, and it rarely reacts with other substances under normal conditions. Helium is widely used in aerospace, automotive transportation, diving, and medical fields, and is a rare strategic resource. Helium accounts for 23% of the total mass of the universe, second only to hydrogen, but its abundance on Earth is extremely low, averaging only 0.0005% in dry air, making it virtually impossible to extract from the atmosphere. The primary source of helium is natural gas fields, where it exists as a trace component. When the helium concentration in a natural gas reservoir reaches 0.05% or higher, it has industrial applicability. In addition, helium can also be produced by the decay of uranium and thorium in radioactive minerals and rocks, as well as through degassing processes during geological activities.

[0003] my country faces a scarcity of helium resources, relying heavily on imports for its supply. This high import cost limits the application of helium. In recent years, with advancements in science and technology, domestic demand for helium has been increasing, but the extent of domestic helium exploration and development remains limited, failing to meet national needs. Therefore, actively exploring effective methods for helium resource exploration is of great significance. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a helium exploration system and a vacuum calibration system. This helium exploration system can accurately and efficiently explore helium resources to meet the needs of helium exploration and development.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This invention provides a helium exploration system, comprising:

[0007] Helium permeation assembly used to separate helium from the sample to be tested;

[0008] An ion source corresponding to the helium permeation assembly, the ion source being used to ionize the helium gas separated by the helium permeation assembly to generate an ion stream and output the ion stream; and

[0009] A data processing module electrically connected to an ion source; the data processing module is used to process the ion flow signal and convert it into helium concentration.

[0010] A preferred embodiment is that the helium exploration system further includes a housing, and the helium permeation assembly is disposed within the housing;

[0011] The housing includes a sample inlet and a sample outlet; the helium permeation assembly is connected to both the sample inlet and the sample outlet.

[0012] A preferred embodiment is that the helium permeation assembly includes an outer tube having an inner cavity and an inner tube located within the inner cavity; the inner tube includes a leak hole for helium separation.

[0013] A channel for the flow of the sample to be tested is formed between the inner tube and the outer tube; the channel is connected to both the sample inlet and the sample outlet.

[0014] The inner tube is configured to allow helium gas from the sample to be tested, located within the channel, to enter the inner tube through a leak.

[0015] In a preferred embodiment, the helium permeation assembly further includes an opening for communication with an ion source, the opening being connected to an inner tube, through which the separated helium gas can enter the ion source.

[0016] In a preferred embodiment, the ion source includes a shielding shell, a core column passing through the center of the shielding shell, a first anode plate and a second anode plate disposed on two opposite sides of the core column, a cathode cylinder located between the first anode plate and the second anode plate, a high-voltage input interface connected to the first anode plate and the second anode plate, and an ion flow output interface connected to the cathode cylinder; the helium permeation assembly is connected to the core column; the ion source also includes a U-shaped magnet, and the shielding shell is located at the center of the space enclosed by the U-shaped magnet.

[0017] A preferred embodiment is that the helium exploration system further includes a sample collection device for collecting samples to be tested; the sample collection device includes a sampling tube, a filter connected to the sampling tube, and a sampling pump connected to the filter; the sampling pump includes a sample outlet connected to the inlet.

[0018] The present invention also provides a range calibration method for a helium exploration system, the range calibration method comprising:

[0019] Obtain the ion flow rate value of the helium exploration system. When the ion flow rate value of the helium exploration system is less than or equal to the background ion flow rate value, start range calibration.

[0020] Introduce sample water into the helium exploration system and adjust the water flow rate;

[0021] A certain concentration of standard helium gas is sequentially introduced into the water sample to be tested. If the helium concentration reading does not meet the known range, the sensitivity of the helium exploration system is adjusted, and then the range calibration is repeated.

[0022] If the helium concentration reading is within the known range, the range calibration is complete.

[0023] The present invention also provides a vacuum calibration system for performing vacuum calibration on a helium exploration system as described above, comprising: a main pipeline;

[0024] Several first branch pipelines connected to the main pipeline;

[0025] The second branch pipeline connects to the main pipeline;

[0026] Several sample storage structures are connected to the main pipeline through a first branch pipeline, and the sample storage structures are connected in parallel to each other.

[0027] A vacuum pump connected to the main pipeline via a second branch pipeline is connected in parallel with the sample storage structure.

[0028] A number of first external pipelines connected to the main pipeline, the first external pipelines being used to connect the ion sources of the helium exploration system and to connect the ion sources in parallel with each other;

[0029] The second external pipeline connected to the main pipeline and the vacuum gauge connected to the main pipeline via the second external pipeline.

[0030] The preferred embodiment is to install two valves connected in series on both the first branch pipeline and the second branch pipeline, and to install a leakage structure in parallel with one of the two valves on the first branch pipeline.

[0031] The present invention also provides a vacuum calibration method for a helium exploration system, the vacuum calibration method comprising:

[0032] Start the vacuum pump to evacuate the vacuum calibration system, reducing its internal vacuum level to the vacuum level required by the ion source;

[0033] The ion source is heated and kept at a certain temperature for a certain period of time before being cooled to the ambient temperature.

[0034] Obtain the background ion flux value of the helium exploration system. When the background ion flux value of the helium exploration system is less than or equal to 5 × 10⁻⁶, -11 At step A, standard helium samples are sequentially and individually introduced into the sample storage structure, and the ion flow rate values ​​of all ion sources are recorded. When the gas concentration value corresponding to the ion flow rate value is within ±10% of the concentration value of the introduced standard helium, the ion source is considered to be calibrated successfully.

[0035] A helium exploration system was used to evacuate the ion source and record the background ion flux value that could be achieved when the ion source was evacuated to the ultimate vacuum.

[0036] The background ion flux achieved when the ion source is pumped to its ultimate vacuum is (3~5)×10 -11 When within range A, the helium exploration system calibration is complete.

[0037] The beneficial effects of this invention are as follows:

[0038] This invention, through the cooperation of a helium permeation component and an ion source, ionizes the helium separated by the helium permeation component to generate an ion flow and outputs the ion flow. Then, using a data processing module electrically connected to the ion source, the ion flow value output by the ion source is converted into a helium concentration value, thereby enabling accurate and efficient exploration of helium resources to meet the needs of helium exploration and development. Attached Figure Description

[0039] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0040] Figure 1 This is a schematic diagram of the housing structure of the present invention.

[0041] Figure 2 This is a schematic diagram of the ion source of the present invention.

[0042] Figure 3 This is a schematic diagram of the helium permeation component of the present invention.

[0043] Figure 4 This is a schematic diagram of the vacuum calibration system of the present invention.

[0044] Figure 5 This is a schematic diagram of the sampling device of the present invention. Detailed Implementation

[0045] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention.

[0046] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0047] Technologies and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies and equipment should be considered part of the specification.

[0048] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0049] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0050] To address the growing demand for helium coupled with limited helium exploration and development, this invention provides a helium exploration system that combines... Figures 1 to 5 As shown, the helium exploration system specifically includes: a helium permeation component for separating helium from the sample to be tested; an ion source corresponding to the helium permeation component, the ion source being used to ionize the helium separated by the helium permeation component to generate an ion flow and output the ion flow; and a data processing module electrically connected to the ion source; the data processing module is used to process the ion flow signal and convert it into helium concentration; the helium in the helium exploration is obtained through the helium permeation component; the ion flow rate value is proportional to the helium concentration, and the concentration of the measured helium can be determined by a conversion formula.

[0051] Furthermore, the conversion formula between ion flow and gas concentration is: c = (b / a) × 5, where c is the helium concentration in the sample to be tested, in PPM; a is the background ion flow rate (i.e., the ion flow rate measured when air is introduced), in A; b is the ion flow rate of the sample to be tested, in A; and 5 is the average concentration of helium in the air, in ppm.

[0052] In one specific embodiment, the helium exploration system further includes a housing, within which the helium permeation component is disposed. The housing includes an inlet and an outlet, the inlet being controlled by a first valve 101, and the outlet by a second valve 102. The helium permeation component is connected to both the inlet and outlet. Specifically, the housing also includes a power supply, a high-voltage regulation module, and a data processing module. Outside the housing are a high-voltage regulation knob 1.1, a power switch 1.3, and a multi-functional display screen 1.2 capable of displaying helium concentration, voltage, and ion flow rate. When the helium exploration system is operating, it acquires ion flow and voltage information through internal sensors. After processing by the circuit chip and calculation by the helium concentration conversion program, the ion flow, voltage, and helium concentration values ​​can be directly read on the display screen 1.2. It should be noted that if the voltage is too high after gas is introduced into the ion source, it can easily lead to excessive ionization, causing ion breakdown and damaging the device. Therefore, the initial high voltage is generally relatively low (600V), and then gradually increased using the high-voltage regulation knob 1.1.

[0053] Regarding the specific structure of the helium permeation assembly, the helium permeation assembly includes an outer tube with an inner cavity and an inner tube located within the inner cavity; the inner tube includes a leak 3.1 for helium separation; a channel for the flow of the sample to be tested is formed between the inner tube and the outer tube; the channel is connected to both the sample inlet and the sample outlet; the inner tube is configured such that helium in the sample to be tested located in the channel can enter the inner tube through the leak 3.1; the outer tube includes a 316 stainless steel sleeve 3.4 and a 4J29 Kovar tube 3.5 that are fixed together; the inner tube includes a quartz thin-walled bulb tube, a first transition head 3.2 and a second transition head 3.3 connected in sequence; the leak 3.1 is formed on the quartz thin-walled bulb tube; when the sample is introduced into the channel, the outer wall of the quartz thin-walled bulb tube is surrounded by a helium source; the helium from the helium source can enter the interior of the ion source through the opening due to the characteristic that the leak 3.1 of the quartz thin-walled bulb tube only permeates helium.

[0054] In the above embodiment, the helium permeation assembly further includes an opening for communicating with the ion source. The opening is connected to the inner tube and is formed at the bottom end of the 4J29 Kovar tube 3.5. The top end of the 4J29 Kovar tube 3.5 is connected to the second transition head 3.3. The separated helium gas can enter the ion source through the opening. The helium permeation assembly is connected to the sampling outlet of the sampling device through the sampling inlet and discharged outward through the sampling outlet.

[0055] In one specific embodiment, the ion source includes a shielding shell 2.5, a core column 2.4 passing through the center of the shielding shell 2.5, a support plate of the core column 2.4 being sealed and welded to the shielding shell 2.5, a first anode plate 2.2 and a second anode plate 2.3 disposed on two opposite sides of the core column 2.4, a cathode cylinder 2.1 located between the first anode plate 2.2 and the second anode plate 2.3, a high-voltage input interface 2.7 connected to the first anode plate 2.2 and the second anode plate 2.3, and an ion flow output interface 2.8 connected to the cathode cylinder 2.1; the helium permeation assembly is connected to the core column 2.4; the cathode cylinder 2.1, the first anode plate 2.2, and the second anode plate 2.3 are installed inside the support plate of the core column 2.4; the high-voltage input interface 2.7, the ion flow output interface 2.8, and the helium permeation assembly are installed outside the support plate of the core column 2.4; a high voltage is applied to the first anode plate 2.2 and the second anode plate 2.3 of the ion source, and the cathode cylinder 2.1 is grounded through a small current amplifier. Furthermore, the ion source also includes a U-shaped magnet 2.6, and the shielding shell 2.5 is located at the center of the space enclosed by the U-shaped magnet 2.6. When a high voltage is applied, the high voltage is input to the anode plate through the high voltage input interface 2.7, and the cathode cylinder 2.1 emits electrons under the action of the electric field, ionizing the helium gas permeated by the helium permeation component to generate an ion flow. The ion flow is output through the ion flow output interface 2.8 connected to the cathode cylinder 2.1, and the ion flow value is converted into helium concentration by the data processing module.

[0056] In one specific embodiment, the helium exploration system further includes a sample collection device 5 for collecting samples to be tested; the sample collection device 5 includes a sampling tube 5.1, a filter 5.2 connected to the sampling tube 5.1, and a sampling pump 5.8 connected to the filter 5.2; the sampling pump 5.8 includes a sample outlet 5.9 connected to the inlet, and the sampling depth of the sample collection device 5 is related to the geographical location; furthermore, the power supply part of the sample collection device 5 includes a portable power bank 5.3, a socket 5.5, a plug 5.6, a switch 5.7, and an adapter socket 5.4.

[0057] The helium exploration system of this invention is suitable for field exploration of helium sources and can perform on-site range calibration and measurement. Experimental data are shown in Table 1. Specifically, the on-site calibration range and measurement method of the helium exploration system includes the following steps:

[0058] 1) Background calibration: Close the first valve 101, close the second valve 102, turn on the power switch, and start range calibration when the ion flow rate value displayed on the screen is ≤ the background ion flow rate value;

[0059] 2) Import sample water: Open the first valve 101, open the second valve 102, adjust the water flow rate, and turn on the display screen;

[0060] 3) Standard helium gas is introduced for range calibration: A certain concentration of standard helium gas is introduced sequentially into the water sample to be tested. If the helium concentration value displayed on the screen does not meet the known range, the sensitivity of the helium exploration system is adjusted, and then the range calibration is repeated; if the helium concentration value displayed on the screen meets the known range, the measurement is started.

[0061] 4) Measurement: Introduce the sample to be tested (well water, river water, petroleum exploration water, uranium exploration water, and underground gas), close the first valve 101, close the second valve 102, and measure the dissolved helium.

[0062] More specifically, background calibration: the ion flux value displayed on the helium exploration system's screen should be ≤5×10⁻⁶. -11 A. Begin range calibration;

[0063] Import sample water: Adjust the water flow rate to 250 mL / min and turn on the display screen;

[0064] Standard helium gas is introduced for range calibration: Standard helium gas is introduced into the water to be tested at concentrations of 41.5 PPM, 44.7 PPM, 66.4 PPM, 80.1 PPM, 99.7 PPM, and 160.4 PPM. If the helium concentration reading on the display screen does not fall within the range of ≤±10%, the sensitivity of the helium exploration system is adjusted, and then the range calibration is repeated. If the helium concentration reading on the display screen falls within the range of ≤±10%, the measurement begins.

[0065] Table 1. Raw data for verifying / calibrating the helium exploration system.

[0066] (System background ion flux value: (3~5)×10) -11 A, Background helium level ≤ 5 PPM)

[0067]

[0068]

[0069] Note: Sampling points include well water, river water, petroleum exploration water, uranium exploration water, and underground gas; the system indication error in Table 1 is obtained by subtracting the standard helium concentration value from the average value of the actual gas concentration.

[0070] In addition, the helium exploration system can be calibrated in a vacuum environment using a variety of standard helium samples with a standard helium concentration range of 10 to 500 PPM.

[0071] Specifically, the present invention also provides a vacuum calibration system for vacuum calibration of the helium exploration system described above, comprising: a main pipeline; three first branch pipelines connected to the main pipeline; a second branch pipeline connected to the main pipeline; three sample storage structures connected to the main pipeline via the first branch pipelines, the sample storage structures being connected in parallel, and the sample helium concentrations in each sample storage structure being 10 PPM, 100 PPM, and 500 PPM, respectively; a vacuum pump connected to the main pipeline via the second branch pipeline, the vacuum pump being connected in parallel with the sample storage structures; the vacuum calibration system further comprising three first external pipelines connected to the main pipeline, the first external pipelines being used to connect ion sources so that the ion sources are connected in parallel; a second external pipeline connected to the main pipeline; a vacuum gauge connected to the main pipeline via the second external pipeline; two valves connected in series on each of the first and second branch pipelines, and a leak structure connected in parallel with one of the two valves on the first branch pipeline, through which helium in the sample can flow to the main pipeline.

[0072] This invention also provides a vacuum calibration method for a helium exploration system. This method utilizes the aforementioned vacuum calibration system to perform vacuum calibration on the helium exploration system. The vacuum calibration method includes: starting a vacuum pump to evacuate the vacuum calibration system, reducing its internal vacuum level to the required level of the ion source. Typically, the vacuum level (value displayed by the vacuum gauge in the system) is considered to be around 10... -9 The vacuum requirement is met at the Pa level, and in practical applications, this value should not exceed 8 × 10⁻⁶. -9Pa; The ion source is heated and held at a certain temperature for a certain period of time, then cooled to ambient temperature; The background ion flux value of the helium exploration system is obtained. When the background ion flux value of the helium exploration system is less than or equal to 5 × 10⁻⁶ Pa, the background ion flux value of the helium exploration system is determined. -11 At step A, standard helium samples from the sample storage structure are sequentially introduced one by one, and the ion flow rate values ​​of all ion sources are recorded. When the gas concentration value corresponding to the ion flow rate value is within ±10% of the concentration value of the introduced standard helium, the ion source is considered to be calibrated successfully. A vacuum is drawn using a helium exploration system. The principle of vacuum drawing using a helium exploration system is as follows: a high voltage is applied between the anode and cathode, and the cathode discharges, ionizing the gas in the ion source. The ions generated after ionization are absorbed by one of the anode plates, thereby eliminating the gas. The background ion flow rate value that can be achieved when the ion source is drawn to the ultimate vacuum (the ultimate vacuum value is displayed by the vacuum gauge in the system) is recorded. When the ion source is drawn to the ultimate vacuum, the background ion flow rate value is within (3~5)×10 -11 At time A, the helium exploration system calibration is complete.

[0073] Specifically, refer to Figure 4 The vacuum calibration system for the helium exploration system in a vacuum environment involves opening valves f1-f8 and starting the first vacuum pump 01. When the system vacuum level reaches the requirements of the second vacuum pump 02, the second vacuum pump 02 is started. When the system vacuum level reaches the ion source's technical specifications, the ion source is heated to 450 degrees Celsius and held at that temperature for 4 hours. Then, it is cooled to ambient temperature. The measured background ion flux value of the helium exploration system is ≤5×10⁻⁶. -11 At step A, the standard helium sample is introduced.

[0074] Introducing the first type of standard helium: Close valves f1, f3, f4, f5, f6, f7, and f8, and open valve f2. The first type of standard helium flows into the main pipeline and the parallel vacuum gauge 03 through the leak structure B1. Record the ion flow rates and corresponding gas concentrations of the first ion source A1, the second ion source A2, and the third ion source A3. Introducing the second type of standard helium: Close valves f1, f2, f3, f5, f6, f7, and f8, and open valve f4. The second type of standard helium flows through the leak structure B2. Enter the main pipeline and the parallel vacuum gauge 03, and record the ion flow rate values ​​and corresponding gas concentration values ​​of the first ion source A1, the second ion source A2, and the third ion source A3; introduce the third type of standard helium: close valves f1, f2, f3, f4, f5, f7, and f8, open valve f6, and the third type of standard helium flows into the main pipeline and the parallel vacuum gauge 03 through the leakage structure B3, and record the ion flow rate values ​​and corresponding gas concentration values ​​of the first ion source A1, the second ion source A2, and the third ion source A3.

[0075] Valves f1-f8 were closed in sequence, and a helium exploration system was used to evacuate the ion source. The background ion flow rate value that could be achieved when the ion source was evacuated to the ultimate vacuum was recorded.

[0076] In summary, this invention, through the cooperation of a helium permeation component and an ion source, ionizes the helium gas separated by the helium permeation component to generate an ion flow and outputs the ion flow. Then, using a data processing module electrically connected to the ion source, the ion flow rate value output by the ion source is converted into the helium concentration, thereby enabling accurate and efficient exploration of helium resources to meet the needs of helium exploration and development.

[0077] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. A helium exploration system, characterized in that, include: Helium permeation assembly used to separate helium from the sample to be tested; An ion source that is matched with the helium permeation component is used to ionize the helium gas separated by the helium permeation component to generate an ion stream and output the ion stream. as well as A data processing module electrically connected to an ion source; the data processing module is used to process the ion flow signal and convert it into helium concentration; The ion source includes a shielding shell, a core column passing through the center of the shielding shell, a first anode plate and a second anode plate disposed on two opposite sides of the core column, a cathode cylinder located between the first anode plate and the second anode plate, a high-voltage input interface connected to the first anode plate and the second anode plate, and an ion flow output interface connected to the cathode cylinder; the helium permeation assembly is connected to the core column; the ion source also includes a U-shaped magnet, and the shielding shell is located at the center of the space enclosed by the U-shaped magnet; The helium permeation assembly includes an outer tube with an inner cavity and an inner tube located within the inner cavity; the inner tube includes a leak hole for helium separation. A channel for the flow of the sample to be tested is formed between the inner tube and the outer tube; The inner tube is configured to allow helium gas from the sample to be tested, located within the channel, to enter the inner tube through a leak. The inner tube includes a quartz thin-walled sphere tube, a first transition head and a second transition head connected in sequence, and a leakage hole is formed on the quartz thin-walled sphere tube; The helium permeation assembly also includes an opening for communication with an ion source. The opening is connected to an inner tube, through which separated helium gas can enter the ion source.

2. The helium exploration system according to claim 1, characterized in that, The helium exploration system also includes a housing, and the helium permeation assembly is disposed within the housing; The housing includes a sample inlet and a sample outlet; the helium permeation assembly is connected to both the sample inlet and the sample outlet.

3. The helium exploration system according to claim 2, characterized in that, The channel is connected to both the sample inlet and the sample outlet.

4. The helium exploration system according to claim 2, characterized in that, The helium exploration system also includes a sample collection device for collecting samples to be tested; the sample collection device includes a sampling tube, a filter connected to the sampling tube, and a sampling pump connected to the filter; the sampling pump includes a sample outlet connected to the inlet.

5. A range calibration method for a helium exploration system according to any one of claims 1-4, characterized in that, The range calibration method includes: Obtain the ion flow rate value of the helium exploration system. When the ion flow rate value of the helium exploration system is less than or equal to the background ion flow rate value, start range calibration. Introduce sample water into the helium exploration system and adjust the water flow rate; A certain concentration of standard helium gas is sequentially introduced into the water sample to be tested. If the helium concentration reading does not meet the known range, the sensitivity of the helium exploration system is adjusted, and then the range calibration is repeated. If the helium concentration reading is within the known range, the range calibration is complete.

6. A vacuum calibration system for performing vacuum calibration on the helium exploration system according to any one of claims 1-4, characterized in that, include: Supervisor Road; Several first branch pipelines connected to the main pipeline; The second branch pipeline connects to the main pipeline; Several sample storage structures are connected to the main pipeline through a first branch pipeline, and the sample storage structures are connected in parallel to each other. A vacuum pump connected to the main pipeline via a second branch pipeline is connected in parallel with the sample storage structure. A number of first external pipelines connected to the main pipeline, the first external pipelines being used to connect the ion sources of the helium exploration system and to connect the ion sources in parallel with each other; The second external pipeline connected to the main pipeline and the vacuum gauge connected to the main pipeline via the second external pipeline.

7. The vacuum calibration system according to claim 6, characterized in that, Two valves connected in series are installed on both the first and second branch pipelines, and a leakage structure connected in parallel with one of the two valves is installed on the first branch pipeline.

8. A vacuum calibration method based on the vacuum calibration system of claim 6, characterized in that, The vacuum calibration method includes: Start the vacuum pump to evacuate the vacuum calibration system, reducing its internal vacuum level to the vacuum level required by the ion source; The ion source is heated and kept at a certain temperature for a certain period of time before being cooled to the ambient temperature. Obtain the background ion flux value of the helium exploration system. When the background ion flux value of the helium exploration system is less than or equal to 5 × 10⁻⁶, -11 At step A, standard helium samples are sequentially and individually introduced into the sample storage structure, and the ion flow rate values ​​of all ion sources are recorded. When the gas concentration value corresponding to the ion flow rate value is within ±10% of the concentration value of the introduced standard helium, the ion source is considered to be calibrated successfully. A helium exploration system was used to evacuate the ion source and record the background ion flux value that could be achieved when the ion source was evacuated to the ultimate vacuum. The background ion flux achieved when the ion source is pumped to its ultimate vacuum is (3~5)×10 -11 When within range A, the helium exploration system calibration is complete.

Images