一种柔性静电触觉反馈执行器及制作方法

By designing a multi-layered composite stiffness elastomer structure, the problems of high voltage and weak output force in existing flexible haptic feedback actuators are solved, achieving low voltage, high output force, and wide frequency response, making it suitable for diverse haptic feedback and under-display integrated applications.

CN117234336BActive Publication Date: 2026-07-17TSINGHUA SHENZHEN INTERNATIONAL GRADUATE SCHOOL

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TSINGHUA SHENZHEN INTERNATIONAL GRADUATE SCHOOL
Filing Date
2023-09-15
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing flexible haptic feedback actuators suffer from problems such as high voltage requirements, weak output force, small frequency response bandwidth, weak vibration, and limited application scenarios, making it difficult to provide diverse haptic feedback and a realistic and natural interactive experience.

Method used

A multilayer composite stiffness elastomer structure is prepared by using a stacked first electrode layer, a dielectric film, and a second electrode layer. The first electrode layer consists of two or more layers of elastomers with composite stiffness, with at least two layers having different stiffnesses. By combining silicone materials such as PDMS, Ecoflex, and SEBS, and adjusting the stiffness combination of the layers, a multilayer composite stiffness elastomer structure can be prepared.

Benefits of technology

It achieves high output force feedback under low voltage, has a large frequency response bandwidth, and programmable haptic feedback, enabling it to provide diverse haptic experiences in various application scenarios and is suitable for under-display integrated applications.

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Abstract

本发明公开了一种柔性静电触觉反馈执行器,所述反馈执行器包括层叠设置的第一电极层、电介质薄膜和第二电极层,所述第一电极层包括两层以上复合刚度的弹性体,所述两层以上复合刚度的弹性体中的至少两层具有刚度差异。其制作方法包括将第一电极层、电介质薄膜和第二电极层层叠设置的步骤,以及制作第一电极层弹性体的步骤。该执行器具有需求电压低、输出力高、频率响应带宽大、触觉反馈可编程等优势。
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