Five-path phase-locked solid-state laser

Abstract

The application relates to the technical field of multi-beam interference, and discloses a five-way phase-locked solid laser, five laser unit assemblies are in a regular pentagon structure, under the reflection of an output mirror, the five laser unit assemblies form a closed loop mutual injection, the working mode of mutual injection makes the phase difference of the finally output five-way light beams locked as a fixed value, and the five-way light beams outputted have good coherence. Oscillating light beams generated by the laser unit assemblies are transmitted to corresponding total reflection mirrors under the transmission of the output mirror, the five-way light beams transmitted by the output mirror are converged through the five total reflection mirrors, and a micro-nano structure can be etched. The angle of the total reflection mirror is adjustable, and the five-beam interference of different incident angles can be realized. The solid laser in the embodiment has high working efficiency, high reliability, good interference effect, simple light path adjustment, controllable processing size, good stability, is suitable for low-cost mass production, and is simple to operate.

Description

Technical Field

[0001] This application relates to the field of multi-beam interference technology, specifically to a five-channel phase-locked solid-state laser. Background Technology

[0002] Laser interferometry (LIFE) utilizes multiple coherent laser beams to interfere on a material surface, creating energy distributions of varying intensity, thereby achieving laser etching. Compared to other micro / nano fabrication techniques, LIFE offers advantages such as simplicity, speed, low cost, high geometric precision, and good repeatability, attracting attention from researchers both domestically and internationally. It has been applied in various fields, including solar cell surface structures, microlens arrays, photonic crystals, light trapping, metamaterials, subwavelength structures, and biomedical structures.

[0003] To achieve multi-beam interference, the laser beam must first be split. Currently, the main beam splitting methods used in multi-beam laser interference processing include beam splitter methods, diffraction beam splitter methods, and pyramidal (stack) mirror methods. Among these, the beam splitter and pyramidal (stack) mirror methods have limitations: the period of the interference field pattern is fixed, and modulating the period requires changing the interference angle, which is difficult and requires custom modifications. The diffraction beam splitter method suffers from the difficulty and susceptibility to damage in beam splitter fabrication; interference is limited by diffraction efficiency and the area of ​​the diffraction spot, resulting in low light energy utilization. Therefore, existing beam splitting methods are unsatisfactory in terms of efficiency and reliability, hindering their widespread adoption for large-scale production applications. Summary of the Invention

[0004] This application provides a five-channel lock-in solid-state laser to solve the problems in the prior art, such as low energy utilization, difficulty in processing diffractive optical elements, inability to withstand high energy and easy damage, and difficulty in modulating nanostructures with different periods.

[0005] To address the aforementioned technical problems, this application discloses a five-way phase-locked solid-state laser. The solid-state laser includes five laser unit components and five total reflection mirrors. The five laser unit components are arranged in a regular pentagonal structure. An output mirror is provided between adjacent laser unit components to reflect a portion of the beam emitted by one laser unit component adjacent to the output mirror into another laser unit component, while the other portion is transmitted out. The five total reflection mirrors are respectively located in the transmission direction of the five laser unit components, and the angle of the total reflection mirrors is adjustable to adjust the interference path of the five beams transmitted from the five output mirrors.

[0006] In this embodiment, the five laser unit components form a regular pentagonal structure. A portion of the oscillating beam generated by each laser unit component is reflected by the output mirror and then injected into its adjacent laser unit component, forming a closed-loop mutual injection. This mutual injection mode locks the phase difference of the five output beams to a fixed value, and ensures that the intensity of the five output beams is consistent, guaranteeing good coherence. The other portion of the oscillating beam generated by each laser unit component is transmitted through the output mirror to the corresponding total reflection mirror. The five beams transmitted from the output mirror are converged by the five total reflection mirrors to form an interference spot, used for processing the target material, which can etch micro- and nano-structures. The angle of the total reflection mirrors is adjustable; different placement angles of the five total reflection mirrors determine different processing periods for the nanostructures, thus achieving five-beam interference at different incident angles. The solid-state laser in this embodiment has high efficiency, high reliability, good interference effect, simple optical path adjustment, controllable processing size, good stability, is suitable for low-cost mass production, and is easy to operate.

[0007] Preferably, the laser unit assembly includes a pulsed xenon lamp and a neodymium-doped yttrium aluminum garnet laser crystal; the pulsed xenon lamp is used to excite the neodymium-doped yttrium aluminum garnet laser crystal to generate laser oscillation within the laser resonant cavity formed by the five output mirrors.

[0008] Preferably, the angle between the output mirror and the adjacent laser unit components on both sides is the same.

[0009] The beam emitted from the laser unit assembly on one side of the output mirror enters the output mirror. Since the incident angle and the exit angle of the output mirror are the same, and the angle between the output mirror and the adjacent laser unit assemblies on both sides is the same, the beam reflected by the output mirror can be accurately injected into the laser unit assembly on the other side.

[0010] Preferably, the laser unit assembly further includes a half-wave plate, which is located on the side near the output end of the output mirror.

[0011] A half-wave plate can change the polarization direction of pulsed light passing through it.

[0012] Preferably, the laser unit assembly further includes an optical isolator, and the optical isolators in the five laser unit assemblies are placed in the same direction.

[0013] Optical isolators allow only unidirectional light to pass through, preventing the beam from being output in two directions through each output mirror, which increases the difficulty of convergence interference.

[0014] Preferably, the laser unit assembly further includes a potassium dideuterium phosphate crystal and a polarizer; the potassium dideuterium phosphate crystal and the polarizer constitute an electro-optic Q-switching device for converting pulsed light into nanosecond pulses.

[0015] Preferably, the five total reflection mirrors are at the same distance from the center of the regular pentagonal structure; the regular pentagonal structure is formed by five laser unit components.

[0016] Additional aspects and advantages of the embodiments of this application will be set forth in the following description, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0018] Figure 1 This is a schematic diagram of the planar structure of a five-channel phase-locked solid-state laser provided in an embodiment of this application;

[0019] Figure 2 A three-dimensional schematic diagram of five-way output light convergence interference provided for an embodiment of this application.

[0020] Among them, 11-first laser unit assembly; 111-first half-wave plate; 112-first optical isolator; 113-first potassium dideuterium phosphate crystal; 114-first polarizer; 115-first neodymium-doped yttrium aluminum garnet laser crystal; 116-first pulsed xenon lamp; 12-first output mirror; 13-first total reflection mirror; 21-second laser unit assembly; 211-second half-wave plate; 212-second optical isolator; 213-second potassium dideuterium phosphate crystal; 214-second polarizer; 215-second neodymium-doped yttrium aluminum garnet laser crystal; 216-second pulsed xenon lamp; 22-second output mirror; 23-second total reflection mirror; 31-third laser unit assembly; 311-third half-wave plate; 312-third optical isolator; 313-third potassium dideuterium phosphate crystal; 314-third polarizer; 315 - Third Nd:YAG laser crystal; 316 - Third pulsed xenon lamp; 32 - Third output mirror; 33 - Third total reflection mirror; 41 - Fourth laser unit assembly; 411 - Fourth half-wave plate; 412 - Fourth optical isolator; 413 - Fourth potassium dideuterium phosphate crystal; 414 - Fourth polarizer; 415 - Fourth Nd:YAG laser crystal; 416 - Fourth pulsed xenon lamp; 42 - Fourth output mirror; 43 - Fourth total reflection mirror; 51 - Fifth laser unit assembly; 511 - Fifth half-wave plate; 512 - Fifth optical isolator; 513 - Fifth potassium dideuterium phosphate crystal; 514 - Fifth polarizer; 515 - Fifth Nd:YAG laser crystal; 516 - Fifth pulsed xenon lamp; 52 - Fifth output mirror; 53 - Fifth total reflection mirror; 6 - Target processing material. Detailed Implementation

[0021] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0022] Those skilled in the art will understand that, unless explicitly stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this application means the presence of features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof. It should be understood that when we say an element is “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein can include wireless connections or wireless coupling. The term “and / or” as used herein includes all or any units and all combinations of one or more associated listed items.

[0023] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0024] Laser interferometry (LIFT) is a highly efficient fabrication technique for creating large-area periodic micro / nano structures. By using two or more coherent beams to form periodic or quasi-periodic light fields, two-dimensional and three-dimensional periodic structures can be directly etched onto the surface or interior of materials. LIFT offers advantages such as low-cost fabrication of large-area, high-resolution periodic structures, simple exposure procedures, and flexible pattern periodization, attracting significant attention from researchers both domestically and internationally. It has already been successfully applied in various fields, including photonic crystals, metamaterials, subwavelength structures, and biomedical structures.

[0025] Research literature on five-beam laser interferometry devices is scarce. Current research primarily employs a single laser outputting a single beam, which is then split into five beams using a proportional beam splitter, prism, or diffraction beam splitter. Five-beam interferometers using beam splitters or prisms suffer from complex adjustments, susceptibility to misalignment, and uneven scaling. Furthermore, the period of the interference field pattern is fixed; modulating the period requires changing the interference angle, which is difficult and requires custom modifications, resulting in poor flexibility. Five-beam interferometers using diffraction beam splitters are difficult to fabricate and prone to damage, and interference is limited by diffraction efficiency and the area of ​​the diffraction spot. All these methods still have many shortcomings in terms of reliability and flexibility, hindering widespread adoption.

[0026] To achieve the interference effect, coherent light must be split into two or more beams before converging. There are many ways to achieve laser beam splitting, such as beam splitter method, diffraction beam splitter method, and multi-faceted (stage) mirror method.

[0027] Beam splitter method is the most commonly used beam splitting method. Two-beam interference micro / nano fabrication mainly utilizes traditional semi-reflective mirrors for beam splitting. The semi-reflective mirror splits a beam into two beams, each with a 50% ratio, and then a mirror converges the two beams, resulting in two-beam interference at the intersection. If the two split beams are further split, four-beam interference can be obtained. Similarly, multiple splits can be used to obtain even more beams, achieving multi-beam interference. However, building and adjusting the optical path using multiple beam splitters and mirrors is extremely cumbersome, requiring precise control of their angles. Changing the incident angle is one method to obtain surface fabrication structures with different periods; however, changing the incident angle requires readjusting the optical path, which is inconvenient. This fabrication method is also unstable.

[0028] Diffractive beam splitters split laser light by using diffractive optical elements (DOEs). DOEs consist of arrays of amplitude- or phase-type microstructured diffractive units, used to modulate the wavefront of the beam. While DOEs can quickly and simultaneously acquire multiple coherent beams for multi-beam interference, they are limited by diffraction efficiency and the area of ​​the diffraction spot, resulting in interference only within a small region. This leads to low energy utilization, and diffractive beam splitters cannot withstand high energy, are easily damaged, and are difficult to manufacture. Significant laser power loss and degraded laser mode also occur, and their production cost is relatively high.

[0029] The pyramidal (frustum) mirror beam splitting method involves a laser beam, after being expanded and collimated, being incident directly on the base of a pyramid. The incident light is refracted on the pyramid surface, forming several symmetrically distributed plane waves with the same angle to the optical axis, and their amplitudes and initial phases are also identical. Behind the pyramid, these waves intersect in a region, forming an interference zone. The top of the pyramid is ground and polished to become a frustum, allowing it to directly transmit a portion of the incident light, creating an interference pattern with one more beam than the original pyramid. This method of beam splitting followed by refraction and then interference from a pyramidal (frustum) has a significant drawback: changes to the interference angle require custom adjustments, making it inconvenient and lacking flexibility.

[0030] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0031] This application provides a possible implementation method, such as... Figure 1 and Figure 2 As shown, the solid-state laser includes five laser unit components and five total reflection mirrors; the five laser unit components are distributed in a regular pentagonal structure; an output mirror is provided between adjacent laser unit components to reflect part of the beam emitted by one laser unit component adjacent to the output mirror into another laser unit component, and transmit the other part out; the five total reflection mirrors are respectively located in the transmission direction of the five laser unit components, and the angle of the total reflection mirrors is adjustable to adjust the interference path of the five beams transmitted from the five output mirrors.

[0032] like Figure 1 The five laser unit components are designated as first laser unit component 11, second laser unit component 21, third laser unit component 31, fourth laser unit component 41, and fifth laser unit component 51. Each adjacent laser unit component is connected to an output mirror, resulting in a total of five output mirrors: first output mirror 12, second output mirror 22, third output mirror 32, fourth output mirror 42, and fifth output mirror 52. For example... Figure 2 The five total reflection mirrors are: the first total reflection mirror 13, the second total reflection mirror 23, the third total reflection mirror 33, the fourth total reflection mirror 43, and the fifth total reflection mirror 53.

[0033] The solid-state laser in this embodiment is specifically designed for a five-beam laser interferometry system. To achieve five-beam laser interferometry, five laser unit components are designed to excite five beams of light respectively. To achieve laser interferometry, the five laser unit components in this embodiment are distributed in a regular pentagonal structure, and the excited beams oscillate within a resonant cavity formed between the five laser unit components. To allow the beams to propagate between the five laser unit components, output mirrors are provided between adjacent laser unit components. These mirrors direct the beam emitted from one of the laser unit components adjacent to the output mirror onto the output mirror, where it is reflected, allowing the reflected beam to enter another laser unit component. Figure 1 The beam emitted from the first laser unit component 11 enters the first output mirror 12, and after reflection by the first output mirror 12, enters the second laser unit component 21. The excited beams are mutually injected among the five laser unit components, and the phase difference of the beams propagating among the five laser unit components is constant. In order to converge the five beams for laser interference, the output mirrors in this embodiment have a certain transmittance, and five total reflection mirrors are designed. The beams generated in the five laser unit components are transmitted through the five output mirrors into five beams, at which point the phase difference of the five beams is constant and the intensity is consistent. The five total reflection mirrors are correspondingly set in the transmission direction of the five output mirrors, and can receive the beams transmitted from the corresponding output mirrors and reflect them. Figure 2 The first total reflection mirror 13 is positioned in the transmission direction of the first output mirror 12; the second total reflection mirror 23 is positioned in the transmission direction of the second output mirror 22; the third total reflection mirror 33 is positioned in the transmission direction of the third output mirror 32; the fourth total reflection mirror 43 is positioned in the transmission direction of the fourth output mirror 42; and the fifth total reflection mirror 53 is positioned in the transmission direction of the fifth output mirror 52. The five beams reflected by the five total reflection mirrors converge to achieve laser interference processing of the target material 6. Furthermore, the angles of the total reflection mirrors in this embodiment are adjustable. By adjusting the angles of the five total reflection mirrors, the incident angle of the five-beam interference can be changed, resulting in different processing cycles. The five-way laser interference processing system built using this solid-state laser as the light source represents a significant improvement in system reliability, processing effect, and working efficiency compared to previous systems.

[0034] In this embodiment, the five laser unit components form a regular pentagonal structure. A portion of the oscillating beam generated by each laser unit component is reflected by the output mirror and then injected into its adjacent laser unit component, forming a closed-loop mutual injection. This mutual injection mode locks the phase difference of the five output beams to a fixed value, and ensures that the intensity of the five output beams is consistent, guaranteeing good coherence. The other portion of the oscillating beam generated by each laser unit component is transmitted through the output mirror to the corresponding total reflection mirror. The five beams transmitted from the output mirror are converged by the five total reflection mirrors to form an interference spot, used for processing the target material, which can etch micro- and nano-structures. The angle of the total reflection mirrors is adjustable; different placement angles of the five total reflection mirrors determine different processing periods for the nanostructures, thus achieving five-beam interference at different incident angles. The solid-state laser in this embodiment has high efficiency, high reliability, good interference effect, simple optical path adjustment, controllable processing size, good stability, is suitable for low-cost mass production, and is easy to operate.

[0035] In an optional embodiment, the laser unit assembly includes a pulsed xenon lamp and a neodymium-doped yttrium aluminum garnet (Nd:YAG) laser crystal; the pulsed xenon lamp is used to excite the Nd:YAG laser crystal to generate laser oscillation within a laser resonant cavity formed by five output mirrors. Specifically, the first laser assembly 11 includes a first pulsed xenon lamp 116 and a first Nd:YAG laser crystal 115; the second laser assembly 21 includes a second pulsed xenon lamp 216 and a second Nd:YAG laser crystal 215; the third laser assembly 31 includes a third pulsed xenon lamp 316 and a third Nd:YAG laser crystal 315; the fourth laser assembly 41 includes a fourth pulsed xenon lamp 416 and a fourth Nd:YAG laser crystal 415; and the fifth laser assembly 51 includes a fifth pulsed xenon lamp 516 and a fifth Nd:YAG laser crystal 515.

[0036] In this embodiment, the first pulse xenon lamp 116, the second pulse xenon lamp 216, the third pulse xenon lamp 316, the fourth pulse xenon lamp 416, and the fifth pulse xenon lamp 516 operate synchronously to excite the corresponding first neodymium-doped yttrium aluminum garnet laser crystal 115, the second neodymium-doped yttrium aluminum garnet laser crystal 215, the second neodymium-doped yttrium aluminum garnet laser crystal 315, the second neodymium-doped yttrium aluminum garnet laser crystal 415, and the second neodymium-doped yttrium aluminum garnet laser crystal 515, thereby generating laser oscillation within the laser resonant cavity.

[0037] Specifically, the light beam emitted from the first Nd:YAG laser crystal 115 in the first laser unit assembly 11 is incident on the first output mirror 12, and after being reflected by the first output mirror 12, it is incident on the second laser unit assembly 21 adjacent to the output end (i.e., the end from which the light beam is emitted) of the first laser unit assembly 11; the light beam emitted from the second Nd:YAG laser crystal 215 in the second laser unit assembly 21 is incident on the second output mirror 22, and after being reflected by the second output mirror 22, it is incident on the third laser unit assembly 31 adjacent to the output end of the second laser unit assembly 21; and so on, the light beam emitted from the fifth Nd:YAG laser crystal 515 in the fifth laser unit assembly 51 is incident on the first laser unit assembly 11 after being reflected by the fifth output mirror 52. As described above, the reflection effect of the five output mirrors causes the five neodymium-doped yttrium aluminum garnet laser crystals to generate intracavity oscillating beams, achieving mutual injection. The mutual injection working mode will lock the phase difference of the final output five beams to a fixed value.

[0038] In this embodiment, the pulsed xenon lamps and corresponding neodymium-doped yttrium aluminum garnet laser crystals in the five laser unit components constitute the laser pump source and working medium. They adopt a five-lamp, five-bar, one-charge, five-discharge synchronous working mode. The pulsed xenon lamps (first pulse xenon lamp 116, second pulse xenon lamp 216, third pulse xenon lamp 316, fourth pulse xenon lamp 416, and fifth pulse xenon lamp 516) have a diameter of 5-9 mm, a length of 120-240 mm, and an effective interelectrode spacing of 50-120 mm. The laser crystal has a size of φ3-8 mm and a length of 50-120 mm.

[0039] In an optional embodiment, the angle between the output mirror and the adjacent laser unit components on both sides is the same. The angle between the output mirror and the adjacent laser unit components on both sides is 54°. All five output mirrors in this embodiment are specially designed and manufactured. Taking the first output mirror 12 as an example, the beam emitted from the first laser unit component 11 is incident on the first output mirror 12 at a 54° angle. Due to the specially designed and manufactured 54° film on the first output mirror 12, the reflected light exits at a 54° angle, at which point the angle between the incident light and the reflected light is 108°. The angle between the incident light and the reflected light of all five output mirrors is 108°, and the angle between any two adjacent optical paths in the five optical paths formed is also 108°. Therefore, the five interacting optical paths constitute a regular pentagonal structure.

[0040] In this embodiment, the reflectivity of each of the five output mirrors is 60%–95%, and the transmittance is 5%–40%; for example, the reflectivity is 90% and the transmittance is 10%. This allows a portion of the beam to form laser oscillations within the laser resonant cavity, while the other portion is transmitted to the total reflection mirror, achieving five-beam interference under the action of the five total reflection mirrors.

[0041] In an optional embodiment, the laser unit assembly further includes a half-wave plate disposed on the side near the output mirror's emission end. Specifically, as... Figure 1 The first laser unit assembly 11 further includes a first half-wave plate 111; the second laser unit assembly 21 further includes a second half-wave plate 211; the third laser unit assembly 31 further includes a third half-wave plate 311; the fourth laser unit assembly 41 further includes a fourth half-wave plate 411; and the fifth laser unit assembly 51 further includes a fifth half-wave plate 511. The half-wave plate can change the polarization direction of the pulsed light passing through it.

[0042] In an optional embodiment, the laser unit assembly further includes an optical isolator, with the optical isolators in the five laser unit assemblies placed in the same direction. Specifically, as Figure 1 The first laser unit assembly 11 also includes a first optical isolator 112; the second laser unit assembly 21 also includes a second optical isolator 212; the third laser unit assembly 31 also includes a third optical isolator 312; the fourth laser unit assembly 41 also includes a fourth optical isolator 412; and the fifth laser unit assembly 51 also includes a fifth optical isolator 512. The first optical isolator 112, the second optical isolator 212, the third optical isolator 312, the fourth optical isolator 412, and the fifth optical isolator 512 are all specially designed and manufactured to allow only unidirectional light to pass through. The light passing through the isolators is unidirectional and then propagates to the output mirror, ensuring that the light transmitted through the output mirror can only be output in one direction. The five optical isolators are placed in the same direction, ensuring that the light propagates in the same direction after passing through the isolators. The light passing through the isolators is transmitted through each of the five output mirrors, resulting in a total of five beams transmitted. This avoids the beams from being output in two directions through each output mirror, resulting in ten beams and increasing the difficulty of convergence interference.

[0043] In an optional embodiment, the laser unit assembly further includes a potassium dideuterium phosphate crystal (KD*P crystal) and a polarizer; the potassium dideuterium phosphate crystal and the polarizer constitute an electro-optic Q-switching device for converting pulsed light into nanosecond pulses, facilitating subsequent interference processing. Specifically, as... Figure 1 The first laser unit assembly 11 further includes a first potassium deuterium phosphate crystal 113 and a first polarizer 114; the second laser unit assembly 21 further includes a second potassium deuterium phosphate crystal 213 and a second polarizer 214; the third laser unit assembly 31 further includes a third potassium deuterium phosphate crystal 313 and a third polarizer 314; the fourth laser unit assembly 41 further includes a fourth potassium deuterium phosphate crystal 413 and a fourth polarizer 414; and the fifth laser unit assembly 51 further includes a fifth potassium deuterium phosphate crystal 513 and a fifth polarizer 514.

[0044] In an optional embodiment, the five total reflection mirrors are equidistant from the center of the regular pentagonal structure, which is formed by five laser unit components, thus obtaining five beams of light with consistent intensity.

[0045] In this embodiment, spatial five-beam interference is achieved by adjusting the angle of the total reflection mirror in a direction passing through the center of a regular pentagon and perpendicular to the plane of the regular pentagon, thereby processing the target material 6. The target material 6 can be a metallic material (such as titanium alloy, stainless steel, etc.) or a non-metallic material (such as silicon wafer, ceramic, polytetrafluoroethylene, etc.). Changing the angle of the total reflection mirror is equivalent to changing the incident angle of the five-beam interference, resulting in different processing cycles.

[0046] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of disclosure in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A five-channel phase-locked solid-state laser, characterized in that, The solid-state laser comprises five laser unit components and five total reflection mirrors; The five laser unit components are arranged in a regular pentagonal structure; An output mirror is provided between adjacent laser unit components to reflect a portion of the light beam emitted by one of the laser unit components adjacent to both sides of the output mirror into the other laser unit component, while transmitting the other portion out. The five total reflection mirrors are respectively disposed in the transmission direction of the five laser unit components, and the angle of the total reflection mirrors is adjustable to adjust the interference path of the five beams transmitted from the five output mirrors.

2. The five-channel lock-in solid-state laser according to claim 1, characterized in that, The laser unit assembly includes a pulsed xenon lamp and a neodymium-doped yttrium aluminum garnet laser crystal; The pulsed xenon lamp is used to excite the neodymium-doped yttrium aluminum garnet laser crystal, generating laser oscillation within the laser resonant cavity formed by the five output mirrors.

3. The five-channel lock-in solid-state laser according to claim 1, characterized in that, The output mirror has the same angle with the laser unit components on both sides.

4. The five-channel lock-in solid-state laser according to claim 2, characterized in that, The laser unit assembly also includes a half-wave plate, which is located on the side near the output end of the output mirror.

5. The five-channel lock-in solid-state laser according to claim 2, characterized in that, The laser unit assembly also includes an optical isolator, and the optical isolators in the five laser unit assemblies are placed in the same direction.

6. The five-channel lock-in solid-state laser according to claim 2, characterized in that, The laser unit assembly also includes a potassium dideuterium phosphate crystal and a polarizer; the potassium dideuterium phosphate crystal and the polarizer constitute an electro-optic Q-switching device for converting pulsed light into nanosecond pulses.

7. The five-channel lock-in solid-state laser according to claim 1, characterized in that, The five total reflection mirrors are all equidistant from the center of the regular pentagonal structure, which is formed by the five laser unit components.

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