Fluid delivery mounting panel and system

Abstract

An apparatus includes a mounting panel comprising a top plate having a plurality of through-holes and a plurality of apertures. An inner surface of the top plate includes a first cutout region and a channel through which a process fluid flows. The first cutout region can be a reservoir containing the process fluid therein. The plurality of through-holes are adapted to transport the process fluid through the top plate. The plurality of apertures can be adapted to attach a plurality of process fluid control components to the mounting panel. The inner plate also has a plurality of additional through-holes. The apparatus includes a bottom plate, wherein the inner plate is compressed between the top plate and the bottom plate to form an integrated metal body containing and flowing the process fluid therein.

Description

Technical Field

[0001] Embodiments of this disclosure relate to fluid delivery mounting panels and corresponding systems.

[0002] background

[0003] Current fluid handling panels (such as gas panels) are designed and constructed using separate piping, fluid control components, and monitoring sensors. These designs end up being very complex, space-consuming, and costly to implement. Troubleshooting the various controlled paths traversing such panels can be difficult because many different lines and components route from the fluid source in all different directions to the processing destination, such as the processing chamber. The risk of leaks also increases the need for more couplers, brackets, elbows, and the like when routing fluid lines. Furthermore, bringing such fluid lines to and maintaining those temperatures and / or pressures, such as to prevent condensation and particle buildup in the fluid lines, can be challenging and costly, often involving, for example, temperature control units that require further space and cost.

[0004] Overview

[0005] Some embodiments described herein cover an apparatus including a mounting panel comprising a top plate having a plurality of through-holes and a plurality of orifices of different sizes from the plurality of through-holes. An inner surface of the top plate includes a first cut-out region and a plurality of channels through which a process fluid flows. The first cut-out region may be a reservoir containing the process fluid. The plurality of through-holes are adapted to deliver the process fluid through the top plate, and the plurality of orifices are adapted to attach a plurality of process fluid control components to the mounting panel. The apparatus further includes an inner plate having a plurality of additional through-holes. The apparatus further includes a bottom plate, wherein the inner plate is pressed between the top plate and the bottom plate to form an integrated metal body containing and flowing the process fluid.

[0006] In some embodiments, a system includes a mounting panel comprising a plurality of diffusely bonded metal plates forming: a reservoir for containing a process fluid; a plurality of channels through which the process fluid flows, wherein at least one pair of the plurality of channels is connected to the reservoir; and a plurality of through-holes through which the process fluid flows into and out of a process fluid control component attached to the mounting panel. The system further includes a temperature sensor attached to the top of the mounting panel, the temperature sensor being in fluid communication with the reservoir via one of the plurality of through-holes. The system further includes a set of inlet ports attached to the mounting panel for receiving the process fluid. The system further includes at least one outlet port attached to the mounting panel for discharging the process fluid from the mounting panel.

[0007] In another or related embodiment, a method of operating a process fluid delivery system is provided, wherein the system includes a mounting panel forming a reservoir containing process fluid; a plurality of channels through which the process fluid flows; and a plurality of through-holes between the top of the mounting panel and the reservoir and between the top of the mounting panel and the plurality of channels. The system further includes a pressure sensor attached to the top of the mounting panel and in fluid communication with the reservoir. The method of operating the system includes causing the process fluid to flow from an inlet port through a first channel of the plurality of channels. The method further includes causing the process fluid to flow from the first channel through a first valve into a second channel of the plurality of channels, the second channel being in fluid communication with the reservoir. The method further includes using the pressure sensor to determine the pressure of the process fluid within the reservoir. The method further includes causing the process fluid to flow from the reservoir into a third channel of the plurality of channels.

[0008] Numerous other features are provided according to these and other embodiments of this disclosure. These other features and embodiments will become more apparent from the following detailed description, claims, and drawings.

[0009] Brief description of the attached figures

[0010] This disclosure is illustrated in the accompanying drawings by way of example and not limitation, wherein the same reference numerals indicate similar elements. It should be noted that different references to "an" or "one" embodiments herein do not necessarily refer to the same embodiment, but rather to at least one embodiment.

[0011] Figure 1A An exploded perspective view of a diffusion bonding mounting panel and a corresponding processing fluid delivery system according to an embodiment of this disclosure.

[0012] Figure 1B For the implementation of this disclosure Figure 1A A perspective view of the assembled diffusion-bonded mounting panel and the corresponding fluid delivery system.

[0013] Figure 1C For the implementation of this disclosure Figure 1A Top plan view of the assembled diffusion adhesive mounting panel and corresponding fluid delivery system.

[0014] Figure 2 This is a bottom perspective view of the top plate of a mounting panel according to an embodiment of the present disclosure.

[0015] Figure 3 This is a bottom perspective view of the inner panel of a mounting panel according to an embodiment of the present disclosure.

[0016] Figure 4 This is a schematic process diagram of a fluid transport system according to one embodiment of the present disclosure.

[0017] Figure 5 This is a cross-sectional view of a processing fluid delivery system based on an embodiment of the present disclosure, illustrating a processing flow sensor.

[0018] Figure 6 This is a cross-sectional view of a set of valves attached to a mounting panel according to an embodiment of the interconnected channel.

[0019] Figure 7 A cross-sectional view of a storage device and a processing fluid control component in the path to the storage device according to an embodiment of the present disclosure.

[0020] Figure 8 This is a cross-sectional view of a mounting panel typically along the centerline of the mounting panel, according to an embodiment.

[0021] Figure 9 This is a flowchart illustrating a method for operating a processing fluid delivery system including a diffusion adhesive mounting panel, according to various embodiments of this disclosure.

[0022] Detailed description of the implementation method

[0023] The embodiments described herein relate to apparatus, systems, and methods for causing process fluids to flow through diffusion-bonded mounting panels and corresponding process fluid delivery systems. In addition to the aforementioned drawbacks of the prior art, many fluid panels require external reservoirs to hold liquids or gases, which then supply the fluid panel with process fluids, such as gases, as needed for redirection to appropriate processing chambers. The addition of external reservoirs also increases complexity and occupies additional space in the processing wafer fab, a space requirement that grows larger and becomes more costly over time.

[0024] This disclosure addresses the aforementioned and other deficiencies by providing a mounting panel designed and manufactured from multiple metal plates, in which multiple control flow paths are integrated. More specifically, each metal plate may be molded, cast, forged, machined, or cut to define different cuts, through-holes, and orifices, which, when combined with other metal plates, form at least one reservoir and multiple channels. The multiple channels may be formed between the through-holes, between the mounting panel and various fluid handling control components, such as inlet ports, outlet ports, valves, filters, regulators, mass flow controllers, and the like, in such a manner that a process fluid flows through the through-holes. At least one pair of the multiple channels may be formed on different sides of the reservoir to allow the process fluid to flow into and out of the reservoir.

[0025] In some embodiments, a reservoir and a precisely formed through-hole and / or a metering valve at the reservoir outlet can be used instead of a mass flow controller. Because mass flow controllers are larger, require electronic and electrical controls, and are more expensive, forming at least one reservoir within the mounting panel using the disclosed integrated features saves on both cost and space. Furthermore, by mounting a temperature control plate (e.g., a heating plate or cooling plate) at the bottom of the mounting panel, the processed fluid within the reservoir, in the multiple channels, and throughout the entire attached processed fluid control unit can be maintained at a constant temperature without the cost and space required for a separate external heater or cooler. Other advantages will be apparent to those skilled in the art of the processed fluid panels and related processed fluid delivery systems discussed below.

[0026] Figure 1A An exploded perspective view of the diffusion bonding mounting panel 105 and the corresponding processing fluid delivery system 100 according to an embodiment of the present disclosure. Figure 1B For the implementation of this disclosure Figure 1A A perspective view of the assembled diffusion adhesive mounting panel 105 and the corresponding processing fluid delivery system 100. Figure 1C For the implementation of this disclosure Figure 1A Top plan view of the assembled diffusion adhesive mounting panel 105 and the corresponding processing fluid delivery system 100.

[0027] Mounting panel 105 may include a top plate 102, a bottom plate 106, and one or more intermediate plates such as an inner plate 104. Thus, although not illustrated, the mounting panel may include multiple inner plates 104. For ease of explanation, the terms "top" and "bottom" are also used, but they are interchangeable or can be understood as generally referring to the first and second outer plates of the mounting panel 105, respectively. The top plate 102, bottom plate 106, and one or more intermediate plates may be made of metal. For example, the inner plate 104 may be pressed between the top plate 102 and the bottom plate 106 to form an integrated metal body containing and flowing a processing fluid, effectively replacing existing processing fluid panels, such as gas panels. In one embodiment, the top plate 102, bottom plate 106, and one or more intermediate plates are diffusion-bonded, for example via a diffusion bonding method of steel and steel alloys under high temperature and high vacuum pressure. An example of a usable diffusion bonding is disclosed in U.S. Patent No. 7,798,388, issued September 21, 2010, which is incorporated herein by reference in its entirety.

[0028] In some embodiments, the mounting panel 105 further includes a temperature control plate 160 attached to the bottom of the mounting panel 105, for example, to the outer surface of the base plate 106. The temperature control plate 160 may have a very low profile and therefore does not occupy much space. The temperature control plate 160, which will be discussed in more detail, may be a heating plate, a cooling plate, or a combination of both, designed to provide either heating or cooling to the mounting panel 105. In some embodiments, the temperature control plate 160 is also diffusely bonded to the outer surface of the base plate 106.

[0029] See also Figures 2 to 3 , Figure 2 This is a bottom perspective view of the top plate 102 of the mounting panel 105 according to the embodiment. Figure 3 This is a bottom perspective view of the inner panel 104 of the mounting panel 105 according to an embodiment. In some embodiments, the top panel 102 includes a plurality of through holes 103 and a plurality of orifices 101. The plurality of through holes 103 may be adapted to allow processing fluid to pass through the top panel 102, and in some embodiments, at least some of the plurality of through holes 103 are dimensionally varied to allow processing fluid to flow at different rates through different fluid control paths of the mounting panel 105. The plurality of orifices 101 may be adapted to attach a plurality of processing fluid control components to the mounting panel 105. In some embodiments, the orifices 101 are located within any one of the plurality of through holes 103 or the plurality of channels 209. In various embodiments, each of the plurality of through holes 103 may generally be larger in diameter than each of the plurality of orifices 101 because the through holes 103 are designed (e.g., sized) to allow processing fluid to flow into and out of the mounting panel 105, as will be described. Conversely, the multiple orifices 101 may be designed (e.g., sized) to receive attachment mechanisms such as machine screws or bolts to attach the fluid control components to the top plate 102.

[0030] In the disclosed embodiment, the top plate 102 further includes a first cutout region 207. Figure 2 The inner panel 104 includes multiple channels 209 through which processing fluid flows within the mounting panel 105. In one embodiment, the first cut-out region 207 serves as a reservoir. The channels 209 can be formed in various shapes, including circular, semi-circular, V-shaped, etc. The inner panel 104 also includes some of a plurality of through holes 103 and may optionally include a second cut-out region 107. In some embodiments, the first cut-out region 207 and the second cut-out region 107 correspond (after diffusion bonding) to form a reservoir (preferably visible in the inner panel 104). Figures 7 to 8 middle).

[0031] In various embodiments, the reservoir (whether formed within a single plate or multiple plates) is used to store process fluids, such as gases; or the reservoir may be used to store liquids that are subsequently converted into gases, which are then circulated elsewhere within the process fluid delivery system 100. This conversion can be facilitated via a heated mounting panel, as will be discussed in more detail. The reservoir can also serve as a reference space for calibrating flow parameters and for troubleshooting and adjusting process formulations. Furthermore, the inner plate 104 may also include a plurality of channels 309 formed on the inner surface of the inner plate 104, such as… Figure 3 As shown in the diagram. These channels 309 communicate through through holes 103 in the top plate and inner plate 104. In some embodiments, multiple channels 309 may be omitted and are therefore optional. In other embodiments, additional components of the multiple inner plates also include channels.

[0032] See also Figure 2 For example, the inner surface of the top plate 102 may include a plurality of grooves 222 that define the separation between the channels and the processing fluid paths. The grooves 222 can be used for leak checks to determine the leak integrity of diffusion bonding and to prevent crosstalk between adjacent channels in the plurality of channels 209.

[0033] In some embodiments, the plurality of channels 209 includes a first channel 209A leading into the reservoir from a first side of the reservoir, and a second channel 209B exiting from a second side of the reservoir. Additionally, the plurality of through-holes 103 may include at least one precisely sized through-hole 103A positioned at the outlet of the second channel 209B and designed to control the flow rate of the process fluid leaving the reservoir. Furthermore, the plurality of through-holes may include a larger or rectangular through-hole 103B through which a flow sensor 130 is inserted. In some embodiments, the plurality of channels 109 also includes at least one reduced-size channel 211. Other sizes are contemplated. In this way, different sizes of the plurality of channels 109 enable various flow rates that may be required by different processes, and can be achieved by configuring mixed process fluid flow paths including various channel sizes.

[0034] In various embodiments, the processed fluid delivery system 100 includes a plurality of processed fluid control components attached to a mounting panel 105, for example, attached to the top of a top plate 102 using a plurality of orifices 101. These processed fluid control components may include, but are not limited to, an inlet port 110A, a valve 114A coupled to the inlet port 110A, an outlet port 110B, a valve 114B coupled to the outlet port 110B, a filter 116, a pressure regulator 120, a mass flow controller 124, at least one flow sensor 130, at least one temperature sensor 134, and at least one pressure sensor 136. Although not shown, the processed fluid control components may also include sampling ports and other measuring sensors, such as infrared sensors for detecting the composition of the processed fluid.

[0035] In some embodiments, a set of inlet ports 110A may be attached to the top of the mounting panel 105, and a set of outlet ports 110B may also be attached to the top of the mounting panel. The inlet ports 110A and the outlet ports 110B may be attached such that the connectors of the ports extend beyond the mounting panel 105 for easy access. The inlet ports may receive processed fluid, while the outlet ports may discharge processed fluid from the mounting panel 105.

[0036] In some embodiments, the first cutout region 207 includes a protrusion 201A to which a temperature sensor 134 is attached and a protrusion 201B to which a pressure sensor 138 is attached. In these embodiments, a plurality of through-holes 103 include a first through-hole 203A leading to the first cutout region 207, the first through-hole 203A being adapted to be in fluid communication with the temperature sensor 134, and a second through-hole 203B leading to the first cutout region 207, the second through-hole 203B being adapted to be in fluid communication with the pressure sensor 138. Being in fluid communication can generally represent contact with a processing fluid. In some embodiments, the sensing portion of the temperature sensor is inserted through the first through-hole 203A, and the sensing portion of the pressure sensor 138 is inserted through the second through-hole 203B. In this way, the temperature sensor 134 and the pressure sensor 138 are in fluid communication with the processing fluid contained in the storage container and are able to detect the temperature and pressure of the processing fluid within the storage container.

[0037] In various embodiments, different through-holes of the plurality of through-holes 103 lead to a corresponding one of the plurality of channels 209, each through-hole being adapted to be in fluid communication with one of the inlet ports 110A, the flow sensor 130, the pressure regulator 120, the filter 116, the valves 114A and 114B, or the outlet port 110B. In this way, the processed fluid can flow via one of a plurality of possible processed fluid paths, for example, flowing from the inlet port 110A through a first channel, from the first channel into the valve 114A, from the valve 114A into a second channel, from the second channel into the pressure regulator 120 or the filter 116, from the pressure regulator 120 or the filter 16 into a third channel, and the processed fluid flows from the third channel into the reservoir or mass flow controller 124. As the process fluid further flows into the fourth channel, the reservoir or mass flow controller 124 can further control the process fluid, wherein the process fluid flows from the fourth channel into valve 114B, the process fluid flows from valve 114B into the fifth channel, and the process fluid flows out from the fifth channel through outlet port 110B. When the process fluid... Figure 1C When the fluid flows from left to right, the path is a number of possible flow paths, such as from inlet port 110A to outlet port 110B, but different paths are envisioned that include different arrangements of different processing fluid control components or the same processing fluid control components.

[0038] Figure 4 This is a schematic process diagram of a fluid handling system 400 according to one embodiment of the present disclosure. The fluid handling system 400 includes, as follows: Figures 1A to 1C The diagram shows multiple identical or similar process fluid control components, which can be connected via multiple through-holes 103 and multiple channels 209 and 309. For example, the process fluid delivery system 400 includes a set of inlet ports 410A, at least one outlet port 410B, multiple valves 414A coupled to the inlet ports 410A, and multiple filters 416 coupled to the valves 414A. In some process fluid paths, a pressure regulator 420 is positioned between the valves 414A and the filters 416.

[0039] In one embodiment, an additional channel 450, which may be one of a plurality of channels 309, is connected between two of the plurality of channels 209, and the additional channel 450 includes one or more additional valves 414A in fluid communication with the additional channel 450. The additional channel 450 enables selective cross-mixing of the process fluid between the two of the plurality of channels 209. Furthermore, one of the plurality of channels 309 may be coupled between at least two of the valves 414B leading to the outlet port 110B, for example, to selectively cross-mix the process fluid and / or share the outlet port 110B to allow the process fluid to flow out of the mounting panel 105.

[0040] See also Figure 4 Each of the mass flow controllers 424 may be coupled to one of the filters 416. As previously mentioned, instead of the mass flow controllers 424, a reservoir 421 may be formed in the mounting panel 105. Because mass flow controllers are larger, require electronic and electrical controls, and are more expensive, integrating the reservoir 421 within the mounting panel 105 saves on these costs and the previously required space for the fluid control panel. In some embodiments, instead of the reservoir 421, one or more of the multiple channels 209 or 309 may be enlarged in width and shortened in length. This modified channel or group of channels can provide higher process fluid feed pressures while still providing a location to contain the process fluid at specific temperatures and pressures. One or more valves may be used, for example, at the inlet and / or outlet of the modified channel to control the flow rate of the modified channel that will replace the reservoir.

[0041] In some embodiments, each of the set of valves 414B may be connected between the reservoir 421, the mass flow controller 424, or the flow sensor 430 and the outlet 410B. For example... Figure 4 As can be seen, multiple flow control paths can be configured within the fluid handling delivery system 400. For example, multiple orifices 101 can be used to change the design and combination of the fluid handling control components attached to and integrated with the mounting panel 105 to produce different fluid handling delivery systems.

[0042] Figure 5 This is a cross-sectional view of a fluid delivery system 100 with a flow sensor 130 according to an embodiment of the present disclosure. As shown, the flow sensor 130 may be located in... Figure 1A The larger or rectangular through-hole 103B shown is inside the flow sensor 130. The protruding portion 530 of the flow sensor 130 may be part of the flow sensor 130, which actually passes through the interior of the channel 109 to detect the flow rate of the processed fluid within the channel 109.

[0043] In some embodiments, the processing fluid delivery system 100 further includes a first inlet port in an inlet port group 110A attached to the top of a mounting panel 105 and in fluid communication with a first channel 105A of a plurality of channels 209 via a third through-hole of a plurality of through-holes 103. A valve 114A may be attached to the top of the mounting panel 105, in fluid communication with a first channel 509A via a fourth through-hole of a plurality of through-holes; and in fluid communication with a second channel 509B of the plurality of channels 209 via a fifth through-hole of a plurality of through-holes 103.

[0044] Furthermore, a filter 116 may be attached to the top of the mounting panel 10. This filter is in fluid communication with a second channel 509B via a sixth through-hole of a plurality of through-holes 103 and with a third channel 509C, which is also in fluid communication with a flow sensor 130. In these embodiments, the flow sensor 130 is attached to the top of the mounting panel 105 and is in fluid communication with a third channel 509A of a plurality of channels 209 via a seventh through-hole of a plurality of through-holes 103, for example, via a rectangular through-hole 103B. The flow sensor 130 can sense the flow rate of the processed fluid through the first channel 509A. Another valve 114B may be attached to the mounting panel 105 and is in fluid communication with the third channel 509C and a channel 509D of a plurality of channels 309, which can deliver the processed fluid to another of the valves 114B.

[0045] Figure 6 This is a cross-sectional view of a set of valves 114B attached to a mounting panel 105 according to an embodiment. As shown, each valve 114B is connected to one of a plurality of channels 109 formed in the top plate 102, but some valve 114B regions are also connected to one of a plurality of channels 309 formed in the inner plate 104. The plurality of channels 309 cross-couple some valves 114B to cross-mix process fluids and / or share an outlet port 110B.

[0046] Figure 7 This is a cross-sectional view of the storage 721 and the fluid control components in the path to the storage 721 according to an embodiment of this disclosure. See also... Figures 1A to 1C and Figure 2 As discussed, the first cutout 207 in the top plate 102 and the second cutout 107 in the inner plate 106 can be combined to correspond within the mounting panel 105, thereby forming a storage unit 721. Furthermore, a temperature control plate 760 can be attached to the bottom of the mounting panel 105, for example, to the outer surface of the bottom plate 106. The temperature control plate 760 can have a very low profile and therefore does not occupy much space.

[0047] In various embodiments, the temperature control plate 760 may be a heating plate, a cooling plate, or a combination of both, designed to provide either heating or cooling to the mounting panel 105. In some embodiments, the temperature control plate 760 is also diffusely bonded to the outer surface of the base plate 106. In this way, because the mounting panel 105 is an integrated, diffusely bonded assembly of metal plates, the process fluid flowing through the mounting panel 105 can be maintained at a consistent temperature and pressure without the cost and space required for external temperature units, such as external heater units and associated thermocouples. Maintaining the process fluid at a consistent temperature and pressure ensures that the process fluid remains in a gaseous state for delivery from the mounting panel 105 to one or more processing chambers or other destinations. By using temperature sensor 134 and pressure sensor 138, the control unit of the process fluid delivery system 100 can track the temperature and pressure within the reservoir 721 and trigger adjustments in real time via the temperature control plate 760, for example, to maintain a consistent temperature and / or pressure despite environmental and / or component-related changes.

[0048] See also Figure 7 In one embodiment, a first inlet port of a set of inlet ports 110A is attached to the top of a mounting panel 105 and is in fluid communication with a first channel 709A of a plurality of channels 209 via a second through-hole of a plurality of through-holes 103. Furthermore, a valve 114A may be attached to the top of the mounting panel 105. Valve 114A is in fluid communication with the first channel 709A via a third through-hole of a plurality of through-holes 103; and valve 114A is in fluid communication with the second channel 709B of the plurality of channels 209 via a fourth through-hole of a plurality of through-holes 103. A pressure regulator 120 may be attached to the top of the mounting panel 105. Pressure regulator 120 is in fluid communication with the second channel 709B via a fifth through-hole of a plurality of through-holes 103; and pressure regulator 120 is in fluid communication with the third channel 709C of the plurality of channels 209 via a sixth through-hole of a plurality of through-holes 103. In this embodiment, the third channel 709C is one of a plurality of channel pairs, for example, the first channel 209A. Figure 2 ).

[0049] In one embodiment, valve 114B is attached to the top of mounting panel 105, and is in fluid communication with a fourth channel 709A of a plurality of channels 209 via a sixth through-hole of a plurality of through-holes 103; and is in fluid communication with a fifth channel 709E of a plurality of channels 209 via a seventh through-hole of a plurality of through-holes 103. In one embodiment, the fourth channel 709D is one of a plurality of channel pairs, for example, the second channel 209B. Figure 2In one embodiment, the fifth channel 709E is located among one of the plurality of channels 309 in the inner panel 104. At least one outlet port 110B is attached to the top of the mounting panel 105 and is in fluid communication with the fifth channel 709E. In a related embodiment, the valve 114B is a metering valve that is variablely and controllably used to regulate the flow rate of the processed fluid through the valve 114B, or the third channel 709C has a different size than the second channel 709B or the first channel 709A.

[0050] Figure 8 This is a cross-sectional view of the mounting panel 105, typically along its centerline according to an embodiment. This cross-sectional view has several features already illustrated and discussed in the mounting panel 105; however, in one embodiment, it illustrates how a first through-hole 803A of a plurality of through-holes 103 can pass through the top plate 102 to reach the channel 209 of the top plate 102. Figure 2 How can the second through hole 803B of the multiple through holes 103 pass through the top plate 102 and the inner plate 104 to reach the channel 309 of the inner plate 104? Figure 3 In this manner, various through-holes in the top plate 102 and inner plate 104 (or other intermediate plates) can lead to one of a combination of multiple channels 209 and 309. It will be apparent to those skilled in the art that additional intermediate plates may include additional channels and through-holes to construct more complex 3D mounting panels that include additional storage and channels, allowing for the replacement of more mass flow controllers and other control valves by incorporating the functionality of mass flow controllers and other control valves into the mounting panel.

[0051] Figure 9 This is a flowchart of a method 900 for operating a process fluid delivery system including a diffusion-bonded mounting panel, according to various embodiments of the present disclosure. For example, the process fluid delivery system 100 may include a mounting panel that forms: a reservoir containing a process fluid; a plurality of passages through which the process fluid flows; and a plurality of through-holes between the top of the mounting panel and the reservoir and between the top of the mounting panel and the plurality of channels. The process fluid delivery system may further include a pressure sensor attached to the top of the mounting panel and in fluid communication with the reservoir. Additionally, the process fluid delivery system 100 may include a temperature sensor attached to the top of the mounting panel and in fluid communication with the reservoir.

[0052] At operation 910, the system allows the processing fluid to flow from the inlet port through the first channel of a plurality of channels.

[0053] At operation 920, the system causes the process fluid to flow from the first channel through the first valve into a second channel of multiple channels. In some embodiments, the system causes the process fluid to flow directly from the second channel into the reservoir. In other embodiments, the process fluid may also flow through a pressure regulator before flowing into the reservoir, as appropriate, at operation 930.

[0054] At operation 930, the system causes the processing fluid to flow from the second channel through the pressure regulator to a third channel of multiple channels, which is in fluid communication with the reservoir.

[0055] At operation 940, the system uses a pressure sensor to determine the pressure of the processing fluid within the reservoir.

[0056] At operation 950, the system further uses a temperature sensor to determine the temperature of the processing fluid within the storage tank.

[0057] At operation 960, the system allows the processing fluid to flow from the reservoir to the fourth channel of the multiple channels.

[0058] At operation 970, the system causes the processing fluid to flow from the fourth channel through the second valve to the fifth channel of the multiple channels.

[0059] At operation 980, the system regulates the flow rate of the processing fluid passing through the second valve based on the temperature and pressure of the processing fluid in the reservoir.

[0060] At operation 990, the system allows the processed fluid to flow out from the fifth channel through the outlet port. Operations 950 to 990 are optional in various embodiments.

[0061] The preceding description sets forth numerous specific details, such as examples of particular systems, components, methods, etc., to provide a good understanding of several embodiments of this disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of this disclosure can be practiced without these specific details. In other instances, well-known components or methods have not been described in detail or have been presented in a simple block diagram format to avoid unnecessarily obscuring this disclosure. Therefore, the specific details set forth are merely exemplary. Specific implementations may differ from these exemplary details and are still contemplated within the scope of this disclosure.

[0062] Throughout this specification, the reference to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment. Therefore, the use of "in one embodiment" or "in an embodiment" in different places throughout the specification does not necessarily represent the same embodiment. Furthermore, the term "or" is intended to mean inclusive "or" rather than exclusive "or". When the terms "about" or "approximately" are used herein, they are intended to represent nominal values ​​accurate to within ±10%.

[0063] Although the operations of the methods herein are shown and described in a specific order, the order of operations for each method can be changed so that certain operations can be performed in reverse order, allowing some operations to be performed at least partially concurrently with other operations. In another embodiment, instructions or sub-operations of different operations can be performed intermittently and / or alternately.

[0064] It should be understood that the above description is intended to be illustrative and not restrictive. Many other embodiments will be apparent to those skilled in the art upon reading and understanding the above description. Therefore, the scope of this disclosure should be determined by reference to the appended claims and the full scope of their equivalents.

Claims

1. A fluid delivery mounting panel device comprising: Installation panel, including: A top plate having multiple through holes and multiple orifices, wherein the inner surface of the top plate includes a first cut area and multiple channels through which a processing fluid flows, wherein the first cut area includes a reservoir containing the processing fluid, and wherein the multiple through holes are adapted to deliver the processing fluid through the top plate, and the multiple orifices are adapted to attach multiple processing fluid control components to the mounting panel. The inner panel also has several additional through holes; and A base plate, wherein the inner plate is pressed between the top plate and the base plate to form an integrated metal body in which the processing fluid is contained and flows. The plurality of through holes include: A first through-hole leading to the first cut area, the first through-hole being adapted to be in fluid communication with a temperature sensor; and a second through-hole leading to the first cut area, the second through-hole being adapted to be in fluid communication with a pressure sensor.

2. The apparatus of claim 1, wherein the inner surface of the inner plate further includes a plurality of channels through which the processing fluid flows, and wherein the inner plate further has a second cut-out region, wherein the first cut-out region corresponds to the second cut-out region to form the reservoir.

3. The apparatus of claim 1, wherein the top plate, the inner plate, and the bottom plate are diffusion-bonded metal plates, and wherein the inner surface of the top plate further includes one or more grooves to at least facilitate inspection of the leakage integrity of the diffusion-bonded metal plate.

4. The apparatus of claim 1, wherein the plurality of channels includes a first channel leading to the reservoir from a first side of the reservoir and a second channel exiting from a second side of the reservoir, and wherein the plurality of through-holes includes at least one dimensionally precise through-hole positioned at the outlet of the second channel and designed to control the flow rate of the processed fluid exiting the reservoir.

5. The apparatus of claim 1, wherein the plurality of through-holes includes a through-hole leading to one of the plurality of channels, the through-hole being adapted to be in fluid communication with one of a flow sensor, a pressure regulator, a filter, or a valve.

6. The apparatus of claim 1, wherein at least some of the plurality of through holes are sized to allow the processing fluid to flow through the mounting panel at different rates.

7. A fluid handling and transport system, comprising: Mounting panel comprising multiple diffusion-bonded metal plates, the metal plates forming: Storage container for containing processing fluid; Multiple channels through which the processing fluid flows, wherein at least one pair of the multiple channels is connected to the reservoir; and Multiple through-holes through which the processing fluid flows into and out of a processing fluid control component attached to the mounting panel; A temperature sensor is attached to the top of the mounting panel and is in fluid communication with the reservoir via one of the plurality of through holes; A set of inlet ports is attached to the mounting panel for receiving the processing fluid; At least one outlet port is attached to the mounting panel, the at least one outlet port being used to output the processing fluid from the mounting panel, and The first inlet port of the set of inlet ports is attached to the top of the mounting panel and is in fluid communication with the first channel of the plurality of channels via the second through hole of the plurality of through holes; A first valve, attached to the top of the mounting panel, is connected via: The third through hole of the plurality of through holes is in fluid communication with the first channel; and The fourth through hole of the plurality of through holes is in fluid communication with the second channel of the plurality of channels; and A pressure regulator, attached to the top of the mounting panel, the pressure regulator via: The fifth through hole of the plurality of through holes is in fluid communication with the second channel; and The sixth through hole of the plurality of through holes is in fluid communication with the third channel of the plurality of channels, wherein the third channel is one of the plurality of channel pairs.

8. The system of claim 7, further comprising a pressure sensor attached to the top of the mounting panel, the pressure sensor being in fluid communication with the reservoir via a second of the plurality of through holes.

9. The system of claim 7, wherein the mounting panel further includes a plurality of orifices, the plurality of orifices being sized and adapted to attach a process fluid control component to the mounting panel, wherein the process fluid control component includes at least the temperature sensor, the set of inlet ports, and the at least one outlet port.

10. The system of claim 9, wherein the plurality of diffusion-bonded metal plates comprises: A top plate having multiple through holes and multiple orifices, wherein the inner surface of the top plate includes a first cut area and multiple of the multiple channels, and the multiple through holes are sized and adapted to allow the processing fluid to pass through. The inner plate has some of the plurality of through holes and a second cut area, the first cut area and the second cut area forming the storage device; and A base plate, wherein the inner plate is pressed between the top plate and the inner plate to form an integrated metal body in which the processing fluid is contained and flows.

11. The system of claim 7, further comprising a temperature control plate attached to the bottom of the mounting panel, the temperature control plate providing either heating or cooling to the mounting panel.

12. The system of claim 7, further comprising: A second valve, attached to the top of the mounting panel, is connected via: The sixth through-hole of the plurality of through holes is in fluid communication with the fourth channel of the plurality of channels, wherein the fourth channel is one of the plurality of channel pairs; and The seventh through hole of the plurality of through holes is in fluid communication with the fifth channel of the plurality of channels; and The at least one of the outlet ports is attached to the top of the mounting panel and is in fluid communication with the fifth channel.

13. The system of claim 12, wherein the second valve is a metering valve that is variablely and controllably used to regulate the flow rate of the processed fluid passing through the second valve.

14. The system of claim 12, wherein the third channel has a different size than the second channel or the first channel.

15. The system of claim 12, wherein the second valve is a metering valve that is variably and controllably adjustable to regulate the flow rate of the processed fluid passing through the second valve, and the third channel has a different size than the second channel or the first channel.

16. The system of claim 7, further comprising a flow sensor attached to the top of the mounting panel, the flow sensor being in fluid communication with a third channel of the plurality of channels via a seventh through-hole, wherein the flow sensor is used to sense the rate at which the processing fluid flows through the third channel.

17. A method of operating a process fluid delivery system, the system comprising a mounting panel forming: a reservoir containing a process fluid; and a plurality of channels through which the process fluid flows; A plurality of through-holes are located between the top of the mounting panel and the reservoir, and between the top of the mounting panel and the plurality of channels; wherein the system further includes a pressure sensor attached to the top of the mounting panel and the pressure sensor is in fluid communication with the reservoir, wherein the method of operating the processing fluid delivery system includes the following steps: The processing fluid flows from the inlet port through the first channel of the plurality of channels; The processing fluid flows from the first channel through the first valve to a second channel of the plurality of channels, the second channel being in fluid communication with the reservoir; The pressure sensor is used to determine the pressure of the processing fluid within the reservoir; and This causes the processing fluid to flow from the reservoir to the third channel of the plurality of channels. The processing fluid delivery system further includes a temperature sensor attached to the top of the mounting panel and in fluid communication with the reservoir, and the method of operating the processing fluid delivery system further includes the following steps: The temperature of the processing fluid within the storage container is determined using the temperature sensor. This causes the processing fluid to flow from the fourth channel of the plurality of channels through the second valve to the fifth channel of the plurality of channels; and The flow rate of the processing fluid passing through the second valve is adjusted based on the temperature and pressure of the processing fluid in the reservoir.

18. The method of claim 17, wherein the method of operating the processing fluid delivery system further comprises the step of causing the processing fluid to flow from the second channel through a pressure regulator to a third channel of the plurality of channels, wherein the third channel is in fluid communication with the reservoir.

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