Processing method of intelligent handle film strain gauge
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- YANGTZE DELTA REGION INST OF UNIV OF ELECTRONICS SCI & TECH OF CHINE (HUZHOU)
- Filing Date
- 2023-09-26
- Publication Date
- 2026-08-07
AI Technical Summary
[0004]针对上述技术遇到的问题,本发明提供了一种解决磁控溅射仪器没有放置刀柄的基片架的问题,提出了一种智能刀柄薄膜应变计的加工方法
[0017] (1) This invention solves the shortcomings of current magnetron sputtering instruments that do not prevent tool holder sputtering, and avoids a series of problems caused by wrapping the tool holder with tape to the substrate holder in the past. For example, it cannot be ensured that the sputtered surface of the tool holder can remain horizontal when wrapped. During the sputtering process, the tape softens due to the temperature rise caused by the sputtering process, which causes the sputtered surface of the tool holder to tilt. Too much tape will cause certain pollution to the vacuum and affect the performance of the strain gauge.
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Figure CN117265487B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of processing methods for thin film strain gauges, and in particular to a processing method for a smart tool holder thin film strain gauge. Background Technology
[0002] With the development of technology, intelligent manufacturing, such as CNC lathes, has also developed rapidly. CNC technology has not only brought revolutionary changes to other traditional industries, but has also become a representative of intelligent manufacturing, driving the development of many related industries and playing an increasingly important role in the modern machinery manufacturing industry. Traditional strain measurement is done using patch-type gauges, but because the strain gauges need to be connected with adhesive, the adhesive causes measurement lag, and the tooling generates a lot of heat during processing, causing the adhesive to soften and severely affecting the measurement accuracy of the strain gauges. Later, thin-film strain gauges were adopted, which effectively avoids the adverse effects of adhesive-bonded strain gauges, and at the same time, thin-film strain gauges have higher accuracy.
[0003] With the development of intelligent manufacturing, automated processing methods and advanced machining processes place increasingly higher demands on real-time measurement of tool stress during cutting. There is an urgent need for a stable, real-time measurement device capable of accurately measuring the stress on the tool during cutting. Traditional patch strain gauges are no longer sufficient to meet current measurement requirements. In sputtering, the curved surface of the tool holder prevents sputtering, and current sputtering instruments lack dedicated sample holders for irregularly shaped samples like tool holders. Previously, sputtering tool holders were simply wrapped directly with tape around the substrate holder. This method suffers from the risk of the tape softening and deforming due to high temperatures during sputtering, making it difficult to ensure the sputtered surface remains level with the target. Furthermore, excessive tape can affect the vacuum, causing contamination and impacting the quality of the sputtered film. Summary of the Invention
[0004] To address the problems encountered in the aforementioned technologies, this invention provides a solution to the problem of the lack of a substrate holder for placing the tool holder in magnetron sputtering instruments, and proposes a processing method for intelligent tool holder thin film strain gauges.
[0005] This invention is achieved through the following technical solution:
[0006] A method for manufacturing an intelligent tool holder thin-film strain gauge, wherein the tool holder required by the method consists of a connecting base plate, a front end fixing component, a rear end fixing component, adjustable height hexagonal studs, a positioning block, and a positioning block fixing component. The front end fixing component is fixed to the upper left side of the connecting base plate with screws, the rear end fixing component is fixed to the upper right side of the connecting base plate with screws, four adjustable height hexagonal studs are respectively fixed to the lower four corners of the connecting base plate with screws, and the positioning block is fixed to the lower center of the front end fixing component with screws. The tool holder is placed between the front end fixing component and the rear end fixing component, so that the positioning block is inserted into the tool holder positioning pin.
[0007] Furthermore, the front-end fixing component is fixed to the upper left of the connecting base plate with screws. The two ends of the front-end fixing component are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected with M3 screws.
[0008] Furthermore, the rear end fastener is fixed to the upper right rear of the connecting base plate. The two ends of the rear end fastener are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
[0009] Furthermore, there is a groove below the front fixing component, and the positioning block is fitted into the groove below the front fixing component by a screw transition fit.
[0010] Furthermore, the groove has a depth of 1 mm and a width of 16.1 mm.
[0011] Furthermore, the groove has two M3 threaded through holes.
[0012] Furthermore, the left side of the tool holder front end fixing part has two M3 threaded countersunk holes, and the positioning block fixing part has four M3 through holes. The positioning block fixing part is fixed to the left side of the front end fixing part by two M3 screws, and the positioning block is fixed to the upper end of the positioning block fixing part by two M3 screws. When the tool holder sputters the sputtering surface, the positioning pin is inserted into the positioning block below the front end fixing part. When the tool holder sputters the sputtering surface, the positioning pin is inserted into the positioning block fixing part to ensure that the sputtered surface is horizontal and to prevent the tool holder from slipping due to lack of fixation during sputtering, thus preventing the sputtered surface from being unable to remain horizontal.
[0013] Furthermore, the thickness of the connecting base plate is 5mm.
[0014] Furthermore, there is an M6 threaded through hole at each of the four corners, and all four corners are rounded with C5 fillet, with reinforcing ribs added in the middle.
[0015] Furthermore, the height-adjustable hexagonal stud has a 10mm long M6 stud at one end. During installation, the stud is screwed into the M6 threaded through holes at the four corners of the base plate. The height is adjusted by the depth of screwing, thereby adjusting the target base distance.
[0016] Compared with the prior art, the present invention has the following beneficial technical effects:
[0017] (1) This invention solves the shortcomings of current magnetron sputtering instruments that do not prevent tool holder sputtering, and avoids a series of problems caused by wrapping the tool holder with tape to the substrate holder in the past. For example, it cannot be ensured that the sputtered surface of the tool holder can remain horizontal when wrapped. During the sputtering process, the tape softens due to the temperature rise caused by the sputtering process, which causes the sputtered surface of the tool holder to tilt. Too much tape will cause certain pollution to the vacuum and affect the performance of the strain gauge.
[0018] (2) The present invention adds a moisture-proof layer, which helps to extend the life of the tool holder in the presence of coolant and ensures the working performance of the strain gauge. Attached Figure Description
[0019] Figure 1 This is a perspective view of the magnetron sputtering tool holder described in the example of the present invention.
[0020] Figure 2 This is a top view of the magnetron sputtering tool holder described in the example of the present invention.
[0021] Figure 3 This is a front view of the knife handle described in the example of the present invention.
[0022] Figure 4 This is a rear view of the knife handle described in an example of the present invention. Detailed Implementation
[0023] The following is in conjunction with the appendix Figure 1-4 The present invention will be further illustrated by the embodiments.
[0024] A method for processing an intelligent tool holder thin-film strain gauge is disclosed. The tool holder required for this processing method consists of six parts: a connecting base plate 1, a front end fixing member 2, a rear end fixing member 3, adjustable height hexagonal studs 9, a positioning block 11, and a positioning block fixing member 6. The front end fixing member 2 is fixed to the upper left side of the connecting base plate 1 by screws, the rear end fixing member 3 is fixed to the upper right side of the connecting base plate 1 by screws, four adjustable height hexagonal studs 9 are respectively fixed to the lower four corners of the connecting base plate 1 by screws, and the positioning block 11 is fixed to the lower center of the front end fixing member 2 by screws. The tool holder is placed between the front end fixing member 2 and the rear end fixing member 3, so that the positioning block 11 is inserted into the tool holder positioning pins 17 and 13.
[0025] The front end fastener 2 is fixed to the upper left of the connecting base plate 1 by screws. The two ends of the front end fastener 2 are inserted into the grooves of the connecting base plate 1 to form a transition fit, and are fixedly connected by M3 screws.
[0026] The rear end fastener 3 is fixed to the upper right rear of the connecting base plate 1. Both ends of the rear end fastener 3 are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
[0027] There is a groove 1mm deep and 16.1mm wide below the front fixing part 2. Two M3 threaded through holes are opened in the groove. The positioning block 11 is embedded into the groove below the front fixing part 2 by a screw transition fit.
[0028] The tool holder front end fixing part 2 has two M3 threaded countersunk holes on the left side. The positioning block fixing part 6 has four M3 through holes 10. The positioning block fixing part 6 is fixed to the left side of the front end fixing part 2 by two M3 screws. The positioning block 11 is fixed to the upper end of the positioning block fixing part 6 by two M3 screws. When sputtering the tool holder sputtering surfaces 14 and 18, the positioning pins 17 and 13 are inserted into the positioning block below the front end fixing part 2. When sputtering the tool holder sputtering surfaces 15 and 16, the positioning pins 17 and 13 are inserted into the positioning block fixing part 6 to ensure that the sputtered surface is horizontal and to prevent the tool holder from sliding due to lack of fixation during sputtering, thus preventing the sputtered surface from being unable to remain horizontal.
[0029] The thickness of the connecting base plate 1 is 5mm, and there is an M6 threaded through hole at each of the four corners. All four corners are rounded with C5, and a reinforcing rib 5 is added in the middle.
[0030] The adjustable height hexagonal stud 9 has a 10mm long M6 stud at one end. During installation, the stud is screwed into the M6 threaded through holes at the four corners of the base plate. The height is adjusted by the depth of screwing, thereby adjusting the target base distance.
[0031] After assembling the tool holder, prepare it for use. Before sputtering, cut 10mm x 10mm square grooves, 1mm deep, on each of the four sides of the tool holder. Grind and polish the grooves before sputtering to ensure a roughness of less than or equal to 0.2μm. Clean the cleaned square grooves with alcohol and acetone, then dry them with nitrogen. Wrap the surface of the tool holder, except for the square grooves to be sputtered, with aluminum foil. Then place the tool holder into the assembled tool holder, and engage the positioning block with the positioning pin on the tool holder to ensure the sputtered surface remains horizontal.
[0032] The tool holder and tool shank are placed as a whole into the vacuum chamber of the sputtering apparatus. The target-substrate distance is adjusted using four height-adjustable hexagonal studs. When adjusting the target-substrate distance, a level is placed on the connecting base plate to ensure that the sputtering surface of the tool shank is horizontal. After adjusting the height, the level is removed. 500-micrometer Al2O3 / Si3N4 layers are sputtered onto the square groove as insulating layers, followed by an 800-micrometer NiCr (80% Cr, 20% Ni) alloy layer as a functional layer. Finally, a 300-micrometer Al2O3 layer is sputtered as a protective layer.
[0033] After sputtering a layer of Al2O3 as a protective layer, a layer of moisture-proof adhesive is applied to prevent the coolant from corroding and affecting the strain gauge during operation.
[0034] Below the four hexagonal studs, screw in 20mm long M6 studs to increase the range of target distance adjustment.
[0035] The above embodiments are only used to illustrate the present invention and are not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions also fall within the scope of the present invention, and the patent protection scope of the present invention should be defined by the claims.
Claims
1. A method for manufacturing an intelligent tool holder thin-film strain gauge, characterized in that, The tool holder required for this machining method consists of a connecting base plate, a front fixing part, a rear fixing part, adjustable height hexagonal studs, a positioning block, and a positioning block fixing part. The front fixing part is fixed to the upper left side of the connecting base plate with screws, and the rear fixing part is fixed to the upper right side of the connecting base plate with screws. Four adjustable height hexagonal studs are fixed to the lower four corners of the connecting base plate with screws. The positioning block is fixed to the lower center of the front fixing part with screws. The tool holder is placed between the front fixing part and the rear fixing part, so that the positioning block is inserted into the tool holder positioning pin. The front-end fastener is fixed to the upper left of the connecting base plate with screws. The two ends of the front-end fastener are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected with M3 screws. The rear end fastener is fixed to the upper right rear of the connecting base plate. Both ends of the rear end fastener are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws. There is a groove below the front fixing component, and the positioning block is fitted into the groove below the front fixing component by means of a screw transition fit; The tool holder front end fixing part has two M3 threaded countersunk holes on the left side, and the positioning block fixing part has four M3 through holes. The positioning block fixing part is fixed to the left side of the front end fixing part by two M3 screws, and the positioning block is fixed to the upper end of the positioning block fixing part by two M3 screws. When sputtering the tool holder sputtering surface, the positioning pin is inserted into the positioning block below the front end fixing part. When sputtering the tool holder sputtering surface, the positioning pin is inserted into the positioning block fixing part to ensure that the sputtered surface is horizontal and to prevent the tool holder from slipping due to lack of fixation during sputtering, thus preventing the sputtered surface from not remaining horizontal.
2. The processing method of a smart tool holder thin-film strain gauge according to claim 1, characterized in that: The groove is 1 mm deep and 16.1 mm wide.
3. The processing method of a smart tool holder thin-film strain gauge according to claim 2, characterized in that: The groove has two M3 threaded through holes.
4. The processing method of a smart tool holder thin-film strain gauge according to claim 1, characterized in that: The thickness of the connecting base plate is 5mm.
5. The processing method of a smart tool holder thin-film strain gauge according to claim 1, characterized in that: There is an M6 threaded through hole at each of the four corners, and all four corners are rounded with C5 fillet, with a reinforcing rib in the middle.
6. The processing method of a smart tool holder thin-film strain gauge according to claim 1, characterized in that: The adjustable height hexagonal stud has a 10mm long M6 stud at one end. During installation, the stud is screwed into the M6 threaded through holes at the four corners of the base plate. The height is adjusted by the depth of screwing, thereby adjusting the target base distance.
Citation Information
Patent Citations
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