A carrier boat and diffusion apparatus

Abstract

The application discloses a kind of bearing boat and diffusion equipment, it is related to photovoltaic cell manufacturing technical field.The bearing boat includes left side plate, right side plate, upper rack rod and lower rack rod, upper rack rod, lower rack rod are respectively provided with rack groove, the both ends of upper rack rod, the both ends of lower rack rod are respectively connected with left side plate, right side plate, left side plate and right side plate are all bent, left side plate and right side plate are opposite and staggered arrangement, upper rack rod is parallel to lower rack rod.The bearing of the application can make substrate obtain certain angle inclination and mutually adhere under the limiting effect of gravity and rack groove, to improve the condition that substrate occurs back side around diffusion in diffusion process, reduce production cost, improve product performance.

Description

Technical Field

[0001] This invention relates to the field of photovoltaic cell manufacturing technology, and more specifically, to a carrier boat and diffusion equipment. Background Technology

[0002] In the manufacturing process of photovoltaic cells, a quartz boat carries silicon wafers, and a boat support holds the quartz boat and sends it into a diffusion furnace for diffusion treatment. Existing quartz boats typically consist of a rectangular frame structure formed by left and right side plates and upper and lower toothed rods, keeping the silicon wafers roughly vertical. However, to perform single-sided coating and increase production capacity, two silicon wafers are usually loaded into each toothed slot on the quartz boat's toothed rods. Since the angle between the weight of the silicon wafer and its own plate surface is almost zero, both wafers remain vertical under gravity, creating a gap between them. During the diffusion process, a large amount of diffusion gas enters this gap, causing back-side diffusion, which not only increases production costs but also affects product performance. Summary of the Invention

[0003] The purpose of this invention is to provide a carrier boat that allows substrates, such as silicon wafers, to be tilted at an angle and fit together, thereby improving the situation of back-side diffusion of the substrate during the diffusion process, reducing production costs and improving product performance; to this end, another purpose of this invention is to provide a diffusion device.

[0004] This invention provides a technical solution:

[0005] A support boat includes a left side plate, a right side plate, an upper toothed rod, and a lower toothed rod. The upper toothed rod and the lower toothed rod are respectively provided with toothed grooves. The two ends of the upper toothed rod and the two ends of the lower toothed rod are respectively connected to the left side plate and the right side plate. The left side plate and the right side plate are both bent. The left side plate and the right side plate are arranged opposite to each other and staggered. The upper toothed rod is parallel to the lower toothed rod.

[0006] The left side plate is provided with a first boat ear, the right side plate is provided with a second boat ear, the left side plate has a first plate segment and a second plate segment connected together; the right side plate has a third plate segment and a fourth plate segment connected together;

[0007] With the line connecting the first and second boat ears as the baseline, the first plate segment and the third plate segment are both perpendicular to the baseline, and the second plate segment and the fourth plate segment are inclined relative to the baseline and located between the first plate segment and the third plate segment.

[0008] The two ends of the upper toothed rod are respectively connected to the first plate segment and the fourth plate segment, and the two ends of the lower toothed rod are respectively connected to the second plate segment and the third plate segment. The center lines of the upper toothed rod and the lower toothed rod are at an angle to the reference line.

[0009] In an optional embodiment, one end of the upper toothed rod is connected to the end of the first plate segment away from the second plate segment, and one end of the lower toothed rod is connected to the end of the second plate segment away from the first plate segment. The ratio of the length of the first plate segment to the length of the second plate segment is in the range of 1 / 4 to 1.

[0010] In an optional embodiment, the other end of the upper toothed rod is connected to the end of the fourth plate segment away from the third plate segment, and the other end of the lower toothed rod is connected to the end of the third plate segment away from the fourth plate segment. The ratio of the length of the third plate segment to the length of the fourth plate segment is in the range of 1 / 4 to 1.

[0011] In an optional embodiment, the first plate segment and the second plate segment form an angle greater than 90° and less than 180°.

[0012] In an optional embodiment, the third plate segment and the fourth plate segment form an angle greater than 90° and less than 180°.

[0013] In an optional embodiment, the angle between the centerline of the upper toothed bar and the reference line is within the range of 1° to 89°, and / or,

[0014] The angle between the centerline of the lower gear and the reference line is within the range of 1° to 89°.

[0015] In an optional embodiment, the angle between the centerline of the upper gear and the reference line is within the range of 10° to 89°, and / or,

[0016] The angle between the centerline of the lower gear and the reference line is within the range of 10° to 89°.

[0017] In an optional embodiment, the second plate segment is perpendicular to the center lines of the upper and lower toothed bars, and / or,

[0018] The fourth plate segment is perpendicular to the center lines of the upper and lower toothed rods, respectively.

[0019] The present invention also provides a diffusion device, including the aforementioned carrier boat, the carrier boat including a left side plate, a right side plate, an upper toothed rod and a lower toothed rod, the upper toothed rod and the lower toothed rod respectively having toothed grooves, the two ends of the upper toothed rod and the two ends of the lower toothed rod respectively being connected to the left side plate and the right side plate, the left side plate and the right side plate being both bent, the left side plate and the right side plate being opposite to each other and staggered, and the upper toothed rod being parallel to the lower toothed rod.

[0020] In an optional embodiment, the diffusion device further includes a diffusion furnace tube, and at least two of the carrier boats are arranged sequentially along the length of the diffusion furnace tube inside the diffusion furnace tube;

[0021] After each of the preceding carrier boats rotates 180° around the line connecting the boat ears provided on its left and right sides as the axis of rotation, its projection on the cross-section of the diffusion furnace tube coincides with the projection of each of the adjacent following carrier boats on the cross-section of the diffusion furnace tube.

[0022] The beneficial effects of this invention are as follows: Compared with the prior art, the carrier boat provided by this invention, by adopting a bent left side plate and a right side plate and their relative and staggered arrangement, allows the upper and lower toothed rods, which are connected to the left side plate and the right side plate respectively and are parallel to each other, to have a certain tilt angle. When the carrier substrate is placed in the diffusion equipment for diffusion process, the two substrates in a single tooth groove can obtain a certain angle of tilt and stick together under the action of gravity and the limiting action of the tooth groove, thereby improving the situation of back-side diffusion of the substrate in the diffusion process, reducing production costs and improving product performance. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 A schematic diagram of the structure of the support boat provided for an embodiment of the present invention;

[0025] Figure 2 A partial structural schematic diagram of a diffusion device provided for an embodiment of the present invention.

[0026] Icons: 10-Diffusion device; 11-Diffusion furnace tube; 100-Supporting boat; 110-Left side plate; 111-First plate segment; 112-Second plate segment; 113-First boat lug; 120-Right side plate; 121-Third plate segment; 122-Fourth plate segment; 123-Second boat lug; 130-Upper toothed rod; 140-Lower toothed rod; 150-Tooth groove. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] In the description of this invention, it should be understood that the terms "upper," "lower," "inner," "outer," "left," "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this invention and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0031] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0032] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0033] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0034] Please see Figure 1 and Figure 2 , Figure 1 The diagram shown is a structural schematic of the carrier boat 100 provided in this embodiment.

[0035] The carrier boat 100 provided in this embodiment, for example, can be a carrier boat made of quartz material, is used to load substrates, such as silicon wafers. After the substrate is loaded, it is supported by the boat support (not shown in the figure) and sent into the diffusion furnace tube for diffusion treatment. The carrier boat 100 provided in this embodiment has a certain tilt angle for the upper and lower toothed bars through the bending shape and the opposite and staggered side plates. When the substrate is carried and placed in the diffusion equipment for diffusion process, the two substrates in a single tooth groove can obtain a certain angle of tilt and stick together under the action of gravity and the limiting action of the tooth groove, thereby improving the situation of back-side diffusion of the substrate in the diffusion process, reducing production costs and improving product performance.

[0036] Specifically, the carrier boat 100 includes a left side plate 110, a right side plate 120, an upper toothed rod 130, and a lower toothed rod 140. The upper toothed rod 130 and the lower toothed rod 140 are respectively provided with toothed grooves 150. The toothed grooves are used to insert substrates and can limit the positioning of the substrates. The left side plate 110 and the right side plate 120 are both bent. The left side plate 110 and the right side plate 120 are opposite to each other and staggered. The two ends of the upper toothed rod 130 and the two ends of the lower toothed rod 140 are respectively connected to the left side plate 110 and the right side plate 120. The upper toothed rod 130 is parallel to the lower toothed rod 140.

[0037] The depth direction of the groove 150 is perpendicular to the center line of the upper tooth 130 and the lower tooth 140. There are multiple grooves 150 on both the upper tooth 130 and the lower tooth 140. The grooves 150 on the upper tooth 130 and the lower tooth 140 correspond one-to-one, and the groove openings of the grooves 150 on the upper tooth 130 and the lower tooth 140 are opposite to each other. A corresponding set of grooves 150 is used to insert two identical substrates.

[0038] Understandably, to ensure stable substrate insertion, the number of upper toothed rods 130 and lower toothed rods 140 can be adjusted according to actual application conditions. In this embodiment, it is preferable that there are two upper toothed rods 130 and two lower toothed rods 140. In practical applications, when the substrate is inserted, the toothed grooves 150 on the two upper toothed rods 130 hold the substrate from the top, and the toothed grooves 150 on the two lower toothed rods 140 hold the substrate from the bottom. Thus, the toothed grooves on the two upper toothed rods 130 and the two lower toothed rods 140 together achieve four-point positioning and support for the substrate. The line connecting the four positioning points forms a rectangular or square surface, ensuring a stable and reliable substrate insertion.

[0039] In this embodiment, the left side plate 110 is provided with a first boat lug 113, and the right side plate 120 is provided with a second boat lug 123. The left side plate 110 has a first plate segment 111 and a second plate segment 112 connected together, and the right side plate 120 has a third plate segment 121 and a fourth plate segment 122 connected together. The line connecting the first boat lug 113 and the second boat lug 123 is used as the baseline. Figure 1 In the dotted line L, the first plate segment 111 and the third plate segment 121 are both perpendicular to the baseline, and the second plate segment 112 and the fourth plate segment 122 are set at an angle relative to the baseline and are located between the first plate segment 111 and the third plate segment 121.

[0040] For ease of processing, in this embodiment, the first plate segment 111 and the second plate segment 112 are integrally formed, and the third plate segment 121 and the fourth plate segment 122 are integrally formed. In other embodiments, the first plate segment 111 and the second plate segment 112, and the third plate segment 121 and the fourth plate segment 122 can also be connected by other connection methods, including welding.

[0041] The two ends of the upper toothed rod 130 are connected to the first plate segment 111 and the fourth plate segment 122 respectively, and the two ends of the lower toothed rod 140 are connected to the second plate segment 112 and the third plate segment 121 respectively. The center lines of the upper toothed rod 130 and the lower toothed rod 140 are at an angle to the reference line.

[0042] When the line connecting the first boat lug 113 and the second boat lug 123 is horizontal, i.e., the baseline is horizontal, the carrier boat 100 provided in this embodiment can also be adapted to existing boat supports. The boat support supports the first boat lug 113 and the second boat lug 123, and the carrier boat 100 carrying the substrate is supported by the first boat lug 113 and the second boat lug 123, thereby placing it in the diffusion furnace tube for diffusion process; such as Figure 1 As shown, the first boat ear 113 can be provided on the first plate segment 111, and the second boat ear 123 can be provided on the third plate segment 121. The first plate segment 111 and the third plate segment 121 are both perpendicular to the baseline and thus arranged vertically.

[0043] In this state, the upper end of the first plate segment 111 is connected to one end of the upper toothed rod 130 in the vertical direction, and the lower end is connected to the upper end of the second plate segment 112. The second plate segment 112 is inclined towards the right side plate 120 in the vertical direction, and the lower end of the second plate segment 112 is connected to one end of the lower toothed rod 140. The upper end of the third plate segment 121 is connected to the lower end of the fourth plate segment 122 in the vertical direction, and the lower end is connected to the other end of the lower toothed rod 140. The fourth plate segment 122 is inclined towards the left side plate 110 in the vertical direction, and the upper end of the fourth plate segment 122 is connected to the other end of the upper toothed rod 130. The upper toothed rod 130 and the lower toothed rod 140 are both inclined relative to the horizontal direction.

[0044] Because the upper toothed bar 130 and lower toothed bar 140 are inclined relative to the horizontal direction, that is, the depth direction of the tooth groove 150 is also inclined relative to the vertical direction, the substrate is tilted at a certain angle relative to the vertical direction after the substrate insertion is completed. In this state, the gravity on the substrate forms an angle with the plane on which the substrate is located, so that the two substrates in the same tooth groove 150 can fit together under the action of gravity and the limiting action of the tooth groove, reducing the size of the gap between the two substrates, thereby preventing the diffused airflow from reaching between the two substrates and improving the situation of back-side diffusion.

[0045] In existing products on the market, the line connecting the substrate and its two lugs is perpendicular after substrate insertion. During diffusion processing, the lug support provides horizontal support to the two lugs, meaning the two lines between the lugs are horizontal. In this state, the substrate is roughly vertical, and the angle between its gravity and its own surface is almost zero, resulting in a large gap between the two substrates. This allows a large amount of diffusion airflow to enter the gap between the two substrates, causing back-side diffusion. To remove this diffusion, an additional cleaning process is required, increasing production costs. Furthermore, this cleaning process can alter the substrate surface morphology, affecting substrate quality.

[0046] In this case, replacing the existing product with the carrier boat 100 provided in this embodiment and applying it to the diffusion process can ensure that the two substrates in the same groove 150 are bonded to each other, improve the situation of back-side diffusion, thereby optimizing or eliminating the configuration and cleaning process, achieving the effect of reducing production costs and improving product performance.

[0047] Furthermore, existing products on the market have straight-plate structures for their left and right side panels. If the upper and lower toothed rods are tilted at a large angle relative to the horizontal, the cross-sections of the upper and lower toothed rods and the left and right side panels form a parallelogram structure. Due to the large angle of tilt of the upper and lower toothed rods relative to the horizontal, this parallelogram structure will form a set of extremely sharp external angles, corresponding to... Figure 1Angles a and b in the parallelogram structure are too protruding and will interfere with the boat support and diffusion furnace tube 11 in practical applications, meaning they cannot be adapted to the existing boat support and diffusion furnace tube 11.

[0048] In the carrier boat 100 provided in this embodiment, the second plate segment 112 of the left plate 110 is inclined toward the right plate 120 relative to the first plate segment 111, and the fourth plate segment 122 of the right plate 120 is inclined toward the left plate 110 relative to the third plate segment 121. The cross-sections of the left plate 110, the right plate 120, the upper toothed rod 130 and the lower toothed rod 140 form a hexagonal structure.

[0049] This is equivalent to increasing the original acute angles a and b on the basis of the existing parallelogram structure without changing the vertical orientation of the first plate segment 111 and the third plate segment 121, thus forming new angles A and B. In other words, the protrusion of this set of opposite angles is reduced, thereby avoiding interference with the boat support and diffusion furnace tube 11 in actual applications, thus adapting to the existing boat support and diffusion furnace tube 11 and further reducing production costs.

[0050] In other words, the carrier boat 100 provided in this embodiment, while adapting to the existing boat support and diffusion furnace tube 11, also allows the upper toothed rod 130 and lower toothed rod 140 to tilt relative to the baseline within a large angle range, thereby ensuring that the inserted substrate can tilt within a large angle range, further improving the tightness of the two substrates in the same toothed groove 150 and obtaining excellent diffusion effect.

[0051] Specifically, the angle between the centerline of the upper gear 130 and the reference line is within the range of 1° to 89°. The upper gear 130 is parallel to the lower gear 140. Similarly, the angle between the centerline of the lower gear 140 and the reference line is within the range of 1° to 89°, which is equivalent to... Figure 1 The α angle is in the range of 1° to 89°.

[0052] Preferably, in this embodiment, the angle between the centerline of the upper toothed bar 130 and the reference line is within the range of 10° to 89°, and the angle between the centerline of the lower toothed bar 140 and the reference line is within the range of 10° to 89°, which is equivalent to... Figure 1 The α angle is in the range of 10° to 89°.

[0053] Since the substrate, when fully inserted, is perpendicular to the center lines of the upper toothed bar 130 and the lower toothed bar 140, it is equivalent to... Figure 1 The β angle is within the range of "90° + α angle", that is, 91°~179° or 100°~179°. It should be noted that... Figure 1The dashed line 'h' in the figure refers to the plane containing the same set of tooth grooves 150 on the upper toothed bar 130 and the lower toothed bar 140, representing the plane in which the substrate is located in the insertion state. In other words, preferably, the carrier boat 100 provided in this embodiment can accommodate the substrate being tilted within a large angle range of 91° to 179° relative to the horizontal plane, ensuring that the two substrates within the same tooth groove 150 fit together more tightly, thereby achieving a better anti-winding effect.

[0054] Furthermore, in this embodiment, the first plate segment 111 and the second plate segment 112 form an angle greater than 90° and less than 180°, and the third plate segment 121 and the fourth plate segment 122 form an angle greater than 90° and less than 180°, that is... Figure 1 Both the θ angle and the μ angle are within the range of 90° to 180°.

[0055] It is understandable that, in addition to the included angles between the first plate segment 111 and the second plate segment 112, and between the third plate segment 121 and the fourth plate segment 122, the length ratios of the first plate segment 111 and the second plate segment 112, and the length ratios of the third plate segment 121 and the fourth plate segment 122, will also affect the compatibility of the carrier boat 100 with the existing boat support and diffusion furnace tube 11. It should be noted that the length ratios of the first plate segment 111 and the second plate segment 112, and the length ratios of the third plate segment 121 and the fourth plate segment 122 refer to comparisons made in a plane that is simultaneously perpendicular to the first plate segment 111, the second plate segment 112, the third plate segment 121, and the fourth plate segment 122.

[0056] To further ensure that the substrate can obtain a sufficient tilt angle while adapting to the existing boat support and diffusion furnace tube 11, in this embodiment, the upper toothed rod 130 is connected to the end of the first plate segment 111 away from the second plate segment 112, and the lower toothed rod 140 is connected to the end of the second plate segment 112 away from the first plate segment 111. The ratio of the length of the first plate segment 111 to the length of the second plate segment 112 is in the range of 1 / 4 to 1.

[0057] Similarly, the upper toothed rod 130 is connected to the end of the fourth plate segment 122 away from the third plate segment 121, and the lower toothed rod 140 is connected to the end of the third plate segment 121 away from the fourth plate segment 122. The ratio of the length of the third plate segment 121 to the length of the fourth plate segment 122 is in the range of 1 / 4 to 1.

[0058] It is understandable that in embodiments where the connection position between the first plate segment 111 and the upper toothed rod 130 is not at the end of the first plate segment 111, or the connection position between the second plate segment 112 and the lower toothed rod 140 is not at the end of the second plate segment 112, it is necessary to ensure that the distance between the position on the first plate segment 111 where the upper toothed rod 130 is connected and the end connected to the second plate segment 112, and the distance between the position on the second plate segment 112 where the lower toothed rod 140 is connected and the end connected to the first plate segment 111, are within the range of 1 / 4 to 1.

[0059] Similarly, in embodiments where the connection position between the third plate segment 121 and the lower toothed rod 140 is not at the end of the third plate segment 121, or the connection position between the fourth plate segment 122 and the upper toothed rod 130 is not at the end of the fourth plate segment 122, it is necessary to ensure that the distance between the position on the third plate segment 121 where the lower toothed rod 140 is connected and the end connecting to the fourth plate segment 122, and the distance between the position on the fourth plate segment 122 where the upper toothed rod 130 is connected and the end connecting to the third plate segment 121, are within the range of 1 / 4 to 1.

[0060] Understandably, in order to avoid the reduction in utilization rate of the upper toothed bar 130 and the lower toothed bar 140 due to their inclined arrangement, i.e., the reduction in their respective usable length, in this embodiment, the second plate segment 112 is perpendicular to the center line of the upper toothed bar 130 and the lower toothed bar 140, and the fourth plate segment 122 is perpendicular to the center line of the upper toothed bar 130 and the lower toothed bar 140.

[0061] In summary, the carrier boat provided by this invention not only enables substrates, such as silicon wafers, to be tilted at an angle so that they can fit together under the action of gravity and the limiting effect of the grooves, thus improving the situation of back-side expansion of the substrate during the diffusion process, especially by achieving a large-angle tilt, thereby effectively avoiding back-side expansion of the substrate during the diffusion process, achieving the effects of reducing production costs and improving product performance, but also can be adapted to existing boat supports and diffusion furnace tubes to further reduce production costs, improve utilization rate, ensure the number of wafers inserted into the carrier boat, and thus ensure production capacity.

[0062] Please see Figure 2 , Figure 2 The diagram shown is a partial structural schematic of the diffusion device 10 provided in this embodiment.

[0063] The diffusion device 10 provided in this embodiment includes a diffusion furnace tube 11 and the aforementioned support boats 100, with at least two support boats 100 arranged sequentially within the diffusion furnace tube 11 along its length. It is understood that the diffusion device 10 provided in this embodiment also includes a boat support (not shown in the figure), which supports the plurality of support boats 100 arranged sequentially along the length of the diffusion furnace tube 11.

[0064] In the arrangement of multiple carrier boats 100, the projection of each leading carrier boat 100 on the cross-section of the diffusion furnace tube 11 after rotating 180° about the line connecting the boat ears provided on the left side plate 110 and the right side plate 120 coincides with the projection of each adjacent trailing carrier boat 100 on the cross-section of the diffusion furnace tube 11.

[0065] In other words, the multiple carrier boats 100 are arranged alternately in two states, before and after rotating 180° around the baseline as the axis of rotation, along the length of the diffusion furnace tube 11. This not only increases the area occupied by the multiple carrier boats 100 on the cross-section of the diffusion furnace tube 11 and improves the space utilization rate, but also improves the stability of the overall structure.

[0066] Therefore, the diffusion device 10 provided in this embodiment has the characteristics of higher space utilization, better structural stability, and better diffusion and anti-scraping effect.

[0067] It is understandable that the angle between the centerline of the upper toothed bar 130 and the reference line is within the range of 1° to 89°, and the angle between the centerline of the lower toothed bar 140 and the reference line is within the range of 1° to 89°. Therefore, after the supporting boat 100 rotates 180° around the line connecting the boat ears on the left side plate 110 and the right side plate 120 (i.e., the reference line) as the axis of rotation, the angle between the centerline of the upper toothed bar 130 and the reference line is within the range of 179° to 91°, and the angle between the centerline of the lower toothed bar 140 and the reference line is within the range of 179° to 91°. Thus, the substrate is within the range of 89° to 1° relative to the horizontal plane. That is, under the action of gravity and the limiting action of the tooth groove 150, relative to the horizontal plane... Figure 1 Before rotation, the substrate is tilted to the left at an angle of 91° to 179°. After rotation, the substrate is tilted to the right at an angle of 89° to 1°, thus meeting the needs of different working conditions.

[0068] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A support boat, comprising a left side plate (110), a right side plate (120), an upper toothed rod (130), and a lower toothed rod (140), wherein the upper toothed rod (130) and the lower toothed rod (140) are respectively provided with toothed grooves (150), and the two ends of the upper toothed rod (130) and the two ends of the lower toothed rod (140) are respectively connected to the left side plate (110) and the right side plate (120), characterized in that, The left side plate (110) and the right side plate (120) are both bent. The left side plate (110) and the right side plate (120) are arranged opposite to each other and staggered. The upper toothed rod (130) is parallel to the lower toothed rod (140).

2. The carrier boat according to claim 1, characterized in that, The left side plate (110) is provided with a first boat ear (113), the right side plate (120) is provided with a second boat ear (123), the left side plate (110) has a first plate segment (111) and a second plate segment (112) connected to each other; the right side plate (120) has a third plate segment (121) and a fourth plate segment (122) connected to each other; With the line connecting the first boat ear (113) and the second boat ear (123) as the baseline, the first plate segment (111) and the third plate segment (121) are both perpendicular to the baseline, and the second plate segment (112) and the fourth plate segment (122) are inclined relative to the baseline and are located between the first plate segment (111) and the third plate segment (121).

3. The carrier boat according to claim 2, characterized in that, The two ends of the upper toothed rod (130) are respectively connected to the first plate segment (111) and the fourth plate segment (122), and the two ends of the lower toothed rod (140) are respectively connected to the second plate segment (112) and the third plate segment (121). The center lines of the upper toothed rod (130) and the lower toothed rod (140) are at an angle to the reference line.

4. The carrier boat according to claim 2, characterized in that, One end of the upper toothed rod (130) is connected to the end of the first plate segment (111) away from the second plate segment (112), and one end of the lower toothed rod (140) is connected to the end of the second plate segment (112) away from the first plate segment (111). The ratio of the length of the first plate segment (111) to the length of the second plate segment (112) is in the range of 1 / 4 to 1.

5. The carrier boat according to claim 2, characterized in that, The other end of the upper toothed rod (130) is connected to the end of the fourth plate segment (122) away from the third plate segment (121), and the other end of the lower toothed rod (140) is connected to the end of the third plate segment (121) away from the fourth plate segment (122). The ratio of the length of the third plate segment (121) to the length of the fourth plate segment (122) is in the range of 1 / 4 to 1.

6. The carrier boat according to claim 2, characterized in that, The first plate segment (111) and the second plate segment (112) form an angle greater than 90° and less than 180°.

7. The carrier boat according to claim 2, characterized in that, The third plate segment (121) and the fourth plate segment (122) form an angle greater than 90° and less than 180°.

8. The carrier boat according to claim 3, characterized in that, The angle between the centerline of the upper toothed bar (130) and the reference line is within the range of 1° to 89°, and / or, The angle between the centerline of the lower toothed bar (140) and the reference line is in the range of 1° to 89°.

9. The carrier boat according to claim 3, characterized in that, The angle between the centerline of the upper toothed bar (130) and the reference line is within the range of 10° to 89°, and / or, The angle between the centerline of the lower toothed bar (140) and the reference line is in the range of 10° to 89°.

10. The carrier boat according to claim 2, characterized in that, The second plate segment (112) is perpendicular to the center lines of the upper toothed bar (130) and the lower toothed bar (140), and / or, The fourth plate segment (122) is perpendicular to the center lines of the upper toothed rod (130) and the lower toothed rod (140).

11. A diffusion device, characterized in that, Includes the carrier boat (100) as described in any one of claims 1-10.

12. The diffusion apparatus according to claim 11, characterized in that, The diffusion device (10) further includes a diffusion furnace tube (11), and at least two of the carrier boats (100) are arranged sequentially along the length of the diffusion furnace tube (11) inside the diffusion furnace tube (11); Each of the preceding carrier boats (100) rotates 180° around the line connecting the lugs on its left side plate (110) and right side plate (120) as the axis of rotation. Its projection on the cross-section of the diffusion furnace tube (11) coincides with the projection on the cross-section of the adjacent following carrier boat (100) of the diffusion furnace tube (11).

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