A rigid-flexible coupling two-dimensional motion platform

Abstract

The application discloses a rigid-flexible coupling two-dimensional motion platform, which comprises a base, an integrated rigid-flexible coupling platform and a two-dimensional driving mechanism; the integrated rigid-flexible coupling platform comprises a rigid frame, an X-direction coupling assembly and a Y-direction coupling assembly; the rigid frame is internally provided with a first mounting cavity; the X-direction coupling assembly comprises an X-direction platform and X-direction flexible hinge sheets arranged in the first mounting cavity, the X-direction flexible hinge sheets are provided with two groups and symmetrically arranged between the rigid frame and the X-direction platform; the X-direction platform is internally provided with a second mounting cavity; the Y-direction coupling assembly comprises a Y-direction platform and Y-direction flexible hinge sheets arranged in the second mounting cavity, the Y-direction flexible hinge sheets are provided with two groups and symmetrically arranged between the inner side wall of the X-direction platform and the outer side wall of the Y-direction platform. The flexible hinges of two motion directions are integrated, so that the motion speed and precision can be effectively improved, the structure can be simplified, and the occupied space can be reduced.

Description

Technical Field

[0001] This invention relates to flexible motion platforms, specifically to a rigid-flexible coupled two-dimensional motion platform. Background Technology

[0002] Large-stroke, high-precision motion platforms have wide applications in fields such as semiconductor packaging. To comprehensively address the requirements of both large stroke and high precision, macro-micro composite motion platforms are commonly used in the design of these large-stroke, high-precision motion platforms. In typical macro-micro composite motion platforms, flexible hinges can effectively solve the friction dead zone problem, and without increasing costs, they offer the advantage of significantly improving positioning accuracy. Therefore, micro-motion platforms often adopt a design scheme based on flexible hinges.

[0003] Existing two-dimensional motion platforms, such as the compact rigid-flexible coupling platform connection structure and the multi-axis motion platform constituted therein disclosed in invention application CN111102442A, include an upper platform, a lower platform, motion detection elements, and a driving device. The upper platform base is designed as a rigid-flexible coupling structure and mounted on the guide rail of the lower platform. While the aforementioned two-dimensional motion platforms can achieve multi-degree-of-freedom motion and flexibly construct the required high-precision multi-degree-of-freedom motion platforms, they also have the following shortcomings: 1. Since the upper platform is superimposed on the lower platform, meaning the entire weight of the upper platform rests on it, the mover of the lower platform not only needs to drive its own movement but also needs to drive the upper platform to move. This undoubtedly increases the load on the lower platform, thereby reducing its driving speed and accuracy.

[0004] 2. The upper and lower platforms require separate motion structures, which are complex and take up a lot of space. Summary of the Invention

[0005] The purpose of this invention is to overcome the above-mentioned problems and provide a rigid-flexible coupled two-dimensional motion platform. This rigid-flexible coupled two-dimensional motion platform integrates flexible hinges in two motion directions into one, so that two-dimensional motion can be carried out in the same plane. This can not only effectively improve the motion speed and accuracy, but also simplify the structure and reduce the space occupied.

[0006] The objective of this invention is achieved through the following technical solution: A rigid-flexible coupled two-dimensional motion platform includes a base, an integrated rigid-flexible coupled platform, and a two-dimensional drive mechanism; The integrated rigid-flexible coupling platform includes a rigid frame, an X-axis coupling component, and a Y-axis coupling component. The rigid frame is mounted on a base via a composite sliding structure, which has two mutually perpendicular degrees of freedom. A first mounting cavity is provided within the rigid frame. The X-axis coupling component includes an X-axis platform and an X-axis flexible hinge piece, both disposed within the first mounting cavity. Two sets of the X-axis flexible hinge pieces are symmetrically arranged between the inner wall of the rigid frame and the outer wall of the X-axis platform. A second mounting cavity is provided within the X-axis platform. The Y-axis coupling component includes a Y-axis platform and a Y-axis flexible hinge piece, both disposed within the second mounting cavity. Two sets of the Y-axis flexible hinge pieces are symmetrically arranged between the inner wall of the X-axis platform and the outer wall of the Y-axis platform. The horizontal extension direction of the X-axis flexible hinge piece is perpendicular to the horizontal extension direction of the Y-axis flexible hinge piece. The two-dimensional driving mechanism includes an X-axis driving mechanism and a Y-axis driving mechanism. The X-axis driving mechanism includes an X-axis stator and an X-axis mover. The X-axis stator is fixed on the base, and the X-axis mover is fixedly connected to the X-axis platform. The Y-axis driving mechanism includes a Y-axis stator and a Y-axis mover. The Y-axis stator is fixed on the base, and the Y-axis mover is fixedly connected to the Y-axis platform.

[0007] The working principle of the above-mentioned rigid-flexible coupled two-dimensional motion platform is as follows: During operation, when X-axis movement is required, the X-axis drive mechanism drives the X-axis platform via the X-axis mover. The X-axis flexible hinge plate then flexibly transmits the driving force to the rigid frame, thereby flexibly moving the object in the X-axis direction. Similarly, when Y-axis movement is required, the Y-axis drive mechanism drives the Y-axis platform via the Y-axis mover. The Y-axis flexible hinge plate then flexibly transmits the driving force to the Y-axis platform, and from there to the rigid frame, thereby flexibly moving the object in the Y-axis direction.

[0008] In a preferred embodiment of the present invention, the composite sliding structure includes an X-axis sliding structure and a Y-axis sliding structure, wherein the X-axis sliding structure includes an X-axis slider and an X-axis guide rail; and the Y-axis sliding structure includes a Y-axis slider and a Y-axis guide rail.

[0009] Furthermore, the X-axis slider is fixedly mounted on the Y-axis slider, and the X-axis guide rail is fixedly connected to the rigid frame; the Y-axis guide rail is fixedly mounted on the base.

[0010] Furthermore, the Y-axis slider is fixedly mounted on the X-axis slider, and the Y-axis guide rail is fixedly connected to the rigid frame; the X-axis guide rail is fixedly mounted on the base.

[0011] With the above structure, the rigid frame can move in both the X and Y directions, and the structure is very simple and compact.

[0012] In a preferred embodiment of the present invention, each group of X-direction flexible hinge pieces includes a plurality of X-direction flexible hinge pieces arranged in a straight line; each group of Y-direction flexible hinge pieces includes a plurality of Y-direction flexible hinge pieces arranged in a straight line.

[0013] In a preferred embodiment of the present invention, the X-axis drive mechanism is provided in two sets, and the X-axis movers of the two sets of X-axis drive mechanisms are respectively connected to both ends of the X-axis platform. This provides a balanced driving force, prevents the X-axis platform from tilting, and improves the accuracy of the motion.

[0014] Furthermore, when the driving directions of the two sets of X-axis drive mechanisms are opposite, the X-axis platform rotates on the horizontal plane to adjust the angle.

[0015] In a preferred embodiment of the present invention, both the X-axis drive mechanism and the Y-axis drive mechanism are composed of linear motors; the X-axis stator of the X-axis drive mechanism and the Y-axis stator of the Y-axis drive mechanism are both stators of linear motors; and the X-axis mover of the X-axis drive mechanism and the Y-axis mover of the Y-axis drive mechanism are both movers of linear motors.

[0016] Furthermore, the linear motor has two sets of magnetic induction coils symmetrically arranged on opposite side walls of the mover. Each set of magnetic induction coils includes multiple magnetic induction coils connected in parallel. This effectively increases the driving force and enables high-acceleration motion.

[0017] Compared with the prior art, the present invention has the following advantages: 1. The rigid-flexible coupling two-dimensional motion platform of the present invention integrates flexible hinges in two motion directions into one by setting up an integrated rigid-flexible coupling platform, so that two-dimensional motion can be carried out in the same plane, reducing unnecessary load and effectively improving motion speed and accuracy.

[0018] 2. By setting up an integrated rigid-flexible coupling platform, flexible hinges in two directions of motion can be integrated into one, which can simplify the structure and reduce the space occupied.

[0019] 3. The problem of xy-axis coupling in the flexible hinge platform was solved, improving the platform's motion accuracy and stability in the xy direction.

[0020] 4. It can compensate for the problem of the small stroke of the double flexible hinge and expand the effective working range of the platform.

[0021] 5. The rigid-flexible coupling work platform combines the features of rigid structure guide rail slider and flexible hinge, achieving a balance between rigidity and flexibility to meet the needs of different application scenarios.

[0022] 6. The adoption of a dual-sided drive mode makes its movement more precise and the force distribution more even. It reduces the error caused by the different deformation of single-sided drive and single-sided flexible hinge. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the rigid-flexible coupling two-dimensional motion platform of the present invention.

[0024] Figure 2 This is an exploded view of the three-dimensional structure of the rigid-flexible coupled two-dimensional motion platform of the present invention.

[0025] Figure 3 This is an exploded three-dimensional structural diagram of the linear motor of the present invention. Detailed Implementation

[0026] To enable those skilled in the art to fully understand the technical solutions of the present invention, the present invention will be further described below in conjunction with embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0027] Example 1 See Figure 1-2 The rigid-flexible coupling two-dimensional motion platform of this embodiment includes a base 1, an integrated rigid-flexible coupling platform, and a two-dimensional drive mechanism. The integrated rigid-flexible coupling platform includes a rigid frame 2, an X-axis coupling component, and a Y-axis coupling component. The rigid frame 2 is mounted on the base 1 via a composite sliding structure, which has two mutually perpendicular degrees of freedom. A first mounting cavity 2-1 is provided inside the rigid frame 2. The X-axis coupling component includes an X-axis platform 3 and an X-axis flexible hinge piece 4. Both the X-axis platform 3 and the X-axis flexible hinge piece 4 are disposed within the first mounting cavity 2-1. Two sets of the X-axis flexible hinge pieces 4 are symmetrically arranged on the inner wall of the rigid frame 2 and the X-axis flexible hinge piece 4. The X-axis platform 3 is located between the outer walls of the X-axis platform 3; a second mounting cavity 3-1 is provided within the X-axis platform 3; the Y-axis coupling assembly includes a Y-axis platform 5 and a Y-axis flexible hinge piece 6, both of which are disposed within the second mounting cavity 3-1. Two sets of Y-axis flexible hinge pieces 6 are symmetrically arranged between the inner wall of the X-axis platform 3 and the outer wall of the Y-axis platform 5; the horizontal extension direction of the X-axis flexible hinge piece 4 is perpendicular to the horizontal extension direction of the Y-axis flexible hinge piece 6; each set of X-axis flexible hinge pieces 4 includes multiple linearly arranged X-axis flexible hinge pieces 4; each set of Y-axis flexible hinge pieces 6 includes multiple linearly arranged Y-axis flexible hinge pieces 6.

[0028] See Figure 1-2 The composite sliding structure includes an X-axis sliding structure and a Y-axis sliding structure. The X-axis sliding structure includes an X-axis slider 7 and an X-axis guide rail 8. The Y-axis sliding structure includes a Y-axis slider 9 and a Y-axis guide rail 10.

[0029] Furthermore, the X-axis slider 7 is fixedly mounted on the Y-axis slider 9, and the X-axis guide rail 8 is fixedly connected to the rigid frame 2; the Y-axis guide rail 10 is fixedly mounted on the base 1.

[0030] With the above structure, the rigid frame 2 can move in both the X and Y directions, and the structure is very simple and compact.

[0031] See Figure 1-2 The two-dimensional driving mechanism includes an X-axis driving mechanism and a Y-axis driving mechanism. The X-axis driving mechanism includes an X-axis stator 11 and an X-axis mover 12. The X-axis stator 11 is fixed on the base 1. The X-axis mover 12 is fixedly connected to the X-axis platform 3. The Y-axis driving mechanism includes a Y-axis stator 13 and a Y-axis mover 14. The Y-axis stator 13 is fixed on the base 1. The Y-axis mover 14 is fixedly connected to the Y-axis platform 5.

[0032] See Figure 1-2 The X-axis drive mechanism is provided in two sets, and the X-axis movers 12 of the two sets of X-axis drive mechanisms are respectively connected to both ends of the X-axis platform 3. In this way, the driving force can be provided in a balanced manner, preventing the X-axis platform 3 from deflecting and improving the accuracy of the movement.

[0033] Furthermore, when the driving directions of the two sets of X-axis drive mechanisms are opposite, the X-axis platform 3 rotates on the horizontal plane to adjust the angle.

[0034] See Figure 1-2 Both the X-axis drive mechanism and the Y-axis drive mechanism are composed of linear motors; the X-axis stator 11 of the X-axis drive mechanism and the Y-axis stator 13 of the Y-axis drive mechanism are both stators of linear motors; the X-axis mover 12 of the X-axis drive mechanism and the Y-axis mover 14 of the Y-axis drive mechanism are both movers of linear motors.

[0035] See Figure 3 The linear motor has a magnetic induction coil group 15 on its mover. Two groups of magnetic induction coil groups 15 are symmetrically arranged on opposite side walls of the mover. Each group of magnetic induction coil groups 15 includes multiple magnetic induction coils connected in parallel. This effectively increases the driving force and enables high-acceleration motion.

[0036] See Figure 1-2 The working principle of the rigid-flexible coupled two-dimensional motion platform in this embodiment is as follows: During operation, when X-axis movement is required, the X-axis mover 12 of the X-axis drive mechanism drives the X-axis platform 3, and the X-axis flexible hinge 4 flexibly transmits the driving force to the rigid frame 2, thereby flexibly driving the moving object to perform X-axis movement. Similarly, when Y-axis movement is required, the Y-axis mover 14 of the Y-axis drive mechanism drives the Y-axis platform 5, and the Y-axis flexible hinge 6 flexibly transmits the driving force to the Y-axis platform 5, and then from the Y-axis platform 5 to the rigid frame 2, thereby flexibly driving the moving object to perform Y-axis movement.

[0037] Example 2 Unlike Embodiment 1, in this embodiment, the Y-axis slider 9 is fixedly mounted on the X-axis slider 7, the Y-axis guide rail 10 is fixedly connected to the rigid frame 2, and the X-axis guide rail 8 is fixedly mounted on the base 1.

[0038] The above are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above content. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present invention shall be considered equivalent substitutions and shall be included within the protection scope of the present invention.

Claims

1. A rigid-flexible coupled two-dimensional motion platform, characterized in that, Includes a base, an integrated rigid-flexible coupling platform, and a two-dimensional drive mechanism; The integrated rigid-flexible coupling platform includes a rigid frame, an X-axis coupling component, and a Y-axis coupling component. The rigid frame is mounted on a base via a composite sliding structure, which has two mutually perpendicular degrees of freedom. A first mounting cavity is provided within the rigid frame. The X-axis coupling component includes an X-axis platform and an X-axis flexible hinge piece, both disposed within the first mounting cavity. Two sets of the X-axis flexible hinge pieces are symmetrically arranged between the inner wall of the rigid frame and the outer wall of the X-axis platform. A second mounting cavity is provided within the X-axis platform. The Y-axis coupling component includes a Y-axis platform and a Y-axis flexible hinge piece, both disposed within the second mounting cavity. Two sets of the Y-axis flexible hinge pieces are symmetrically arranged between the inner wall of the X-axis platform and the outer wall of the Y-axis platform. The horizontal extension direction of the X-axis flexible hinge piece is perpendicular to the horizontal extension direction of the Y-axis flexible hinge piece. The two-dimensional driving mechanism includes an X-axis driving mechanism and a Y-axis driving mechanism. The X-axis driving mechanism includes an X-axis stator and an X-axis mover. The X-axis stator is fixed on the base, and the X-axis mover is fixedly connected to the X-axis platform. The Y-axis driving mechanism includes a Y-axis stator and a Y-axis mover. The Y-axis stator is fixed on the base, and the Y-axis mover is fixedly connected to the Y-axis platform. Each group of X-direction flexible hinge pieces includes multiple X-direction flexible hinge pieces arranged in a straight line; each group of Y-direction flexible hinge pieces includes multiple Y-direction flexible hinge pieces arranged in a straight line. The X-axis drive mechanism is provided in two sets, and the X-axis movers of the two sets of X-axis drive mechanisms are respectively connected to both ends of the X-axis platform; when the driving directions of the two sets of X-axis drive mechanisms are opposite, the X-axis platform rotates on the horizontal plane to adjust the angle. Both the X-axis drive mechanism and the Y-axis drive mechanism are composed of linear motors; the X-axis stator of the X-axis drive mechanism and the Y-axis stator of the Y-axis drive mechanism are both stators of linear motors; the X-axis mover of the X-axis drive mechanism and the Y-axis mover of the Y-axis drive mechanism are both movers of linear motors. The linear motor has a magnetic induction coil group on its mover. There are two groups of magnetic induction coils, which are symmetrically arranged on opposite side walls of the mover. Each group of magnetic induction coils includes multiple magnetic induction coils arranged in parallel.

2. The rigid-flexible coupled two-dimensional motion platform according to claim 1, characterized in that, The composite sliding structure includes an X-axis sliding structure and a Y-axis sliding structure. The X-axis sliding structure includes an X-axis slider and an X-axis guide rail; the Y-axis sliding structure includes a Y-axis slider and a Y-axis guide rail.

3. The rigid-flexible coupled two-dimensional motion platform according to claim 2, characterized in that, The X-axis slider is fixedly mounted on the Y-axis slider, and the X-axis guide rail is fixedly connected to the rigid frame; the Y-axis guide rail is fixedly mounted on the base.

4. The rigid-flexible coupled two-dimensional motion platform according to claim 2, characterized in that, The Y-axis slider is fixedly mounted on the X-axis slider, and the Y-axis guide rail is fixedly connected to the rigid frame; the X-axis guide rail is fixedly mounted on the base.

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