一种固体介质靶表面微纳结构压印及光谱信号增强方法

By imprinting micro-nano structures on the surface of a solid dielectric target, the contact area between the laser and the target surface is increased, improving the breakdown efficiency and atomization efficiency. This solves the problems of unsatisfactory signal enhancement and large sample damage in existing technologies, achieving higher spectral analysis sensitivity and lower sample damage.

CN117289545BActive Publication Date: 2026-07-17SOUTH CHINA UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SOUTH CHINA UNIV OF TECH
Filing Date
2023-08-28
Publication Date
2026-07-17

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Abstract

本发明公开了一种固体介质靶表面微纳结构的压印技术与光谱信号增强方法，包括以下步骤：第一步、以一块硬质的带有表面微纳结构的垫片作为衬底，利用压片机在固体介质靶表面压印出微纳结构；第二步、将压印有表面微纳结构的固体介质靶固定在二维运动平台上，带有微纳结构的表面朝外与激光作用；第三步、第一脉冲激光器发出激光脉冲并经第一聚焦透镜聚焦于样品上产生样品等离子体；第四步、第二脉冲激光器发出延时的激光脉冲并经第二聚焦透镜聚焦于固体介质靶上产生靶等离子体，靶等离子体与样品等离子体相互作用后实现样品元素光谱信号的增强；第五步、等离子体的发射光谱由光谱仪记录并传输至计算机处理，实现对样品元素的高灵敏分析。
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