Ozone water flow control system for RCA process and fluid supply method

Abstract

This invention relates to an ozone water flow control system and fluid supply method for RCA processes. The system includes a main pipeline constant flow module and a branch pipeline flow regulation module. The main pipeline constant flow module has its main liquid supply pipe inlet connected to the ozone water system and its outlet connected to a liquid-gas separator. A pressure sensor, a three-way valve, and a pressure control valve are installed on the main liquid supply pipe. The outlet of the pressure control valve is connected to the sensing end of the pressure sensor. The main liquid supply pipe is connected to the branch pipeline flow regulation module via the three-way valve. A liquid detection sensor is connected to the liquid-gas separator, and a pressure sensor is installed at the outlet of the liquid-gas separator. The outlet is connected to a three-way pneumatic valve via a pipe. The two outlets of the three-way pneumatic valve are respectively connected to a normal pressure exhaust pipe and a vacuum extraction pipe. The liquid outlet of the liquid-gas separator is connected to a drain pipe. This invention can avoid the instability of ozone concentration in the ozone system due to fluctuations in the main pipeline flow and the impact of branch pipeline fluctuations on the main pipeline.

Description

[Technical Field]

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to an ozone water flow control system and fluid supply method for RCA processes. [Background Technology]

[0002] Currently, the use of ozone in semiconductor manufacturing typically involves dissolving ozone gas in ultrapure water and delivering it to the user through a pipeline system. However, due to the high toxicity of high-concentration ozone, this method, while ensuring safety, encounters three unavoidable problems:

[0003] First, the dissolution of ozone gas in water is a relatively slow process. Therefore, it usually takes tens of seconds or even minutes for an ozone system to go from receiving the start-up signal to outputting ozone water at the critical concentration of 20 ppm. This time is unacceptable for the system response.

[0004] Secondly, since the ozone system has a long start-up response time, although the response time can be compensated by starting the ozone system in advance, ozone water is a volatile solution. The ozone concentration of the ozone water output by the ozone system is actually constantly decreasing when it is kept in standby state through pipeline circulation. The decrease in ozone water concentration will lead to the instability of oxidation rate, and the unstable oxidation rate is also unacceptable for the process.

[0005] Third, once the ozone concentration output by the ozone system is stabilized within a small fluctuation range by the ozone concentration meter on the system outlet pipe, the ozone concentration will be highly correlated with the ozone flow rate. A single ozone system typically supplies multiple ozone usage points. The combined effect of flow rate changes at each usage point or pulsating pressure changes within the pipeline will cause fluctuations in the ozone flow rate at the system's output. After the ozone concentration meter feeds back these fluctuations to the system, the system will adjust its output concentration accordingly. However, the high-frequency flow fluctuations in the pipeline system and the slow response time of the ozone system will further amplify these fluctuations, resulting in unstable ozone concentrations during use. As mentioned earlier, the resulting fluctuations in oxidation rate are also unacceptable for the process.

[0006] Traditional wet chemical cleaning (RCA) has been the most widely used cleaning step in semiconductor manufacturing processes over the past 20 years. The RCA process consists of four main steps: SPM (Solid Processing Peroxide), APM (Active Processing Peroxide), HPM (High-Performance Processing Peroxide), and DHF (Dioxide-High-Performance H₂O₂). In the first three steps, such as SPM where PM stands for Peroxide Mixture, hydrogen peroxide is typically dissolved in hydrogen peroxide (H₂O₂) to impart oxidizing properties to the chemical solution.

[0007] Long-term experiments and research have shown that the oxidation effect provided by ozone at room temperature is much slower than that of oxides volatilized in high-temperature processes such as APM / SPM in RCA processes, and the oxidation rate is also more stable. Furthermore, the ozone / pure water oxidation process does not generate sulfides compared to SPM, making them easier to remove in the subsequent HF process. Moreover, the oxide layer removal using alternating ozone / pure water and HF in the subsequent HF process can provide low surface roughness and a more uniform oxygen protective layer. As a result, processes with high oxidation correlation in RCA processes are increasingly using ozone instead of hydrogen peroxide as the oxidation source to improve the original RCA process.

[0008] Furthermore, with the increasing size of silicon wafers due to the development of the semiconductor industry, monolithic processes, which are more suitable for handling large-size silicon wafers than tank processes, are gradually becoming more widespread in the field of 12-inch and larger silicon wafers. Since tank RCA processes typically involve sequentially immersing different types of high-purity chemicals at high temperatures, this cleaning method usually generates a large amount of high-concentration chemical gases. Monolithic equipment is more likely to use ozone systems to replace the high-temperature SPM and DHF processes involved in traditional RCA. Given the combined effect of oxidation processes and the reduced high-temperature exhaust in monolithic equipment, an ozone system piping system and fluid supply method suitable for ozone-modified RCA processes are crucial for the application of ozone systems in modified RCA processes. [Summary of the Invention]

[0009] The purpose of this invention is to overcome the above-mentioned shortcomings and provide an ozone water flow control system for RCA processes. This system can avoid the inability of the ozone system to stabilize the ozone concentration in the main pipeline due to fluctuations in the flow rate of the main pipeline, as well as the impact of fluctuations in the branch pipeline on the main pipeline. It also avoids back pressure fluctuations caused by pressure accumulation in the pipeline, as well as pipeline rupture and dangerous gas leaks caused by overpressure.

[0010] To achieve the above objectives, an ozone water flow control system for RCA processes is designed, comprising a main pipeline constant flow module and a branch pipeline flow regulation module, wherein:

[0011] The main pipeline constant flow module includes a main liquid supply pipeline 1 and a liquid-gas separator 2. The inlet end of the main liquid supply pipeline 1 is connected to the ozone water system 3, and the outlet end of the main liquid supply pipeline 1 is connected to the liquid-gas separator 2. A pressure sensor 4, a three-way valve, and a pressure control valve 5 are installed sequentially on the main liquid supply pipeline 1. The outlet of the pressure control valve 5 is connected to the sensing end of the pressure sensor 4 through a pipeline. The main liquid supply pipeline 1 is connected to the branch pipeline flow regulation module through the three-way valve. A liquid detection sensor 6 is connected to the liquid-gas separator 2. A pressure sensor 7 is installed at the outlet of the liquid-gas separator 2. The outlet of the liquid-gas separator 2 is connected to a three-way pneumatic valve 8 through a pipeline. The two outlets of the three-way pneumatic valve 8 are respectively connected to a normal pressure exhaust pipeline and a vacuum pumping pipeline. The outlet of the liquid-gas separator 2 is connected to the inlet end of a one-way valve, and the outlet end of the one-way valve is connected to a drain pipeline.

[0012] The branch pipeline flow regulation module includes a branch pipeline 9. The inlet end of the branch pipeline 9 is connected to the main liquid supply pipeline 1 via a three-way valve. The outlet end of the branch pipeline 9 is connected to a pressure control valve 10 and a three-way pneumatic valve 11, respectively. The pressure control valve 10 and the three-way pneumatic valve 11 are arranged in parallel, and their outlet ends are both connected to a liquid separator 12. The air outlet of the pressure control valve 10 is connected to the sensing end of a pressure sensor 13 via a pipeline. An electric needle valve 14 and a flow sensor 15 are installed on the pipeline at the inlet end of the three-way pneumatic valve 11. The branch pipeline flow regulation module... The electric needle valve 14 and flow sensor 15 are used for remote flow regulation. The other outlet of the three-way pneumatic valve 11 is the user outlet. A liquid detection sensor 16 is connected to the liquid separator 12. A pressure sensor 17 is installed at the outlet of the liquid separator 12. The outlet of the liquid separator 12 is connected to a three-way pneumatic valve 18 through a pipe. The two outlets of the three-way pneumatic valve 18 are connected to a normal pressure exhaust pipe and a vacuum pumping pipe, respectively. The liquid outlet of the liquid separator 12 is connected to the inlet of a one-way valve 2. The liquid outlet of the one-way valve 2 is connected to a drain pipe.

[0013] Furthermore, the pressure control valve 5 of the main pipeline constant flow module obtains the initial pressure state based on the pressure sensor 4 at the inlet end of the main liquid supply pipeline 1, and adjusts the back pressure of the pipeline at the end based on the pressure state fed back by the pressure sensor 7 at the liquid-gas separator 2, thereby stabilizing the pipeline pressure at the inlet end within a certain range and ensuring that the initial fluid state of the pipeline remains unchanged.

[0014] Furthermore, the liquid-gas separator 2 is connected to the drain pipe from above, and the outlet of the liquid-gas separator 2 is located at the top. The gas separated by the liquid-gas separator 2 is discharged from the top outlet. The top exhaust port is connected to the pressure sensor 7 for air pressure monitoring. The end of the top exhaust port is connected to the three-way pneumatic valve 8. The outlet of the three-way pneumatic valve 8 is connected to the atmosphere and the vacuum exhaust port through the normal pressure exhaust pipe and the vacuum exhaust pipe, respectively. Based on the feedback from the pressure sensor 7, the internal pressure of the liquid-gas separator 2 is balanced.

[0015] Furthermore, the end of the branch pipeline flow regulation module is connected to the inlet end of the flow sensor 15, and the outlet end of the flow sensor 15 is connected to the inlet end of the electric needle valve 14. The outlet end of the electric needle valve 14 adopts the shortest distance design, and the outlet of the electric needle valve 14 is directly connected to the inlet of the three-way pneumatic valve 11. The branch pipeline flow regulation module adjusts the required outlet flow through feedback from the flow sensor 15 before the electric needle valve 14.

[0016] Furthermore, it also includes a branch pipeline flow regulation module two, which includes a branch pipeline 92. The inlet end of the branch pipeline 92 is connected to the main liquid supply pipeline 1 via a three-way valve. The outlet end of the branch pipeline 92 is connected to a pressure control valve 3 and a three-way pneumatic valve 3, respectively. The pressure control valve 3 and the three-way pneumatic valve 3 are arranged in parallel, and their outlet ends are both connected to a liquid separator 3. The air outlet of the pressure control valve 3 is connected to the sensing end of a pressure sensor 3 via a pipeline. An electric needle valve 3 and a flow sensor 3 are installed on the pipeline at the inlet end of the three-way pneumatic valve 3. The branch pipeline flow regulation module 2 remotely regulates the flow through the electric needle valve 3 and the flow sensor 3. The other outlet of the three-way pneumatic valve 3 is the user outlet. The liquid separator 3 is connected to a liquid detection sensor 3. A pressure sensor 4 is installed at the air outlet of the liquid separator 3. The air outlet of the liquid separator 3 is connected to a three-way pneumatic valve 5 through a pipe. The two outlets of the three-way pneumatic valve 5 are respectively connected to a normal pressure exhaust pipe and a vacuum pumping pipe. The liquid outlet of the liquid separator 3 is connected to the liquid inlet of a one-way valve 3. The liquid outlet of the one-way valve 3 is connected to a drain pipe.

[0017] Furthermore, the branch pipe 9 of the branch pipe flow regulation module and the branch pipe 92 of the branch pipe flow regulation module 2 are both installed on the top of the single-piece process swing arm near the nozzle. The branch pipe 9 and the branch pipe 92 both pass through the hollow swing arm structure. The swing arm structure is a three-section shaft structure. The middle section shaft of the three-section shaft structure is a hollow shaft into which a hollow direct drive motor is inserted. The internal diameters of the front and rear shafts of the three-section shaft structure are both larger than the middle shaft, and the diameter of the middle shaft is not larger than the diameter of the hollow direct drive motor.

[0018] The present invention also provides a fluid supply method for an ozone water flow control system in an RCA process, comprising the following steps:

[0019] 1) During the start-up phase, i.e. the standby phase of the main pipeline, the bypass route of the three-way pneumatic valve 11 and the three-way pneumatic valve 3 at the start-up end is opened, and then the ozone water system 3 is started, and the ozone solution enters the bypass route. At this time, the pressure control valve 5 is linked according to the data of the pressure sensor 4 to stabilize the flow rate of the main pipeline within a certain range.

[0020] 2) During the flow regulation stage, i.e. the branch pipeline standby stage, electric needle valve 14 and electric needle valve 3 reduce the flow rate to the operating value according to the feedback from flow sensor 15 and flow sensor 3, respectively. At this time, pressure control valve 10 and pressure control valve 3 stabilize the branch pipeline inlet pressure within a certain range according to the feedback data from pressure sensor 13 and pressure sensor 3, respectively.

[0021] 3) During the usage phase, i.e. the user-end switching phase, after the pressure / flow stabilizes in the standby state, the three-way pneumatic valve 21 and the three-way pneumatic valve 3 are switched to the user-end outlet, and the ozone solution is put into use through the user-end outlet.

[0022] Furthermore, in step 1), both the three-way pneumatic valve 2 11 and the three-way pneumatic valve 3 are directional three-way valves; the electric needle valve 1 14 and the electric needle valve 3 are in the maximum opening state; when the pressure sensor 4 monitors the pressure characteristics of the outlet flow of the flow sensor 1 15 and the flow sensor 3 when they reach the required pressure, the pressure control valve 5 is used to eliminate the pressure fluctuation in the main pipeline, ensuring that the pressure entering the pressure sensor 1 13 and the pressure sensor 3 is stable.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] (1) The present invention compensates for the ozone system startup response time failure by using the bypass pipeline at the end of the branch pipeline, and stabilizes the ozone water flow rate in the ozone standby state during the startup of the bypass pipeline within a constant range by using the constant flow module of the main pipeline, thereby avoiding the ozone system from being unable to stabilize the ozone concentration in the main pipeline due to fluctuations in the flow rate of the main pipeline.

[0025] (2) The present invention can adjust the required nozzle flow rate within the flow adjustment range by means of the branch pipeline flow adjustment module and obtain a stable and high-precision flow rate value; and stabilize the ozone water flow rate of the branch pipeline within a constant range by means of the pressure stabilizing linkage valve group at the inlet of the branch pipeline, thereby avoiding the influence of branch pipeline fluctuations on the main pipeline.

[0026] (3) The symmetrical outlet piping structure of the branch pipeline of the present invention, combined with the flow monitoring distance of more than five times the pipeline diameter and the high-precision electric control directional valve installed at the furthest distance, may achieve a high-precision flow control effect.

[0027] (4) The liquid separation structure included in the main pipeline module and the branch pipeline module of the present invention can remove the gas decomposed by ozone from the pipeline, thereby avoiding the back pressure fluctuation problem caused by the pressure accumulation of the pipeline.

[0028] (5) The liquid-gas separation pipeline of the present invention uses a high-precision barometer and a three-way switching valve to quickly switch from the pressure balance port to the high vacuum port according to the pressure situation, quickly reduce the gas pressure in the pipeline and remove the gas in the overpressure part of the pipeline, thereby avoiding pipeline rupture caused by overpressure and avoiding dangerous oxygen gas leakage.

[0029] (6) The process swing arm module with the three-section shaft design of the present invention can realize the integration of pipes in the swing arm, and can realize a reliable multi-pipe layout in a small diameter (usually less than 25mm) hollow shaft direct drive motor with relatively good performance, so as to avoid the need to use a customized large diameter hollow direct drive motor or other hollow parts combined with a parallel shaft form of indirect drive structure due to piping problems in the multi-pipe system involved in this patent.

[0030] In summary, this invention can specifically address the above-mentioned problems encountered by current ozone systems in improved RCA process applications, thereby achieving high-precision and highly reproducible ozone delivery with high-speed response and constant flow / concentration in the SPM / DHF process for oxidation rate indicators. [Image Description]

[0031] Figure 1 This is a schematic diagram of the flow structure during the startup phase of this invention;

[0032] Figure 2 This is a schematic diagram of the flow direction structure during the flow regulation stage of this invention;

[0033] Figure 3 This is a schematic diagram of the flow structure during the use phase of this invention;

[0034] Figure 4 This is a schematic diagram of the integrated liquid / gas separation structure within the swing arm of the present invention;

[0035] Figure 5 yes Figure 4 Side view;

[0036] Figure 6 yes Figure 5 Sectional view of AA;

[0037] In the diagram: 1. Main liquid supply pipeline; 2. Liquid-gas separator; 3. Ozone water system; 4. Pressure sensor; 5. Pressure control valve; 6. Liquid detection sensor; 7. Pressure sensor five; 8. Three-way pneumatic valve; 9. Branch pipeline; 10. Pressure control valve one; 11. Three-way pneumatic valve two; 12. Liquid separator two; 13. Pressure sensor one; 14. Electric needle valve one; 15. Flow sensor one; 16. Liquid detection sensor two; 17. Pressure sensor two; 18. Three-way pneumatic valve four; 101. Reversing three-way valve; 102. Electrically controlled reversing valve; 103. Ultrasonic flow meter; 104. Pressure gauge; 105a. Bottom driven flange; 105b. Hollow motor three-pipe connection. [Detailed Implementation]

[0038] The present invention will be further described below with reference to the accompanying drawings and specific embodiments:

[0039] As attached Figure 1 To be continued Figure 3As shown, this invention provides an ozone water flow control system for RCA processes, including a main pipeline constant flow module and a branch pipeline flow regulation module. The main pipeline constant flow module includes a main liquid supply pipeline 1 and a liquid-gas separator 2. The inlet end of the main liquid supply pipeline 1 is connected to an ozone water system 3, and the outlet end of the main liquid supply pipeline 1 is connected to the liquid-gas separator 2. A pressure sensor 4, a three-way valve, and a pressure control valve 5 are sequentially installed on the main liquid supply pipeline 1. The outlet of the pressure control valve 5 is connected to the sensing end of the pressure sensor 4 through a pipeline. The main liquid supply pipeline 1... The three-way valve connects to the branch pipeline flow regulation module. A liquid detection sensor 6 is connected to the liquid-gas separator 2. A pressure sensor 7 is installed at the outlet of the liquid-gas separator 2. The outlet of the liquid-gas separator 2 is connected to a three-way pneumatic valve 8 via a pipe. The two outlets of the three-way pneumatic valve 8 are connected to a normal pressure exhaust pipe and a vacuum extraction pipe, respectively. The liquid outlet of the liquid-gas separator 2 is connected to the inlet of a one-way valve, and the outlet of the one-way valve is connected to a drain pipe. The branch pipeline flow regulation module includes a branch pipeline 9, and the inlet of the branch pipeline 9 is connected to the three-way valve... The main liquid supply pipeline 1 and the outlet of the branch pipeline 9 are respectively connected to pressure control valve 10 and three-way pneumatic valve 11. Pressure control valve 10 and three-way pneumatic valve 11 are arranged in parallel, and their outlets are both connected to liquid separator 12. The air outlet of pressure control valve 10 is connected to the sensing end of pressure sensor 13 through a pipeline. An electric needle valve 14 and a flow sensor 15 are installed on the pipeline at the inlet end of three-way pneumatic valve 11. The branch pipeline flow regulation module is connected to the electric needle valve 14 and the flow sensor 15. For remote flow regulation, the other outlet of the three-way pneumatic valve 11 is the user outlet; a liquid detection sensor 16 is connected to the liquid separator 12, and a pressure sensor 17 is installed at the outlet of the liquid separator 12. The outlet of the liquid separator 12 is connected to the three-way pneumatic valve 18 through a pipe. The two outlets of the three-way pneumatic valve 18 are connected to the atmospheric pressure exhaust pipe and the vacuum pumping pipe, respectively. The outlet of the liquid separator 12 is connected to the inlet of the one-way valve 2, and the outlet of the one-way valve 2 is connected to the drain pipe.

[0040] The pressure control valve 5 of the main pipeline constant flow module obtains the initial pressure state based on the pressure sensor 4 at the inlet of the main liquid supply pipeline 1, and adjusts the back pressure of the pipeline at the end based on the pressure state fed back by the pressure sensor 7 at the liquid-gas separator 2, thereby stabilizing the pipeline pressure at the inlet end within a certain range and ensuring that the initial fluid state of the pipeline remains unchanged. The liquid-gas separator 2 is connected to the drain pipeline from above, and the outlet of the liquid-gas separator 2 is located at the top. The gas separated by the liquid-gas separator 2 is discharged from the outlet at the top. The top exhaust port is connected to the pressure sensor 7 for air pressure monitoring. The end of the top exhaust port is connected to a three-way pneumatic valve 8. The outlet of the three-way pneumatic valve 8 is connected to the atmosphere and the vacuum extraction port through the atmospheric pressure exhaust pipe and the vacuum extraction pipe, respectively, and the internal pressure of the liquid-gas separator 2 is balanced based on the feedback from the pressure sensor 7. The end of the branch pipeline flow regulation module is connected to the inlet of flow sensor 15, and the outlet of flow sensor 15 is connected to the inlet of electric needle valve 14. The outlet of electric needle valve 14 is designed with the shortest distance, and the outlet of electric needle valve 14 is directly connected to the inlet of three-way pneumatic valve 11. The branch pipeline flow regulation module adjusts the required outlet flow through feedback from flow sensor 15 before electric needle valve 14.

[0041] The present invention also includes a branch pipeline flow regulation module two, the structure of which is the same as the branch pipeline flow regulation module described above. The branch pipeline flow regulation module two includes a branch pipeline 92. The inlet end of the branch pipeline 92 is connected to the main liquid supply pipeline 1 through a three-way valve. The outlet end of the branch pipeline 92 is connected to a pressure control valve 3 and a three-way pneumatic valve 3, respectively. The pressure control valve 3 and the three-way pneumatic valve 3 are arranged in parallel, and their outlet ends are both connected to a liquid separator 3. The air outlet of the pressure control valve 3 is connected to the sensing end of the pressure sensor 3 through a pipeline. An electric needle valve is installed on the pipeline at the inlet end of the three-way pneumatic valve 3. The flow sensor 3 and the branch pipeline flow regulation module 2 remotely regulate the flow through the electric needle valve 3 and the flow sensor 3. The other outlet of the three-way pneumatic valve 3 is the user outlet. The liquid separator 3 is connected to the liquid detection sensor 3. The air outlet of the liquid separator 3 is equipped with the pressure sensor 4. The air outlet of the liquid separator 3 is connected to the three-way pneumatic valve 5 through the pipeline. The two outlets of the three-way pneumatic valve 5 are connected to the atmospheric pressure exhaust pipeline and the vacuum pumping pipeline, respectively. The liquid outlet of the liquid separator 3 is connected to the liquid inlet of the one-way valve 3. The liquid outlet of the one-way valve 3 is connected to the liquid drain pipeline.

[0042] Both the branch pipe 9 of the branch flow regulation module and the branch pipe 92 of the branch flow regulation module 2 are installed at the top of the single-piece process swing arm near the nozzle. Both branch pipe 9 and branch pipe 92 pass through the hollow swing arm structure. The swing arm structure is a three-shaft structure. The middle shaft of the three-shaft structure is a hollow shaft into which a hollow direct drive motor is inserted. The internal diameters of the front and rear shafts of the three-shaft structure are larger than the middle shaft, and the diameter of the middle shaft is not larger than the diameter of the hollow direct drive motor.

[0043] This invention also provides a fluid supply method for an ozone water flow control system in an RCA process, comprising the following steps: 1) Start-up phase, i.e., main pipeline standby phase, the bypass route of the three-way pneumatic valve 11 and the three-way pneumatic valve 3 at the start-up end is opened, and then the ozone water system 3 is started, and the ozone solution enters the bypass route. At this time, the pressure control valve 5 is linked according to the data of the pressure sensor 4 to stabilize the flow rate of the main pipeline within a certain range; both the three-way pneumatic valve 11 and the three-way pneumatic valve 3 are reversing three-way valves; the electric needle valve 14 and the electric needle valve 3 are in the maximum opening state, and the pressure sensor 4 monitors the pressure characteristics when the outlet flow rate of the flow sensor 15 and the flow sensor 3 reaches the usage requirement, so that... 1) Use pressure control valve 5 to eliminate pressure fluctuations in the main pipeline and ensure stable pressure entering pressure sensor 13 and pressure sensor 3; 2) Use the flow regulation stage, i.e. the branch pipeline standby stage, electric needle valve 14 and electric needle valve 3 reduce the flow rate to the operating value according to the feedback from flow sensor 15 and flow sensor 3 respectively. At this time, pressure control valve 10 and pressure control valve 3 stabilize the branch pipeline inlet pressure within a certain range according to the feedback data from pressure sensor 13 and pressure sensor 3 respectively; 3) Use stage, i.e. the use end switching stage, after the standby pressure / flow stabilizes, three-way pneumatic valve 21 and three-way pneumatic valve 3 switch to the use end outlet, and the ozone solution begins to be used through the use end outlet.

[0044] In this invention, the main pipeline constant flow module mainly consists of a liquid-gas separator and a pressure-stabilizing linkage valve group; the branch pipeline flow regulation module mainly consists of a liquid separator and a flow-pressure linkage valve group. The liquid separator of the branch pipeline flow regulation module is integrated with the process swing arm, and the pipeline of the branch pipeline flow regulation module is in the form of a three-section shaft.

[0045] The main operating principle of the fluid supply of the ozone water flow control device of the present invention is as follows:

[0046] 1. During the power-on startup phase, as shown in the attached document. Figure 1As shown, this is the standby phase of the main pipeline. AV-1B and AV-3B start-up opens the bypass route at the user end, subsequently starting the ozone (O3) system. The ozone (O3) solution enters the bypass route. At this time, PVC-0, based on P0 data, stabilizes the main pipeline flow within a defined range. P1 and P3 are not activated at this time, while ENV1 and ENV3 are at their maximum opening. It is important to note that P0 monitors the pressure characteristics when the FM-1 / -2 outlet flow reaches the required level. PVC-0 is used to eliminate pressure fluctuations in the main pipeline, ensuring stable pressure entering P1 and P2. ENV1 and ENV2 are at their maximum opening to ensure that the O3 system does not change its power state due to increased flow requirements at the end-user points.

[0047] 2. During the flow regulation phase, as shown in the attached document. Figure 2 As shown, this represents the standby phase of the branch pipeline. ENV-1 and ENV-3, based on feedback from FM-1 and FM-3 respectively, reduce the flow rate to the operating value. At this time, PVC-1, based on feedback data from P1, stabilizes the branch inlet pressure within a defined range. It is important to note that when using an electrically adjustable needle valve for branch flow control, changes in the branch outlet flow rate are detected by P1, and PVC-1 will intervene to adjust the branch inlet pressure, thus stabilizing the branch pressure within a relatively fixed range.

[0048] 3. During the usage phase, as shown in the attached document. Figure 3 As shown, this is the user-end switching phase. After the pressure / flow stabilizes in standby mode, AV-1 and AV-3 switch to outlet B, and ozone (O3) begins to be used at the user-end outlet. It is important to note that a double three-way valve cannot be used here; a reversing three-way valve must be used. Specifically, port A is closed 30% and port B is opened 70%; port A is closed 100% and port B is just opened 100%, thus maintaining a constant total flow rate at both ports A and B.

[0049] The present invention consists of two main parts: a main pipeline constant flow module and a branch pipeline flow regulation module, each module containing specific modules as described below.

[0050] The main pipeline constant flow regulation system primarily consists of an ozone water system connected to the main supply pipeline. The main pipeline has tees leading to different branch pipelines, as well as pressure-stabilizing interlocking valves at the ends. These valves obtain the initial pressure from the pressure gauge at the pipeline inlet and adjust the back pressure at the end of the pipeline based on the feedback pressure, stabilizing the initial inlet pipeline pressure within a certain range to ensure the initial fluid state remains constant. A drain is connected to the end of the pressure-stabilizing interlocking valves to release additional ozone water flow. It is important to note that all ozone water drain points are connected to a dedicated liquid-gas separation module. The liquid-gas separation module is connected to the drain pipe from the top, with the bottom used for draining. The separated gas exits from the top outlet, which is connected to a high-precision pressure monitoring device. The exhaust port is connected to a reversing tee valve, whose outlets are connected to the atmosphere and a vacuum extraction pipeline, respectively. The internal pressure of the liquid-gas separation structure can be balanced based on pressure gauge feedback.

[0051] The inlet of the branch pipeline module is similar to the pressure-stabilizing linkage valve structure and liquid-gas separation structure of the main pipeline module, which will not be described in detail here. The end of the branch pipeline module is connected to a high-precision electrically controlled flow regulating valve. The outlet of the regulating valve adopts the shortest distance design, directly connecting the flow regulating valve to the inlet of the three-way reversing valve at the outlet, and adjusting the required outlet flow through the feedback of the high-precision flow meter before the flow regulating valve. The layout of the branch pipeline needs to have at least three additional characteristics: (1) The piping structure from the two outlets of the outlet reversing valve to the liquid outlet end is completely symmetrical to obtain the same back pressure characteristics; (2) The pipeline where the high-precision flow meter is detected is a straight pipe with no diameter change or valve structure before or after, and has a length of at least five times the pipe diameter to obtain a stable flow monitoring environment; (3) The pressure gauge and pressure regulating valve involved in the pressure-stabilizing linkage valve structure are at the shortest distance to obtain a high-speed response state.

[0052] The branch pipe is installed at the top of the single-piece process swing arm near the nozzle. The pipe will pass through the hollow swing arm structure, which is a three-shaft structure. In addition to facilitating the installation and maintenance of the pipe, the middle section of the shaft is a hollow shaft into which the hollow direct drive motor is inserted. Since the structure on both sides of the pipe requires a large operating space, the internal diameter of the front and rear two sections of the three-shaft is larger than that of the middle shaft, and the diameter of the middle shaft is not larger than that of the hollow direct drive motor.

[0053] As attached Figure 4 To be continued Figure 6The diagram shows the integrated liquid / gas separation within the swing arm structure, along with a liquid level alarm and a one-way valve to prevent backflow. This allows for exhaust monitoring and vacuum / atmospheric balance switching. In this multi-pipeline structure, the reversing three-way valve 101 is designed with symmetrical outlet piping, ensuring constant flow during switching. The high-precision electrically controlled reversing valve 102 achieves the shortest possible inlet valve piping, minimizing flow fluctuations. The ultrasonic flow meter 103 has an inlet distance of five times the pipe diameter, eliminating interference during flow detection. The pressure regulating valve / gauge 104 achieves the shortest possible distance, and the bottom driven flange 105a and the hollow motor three-pipe connection 105b serpentine pipe provide sufficient space, allowing for the use of a direct-drive motor. Through Standy standby / Bypass switching, constant pressure design, variable flow design, liquid-gas separation + degassing structure for exhaust, and the multi-pipeline structure, the system achieves suppression of pulsation within the pipeline, linear flow regulation at the user end, and balance of the total flow on the secondary side, ultimately achieving high-speed reaction, constant ozone concentration, and constant flow.

[0054] The contents not described in detail in this specification are existing technologies known to those skilled in the art. The standard parts used can be purchased from the market, and the irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the circuit connection adopts conventional connection methods in the existing technology, which will not be described in detail here.

[0055] This invention is not limited to the above-described embodiments. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of this invention shall be considered equivalent substitutions and shall be included within the scope of protection of this invention.

Claims

1. An ozone water flow control system for RCA processes, characterized in that: This includes a main pipeline constant flow module and a branch pipeline flow regulation module, among which, The main pipeline constant flow module includes a main liquid supply pipeline (1) and a liquid-gas separator (2). The inlet end of the main liquid supply pipeline (1) is connected to the ozone water system (3), and the outlet end of the main liquid supply pipeline (1) is connected to the liquid-gas separator (2). A pressure sensor (4), a three-way valve, and a pressure control valve (5) are installed sequentially on the main liquid supply pipeline (1). The outlet of the pressure control valve (5) is connected to the sensing end of the pressure sensor (4) through a pipeline. The main liquid supply pipeline (1) is connected to the three-way valve. A flow regulation module for connecting branch pipelines is provided. A liquid detection sensor (6) is connected to the liquid-gas separator (2). A pressure sensor (7) is installed at the outlet of the liquid-gas separator (2). The outlet of the liquid-gas separator (2) is connected to a three-way pneumatic valve (8) through a pipeline. The two outlets of the three-way pneumatic valve (8) are respectively connected to a normal pressure exhaust pipeline and a vacuum pumping pipeline. The outlet of the liquid-gas separator (2) is connected to the inlet end of a one-way valve. The outlet end of the one-way valve is connected to a drain pipeline. The branch pipeline flow regulation module includes a branch pipeline (9). The inlet end of the branch pipeline (9) is connected to the main liquid supply pipeline (1) through a three-way valve. The outlet end of the branch pipeline (9) is connected to a pressure control valve (10) and a three-way pneumatic valve (11) respectively. The pressure control valve (10) and the three-way pneumatic valve (11) are arranged in parallel, and their outlet ends are both connected to a liquid separator (12). The air outlet of the pressure control valve (10) is connected to the sensing end of a pressure sensor (13) through a pipeline. An electric needle valve (14) and a flow sensor (15) are installed on the pipeline at the inlet end of the three-way pneumatic valve (11). The group remotely regulates the flow rate through an electric needle valve (14) and a flow sensor (15). The other outlet of the three-way pneumatic valve (11) is the user outlet. A liquid detection sensor (16) is connected to the liquid separator (12). A pressure sensor (17) is installed at the outlet of the liquid separator (12). The outlet of the liquid separator (12) is connected to a three-way pneumatic valve (18) through a pipe. The two outlets of the three-way pneumatic valve (18) are connected to a normal pressure exhaust pipe and a vacuum pumping pipe, respectively. The outlet of the liquid separator (12) is connected to the inlet of a one-way valve. The outlet of the one-way valve is connected to a drain pipe.

2. The system as described in claim 1, characterized in that: The pressure control valve (5) of the main pipeline constant flow module obtains the initial pressure state based on the pressure sensor (4) at the inlet end of the main liquid supply pipeline (1), and adjusts the back pressure of the pipeline at the end based on the pressure state fed back by the pressure sensor (7) at the liquid-gas separator (2), thereby stabilizing the pipeline pressure at the inlet end within a certain range and ensuring that the initial fluid state of the pipeline remains unchanged.

3. The system as described in claim 2, characterized in that: The liquid-gas separator (2) is connected to the drain pipe from above. The outlet of the liquid-gas separator (2) is located at the top. The gas separated by the liquid-gas separator (2) is discharged from the outlet at the top. The outlet at the top is connected to pressure sensor five (7) for air pressure monitoring. The end of the outlet at the top is connected to a three-way pneumatic valve (8). The outlet of the three-way pneumatic valve (8) is connected to the atmosphere and the vacuum pumping port through the normal pressure exhaust pipe and the vacuum pumping pipe, respectively. The internal pressure of the liquid-gas separator (2) is balanced according to the feedback of pressure sensor five (7).

4. The system as described in claim 1, characterized in that: The end of the branch pipeline flow regulation module is connected to the inlet end of flow sensor one (15), the outlet end of flow sensor one (15) is connected to the inlet end of electric needle valve one (14), the outlet end of electric needle valve one (14) adopts the shortest distance design, and the outlet of electric needle valve one (14) is directly connected to the inlet of three-way pneumatic valve two (11). The branch pipeline flow regulation module adjusts the required outlet flow through feedback from flow sensor one (15) before electric needle valve one (14).

5. The system as described in claim 1, characterized in that: It also includes a branch pipeline flow regulation module two, which includes a branch pipeline two. The inlet end of the branch pipeline two is connected to the main liquid supply pipeline (1) through a three-way valve. The outlet end of the branch pipeline two is connected to a pressure control valve three and a three-way pneumatic valve three, respectively. The pressure control valve three and the three-way pneumatic valve three are arranged in parallel, and their outlet ends are both connected to a liquid separator three. The air outlet of the pressure control valve three is connected to the sensing end of the pressure sensor three through a pipeline. An electric needle valve three and a flow sensor three are installed on the pipeline at the inlet end of the three-way pneumatic valve three. The pipeline flow regulation module 2 remotely regulates the flow through the electric needle valve 3 and the flow sensor 3. The other outlet of the three-way pneumatic valve 3 is the user outlet. The liquid separator 3 is connected to the liquid detection sensor 3. The outlet of the liquid separator 3 is equipped with the pressure sensor 4. The outlet of the liquid separator 3 is connected to the three-way pneumatic valve 5 through a pipeline. The two outlets of the three-way pneumatic valve 5 are respectively connected to the atmospheric pressure exhaust pipeline and the vacuum pumping pipeline. The liquid outlet of the liquid separator 3 is connected to the liquid inlet of the one-way valve 3. The liquid outlet of the one-way valve 3 is connected to the liquid drain pipeline.

6. The system as described in claim 5, characterized in that: The branch pipe (9) of the branch pipe flow regulation module and the branch pipe (2) of the branch pipe flow regulation module are both installed on the top of the single-piece process swing arm near the nozzle. The branch pipe (9) and the branch pipe (2) both pass through the hollow swing arm structure. The swing arm structure is a three-section shaft structure. The middle section shaft of the three-section shaft structure is a hollow shaft into which a hollow direct drive motor is inserted. The internal diameters of the front and rear shafts of the three-section shaft structure are both larger than the middle shaft, and the diameter of the middle shaft is not larger than the diameter of the hollow direct drive motor.

7. A fluid supply method for an ozone water flow control system for an RCA process as described in any one of claims 1 to 6, characterized in that, Includes the following steps: 1) During the start-up phase, i.e. the standby phase of the main pipeline, the bypass route of the three-way pneumatic valve two (11) and the three-way pneumatic valve three is opened, and then the ozone water system (3) is started. The ozone solution enters the bypass route. At this time, the pressure control valve (5) is linked according to the data of the pressure sensor (4) to stabilize the flow rate of the main pipeline within a certain range. 2) During the flow regulation stage, i.e. the branch pipeline standby stage, electric needle valve one (14) and electric needle valve three reduce the flow rate to the operating value according to the feedback of flow sensor one (15) and flow sensor three respectively. At this time, pressure control valve one (10) and pressure control valve three stabilize the branch pipeline inlet pressure within a certain range according to the feedback data of pressure sensor one (13) and pressure sensor three respectively. 3) During the usage phase, i.e. the user end switching phase, after the standby pressure / flow stabilizes, the three-way pneumatic valve two (11) and the three-way pneumatic valve three are switched to the user end outlet, and the ozone solution is put into use through the user end outlet.

8. The fluid supply method as described in claim 7, characterized in that: In step 1), both the three-way pneumatic valve 2 (11) and the three-way pneumatic valve 3 use reversing three-way valves; the electric needle valve 1 (14) and the electric needle valve 3 are in the maximum opening state. The pressure sensor (4) monitors the pressure characteristics when the outlet flow of the flow sensor 1 (15) and the flow sensor 3 reaches the required pressure. The pressure control valve (5) is used to eliminate the pressure fluctuation of the main pipeline and ensure that the pressure entering the pressure sensor 1 (13) and the pressure sensor 3 is stable.

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