Lower water cooling plate and water cooling air exhaust lifting mechanism of small melting chamber of a melting machine

Abstract

The application provides a lower water cooling plate of a small melting chamber of a melting machine and a water cooling air exhaust lifting mechanism, which comprises a lifting mechanism main body, the lifting mechanism main body comprises an upper water cooling plate and a lower water cooling plate, the lower water cooling plate is fixedly connected with the lower end of a lower water cooling plate lifting shaft, the upper end of the lower water cooling plate lifting shaft is connected with a lifting motor module, the lifting motor module is fixed on the upper water cooling plate, the inside of the lower water cooling plate lifting shaft is screwed into a lower water cooling plate lifting shaft inner tube; the upper water cooling plate is further fixed with a lifting support sleeve, the upper and lower ends of the lifting support sleeve are each provided with a guide copper sleeve, the guide copper sleeve at the upper end is pressed by a pressing plate, and the guide copper sleeve at the lower end is pressed by the gravity of the lifting support sleeve; the lower water cooling plate is fixedly connected with a lower water cooling plate lifting guide column, the upper end of the lower water cooling plate lifting guide column slides in the guide copper sleeve, and the inside of the lower water cooling plate lifting guide column is screwed into a lower water cooling plate lifting guide column inner tube.

Description

Technical Field

[0001] This invention relates to the fields of melting machines, semiconductor equipment, and lifting mechanisms, and specifically to a lower water-cooled plate and a water-cooled exhaust lifting mechanism for a small melting chamber of a melting machine. Background Technology

[0002] In general, the lower water-cooling plate and water-cooling exhaust in the small melting chamber of a typical melting machine are fixed together and supported by left and right support frames. Over time, the left and right support frames will deform under the action of gravity, which may affect the yield of quartz crucibles. Summary of the Invention

[0003] To address the problems existing in the prior art, the present invention provides a lower water-cooled plate and a water-cooled exhaust lifting mechanism for a small melting chamber of a melting machine, so as to solve at least one of the above-mentioned technical problems.

[0004] The technical solution of the present invention is: a lower water-cooled plate and a water-cooled exhaust lifting mechanism for a small melting chamber of a melting machine, comprising a lifting mechanism body, characterized in that the lifting mechanism body comprises an upper water-cooled plate and a lower water-cooled plate, the lower water-cooled plate is fixedly connected to the lower end of a lower water-cooled plate lifting shaft, the upper end of the lower water-cooled plate lifting shaft is connected to a lifting motor module, the lifting motor module is fixed on the upper water-cooled plate, and the interior of the lower water-cooled plate lifting shaft is screwed into an inner tube of the lower water-cooled plate lifting shaft by threads;

[0005] A lifting support sleeve is also fixed on the upper water cooling plate. Guide copper sleeves are provided at the upper and lower ends of the lifting support sleeve. The guide copper sleeve at the upper end is pressed by a pressure plate, and the guide copper sleeve at the lower end is pressed by the gravity of the lifting support sleeve.

[0006] A lower water-cooling plate lifting guide column is fixedly connected to the lower water-cooling plate. The upper end of the lower water-cooling plate lifting guide column slides inside the guide copper sleeve. The interior of the lower water-cooling plate lifting guide column is screwed into the inner tube of the lower water-cooling plate lifting guide column through threads.

[0007] The lower water-cooling plate and water-cooled exhaust lifting mechanism of the small melting chamber of this melting machine are both hoisted and connected from the upper water-cooling plate, making the structure relatively reliable. Both the lower water-cooling plate and the water-cooled exhaust can be raised and lowered independently, accommodating water-cooled molds of different heights. The height distance between the water-cooled mold and the lower water-cooling plate can also be adjusted. Experiments were conducted to adjust the impact of different height process parameters on the yield of quartz crucibles, thereby selecting the optimal height distance as the process parameter.

[0008] Further preferably, the lifting mechanism body also includes an upper water-cooled side plate, which, together with the upper water-cooled plate, forms the top cover of the small melting chamber. Two lifting motor modules are provided, respectively mounted on the upper water-cooled side plate and the upper water-cooled plate. This reduces modifications to original components and saves costs.

[0009] Further optimized, the lower water-cooled plate lifting shaft is provided with two shafts, which are diagonally staggered; the lower water-cooled plate lifting guide column is provided with two guide columns, which are diagonally staggered. This results in smoother operation.

[0010] Further preferably, the main body of the lifting mechanism also includes a water-cooled exhaust lifting shaft and a water-cooled exhaust transition plate. The lower end of the water-cooled exhaust lifting shaft is fixed to the water-cooled exhaust transition plate, the water-cooled exhaust transition plate is connected to the water-cooled exhaust fan, the upper end of the water-cooled exhaust lifting shaft is connected to the lifting motor module on the upper water-cooled side plate, and the interior of the water-cooled exhaust lifting shaft is screwed into the water-cooled exhaust lifting shaft inner tube by threads.

[0011] In a further preferred embodiment, the lower end of the water-cooled exhaust fan and the lower end of the water-cooled exhaust fan lifting guide column are fixedly connected, the upper end of the water-cooled exhaust fan lifting guide column slides inside the guide copper sleeve, and the interior of the water-cooled exhaust fan lifting guide column is screwed into the inner tube of the water-cooled exhaust fan lifting guide column by threads.

[0012] In a further preferred embodiment, a water-cooled exhaust guide column is fixed on the upper water-cooled side plate, and a water-cooled exhaust guide copper sleeve is fitted on the water-cooled exhaust guide column, and the water-cooled exhaust guide copper sleeve is connected to the water-cooled exhaust via a fixing seat.

[0013] Further preferably, there are two water-cooled exhaust lifting shafts, which are distributed in pairs, and the water-cooled exhaust guide columns are distributed on the other side of the water-cooled exhaust lifting shafts. This makes the water-cooled exhaust and its operation more stable.

[0014] In a further preferred embodiment, the upper and lower water-cooled exhaust fans are fixed together by a water-cooled exhaust fan connecting plate.

[0015] Further optimization resulted in the upper water-cooled plate, upper water-cooled plate side plate, lower water-cooled plate, lower water-cooled exhaust fan, upper water-cooled exhaust fan, and lifting support sleeve all being water-cooled structures with water inlet at the bottom and drainage at the top. This design is intended to accommodate temperatures exceeding 2000 degrees Celsius in the small melting chamber.

[0016] In a further preferred embodiment, the lower water-cooled plate lifting guide column receives water from the upper end of its inner tube and drains water from the upper end of its inner tube. All parts containing an inner tube have water entering through the inner tube opening.

[0017] Furthermore, the upper water-cooling plate is also equipped with a motor water-cooling cover for heat insulation. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2This is a schematic diagram of the water-cooled exhaust lifting structure of the present invention;

[0020] Figure 3 This is a cross-sectional view of the water-cooled plate lifting guide column of the present invention.

[0021] In the diagram: 1. Upper water-cooled plate, 2. Inner tube of lower water-cooled plate lifting guide column, 3. Lower water-cooled plate lifting guide column, 4. Pressure plate, 5. Lifting support sleeve, 6. Lifting motor module, 7. Inner tube of lower water-cooled plate lifting shaft, 8. Lower water-cooled plate lifting shaft, 9. Inner tube of water-cooled exhaust lifting guide column, 10. Water-cooled exhaust lifting guide column, 11. Upper water-cooled plate side plate, 12. Inner tube of water-cooled exhaust lifting shaft, 13. Water-cooled exhaust lifting shaft, 14. Upper water-cooled exhaust, 15. Lower water-cooled exhaust, 16. Water-cooled exhaust connecting plate, 17. Water-cooled exhaust transition plate, 18. Lower water-cooled plate, 19. Motor water-cooling cover, 20. Guide copper sleeve, 21. Water-cooled exhaust guide copper sleeve, 22. Water-cooled exhaust guide column, 23. Fixing base Detailed Implementation

[0022] The present invention will now be further described with reference to the accompanying drawings.

[0023] Reference Figures 1-3 As shown, a water-cooled plate and water-cooled exhaust lifting mechanism for a small melting chamber of a melting machine include a lifting mechanism body, which includes an upper water-cooled plate 1 and a lower water-cooled plate 18. The lower water-cooled plate is fixedly connected to the lower end of a lower water-cooled plate lifting shaft 8, and the upper end of the lower water-cooled plate lifting shaft is connected to a lifting motor module 6. The lifting motor module is fixed on the upper water-cooled plate, and the interior of the lower water-cooled plate lifting shaft is screwed into an inner tube 7. A lifting support sleeve 5 is also fixed on the upper water-cooled plate, and guide copper sleeves 20 are provided at both the upper and lower ends of the lifting support sleeve. The guide copper sleeve at the upper end is pressed by a pressure plate 4, and the guide copper sleeve at the lower end is pressed by the gravity of the lifting support sleeve. A lower water-cooled plate lifting guide post 3 is fixedly connected to the lower water-cooled plate. The upper end of the lower water-cooled plate lifting guide post slides in the guide copper sleeve, and the interior of the lower water-cooled plate lifting guide post is screwed into an inner tube 2.

[0024] The lower water-cooling plate and water-cooled exhaust lifting mechanism of the small melting chamber of this melting machine are both hoisted and connected from the upper water-cooling plate, making the structure relatively reliable. Both the lower water-cooling plate and the water-cooled exhaust can be raised and lowered independently, accommodating water-cooled molds of different heights. The height distance between the water-cooled mold and the lower water-cooling plate can also be adjusted. Experiments were conducted to adjust the impact of different height process parameters on the yield of quartz crucibles, thereby selecting the optimal height distance as the process parameter.

[0025] Further optimization includes an upper water-cooled side plate as the main body of the lifting mechanism. The upper water-cooled side plate and the upper water-cooled plate form the top cover of the small melting chamber. Two lifting motor modules are provided, one on the upper water-cooled side plate and the other on the upper water-cooled plate. This reduces modifications to the original components and saves costs.

[0026] Further optimization involves having two lower water-cooled plate lifting shafts, arranged diagonally in a staggered pattern, and two lower water-cooled plate lifting guide columns, also arranged diagonally in a staggered pattern. This results in smoother operation.

[0027] In a further preferred embodiment, the main body of the lifting mechanism also includes a water-cooled exhaust lifting shaft 13 and a water-cooled exhaust transition plate 17. The lower end of the water-cooled exhaust lifting shaft is fixed to the water-cooled exhaust transition plate, the water-cooled exhaust transition plate is connected to the water-cooled exhaust lower 15, the upper end of the water-cooled exhaust lifting shaft is connected to the lifting motor module on the upper water-cooled side plate, and the interior of the water-cooled exhaust lifting shaft is screwed into the water-cooled exhaust lifting shaft inner tube 12.

[0028] In a further preferred embodiment, the lower end of the water-cooled exhaust fan and the lower end of the water-cooled exhaust fan lifting guide column 10 are fixedly connected, the upper end of the water-cooled exhaust fan lifting guide column slides inside the guide copper sleeve, and the interior of the water-cooled exhaust fan lifting guide column is screwed into the inner tube 9 of the water-cooled exhaust fan lifting guide column through threads.

[0029] Further preferred, a water-cooled exhaust guide column 22 is fixed on the upper water-cooled side plate, and a water-cooled exhaust guide copper sleeve 21 is fitted on the water-cooled exhaust guide column, and the water-cooled exhaust guide copper sleeve is connected to the upper water-cooled exhaust 14 through a fixing seat 23.

[0030] Further optimization involves having two water-cooled exhaust lifting shafts, arranged in pairs, with water-cooled exhaust guide columns distributed on the other side of the lifting shafts. This ensures smoother operation of the water-cooled exhaust system.

[0031] Further optimization involves fixing the upper and lower water-cooled exhaust fans via a water-cooled exhaust fan connecting plate 16.

[0032] Further optimization resulted in the upper water-cooled plate, the upper water-cooled plate side plate 11, the lower water-cooled plate, the lower water-cooled exhaust fan, the upper water-cooled exhaust fan, and the lifting support sleeve all being water-cooled structures with water inlet at the bottom and drainage at the top. This design is intended to accommodate temperatures exceeding 2,000 degrees Celsius in the small melting chamber.

[0033] Further optimization involves the lower water-cooled plate lifting guide column having water entering from the upper end of its inner tube and exiting from the upper end of its outer tube. All parts containing an inner tube have water entering through the inner tube opening.

[0034] Further optimization involves providing a motor water-cooling cover 19 on the upper water-cooling plate for heat insulation.

[0035] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A lower water-cooled plate and water-cooled exhaust lifting mechanism for a small melting chamber of a melting machine, comprising a lifting mechanism body, characterized in that, The lifting mechanism body includes an upper water-cooled plate and a lower water-cooled plate. The lower water-cooled plate is fixedly connected to the lower end of the lower water-cooled plate lifting shaft. The upper end of the lower water-cooled plate lifting shaft is connected to a lifting motor module. The lifting motor module is fixed on the upper water-cooled plate. The lower water-cooled plate lifting shaft is screwed into an inner tube by threads. A lifting support sleeve is also fixed on the upper water cooling plate. Guide copper sleeves are provided at the upper and lower ends of the lifting support sleeve. The guide copper sleeve at the upper end is pressed by a pressure plate, and the guide copper sleeve at the lower end is pressed by the gravity of the lifting support sleeve. A lower water-cooling plate lifting guide column is fixedly connected to the lower water-cooling plate. The upper end of the lower water-cooling plate lifting guide column slides inside the guide copper sleeve. The interior of the lower water-cooling plate lifting guide column is screwed into the inner tube of the lower water-cooling plate lifting guide column through threads.

2. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 1, characterized in that, The main body of the lifting mechanism also includes an upper water-cooled side plate, which together with the upper water-cooled plate form the top cover of the small melting chamber. The lifting motor module is provided in two sets, which are respectively installed on the upper water-cooled side plate and the upper water-cooled plate.

3. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 1, characterized in that, There are two lower water-cooled plate lifting shafts, which are diagonally staggered. There are also two lower water-cooled plate lifting guide columns, which are diagonally staggered.

4. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 2, characterized in that, The main body of the lifting mechanism also includes a water-cooled exhaust lifting shaft and a water-cooled exhaust transition plate. The lower end of the water-cooled exhaust lifting shaft is fixed to the water-cooled exhaust transition plate, the water-cooled exhaust transition plate is connected to the water-cooled exhaust fan, the upper end of the water-cooled exhaust lifting shaft is connected to the lifting motor module on the upper water-cooled side plate, and the interior of the water-cooled exhaust lifting shaft is screwed into the water-cooled exhaust lifting shaft inner tube by threads.

5. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 4, characterized in that, The lower end of the water-cooled exhaust fan and the lower end of the water-cooled exhaust fan lifting guide column are fixedly connected. The upper end of the water-cooled exhaust fan lifting guide column slides inside the guide copper sleeve. The inner tube of the water-cooled exhaust fan lifting guide column is screwed into the inside of the water-cooled exhaust fan lifting guide column through threads.

6. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 2, characterized in that, A water-cooled exhaust guide column is fixed on the upper water-cooled side plate. A water-cooled exhaust guide copper sleeve is fitted on the water-cooled exhaust guide column, and the water-cooled exhaust guide copper sleeve is connected to the water-cooled exhaust via a fixing seat.

7. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 4, characterized in that, There are two water-cooled exhaust lifting shafts, and the two water-cooled exhaust lifting shafts are distributed in pairs. The water-cooled exhaust guide columns are distributed on the other side of the water-cooled exhaust lifting shafts.

8. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 7, characterized in that, The upper water-cooled plate, upper water-cooled side plate, lower water-cooled plate, lower water-cooled exhaust fan, upper water-cooled exhaust fan, and lifting support sleeve are all water-cooled structures, with water inlet at the bottom and drainage outlet at the top.

9. The lower water-cooled plate and water-cooled exhaust lifting mechanism of the small melting chamber of a melting machine according to claim 1, characterized in that, The water-cooled plate lifting guide column receives water from the upper end of its inner tube and drains water from the upper end of its outer tube.

Images