A method for manufacturing a die for a waveguide sheet and a waveguide sheet and an AR module

Abstract

This invention relates to a method for manufacturing a panelized working mold for waveguide sheets, as well as waveguide sheets and AR modules. The manufacturing method includes: obtaining a first working mold with a single set of grating structures; obtaining a second working mold by spin coating, wherein the surface of the grating structure in the second working mold is covered with a soft film adhesive; obtaining a panelized soft film based on at least one second working mold by imprinting, wherein the panelized soft film has two or more sets of grating structures, and the grating structures in the panelized soft film are identical to those in the first and second working molds; and transferring the grating structures in the panelized soft film onto a working mold substrate to obtain the panelized working mold. This invention manufactures an 8 / 12-inch nano-imprinted panelized working mold from a single master mold through a panelization process, thereby improving the production efficiency of waveguide sheets with grating structures, facilitating rapid mass production, and realizing industrialization.

Description

Technical Field

[0001] This invention relates to waveguide sheet fabrication technology, and more particularly to a method for manufacturing a waveguide sheet assembly mold, as well as waveguide sheets and AR modules. Background Technology

[0002] With the rapid development of electronic information technology, AR (Augmented Reality) technology has also made substantial progress. Due to its optical characteristics, AR technology can project virtual scenes onto real-world images, giving users a unique experience that combines the real and virtual worlds.

[0003] Currently, waveguide sheets for AR display modules are mainly produced directly from 4-inch master molds, such as... Figure 1 As shown, existing methods involve imprinting a template (referred to as a flexible film) onto a master plate with a grating structure. The grating structure is transferred from the master plate to the flexible film, which is then used to transfer the grating structure to the product. This method can only achieve imprinting on 4-inch master plates, resulting in low production capacity, and the final product contains only one set of grating structures. How to achieve multiple sets of grating structures on a single template has become a pressing technical problem that needs to be solved.

[0004] However, the low yield, long time and high cost of semiconductor process for manufacturing 8 / 12-inch multi-panel master molds cannot meet production needs. There is an urgent need for a low-cost and high-capacity panelization process to realize the manufacturing method of 8 / 12-inch panelization working molds. Summary of the Invention

[0005] (a) Technical problems to be solved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a method for manufacturing a waveguide sheet assembly working mold, a waveguide sheet, and an AR module.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, the main technical solutions adopted by the present invention include:

[0009] In a first aspect, embodiments of the present invention provide a method for manufacturing a waveguide sheet assembly mold, comprising:

[0010] S10. Obtain the first working mold with a single set of grating structures;

[0011] S20. A second working mold is obtained by means of a spin coating process, wherein the surface of the grating structure in the second working mold is covered with a soft film adhesive.

[0012] S30. Based on at least one second working mold, a printing soft film is obtained by means of an imprinting method. The printing soft film has two or more sets of grating structures, and the grating structures in the printing soft film are consistent with the grating structures of the first working mold and the second working mold.

[0013] S40. The grating structure in the panelization soft film is transferred to the working mold substrate to obtain the panelization working mold.

[0014] Optionally, S20 includes:

[0015] S21. A soft film adhesive is spin-coated onto the front side of the first working mold using a spin coating process to obtain an intermediate structure; the front side of the first working mold is the surface of a grating structure.

[0016] S22. Wipe away the soft film adhesive on the edge area of ​​the intermediate structure to obtain the second working mold.

[0017] Optionally, S30 includes:

[0018] Based on the grating structure covered with soft film adhesive in the second working mold, an imprinting process is performed at a designated position on the flexible soft film; a first panelized soft film intermediate and an imprinted working mold are obtained, wherein the imprinted working mold is the same as the first working mold;

[0019] For the working mold after embossing, repeat step S20 to obtain a second working mold, and perform embossing at a designated position on the first imposition soft film intermediate; thus obtaining the Nth imposition soft film intermediate and the working mold after embossing, where N is a natural number greater than or equal to 2; and

[0020] For the working mold after the embossing process, repeat the steps in S20 to obtain the second working mold, and perform embossing at a designated position in the middle of the Nth imposition soft film; to obtain the imposition soft film;

[0021] The flexible film is a flexible substrate with pre-designed layout and position information for each set of grating structures.

[0022] Optionally, S30 includes:

[0023] After obtaining P second working dies, fix the P second working dies in sequence at the designated positions on the imprinting platform; P is a natural number greater than or equal to 2.

[0024] The imprinting platform uses an imprinting method to imprint on the flexible film to obtain the imprinted film.

[0025] The number of grating structures in the printing plate is P. The designated position of the second working mold installed in the imprinting platform corresponds to the position information of the grating structure pre-laid on the flexible film, and the grating structure surface of all the second working molds installed on the imprinting platform faces the flexible film.

[0026] Optionally, the imprinting platform is a microporous platform, which includes: regularly arranged microporous structures, and a control device for controlling each microporous structure to be under vacuum, wherein the control device is connected to all microporous structures;

[0027] Each second working mold is adsorbed onto a designated position on the microporous platform by vacuum adsorption.

[0028] Optionally, S22 includes:

[0029] The intermediate structure is placed centrally on the adhesive application platform, and the adhesive application platform fixes the intermediate structure by vacuum adsorption.

[0030] The adhesive application platform moves to a set position below the adhesive application head, and the adhesive application head descends to a designated area on the surface of the intermediate structure. The adhesive application platform then applies adhesive by moving.

[0031] After the adhesive is applied to a designated area on one side, the adhesive application platform rotates at a preset angle to repeat the application to the designated area on the other side until all the soft film adhesive on the edge area of ​​the middle structure is removed.

[0032] Optionally, the second working mold is a rectangular working mold less than 4 inches after cutting, and the panel working mold is an 8-inch or 12-inch panel structure;

[0033] And / or,

[0034] The thickness of the soft film adhesive in the second working mold is less than or equal to 2 μm;

[0035] And / or,

[0036] The adhesive film is an acrylic resin-based adhesive;

[0037] And / or, the viscosity of the soft film adhesive is less than or equal to 50 cps.

[0038] Optionally, S10 includes:

[0039] Obtain a master template with a single set of grating structures;

[0040] The grating structure of the master template is transferred onto a flexible substrate to obtain a first soft film;

[0041] The structure of the first flexible film is transferred onto the wafer glass and cut to obtain the first working mold.

[0042] Secondly, embodiments of the present invention also provide a waveguide sheet, wherein the waveguide sheet is prepared using a panelization die prepared by any of the manufacturing methods described in the first aspect.

[0043] Thirdly, embodiments of the present invention also provide an AR module, which includes the waveguide sheet described in the second aspect.

[0044] (III) Beneficial Effects

[0045] In the method of this invention, a single master plate is made into an 8 / 12-inch nanoimprinting working mold through a panelization process, which improves the production efficiency of grating waveguides, facilitates mass production and rapid production, and realizes industrialization.

[0046] Furthermore, a flexible adhesive film is spin-coated onto the entire surface of the first working mold using a spin coating method. Then, an adhesive removal device is used to wipe away the ineffective areas on the sides of the working mold after the adhesive film has been applied, removing the adhesive film and ensuring it only covers the grating area of ​​the tool mold, thus obtaining the second working mold. The resulting mold is then fabricated using nanoimprinting to create the panelized flexible film, ultimately completing the fabrication of the panelized working mold. This method improves the production efficiency of grating waveguides, facilitating rapid mass production and industrialization. Attached Figure Description

[0047] Figure 1 A flowchart illustrating the fabrication process of a 4-inch embossing die, provided for use in the prior art.

[0048] Figure 2A and Figure 2B These are schematic flowcharts illustrating the method for manufacturing a waveguide sheet assembly mold according to an embodiment of the present invention.

[0049] Figure 3 This is a schematic diagram illustrating the manufacturing steps of a patterned flexible film according to an embodiment of the present invention;

[0050] Figure 4 This is a schematic diagram illustrating the process of a microporous platform adsorbing a second working mold according to another embodiment of the present invention.

[0051] Figure 5 A schematic flowchart illustrating a method for manufacturing a waveguide sheet assembly mold according to another embodiment of the present invention;

[0052] Figure 6 and Figure 7 These are schematic diagrams of the moving parts of the adhesive application platform;

[0053] Figure 8 This is a schematic diagram illustrating the process of eliminating existing "protrusion" defects according to an embodiment of the present invention. Detailed Implementation

[0054] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0055] In this embodiment of the invention, a single master template is a master template with only one set of grating structures, also known as a primary mold; that is, a mold containing a set of grating structures made using existing semiconductor processes is the master template / primary mold. Typically, both the master template and the primary mold can be fabricated using nanoimprint lithography.

[0056] A single master template is used to create a panelization working mold with multiple grating structures through a panelization process.

[0057] The panelization process in this embodiment of the invention can be understood as transforming a master plate with only one set of grating structures into a panelization working mold by using a panelization process to realize that a master plate has multiple sets of grating structures.

[0058] Example 1

[0059] like Figure 2A and Figure 2B As shown, this embodiment of the invention provides a method for manufacturing a waveguide sheet assembly mold, specifically including the following steps:

[0060] S10. Obtain the first working mold with a single set of grating structures.

[0061] For example, first, a master template with a single grating structure is obtained; then, the grating structure of the master template is transferred onto a flexible substrate to obtain a first soft film; then, the structure of the first soft film is transferred onto a wafer glass and cut to obtain a first working mold.

[0062] S20. A second working mold is obtained by means of a spin coating process, wherein the surface of the grating structure in the second working mold is covered with a soft film adhesive.

[0063] For example, a spin coating process can be used to spin coat a soft film adhesive onto the front side of the first working mold to obtain an intermediate structure; the soft film adhesive in the upper edge area of ​​the intermediate structure can be wiped off to obtain a second working mold; the front side of the first working mold is the surface of a grating structure.

[0064] The thickness of the flexible film adhesive in the second working mold is less than or equal to 2 μm. Typically, acrylic resin-based adhesives are used for the flexible film adhesive; to ensure sufficient viscosity, the viscosity of the adhesive is less than or equal to 50 cps.

[0065] S30. Based on at least one second working mold, a printing plate soft film is obtained by means of an imprinting method. The printing plate soft film has two or more sets of grating structures, and the grating structures in the printing plate soft film are consistent with the grating structures of the first working mold and the second working mold. Figure 3 and Figure 5 The diagram shown illustrates the manufacturing process.

[0066] S40. The grating structure in the panelization soft film is transferred to the working mold substrate to obtain the panelization working mold.

[0067] In this embodiment, the second working mold can be a rectangular working mold less than 4 inches after cutting, and the panel working mold can be an 8-inch or 12-inch panel structure.

[0068] In this embodiment, a single master plate is fabricated into an 8 / 12-inch nanoimprinting working mold through a panelization process, which improves the production efficiency of grating waveguides, facilitates rapid mass production, and enables industrialization.

[0069] In one possible implementation process, Figure 3 In this context, S30 includes:

[0070] Based on the grating structure covered with soft film adhesive in the second working mold, an imprinting process is performed at a designated position on the flexible soft film; a first panelized soft film intermediate and an imprinted working mold are obtained, wherein the imprinted working mold is the same as the first working mold;

[0071] For the working mold after embossing, repeat step S20 to obtain a second working mold, and perform embossing at a designated position on the first imposition soft film intermediate; thus obtaining the Nth imposition soft film intermediate and the working mold after embossing, where N is a natural number greater than or equal to 2; and

[0072] For the working mold after the embossing process, repeat the steps in S20 to obtain the second working mold, and perform embossing at a designated position in the middle of the Nth imposition soft film; to obtain the imposition soft film;

[0073] The flexible film is a flexible substrate with pre-designed layout and position information for each set of grating structures.

[0074] In the second possible implementation process, Figure 4 In this context, S30 includes:

[0075] After obtaining P second working molds, the P second working molds are sequentially fixed at designated positions on the imprinting platform; P is a natural number greater than or equal to 2; in this embodiment, the imprinting platform is a microporous platform, which includes: regularly arranged microporous structures, a control device for controlling each microporous structure to be in a vacuum, and the control device is connected to all microporous structures; each second working mold is adsorbed at a designated position on the microporous platform by vacuum adsorption.

[0076] The imprinting platform uses an imprinting method to imprint on the flexible film to obtain the imprinted film.

[0077] The number of grating structures in the printing plate is P. The designated position of the second working mold installed in the imprinting platform corresponds to the position information of the grating structure pre-laid on the flexible film, and the grating structure surface of all the second working molds installed on the imprinting platform faces the flexible film.

[0078] Example 2

[0079] This embodiment provides a process for manufacturing a panel-type working mold, combined with... Figure 2A and Figure 3 As shown, the specific steps include the following:

[0080] 201. Obtain a single master, which is a single master required to process a product using semiconductor processes (such as nanoimprinting).

[0081] This step can be achieved using existing methods, typically with a single master template being a 4-inch round or 4-inch square. Figure 2A The image shown is a square master template.

[0082] 202. Using nanoimprinting, the grating structure of the master plate is transferred onto a flexible substrate of paper to obtain a first soft film.

[0083] like Figure 2A The structure of the first soft film shown is that the structure on the master plate is imprinted onto a large flexible substrate through nanoimprinting, and the grating area is transferred 1:1.

[0084] In this embodiment, embossing and transfer achieve the same purpose.

[0085] 203. Using nanoimprinting, the structure on the soft film is imprinted onto the wafer glass with the help of a soft film adhesive to create a working mold.

[0086] The main component of the flexible film adhesive is acrylic resin. The working mold structure is as follows: resin is placed on the wafer glass, and after imprinting, the grating structure configuration on the flexible film is imprinted on the resin.

[0087] 204. Working mold cutting steps: Using cutting equipment, the working mold is cut into the specified working mold shape required for the assembly, and the cut working mold is the first working mold of Example 1.

[0088] In this embodiment, the first working mold can be rectangular, but it can also be other shapes. This embodiment does not limit it and can be selected according to actual needs.

[0089] 205. Steps for making a PVC film print:

[0090] a) Apply a pre-set thickness of soft film adhesive to the front side of the cutting work mold using a spin coater;

[0091] b) After spin coating, use an adhesive removal device to remove the soft film adhesive beyond 3mm of the cut working mold edge and sides. The working mold after adhesive removal is the second working mold corresponding to Embodiment 1; such as Figure 6 and Figure 7 As shown.

[0092] c) Nanoimprint the coated working mold at a designated location on a pre-designed flexible substrate;

[0093] Repeat steps a), b), and c) until the desired layout is printed on the pre-designed flexible substrate.

[0094] Understandably, before the layout design in the flexible substrate is required, the position of the working mold imprinting on the flexible substrate is specified.

[0095] In this embodiment, multiple cutting working molds can be made, and then the above a), b) and c) are performed to obtain the panelized soft film.

[0096] Alternatively, a cutting mold can be made, and after completing c) above, a), b) and c) above can be repeated. That is, the above imposition soft film production steps can be repeated according to the flexible substrate of the layout design to obtain the final imposition soft film.

[0097] The purpose of the layout in this embodiment is to maximize the number of grating structures on the flexible film, allowing for flexible design. The flexible film in this embodiment may include two or more sets of grating structures, such as... Figure 2A and Figure 3 The seven grating structures shown are on a single panel of flexible film.

[0098] 206. Transfer the structure of the stencil soft film to the working mold substrate to obtain the product, which is the stencil working mold.

[0099] In this embodiment, the working mold substrate can be an 8-inch working mold substrate.

[0100] The method of this embodiment includes: applying a soft film adhesive to the entire surface of a first working mold (e.g., a rectangular working mold, i.e., a master mold, which is convenient for layout design) using spin coating; then, using an adhesive wiping device, wiping away the ineffective areas on the sides of the working mold after the soft film adhesive has been applied, removing the soft film adhesive so that it only covers the grating area of ​​the tool mold, thus obtaining a second working mold; and finally, fabricating the layout soft film using nanoimprinting, thereby completing the fabrication of the layout working mold. This method can improve the production efficiency of grating waveguides, facilitate rapid mass production, and achieve industrialization.

[0101] Example 3

[0102] This embodiment provides a process for manufacturing a panel-type working mold, such as... Figure 4 and Figure 5 As shown, the difference between the manufacturing process in this embodiment and the manufacturing process in Embodiment 2 lies in step 205, where step 305 includes:

[0103] 305. Steps for making a patterned stretch film:

[0104] A1. Use a spin coater to spin coat the soft film adhesive on the front side of the second working mold to obtain the intermediate structure.

[0105] It should be noted that this sub-step requires specific requirements for the viscosity of the soft film adhesive, the adhesive application device, and the imprinting platform; for example, the viscosity of the soft film adhesive needs to be controlled within 50 cps, and with the preset spin coating parameters and imprinting parameters, the coating thickness needs to be controlled within 2 μm.

[0106] For example, since different devices have different parameter settings, they can be set according to actual needs.

[0107] A2. After spin coating, use an adhesive wiping device to remove the invalid wet adhesive beyond 3mm of the edge and the sides to obtain the second working mold.

[0108] In this sub-step, the aforementioned intermediate structure m02 can be a rectangular structure. In this case, the intermediate structure can be centrally placed on the adhesive application platform m01 and vacuum-adsorbed. When the adhesive application material m04 is provided on the rotating structure connected to the adhesive application head m03, the adhesive application platform m01 moves to a position below the adhesive application head m03, the adhesive application head descends to the surface of the working mold, and the adhesive application platform moves to perform adhesive application. After one side is finished with adhesive application, the adhesive application platform rotates 90° and repeats the adhesive application action until all four sides are finished with adhesive application. Figure 6 and Figure 7 As shown.

[0109] A3. Place the second working mold, after applying the adhesive, at the designated position on the embossing platform, such as... Figure 5 As shown.

[0110] In this step, the imprinting platform needs to use a microporous platform. The microporous platform has multiple microporous structures, and each pore in the microporous structure can be selectively vacuumed. Based on the imported layout drawing and the placement position, the microporous platform selectively opens the corresponding vacuum pores to ensure that each second working mold can be adsorbed onto the imprinting platform. For example... Figure 4 The left side is shown.

[0111] A4. Repeat steps A1, A2, and A3 until the required layout and placement of the working mold are completed, such as... Figure 4 The right side shown;

[0112] A5. Perform nanoimprinting in one step to obtain the printing die.

[0113] In this embodiment, by wiping away the soft film adhesive around the central structure, compared to the prior art method of directly spin-coating the entire substrate with soft film adhesive, this avoids... Figure 8 The "step" type defect shown is an example of this. In this embodiment, if the adhesive wiping method is not used, the adhesive will spread and overflow from the working mold during the production of the soft film, and the overflow portion forms a "step" type defect on the soft film.

[0114] The "step" type defect here can be explained as follows: When the adhesive used in the flexible film adhesive b01 completely covers the cut working mold b02, during the subsequent one-time nano-imprinting process using the imprinting platform b04, the adhesive will overflow into the gaps between the working molds due to pressure. After curing the adhesive by heating or irradiating with UV, the flexible film b03 will retain not only the grating structure on the second working mold, but also the shape of the adhesive overflowing into the gaps, leaving step-like protrusions on the flexible film b03. When transferring the structure on the flexible film b03 to the working mold substrate, the step-like protrusions may prevent the structure on the flexible film from fully adhering to the surface of the working mold substrate, affecting the imprinting effect.

[0115] By wiping away the wet adhesive beyond 3mm from the edge and the side in this embodiment, the adhesive is limited to a specific area of ​​the substrate. When the panelized soft film is imprinted onto the working mold substrate, all the adhesive is used to fill the gap between the panelized soft film and the working mold substrate, and will not flow into the gap between the working mold substrate. This avoids the formation of stepped protrusions made of soft film adhesive on the panelized soft film, thus improving the imprinting effect of the panelized film.

[0116] By using the above-mentioned wiping method, the adhesive is limited to a specific area of ​​the substrate. When the stencil film is imprinted onto the working mold, all the adhesive is used to fill the gap between the stencil film and the working mold, and will not flow into the gap between the working molds. This avoids the formation of step-like protrusions made of film adhesive on the stencil film, thus improving the imprinting effect of the stencil.

[0117] Example 4

[0118] This embodiment also provides a waveguide sheet, the waveguide sheet being prepared using a panelization die prepared by any one of the manufacturing methods described in Embodiments 1-3.

[0119] In addition, embodiments of the present invention also provide an AR module, including the waveguide sheet described above.

[0120] It should be noted that any reference numerals placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In claims that enumerate several means, several of these means may be embodied by the same hardware. The use of the terms first, second, third, etc., is merely for convenience of expression and does not indicate any order. These terms can be understood as part of the component names.

[0121] Furthermore, it should be noted that in the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0122] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the claims should be interpreted to include both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0123] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, then this invention should also include these modifications and variations.

Claims

1. A method for manufacturing a waveguide sheet assembly die, characterized in that, The methods include: S10. Obtain the first working mold with a single set of grating structures; S20. Using a spin coating process, a second working mold is obtained, wherein the surface of the grating structure in the second working mold is covered with a soft film adhesive; the second working mold is a rectangular working mold less than 4 inches in size. S30. Based on at least one second working mold, a printing soft film is obtained by means of an imprinting method. The printing soft film has two or more sets of grating structures, and the grating structures in the printing soft film are consistent with the grating structures of the first working mold and the second working mold. S40. The grating structure in the panelized soft film is transferred to the working mold substrate to obtain the panelized working mold. The panelized working mold is an 8-inch or 12-inch panelized structure and includes multiple sets of grating structures. The grating area is transferred and imprinted at a 1:1 ratio; S20 includes: S21, applying a soft film adhesive to the front side of the first working mold using a spin coating process to obtain an intermediate structure; the front side of the first working mold is the surface of a grating structure; S22, wiping away the soft film adhesive in the upper edge area of ​​the intermediate structure, specifically wiping away the invalid wet adhesive beyond 3mm from the edge and the side to obtain a second working mold.

2. The manufacturing method according to claim 1, characterized in that, S30 includes: Based on the grating structure covered with soft film adhesive in the second working mold, an imprinting process is performed at a designated position on the flexible soft film; a first panelized soft film intermediate and an imprinted working mold are obtained, wherein the imprinted working mold is the same as the first working mold; For the working mold after embossing, repeat step S20 to obtain a second working mold, and perform embossing at a designated position on the first imposition soft film intermediate; thus obtaining the Nth imposition soft film intermediate and the working mold after embossing, where N is a natural number greater than or equal to 2; and For the working mold after the embossing process, repeat the steps in S20 to obtain the second working mold, and perform embossing at a designated position in the middle of the Nth imposition soft film; to obtain the imposition soft film; The flexible film is a flexible substrate with pre-designed layout and position information for each set of grating structures.

3. The manufacturing method according to claim 1, characterized in that, S30 includes: After obtaining P second working dies, fix the P second working dies in sequence at the designated positions on the imprinting platform; P is a natural number greater than or equal to 2. The imprinting platform uses an imprinting method to imprint on the flexible film to obtain the imprinted film. The number of grating structures in the printing plate is P. The designated position of the second working mold installed in the imprinting platform corresponds to the position information of the grating structure pre-laid on the flexible film, and the grating structure surface of all the second working molds installed on the imprinting platform faces the flexible film.

4. The manufacturing method according to claim 3, characterized in that, The imprinting platform is a microporous platform, which includes: regularly arranged microporous structures, and a control device for controlling each microporous structure to be under vacuum, wherein the control device is connected to all microporous structures. Each second working mold is adsorbed onto a designated position on the microporous platform by vacuum adsorption.

5. The manufacturing method according to claim 1, characterized in that, S22 includes: The intermediate structure is placed centrally on the adhesive application platform, and the adhesive application platform fixes the intermediate structure by vacuum adsorption. The adhesive application platform moves to a set position below the adhesive application head, and the adhesive application head descends to a designated area on the surface of the intermediate structure. The adhesive application platform then applies adhesive by moving. After the adhesive is applied to a designated area on one side, the adhesive application platform rotates at a preset angle to repeat the application to the designated area on the other side until all the soft film adhesive on the edge area of ​​the middle structure is removed.

6. The manufacturing method according to any one of claims 1 to 5, characterized in that: The thickness of the soft film adhesive in the second working mold is less than or equal to 2 μm; And / or, The adhesive film is an acrylic resin-based adhesive; And / or, the viscosity of the soft film adhesive is less than or equal to 50 cps.

7. The manufacturing method according to any one of claims 1 to 5, characterized in that, S10 includes: Obtain a master template with a single set of grating structures; The grating structure of the master template is transferred onto a flexible substrate to obtain a first soft film; The structure of the first flexible film is transferred onto the wafer glass and cut to obtain the first working mold.

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