Clamp assembly

Abstract

A clamp assembly includes at least one clamp for clamping a workpiece for a plating, etching, electroplating or cleaning process. The clamp includes a base, a clamping seat and a limiting member. The base is arranged on a carrier and has a guide hole and a first limiting hole. The first limiting hole is communicated with the guide hole. The clamping seat has a guide post and a second limiting hole. The second limiting hole is arranged on the guide post. The guide post is arranged in the guide hole. The second limiting hole is communicated with the first limiting hole. The limiting member is arranged in the first limiting hole and the second limiting hole. The base and the clamping seat are combined into one body to clamp the workpiece.

Description

Technical Field

[0001] This invention relates to a fixture assembly, and more particularly to a fixture assembly for wafer electroless plating, etching, electroplating and cleaning processes. Background Technology

[0002] Taiwan Patent Application No. 107112396, entitled "Wafer Fixture for Electroplating Equipment," discloses that a linkage ring 3 and a carrier 4 are installed on a carrier 2. The carrier 4 is fixed in place and is used to place the wafer B. A cover 5 covers the carrier 4, so that the wafer B is placed between the cover 5 and the carrier 4. The linkage ring 3 is rotated by the actuating rod 6, so that the linkage ring 3 tightens the cover 5 to achieve the purpose of locking and fixing, thereby fixing the wafer B between the cover 5 and the carrier 4.

[0003] However, after processes such as electroplating or cleaning, electroplating or cleaning liquids may remain on the linkage ring 3, carrier 4, top cover 5, and actuator 6. When the wafer jig is reused, it will cause residual liquid contamination. In addition, since the linkage ring 3 is connected to the top cover 5 by rotating via the actuator 6, it is not convenient for operators to pick up and put down the wafer B. Summary of the Invention

[0004] The main objective of this invention is to provide a fixture assembly, particularly a fixture assembly for wafer electroless plating, etching, electroplating and cleaning processes, which can prevent liquids such as electroplating solution or cleaning solution from remaining in the fixture assembly, and can quickly assemble and disassemble the fixtures of the fixture assembly, thereby simplifying the operation process of operators picking up and placing the workpiece.

[0005] A clamping assembly of the present invention includes at least one clamp for clamping a workpiece. The clamp includes a base, a clamping seat, and a limiting member. The base is disposed on a carrier and has a body, a guide hole, and a first limiting hole. The body has a first clamping portion. The guide hole and the first limiting hole are disposed on the body. The first limiting hole communicates with the guide hole and forms an angle between the first limiting hole and the guide hole. The clamping seat has a guide post, a second limiting hole, and a second clamping portion. The second limiting hole is disposed on the guide post and passes through the guide hole. The second limiting hole communicates with the first limiting hole. The limiting member passes through the first limiting hole and the second limiting hole, so that the base and the clamping seat are integrated into one unit, and the second clamping portion and the first clamping portion clamp the workpiece.

[0006] Preferably, the first limiting hole includes a first part and a second part, the first part and the second part are respectively located on two sides of the guide hole, and the first part and the second part communicate with the guide hole, and the limiting member is at least inserted in the first part and the second limiting hole.

[0007] Preferably, the base has a limiting groove, and the second clamping part is accommodated in the limiting groove.

[0008] Preferably, the first clamping portion has a gasket, and the workpiece is clamped between the second clamping portion and the gasket of the first clamping portion.

[0009] Preferably, the first clamping part has a groove, the gasket is disposed in the groove, the groove has a groove wall for the edge of the workpiece to abut against.

[0010] Preferably, the clamp further includes a positioning element disposed on the clamping seat, the limiting element having a positioning hole in which the positioning element is received.

[0011] Preferably, the clamp further includes an elastic element disposed on the clamping seat, the elastic element being used to push the positioning element so that the positioning element is received in the positioning hole.

[0012] Preferably, the carrier further includes a stop member disposed thereon, the stop member being used for contact of the workpiece.

[0013] The present invention enables the operator to quickly combine the base and the clamping seat into one unit or disassemble them into individual units by means of the limiting member passing through the first limiting hole and the second limiting hole. Moreover, since the base, the clamping seat and the limiting member have a simple structure, it is not easy to leave electroplating or cleaning liquids, thus solving the problem of residual liquid pollution. Attached Figure Description

[0014] Figure 1 Front view of the fixture assembly of the present invention.

[0015] Figure 2 : An exploded view of the fixture of this invention.

[0016] Figure 3 : Front view of the base of the fixture of the present invention.

[0017] Figure 4 : Rear view of the clamping seat of the fixture of the present invention.

[0018] Figure 5 : Anatomical view of the clamp of the present invention.

[0019] Figure 6 Along Figure 1 A cross-sectional view along line AA.

[0020] Figure 7 Along Figure 1 A cross-sectional view of the BB line.

[0021] [Explanation of Key Component Symbols]

[0022] 10: Fixture assembly 20: Workpiece

[0023] 21: Edge; 30: Carrier

[0024] 100: Fixture; 110: Base

[0025] 111: Body 111a: First clamping part

[0026] 111b: Groove; 111c: Gasket

[0027] 111d: Groove wall; 111e: Limiting groove

[0028] 112: Guide hole; 113: First limiting hole

[0029] 113a: Part One; 113b: Part Two

[0030] 113c: Opening 120: Clamping seat

[0031] 121: Guide post; 122: Second limiting hole

[0032] 123: Second clamping part; 130: Limiting component

[0033] 131: Locating hole; 140: Locating element

[0034] 150: Elastic component; 200: Stopping component

[0035] C: included angle Detailed Implementation

[0036] Please see Figure 1 and Figure 2 The present invention provides a fixture assembly 10 comprising at least one fixture 100 for holding a workpiece 20 for chemical plating, etching, electroplating and cleaning processes. The workpiece 20 may be selected from a wafer, but is not limited thereto. Preferably, the fixture assembly 10 further comprises a stop member 200.

[0037] Please see Figure 1 , Figure 2 and Figure 5 The clamp 100 includes a base 110, a clamping seat 120 and a limiting member 130. Preferably, the clamp 100 also includes a positioning member 140 and an elastic member 150. The base 110 and the stop member 200 are disposed on the carrier 30 and integrated with the carrier 30. The limiting member 130 has a positioning hole 131.

[0038] Please see Figure 2 , Figure 3 and Figure 5The base 110 has a body 111, a guide hole 112, and a first limiting hole 113. The body 111 has a first clamping part 111a. The guide hole 112 and the first limiting hole 113 are disposed on the body 111. The first limiting hole 113 communicates with the guide hole 112, and there is an included angle C between the first limiting hole 113 and the guide hole 112. The guide hole 112 can be selected from a circular hole, a non-circular hole (such as an elliptical hole, a rectangular hole, or a polygonal hole), etc. In this embodiment, the guide hole 112 is a circular hole, but it is not limited to this. In this embodiment, the first limiting hole 113 includes a first part 113a and a second part 113b. The first part 113a and the second part 113b are respectively located on both sides of the guide hole 112, and the first part 113a and the second part 113b communicate with the guide hole 112.

[0039] Please see Figure 2 , Figure 4 and Figure 5 The clamping base 120 has a guide post 121, a second limiting hole 122 and a second clamping part 123. The second limiting hole 122 is disposed on the guide post 121. The guide post 121 can be selected from a cylinder, a non-circular cylinder (such as an elliptical cylinder, a rectangular cylinder or a polygonal cylinder), etc. In this embodiment, the guide post 121 is a cylinder, but it is not limited thereto.

[0040] Please see Figure 5 In this embodiment, the elastic member 150 and the positioning member 140 are disposed on the clamping seat 120. The elastic member 150 is used to push the positioning member 140. Alternatively, in another embodiment, the elastic member 150 may be omitted, the positioning member 140 is a sphere, and the positioning member 140 is rolledly coupled to the clamping seat 120. Alternatively, in yet another embodiment, the positioning member 140 and the clamping seat 120 are integrally formed.

[0041] When the workpiece 20 (such as a wafer) is held in the fixture assembly 10 for processes such as electroless plating, etching, electroplating, and cleaning, please refer to [the relevant documentation]. Figure 1 , Figure 5 and Figure 6 First, the base 110 and the stop 200 are placed on the carrier 30, and the workpiece 20 is placed on the base 110. In this embodiment, the workpiece 20 is placed on the first clamping part 111a. Please refer to [link to relevant documentation]. Figure 5 The first clamping part 111a has a groove 111b and a gasket 111c. The gasket 111c is disposed in the groove 111b. The workpiece 20 is placed on the gasket 111c, and the edge 21 of the workpiece 20 contacts the groove wall 111d of the groove 111b. Please refer to [link to relevant documentation]. Figure 1 and Figure 7The workpiece 20 contacts the stop member 200 to prevent the workpiece 20 from rotating. In this embodiment, when the workpiece 20 is a wafer, the notch edge of the wafer contacts the stop member 200 to prevent the wafer from rotating. Next, please refer to... Figure 5 and Figure 6 The clamping seat 120 is inserted into the guide hole 112 of the base 110 via the guide post 121, causing the clamping seat 120 to move toward the base 110 and align the second limiting hole 122 with and connect to the first limiting hole 113. Then, the limiting member 130 passes through the opening 113c of the first limiting hole 113 and into the first limiting hole 113 and the second limiting hole 122. In this embodiment, the limiting member 130 passes through at least the first part 113a and the second limiting hole 122. Preferably, the limiting member 130 passes through the first part 113a, the second limiting hole 122, and the second part 113b, so that the base 110 and the clamping seat 120 are integrated, and the second clamping part 123 and the first clamping part 111a are clamped together. In this embodiment, the workpiece 20 is held between the second clamping part 123 and the pad 111c of the first clamping part 111a to prevent the workpiece 20 from detaching from the base 110. In this embodiment, the pad 111c is made of soft material, which may be selected from silicone pads. When the workpiece 20 is clamped by the second clamping part 123 and the first clamping part 111a, the pad 111c is compressed and generates a restoring elastic force. When the limiting member 130 passes through the first limiting hole 113 and the second limiting hole 122, the restoring elastic force increases the clamping force of the second clamping part 123 and the pad 111c on the workpiece 20, and the limiting member 130 is limited in the first limiting hole 113 and the second limiting hole 122.

[0042] Please see Figure 5 and Figure 6 When the limiting member 130 passes through the first limiting hole 113 and the second limiting hole 122 and moves to the predetermined position, the positioning member 140 is accommodated in the positioning hole 131 to fix the limiting member 130 and prevent the limiting member 130 from dislodging from the first limiting hole 113 and the second limiting hole 122.

[0043] Please see Figure 5 and Figure 6 When you want to remove the workpiece 20, first pull out the limiting member 130 so that the positioning hole 131 is freed from the restriction of the positioning member 140, and the limiting member 130 is freed from the first limiting hole 113 and the second limiting hole 122. Then, take out the clamping seat 120 and the workpiece 20 can be removed.

[0044] Please see Figures 2 to 6The base 110 has a limiting groove 111e. When the clamping seat 120 is attached to the base 110, the second clamping part 123 is accommodated in the limiting groove 111e to prevent the clamping seat 120 from rotating.

[0045] The present invention utilizes the guide post 121 of the clamping base 120 passing through the guide hole 112 and the limiting member 130 passing through the first limiting hole 113 and the second limiting hole 122 to enable the clamping base 120 to quickly combine with the base 110 into one unit and prevent the clamping base 120 from detaching from the base 110. Conversely, when the limiting member 130 is withdrawn from the first limiting hole 113 and the second limiting hole 122, the clamping base 120 can be detached and the workpiece 20 can be taken out, thereby simplifying the assembly and disassembly of the fixture 100. In addition, since the base 110, the clamping base 120 and the limiting member 130 have a simple structure, it is not easy for electroplating or cleaning liquids to remain, thus solving the problem of residual liquid pollution.

[0046] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A clamping assembly comprising at least one clamp for clamping a workpiece, characterized in that, The fixture includes: A base for being disposed on a carrier, the base having a body, a guide hole and a first limiting hole, the body having a first clamping part, the guide hole and the first limiting hole being disposed on the body, the first limiting hole communicating with the guide hole, and the first limiting hole and the guide hole having an included angle; A clamping base has a guide post, a second limiting hole, and a second clamping part. The second limiting hole is disposed on the guide post, the guide post passes through the guide hole, and the second limiting hole communicates with the first limiting hole. The limiting member is inserted into the first limiting hole and the second limiting hole, so that the base and the clamping seat are integrated into one unit, and the second clamping part and the first clamping part clamp the workpiece.

2. The clamp assembly according to claim 1, characterized in that, The first limiting hole includes a first part and a second part, which are located on two sides of the guide hole, and the first part and the second part communicate with the guide hole. The limiting member is at least inserted in the first part and the second limiting hole.

3. The fixture assembly according to claim 1, characterized in that, The base has a limiting groove, and the second clamping part is accommodated in the limiting groove.

4. The clamp assembly according to claim 1 or 3, characterized in that, The first clamping part has a gasket, and the workpiece is clamped between the second clamping part and the gasket of the first clamping part.

5. The fixture assembly according to claim 4, characterized in that, The first clamping part has a groove, the gasket is disposed in the groove, the groove has a groove wall for the edge of the workpiece to abut against.

6. The clamp assembly according to claim 1, characterized in that, The fixture further includes a positioning element disposed on the clamping seat, the positioning element having a positioning hole in which the positioning element is received.

7. The clamp assembly according to claim 6, characterized in that, The clamp further includes an elastic element disposed on the clamping seat, the elastic element being used to push the positioning element so that the positioning element is received in the positioning hole.

8. The fixture assembly according to claim 1, characterized in that, It also includes a stop member disposed on the carrier, the stop member being used for contact with the workpiece.

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