Infrared self-wake-up switch and sensor wake-up system having the same

Abstract

The application discloses an infrared self-waking switch and a sensor waking system with the same, and the infrared self-waking switch comprises a substrate, a left containing pool, a right containing pool, a left flow channel and a right flow channel are formed in the substrate, the upper surface of the substrate is provided with a left irradiation port and a right irradiation port, the left containing pool and both ends of the left flow channel are filled with a left insulating liquid, and the middle part of the left flow channel is filled with a left conductive liquid, the right containing pool and both ends of the right flow channel are filled with a right insulating liquid, and the middle part of the right flow channel is filled with a right conductive liquid; a metamaterial infrared absorption device; an electrode array, the electrode array comprises a left connecting electrode, a right connecting electrode, a plurality of left electrodes, a plurality of right electrodes and a plurality of interconnecting electrodes; and an infrared transmission cover plate. The infrared self-waking switch according to the embodiment of the application can be turned on when receiving infrared rays, and has the advantages of accurate triggering, high reliability, saving of electric energy and the like.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) technology, and more specifically, to an infrared self-wake-up switch and a sensor wake-up system having the infrared self-wake-up switch. Background Technology

[0002] In related technologies, IoT sensor nodes such as fire alarms rely on batteries for power. The large amount of standby power consumption wastes the battery's energy, requiring frequent battery replacements or charging. Summary of the Invention

[0003] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes an infrared self-wake-up switch, which can be turned on when infrared light is received, and has the advantages of accurate triggering, high reliability, and energy saving.

[0004] The present invention also proposes a sensor wake-up system having the aforementioned infrared self-wake-up switch.

[0005] To achieve the above objectives, an infrared self-wake-up switch is provided according to an embodiment of the first aspect of the present invention. The infrared self-wake-up switch includes: a substrate, the substrate being an insulating and heat-insulating material; a left receiving cell, a right receiving cell, a left flow channel, and a right flow channel formed within the substrate; the left flow channel and the right flow channel are both oriented in a front-rear direction; the rear end of the left flow channel communicates with the left receiving cell; the rear end of the right flow channel communicates with the right receiving cell; the upper surface of the substrate has a left irradiation port and a right irradiation port; the left irradiation port communicates with the left receiving cell; the right irradiation port communicates with the right receiving cell; and the left receiving cell and the right irradiation port communicate with the right receiving cell. The left flow channel is filled with a left insulating liquid at both ends and a left conductive liquid in the middle. The right container and the right flow channel are filled with a right insulating liquid at both ends and a right conductive liquid in the middle. The left insulating liquid and the left conductive liquid are immiscible, as are the right insulating liquid and the right conductive liquid. The left conductive liquid can move in the front-back direction within the left flow channel, and the right conductive liquid can move in the front-back direction within the right flow channel. A metamaterial infrared absorption device is provided, adapted to absorb infrared radiation, and disposed within the left container. An electrode array is also provided. An electrode array is disposed on the substrate and includes a left connecting electrode, a right connecting electrode, multiple left electrodes, multiple right electrodes, and multiple interconnect electrodes. The left electrodes are connected to the left flow channel, and the right electrodes are connected to the right flow channel. Each interconnect electrode is connected to both the left and right flow channels. The left connecting electrodes are connected to the multiple left electrodes, and the right connecting electrodes are connected to the multiple right electrodes. The multiple interconnect electrodes are spaced apart in the front-to-back direction. The multiple left electrodes and the multiple interconnect electrodes are alternately spaced apart in the front-to-back direction, and the multiple right electrodes and the multiple interconnect electrodes are intersected in the front-to-back direction. The left and right conductive liquids are alternately arranged, having a normal relative position and multiple conductive relative positions. The left and right conductive liquids move a predetermined distance relative to each other from their normal relative positions to the conductive relative positions. At the normal relative positions, the left and right conductive liquids disconnect the left and right connecting electrodes. At the conductive relative positions, the left and right conductive liquids connect the left and right connecting electrodes. An infrared transmission cover is provided, adapted to transmit infrared light and cover the left and right irradiation ports.

[0006] The infrared self-wake-up switch according to an embodiment of the present invention can be turned on when infrared light is received, and has the advantages of accurate triggering, high reliability, and energy saving.

[0007] In addition, the infrared self-wake-up switch according to the above embodiments of the present invention may also have the following additional technical features:

[0008] According to one embodiment of the present invention, the length of the left conductive liquid in the front-back direction is greater than the distance between the left electrode and the adjacent interconnect electrode in the front-back direction and less than the distance between two adjacent interconnect electrodes; the length of the right conductive liquid in the front-back direction is greater than the distance between the right electrode and the adjacent interconnect electrode in the front-back direction and less than the distance between two adjacent interconnect electrodes; the left and right containment pools have the same shape and size; the left and right flow channels have the same shape and size; the left and right irradiation ports have the same shape and size; the front edges of the left and right containment pools are aligned; the plurality of interconnect electrodes are oriented in the left-right direction; in the normal relative position, the distance between the left conductive liquid and the left containment pool is less than the distance between the right conductive liquid and the right containment pool; in the conductive relative position, the left and right conductive liquids are in contact with the same interconnect electrode, and the left conductive liquid is in contact with one left electrode and the right conductive liquid is in contact with one right electrode.

[0009] According to one embodiment of the present invention, the metamaterial infrared absorption device includes an absorber glass substrate, a metal reflective layer, an infrared transmission medium layer, and a conductor sheet array. The metal reflective layer is disposed on the upper surface of the absorber glass substrate, the infrared transmission medium layer is disposed on the upper surface of the metal reflective layer, and the conductor sheet array includes a plurality of conductor sheets arranged in an array on the upper surface of the infrared transmission medium layer.

[0010] According to one embodiment of the present invention, the substrate includes an upper plate and a lower plate, the left receiving cell, the right receiving cell, the left flow channel and the right flow channel are defined by the upper plate and the lower plate, the upper plate and the lower plate are bonded together, and the infrared transmission cover plate is bonded to the substrate.

[0011] According to one embodiment of the present invention, the left flow channel is provided with a left injection port at the end away from the left receiving pool, and a left sealing member is sealed inside the left injection port; the right flow channel is provided with a right injection port at the end away from the right receiving pool, and a right sealing member is sealed inside the right injection port.

[0012] According to one embodiment of the present invention, the left conductive liquid and the right conductive liquid are the same liquid and are inorganic liquids, and the left insulating liquid and the right insulating liquid are the same liquid and are organic liquids.

[0013] According to one embodiment of the present invention, the infrared transmission cover plate is made of calcium fluoride glass.

[0014] According to one embodiment of the present invention, the substrate is a glass material.

[0015] According to one embodiment of the present invention, the distance between adjacent left electrodes and interconnecting electrodes in the front-back direction and the distance between adjacent right electrodes and interconnecting electrodes in the front-back direction are both 100-500 micrometers.

[0016] According to an embodiment of a second aspect of the present invention, a sensor wake-up system is provided, the sensor wake-up system comprising: a sensor; a power supply device; and an infrared self-wake-up switch, wherein the infrared self-wake-up switch is the infrared self-wake-up switch described in an embodiment of a first aspect of the present invention, and the sensor is connected to the power supply device through the infrared self-wake-up switch.

[0017] The sensor wake-up system according to an embodiment of the present invention, by utilizing the infrared self-wake-up switch described in the first aspect of the present invention, can wake up the sensor when infrared light is received, and has the advantages of accurate triggering, high reliability, and energy saving.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0020] Figure 1 This is a cross-sectional view of an infrared self-wake-up switch according to an embodiment of the present invention.

[0021] Figure 2 This is a cross-sectional view of an infrared self-wake-up switch according to an embodiment of the present invention.

[0022] Figure 3 This is a schematic diagram of the sensor wake-up system according to an embodiment of the present invention.

[0023] Reference numerals: Sensor wake-up system 1, Infrared self-wake-up switch 10, Substrate 100, Left reservoir 111, Right reservoir 112, Left flow channel 121, Right flow channel 122, Left insulating liquid 131, Right insulating liquid 132, Left conductive liquid 141, Right conductive liquid 142, Metamaterial infrared absorption device 200, Absorber glass substrate 210, Metal reflective layer 220, Infrared transmission medium layer 230, Conductor sheet array 240, Conductor sheet 241, Electrode array 300, Left connecting electrode 311, Right connecting electrode 312, Left electrode 321, Right electrode 322, Interconnecting electrode 330, Infrared transmission cover plate 400, Sensor 20, Power supply device 30. Detailed Implementation

[0024] This application is based on the inventor's discoveries and understanding of the following facts and problems:

[0025] In related technologies, IoT sensor nodes such as fire alarms rely on batteries for power. The large amount of standby power consumption wastes the battery's energy, reduces the lifespan of the sensor nodes, and requires frequent battery replacements or charging.

[0026] Some IoT sensor systems in related technologies have an additional wake-up device. This device uses CMOS (Complementary Metal-Oxide-Semiconductor) circuits to convert infrared, sound, and vibration signals into recognizable wake-up electrical signals. The sensor only starts operating after receiving the wake-up signal, reducing its standby power consumption. However, due to the leakage current limitation of CMOS circuits, the sensor system still consumes power continuously in standby mode. This is especially true for sensor systems used for important but sporadic events such as fires, where a significant amount of power is consumed while waiting for the target event to occur.

[0027] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0029] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0030] The infrared self-wake-up switch 10 according to an embodiment of the present invention is described below with reference to the accompanying drawings.

[0031] like Figures 1-3 As shown, the infrared self-wake-up switch 10 according to an embodiment of the present invention includes a substrate 100, a metamaterial infrared absorption device 200, an electrode array 300, and an infrared transmission cover plate 400.

[0032] The substrate 100 is an insulating and heat-insulating material. A left receiving cell 111, a right receiving cell 112, a left flow channel 121, and a right flow channel 122 are formed within the substrate 100 (the up-down, left-right, and front-back directions are shown by arrows in the figure and are only for ease of description and are not a limitation on the actual setting direction). The left flow channel 121 and the right flow channel 122 are both oriented in the front-back direction. The rear end of the left flow channel 121 is connected to the left receiving cell 111, and the rear end of the right flow channel 122 is connected to the right receiving cell 112. The upper surface of the substrate 100 has a left irradiation port and a right irradiation port. The left irradiation port is connected to the left receiving cell 111, and the right irradiation port is connected to the right receiving cell 112.

[0033] The left containment tank 111 and both ends of the left flow channel 121 are filled with left insulating liquid 131, and the middle of the left flow channel 121 is filled with left conductive liquid 141. The right containment tank 112 and both ends of the right flow channel 122 are filled with right insulating liquid 132, and the middle of the right flow channel 122 is filled with right conductive liquid 142. The left insulating liquid 131 and the left conductive liquid 141 are immiscible, and the right insulating liquid 132 and the right conductive liquid 142 are immiscible. The left conductive liquid 141 can move in the front-back direction in the left flow channel 121, and the right conductive liquid 142 can move in the front-back direction in the right flow channel 122.

[0034] Specifically, after filling, the insulating liquid and the conductive liquid are in close contact. The left conductive liquid 141 will move back and forth in the left flow channel 121 due to the thermal expansion and contraction of the left insulating liquid 131 in the left receiving pool 111. Similarly, the right conductive liquid 142 will move back and forth in the right flow channel 122 due to the thermal expansion and contraction of the right insulating liquid 132 in the right receiving pool 112.

[0035] The metamaterial infrared absorbing device 200 is adapted to absorb infrared radiation and is disposed within the left receiving pool 111. Those skilled in the art will understand that "metamaterial" refers to a man-made material with special properties.

[0036] The electrode array 300 is disposed on the substrate 100 and includes a left connecting electrode 311, a right connecting electrode 312, a plurality of left electrodes 321, a plurality of right electrodes 322, and a plurality of interconnect electrodes 330. The left electrode 321 is connected to the left flow channel 121, and the right electrode 322 is connected to the right flow channel 122. Each interconnect electrode 330 is connected to both the left flow channel 121 and the right flow channel 122. The left connecting electrode 311 is connected to the plurality of left electrodes 321, and the right connecting electrode 312 is connected to the plurality of right electrodes 322. The plurality of interconnect electrodes 330 are spaced apart in the front-back direction. The plurality of left electrodes 321 and the plurality of interconnect electrodes 330 are alternately spaced apart in the front-back direction. The plurality of right electrodes 322 and the plurality of interconnect electrodes 330 are alternately spaced apart in the front-back direction.

[0037] It is important to understand here that "the left electrode 321 is connected to the left flow channel 121, the right electrode 322 is connected to the right flow channel 122, and each interconnecting electrode 330 is connected to the left flow channel 121 and the right flow channel 122 respectively" means that the flow channel is connected to the electrode so that the conductive or insulating liquid in the flow channel can contact the electrode. This can mean that part of the electrode is fitted into the flow channel, or only the surface of the electrode is exposed from the flow channel.

[0038] The left conductive liquid 141 and the right conductive liquid 142 have a normal relative position and multiple conductive relative positions. The left conductive liquid 141 and the right conductive liquid 142 move relative to each other from the normal relative position by a predetermined distance and then move to the conductive relative position. The left conductive liquid 141 and the right conductive liquid 142 disconnect the left connecting electrode 311 and the right connecting electrode 312 at the normal relative position, and the left conductive liquid 141 and the right conductive liquid 142 connect the left connecting electrode 311 and the right connecting electrode 312 at the conductive relative position.

[0039] The infrared transmission cover plate 400 is adapted to transmit infrared rays and cover the left irradiation port and the right irradiation port.

[0040] The following is for reference. Figures 1-3 The operation of the infrared self-wake-up switch 10 according to a specific embodiment of the present invention is described.

[0041] When the infrared self-wake-up switch 10 does not receive infrared light under normal conditions, the left conductive liquid 141 and the right conductive liquid 142 are in the normal relative position and the left connecting electrode 311 and the right connecting electrode 312 are disconnected. The infrared self-wake-up switch 10 is in the off state.

[0042] When the infrared self-wake-up switch 10 receives infrared radiation, for example, when a person or animal passes by, or when a fire occurs, the left insulating liquid 131 in the left container 111 is more likely to thermally expand under the influence of infrared radiation than the right insulating liquid 132 in the right container 112. This causes the left conductive liquid 141 to be pushed forward a longer distance than the right conductive liquid 142, resulting in relative movement between the left and right conductive liquids 141 and 142. This relative movement continues until the left and right conductive liquids 141 and 142 reach the predetermined distance, moving to the designated conductive relative position and activating the left connecting electrode 311 and the right connecting electrode 312. The infrared self-wake-up switch 10 is then in the activated state.

[0043] When the infrared self-wake-up switch 10 does not receive infrared light and the ambient temperature changes, the left insulating liquid 131 in the left container 111 and the right insulating liquid 132 in the right container 112 expand or contract simultaneously. The left conductive liquid 141 and the right conductive liquid 142 move in the same direction and distance without relative displacement. The left conductive liquid 141 and the right conductive liquid 142 will not move to the aforementioned conducting relative position, thus preventing the infrared self-wake-up switch 10 from being accidentally turned on due to changes in ambient temperature.

[0044] Those skilled in the art will understand that as long as the infrared self-wake-up switch 10 receives infrared light, the left conductive liquid 141 and the right conductive liquid 142 will undergo relative displacement. The smaller the "predetermined distance" of the relative displacement, the easier it is for the infrared self-wake-up switch 10 to be triggered, and the more sensitive the infrared self-wake-up switch 10 is. Conversely, the larger the "predetermined distance," the less likely the infrared self-wake-up switch 10 is to be triggered, and the less sensitive the infrared self-wake-up switch 10 is. Those skilled in the art can adjust the "predetermined distance" according to actual needs. For the electrode array 300, the "predetermined distance" can be adjusted by the spacing between the electrodes and the lengths of the left conductive liquid 141 and the right conductive liquid 142.

[0045] This allows the power supply device and the power consumption device to be connected via an infrared self-wake-up switch 10. The power supply device and the power consumption device only become connected after the infrared self-wake-up switch 10 receives infrared light, thus preventing energy consumption during standby mode of the power consumption device. For example... Figure 3 As shown, Figure 3In this context, "IR" represents infrared radiation. Sensor 20 and power supply 30 are electrically connected via an infrared self-wake-up switch 10. When the infrared self-wake-up switch 10 receives infrared radiation, it connects power supply 30 and sensor 20, waking up and enabling sensor 20 to operate. When the infrared self-wake-up switch 10 does not receive infrared radiation, it disconnects sensor 20 and power supply 30 to prevent sensor 20 from consuming power in standby mode.

[0046] For example, sensor 20 can be a fire alarm. After the infrared self-wake-up switch 10 receives infrared light, it wakes up sensor 20 to further detect whether a fire has occurred. Sensor 20 can also be an image sensor. After the infrared self-wake-up switch 10 receives infrared light, it wakes up sensor 20 to acquire and record images.

[0047] It is important to understand that the infrared self-wake-up switch 10 is different from the sensor used to detect infrared light; it only serves to wake up the sensor.

[0048] According to the present invention, the infrared self-wake-up switch 10 can avoid the influence of the substrate 100 itself on the conduction of the electrode array 300 and the conductive liquid by making the substrate 100 an insulating and heat-insulating material, and can also reduce the influence of ambient temperature changes on the insulating liquid in the containment pool.

[0049] By setting up a receiving pool, flow channels, insulating liquid, and conductive liquid, the expansion of the insulating liquid in the receiving pool facilitates the movement of the conductive liquid in the flow channels. By setting up an irradiation port and an infrared transmission cover 400, infrared radiation can be easily irradiated into the receiving pool. Furthermore, by setting up left and right receiving pools and left and right flow channels respectively, the left receiving pool 111 and left flow channel 121 can be compared with the right receiving pool 112 and right flow channel 122. The conductive liquid only moves relative to the infrared radiation, while it moves synchronously with changes in ambient temperature, eliminating the influence of ambient temperature changes and avoiding false triggering caused by ambient temperature changes.

[0050] By making the insulating liquid and the conductive liquid immiscible, it can be ensured that the insulating liquid can propel the conductive liquid.

[0051] By setting up a metamaterial infrared absorption device 200, infrared rays can be absorbed by the metamaterial infrared absorption device 200, so that the left container 111 can absorb more infrared rays than the right container 112 after infrared irradiation, thereby causing the left insulating liquid 131 in the left container 111 to expand more.

[0052] By setting the interconnect electrode 330, the conductive liquid in the left channel 121 and the right channel 122 can be connected. The left electrode 321 is used to connect the interconnect electrode 330 through the left conductive liquid 141, and the right electrode 322 is used to connect the interconnect electrode 330 through the right conductive liquid 142, so that the left electrode 321 and the right electrode 322 can be connected through the interconnect electrode 330 and the conductive liquid.

[0053] By having multiple left electrodes 321, right electrodes 322, and interconnecting electrodes 330, the left conductive liquid 141 and the right conductive liquid 142 can have multiple relative conductive positions, which facilitates the infrared self-wake-up switch 10 to be turned on when the left conductive liquid 141 and the right conductive liquid 142 move simultaneously due to changes in ambient temperature and then receive infrared light.

[0054] In other words, the infrared self-wake-up switch 10 can turn on when it receives infrared light, and can avoid accidental turn-on caused by changes in ambient temperature, thus improving the accuracy of triggering. Moreover, compared with the technical solutions in related technologies, the infrared self-wake-up switch 10 itself does not require power supply and does not consume power, thus saving power itself and also helping the sensor save power.

[0055] Therefore, the infrared self-wake-up switch 10 according to the present invention can be turned on when infrared light is received, and has the advantages of accurate triggering, high reliability and energy saving.

[0056] The infrared self-wake-up switch 10 according to a specific embodiment of the present invention is described below with reference to the accompanying drawings.

[0057] In some specific embodiments of the present invention, such as Figures 1-3 As shown, the infrared self-wake-up switch 10 according to an embodiment of the present invention includes a substrate 100, a metamaterial infrared absorption device 200, an electrode array 300, and an infrared transmission cover plate 400.

[0058] Specifically, such as Figure 1 and Figure 2 As shown, the length of the left conductive liquid 141 in the front-back direction is greater than the distance between the left electrode 321 and the adjacent interconnect electrode 330 in the front-back direction, but less than the distance between two adjacent interconnect electrodes 330. The length of the right conductive liquid 142 in the front-back direction is greater than the distance between the right electrode 322 and the adjacent interconnect electrode 330 in the front-back direction, but less than the distance between two adjacent interconnect electrodes 330. This facilitates the conduction of adjacent electrodes by the conductive liquid.

[0059] The left and right containment pools 111 and 112 have the same shape and size, the left and right flow channels 121 and 122 have the same shape and size, and the left and right irradiation ports have the same shape and size. This eliminates the influence of the shape and size of the left and right containment pools 111 and 112, the left and right flow channels 121 and 122 on the degree of internal liquid expansion.

[0060] The front edges of the left and right reservoirs 111 and 112 are aligned, and multiple interconnecting electrodes 330 are oriented in the left-right direction. In the normal relative position, the distance between the left conductive liquid 141 and the left reservoir 111 is less than the distance between the right conductive liquid 142 and the right reservoir 112. In the conductive relative position, the left conductive liquid 141 and the right conductive liquid 142 are in contact with the same interconnecting electrode 330, and the left conductive liquid 141 is in contact with a left electrode 321 and the right conductive liquid 142 is in contact with a right electrode 322. Figure 1 As shown, Figure 1 The left conductive liquid 141 and the right conductive liquid 142 are in the normal position. This allows the left conductive liquid 141 to be closer to its respective reservoir than the right conductive liquid 142 in the normal state, which facilitates the left conductive liquid 141 and the right conductive liquid 142 to conduct through the same interconnecting electrode 330 when infrared light is received, thereby facilitating the conduction of the left connecting electrode 311 and the right connecting electrode 312.

[0061] More specifically, such as Figure 1 and Figure 2 As shown, the metamaterial infrared absorption device 200 includes an absorber glass substrate 210, a metal reflective layer 220, an infrared transmission medium layer 230, and a conductor sheet array 240. The metal reflective layer 220 is disposed on the upper surface of the absorber glass substrate 210, the infrared transmission medium layer 230 is disposed on the upper surface of the metal reflective layer 220, and the conductor sheet array 240 includes multiple conductor sheets 241 arranged in an array on the upper surface of the infrared transmission medium layer 230. This allows infrared rays to oscillate within the infrared transmission medium layer 230 and gradually dissipate, generating heat and preventing direct transmission or reflection of infrared rays. This ensures the absorption effect of the metamaterial infrared absorption device 200 on infrared rays and guarantees the heating effect on the left insulating liquid 131 in the left containment pool 111 after absorbing infrared rays.

[0062] Advantageously, the substrate 100 includes an upper plate and a lower plate, and the left receiving cell 111, the right receiving cell 112, the left flow channel 121, and the right flow channel 122 are defined by the upper plate and the lower plate, which are bonded together. The infrared transmission cover plate 400 is bonded to the substrate 100. This facilitates the processing of the substrate 100, the formation of the receiving cells and flow channels, and improves sealing performance through bonding.

[0063] More advantageously, the left flow channel 121 has a left filling port at the end away from the left receiving pool 111, and the left filling port is sealed with a left sealing element; the right flow channel 122 has a right filling port at the end away from the right receiving pool 112, and the right filling port is sealed with a right sealing element. This facilitates the filling of insulating and conductive liquids into the receiving pool and the flow channel.

[0064] Optionally, the left conductive liquid 141 and the right conductive liquid 142 are the same liquid and are inorganic liquids, while the left insulating liquid 131 and the right insulating liquid 132 are the same liquid and are organic liquids. This facilitates the formation of immiscible conductive and insulating liquids.

[0065] Furthermore, the infrared transmission cover plate 400 is made of calcium fluoride glass. This allows the infrared transmission cover plate 400 to have good infrared transmittance.

[0066] The substrate is made of glass. This allows the substrate 100 to have good insulation and heat insulation properties.

[0067] Furthermore, the front-to-back distance between adjacent left electrodes 321 and interconnecting electrodes 330, and the front-to-back distance between adjacent right electrodes 322 and interconnecting electrodes 330, are both 100-500 micrometers. This allows for a reasonable spacing between the electrodes, ensuring that the predetermined distance falls within a reasonable range and preventing false triggering while maintaining sensitivity.

[0068] Specifically, the left connecting electrode 311 and multiple left electrodes 321 can be integrally formed. The right connecting electrode 312 and multiple right electrodes 322 can be integrally formed. This facilitates electrode fabrication.

[0069] The manufacturing process of the infrared self-wake-up switch 10 according to a specific embodiment of the present invention is described below.

[0070] Electrode array 300 machining:

[0071] A layer of positive photoresist is spin-coated onto the surface of a glass substrate (prepared as substrate 100) using a spin coater at 1000-4000 RPM for 30-90 seconds, and then heated on a hot plate at 90-120°C for 1-2 minutes. Patterning is achieved through exposure (1-2 minutes), post-baking (90-120°C, 2-3 minutes), and development (immersion in 3038 developer for 1-2 minutes). Chromium layers with a thickness of 10-30 nm and platinum layers with a thickness of 100-300 nm are grown using sputtering. The sample is then immersed in acetone and subjected to ultrasonic oscillation to remove the photoresist and any metal adhering to the photoresist surface (lift-off process). The metal layer is patterned using the lift-off process to form a metal electrode array.

[0072] Machining of left receiving pool 111, right receiving pool 112, left flow channel 121 and right flow channel 122:

[0073] Microchannels were cut on the surface of the glass substrate 100 to be used as substrate using an ultrashort pulse laser cutter (scanning speed 100-500 mm / s, feed distance 0.01 mm, feed count 3). The sample was then immersed in alcohol and subjected to ultrasonic oscillation to remove residual glass dust and other contaminants from the surface.

[0074] 200-degree processing of metamaterial infrared absorption device:

[0075] A layer of negative photoresist is spin-coated onto the glass surface (spin-coating speed 1000-4000 RPM, time 30-90 seconds), and heated on a hot plate at 90-120℃ for 1-2 minutes. Patterning is achieved through exposure (1-2 minutes), post-baking (90-120℃, 2-3 minutes), and development (immersion in RD6 developer for 1-2 minutes). Chromium with a thickness of 10-30 nm and gold with a thickness of 20-50 nm are grown using sputtering. The sample is immersed in acetone with ultrasonic oscillation to remove the photoresist and any metal adhering to its surface (lift-off process). The metal layer is patterned through lift-off to form a metal reflective layer. An infrared transmission dielectric layer 230 is prepared using plasma-enhanced chemical vapor deposition. A layer of electron beam photoresist is spin-coated onto the surface of the infrared transmission dielectric layer 230, and patterned through electron beam exposure, post-baking, and development. Residual photoresist was removed by ion bombardment, and chromium layers with a thickness of 10-30 nm and gold layers with a thickness of 20-50 nm were grown using electron beam evaporation. The sample was then immersed in acetone and subjected to ultrasonic oscillation to remove the photoresist and the metal adhering to the photoresist surface (lift-off process). The metal layer was patterned using the lift-off process to form a conductor sheet array 240.

[0076] Overall structure processing:

[0077] The prepared calcium fluoride glass infrared transmission cover plate 400 and the upper plate of the substrate 100 are bonded together using ultraviolet adhesive. The prepared metamaterial infrared absorption device 200 is then placed inside, and the lower plate of the glass substrate 100 is bonded together using ultraviolet adhesive. The bonded sample is exposed to ultraviolet light for 1-5 minutes to allow the adhesive to fully cure and form a reliable sealing structure. Insulating liquid, conductive liquid, and insulating liquid are sequentially poured into the device, and its opening is sealed to complete the manufacturing of the infrared self-wake-up switch 10.

[0078] Infrared response test of infrared self-wake-up switch 10:

[0079] By observing under a microscope and testing with a multimeter, the boundary between the conductive and insulating liquids was located, ensuring that the electrodes of the connecting wires were in precise contact with the insulating liquid. Irradiating the metamaterial surface with an infrared light source through calcium fluoride glass allowed for observation of significant liquid displacement and a substantial decrease in resistance between the electrodes under a microscope.

[0080] An infrared self-wake-up switch 10 is combined with a molybdenum disulfide photodetector node to form a sensor wake-up system. Test results show that when an infrared signal is present, the near-zero power infrared self-wake-up switch closes, waking up the molybdenum disulfide photodetector in the sensor node, which then functions normally. After the infrared signal is removed, the near-zero power infrared self-wake-up switch opens, causing the entire sensor node to disconnect, and the molybdenum disulfide photodetector stops working.

[0081] The sensor wake-up system 1 according to an embodiment of the present invention is described below. The sensor wake-up system 1 according to an embodiment of the present invention includes a sensor 20, a power supply device 30, and an infrared self-wake-up switch. The infrared self-wake-up switch is an infrared self-wake-up switch 10 according to the above embodiment of the present invention, and the sensor 20 is connected to the power supply device 30 through the infrared self-wake-up switch 10.

[0082] Specifically, when the infrared self-wake-up switch 10 does not receive infrared light, it remains open, and the sensor 20 is not connected to the power supply device 30. The sensor 20 does not consume the power of the power supply device 30. When the infrared self-wake-up switch 10 receives infrared light, it is turned on, and the sensor 20 is connected to the power supply device 30. The power supply device 30 supplies power to the sensor 20 to ensure its operation. This ensures that the sensor 20 can operate when needed while avoiding the sensor 20 consuming power when in standby mode, thereby reducing the power consumption of the sensor wake-up system 1 and extending the service life of the sensor wake-up system 1.

[0083] The sensor wake-up system 1 according to an embodiment of the present invention can wake up the sensor when infrared light is received by utilizing the infrared self-wake-up switch 10 according to the above embodiment of the present invention, and has the advantages of accurate triggering, high reliability and energy saving.

[0084] Other configurations and operations of the sensor wake-up system 1 according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0086] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An infrared self-wake-up switch, characterized in that, include: A substrate, which is an insulating and heat-insulating material, has a left receiving pool, a right receiving pool, a left flow channel, and a right flow channel formed within it. Both the left and right flow channels are oriented in the front-to-back direction. The rear end of the left flow channel communicates with the left receiving pool, and the rear end of the right flow channel communicates with the right receiving pool. The upper surface of the substrate has a left irradiation port and a right irradiation port. The left irradiation port communicates with the left receiving pool, and the right irradiation port communicates with the right receiving pool. The left receiving pool and both ends of the left flow channel are filled with a left insulating liquid, and the middle of the left flow channel is filled with a left conductive liquid. The right receiving pool and both ends of the right flow channel are filled with a right insulating liquid, and the middle of the right flow channel is filled with a right conductive liquid. The left insulating liquid and the left conductive liquid are immiscible, and the right insulating liquid and the right conductive liquid are immiscible. The left conductive liquid can move in the front-to-back direction within the left flow channel, and the right conductive liquid can move in the front-to-back direction within the right flow channel. A metamaterial infrared absorbing device, wherein the metamaterial infrared absorbing device is adapted to absorb infrared radiation and is disposed in the left containment pool; An electrode array is disposed on the substrate and includes a left connecting electrode, a right connecting electrode, multiple left electrodes, multiple right electrodes, and multiple interconnect electrodes. The left electrodes are connected to a left flow channel, and the right electrodes are connected to a right flow channel. Each interconnect electrode is connected to both the left and right flow channels. The left connecting electrodes are connected to multiple left electrodes, and the right connecting electrodes are connected to multiple right electrodes. The multiple interconnect electrodes are spaced apart in a front-to-back direction. The multiple left electrodes and multiple interconnect electrodes are alternately spaced apart in the front-to-back direction, and the multiple right electrodes and multiple interconnect electrodes are alternately spaced apart in the front-to-back direction. The left and right conductive liquids have a normal relative position and multiple conductive relative positions. The left and right conductive liquids move a predetermined distance relative to each other from their normal relative positions to their conductive relative positions. At the normal relative positions, the left and right conductive liquids disconnect the left and right connecting electrodes. At the conductive relative positions, the left and right conductive liquids connect the left and right connecting electrodes. An infrared transmission cover plate, which is adapted to transmit infrared rays and cover the left irradiation port and the right irradiation port.

2. The infrared self-wake-up switch according to claim 1, characterized in that, The length of the left conductive liquid in the front-back direction is greater than the distance between the left electrode and the adjacent interconnecting electrode in the front-back direction but less than the distance between two adjacent interconnecting electrodes. The length of the right conductive liquid in the front-back direction is greater than the distance between the right electrode and the adjacent interconnecting electrode in the front-back direction but less than the distance between two adjacent interconnecting electrodes. The left and right containment pools have the same shape and size. The left and right flow channels have the same shape and size. The left and right irradiation ports have the same shape and size. The front edges of the left and right containment pools are aligned. The multiple interconnecting electrodes are oriented in the left-right direction. In the normal relative position, the distance between the left conductive liquid and the left containment pool is less than the distance between the right conductive liquid and the right containment pool. In the conductive relative position, the left and right conductive liquids are in contact with the same interconnecting electrode, and the left conductive liquid is in contact with one left electrode and the right conductive liquid is in contact with one right electrode.

3. The infrared self-wake-up switch according to claim 1, characterized in that, The metamaterial infrared absorption device includes an absorber glass substrate, a metal reflective layer, an infrared transmission medium layer, and a conductor sheet array. The metal reflective layer is disposed on the upper surface of the absorber glass substrate, the infrared transmission medium layer is disposed on the upper surface of the metal reflective layer, and the conductor sheet array includes multiple conductor sheets arranged in an array on the upper surface of the infrared transmission medium layer.

4. The infrared self-wake-up switch according to claim 1, characterized in that, The substrate includes an upper plate and a lower plate. The left receiving cell, the right receiving cell, the left flow channel, and the right flow channel are defined by the upper plate and the lower plate. The upper plate and the lower plate are bonded together. The infrared transmission cover plate is bonded to the substrate.

5. The infrared self-wake-up switch according to claim 1, characterized in that, The left flow channel is provided with a left injection port at the end away from the left receiving pool, and a left sealing member is sealed inside the left injection port. The right flow channel is provided with a right injection port at the end away from the right receiving pool, and a right sealing member is sealed inside the right injection port.

6. The infrared self-wake-up switch according to claim 1, characterized in that, The left conductive liquid and the right conductive liquid are the same liquid and are inorganic liquids, while the left insulating liquid and the right insulating liquid are the same liquid and are organic liquids.

7. The infrared self-wake-up switch according to claim 1, characterized in that, The infrared transmission cover plate is made of calcium fluoride glass.

8. The infrared self-wake-up switch according to claim 1, characterized in that, The substrate is a glass material.

9. The infrared self-wake-up switch according to claim 1, characterized in that, The distance between adjacent left electrodes and interconnecting electrodes in the front-back direction, and the distance between adjacent right electrodes and interconnecting electrodes in the front-back direction, are both 100-500 micrometers.

10. A sensor wake-up system, characterized in that, include: sensor; Power supply device; An infrared self-wake-up switch, wherein the infrared self-wake-up switch is the infrared self-wake-up switch according to any one of claims 1-9, and the sensor is connected to the power supply device through the infrared self-wake-up switch.

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