Touchpad

Abstract

A touchpad includes a control substrate, a touch layer, and a piezoelectric layer stacked together. The control substrate includes a first substrate and a control circuit layer disposed on the first substrate. The touch layer and the piezoelectric layer are located on the control substrate. The control circuit layer includes control circuitry, which is electrically connected to the touch layer and the piezoelectric layer, respectively, and configured to apply electrical signals to and / or receive electrical signals from the touch layer and the piezoelectric layer, respectively. This touchpad can achieve omnidirectional haptic feedback and has advantages such as a simple structure, thinner and lighter design, lower driving voltage, and lower power consumption.

Description

Technical Field

[0001] Embodiments of this disclosure relate to a touchpad. Background Technology

[0002] A touchpad is an input device that allows users to move a cursor by sliding their fingers, such as in laptops or keyboards. Touchpads detect finger movement using capacitive sensing. When a user's finger touches the touchpad, the capacitance at the touch location changes. The touchpad detects this change in capacitance, converts it into coordinates, and thus enables touch operation. Summary of the Invention

[0003] At least one embodiment of this disclosure provides a touch panel, which includes a control substrate, a touch layer, and a piezoelectric layer stacked together. The control substrate includes a first substrate and a control circuit layer disposed on the first substrate. The touch layer and the piezoelectric layer are located on the control substrate. The control circuit layer includes a control circuit, which is electrically connected to the touch layer and the piezoelectric layer respectively, and configured to apply electrical signals to the touch layer and the piezoelectric layer respectively and / or receive electrical signals from the touch layer and the piezoelectric layer respectively.

[0004] For example, at least one embodiment of the present disclosure provides a touch panel that further includes a second substrate, wherein the touch layer and the piezoelectric layer are disposed on the second substrate, and the second substrate, the touch layer and the piezoelectric layer are disposed as a whole on the side of the control circuit layer away from the first substrate.

[0005] For example, at least one embodiment of the present disclosure provides a touch panel that further includes at least one pad disposed between the second substrate and the control substrate to space the second substrate and the control substrate.

[0006] For example, in a touch panel provided in at least one embodiment of this disclosure, the at least one pad includes a plurality of pads, which are spaced apart at the edges of the second substrate and the control substrate.

[0007] For example, in at least one embodiment of the touch panel provided in this disclosure, the second substrate and the control substrate have rectangular planar shapes, and the plurality of pads are arranged in a straight line along at least two sides of the rectangle.

[0008] For example, in at least one embodiment of the touch panel provided in this disclosure, the plurality of pads includes four pads, which are arranged in a straight line along the middle position of the four sides of the rectangle.

[0009] For example, in at least one embodiment of the touch panel provided in this disclosure, the plurality of pads includes four pads, the rectangle includes two opposite long sides and two opposite short sides, the four pads are arranged in a straight line along the two long sides of the rectangle respectively, and two pads are arranged on each of the two long sides.

[0010] For example, in at least one embodiment of the touchpad provided in this disclosure, the length of each long side is L, each long side has a first endpoint and a second endpoint, the distance between the first endpoint and the pad closest to the first endpoint of the two pads perpendicular to the central axis of each long side is 1 / 4L to 1 / 3L, and the distance between the second endpoint and the pad closest to the second endpoint of the two pads perpendicular to the central axis of each long side is 1 / 4L to 1 / 3L.

[0011] For example, in the touch panel provided in at least one embodiment of this disclosure, the long side of the rectangle is L and the short side is W, and the length of each of the plurality of pads is 0.1L-0.5L and the width is 0.01W-0.10W.

[0012] For example, in at least one embodiment of the touch panel provided in this disclosure, the planar shape of the second substrate and the control substrate is rectangular, and the plurality of pads includes four pads, which are arranged in an L-shape along the four corners of the rectangle.

[0013] For example, in at least one embodiment of the touch panel provided in this disclosure, the height of the at least one pad is 0.5mm-10mm in the direction perpendicular to the second substrate.

[0014] For example, in the touch panel provided in at least one embodiment of this disclosure, the material of the at least one pad has a Young's modulus of 0.1 MPa to 2.0 MPa.

[0015] For example, at least one embodiment of the present disclosure provides a touch panel that further includes at least one pressure sensor element disposed between the second substrate and the control substrate, wherein the at least one pressure sensor element is electrically connected to the control circuit, and in a direction perpendicular to the second substrate, the height of the at least one pressure sensor element is lower than the height of the at least one pad.

[0016] For example, in a touch panel provided in at least one embodiment of this disclosure, the at least one pressure sensor sensing element and the at least one pad are both disposed on the control substrate, and the at least one pressure sensor sensing element is spaced apart from the second substrate.

[0017] For example, in a touch panel provided in at least one embodiment of this disclosure, the piezoelectric layer includes a first control electrode layer, a second control electrode layer, and a piezoelectric material layer between the first control electrode layer and the second control electrode layer. The first control electrode layer includes a plurality of first pressure sensing electrodes spaced apart. At least one of the plurality of first pressure sensing electrodes is configured to transmit a pressure sensing signal to the control circuit when the piezoelectric material layer is subjected to pressure.

[0018] For example, in a touch panel provided in at least one embodiment of this disclosure, the first control electrode layer further includes a plurality of first vibration feedback electrodes spaced apart, and the control circuit is configured to apply an electrical signal to at least one of the plurality of first vibration feedback electrodes when the pressure sensing signal is greater than a threshold, so as to drive the piezoelectric material layer to vibrate.

[0019] For example, in a touch panel provided in at least one embodiment of this disclosure, the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are strip electrodes, which extend along a first direction and are spaced apart in a second direction perpendicular to the first direction.

[0020] For example, in at least one embodiment of the touch panel provided in this disclosure, the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are alternately arranged in the second direction.

[0021] For example, in a touch panel provided in at least one embodiment of this disclosure, each of the plurality of first pressure sensing electrodes includes a plurality of sub-strip electrodes spaced apart along the first direction; each of the plurality of first vibration feedback electrodes includes a plurality of sub-strip electrodes spaced apart along the first direction.

[0022] For example, in at least one embodiment of the touch panel provided in this disclosure, the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are block electrodes, the plurality of first pressure sensing electrodes are spaced apart and arranged in a column along a first direction, the plurality of first vibration feedback electrodes are spaced apart and arranged in a column along the first direction, and multiple columns of first pressure sensing electrodes and multiple columns of first vibration feedback electrodes are alternately arranged along a second direction perpendicular to the first direction.

[0023] For example, in a touch panel provided in at least one embodiment of this disclosure, the width of the plurality of first vibration feedback electrodes in the second direction is greater than the width of the plurality of first pressure sensing electrodes in the second direction.

[0024] For example, in at least one embodiment of the touch panel provided in this disclosure, the piezoelectric material layer is disposed over the entire surface.

[0025] For example, in a touch panel provided in at least one embodiment of this disclosure, the piezoelectric material layer includes a plurality of piezoelectric material patterns that extend along the first direction and are spaced apart in the second direction. The orthographic projection of the plurality of piezoelectric material patterns on the second substrate at least partially overlaps with the orthographic projection of the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes on the second substrate.

[0026] For example, in at least one embodiment of the touch panel provided in this disclosure, the second control electrode layer is a surface electrode layer; or the second control electrode layer includes a plurality of second control electrodes, the orthographic projections of the plurality of second control electrodes on the second substrate at least partially overlapping the orthographic projections of the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes on the second substrate.

[0027] For example, in at least one embodiment of the touch panel provided in this disclosure, the material of the piezoelectric material layer is one or more of PZT (lead zirconate titanate), AlN (aluminum nitride) and KNN [(K0.5Na0.5)NbO3].

[0028] For example, in a touch panel provided in at least one embodiment of this disclosure, the touch layer includes a first touch electrode layer, a second touch electrode layer, and a spacer insulating layer between the first touch electrode layer and the second touch electrode layer. The first touch electrode layer includes a plurality of first touch electrodes extending along a first direction, and the second touch electrode layer includes a plurality of second touch electrodes extending along a second direction intersecting the first direction.

[0029] For example, in at least one embodiment of the touch panel provided in this disclosure, the touch layer and the piezoelectric layer are respectively disposed on opposite sides of the second substrate.

[0030] For example, in at least one embodiment of the touch panel provided in this disclosure, the touch layer and the piezoelectric layer are respectively disposed on the same side of the second substrate, and the touch panel further includes an electromagnetic shielding layer disposed between the touch layer and the piezoelectric layer.

[0031] For example, in at least one embodiment of the present disclosure, the touch layer is disposed on the side of the piezoelectric layer away from the control substrate, and the touch panel further includes a cover plate on the surface of the touch layer away from the control substrate, and the surface of the cover plate away from the control substrate becomes the touch surface of the touch panel. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly described below. Obviously, the drawings described below only relate to some embodiments of this disclosure and are not intended to limit this disclosure.

[0033] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly described below. Obviously, the drawings described below only relate to some embodiments of this disclosure and are not intended to limit this disclosure.

[0034] Figure 1 This is a schematic diagram of the structure of a touchpad provided in at least one embodiment of the present disclosure;

[0035] Figure 2 This is a cross-sectional schematic diagram of the touch layer and piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0036] Figure 3 A cross-sectional schematic diagram of the touch layer and piezoelectric layer in another touchpad provided in at least one embodiment of the present disclosure;

[0037] Figure 4 A cross-sectional schematic diagram of a touchpad provided in at least one embodiment of this disclosure;

[0038] Figure 5A This is a schematic diagram of the planar arrangement of multiple pads in a touchpad provided in at least one embodiment of the present disclosure;

[0039] Figure 5B This is a schematic diagram of another planar arrangement of multiple pads in a touchpad provided in at least one embodiment of the present disclosure;

[0040] Figure 6A This is a schematic diagram of another planar arrangement of multiple pads in a touchpad provided in at least one embodiment of the present disclosure;

[0041] Figure 6B This is a schematic diagram of another planar arrangement of multiple pads in a touchpad provided in at least one embodiment of the present disclosure;

[0042] Figures 6C-6G This is a schematic diagram of various planar arrangements of multiple pads in a touchpad provided in at least one embodiment of the present disclosure;

[0043] Figure 7A This is a cross-sectional schematic diagram of the piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0044] Figure 7B This is a plan view of the first control electrode layer of the piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0045] Figure 8 Another planar schematic diagram of the first control electrode layer of the piezoelectric layer in a touch panel provided in at least one embodiment of this disclosure;

[0046] Figure 9This is another planar schematic diagram of the first control electrode layer of the piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0047] Figure 10 This is another cross-sectional schematic diagram of the piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0048] Figure 11A This is a plan view of the second control electrode layer of the piezoelectric layer in a touch panel provided in at least one embodiment of the present disclosure;

[0049] Figure 11B Another planar schematic diagram of the second control electrode layer of the piezoelectric layer in a touch panel provided in at least one embodiment of this disclosure;

[0050] Figure 12A Another cross-sectional schematic diagram of a touch panel provided in at least one embodiment of this disclosure;

[0051] Figure 12B This is a schematic diagram of the planar arrangement of the pressure sensor sensing element in a touchpad provided in at least one embodiment of the present disclosure;

[0052] Figure 12C This is a schematic diagram of another planar arrangement of the pressure sensor sensing element in a touchpad provided in at least one embodiment of the present disclosure;

[0053] Figure 13A This is a cross-sectional schematic diagram of the touch layer in a touchpad provided in at least one embodiment of the present disclosure;

[0054] Figure 13B A plan view of the touch layer in a touchpad provided in at least one embodiment of the present disclosure;

[0055] Figures 14A-14E These are schematic plan views of each layer of the piezoelectric layer in a touch panel provided in at least one embodiment of this disclosure;

[0056] Figures 15A-15D These are schematic diagrams of the various layers of the piezoelectric layer in another touchpad provided in at least one embodiment of this disclosure; and

[0057] Figure 16 These are schematic diagrams of a first control electrode layer, a second control electrode layer, and a wiring layer in a touch panel provided in at least one embodiment of this disclosure. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0059] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0060] In existing touchpads, omnidirectional touchpads use linear motors and piezoelectric elements to provide vibration feedback for button confirmation and other operations. However, both linear motors and piezoelectric elements have drawbacks such as large size, numerous components, complex modules, simple tactile feedback, and high driving voltage. For example, a linear motor typically includes a sensor, actuation mechanism, pads, and controller; a piezoelectric element usually includes a circuit board, conductive cloth, piezoelectric element, multi-layer adhesive, and metal plate. These structures are generally thick and bulky, with many parts and complex assembly, which is not conducive to the overall thin design of the touchpad.

[0061] At least one embodiment of this disclosure provides a touch panel, which includes a control substrate, a touch layer, and a piezoelectric layer stacked together. The control substrate includes a first substrate and a control circuit layer disposed on the first substrate. The touch layer and the piezoelectric layer are disposed on the control substrate. The control circuit layer includes a control circuit, which is electrically connected to the touch layer and the piezoelectric layer respectively, and configured to apply electrical signals to the touch layer and the piezoelectric layer respectively and / or receive electrical signals from the touch layer and the piezoelectric layer respectively.

[0062] The touchpad provided in this embodiment can achieve full-area haptic feedback. That is, throughout the entire touchpad, the piezoelectric layer can sense the pressure applied to the surface of the touchpad and convert the pressure into an electrical signal, which is then provided to the control circuit. The control circuit can then determine whether the pressure is sufficient to perform a control operation based on the electrical signal. For example, if the electrical signal is greater than a threshold signal, the pressure is determined to be sufficient to perform a control operation. At this time, the control circuit can control the piezoelectric layer to further provide vibration, thereby achieving richer pressure and tactile sensations. On the other hand, the touchpad has a simple module structure, is thinner and lighter, and has advantages such as low driving voltage and low power consumption.

[0063] The touchpad provided in this disclosure will be described in detail below through several specific embodiments.

[0064] At least one embodiment of this disclosure provides a touchpad. Figure 1 A schematic diagram of the touchpad structure is shown. Figure 2 A cross-sectional schematic diagram of the touch layer and piezoelectric layer in this touchpad is shown. Figure 1 As shown, the touch panel includes a control substrate, a touch layer 202, and a piezoelectric layer 201 stacked together. The control substrate includes a first substrate 10 and a control circuit layer 11 disposed on the first substrate 10, and the touch layer 202 and the piezoelectric layer 201 are disposed on the control substrate.

[0065] The control circuit layer 11 includes a control circuit 110, which is electrically connected to the touch layer 202 and the piezoelectric layer 201, respectively. The control circuit 110 is configured to apply electrical signals to the touch layer 202 and the piezoelectric layer 201 and / or receive electrical signals from the touch layer 202 and the piezoelectric layer 201, respectively. Thus, the control circuit 110 can control the touch layer 202 to perform functions such as detecting touch position, and control the piezoelectric layer 201 to perform functions such as pressure detection and vibration feedback.

[0066] The touchpad module provided in this embodiment has a simple structure, eliminating the need for complex alignment and assembly of adhesive backing and conductive cloth. It features a thinner and lighter structure, with the overall thickness reduced to less than 1mm. Furthermore, the touchpad has a low driving voltage (e.g., less than 24V) and low power consumption, resulting in greater energy efficiency. On the other hand, this touchpad can provide omnidirectional haptic feedback, simultaneously enabling touch control, pressure detection, vibration feedback, and other functions, thus improving the user experience.

[0067] For example, in some embodiments, the control circuit layer 110 may also include a structure such as a flexible circuit board (FPC) or an integrated circuit (IC) and have multiple contact pads (e.g., gold fingers) for electrical connection with the touch layer 202 and the piezoelectric layer 201.

[0068] For example, in some embodiments, such as Figure 1 and Figure 2As shown, the touch panel may also include a second substrate 20, a touch layer 202 and a piezoelectric layer 201 disposed on the second substrate 20, and the second substrate 20, the touch layer 202 and the piezoelectric layer 201 are disposed as a whole on the side of the control circuit layer 11 away from the first substrate 10.

[0069] For example, in some embodiments, such as Figure 2 As shown, the touch layer 202 and the piezoelectric layer 201 are respectively disposed on opposite sides of the second substrate 20, so that the touch layer 202 and the piezoelectric layer 201 are spaced far apart to avoid electromagnetic interference between the touch layer 202 and the piezoelectric layer 201.

[0070] For example, during the fabrication process, the touch layer 202 and the piezoelectric layer 201 can be formed on opposite sides of the second substrate 20, which can simplify the fabrication process of the touch panel and avoid defects such as breakage of the glass substrate caused by performing multiple processes on the same side of the glass substrate when the second substrate 20 is selected as a glass substrate.

[0071] For example, in some embodiments, the touch layer 202 is disposed on the side of the piezoelectric layer 201 away from the first substrate 10. For example, as Figure 2 As shown, the touchpad may also include a cover plate 203 on the surface of the touch layer 202 away from the control substrate, and the surface 203A of the cover plate 203 away from the control substrate ( Figure 2 The upper surface of the cover plate 203 becomes the touch surface of the touchpad. For example, the cover plate 203 can be made of organic insulating materials such as PET or tempered glass to have high surface hardness.

[0072] For example, Figure 3 Another structural diagram of the touch layer and piezoelectric layer in a touchpad is shown. (See diagram below.) Figure 3 As shown, in some other embodiments, the touch layer 202 and the piezoelectric layer 201 may also be disposed on the same side of the second substrate 20.

[0073] For example, such as Figure 3 As shown, the touch panel also includes an electromagnetic shielding layer 203 disposed between the touch layer 202 and the piezoelectric layer 201. Since the touch layer 202 and the piezoelectric layer 201 are located on the same side of the second substrate 20, their proximity makes them prone to electromagnetic interference. By providing the electromagnetic shielding layer 203 between the touch layer 202 and the piezoelectric layer 201, electromagnetic interference between them can be effectively prevented, thus ensuring that the touch layer 202 and the piezoelectric layer 201 each perform accurate touch sensing, pressure sensing, and vibration feedback operations.

[0074] For example, in some embodiments, the electromagnetic shielding layer 203 may be disposed on the touch layer 202, that is, on the side of the touch layer 202 near the piezoelectric layer 201. For example, in some embodiments, the electromagnetic shielding layer 203 may comprise a metallic material, such as a metal layer formed of copper, aluminum, titanium, or a conductive layer formed of a metal oxide material such as indium tin oxide (ITO). For example, the electromagnetic shielding layer 203 may be grounded or subjected to a fixed low-level voltage. For example, the thickness of the electromagnetic shielding layer 203 (the dimension in the direction perpendicular to the second substrate 20) may be 200nm-300nm, such as 220nm, 250nm, or 280nm.

[0075] For example, such as Figure 3 As shown, the touchpad may further include an insulating layer 204 disposed between the electromagnetic shielding layer 203 and the piezoelectric layer 201, for insulating the electromagnetic shielding layer 203 and the piezoelectric layer 201 to prevent signal crosstalk. For example, the insulating layer 204 may be made of inorganic insulating materials such as silicon oxide, silicon nitride, or silicon oxynitride. For example, the thickness of the insulating layer 204 (the dimension in the direction perpendicular to the second substrate 20) may be 150nm-250nm, such as 180nm, 200nm, or 230nm.

[0076] For example, in Figure 3 In the illustrated embodiment, the surface 20A of the second substrate 20 that is furthest from the control substrate ( Figure 3 The upper surface of the second substrate 20 becomes the touch surface of the touchpad; or, the touchpad may also include a tempered glass cover plate disposed on the surface 20A of the second substrate 20 away from the control substrate, the tempered glass cover plate having a thinner thickness and stronger hardness, which can improve the user's touch feel and prevent the surface of the touchpad from breaking.

[0077] For example, in Figure 3 In some embodiments, the touch layer 202 and the piezoelectric layer 201 are located on the side of the second substrate 20 closer to the control substrate. In other embodiments, the touch layer 202 and the piezoelectric layer 201 may also be located on the side of the second substrate away from the control substrate, and are arranged sequentially in a direction away from the control substrate. For example, in Figure 2 In one embodiment, the touch layer 202 is located on the side of the piezoelectric layer 201 away from the control substrate. In other embodiments, the piezoelectric layer 201 may also be located on the side of the touch layer 202 away from the control substrate.

[0078] For example, in some other embodiments, the touch layer 202 and the piezoelectric layer 201 may also be disposed on the same layer, for example, side by side on the second substrate 20. For instance, the touch layer 202 and the piezoelectric layer 201 each include multiple regions, and the multiple regions of the touch layer 202 and the multiple regions of the piezoelectric layer 201 are disposed alternately (interleaved) on the second substrate 20, thus being disposed on the same layer. The embodiments of this disclosure do not specifically limit the specific arrangement of the touch layer 202 and the piezoelectric layer 201 or their position relative to the second substrate 20.

[0079] For example, Figure 4 A cross-sectional schematic diagram of a touchpad provided in at least one embodiment of the present disclosure is shown. In some embodiments, such as Figure 4 As shown, the touchpad may also include at least one pad 30 disposed between the second substrate 20 and the control substrate to space the second substrate 20 and the control substrate.

[0080] For example, in some embodiments, at least one pad 30 may be sandwiched between the second substrate 20 and the touch circuit layer 11, or in other embodiments, the touch circuit layer 11 is disposed in the middle of the first substrate 10, in which case at least one pad 30 may be sandwiched between the second substrate 20 and the first substrate 10.

[0081] For example, Figure 5A and Figure 5B A schematic diagram showing the planar arrangement of pad 30 in the touchpad is shown. Figure 5A and Figure 5B As shown, at least one pad 30 includes a plurality of pads 30, which are spaced apart at the edges of the second substrate 20 and the control substrate.

[0082] For example, in some embodiments, the second substrate 20 and the control substrate are rectangular in planar shape, and a plurality of pads 30 are arranged in a straight line along at least two sides of the rectangle.

[0083] For example, such as Figure 5A and Figure 5B As shown, in some embodiments, the second substrate 20 and the control substrate have a rectangular planar shape, and a plurality of pads 30 are arranged in a straight line along the four sides of the rectangle, for example, respectively disposed at the middle positions of the four sides. For example, in Figure 5A In the illustrated embodiment, the touch circuit layer 11 is disposed in the middle of the first substrate 10, that is, exposing the edge of the first substrate 10. In this case, multiple pads 30 can be directly disposed on the first substrate 10, thereby allowing the multiple pads 30 to be directly sandwiched between the second substrate 20 and the first substrate 10. Figure 5BIn this embodiment, the setting range of the touch circuit layer 11 and the first substrate 10 is basically the same. At this time, multiple pads 30 can be directly set on the touch circuit layer 11, so that multiple pads 30 can be directly sandwiched between the touch circuit layer 11 and the first substrate 10.

[0084] For example, Figure 6A and Figure 6B This diagram illustrates another planar arrangement of the pad 30 within the touchpad. (See diagram below.) Figure 6A and Figure 6B As shown, the second substrate 20 and the control substrate have a rectangular planar shape. The plurality of pads 30 include four pads 30, which are arranged in an L-shape along the four corners of the rectangle, thereby providing better support.

[0085] For example, in Figure 6A In the illustrated embodiment, the touch circuit layer 11 is disposed in the middle of the first substrate 10. In this case, four pads 30 can be directly disposed at the four corners of the first substrate 10, so that the four pads 30 can be directly sandwiched between the second substrate 20 and the first substrate 10. Figure 6B In this embodiment, the setting range of the touch circuit layer 11 and the first substrate 10 is basically the same. At this time, multiple pads 30 can be directly set at the four corners of the touch circuit layer 11, so that the four pads 30 can be directly sandwiched between the touch circuit layer 11 and the first substrate 10.

[0086] For example, in some embodiments, such as Figure 4 As shown, in the direction perpendicular to the second substrate 20, i.e. Figure 4 In the vertical direction, the height of the pad 30 can be 0.5mm-10mm, such as 2mm, 4mm, 6mm, or 8mm. If the height of the pad 30 is greater than 10mm, when a finger or other object presses the touchpad, the touchpad will not deform severely due to excessive pressure, thus preventing damage to the touchpad's structure (such as the glass substrate). If the height of the pad 30 is less than 0.5mm, even a small amount of erroneous pressure will be detected by the touchpad, leading to inaccurate touchpad sensing.

[0087] For example, in some embodiments, such as Figure 5A As shown, in a direction parallel to the second substrate 20, for example... Figure 5A In the vertical direction, that is, in the direction perpendicular to the extension direction of the pad 30, the width W1 of the pad 30 can be 2mm-10mm, such as 3mm, 5mm, 7mm or 9mm. Thus, the pad 30 can not only serve as a spacer, but also ensure that the first substrate 10 and the second substrate 20 are in a free vibration state, avoiding interference with the vibration mode.

[0088] For example, in some embodiments, such as Figure 6C As shown, the multiple pads 30 include four pads 30. The rectangle includes two opposite long sides S1 and two opposite short sides S2. The four pads 30 are arranged in a straight line along the two long sides S1 of the rectangle, and two pads 30 are arranged on each of the two long sides S1.

[0089] For example, such as Figure 6C As shown, the length of each long side S1 is L, and each long side S1 has a first endpoint T1 and a second endpoint T2. The distance between the first endpoint T1 and the pad 30 closest to the first endpoint T1, which is perpendicular to the central axis of each long side S1, is 1 / 4L to 1 / 3L (1 / 4L is shown in the figure as an example). The distance between the second endpoint T2 and the pad 30 closest to the second endpoint T2, which is perpendicular to the central axis of each long side S1, is 1 / 4L to 1 / 3L (1 / 4L is shown in the figure as an example).

[0090] For example, such as Figure 6C As shown, the long side S1 of the rectangle is L, and the short side S2 is W. Each of the multiple pads 30 has a length of 0.1L - 0.5L (e.g., 0.2L, 0.3L, or 0.4L) and a width of 0.01W - 0.10W (e.g., 0.02W, 0.03W, or 0.05W). This allows for a better padding effect.

[0091] For example, in some embodiments, the number of pads 30 may also be greater, such as six, eight, or ten. For example, in some examples, such as Figure 6D As shown, the number of pads 30 can be six, with the six pads 30 located at the four corners of the rectangle and the middle of the two opposite long sides; or, in other embodiments, such as Figure 6E As shown, the number of pads 30 can also be eight, with the eight pads 30 located at the four corners of the rectangle and at the midpoints of the two opposite long sides and the two opposite short sides; or, in other embodiments, such as Figure 6F As shown, the number of pads 30 can be eight, with the eight pads 30 located at the four corners of the rectangle and on the two opposite long sides, for example, two pads are provided on each long side; or, in other embodiments, such as Figure 6G As shown, the number of pads 30 can also be ten. The ten pads 30 are located at the four corners of the rectangle and on the two opposite long sides and the two opposite short sides respectively; two pads are set on each long side and one pad is set on each short side.

[0092] The embodiments of this disclosure do not limit the number of pads provided on each long side and each short side. For example, two pads may be provided on each long side and each short side, or pads may be provided at the four corners, and two pads may be provided on each long side and each short side, etc. Whether pads are provided on each long side and each short side, the number of pads provided, and whether pads are provided at each corner can be set according to the length of each long side and each short side and specific requirements.

[0093] For example, in some embodiments, the Young's modulus of the material of the pad 30 is 0.1 MPa-2.0 MPa, such as 0.3 MPa, 0.6 MPa, 1.0 MPa, or 1.5 MPa. For example, the material of the pad 30 can be foam, polydimethylsiloxane (PDMS), or other materials with a certain degree of elasticity, thereby reducing the noise generated by vibration friction when the touchpad vibrates.

[0094] For example, Figure 7A A cross-sectional schematic diagram of the piezoelectric layer 201 is shown, as follows. Figure 7A As shown, in some embodiments, the piezoelectric layer 201 includes a first control electrode layer 2011, a second control electrode layer 2013, and a piezoelectric material layer 2012 between the first control electrode layer 2011 and the second control electrode layer 2013.

[0095] For example, Figure 7B A planar schematic diagram of the first control electrode layer 2011 is shown. (As shown...) Figure 7B As shown, the first control electrode layer 2011 includes a plurality of first pressure sensing electrodes 2011B spaced apart, and at least one of the plurality of first pressure sensing electrodes 2011B is configured to transmit a pressure sensing signal to the control circuit 110 when the piezoelectric material layer 2012 is subjected to pressure.

[0096] For example, such as Figure 7B As shown, the first control electrode layer 2011 also includes a plurality of first vibration feedback electrodes 2011A spaced apart. The control circuit 110 is configured to apply an electrical signal to at least one of the plurality of first vibration feedback electrodes 2011A when the pressure sensing signal is greater than a threshold, so as to drive the piezoelectric material layer 2012 to vibrate. Thus, the piezoelectric layer 201 serves as both a pressure detection layer and a tactile vibration feedback layer, allowing the touchpad to provide tactile vibration while being touched, thereby enabling functions such as button confirmation and quick operation.

[0097] For example, when an object such as a finger touches the touchpad, the pressure generated causes the touchpad to deform, and the piezoelectric material layer 2012 will generate an electric charge. This causes the control circuit to detect the "touch behavior". When the charge / voltage value detected by the control circuit reaches a certain threshold, the control circuit will excite the vibration feedback electrode with an electrical signal, causing the piezoelectric material layer 2012 to vibrate, which in turn causes the touchpad to resonate, generating large displacement and acceleration, thereby providing a vibration tactile sensation.

[0098] For example, the vibration frequency of the piezoelectric material layer 2012 can be controlled within the range of 50Hz-600Hz. Tests have shown that the human body is more sensitive to tactile vibrations in the 50Hz-1000Hz range, meaning it is easier to perceive vibrations, and less sensitive to auditory vibrations in the 30Hz-600Hz range, meaning it is difficult to hear vibrations in this range. Therefore, by controlling the vibration frequency of the piezoelectric material layer 2012 within the 50Hz-600Hz range, the human body can more easily sense touch without hearing vibrations.

[0099] For example, in some embodiments, such as Figure 7B As shown, the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A can be strip electrodes, the strip electrodes being along a first direction ( Figure 7B Extending in the vertical direction of the first direction, and in the second direction perpendicular to the first direction ( Figure 7B The piezoelectric material layer 2012 is arranged at intervals in the horizontal direction. The overlapping area between the multiple first pressure sensing electrodes 2011B and multiple first vibration feedback electrodes 2011A and the piezoelectric material layer 2012 is large, thus increasing the effective usable area of ​​the piezoelectric material layer 2012.

[0100] For example, Figure 7B The embodiments shown in this paper illustrate eight columns of first vibration feedback electrodes 2011A and seven columns of first pressure sensing electrodes 2011B as examples. However, the embodiments of this disclosure do not limit the number of first vibration feedback electrodes 2011A and first pressure sensing electrodes 2011B, and the number can be selected according to factors such as the size of the touchpad.

[0101] For example, such as Figure 7B As shown, a plurality of first pressure sensing electrodes 2011B and a plurality of first vibration feedback electrodes 2011A are alternately arranged in a second direction. For example, a column of first vibration feedback electrodes 2011A is arranged between two adjacent columns of first pressure sensing electrodes 2011B, and a column of first pressure sensing electrodes 2011B is arranged between adjacent columns of first vibration feedback electrodes 2011A.

[0102] For example, Figure 8 Another planar schematic diagram of the first control electrode layer is shown, such as... Figure 8As shown, in some embodiments, each of the plurality of first pressure sensing electrodes 2011B includes a plurality of sub-strip electrodes 2011B1 spaced apart along a first direction (two sub-strip electrodes 2011B1 are shown in the figure as an example); each of the plurality of first vibration feedback electrodes 2011A includes a plurality of sub-strip electrodes 2011A1 spaced apart along a first direction (two sub-strip electrodes 2011A1 are shown in the figure as an example). This allows for further separation of the tactile feedback and pressure sensing areas, thereby facilitating zoned control and enabling more modal vibrations.

[0103] For example, Figure 9 Another planar schematic diagram of the first control electrode layer is shown, as follows: Figure 9 As shown, in some other embodiments, the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A are block electrodes, and the plurality of first pressure sensing electrodes 2011B are along the first direction R1 ( Figure 9 Multiple first vibration feedback electrodes 2011A are spaced apart and arranged in columns along a first direction R1, and multiple columns of first pressure sensing electrodes 2011B and multiple columns of first vibration feedback electrodes 2011A are arranged in columns along a second direction R2 perpendicular to the first direction R1. Figure 9 (The horizontal direction in the middle) is set alternately.

[0104] For example, multiple first pressure sensing electrodes 2011B located in the same column are electrically connected, and are electrically connected to the touch circuit 110 in the bonding area B located at the edge of the piezoelectric layer; multiple first vibration feedback electrodes 2011A located in the same column are electrically connected, and are electrically connected to the touch circuit 110 in the bonding area B located at the edge of the piezoelectric layer. Alternatively, in some other embodiments, each first pressure sensing electrode 2011B and each first vibration feedback electrode 2011A may be electrically connected to the touch circuit 110 respectively; or, multiple first pressure sensing electrodes 2011B located in the same column are electrically connected to the touch circuit 110 in separate areas, and multiple first vibration feedback electrodes 2011A located in the same column are electrically connected to the touch circuit 110 in separate areas.

[0105] Therefore, the multiple first pressure sensing electrodes 2011B and multiple first vibration feedback electrodes 2011A of the first control electrode layer form a rectangular array, and the electrical connection structure between adjacent first pressure sensing electrodes 2011B and adjacent first vibration feedback electrodes 2011A is relatively narrow. Therefore, when a part of the pattern of the piezoelectric material layer 2012 (described later) is short-circuited, the electrodes above the short-circuited piezoelectric material layer 2012 can be cut off by cutting and repairing, so that the short-circuited piezoelectric material layer 2012 no longer participates in the sensing work, thereby ensuring that the other parts of the piezoelectric material layer 2012 continue to work normally.

[0106] For example, in some embodiments, such as Figure 7B , Figure 8 and Figure 9 As shown, the width W2 of the plurality of first vibration feedback electrodes 2011A in the second direction R2 is greater than the width W3 of the plurality of first pressure sensing electrodes 2011B in the second direction R2. This provides more adequate vibration feedback operation, and since pressure sensing is more sensitive, even if the area occupied by the first pressure sensing electrodes is small, it will not significantly affect the pressure sensing effect.

[0107] For example, in some embodiments, such as Figure 7A As shown, the piezoelectric material layer 2012 can be disposed on the entire surface, that is, the piezoelectric material layer 2012 is disposed continuously as a whole, and is disposed in sheet form on the second control electrode layer 2013.

[0108] Alternatively, in other embodiments, such as Figure 10 As shown, the piezoelectric material layer 2012 includes a plurality of piezoelectric material patterns 2012A. The plurality of piezoelectric material patterns 2012A extend along a first direction R1 and are spaced apart in a second direction R2. The orthographic projections of the plurality of piezoelectric material patterns 2012A on the second substrate 20 at least partially overlap with the orthographic projections of the plurality of first pressure sensing electrodes 2021B and the plurality of first vibration feedback electrodes 2021A on the second substrate 20.

[0109] For example, the pattern shape and size of the multiple piezoelectric material patterns 2012A are basically the same as the pattern shape and size of the multiple first pressure sensing electrodes 2021B and the multiple first vibration feedback electrodes 2021A, so that in the fabrication process, the multiple piezoelectric material patterns 2012A can be formed with the multiple first pressure sensing electrodes 2021B and the multiple first vibration feedback electrodes 2021A using the same mask and the same patterning process, thereby simplifying the fabrication process of the touch panel.

[0110] In the embodiments of this disclosure, by patterning the piezoelectric material layer 2012 into multiple piezoelectric material patterns 2012A, the binding force of the touch panel can be effectively released, reducing defects such as warping at the edge of the touch panel.

[0111] For example, in some embodiments, the piezoelectric material layer 2012 is made of one or more of PZT (lead zirconate titanate), AlN (aluminum nitride), and KNN [(K0.5Na0.5)NbO3]. All of these materials exhibit piezoelectric effects, enabling the conversion between mechanical and electrical energy. Under pressure, they can generate electrical signals, or under an electric field, they can undergo mechanical deformation. Among these piezoelectric materials, PZT has advantages such as a high piezoelectric constant and a high Curie temperature. AlN and KNN are lead-free piezoelectric materials, making them more environmentally friendly. Using these materials to form the piezoelectric material layer 2012 can improve the sensitivity of pressure sensing.

[0112] For example, in some embodiments, the second control electrode layer 2013 is a surface electrode layer, that is, the second control electrode layer 2013 is continuously disposed as a sheet on, for example, the second substrate 20. Figure 7A In this embodiment, the second control electrode layer 2013 is a surface electrode layer, and the piezoelectric material layer 2012 is disposed over its entire surface, exposing the edge of the second control electrode layer 2013. That is, the piezoelectric material layer 2012 is recessed relative to the second control electrode layer 2013, thereby exposing the edge of the second control electrode layer 2013. This facilitates the electrical connection between the second control electrode layer 2013 and the touch circuit 110.

[0113] Alternatively, in some other embodiments, refer to Figure 11A and Figure 11B The second control electrode layer 2013 includes a plurality of second control electrodes 2013A. The orthographic projections of the plurality of second control electrodes 2013A on the second substrate 20 at least partially overlap with the orthographic projections of the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A on the second substrate 20. For example, the patterns and sizes of the plurality of second control electrodes 2013A are the same as those of the pattern and size substrates of the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A, or the patterns of the plurality of second control electrodes 2013A are the same as those of the pattern substrates of the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A, and their sizes are slightly larger than those of the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A, thereby achieving better overlap with the plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A.

[0114] For example, Figure 12A Another cross-sectional view of the touchpad is shown. (See diagram below.) Figure 12AAs shown, in some embodiments, to further improve the pressure sensing performance of the touchpad and avoid signal misjudgment or extended response time when the piezoelectric layer 201 is used simultaneously as a pressure detection layer and a tactile vibration feedback layer, the touchpad may also include at least one pressure sensor element 40 disposed between the second substrate 20 and the control substrate. The pressure sensor element 40 is electrically connected to the control circuit 110. The pressure sensor element 40 can also sense the pressure pressed on the surface of the touchpad and transmit it to the control circuit 110.

[0115] For example, the pressure sensor sensing element 40 can be a ceramic capacitive pressure sensor sensing element or other pressure-sensitive elements for pressure detection. For instance, a ceramic capacitive pressure sensor sensing element uses ceramic as the sensing element, forming a capacitive structure and a dry measurement without a dielectric fluid, sensing pressure changes through changes in capacitance. Compared to common silicon piezoresistive sensors, ceramic capacitive pressure sensor sensing elements can be applied to various measurement media environments and maintain high measurement accuracy over a wide temperature range (e.g., -40℃ to 150℃).

[0116] For example, the pressure sensor sensing element 40 can be a commercially available device and is attached to the touch substrate using optically clear adhesive (OCA), such as on the control circuit layer 11 or the first substrate 10, and is electrically connected to the control circuit. When the touch panel is subjected to pressure, and the pressure reaches a threshold, the pressure sensor sensing element 40 is triggered, generating a voltage change and transmitting an electrical signal to the control circuit.

[0117] For example, in some embodiments, the pressure sensor sensing element 40 and the pad 30 are disposed on the same plane, such as on the control circuit layer 11 or on the first substrate 10. Figure 12A As shown, in the direction perpendicular to the second substrate 20, the height H2 of the pressure sensor sensing element 40 is lower than the height H1 of the pad 30. When the touchpad is subjected to pressure, and the pressure reaches a threshold, the second substrate 20 will directly contact the pressure sensor sensing element 40 and trigger the pressure sensor sensing element 40.

[0118] For example, Figure 12B and Figure 12C A plan view of the pressure sensor sensing element 40 is shown. In some embodiments, at least one pressure sensor sensing element 40 includes a plurality of pressure sensor sensing elements 40, and both the pressure sensor sensing elements 40 and the pad 30 are disposed on a control substrate, for example, on a first substrate 10. Figure 12B (as shown) or on control circuit layer 11 ( Figure 12C (as shown in the illustration), and is positioned at the edge of the first substrate 10 or the control circuit layer 11.

[0119] For example, in Figure 12B In the illustrated embodiment, the control circuit layer 11 is disposed in the middle of the first substrate 10, so the pressure sensor sensing element 40 can be directly disposed between the second substrate 20 and the first substrate 10, for example, at the edges of the four sides of the first substrate 10; Figure 12C In the illustrated embodiment, the control circuit layer 11 is disposed in a substantially the same area as the first substrate 10. Therefore, the pressure sensor sensing element 40 is disposed directly between the control circuit layer 11 and the first substrate 10, for example, at the edges of the four sides of the control circuit layer 11.

[0120] Figure 12B and Figure 12C The embodiment is illustrated by taking the pressure sensor sensing element 40 as being disposed on the edges of the four sides of the first substrate 10 or the control circuit layer 11 as an example. In other embodiments, the pressure sensor sensing element 40 may also be disposed at the four corners of the first substrate 10 or the control circuit layer 11. In this case, the pad 30 is disposed at the four sides of the first substrate 10 or the control circuit layer 11.

[0121] In the embodiments of this disclosure, since the height H2 of the pressure sensor sensing element 40 is lower than the height H2 of the pad 30, the pressure sensor sensing element 40 and the second substrate 20 are spaced apart, such as... Figure 12A As shown, when the touchpad is not subjected to external force, the pressure sensor element 40 will not be triggered. When the touchpad is subjected to external force, the second substrate 20 deforms and touches the pressure sensor element 40. Thus, the pressure sensor element 40 senses the pressure, realizes piezoelectric conversion, and transmits the electrical signal to the touch circuit 110.

[0122] For example, Figure 13A A cross-sectional schematic diagram of the touch layer is shown. Figure 13B A planar schematic diagram of the touch layer is shown. (See diagram below.) Figure 13A As shown, the touch layer 201 includes a first touch electrode layer 2021, a second touch electrode layer 2023, and an insulating layer 2022 between the first touch electrode layer 2021 and the second touch electrode layer 2023.

[0123] like Figure 13BAs shown, the first touch electrode layer 2021 includes a plurality of first touch electrodes 2021A extending along a first direction R1, such as a plurality of electrode blocks arranged and electrically connected along the first direction R1. The first touch electrodes 2021A are electrically connected to the control circuit 110 through a first touch trace 2021B. The second touch electrode layer 2022 includes a plurality of second touch electrodes 2022A extending along a second direction R2 intersecting the first direction R1, such as a plurality of electrode blocks arranged and electrically connected along the second direction R2. The second touch electrodes 2022A are electrically connected to the control circuit 110 through a second touch trace 2022B.

[0124] For example, the first touch electrode layer 2021 and the second touch electrode layer 2023 can be made of transparent metal oxide materials such as indium tin oxide (ITO), and the spacer insulating layer 2022 can be made of optical clear adhesive (OCA), so that the spacer insulating layer 2022 can simultaneously play the roles of spacer, insulation and adhesion.

[0125] For example, during the fabrication process, the first touch electrode layer 2021 and the second touch electrode layer 2023 can be directly deposited on the second substrate 20 by magnetron sputtering, sol-gel or aerosol methods. When the piezoelectric material layer 2012 is formed after the first touch electrode layer 2021 and the second touch electrode layer 2023 have been formed, since the heat treatment temperature of the piezoelectric material layer 2012 is usually greater than 500 degrees Celsius, the spacer insulating layer 2022 can also be made of inorganic insulating materials such as silicon oxide, silicon nitride or silicon oxynitride to avoid melting.

[0126] With the above structure, the touch layer can be implemented as a projected capacitive touch layer, forming a capacitor matrix with touch electrodes distributed in the first direction R1 and the second direction R2, and the coordinates of the touch position can be calculated by detecting the change in capacitance at the touch position.

[0127] For example, when an object such as a finger touches the touchpad, the finger or object will form a capacitance with the first touch electrode 2021A and the second touch electrode 2022B, thereby changing the original capacitance structure of the first touch electrode 2021A and the second touch electrode 2022B. By detecting the horizontal and vertical coordinates of the first touch electrode 2021A and the second touch electrode 2022B whose capacitance has been changed, the touch position of the finger or object can be determined, thereby realizing touch detection.

[0128] For example, the second substrate 20 can be a rigid substrate, such as a non-metallic substrate like glass, quartz, or plastic, or a metallic substrate like aluminum or aluminum alloy; or, the second substrate 20 can be a flexible substrate, such as an insulating substrate formed from organic insulating materials like polyimide. For example, the touch layer 202 and the piezoelectric layer 201 can be fabricated on the second substrate 20 respectively, and are attached to the touch substrate as a whole with the second substrate 20.

[0129] For example, the first substrate 10 can be a rigid substrate, such as a non-metallic substrate like glass, quartz, or plastic, or a metallic substrate like aluminum or aluminum alloy, to provide better support and protection.

[0130] For example, in some embodiments, the first control electrode layer, the piezoelectric material layer, and the second control electrode layer can have different patterns and connection methods. For example, 14A- Figure 14E These are schematic diagrams of the various layers of the piezoelectric layer in a touch panel provided in one embodiment of this disclosure.

[0131] For example, Figure 14A A planar schematic diagram of the second control electrode layer 2013 is shown. In this example, the second control electrode layer 2013 is disposed on the second substrate 20. The second control electrode layer 2013 includes a plurality of second control electrode patterns 2013A, 2013B, and 2013C. For example, the second control electrode pattern 2013A is used to overlap with the first vibration feedback electrode 2011A to realize the vibration feedback function; the second control electrode pattern 2013B is used to overlap with the first pressure sensing electrode 2011B to realize the pressure detection function; and the second control electrode pattern 2013C serves as a contact pad for electrical connection with the control circuit.

[0132] For example, such as Figure 14A As shown, the number of second control electrode patterns 2013B is less than the number of second control electrode patterns 2013A. For example, multiple second control electrode patterns 2013A located in the same column are electrically connected to each other and connected to second control electrode pattern 2013C; the number of second control electrode patterns 2013B located in the same column is two, and they are located at the beginning and end of the column.

[0133] For example, in this embodiment, the pattern and size of the second control electrode pattern 2013A are substantially the same as those of the second control electrode pattern 2013B.

[0134] For example, Figure 14B A planar schematic diagram of the piezoelectric material layer 2012 is shown, as follows. Figure 14BAs shown, the piezoelectric material layer 2012 includes multiple piezoelectric material patterns 2012A, which correspond one-to-one with and overlap with the second control electrode pattern 2013A and the second control electrode pattern 2013B, respectively.

[0135] For example, Figure 14C A planar schematic diagram of the first control electrode layer 2011 is shown, as follows. Figure 14C As shown, the first control electrode layer 2011 includes a plurality of first pressure sensing electrodes 2011B and a plurality of first vibration feedback electrodes 2011A. The plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A overlap with a plurality of piezoelectric material patterns 2012A in a one-to-one correspondence. The plurality of first pressure sensing electrodes 2011B, together with the plurality of piezoelectric material patterns 2012A and the plurality of second control electrode patterns 2013B, constitute a pressure sensing unit. The plurality of first vibration feedback electrodes 2011A, together with the plurality of piezoelectric material patterns 2012A and the plurality of second control electrode patterns 2013A, constitute a vibration feedback unit.

[0136] For example, Figure 14D A planar schematic diagram of the first insulating layer 2014 is shown, as follows. Figure 14D As shown, the first insulating layer 2014 is disposed on the first control electrode layer 2011, including a plurality of openings 2012B exposing the second control electrode pattern 2013C and a plurality of openings 2014A exposing a plurality of first vibration feedback electrodes 2011A and a plurality of first pressure sensing electrodes 2011B. These openings are used for wiring to make electrical connections with the exposed structure.

[0137] For example, Figure 14E A schematic diagram of the routing layer is shown, such as... Figure 14E As shown, the wiring layer includes multiple traces 2015. Each trace 2015 is used to electrically connect to a first pressure sensing electrode 2011B or a first vibration feedback electrode 2011A located in the same column, and to a control circuit; alternatively, in other embodiments, each trace 2015 may connect to one first vibration feedback electrode 2011A or one first pressure sensing electrode 2011B. The embodiments of this disclosure do not limit the electrical connection method between the multiple traces 2015 and the multiple first vibration feedback electrodes 2011A and the multiple first pressure sensing electrodes 2011B.

[0138] For example, Figures 15A-15D These are schematic diagrams of the piezoelectric layers in another touchpad provided in another embodiment of this disclosure.

[0139] For example, Figure 15AA planar schematic diagram of the second control electrode layer 2013 is shown. In this example, the second control electrode layer 2013 is disposed on the second substrate 20. The second control electrode layer 2013 includes a plurality of second control electrode patterns 2013A and 2013B. For example, the second control electrode pattern 2013A is used to overlap with the first vibration feedback electrode 2011A to realize the vibration feedback function, and the second control electrode pattern 2013B is used to overlap with the first pressure sensing electrode 2011B to realize the pressure detection function.

[0140] For example, such as Figure 15A As shown, the number of second control electrode patterns 2013B is equal to the number of second control electrode patterns 2013A. The width (area) of the second control electrode pattern 2013A is greater than the width (area) of the second control electrode pattern 2013B.

[0141] For example, Figure 15B A planar schematic diagram of the piezoelectric material layer 2012 is shown, as follows. Figure 15B As shown, the piezoelectric material layer 2012 includes multiple piezoelectric material patterns 2012A, 2012B, 2012C, and 2012D. Multiple piezoelectric material patterns 2012A overlap with multiple second control electrode patterns 2013A, and multiple piezoelectric material patterns 2012A overlap with multiple second control electrode patterns 2013B. Piezoelectric material pattern 2012D is used to overlap with contact pads 2011D (described later) in the first control electrode layer 2011. Piezoelectric material pattern 2012C serves as a connecting structure, used to connect two adjacent piezoelectric material patterns 2012A or two adjacent piezoelectric material patterns 2012B in the column direction, or to connect piezoelectric material patterns 2012A or 2012B to piezoelectric material pattern 2012D.

[0142] For example, Figure 15C A planar schematic diagram of the first control electrode layer 2011 is shown, as follows. Figure 15C As shown, the first control electrode layer 2011 includes a plurality of first pressure sensing electrodes 2011B, a plurality of first vibration feedback electrodes 2011A, a connecting electrode 2011C, and a contact pad 2011D. The plurality of first pressure sensing electrodes 2011B and the plurality of first vibration feedback electrodes 2011A overlap with a plurality of piezoelectric material patterns 2012A and 2012B, respectively. The plurality of first pressure sensing electrodes 2011B, together with the plurality of piezoelectric material patterns 2012B and the plurality of second control electrode patterns 2013B, constitute a pressure sensing unit. The plurality of first vibration feedback electrodes 2011A, together with the plurality of piezoelectric material patterns 2012A and the plurality of second control electrode patterns 2013A, constitute a vibration feedback unit.

[0143] exist Figure 15CIn the figure, multiple first pressure sensing electrodes 2011B and multiple first vibration feedback electrodes 2011A are divided into two regions, the upper region G1 and the lower region G2 in the figure. The first pressure sensing electrodes 2011B located in the same region and in the same column are electrically connected by connecting electrodes 2011C and connected to the corresponding contact pads 2011D; the first vibration feedback electrodes 2011A located in the same region and in the same column are electrically connected by connecting electrodes 2011C and connected to the corresponding contact pads 2011D.

[0144] For example, Figure 15D A plan view of the first routing layer is shown, as follows: Figure 15D As shown, a first trace layer is disposed on the second substrate 20, including traces 2013L electrically connected to a plurality of second control electrode patterns 2013A and 2013B, the ends of which are used for electrical connection to a control circuit. For example, in some embodiments, when the second control layer 2013 is disposed over its entire surface, traces 2013L can be directly disposed on the second control layer 2013.

[0145] For example, Figure 16 A planar schematic diagram of the first control electrode layer, the second control electrode layer, and the wiring layer is shown in some other embodiments, such as... Figure 16 As shown, in this embodiment, the first wiring layer includes multiple traces 2013L, which are used to electrically connect the second touch electrode patterns 2013A and 2013B to the control circuit. The second wiring layer includes multiple traces 2011E, which are used to electrically connect a first vibration feedback electrode 2011A to the control circuit, or a first pressure sensing electrode 2011B to the control circuit, thereby enabling separate control of each vibration feedback unit and each pressure sensing unit.

[0146] In other embodiments of this disclosure, the first control electrode layer and the second control electrode layer may also be electrically connected to the control circuit in other ways, and the piezoelectric material layer may also be disposed in other ways, which will not be described in detail here.

[0147] The following points also need to be explained:

[0148] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure, and other structures can be referred to the general design.

[0149] (2) For clarity, the thickness of layers or regions is enlarged or reduced in the drawings used to describe embodiments of the present disclosure, i.e., these drawings are not drawn to scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being “above” or “below” another element, the element may be “directly” located “above” or “below” the other element or there may be intermediate elements.

[0150] (3) Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0151] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. The scope of protection of this disclosure shall be determined by the scope of the claims.

Claims

1. A touch panel, comprising a control substrate, a touch layer, and a piezoelectric layer stacked together. in, The control substrate includes a first substrate and a control circuit layer disposed on the first substrate, wherein the touch layer and the piezoelectric layer are located on the control substrate. The control circuit layer includes a control circuit, which is electrically connected to the touch layer and the piezoelectric layer respectively, and is configured to apply electrical signals to the touch layer and the piezoelectric layer respectively and / or receive electrical signals from the touch layer and the piezoelectric layer respectively; The touch panel further includes a second substrate, wherein the touch layer and the piezoelectric layer are disposed on the second substrate, and the second substrate, the touch layer and the piezoelectric layer are disposed as a whole on the side of the control circuit layer away from the first substrate; The touch layer and the piezoelectric layer are respectively disposed on the same side of the second substrate. The touch panel also includes an electromagnetic shielding layer disposed between the touch layer and the piezoelectric layer. The electromagnetic shielding layer is grounded or subjected to a fixed low-level voltage. The touch layer is disposed on the side of the piezoelectric layer away from the control substrate, and the touch panel further includes a cover plate on the surface of the touch layer away from the control substrate, and the surface of the cover plate away from the control substrate becomes the touch surface of the touch panel; An insulating layer is also provided between the electromagnetic shielding layer and the piezoelectric layer.

2. The touch panel according to claim 1 further includes at least one pad disposed between the second substrate and the control substrate to space the second substrate and the control substrate.

3. The touchpad according to claim 2, wherein, The at least one pad includes a plurality of pads, which are spaced apart at the edges of the second substrate and the control substrate.

4. The touchpad according to claim 3, wherein, The second substrate and the control substrate have rectangular planar shapes. The plurality of pads are arranged in a straight line along at least two sides of the rectangle.

5. The touchpad according to claim 4, wherein, The plurality of pads includes four pads, which are arranged in a straight line along the middle of the four sides of the rectangle.

6. The touchpad according to claim 5, wherein, The plurality of pads includes four pads, and the rectangle includes two opposite long sides and two opposite short sides. The four pads are arranged in a straight line along the two long sides of the rectangle, and two pads are arranged on each of the two long sides.

7. The touchpad according to claim 6, wherein, The length of each long side is L, and each long side has a first endpoint and a second endpoint. The distance between the first endpoint and the central axis of the pad closest to the first endpoint, which is perpendicular to the central axis of each long side, is 1 / 4L to 1 / 3L. The distance between the second endpoint and the central axis of the pad closest to the second endpoint, which is perpendicular to the central axis of each long side, is 1 / 4L to 1 / 3L.

8. The touchpad according to any one of claims 4-7, wherein, The rectangle has a long side length of L and a short side length of W. Each of the plurality of pads has a length of 0.1L-0.5L and a width of 0.01W-0.10W.

9. The touchpad according to any one of claims 3-7, wherein, The second substrate and the control substrate have rectangular planar shapes. The plurality of pads includes four pads, which are arranged in an L-shape along the four corners of the rectangle.

10. The touchpad according to any one of claims 2-7, wherein, In the direction perpendicular to the second substrate, the height of the at least one pad is 0.5mm-10mm.

11. The touchpad according to any one of claims 2-7, wherein, The Young's modulus of the material of the at least one pad is 0.1 MPa-2.0 MPa.

12. The touch panel according to any one of claims 2-7, further comprising at least one pressure sensor sensing element disposed between the second substrate and the control substrate, wherein, The at least one pressure sensor sensing element is electrically connected to the control circuit. In a direction perpendicular to the second substrate, the height of the at least one pressure sensor sensing element is lower than the height of the at least one pad.

13. The touchpad according to any one of claims 12, wherein, Both the at least one pressure sensor sensing element and the at least one pad are disposed on the control base plate. The at least one pressure sensor sensing element is spaced apart from the second substrate.

14. The touchpad according to any one of claims 1-7, wherein, The piezoelectric layer includes a first control electrode layer, a second control electrode layer, and a piezoelectric material layer between the first control electrode layer and the second control electrode layer. The first control electrode layer includes a plurality of first pressure sensing electrodes spaced apart, and at least one of the plurality of first pressure sensing electrodes is configured to transmit a pressure sensing signal to the control circuit when the piezoelectric material layer is subjected to pressure.

15. The touchpad according to claim 14, wherein, The first control electrode layer also includes a plurality of first vibration feedback electrodes spaced apart. The control circuit is configured to apply an electrical signal to at least one of the plurality of first vibration feedback electrodes when the pressure sensing signal is greater than a threshold, so as to drive the piezoelectric material layer to vibrate.

16. The touchpad according to claim 15, wherein, The plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are strip electrodes, which extend along a first direction and are spaced apart in a second direction perpendicular to the first direction.

17. The touchpad according to claim 16, wherein, The plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are alternately arranged in the second direction.

18. The touchpad according to claim 16, wherein, Each of the plurality of first pressure sensing electrodes includes a plurality of sub-strip electrodes spaced apart along the first direction; Each of the plurality of first vibration feedback electrodes includes a plurality of sub-strip electrodes spaced apart along the first direction.

19. The touchpad according to claim 15, wherein, The plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes are block electrodes. The plurality of first pressure sensing electrodes are spaced apart and arranged in a column along a first direction, and the plurality of first vibration feedback electrodes are spaced apart and arranged in a column along the first direction. Multiple rows of first pressure sensing electrodes and multiple rows of first vibration feedback electrodes are alternately arranged along a second direction perpendicular to the first direction.

20. The touchpad according to claim 16, wherein, The width of the plurality of first vibration feedback electrodes in the second direction is greater than the width of the plurality of first pressure sensing electrodes in the second direction.

21. The touchpad according to claim 14, wherein, The piezoelectric material layer is applied across the entire surface.

22. The touchpad according to claim 15, wherein, The piezoelectric material layer includes multiple piezoelectric material patterns that extend along a first direction and are spaced apart along a second direction. The orthographic projections of the plurality of piezoelectric material patterns on the second substrate at least partially overlap with the orthographic projections of the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes on the second substrate.

23. The touchpad according to claim 15, wherein, The second control electrode layer is a surface electrode layer; or The second control electrode layer includes a plurality of second control electrodes, the orthographic projections of the plurality of second control electrodes on the second substrate at least partially overlapping the orthographic projections of the plurality of first pressure sensing electrodes and the plurality of first vibration feedback electrodes on the second substrate.

24. The touchpad according to claim 14, wherein, The piezoelectric material layer is made of one or more of PZT, AlN, and KNN.

25. The touchpad according to any one of claims 1-7, wherein, The touch layer includes a first touch electrode layer, a second touch electrode layer, and an insulating layer separating the first touch electrode layer and the second touch electrode layer. The first touch electrode layer includes a plurality of first touch electrodes extending along a first direction. The second touch electrode layer includes a plurality of second touch electrodes extending along a second direction intersecting the first direction.

26. The touchpad according to any one of claims 1-7, wherein, The touch layer and the piezoelectric layer are respectively disposed on opposite sides of the second substrate.

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