Conveyance cart and article conveyance system having the same

Abstract

Embodiments of the present invention aim to provide a transport trolley capable of preventing collision danger of the transport trolley and minimizing damage to components when colliding, and an article transport system provided with the same. A transport trolley for conveying articles in a manufacturing plant according to the present invention includes a traveling unit traveling along a traveling track, and a crane unit supporting articles below the traveling unit. The crane unit includes a vehicle frame, and a pair of tail plates provided at the rear of the vehicle frame and protruding rearward.

Description

Technical Field

[0001] This invention relates to a conveyor trolley for conveying articles in a manufacturing plant and an article conveying system having the same. Background Technology

[0002] Semiconductor or display manufacturing processes, which involve creating a final product from a substrate (wafer or glass) through dozens to hundreds of processing steps, can be performed using manufacturing equipment that executes each process individually. Once a process in a particular manufacturing device is completed, the substrate can be transported to the next manufacturing device for the next process, or it can be stored in storage equipment for a certain period of time.

[0003] The logistics system of a manufacturing plant, as described above, is a system for transporting or storing goods for the manufacturing process. It can be broadly divided into conveyor systems for transporting goods and storage systems for storing goods. In logistics systems, overhead hoist transport (OHT) systems, which travel along tracks installed on the ceiling, are suitable for manufacturing plants.

[0004] In the case of conveyor trolleys that transport items, the system is configured to detect other conveyor trolleys or obstacles in the vicinity using various sensors mounted on the trolley or a controller mounted on top, and to travel to the target location without colliding with other objects. However, collisions may occur due to malfunctioning sensors or the presence of objects that the sensors cannot detect in time. In particular, the travel paths of conveyor trolleys in manufacturing plants include not only straight sections but also branching and curved sections. In the case of branching and curved sections, the possibility of collisions due to sensors failing to detect objects is high. In particular, if a collision occurs with another conveyor trolley, the impact may cause damage to the transported items (e.g., wafers, masks) or to the electronic equipment (e.g., sensors) mounted on the conveyor trolley. Summary of the Invention

[0005] Embodiments of the present invention aim to provide a conveyor trolley capable of preventing the danger of collision with the conveyor trolley and minimizing component damage in the event of a collision, as well as an article conveying system having the same.

[0006] A transport trolley for conveying articles in a manufacturing plant according to the present invention comprises: a travel unit that travels along a travel track; and a crane unit that supports the articles below the travel unit. The crane unit comprises: a frame; and a pair of tailplates disposed behind the frame and projecting rearward.

[0007] According to an embodiment of the present invention, the tailgate may be disposed below a bumper unit disposed at the rear of the vehicle frame.

[0008] According to an embodiment of the present invention, the tailgate may protrude rearward to the end of the bumper unit.

[0009] According to an embodiment of the present invention, the position of the tail plate may be determined in such a way that it avoids colliding with a trolley sensing sensor located at the front center of another trolley when it collides with another trolley located behind it.

[0010] According to an embodiment of the present invention, the tail plate may be configured to reflect light irradiated from the trolley sensing sensor.

[0011] The article describes a trolley for conveying items in a manufacturing plant according to the present invention, comprising: a travel unit that travels along a travel track; and a crane unit that supports items below the travel unit. The crane unit includes: a frame; bumper units respectively disposed at the front and rear of the frame; and a pair of tailplates disposed at the rear of the frame and protruding rearward.

[0012] According to an embodiment of the present invention, the bumper unit may include: a front bumper unit disposed at the front of the vehicle frame; and a rear bumper unit disposed at the rear of the vehicle frame.

[0013] According to an embodiment of the present invention, the front bumper unit may include: a front bracket, which is coupled to the front center portion of the vehicle frame and has a forward-protruding shaft; a front cover plate, which is coupled to both sides of the front side portion of the vehicle frame and is bent forward; and a rubber bumper component, which is coupled to the outer side of the front cover plate.

[0014] According to an embodiment of the present invention, the rear bumper unit may include: a rear bracket, which is coupled to the rear center portion of the vehicle frame and has a rearwardly protruding shaft; a rear cover plate, which is coupled to both sides of the rear side portion of the vehicle frame and is bent rearwardly; and a shock-absorbing component disposed between the rear bracket and the rear cover plate to generate a buffering force.

[0015] The article conveying system of the manufacturing plant according to the present invention includes: a conveyor trolley for conveying articles; and a travel track providing a travel path for the conveyor trolley. The conveyor trolley includes: a travel unit for traveling along the travel track; and a crane unit for supporting articles below the travel unit. The crane unit includes: a frame; bumper units respectively disposed at the front and rear of the frame; and a pair of tailplates disposed at the rear of the frame and protruding rearward.

[0016] According to the present invention, a pair of rearward-protruding tail plates are formed in the front conveyor trolley, so that while the rear conveyor trolley is sensed by the tail plates, the trolley sensing sensors in front of other conveyor trolleys are also prevented from being damaged when colliding with other rear conveyor trolleys. Attached Figure Description

[0017] Figure 1 A schematic layout of an article conveying system for conveying articles in a manufacturing plant according to the present invention is shown.

[0018] Figure 2 The image shows a conveyor trolley according to the invention, viewed from the front.

[0019] Figure 3 The conveyor trolley is shown as viewed from the side.

[0020] Figure 4 The image shows the conveyor trolley as viewed from above.

[0021] Figure 5 The structure of the bumper unit in the transport trolley is shown.

[0022] Figure 6 as well as Figure 7 A diagram is shown to illustrate the tail plate in the conveyor trolley.

[0023] (Explanation of reference numerals in the attached diagram)

[0024] 10: Travel Track

[0025] 20: Conveyor trolley

[0026] 100: Driving Unit

[0027] 200: Crane Unit

[0028] 210: Chassis

[0029] 220: Hand unit

[0030] 260: Cart sensing sensor

[0031] 270: Bumper unit

[0032] 271: Front bracket

[0033] 272: Front cover

[0034] 273: Rubber bumper components

[0035] 274: Rear support bracket

[0036] 275: Rear cover

[0037] 276: Vibration damping components

[0038] 280: Tailgate Detailed Implementation

[0039] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art to which this invention pertains can readily implement it. The present invention can be implemented in various different forms and is not limited to the embodiments described herein.

[0040] For the purpose of clearly illustrating the invention, parts that are not related to the description have been omitted, and the same or similar components are marked with the same reference numerals throughout the specification.

[0041] Furthermore, in multiple embodiments, the same reference numerals are used for components with the same structure, and only representative embodiments are described. In other embodiments, only representative embodiments and other components are described.

[0042] In the specification as a whole, when it is stated that a certain part is "connected (or combined)" with other parts, it not only refers to the case of "direct connection (or combination)" but also to the case of "indirect connection (or combination)" through other components. In addition, when it is stated that a certain part "includes" a certain constituent element, unless there is a particularly contrary statement, it means that other constituent elements may also be included, rather than excluding other constituent elements.

[0043] Unless otherwise defined, technical or scientific terms, including those commonly understood by one of ordinary skill in the art to which this invention pertains, shall have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in commonly used dictionaries shall be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be ideally or excessively interpreted as having a formal meaning unless expressly defined in this application.

[0044] Figure 1 A schematic layout of a transport system for conveying articles in a manufacturing plant according to the present invention is shown. Hereinafter, a semiconductor manufacturing plant for manufacturing semiconductor products will be described as an example of a manufacturing plant to which the present invention is applicable. However, the range of manufacturing plants to which the present invention is applicable is not limited to a specific type, and can be applied to manufacturing plants in various industrial groups. For example, the transport system of the present invention can be applied to other types of manufacturing plants that produce products such as display panels, electronic devices, automobiles, or secondary batteries.

[0045] The manufacturing plant may consist of one or more cleanrooms, each equipped with manufacturing equipment 1 for performing semiconductor manufacturing processes. Typically, a substrate (e.g., a wafer) can be processed by repeatedly performing multiple manufacturing processes on it. If a manufacturing process is completed in a specific semiconductor manufacturing equipment 1, the substrate is then transported to the next manufacturing equipment 1 for that process. Here, the wafer can be transported in a transport container (e.g., a front-opening unified pod, FOUP) capable of holding multiple substrates. The transport container holding the wafer can be transported by a transport trolley 20. The transport trolley 20 can be referred to as an OHT (overhead hoist transport) system that travels along a travel track 10 provided on the ceiling.

[0046] Reference Figure 1 A manufacturing plant is provided with manufacturing equipment 1 for performing processes, and a transport trolley 20 for transferring items between manufacturing equipment 1 and a travel track 10 for providing the travel path of the transport trolley 20 are provided. Here, when the transport trolley 20 transports items between manufacturing equipment 1, items can be transported directly from one manufacturing equipment 1 to another manufacturing equipment 1, or items can be stored in a storage device 30 and then transported to another manufacturing equipment 1.

[0047] Figure 2 as well as Figure 3 A conveyor trolley 20 for transporting articles in a manufacturing plant according to the present invention is shown. Figure 2 The conveyor trolley 20 is shown as viewed from the front. Figure 3 The conveyor trolley 20 is shown as viewed from the side.

[0048] Reference Figure 2 The travel track 10 includes a pair of track components spaced apart from each other in the horizontal direction and mounted on the roof side of the manufacturing plant via track supports 15. Alternatively, the lower end of each track support 15 may support the pair of track components, while the upper end is fixedly mounted on the roof of the semiconductor manufacturing plant. The pair of track components may be configured to provide a travel surface on the upper side.

[0049] like Figure 2 As shown, the power supply device 40 for supplying power to the conveyor trolley 20 includes: a cable mounting structure 42 disposed below the travel track 10; and a power supply cable 41 disposed on the cable mounting structure 42. The power supply cable 41 guides current to the power receiving device of the conveyor trolley 20, which provides drive power.

[0050] Reference Figure 2The transport trolley 20 includes: a travel unit 100 that travels along a travel track 10; and a crane unit 200 that supports the articles below the travel unit 100. The crane unit 200 moves together with the travel unit 100 and transfers the articles to the manufacturing equipment 1.

[0051] The travel unit 100 includes a vehicle body 110 and travel wheels 120. An axle extending in the left-right direction is mounted on the vehicle body 110. Multiple axles can be provided and spaced apart from each other in the front-rear direction. The travel wheels 120 are wheels that give the vehicle body 110 mobility so that the vehicle body 110 can travel along the guide rails 10. The travel wheels 120 can be respectively mounted on both ends of the axles and rotate by contacting the upper surfaces of a pair of travel rails 10. The travel unit 100 also includes a wheel drive unit 130, which provides power for rotating the travel wheels 120. As an example, the wheel drive unit 130 can be configured to rotate the axles.

[0052] The crane unit 200 includes a frame 210. The frame 210 is connected to the travel unit 100 below the travel rail 10. The upper part of the frame 210 can be connected to the lower part of the vehicle body 110 via one or more connectors. The frame 210 provides a storage space for accommodating items. The frame 210 is configured to be fully open on the left, right, and lower sides, allowing items to move horizontally (X-direction) and downward within the storage space.

[0053] In addition, the crane unit 200 also includes: a hand unit 220 for grasping or releasing objects; and a hand movement unit for moving the hand unit 220 between a first position and a second position. The first position is where the object grasped by the hand unit 220 is housed in the receiving space of the frame 210, and the second position is outside the frame 210, corresponding to the position of detachment from such a first position. The crane unit 200, as a hand movement unit, includes a vertical drive unit 230, a rotary drive unit 240, and a horizontal drive unit 250.

[0054] Hand unit 220 may include: a hand for grasping and releasing an item; and a hand support for supporting the hand. Vertical drive unit 230 moves hand unit 220 vertically. Vertical drive unit 230 can move hand unit 220 in the vertical direction (Z direction) by winding or unwinding at least one belt relative to a drum. Rotation drive unit 240 rotates hand unit 220 about a vertical axis, and horizontal drive unit 250 moves hand unit 220 left-right. For example, by moving hand unit 220 vertically by vertical drive unit 230, rotating vertical drive unit 230 about a vertical axis by rotation drive unit 240, and moving rotation drive unit 240 left-right by horizontal drive unit 250, an item grasped by hand unit 220 can be moved vertically, rotated about a vertical axis, or moved left-right.

[0055] The crane unit 200 includes a trolley sensing sensor 260 located at the front 210F of the frame 210. The trolley sensing sensor 260 may be located at the upper center of the front 210F of the frame and detects the position (direction and distance) of other transport trolleys 20 located in front. The trolley sensing sensor 260 may be implemented by a LiDAR, RADAR, or camera, etc.

[0056] On the other hand, bumper units 270 can be configured at the front 210F and rear 210R of the upper end of the crane unit 200 to reduce impact when colliding with other transport trolleys 20. The bumper unit 270 may include a front bumper unit 270F configured at the front 210F of the frame and a rear bumper unit 270R configured at the rear 210R of the frame. Additionally, a tailplate 280 is provided at the rear 210R of the frame 210. For the structure of the bumper unit 270 and the tailplate 280, refer to... Figure 4 to Figure 7 Please provide an explanation.

[0057] Figure 4 The image shows the conveyor trolley 20 as viewed from above. (See reference...) Figure 4 The frame 210 is elongated in the longitudinal direction, and forms a front bumper unit 270F at the front (F) and a rear bumper unit 270R at the rear (R). That is, the bumper unit 270 may include a front bumper unit 270F located at the front (210F) of the frame 210 and a rear bumper unit 270R located at the rear (210R) of the frame 210.

[0058] The front bumper unit 270F may include: a front bracket 271, which is attached to the front center of the frame 210 and has a forward-protruding shaft; a front cover plate 272, which is attached to both sides of the front side of the frame 210 and bends forward F; and a rubber bumper component 273, which is attached to the outer side of the front cover plate 272.

[0059] The rear bumper unit 270R may include: a rear bracket 274, which is attached to the rear center of the frame 210 and has a rearwardly projecting shaft; a rear cover plate 275, which is attached to both sides of the rear side of the frame 210 and bends rearwardly by R; and a shock-absorbing component 276, which is disposed between the rear bracket 274 and the rear cover plate 275 to generate a buffering force.

[0060] exist Figure 5 The diagram shows the front bumper unit 270F and rear bumper unit 270R before they are installed onto the frame 210. The front bracket 271 includes: bracket 271A, which connects to the front center portion of the frame 210 and bracket shaft 271B; bracket shaft 271B, extending forward F; and bracket 271C, which connects to bracket shaft 271B and front cover plate 272. The front cover plate 272 is fastened to both sides of the frame 210 and is also fixedly fastened to the front center portion of the frame 210 via the front bracket 271. A rubber bumper component 273 can be installed on the outer side of the front cover plate 272.

[0061] The rear support bracket 274 includes: a bracket 274A, which is attached to the rear center portion of the frame 210 and a bracket shaft 274B; a bracket shaft 274B extending rearward R; and a bracket 274C, which is attached to the bracket shaft 274B and a rear cover plate 275. The rear cover plate 275 is fastened to both sides of the frame 210 and is also fixedly fastened to the rear center portion of the frame 210 by the rear support bracket 274. A shock-absorbing component 276 for generating a buffering force can be inserted between the rear support bracket 274 and the rear cover plate 275.

[0062] According to the present invention, the bumper unit 270 may be formed to protrude beyond the two ends 100E of the driving unit 100. For example, see reference to Figure 6 The rear cover 275 of the rear bumper unit 270R can be formed to protrude rearward by R from the rear end 100E of the vehicle body 110 of the travel unit 100. Similarly, at the front of the transport trolley 20, the front bumper unit 270F can be similarly formed to protrude forward by F from the front end of the travel unit 100. The bumper units 270 are formed to protrude from both ends 100E of the travel unit 100, thereby preventing damage to the travel unit 100 even in the event of a collision with other transport trolleys 20.

[0063] On the other hand, a pair of tailplates 280 can be provided at the rear 210R of the frame 210. The tailplates 280 can function as reflectors, allowing them to be detected by other transport trolleys 20. If the tailplates 280 are simply located at the center of the rear 210R of the frame 210, when the transport trolleys 20 collide with each other, the trolley sensing sensor 260 located at the front of the rear transport trolley 20 may be damaged due to the tailplates 280 of the front transport trolley 20. Since the trolley sensing sensor 260 is usually expensive and difficult to supply, if the trolley sensing sensor 260 is damaged, the transport trolley 20 will be unusable for a long time, which is fatal. Therefore, it is important to prevent the trolley sensing sensor 260 from being damaged even when the transport trolleys 20 collide with each other. Therefore, according to an embodiment of the present invention, a pair of tailplates 280 can be provided on both sides so that they do not come into contact with the trolley sensing sensor 260 located on the rear transport trolley 20.

[0064] Reference Figure 6 as well as Figure 7 The tailplate 280 can be disposed below the bumper unit 270. The tailplate 280 can be disposed in such a way that it does not interfere with the location of the trolley sensing sensor 260 located in front of the rear conveyor trolley 20. The position of the tailplate 280 can be determined such that it avoids colliding with the trolley sensing sensor 260 located at the front center of the other conveyor trolley 20 when colliding with it. The tailplate 280 is configured to reflect light emitted from the trolley sensing sensor 260.

[0065] The tail plate 280 can protrude rearward to the end 270E of the bumper unit 270. The tail plate 280 protruding rearward to the end 270E of the bumper unit 270 can be configured to not be damaged even in the event of a collision with the transport trolley 20.

[0066] This embodiment and the accompanying drawings are merely illustrative representations of a portion of the technical concept contained in this invention. It is obvious that variations and specific embodiments that can be readily derived by those skilled in the art within the scope of the technical concept contained in the specification and drawings of this invention are all included within the scope of the claims of this invention.

[0067] Therefore, the concept of the present invention should not be limited to the illustrated embodiments, not only to the appended claims, but all concepts that are equivalent or modified to the claims should be included within the scope of the present invention.

Claims

1. A conveyor trolley for transporting items in a manufacturing plant, wherein, The conveying trolley includes: The traveling unit travels along the travel track; and The crane unit supports the object below the traveling unit. The crane unit includes: The frame; and A pair of tailgates are located at the rear of the vehicle frame, positioned on both sides in the horizontal direction such that both sides of the tailgates are perpendicular to the horizontal direction and protrude rearward. The tailgate protrudes rearward to the end of the bumper unit located at the rear of the vehicle frame. The tail plate is configured to reflect light emitted from a trolley sensing sensor located at the front center of other conveyor trolleys. The position of the tail plate is determined in a manner that avoids colliding with the trolley sensing sensors when it collides with other conveyor trolleys located behind it.

2. The conveying trolley according to claim 1, wherein, The tailgate is located below the bumper unit.

3. The conveying trolley according to claim 1, wherein, The tail plate is configured to reflect light emitted from the trolley sensing sensor.

4. A conveyor trolley for transporting items in a manufacturing plant, wherein, The conveying trolley includes: The traveling unit travels along the travel track; and The crane unit supports the object below the traveling unit. The crane unit includes: Frame; Bumper units are respectively located at the front and rear of the vehicle frame; and A pair of tailgates are located at the rear of the vehicle frame, positioned on both sides in the horizontal direction such that both sides of the tailgates are perpendicular to the horizontal direction and protrude rearward. The tailgate protrudes rearward to the end of the bumper unit. The tail plate is configured to reflect light emitted from a trolley sensing sensor located at the front center of other conveyor trolleys. The position of the tail plate is determined in a manner that avoids colliding with the trolley sensing sensors when it collides with other conveyor trolleys located behind it.

5. The conveying trolley according to claim 4, wherein, The bumper unit includes: A front bumper unit, located at the front of the vehicle frame; and The rear bumper unit is located at the rear of the vehicle frame.

6. The conveying trolley according to claim 5, wherein, The front bumper unit includes: The front bracket is attached to the front center of the frame and has a forward-protruding shaft; The front cover plate, which is attached to both sides of the front side of the frame, protrudes forward and curves forward; and A rubber bumper component is attached to the outside of the front cover.

7. The conveying trolley according to claim 5, wherein, The rear bumper unit includes: The rear support is attached to the rear center of the frame and has a rearwardly protruding shaft; The rear cover plate, which is attached to both sides of the rear side of the frame, protrudes rearward and curves backward; and A shock-absorbing component is disposed between the rear bracket and the rear cover plate to generate a buffering force.

8. The conveying trolley according to claim 4, wherein, The bumper unit is formed to protrude beyond the two ends of the driving unit.

9. The conveying trolley according to claim 4, wherein, The tailgate is located in the frame below the bumper unit.

10. The conveying trolley according to claim 4, wherein, The tail plate is configured to reflect light emitted from the trolley sensing sensor.

11. A material conveying system, which is a material conveying system for a manufacturing plant, wherein, The article conveying system includes: Conveyor trolleys are used to transport items; and The travel track provides the travel path for the conveyor trolley. The conveying trolley includes: The traveling unit travels along the travel track; and The crane unit supports the object below the traveling unit. The crane unit includes: Frame; Bumper units are respectively located at the front and rear of the vehicle frame; and A pair of tailgates are located at the rear of the vehicle frame, positioned on both sides in the horizontal direction such that both sides of the tailgates are perpendicular to the horizontal direction and protrude rearward. The tailgate protrudes rearward to the end of the bumper unit. The tail plate is configured to reflect light emitted from a trolley sensing sensor located at the front center of other conveyor trolleys. The position of the tail plate is determined in a manner that avoids colliding with the trolley sensing sensors when it collides with other conveyor trolleys located behind it.

12. The article conveying system according to claim 11, wherein, The bumper unit includes: A front bumper unit, located at the front of the vehicle frame; and The rear bumper unit is located at the rear of the vehicle frame.

13. The article conveying system according to claim 12, wherein, The front bumper unit includes: The front bracket is attached to the front center of the frame and has a forward-protruding shaft; The front cover plate, which is attached to both sides of the front side of the frame, protrudes rearward and bends; and A rubber bumper component is attached to the outside of the front cover.

14. The article conveying system according to claim 12, wherein, The rear bumper unit includes: The rear support is attached to the rear center of the frame and has a rearwardly protruding shaft; The rear cover plate, which is attached to both sides of the rear side of the frame, protrudes forward and curves forward; and A shock-absorbing component is disposed between the rear bracket and the rear cover plate to generate a buffering force.

15. The article conveying system according to claim 11, wherein, The tailgate is located in the frame below the bumper unit.

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