A system for manufacturing a porous copper foil by electroforming and electrolytic punching

Abstract

The application belongs to the field of porous copper foil processing, and particularly relates to a porous copper foil manufacturing system integrating electroforming and electrolytic punching. The system comprises an electroforming unit I, an electrolytic punching unit II and an electrolyte circulating unit III. The electroforming unit I comprises a copper foil guide roller, a first copper foil pressure roller, a second copper foil pressure roller and a copper foil winding roller. The copper foil is conveyed from the electroforming tank to the copper foil winding roller through the rollers. The electroforming unit I and the electrolytic punching unit II share the same power supply, realizing the integration of copper foil forming and punching. The reciprocating motion of the tool cathode and the real-time control of the power supply by the power supply control unit realize continuous electrolytic processing. The tool cathode with a suction type microstructure array realizes high localization of the array microholes. The application can realize the in-situ integration and synchronous continuous production of electroformed copper foil and jet electrolytic processing porous copper foil, and meets the demand for efficiently preparing high-quality and high-precision porous copper foil.

Description

Technical Field

[0001] This invention belongs to the field of porous copper foil processing, specifically a porous copper foil manufacturing system that integrates electroforming and electrolytic drilling. Background Technology

[0002] Copper foil, as the main material for the negative electrode current collector in lithium batteries, directly affects the performance of the lithium battery. Thin and porous copper foil can reduce the weight of lithium batteries to a certain extent and improve the adhesion to the negative electrode material, thus significantly increasing the capacity of the lithium battery.

[0003] Lightweight copper foil is one of the main criteria for selecting negative electrode current collectors in lithium batteries. Industrial copper foil can be divided into two main categories based on its manufacturing process: rolled copper foil and electrolytic copper foil. Rolled copper foil is made from copper ingots through repeated rolling. Due to limitations in its processing method, especially copper foil rolling technology, its thickness and width are subject to certain constraints. Electrolytic copper foil is prepared using electrochemical principles to dissolve copper and produce foil. Specifically, it involves preparing a copper sulfate solution by electrolyzing copper metal, and then electrodepositing copper foil in the copper sulfate solution. The thickness of this copper foil can reach below 6 μm.

[0004] To further reduce the weight of copper foil and increase its contact area, porous copper foil is prepared through subtractive processing. Common preparation methods include mechanical drilling, chemical etching, and laser drilling. Mechanical drilling (see Chinese Patent CN108748386B) easily produces burrs on the edges of the copper foil holes. Chemical etching (see Chinese Patent CN109440108B) is highly efficient, but it requires careful consideration of mask application and removal, as well as the tightness of the copper foil against the mask, making the process difficult and posing a risk of copper foil tearing. Furthermore, its acidic etching solution can cause environmental pollution. Laser drilling (see Chinese Patent CN108044242A) causes oxidation at the edges of the copper foil holes, increasing the resistivity of the porous copper foil and affecting the performance of lithium batteries. In addition, mechanical drilling, chemical etching, and laser drilling are all done on pre-produced copper foil rolls. The copper foil rolls need to be disassembled and reassembled before drilling can be performed, making it difficult to integrate copper foil forming and drilling. In particular, mechanical drilling and laser drilling require the copper foil to be in a static state during processing, making it difficult to achieve continuous production of porous copper foil, and production efficiency needs to be improved.

[0005] To address the aforementioned issues, a recently published Chinese patent (CN114686961B) proposes a multi-hole copper foil manufacturing system and method integrating electroforming and drilling. This patent enables simultaneous electroforming of copper foil and micro-hole processing via mask electrolysis, significantly improving the production efficiency of multi-hole copper foil. However, this method suffers from several drawbacks: the processing time for electrolysis is difficult to maintain, and the processing accuracy of through holes needs improvement; secondly, the mask electrolysis process is complex, requiring solutions to mask and copper foil misalignment and easy tearing of the copper foil, while ensuring a tight fit between the mask and copper foil.

[0006] To this end, the present invention proposes a multi-porous copper foil manufacturing system that integrates electroforming and electrolytic drilling, realizing simultaneous and continuous in-situ production of electroformed copper foil and jet electrolytic processing of multi-porous copper foil, thus meeting the demand for efficient preparation of high-quality and high-precision multi-porous copper foil. Summary of the Invention

[0007] The purpose of this invention is to propose a multi-porous copper foil manufacturing system that integrates electroforming and electrolytic drilling, so as to realize the simultaneous and continuous production of foil production and drilling processes, and to efficiently prepare high-quality and high-precision multi-porous copper foil.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows.

[0009] A porous copper foil manufacturing system integrating electroforming and electrolytic drilling includes an electroforming unit I consisting of a power supply, copper foil, electroforming tank, electroforming cathode roller, and copper foil tension roller; and an electrolyte circulation unit III consisting of an electrolyte circulation tank, electrolyte, hydraulic pump, overflow valve, and filter plate. The system is characterized by further including an electrolytic drilling unit II. The electrolytic drilling unit II includes a copper foil guide roller, a first copper foil pressure roller, a second copper foil pressure roller, a copper foil winding roller, an electrolytic tank, a power supply, an electrical control unit, and a tool cathode. The tool cathodes, from left to right, are tool cathode 1, tool cathode 2, tool cathode 3, and tool cathode 4. Tool cathode 1 includes a handle and a tool body. The handle has a first solution channel. The tool body includes a second solution channel, a buffer chamber, a partition plate, a flow stabilizing chamber, an outlet chamber, an outlet channel, an array of through holes, an array of microchannels, and an array of suction holes. The second solution channel is connected to the first solution channel and is located above the bottom of the buffer chamber, with its rear sidewall connected to the partition plate. The partition separates the buffer chamber and the flow stabilizing chamber; the liquid outlet chamber is located directly below the buffer chamber and the flow stabilizing chamber and is connected to the liquid outlet channel; the liquid outlet channels are arranged at equal intervals on the front wall of the No. 1 tool cathode; the array of through holes is arranged at equal intervals at the bottom of the flow stabilizing chamber and is coaxial with the array of suction holes arranged at equal intervals at the bottom of the liquid outlet chamber; the array of microchannels is coaxially connected to the array of through holes and extends through the array of suction holes to the bottom end face of the No. 1 tool cathode; the electroforming tank and the electroforming cathode roller are electrically... The copper foil is connected to the positive terminal of the power supply and the grounding wire, wherein the absolute potential difference between the positive terminal and the grounding wire is the electroforming voltage value; the tool cathodes are all electrically connected to the negative terminal of the power supply, and the power application control unit is connected to the negative terminal of the power supply, wherein the absolute potential difference between the grounding wire and the negative terminal is the electrolysis voltage value; the electroforming cathode roller and the copper foil take-up roller can be controlled to rotate, and they rotate in the same direction; the copper foil, in a taut state, passes sequentially through the copper foil tension roller, the copper foil guide roller, the first copper foil pressure roller, and the second copper foil pressure roller before being wound onto the copper foil take-up roller.

[0010] The copper foil guide roller and copper foil winding roller are symmetrically installed on the outside of the electrolytic cell and positioned above the electrolytic cell.

[0011] The first copper foil pressure roller and the second copper foil pressure roller are symmetrically installed inside the electrolytic cell and positioned above the electrolytic cell.

[0012] The No. 1 and No. 4 tool cathodes have the same geometry, and the No. 2 and No. 3 tool cathodes have the same geometry. The array of suction holes of the No. 2 tool cathode is offset by a certain distance relative to the array of suction holes of the No. 1 tool cathode towards the right side wall of the No. 1 tool cathode. The offset distance is half of the center spacing of the array of suction holes of the No. 1 tool cathode.

[0013] The cathodes of the aforementioned tools are all made of acid and alkali resistant metal materials, and their outer surfaces are all coated with a uniform insulating varnish layer.

[0014] The diameter and center-to-center spacing of the array vias are 0.1–0.2 mm and 1.5–2.5 mm, respectively.

[0015] The diameter and center-to-center spacing of the array microchannels are the same as the diameter and center-to-center spacing of the array through-holes, and the wall thickness of the microchannels is 0.05mm to 0.08mm.

[0016] The diameter of the array of liquid suction holes is 0.3 to 0.5 mm, and the center-to-center spacing is the same as the center-to-center spacing of the array of through holes.

[0017] A processing method for a porous copper foil manufacturing system integrating electroforming and electrolytic drilling, the method using the porous copper foil manufacturing system integrating electroforming and electrolytic drilling as described in the claims, characterized in that it includes the following steps performed in sequence:

[0018] S1. Electrically connect the electroforming tank and the electroforming cathode roller to the positive terminal of the power supply and the grounding wire, respectively. Electrically connect the tool cathode to the negative terminal of the power supply and connect the power application control unit to the negative terminal of the power supply. Adjust the power supply so that the electroforming voltage value and the electrolysis voltage value are both fixed values, and turn on the power supply.

[0019] S2. Adjust the spatial positions of the copper foil tension roller, copper foil guide roller, first copper foil pressure roller, and second copper foil pressure roller so that the copper foil prepared by the electroforming molding unit I passes through the copper foil tension roller, copper foil guide roller, first copper foil pressure roller, and second copper foil pressure roller in sequence under tension, and finally is wound onto the copper foil take-up roller.

[0020] S3. Arrange the tool cathodes horizontally and evenly in sequence, and ensure they are in the same operating state; place tool cathode No. 1 vertically above the copper foil in a symmetrical manner, with a distance of 0.1 to 0.3 mm between them and the copper foil;

[0021] S4. Start the hydraulic pump and overflow valve to drive the electrolyte from the first solution channel into tool cathode No. 1, through the second solution channel, buffer chamber, and flow stabilizing chamber, and then through the array through holes and array microchannels to be sprayed evenly onto the copper foil at a certain speed; the electrolyte then enters the outlet chamber through the array suction holes, flows out of tool cathode No. 1 through the outlet channel and then flows into the electrolytic cell, and then flows back to the electrolyte circulation tank with filter baffles;

[0022] S5. Adjust the rotation speed of the electroforming cathode roller and the copper foil take-up roller to ensure that the copper foil is stably transported at a fixed linear velocity VEF;

[0023] S6. Start the power application control unit. At the same time, tool cathode 1 moves along the trajectory at the same speed VEF as the copper foil. When tool cathode 1 moves from position E to position F, the power application control unit immediately shuts down automatically. Then, tool cathode 1 moves along the trajectory at the opposite speed VFE to the copper foil, from position F to position E. The copper foil is processed sequentially by tool cathode 1, tool cathode 2, tool cathode 3, and tool cathode 4 into a first-processed copper foil, a second-processed copper foil, a third-processed copper foil, and finally a porous copper foil with uniform through-hole distribution.

[0024] The cathode of tool S7.1 remains stationary at position E for a period of time to prepare for subsequent processing and ensure that the spacing of the through-hole structure of the copper foil processed in one go is consistent.

[0025] S8. Repeat steps S6 and S7 to obtain a high-quality, high-precision porous copper foil with through-hole distribution; after processing, turn off the power supply, hydraulic pump and relief valve.

[0026] The main advantages of this invention compared to the prior art are as follows.

[0027] (1) This invention enables simultaneous in-situ integrated production of electroformed copper foil and jet electrolytically processed porous copper foil, achieving seamless in-situ integration of foil forming and perforation processes. This patent achieves this by electrically connecting the electroforming tank and the electroforming cathode roller to the positive terminal and grounding wire of the power supply, respectively, and electrically connecting the tool cathode to the negative terminal of the power supply, thus giving the electroforming tank a positive potential, the copper foil a zero potential, and the tool cathode a negative potential. This enables the electroformed copper foil and jet electrolytically processed porous copper foil to share the same power supply for production and processing, thereby achieving simultaneous in-situ integrated production of copper foil forming and perforation. This solves the bottleneck problem in the industry, avoids the cumbersome process of disassembling and reinstalling the copper foil roll before perforation in the prior art, and achieves seamless in-situ integration of foil forming and perforation processes. It significantly reduces the risk of tearing of ultra-thin copper foil, and eliminates the need for reinstallation, making the operation simpler and more time-saving.

[0028] (2) This device enables simultaneous and continuous production of electroformed copper foil and jet electrolytically processed porous copper foil, significantly improving production efficiency and reducing production costs. The tool cathodes of this device employ reciprocating motion, coupled with real-time power supply control from the power application control unit, ensuring stable and continuous copper foil transport during electrolytic processing. This allows for continuous production of jet electrolytically processed porous copper foil, solving the problem of the copper foil needing to remain stationary during perforation and improving the production efficiency of porous copper foil. Multiple tool cathodes work together to achieve a jet electrolytic processing speed equal to the electroformed copper foil production speed, thereby synchronizing the electroformed copper foil and jet electrolytically processed porous copper foil production lines, significantly improving production efficiency and reducing production costs.

[0029] (3) It can produce high-quality, high-precision porous copper foil without deformation. Electrolytic machining is a special energy field processing technology based on the principle of anodic electrochemical dissolution. It has the advantages of machinability being independent of the mechanical properties of the material, fast material removal speed, no tool wear, no recast layer or stress on the processed surface, no deformation, and no burrs. Therefore, this device can produce high-quality porous copper foil without burrs and deformation using jet electrolytic machining technology. In addition, this device proposes a suction-type tool cathode for micropore arrays. The electrolyte is pushed to the copper foil through the array through holes and array microchannels of the tool cathode, and then sucked into the tool cathode through the array suction holes. This restricts the flow range of the electrolyte, solves the problems of flow field and electric field disturbance and stray corrosion caused during the micropore array process, and improves the forming localization and processing accuracy of the array micropores. Therefore, this device can produce high-precision porous copper foil. Attached Figure Description

[0030] Figure 1 Diagram of a multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling;

[0031] Figure 2 This is a schematic diagram of the tool cathode body;

[0032] Figure 3 This is a cross-sectional view of the center plane of the tool cathode;

[0033] Figure 4 This is a left-side cross-sectional view of the tool cathode;

[0034] Figure 5 This is a bottom view of the cathode of tool number 1;

[0035] Figure 6 This is a bottom view of the cathode of tool number 2;

[0036] Figure 7 This is a schematic diagram of a porous copper foil.

[0037] Numbers and names in the diagram: 1. Electroforming tank; 2. Electroforming cathode roller; 3. Copper foil tension roller; 4. Copper foil guide roller; 5. First copper foil pressure roller; 6. Second copper foil pressure roller; 7. Copper foil winding roller; 8. Electrolytic cell; 9. Electrolyte circulation tank; 10. Electrolyte; 11. Hydraulic pump; 12. Overflow valve; 13. Filter plate; 14. Copper foil; 15. Power supply; 16. Power application control unit; 17. Tool cathode No. 1; 17-1. Tool holder; 17-101. 17-2 Solution channel; 17-201 Tool body; 17-202 Second solution channel; 17-203 Buffer chamber; 17-204 Partition; 17-205 Flow stabilizing chamber; 17-206 Liquid outlet chamber; 17-207 Liquid outlet channel; 17-208 Array of through holes; 17-209 Array of microchannels; 18 Tool cathode No. 2; 19 Tool cathode No. 3; 20 Tool cathode No. 4; 21 Trajectory. Detailed Implementation

[0038] The following will provide a further explanation in conjunction with the accompanying drawings of the present invention.

[0039] A porous copper foil manufacturing system for electroforming and electrolytic drilling includes an electroforming unit I consisting of a power supply 15, copper foil 14, an electroforming tank 1, an electroforming cathode roller 2, and a copper foil tension roller 3; an electrolyte circulation unit III consisting of an electrolyte circulation tank 9, an electrolyte 10, a hydraulic pump 11, an overflow valve 12, and a filter plate 13; and an electrolytic drilling unit II. The electrolytic drilling unit II includes a copper foil guide roller 4, a first copper foil pressure roller 5, a second copper foil pressure roller 6, a copper foil winding roller 7, an electrolytic tank 8, a power supply 15, an electrical control unit 16, and tool cathodes 17, 18, 19, and 20. The tool cathodes 17, 18, 19, and 20 are all made of 1Cr1 alloy. Made of 8Ni9Ti, with a wall thickness of 1mm and a 1mm thicker bottom wall, all surfaces are coated with a uniform insulating varnish layer; the No. 1 tool cathode 17 includes a handle 17-1 and a tool body 17-2; the handle 17-1 has a first solution channel 17-101 with a length and width of 10mm × 8mm; the tool body 17-2 includes a second solution channel 17-201, a buffer chamber 17-202, a partition 17-203, a flow stabilizing chamber 17-204, a liquid outlet chamber 17-205, a liquid outlet channel 17-206, an array of through holes 17-207, an array of microchannels 17-208, and an array of suction holes 17-209, and its main structure is 200mm × 10mm × 22mm in length, width, and height. The first solution channel 17-101 is rectangular; the second solution channel 17-201 has a length and width of 10mm × 3mm, connects to the first solution channel 17-101, and is located 4mm above the bottom end of the buffer chamber 17-202. Its rear sidewall overlaps with the partition 17-203. The partition 17-203, with a length, width, and thickness of 198mm × 8mm × 1mm, separates the buffer chamber 17-202 and the flow stabilizing chamber 17-204. The outlet chamber 17-205 is located directly below the buffer chamber 17-202 and the flow stabilizing chamber 17-204, and is connected to the outlet channel 17-206. The outlet channel 17-206 is a square channel with a length and width of 5mm × 2mm, and is equidistantly arrayed at 32mm intervals on the front wall of the cathode of tool No. 1. The wall coincides with the bottom end of the flow stabilizing cavity 17-204; the bottom end of the flow stabilizing cavity 17-204 is provided with an array of through holes 17-207 with a diameter of 0.2 mm and a center-to-center distance of 1.8 mm; the bottom end of the liquid outlet cavity 17-205 is provided with an array of suction holes 17-209 with a diameter of 0.4 mm and a center-to-center distance of 1.8 mm, coaxial with the array through holes 17-207; the array of microchannels 17-208 with a diameter of 0.2 mm and a center-to-center distance of 1.8 mm is coaxially connected to the array through holes 17-207 and extends through the array suction holes 17-209 to the bottom end face of the No. 1 tool cathode 17; wherein the array of microchannels 17-208 is 8 mm long and the wall thickness of the microchannel is 0.05 mm.

[0040] Tool cathode 17 and tool cathode 20 have the same geometry, tool cathode 28 and tool cathode 3 have the same geometry, and the array of suction holes 18-209 of tool cathode 2 is offset by 0.9 mm relative to the array of suction holes 17-209 of tool cathode 17 towards the right side wall of tool cathode 17.

[0041] Electroforming tank 1 and electroforming cathode roller 2 are electrically connected to the positive terminal and grounding wire of power supply 15, respectively, wherein the absolute potential difference between the positive terminal and the grounding wire is the electroforming voltage value; tool cathodes 17, 18, 19 and 20 are all electrically connected to the negative terminal of power supply 15, and the power application control unit 16 is connected to the negative terminal of power supply 15, wherein the absolute potential difference between the grounding wire and the negative terminal is the electrolysis voltage value.

[0042] A copper foil 14, 200 mm wide and 0.01 mm thick, is wound onto a copper foil take-up roller 7 after being tensioned from an electroforming cathode roller 2, passing sequentially through a copper foil tension roller 3, a copper foil guide roller 4, a first copper foil pressure roller 5, and a second copper foil pressure roller 6. The diameters of the copper foil tension roller 3, copper foil guide roller 4, first copper foil pressure roller 5, second copper foil pressure roller 6, and copper foil take-up roller 7 are all 80 mm, and their lengths are all 220 mm. Both the electroforming cathode roller 2 and the copper foil take-up roller 7 can be controlled to rotate, and they rotate in the same direction. The copper foil guide roller 4 and copper foil take-up roller 7 are symmetrically arranged on the outside of the electrolytic cell 8 and positioned above it. The first copper foil pressure roller 5 and the second copper foil pressure roller 6 are symmetrically arranged on the inside of the electrolytic cell 8 and positioned above it.

[0043] Electrolyte 10 uses a 10wt% NaNO3 solution (temperature 25±2℃).

[0044] The specific processing steps of the porous copper foil manufacturing system for electroforming and electrolytic drilling according to the technical solution of this invention are as follows.

[0045] S1. Electrically connect the electroforming tank 1 and the electroforming cathode roller 2 to the positive terminal and ground wire of the power supply 15, respectively; electrically connect the tool cathode 8 to the negative terminal of the power supply 17, and electrically connect tool cathodes 17, 18, 19, and 20 to the negative terminal of the power supply 15; connect the power application control unit 16 to the negative terminal of the power supply 15; adjust the power supply 15 so that the electroforming voltage is 10V and the electrolysis voltage is 20V, and turn on the power supply 15.

[0046] S2. Adjust the spatial positions of copper foil tension roller 3, copper foil guide roller 4, first copper foil pressure roller 5, and second copper foil pressure roller 6 so that the copper foil 14 prepared by electroforming molding unit I passes through the copper foil tension roller 3, copper foil guide roller 4, first copper foil pressure roller 5, and second copper foil pressure roller 6 in a tensioned state, and finally winds it onto the copper foil winding roller 7.

[0047] S3. Arrange tool cathodes 17, 18, 19, and 20 horizontally and equidistantly at intervals of 18.9 mm, and ensure they are in the same operating state; place tool cathode 17 vertically above copper foil 14 in a symmetrical manner, 0.15 mm away from copper foil 14.

[0048] S4. Start the hydraulic pump 11 and overflow valve 12 to drive the electrolyte 10 from the first solution channel 17-101 into the No. 1 tool cathode 17. After passing through the second solution channel 17-201, buffer chamber 17-202, and flow stabilizing chamber 17-204, it passes through the array through hole 17-207 and array micro channel 17-208 and is uniformly sprayed onto the copper foil 14 at a speed of 8m / s. The electrolyte 10 then enters the outlet chamber 17-205 through the array suction hole 17-209, flows out of the No. 1 tool cathode 17 through the outlet channel 17-206 and then flows into the electrolytic cell 8. Finally, it flows back into the electrolyte circulation tank 9 with filter baffle 13.

[0049] S5. Adjust the rotation speed of the electroforming cathode roller 2 and the copper foil winding roller 7 so that the copper foil 14 is stably transmitted at a linear speed of 0.1 mm / s;

[0050] S6. Start the power application control unit 16. At the same time, tool cathode 17 moves along trajectory 21 at a speed of 0.1 mm / s in the same direction as copper foil 14. After 5 seconds, tool cathode 17 moves from position E to position F, and power application control unit 16 immediately shuts down automatically. Then, tool cathode 17 moves along trajectory 21 at a speed of 0.02 mm / s in the opposite direction to copper foil 14, from position F to position E. Copper foil 14 is processed sequentially by tool cathode 17, tool cathode 18, tool cathode 19, and tool cathode 20 into primary processed copper foil 14-1, secondary processed copper foil 14-2, tertiary processed copper foil 14-3, and finally, a porous copper foil 14-4 with uniform through-hole distribution is obtained.

[0051] The cathode 17 of tool S7.1 remains stationary at position E for 6 seconds to prepare for subsequent processing, ensuring that the center spacing of the through holes in the copper foil 14-1 array is 1.8 mm in a single processing.

[0052] S8. Repeat steps S6 and S7 to obtain a high-quality, high-precision porous copper foil 14-4 with through-hole distribution; after processing, turn off the power supply 15, hydraulic pump 11 and overflow valve 12.

Claims

1. A porous copper foil manufacturing system integrating electroforming and electrolytic perforation, comprising an electroforming forming unit (Ⅰ) consisting of a power source (15), copper foil (14), an electroforming tank (1), an electroforming cathode roller (2), and a copper foil tension roller (3), and an electrolyte circulation unit (Ⅲ) consisting of an electrolyte circulation tank (9), electrolyte (10), a hydraulic pump (11), an overflow valve (12), and a filter plate (13), characterized in that: It also includes an electrolytic drilling unit (II); the electrolytic drilling unit (II) includes a copper foil guide roller (4), a first copper foil pressure roller (5), a second copper foil pressure roller (6), a copper foil winding roller (7), an electrolytic cell (8), a power supply (15), an electrical control unit (16), and tool cathodes (17, 18, 19, 20); the tool cathodes (17, 18, 19, 20) are, from left to right, tool cathode 1 (17), tool cathode 2 (18), tool cathode 3 (19), and tool cathode 4 (20); the tool cathode 1 (17) includes a handle (17-1) and a tool body (17-2); the handle (17-1) is provided with a first solution channel (17-1). 01); The tool body (17-2) includes a second solution channel (17-201), a buffer chamber (17-202), a partition (17-203), a flow stabilizing chamber (17-204), a liquid outlet chamber (17-205), a liquid outlet channel (17-206), an array of through holes (17-207), an array of microchannels (17-208), and an array of suction holes (17-209); The second solution channel (17-201) is connected to the first solution channel (17-101) and is located above the bottom end of the buffer chamber (17-202), with its rear sidewall overlapping the partition (17-203); The partition (17-203) connects the buffer chamber (17-202) and the flow stabilizing chamber (17-204). 4) Separated; the liquid outlet chamber (17-205) is located directly below the buffer chamber (17-202) and the flow stabilizing chamber (17-204), and is connected to the liquid outlet channel (17-206); the liquid outlet channels (17-206) are arranged at equal intervals on the front wall of the No. 1 tool cathode; the array through holes (17-207) are arranged at equal intervals at the bottom end of the flow stabilizing chamber (17-204), and are coaxial with the array suction holes (17-209) arranged at equal intervals at the bottom end of the liquid outlet chamber (17-205); the array microchannels (17-208) are coaxially connected to the array through holes (17-207), and extend through the array suction holes (17-209) to the bottom end face of the No. 1 tool cathode (17); The electroforming tank (1) and the electroforming cathode roller (2) are electrically connected to the positive terminal and the grounding wire of the power supply (15), respectively, wherein the absolute potential difference between the positive terminal and the grounding wire is the electroforming voltage value; the tool cathodes (17, 18, 19, 20) are all electrically connected to the negative terminal of the power supply (15), and the power application control unit (16) is connected to the negative terminal of the power supply (15), wherein the absolute potential difference between the grounding wire and the negative terminal is the electrolysis voltage value; the electroforming cathode roller (2) and the copper foil winding roller (7) can be rotated controllably, and they have the same direction of rotation; the copper foil (14) is wound onto the copper foil winding roller (7) in a tensioned state after passing through the copper foil tension roller (3), the copper foil guide roller (4), the first copper foil pressure roller (5), and the second copper foil pressure roller (6).

2. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The copper foil guide roller (4) and copper foil winding roller (7) are symmetrically arranged on the outside of the electrolytic cell (8) and placed above the electrolytic cell (8).

3. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The first copper foil pressure roller (5) and the second copper foil pressure roller (6) are symmetrically arranged inside the electrolytic cell (8) and positioned above the electrolytic cell (8).

4. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The No. 1 tool cathode (17) and the No. 4 tool cathode (20) have the same geometry, and the No. 2 tool cathode (18) and the No. 3 tool cathode (19) have the same geometry. The array of suction holes (18-209) of the No. 2 tool cathode (18) is offset by a certain distance relative to the array of suction holes (17-209) of the No. 1 tool cathode (17) towards the right side wall of the No. 1 tool cathode (17). The offset distance is half of the center distance between the array of suction holes (17-209) of the No. 1 tool cathode (17).

5. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The tool cathodes (17, 18, 19, 20) are all made of acid and alkali resistant metal materials, and their outer surfaces are all coated with a uniform insulating varnish layer.

6. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The diameter and center-to-center spacing of the array vias (17-207) are 0.1-0.2 mm and 1.5-2.5 mm, respectively.

7. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The diameter and center-to-center spacing of the array microchannels (17-208) are the same as those of the array through-holes (17-207), and the wall thickness of the microchannels is 0.05mm to 0.08mm.

8. The multi-hole copper foil manufacturing system integrating electroforming and electrolytic drilling according to claim 1, characterized in that: The diameter of the array of liquid suction holes (17-209) is 0.3-0.5 mm, and the center-to-center spacing is the same as that of the array of through holes (17-207).

9. A processing method for a porous copper foil manufacturing system integrating electroforming and electrolytic drilling, wherein the method uses the porous copper foil manufacturing system integrating electroforming and electrolytic drilling as described in any one of claims 1 to 8, characterized in that: It includes the following steps executed in sequence: S1. Connect the electroforming tank (1) and the electroforming cathode roller (2) to the positive terminal and grounding wire of the power supply (15) respectively. Connect the tool cathodes (17, 18, 19, 20) to the negative terminal of the power supply (15) and connect the power application control unit (16) to the negative terminal of the power supply (15). Adjust the power supply (15) so that the electroforming voltage value and the electrolysis voltage value are fixed values, and turn on the power supply (15). S2. Adjust the spatial positions of the copper foil tension roller (3), copper foil guide roller (4), first copper foil pressure roller (5), and second copper foil pressure roller (6) so that the copper foil (14) prepared by the electroforming unit (Ⅰ) passes through the copper foil tension roller (3), copper foil guide roller (4), first copper foil pressure roller (5), and second copper foil pressure roller (6) in a tensioned state, and finally winds it onto the copper foil take-up roller (7). S3. Arrange the tool cathodes (17, 18, 19, 20) horizontally and equidistantly in a consistent operating state; place tool cathode No. 1 (17) vertically above copper foil (14) in a symmetrical manner, with a distance of 0.1 to 0.3 mm from copper foil (14). S4. Start the hydraulic pump (11) and overflow valve (12) to drive the electrolyte (10) from the first solution channel (17-101) into the No. 1 tool cathode (17), and after passing through the second solution channel (17-201), buffer chamber (17-202), and flow stabilizing chamber (17-204), it passes through the array through hole (17-207) and array micro channel (17-208) and is sprayed evenly onto the copper foil (14) at a certain speed; the electrolyte (10) then enters the liquid outlet chamber (17-205) through the array suction hole (17-209), flows out of the No. 1 tool cathode (17) through the liquid outlet channel (17-206) and then flows into the electrolytic cell (8), and then flows back to the electrolyte circulation tank (9) with filter baffle (13); S5. Adjust the rotation speed of the electroforming cathode roller (2) and the copper foil winding roller (7) so that the copper foil (14) moves at a fixed linear speed V. EF Stable transmission; S6. Activate the power application control unit (16), and simultaneously, tool cathode (17) moves along trajectory (21) at the same speed V as the copper foil (14). EF Movement; when tool cathode 1 (17) moves from position E to position F, the power control unit (16) immediately shuts off automatically; then, tool cathode 1 (17) moves along trajectory (21) at a speed V opposite to that of copper foil (14). FE The copper foil (14) moves from position F to position E; the copper foil (14) is processed sequentially by tool cathodes 1 (17), 2 (18), 3 (19), and 4 (20) into a first-processed copper foil (14-1), a second-processed copper foil (14-2), a third-processed copper foil (14-3), and finally a porous copper foil (14-4) with uniform through-hole distribution. The S7.1 tool cathode (17) remains stationary at position E for a period of time to prepare for subsequent processing, ensuring that the through-hole spacing of the copper foil (14-1) processed in one operation is consistent. S8. Repeat steps S6 and S7 to obtain a high-quality, high-precision porous copper foil (14-4) with through-hole distribution; after processing, turn off the power supply (15), hydraulic pump (11) and overflow valve (12).

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