Parallelism testing system and parallelism testing method thereof

Abstract

This application provides a parallelism testing system and method for eliminating the influence of overlapping light spots in an autocollimator, relating to the field of optical testing technology. The parallelism testing system includes: an autocollimator; at least two test planes to reflect light emitted from the autocollimator back to the autocollimator; and an optical path converter capable of being attached to the two test planes respectively to change the position of the light spots reflected back to the autocollimator from the two test planes. By comparing the position information of the light spots on the autocollimator before and after attaching the optical path converter, the parallelism between the two test planes can be determined, solving the technical defect that partial overlap of the crosshair spots makes it impossible to identify the parallelism value, and improving the range and accuracy of the parallelism test.

Description

Technical Field

[0001] This application relates to the field of optical testing technology, specifically to a parallelism testing system and a parallelism testing method thereof. Background Technology

[0002] When measuring the parallelism of two lenses using an autocollimator, the parallelism is determined by measuring the positional deviation of two crosshair spots. However, because the crosshair spots themselves have width, when they partially overlap (meaning the two lenses are not actually parallel), the autocollimator will not register a reading and cannot identify the parallelism at that point. While autocollimators can be used to test the parallelism of double-sided reflective plates, even when the parallelism is close, the effect of overlapping crosshair spots cannot be eliminated, thus affecting the test range and accuracy, and failing to meet the expected parallelism testing requirements. Summary of the Invention

[0003] In view of this, the embodiments of this specification provide a parallelism testing system and a parallelism testing method, which solves the technical defect that makes it impossible to identify parallelism values ​​due to partial overlap of crosshair spots, and improves the range and accuracy of parallelism testing.

[0004] The embodiments in this specification provide the following technical solutions:

[0005] On the one hand, a parallelism testing system is provided, including:

[0006] Autocollimator;

[0007] At least two planes to be measured, so as to reflect the light emitted by the autocollimator back to the autocollimator;

[0008] The optical path conversion component can be respectively attached to the two test planes to change the position of the light spot reflected back to the autocollimator from the two test planes; wherein

[0009] By comparing the position information of the light spot on the autocollimator before and after attaching the optical path conversion component, the parallelism between the two planes to be measured can be obtained.

[0010] In some embodiments, the optical path conversion element includes a wedge plate;

[0011] The wedge plate includes two opposing first surfaces and a second surface, wherein the second surface is inclined relative to the first surface; wherein

[0012] The first surface can be respectively attached to the two planes to be tested, and the second surface is provided with a reflective film.

[0013] In some embodiments, the two test planes include a first test plane and a second test plane; wherein

[0014] Both the first and second planes to be measured are oriented towards the autocollimator; or

[0015] The first plane to be measured is positioned facing the autocollimator, and the second plane to be measured is positioned away from the autocollimator.

[0016] In some embodiments, when both the first plane to be tested and the second plane to be tested are oriented toward the autocollimator, the parallelism testing system further includes a first lens and a second lens;

[0017] The first test plane is a surface of the first lens, and the second test plane is a surface of the second lens.

[0018] In some embodiments, the parallelism testing system further includes a light-blocking element disposed between the first lens and the second lens.

[0019] In some embodiments, when the first plane to be tested is positioned toward the autocollimator and the second plane to be tested is positioned away from the autocollimator, the parallelism testing system further includes a double-sided reflector.

[0020] The first test plane and the second test plane are two opposite surfaces of the double-sided mirror.

[0021] In some embodiments, the parallelism testing system further includes an optical path adjustment component capable of redirecting and displacing the optical path.

[0022] In some embodiments, the optical path adjustment element includes a corner prism.

[0023] On the other hand, a parallelism testing method for a parallelism testing system is provided, including the following steps:

[0024] The angle deviation information of the test plane before and after the optical path conversion component is attached is recorded by an autocollimator, and the difference between the angle deviation information of the test plane before and after the optical path conversion component is attached is obtained to obtain the calibration angle deviation information of the optical path conversion component.

[0025] The autocollimator is simultaneously aligned with the two planes to be measured, and the optical path converter is attached to the plane to be measured that is farther away from the autocollimator. The autocollimator records the parallelism information between the plane to be measured that is closer to the autocollimator and the optical path converter. Then, the difference between the parallelism information and the calibration angle deviation information is taken to obtain the parallelism information between the two planes to be measured.

[0026] In some embodiments, the following steps are included:

[0027] Orient the first test plane of the first lens toward the autocollimator, adjust the angle of the autocollimator so that the position of the light spot reflected back from the first test plane onto the autocollimator is located at the center of the field of view of the autocollimator, and record the angle deviation information of the first test plane on the autocollimator at this time.

[0028] The optical path conversion component is attached to the first test plane, and the angle deviation information of the optical path conversion component on the autocollimator is recorded. The difference between the angle deviation information of the optical path conversion component and the angle deviation information of the first test plane is taken to obtain the calibration angle deviation information of the optical path conversion component.

[0029] Place the second lens between the first lens and the autocollimator, and make the second plane to be measured of the second lens face the autocollimator. Record the parallelism information between the second plane to be measured and the optical path conversion device on the autocollimator at this time. Take the difference between the parallelism information and the calibration angle deviation information of the optical path conversion device to obtain the parallelism information between the first plane to be measured and the second plane to be measured.

[0030] In some embodiments, the method includes the following steps:

[0031] The first test plane of the first lens and the second test plane of the second lens are respectively directed toward the autocollimator, and a light-blocking device is placed between the first lens and the second lens, so that the position of the light spot reflected back to the autocollimator from the first test plane is located at the center of the field of view of the autocollimator. The angular deviation information of the first test plane on the autocollimator at this time is recorded.

[0032] Remove the light-blocking component, attach the optical path conversion component to the first test plane, record the angle deviation information of the optical path conversion component on the autocollimator at this time, and take the difference between the angle deviation information of the optical path conversion component and the angle deviation information of the first test plane to obtain the calibration angle deviation information of the optical path conversion component.

[0033] The optical path conversion component is attached to the second test plane, and the parallelism information between the first test plane and the optical path conversion component on the autocollimator is recorded. The difference between the parallelism information and the calibration angle deviation information of the optical path conversion component is taken to obtain the parallelism information between the first test plane and the second test plane.

[0034] On the other hand, a parallelism testing method for a parallelism testing system is provided, including the following steps:

[0035] The angular deviation information of the optical path conversion component before and after the plane to be tested is attached to the optical path conversion component is recorded by an autocollimator. The difference between the angular deviation information of the plane to be tested before and after the optical path conversion component is attached is taken to obtain the calibration angular deviation information of the optical path conversion component.

[0036] The autocollimator is aligned with the two planes to be measured, and the optical path converter is attached to the plane to be measured closer to the autocollimator. The autocollimator records the parallelism information between the plane to be measured closer to the autocollimator and the optical path converter. Then, the difference between the parallelism information and the calibration angle deviation information is taken to obtain the parallelism information between the two planes to be measured.

[0037] In some embodiments, the method includes the following steps:

[0038] Adjust the optical path adjustment component so that the position of the reflected crosshair spot is located at the center of the field of view of the autocollimator;

[0039] The first plane to be tested is positioned with its back to the autocollimator and its direction towards the optical path adjustment component, and the second plane to be tested is positioned with its direction towards the autocollimator and its back to the optical path adjustment component, such that the positions of the reflected crosshair spots of the first plane to be tested and the second plane to be tested are located at the center of the field of view of the autocollimator.

[0040] The optical path conversion component is attached to the second surface to be tested, and the first parallelism information between the first plane to be tested and the optical path conversion component on the autocollimator is recorded at this time.

[0041] The orientation is adjusted so that the first plane to be measured faces the autocollimator and is away from the optical path adjustment component, while the second plane to be measured is away from the autocollimator and faces the optical path adjustment component. The second parallelism information between the second plane to be measured and the optical path adjustment component on the autocollimator is recorded at this time. The difference between the second parallelism information and the first parallelism information is taken and averaged to obtain the parallelism information between the two planes to be measured.

[0042] In some embodiments, the method includes the following steps:

[0043] Adjust the optical path adjustment component so that the position of the reflected crosshair spot is located at the center of the field of view of the autocollimator;

[0044] The first plane to be tested is positioned with its back to the autocollimator and its direction towards the optical path adjustment component, and the second plane to be tested is positioned with its direction towards the autocollimator and its back to the optical path adjustment component, such that the positions of the reflected crosshair spots of the first plane to be tested and the second plane to be tested are located at the center of the field of view of the autocollimator.

[0045] The optical path conversion component is attached to the second surface to be tested, and the first parallelism information between the first plane to be tested and the optical path conversion component on the autocollimator is recorded at this time.

[0046] Remove the optical path adjustment component, record the second parallelism information between the first plane to be measured and the optical path conversion component on the autocollimator at this time, and average the difference between the second parallelism information and the first parallelism information to obtain the parallelism information between the two planes to be measured.

[0047] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:

[0048] By placing a wedge plate on the lens under test during the testing process, the two crosshair spots on the autocollimator are separated in space by the wedge plate, thereby eliminating the influence of overlapping crosshair spots and obtaining accurate parallelism test results. This avoids the technical defect of previous testing methods where the crosshair spots partially overlapped, making it impossible to identify the parallelism value. It is applicable to both parallelism measurement scenarios between two plates and precise parallelism testing of double-sided reflective plates, ultimately improving the range and accuracy of parallelism testing. Attached Figure Description

[0049] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1 This is a process demonstration diagram of the parallelism testing system and testing method provided in Embodiment 1 of this application;

[0051] Figure 2 This is a process demonstration diagram of the parallelism testing system and testing method provided in Embodiment 2 of this application;

[0052] Figure 3 This is a process demonstration diagram of the parallelism testing system and testing method provided in Embodiment 3 of this application;

[0053] Figure 4 This is a process demonstration diagram of the parallelism testing system and testing method provided in Embodiment 4 of this application. Detailed Implementation

[0054] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0055] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application.

[0056] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0057] The parallelism testing device for eliminating the influence of autocollimator spot overlap provided in this application embodiment mainly uses a wedge plate to adjust the autocollimator and the lens to be tested to achieve the final measured parallelism of the lens.

[0058] The parallelism testing system provided in this application includes an autocollimator, at least two test planes, and an optical path converter. The at least two test planes are used to reflect the light emitted by the autocollimator back to the autocollimator. The optical path converter can be attached to the two test planes respectively to change the position of the light spot reflected back to the autocollimator from the two test planes. By comparing the position information of the light spot on the autocollimator before and after attaching the optical path converter, the parallelism between the at least two test planes can be obtained.

[0059] In some embodiments, an autocollimator can be used to record the angular deviation information of a test plane before and after it is attached to the optical path converter, and the difference between the angular deviation information of the test plane before and after it is attached to the optical path converter can be taken to obtain the calibration angular deviation information of the optical path converter; the autocollimator can be aligned with two test planes simultaneously, and the optical path converter can be attached to the test plane farther away from the autocollimator. The autocollimator can be used to record the parallelism information between the test plane closer to the autocollimator and the optical path converter, and the difference between the parallelism information and the calibration angular deviation information can be taken to obtain the parallelism information between the two test planes.

[0060] In other embodiments, an autocollimator can be used to record the angular deviation information of at least one test plane placed between the autocollimator and the optical path adjustment component before and after the optical path conversion component is attached. The difference between the angular deviation information of the test plane before and after the optical path conversion component is attached is taken to obtain the calibration angular deviation information of the optical path conversion component. The autocollimator is aligned with two test planes respectively, and the optical path conversion component is attached to the test plane closer to the autocollimator. The parallelism information between the test plane closer to the autocollimator and the optical path conversion component is recorded by the autocollimator. The difference between the parallelism information and the calibration angular deviation information is then taken to obtain the parallelism information between the two test planes.

[0061] In some embodiments, at least two test planes can be surfaces of two lenses, or two surfaces distributed on the same double-sided mirror. The optical path conversion component includes a wedge plate, which includes two opposing first and second surfaces. The second surface is inclined relative to the first surface, and the first surface can be respectively attached to the two test planes. The second surface is provided with a reflective film. In addition, the parallelism testing system also includes a light-blocking component disposed between the first and second lenses. Furthermore, an optical path adjustment component, such as a corner prism, capable of redirecting and displacing the optical path can also be provided. As needed, multiple lenses, double-sided mirror light-blocking components, or optical path adjustment components can be provided, which is not limited in this embodiment.

[0062] The following describes in detail, with reference to several specific embodiments, a parallelism testing system and its parallelism testing method that can eliminate the influence of autocollimator spot overlap.

[0063] Example 1

[0064] like Figure 1 As shown, in this embodiment, the parallelism testing system for eliminating the influence of overlapping autocollimator spots includes two first lenses 102 and second lenses 103, an autocollimator 101, a wedge plate 104 with a wedge-shaped reflective coating, and a light-blocking component 105, all for precise parallelism testing. In conventional testing methods, the autocollimator 101 cannot directly display the parallelism between the first lens 102 and the second lens 103 because the cross-shaped light spots reflected by the first lens 102 and the second lens 103 overlap, directly affecting the accurate testing of parallelism. Here, the autocollimator 101, the second lens 103, and the first lens 102 are arranged as follows: Figure 1 The lenses are placed from left to right as shown. Specifically, the steps for accurately testing the parallelism between the adjusted lenses are as follows:

[0065] First, the second test plane 102a of the second lens 102 and the first test plane 103a of the first lens 103 are respectively oriented toward the autocollimator 101, and a light-blocking member 105 is placed between the first lens 103 and the second lens 102, so that the position of the light spot reflected back to the autocollimator 101 from the first test plane 103a is located at the center of the field of view of the autocollimator 101. The angular deviation information (x1, y1) of the first test plane 103a on the autocollimator 101 is recorded at this time.

[0066] The second step is to remove the light-blocking component 105, attach the wedge plate 104 to the first test plane 103a, record the angle deviation information (x2, y2) of the wedge plate 104 on the autocollimator 101 at this time, and take the difference between the angle deviation information (x2, y2) of the wedge plate 104 and the angle deviation information (x1, y1) of the first test plane 103a to obtain the calibration angle deviation information (△x, △y) of the wedge plate 104, where △x = x2 - x1, △y = y2 - y1;

[0067] The third step is to attach the wedge plate 104 to the second plane to be measured 102a, record the parallelism information (x3, y3) between the first plane to be measured 103a and the wedge plate 104 on the collimator 101, and take the difference between this parallelism information and the calibration angle deviation information (△x, △y) of the wedge plate 104 to obtain the parallelism information (x3-△x, y3-△y) between the first plane to be measured 103a and the second plane to be measured 102a.

[0068] Example 2

[0069] like Figure 2 As shown, in this embodiment, the parallelism testing system for eliminating the effect of overlapping autocollimator spots includes two lenses to be tested for parallelism: a first lens 202 and a second lens 204, an autocollimator 201, and a wedge plate 203 with a wedge-shaped reflective coating. Here, as... Figure 3 As shown, the second lens 204 can be positioned between the autocollimator 201 and the first lens 202. Specifically, the operation steps for accurately testing the parallelism between the adjusted lenses are as follows:

[0070] First, align the first test plane 202a of the first lens 202 with the autocollimator 201, adjust the angle of the autocollimator 201 so that the position of the light spot reflected back from the first test plane 202a to the autocollimator 201 is located at the center of the field of view of the autocollimator 201, and record the angle deviation information (x1, y1) of the first test plane 202a on the autocollimator 201 at this time.

[0071] The second step is to attach the wedge plate 203 to the first plane to be measured 202a, record the angle deviation information (x2, y2) of the wedge plate 204 on the autocollimator 201 at this time, and take the difference between the angle deviation information (x2, y2) of the wedge plate 204 and the angle deviation information (x1, y1) of the first plane to be measured 202a to obtain the calibration angle deviation information (△x, △y) of the wedge plate 204, where △x = x2 - x1, △y = y2 - y1;

[0072] The third step is to place the second lens 204 between the first lens 202 and the autocollimator 201, and make the second test plane 204a of the second lens 204 face the autocollimator 201. Record the parallelism information (x3, y3) between the second test plane 204a and the wedge plate 204 on the autocollimator 201 at this time. Then, take the difference between the parallelism information (x3, y3) and the calibration angle deviation information (△x, △y) of the wedge plate 204 to obtain the parallelism information (x3-△x, y3-△y) between the first test plane 202a and the second test plane 204a.

[0073] Example 3

[0074] like Figure 3 As shown, in this embodiment, the parallelism testing system for eliminating the influence of autocollimator spot overlap includes a double-sided mirror 303 to be tested for parallelism, an autocollimator 301, a corner prism 302, and a wedge plate 304 with a wedge-shaped reflective coating. Here, the autocollimator 301, the double-sided mirror 303, and the corner prism 302 are as follows: Figure 3 The items are placed in their respective positions from left to right as shown. The specific operational steps for accurate parallelism testing are as follows:

[0075] The first step is to adjust the corner prism 302 so that the position of its reflected crosshair spot is located at the center of the field of view of the autocollimator 301;

[0076] The second step is to position the first test plane 303-b of the double-sided mirror 303 away from the autocollimator 301 and towards the corner prism 302, and to position the second test plane 303-a of the double-sided mirror 303 towards the autocollimator 301 and away from the corner prism 302, so that the positions of the reflected crosshair spots of the first test plane 303-b and the second test plane 303-a are located at the center of the field of view of the autocollimator 301.

[0077] The third step is to attach the wedge plate 304 to the second surface to be measured 303-a and record the first parallelism information (x4, y4) between the first surface to be measured 303-a and the wedge plate 304 on the collimator 301 at this time.

[0078] Fourth step, adjust the direction (e.g., rotate the double-sided mirror 303) so that the first plane to be measured 303-b faces the autocollimator 301 and is away from the corner prism 302, and the second plane to be measured 303-a is away from the autocollimator 301 and faces the corner prism 302. Record the second parallelism information (x5, y5) between the second plane to be measured 303-a and the wedge plate 304 on the autocollimator 301 at this time. Take the difference between the second parallelism information (x5, y5) and the first parallelism information (x4, y4) and average them to obtain the parallelism information ((x5-x4) / 2, (y5-y4) / 2) between the two planes to be measured.

[0079] Example 4

[0080] like Figure 4 As shown, in this embodiment, the parallelism testing system for eliminating the effect of autocollimator spot overlap includes a double-sided mirror 403 to be tested for parallelism, an autocollimator 401, a corner prism 402, and a wedge plate 404 with a wedge-shaped reflective coating. Here, the autocollimator 401, the double-sided mirror 403, and the corner prism 402 are as follows: Figure 4 The items are placed in their respective positions from left to right as shown. The specific operational steps for accurate parallelism testing are as follows:

[0081] The first step is to adjust the corner prism 402 so that the position of its reflected crosshair spot is located at the center of the field of view of the autocollimator 401;

[0082] The second step is to position the first test plane 403-b away from the autocollimator 401 and towards the corner prism 402, and to position the second test plane 403-a towards the autocollimator 401 and away from the corner prism 402, so that the positions of the reflected crosshair spots of the first test plane 403-b and the second test plane 403-a are located at the center of the field of view of the autocollimator 401.

[0083] The third step is to attach the wedge plate 404 to the second surface to be measured 403-a and record the first parallelism information (x4, y4) between the first plane to be measured 403-b on the collimator 401 and the wedge plate 404.

[0084] Fourth step, remove corner prism 402, record the second parallelism information (x5, y5) between the first plane to be measured 403-b and the wedge plate 404 on the collimator 401 at this time, and average the difference between the second parallelism information (x5, y5) and the first parallelism information (x4, y4) to obtain the parallelism information between the two planes to be measured ((x5-x4) / 2, (y5-y4) / 2).

[0085] In summary, the parallelism testing scheme provided in this application involves placing a wedge plate on the lens under test during the testing process. By using the wedge plate, the two crosshair spots on the autocollimator are separated in space, thereby eliminating the influence of overlapping crosshair spots and obtaining accurate parallelism test results. This avoids the technical defect of previous testing methods where the crosshair spots partially overlapped, making it impossible to identify the parallelism value. The scheme is well applicable to both parallelism measurement scenarios between two plates and precise parallelism testing of double-sided reflective plates, ultimately improving the range and accuracy of parallelism testing.

[0086] In this specification, similar or identical parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and relevant parts can be referred to the descriptions in the system embodiments. The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification, and therefore, such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A parallelism testing system, characterized in that, include: Autocollimator; At least two planes to be measured, so as to reflect the light emitted by the autocollimator back to the autocollimator; The two test planes include a first test plane and a second test plane. When both the first test plane and the second test plane are oriented toward the autocollimator, the parallelism testing system further includes a first lens and a second lens; the first test plane is a surface of the first lens, and the second test plane is a surface of the second lens. The optical path conversion component can be respectively attached to the two planes to be measured to change the position of the light spot reflected back to the autocollimator from the two planes to be measured; in By comparing the position information of the light spot on the autocollimator before and after attaching the optical path conversion component, the parallelism between the two planes to be measured can be obtained.

2. The parallelism testing system according to claim 1, characterized in that, The optical path conversion component includes a wedge plate; The wedge plate includes two opposing first surfaces and a second surface, wherein the second surface is inclined relative to the first surface; wherein The first surface can be respectively attached to the two planes to be tested, and the second surface is provided with a reflective film.

3. The parallelism testing system according to claim 1, characterized in that, The parallelism testing system also includes a light-blocking component disposed between the first lens and the second lens.

4. The parallelism testing system according to claim 1, characterized in that, When the first plane to be tested is set toward the autocollimator and the second plane to be tested is set away from the autocollimator, the parallelism testing system further includes a double-sided reflector; The first test plane and the second test plane are two opposite surfaces of the double-sided mirror.

5. The parallelism testing system according to claim 4, characterized in that, The parallelism testing system also includes an optical path adjustment component, which can redirect and displace the optical path.

6. The parallelism testing system according to claim 5, characterized in that, The optical path adjustment component includes a corner prism.

7. A parallelism testing method based on the parallelism testing system according to any one of claims 1-3, characterized in that, Includes the following steps: The angle deviation information of the test plane before and after the optical path conversion component is attached is recorded by an autocollimator, and the difference between the angle deviation information of the test plane before and after the optical path conversion component is attached is obtained to obtain the calibration angle deviation information of the optical path conversion component. The autocollimator is simultaneously aligned with the two planes to be measured, and the optical path converter is attached to the plane to be measured that is farther away from the autocollimator. The autocollimator records the parallelism information between the plane to be measured that is closer to the autocollimator and the optical path converter. Then, the difference between the parallelism information and the calibration angle deviation information is taken to obtain the parallelism information between the two planes to be measured.

8. The parallelism testing method of the parallelism testing system according to claim 7, characterized in that, Includes the following steps: Orient the first test plane of the first lens toward the autocollimator, adjust the angle of the autocollimator so that the position of the light spot reflected back from the first test plane onto the autocollimator is located at the center of the field of view of the autocollimator, and record the angle deviation information of the first test plane on the autocollimator at this time. The optical path conversion component is attached to the first test plane, and the angle deviation information of the optical path conversion component on the autocollimator is recorded. The difference between the angle deviation information of the optical path conversion component and the angle deviation information of the first test plane is taken to obtain the calibration angle deviation information of the optical path conversion component. Place the second lens between the first lens and the autocollimator, and make the second plane to be measured of the second lens face the autocollimator. Record the parallelism information between the second plane to be measured and the optical path conversion device on the autocollimator at this time. Take the difference between the parallelism information and the calibration angle deviation information of the optical path conversion device to obtain the parallelism information between the first plane to be measured and the second plane to be measured.

9. The parallelism testing method of the parallelism testing system according to claim 7, characterized in that, Includes the following steps: The first test plane of the first lens and the second test plane of the second lens are respectively directed toward the autocollimator, and a light-blocking device is placed between the first lens and the second lens, so that the position of the light spot reflected back to the autocollimator from the first test plane is located at the center of the field of view of the autocollimator. The angular deviation information of the first test plane on the autocollimator at this time is recorded. Remove the light-blocking component, attach the optical path conversion component to the first test plane, record the angle deviation information of the optical path conversion component on the autocollimator at this time, and take the difference between the angle deviation information of the optical path conversion component and the angle deviation information of the first test plane to obtain the calibration angle deviation information of the optical path conversion component. The optical path conversion component is attached to the second test plane, and the parallelism information between the first test plane and the optical path conversion component on the autocollimator is recorded. The difference between the parallelism information and the calibration angle deviation information of the optical path conversion component is taken to obtain the parallelism information between the first test plane and the second test plane.

10. A parallelism testing method based on the parallelism testing system according to any one of claims 1-2 and 4-6, characterized in that, Includes the following steps: The angular deviation information of the optical path conversion component before and after the plane to be tested is attached to the optical path conversion component is recorded by the autocollimator and the optical path adjustment component. The difference between the angular deviation information of the plane to be tested before and after the optical path conversion component is attached is taken to obtain the calibration angular deviation information of the optical path conversion component. The autocollimator is aligned with the two planes to be measured, and the optical path converter is attached to the plane to be measured closer to the autocollimator. The autocollimator records the parallelism information between the plane to be measured farther from the autocollimator and the optical path converter. Then, the difference between the parallelism information and the calibration angle deviation information is taken to obtain the parallelism information between the two planes to be measured.

11. The parallelism testing method of the parallelism testing system according to claim 10, characterized in that, Includes the following steps: Adjust the optical path adjustment component so that the position of the reflected crosshair spot is located at the center of the field of view of the autocollimator; The first plane to be tested is positioned with its back to the autocollimator and its direction towards the optical path adjustment component, and the second plane to be tested is positioned with its direction towards the autocollimator and its back to the optical path adjustment component, such that the positions of the reflected crosshair spots of the first plane to be tested and the second plane to be tested are located at the center of the field of view of the autocollimator. The optical path conversion component is attached to the second surface to be tested, and the first parallelism information between the first plane to be tested and the optical path conversion component on the autocollimator is recorded at this time. The orientation is adjusted so that the first plane to be measured faces the autocollimator and is away from the optical path adjustment component, while the second plane to be measured is away from the autocollimator and faces the optical path adjustment component. The second parallelism information between the second plane to be measured and the optical path adjustment component on the autocollimator is recorded at this time. The difference between the second parallelism information and the first parallelism information is taken and averaged to obtain the parallelism information between the two planes to be measured.

12. The parallelism testing method of the parallelism testing system according to claim 10, characterized in that, Includes the following steps: Adjust the optical path adjustment component so that the position of the reflected crosshair spot is located at the center of the field of view of the autocollimator; The first plane to be tested is positioned with its back to the autocollimator and its direction towards the optical path adjustment component, and the second plane to be tested is positioned with its direction towards the autocollimator and its back to the optical path adjustment component, such that the positions of the reflected crosshair spots of the first plane to be tested and the second plane to be tested are located at the center of the field of view of the autocollimator. The optical path conversion component is attached to the second surface to be tested, and the first parallelism information between the first plane to be tested and the optical path conversion component on the autocollimator is recorded at this time. Remove the optical path adjustment component, record the second parallelism information between the first plane to be measured and the optical path conversion component on the autocollimator at this time, and average the difference between the second parallelism information and the first parallelism information to obtain the parallelism information between the two planes to be measured.

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