Gyroscope with lever

Abstract

The application relates to the technical field of gyroscopes, and discloses a gyroscope with a lever, which comprises four mass blocks, which are symmetrically distributed in a first direction and a second direction; a driving and detecting assembly, which is located on the outer side of the mass blocks distributed in the first direction, and comprises a driving and detecting electrode and a driving and detecting frame, wherein the movable part of the driving and detecting electrode is arranged on the driving and detecting frame; a driving assembly, which comprises a driving electrode and is connected with the mass blocks distributed in the second direction; and a lever, which is arranged on a substrate and is connected with the driving and detecting frame and the mass blocks distributed in the first direction, wherein the first force arm of the mass blocks is larger than the second force arm of the driving and detecting frame. The gyroscope with the lever disclosed by the application utilizes the lever to increase the capacitance change of the sensitive direction, improves the sensitivity of the gyroscope, and increases the signal-to-noise ratio and stability of the gyroscope.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a gyroscope with a lever. Background Technology

[0002] Micromechanical gyroscopes can be classified into capacitive gyroscopes, piezoresistive gyroscopes, and optical gyroscopes based on their detection methods. Capacitive gyroscopes are widely used due to their simple structure and high measurement accuracy. However, with the miniaturization of chips, their length and width are also decreasing. When the chip length and width shrink to a certain extent, the capacitance change in the sensitive direction of the capacitive gyroscope becomes very small, limiting the improvement of the micromechanical gyroscope's sensitivity and affecting its signal-to-noise ratio and stability. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a gyroscope with a lever, which increases the driving speed by lever, thereby increasing the Coriolis force, improving the detection displacement in the sensitive direction, and the capacitance change in the sensitive direction, thus enhancing the sensitivity of the gyroscope and increasing the signal-to-noise ratio and stability of the gyroscope.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A lever-operated gyroscope, comprising:

[0006] Four mass blocks are orthogonally and symmetrically distributed along a first direction and a second direction. Adjacent mass blocks are elastically connected. The mass blocks distributed along the second direction and the substrate directly opposite them form a first direction detection electrode, and the mass blocks distributed along the first direction and the substrate directly opposite them form a second direction detection electrode.

[0007] A drive detection component is located outside the mass blocks distributed along the first direction. The drive detection component includes a drive detection electrode and a drive detection frame. The movable portion of the drive detection electrode is disposed on the drive detection frame.

[0008] A driving assembly includes a driving electrode connected to the mass blocks distributed along the second direction, the driving electrode being capable of driving the mass blocks connected thereto and causing the remaining mass blocks to move;

[0009] A lever is disposed on the substrate, and the lever is connected to the drive detection frame and the mass block distributed along the first direction, respectively. The first lever arm of the mass block is greater than the second lever arm of the drive detection frame.

[0010] As a preferred embodiment of a lever-driven gyroscope, the lever-driven gyroscope includes a first anchor point, a fixed straight beam, a first connecting straight beam, and a first connecting elastic beam. The first connecting elastic beam is capable of extending and retracting along a second direction. The lever is connected to the first anchor point via the fixed straight beam. One end of the lever is connected to the mass block via the first connecting straight beam, and the other end of the lever is connected to the drive detection frame via the first connecting elastic beam. The distances from the first connecting straight beam and the first connecting elastic beam along the length direction of the lever to the fixed straight beam are respectively the first lever arm and the second lever arm.

[0011] As a preferred embodiment of a lever-driven gyroscope, the number of levers is four, the number of drive detection components is two, each drive detection component corresponds to two levers, and the two levers are respectively located on both sides of the drive detection component along the second direction.

[0012] As a preferred embodiment of a lever-type gyroscope, the lever-type gyroscope further includes four third-direction detection electrode groups, which are distributed on the same circle with the symmetry center of the four mass blocks as the center. The four third-direction detection electrode groups are respectively arranged in one-to-one correspondence with the four mass blocks, and each third-direction detection electrode group is arranged on one of the mass blocks.

[0013] When detecting the angular velocity in the third direction, the two mass blocks distributed along the first direction move synchronously in opposite directions along the second direction, the two mass blocks distributed along the second direction move along the first direction, the detection frame rotates along the third direction, and the third-direction detection electrode group can detect the angular velocity in the third direction.

[0014] As a preferred embodiment of a lever-type gyroscope, each of the third-direction detection electrode groups is a differential electrode and includes a third-direction first sub-electrode and a third-direction second sub-electrode. The movable portions of the third-direction first sub-electrode and the third-direction second sub-electrode are both disposed on the mass block. The comb teeth of the third-direction first sub-electrode and the comb teeth of the third-direction second sub-electrode are both arc comb teeth, and the center of the arc comb teeth is the center of symmetry of the four mass blocks.

[0015] As a preferred embodiment of a lever-driven gyroscope, the lever-driven gyroscope further includes a second anchor point, a second connecting straight beam extending along the second direction, and a second connecting elastic beam capable of telescoping along the second direction. The drive assembly further includes a drive frame, which is connected to the second anchor point via the second connecting elastic beam and to the mass block via the second connecting straight beam.

[0016] As a preferred embodiment of a lever-driven gyroscope, the lever-driven gyroscope further includes a third anchor point, a fourth anchor point, a third connecting elastic beam, and a fourth connecting elastic beam. The third anchor point and the fourth anchor point are respectively located on both sides of the drive detection frame along the first direction. The third connecting elastic beam and the fourth connecting elastic beam are both capable of extending and retracting along the first direction. The drive detection frame is connected to the third anchor point through the third connecting elastic beam and also to the fourth anchor point through the fourth connecting elastic beam.

[0017] As a preferred embodiment of a lever-driven gyroscope, the lever-driven gyroscope further includes a fifth anchor point and a fifth connecting elastic beam capable of stretching and contracting along the second direction and deforming in the third direction, wherein the mass blocks distributed along the second direction are connected to the fifth anchor point via the fifth connecting elastic beam.

[0018] As a preferred embodiment of a lever-driven gyroscope, the lever-driven gyroscope further includes a central coupling component. The central coupling component includes four elastic movable components and four central anchor points. The four elastic movable components are respectively configured to correspond one-to-one with the four central anchor points and the four mass blocks. Each central anchor point is located between two elastic movable components. One end of each elastic movable component is connected to the mass block, and the other end is connected to the central anchor point.

[0019] As a preferred embodiment of a lever-driven gyroscope, each of the elastic movable components includes a first central elastic beam, a central straight beam, a connecting block, and a second central elastic beam connected in sequence. The first central elastic beam is connected to the mass block, the second central elastic beam is connected to the central anchor point, and the four connecting blocks are integrally formed into a central moving block.

[0020] The beneficial effects of this invention are as follows:

[0021] The lever-type gyroscope disclosed in this invention employs a closed-loop drive control. A drive electrode drives a mass block to move, and the mass block, through a drive detection frame, moves the movable end of the drive detection electrode, causing a change in the capacitance of the drive detection electrode to reflect the mass block's motion. In a stable state, the amplitude of the drive detection frame's motion is fixed. Since the first lever arm of the mass block is greater than the second lever arm of the drive detection frame, and the drive frequency is fixed, both the amplitude and speed of the mass block's motion are increased. The increase in the amplitude of the mass block is equal to the ratio of the first lever arm to the second lever arm, thus improving the sensitivity of the first and second direction detection electrodes and enhancing the signal-to-noise ratio and stability of the lever-type gyroscope. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a lever-equipped gyroscope provided in a specific embodiment of the present invention;

[0024] Figure 2 This is an enlarged view of the lever-equipped gyroscope at point A provided in a specific embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the central coupling component of a lever-type gyroscope provided in a specific embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of a lever-equipped gyroscope in a driven state according to a specific embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of a lever-equipped gyroscope detecting angular velocity in the X-axis direction according to a specific embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of a lever-equipped gyroscope detecting angular velocity in the Y-axis direction according to a specific embodiment of the present invention;

[0029] Figure 7 This is a schematic diagram of a lever-equipped gyroscope detecting angular velocity in the Z-axis direction, provided in a specific embodiment of the present invention.

[0030] In the picture:

[0031] 1. Mass block; 101. First direction detection electrode; 102. Second direction detection electrode; 11. Coupling connection elastic element;

[0032] 2. Drive detection component; 21. Drive detection electrode; 22. Drive detection frame;

[0033] 3. Driving component; 31. Driving electrode; 32. Driving frame;

[0034] 41. Lever; 42. Fixed straight beam;

[0035] 51. First anchor point; 52. Second anchor point; 53. Third anchor point; 54. Fourth anchor point; 55. Fifth anchor point;

[0036] 61. First connecting straight beam; 62. Second connecting straight beam;

[0037] 71. First connecting elastic beam; 72. Second connecting elastic beam; 73. Third connecting elastic beam; 74. Fourth connecting elastic beam; 75. Fifth connecting elastic beam;

[0038] 8. Third-party directional detection electrode group; 81. Third-party directional first sub-electrode; 82. Third-party directional second sub-electrode;

[0039] 9. Central coupling component; 91. Elastic movable component; 911. First central elastic beam; 912. Central straight beam; 913. Connecting block; 914. Second central elastic beam; 92. Central anchor point. Detailed Implementation

[0040] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0042] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0043] This embodiment provides a gyroscope with a lever, such as Figures 1 to 3As shown, the device includes four mass blocks 1, a drive detection component 2, a drive component 3, and a lever 41. The four mass blocks 1 are orthogonally symmetrically distributed along a first direction and a second direction. Adjacent mass blocks 1 are elastically connected. The mass blocks 1 distributed along the second direction and their corresponding substrates form a first direction detection electrode 101 and a second direction detection electrode 102, respectively. The drive detection component 2 is located outside the two mass blocks 1 distributed along the first direction. The drive detection component 2 includes a drive detection electrode 21 and a drive detection frame 22. The movable part of the drive detection electrode 21 is disposed on the drive detection frame 22. The drive component 3 includes a drive electrode 31, which is connected to the mass blocks 1 distributed along the second direction. The drive electrode 31 can drive the mass blocks 1 connected to it and drive the other mass blocks 1 to move, so that the four mass blocks 1 move synchronously towards or away from each other. The lever 41 is disposed on the substrate and is connected to the drive detection frame 22 and the mass blocks 1 distributed along the first direction, respectively. The first lever arm of the mass block 1 is greater than the second lever arm of the drive detection frame 22.

[0044] like Figure 1 As shown, the lever-type gyroscope provided in this embodiment also includes a coupling connection elastic element 11, which is a U-shaped spring. The opening direction of the coupling connection elastic element 11 forms an angle of 45° with both the first and second directions. Two adjacent mass blocks 1 are connected through the coupling connection elastic element 11. When the driving electrode 31 drives the connected mass block 1 to move, the presence of the coupling connection elastic element 11 causes the mass block 1 to drive the adjacent mass block 1 to move. The four mass blocks 1 simultaneously perform simple harmonic motion in the direction of approaching or moving away from each other. The 45° opening ensures that the deformation mode of the coupling connection elastic element 11 is unique in the driving state of the lever-type gyroscope. In the driving state, the magnitude and amplitude of the motion speed of the four mass blocks 1 are the same, ensuring the consistency of the motion of the four mass blocks 1 and increasing the linearity of the driving displacement.

[0045] Specifically, such as Figure 1 As shown, in this embodiment, the first direction is the X-axis, the second direction is the Y-axis, and the third direction is the Z-axis. The X-axis, Y-axis, and Z-axis are all perpendicular to each other. In other embodiments of the present invention, the first direction may also be the Y-axis, the second direction may also be the X-axis, and the third direction may be the Z-axis, depending on actual needs.

[0046] The lever-driven gyroscope provided in this embodiment employs a closed-loop drive control. The drive electrode 31 drives the mass block 1 to move. The mass block 1 can drive the movable end of the drive detection electrode 21 to move through the drive detection frame 22, causing a change in the capacitance of the drive detection electrode 21, thereby reflecting the movement of the mass block 1. In a stable state, the movement amplitude of the drive detection frame 22 is fixed. Since the first lever arm of the mass block 1 is greater than the second lever arm of the drive detection frame 22, and the drive frequency is fixed, both the movement amplitude and speed of the mass block 1 are increased. The increase in the movement amplitude of the mass block 1 is the ratio of the first lever arm to the second lever arm, which improves the sensitivity of the first direction detection electrode 101 and the second direction detection electrode 102, and enhances the signal-to-noise ratio and stability of the lever-driven gyroscope.

[0047] like Figure 1 and Figure 2 As shown, the lever-driven gyroscope of this embodiment includes a first anchor point 51, a fixed straight beam 42, a first connecting straight beam 61, and a first connecting elastic beam 71. The first connecting elastic beam 71 can extend and retract along the Y-axis. The lever 41 is connected to the first anchor point 51 through the fixed straight beam 42. One end of the lever 41 is connected to the mass block 1 through the first connecting straight beam 61, and the other end of the lever 41 is connected to the drive detection frame 22 through the first connecting elastic beam 71. The distance from the first connecting straight beam 61 along the length of the lever 41 to the fixed straight beam 42 is greater than the distance from the first connecting elastic beam 71 along the length of the lever 41 to the fixed straight beam 42. The distances from the first connecting straight beam 61 and the first connecting elastic beam 71 along the length of the lever 41 to the fixed straight beam 42 are the first lever arm and the second lever arm, respectively, to increase the movement amplitude of the mass block 1 and improve the detection sensitivity.

[0048] like Figure 1 As shown, this embodiment has four levers 41 and two drive detection components 2. Each drive detection component 2 corresponds to two levers 41, and the two levers 41 are located on opposite sides of the drive detection component 2 along the Y-axis. Specifically, the levers 41 rotate with their connection point with the fixed straight beam 42 as the fulcrum. The two levers 41 connected to the same mass block 1 move in opposite directions. Since the mass block 1 and the drive detection frame 22 are connected to the two ends of the levers 41 respectively, the movement direction of the drive detection frame 22 is opposite to the movement direction of the mass block 1.

[0049] like Figure 1As shown, the lever-equipped gyroscope in this embodiment also includes four third-party directional detection electrode groups 8. The four third-party directional detection electrode groups 8 are distributed on the same circle with the center of symmetry of the four mass blocks 1 as the center. The four third-party directional detection electrode groups 8 are respectively arranged in a one-to-one correspondence with the four mass blocks 1, and each third-party directional detection electrode group 8 is arranged on one mass block 1. When detecting the angular velocity in the Z-axis direction, the two mass blocks 1 distributed along the X-axis direction move synchronously in opposite directions along the Y-axis direction, the two mass blocks 1 distributed along the Y-axis direction move along the X-axis direction, and the four mass blocks 1 rotate clockwise or counterclockwise along the Z-axis direction. That is, the mass blocks 1 rotate along the Z-axis direction, and the third-party directional detection electrode groups 8 can detect the angular velocity in the Z-axis direction.

[0050] It should be noted that the lever-equipped gyroscope in this embodiment is a three-axis gyroscope because it includes a third-direction detection electrode group 8 capable of detecting angular velocity in the Z-axis direction. In other embodiments of the present invention, the lever-equipped gyroscope may not include the third-direction detection electrode group 8, and the lever-equipped gyroscope is a two-axis gyroscope because it cannot detect angular velocity in the Z-axis direction. In this case, the lever-equipped gyroscope can only detect angular velocity in the X-axis direction and angular velocity in the Y-axis direction.

[0051] like Figure 1 As shown, each third-direction detection electrode group 8 is a differential electrode and includes a third-direction first sub-electrode 81 and a third-direction second sub-electrode 82. The movable parts of the third-direction first sub-electrode 81 and the third-direction second sub-electrode 82 are both set on the mass block 1. The capacitance changes detected by the third-direction first sub-electrode 81 and the third-direction second sub-electrode 82 have opposite trends. The comb teeth of the third-direction first sub-electrode 81 and the comb teeth of the third-direction second sub-electrode 82 are both arc comb teeth, and the center of the arc comb teeth is the center of symmetry of the four mass blocks 1.

[0052] When detecting the angular velocity in the Z-axis direction, according to the right-hand rule, the four mass blocks 1 are subjected to Coriolis force and exhibit simple harmonic motion around the Z-axis with the center of the circle as the rotation center. The third-direction detection electrode group 8 is set on the same circle to ensure the consistency of capacitance change at the same moment. This capacitance detection method of the third-direction detection electrode group 8 is variable area detection. Currently, the existing third-direction detection electrodes are generally variable gap detection, that is, the capacitance is detected by the change of the gap between the movable part and the fixed part of the third-direction detection electrode. Compared with variable gap detection, variable area detection has higher linearity and increases the measurement accuracy of the lever gyroscope.

[0053] like Figure 1As shown, the lever-driven gyroscope in this embodiment also includes a second anchor point 52, a second connecting straight beam 62 extending along the Y-axis, and a second connecting elastic beam 72 capable of telescoping along the Y-axis. The drive assembly 3 also includes a drive frame 32, which is connected to the second anchor point 52 via the second connecting elastic beam 72 and to the mass block 1 via the second connecting straight beam 62. The second connecting elastic beam 72 ensures that the drive frame 32 moves along the Y-axis. The drive frame 32 and the mass block 1 are rigidly connected via the second connecting straight beam 62, ensuring that the drive electrode 31 drives the connected mass block 1 to reciprocate along the Y-axis via the drive frame 32, thereby driving two mass blocks 1 distributed along the X-axis to reciprocate along the X-axis, causing the four mass blocks 1 to perform simple harmonic motion. In the driving state, the presence of the second connecting straight beam 62 causes the drive frame 31 and the mass block 1 to move synchronously. In the detection state, the presence of the second connecting straight beam 62 reduces the influence of the rotation of the mass block 1 on the drive frame 31, achieving unidirectional decoupling between detection and drive, and improving the stability of the drive.

[0054] like Figure 1 As shown, the lever-driven gyroscope in this embodiment also includes a third anchor point 53, a fourth anchor point 54, a third connecting elastic beam 73, and a fourth connecting elastic beam 74. The third anchor point 53 and the fourth anchor point 54 are located on both sides of the drive detection frame 22 along the X-axis direction. Both the third connecting elastic beam 73 and the fourth connecting elastic beam 74 can extend and retract along the X-axis direction. The third connecting elastic beam 73 can also deform along the third direction. The drive detection frame 22 is connected to the third anchor point 53 through the third connecting elastic beam 73, and the drive detection frame 22 is also connected to the fourth anchor point 54 through the fourth connecting elastic beam 74.

[0055] Specifically, each drive detection frame 22 corresponds to two third connecting elastic beams 73 and two fourth connecting elastic beams 74. The two third connecting elastic beams 73 are located at both ends of the drive detection frame 22 along the Y-axis, and the two fourth connecting elastic beams 74 are also located at both ends of the drive detection frame 22 along the Y-axis. The arrangement of the third connecting elastic beams 73 and fourth connecting elastic beams 74 ensures that the drive detection frame 22 undergoes simple harmonic motion along the X-axis, ensuring the smoothness of the drive detection frame 22's motion. Since the third connecting elastic beams 73 can deform along the Z-axis, when detecting the angular velocity in the Y-axis direction, the two drive detection frames 22 undergo out-of-plane rotation, and the rotation of the drive detection frame 22 is attenuated by the third connecting elastic beams 73.

[0056] like Figure 1As shown, the lever-equipped gyroscope in this embodiment also includes a fifth anchor point 55 and a fifth connecting elastic beam 75 capable of stretching along the Y-axis and deforming along the Z-axis. Mass blocks 1 distributed along the Y-axis are connected to the fifth anchor point 55 via the fifth connecting elastic beam 75, allowing the mass blocks 1 distributed along the Y-axis to be movably mounted on the substrate. Specifically, each mass block 1 corresponds to two fifth connecting elastic beams 75, which are located at opposite ends of the mass block 1 along the X-axis, ensuring the smoothness of the mass block 1's movement. When detecting the angular velocity along the X-axis, the two mass blocks 1 distributed along the Y-axis undergo out-of-plane rotation, which is attenuated by the fifth connecting elastic beams 75.

[0057] like Figure 1 and Figure 3 As shown, the lever-equipped gyroscope in this embodiment also includes a central coupling component 9 capable of isolating external stress. The central coupling component 9 includes four elastic movable components 91 and four central anchor points 92. The four elastic movable components 91 are respectively configured in a one-to-one correspondence with the four central anchor points 92 and the four mass blocks 1. Each central anchor point 92 is located between two elastic movable components 91. One end of each elastic movable component 91 is connected to the mass block 1, and the other end of each elastic movable component 91 is connected to the central anchor point 92. Specifically, each elastic movable component 91 includes a first central elastic beam 911, a central straight beam 912, a connecting block 913, and a second central elastic beam 914 connected in sequence. The first central elastic beam 911 is connected to the mass block 1 and can deform along a first direction, a second direction, and a third direction. The first central elastic beam 911 connected to the mass block 1 distributed along the X-axis can extend and retract along the X-axis, and the second central elastic beam 914 connected to the mass block 1 distributed along the Y-axis can extend and retract along the Y-axis. The second central elastic beam 914 is connected to a central anchor point 92. Each central anchor point 92 and each second central elastic beam 914 are located between two central straight beams 912. The four connecting blocks 913 are integrally formed as a central moving block.

[0058] During subsequent packaging or use, the lever-type gyroscope may be subjected to stress in the X-axis, Y-axis, or Z-axis directions when the temperature changes. The central coupling component 9 of the above structure can offset or partially offset the effect of packaging stress, improve the stability of the lever-type gyroscope, and effectively suppress temperature drift.

[0059] In the driving state, such as Figure 4As shown, the driving electrode 31 drives two mass blocks 1 distributed along the Y-axis to move along the Y-axis direction through the driving frame 32. The presence of the coupling connection elastic element 11 causes the two mass blocks 1 distributed along the X-axis to move synchronously along the X-axis direction. At the same time, the four mass blocks 1 move towards the direction closer to the central coupling component 9 or away from the central coupling component 9. At the same time, the lever 41 rotates with the position connected to the fixed straight beam 42 as the fulcrum. The rotation directions of the two levers 41 connected to the same mass block 1 are opposite. The movement direction of the driving detection frame 22 is opposite to the movement direction of the mass block 1.

[0060] When detecting angular velocity in the X-axis direction, such as Figure 5 As shown, two mass blocks 1 distributed along the Y-axis are subjected to Coriolis forces of equal magnitude and opposite direction along the Z-axis. The first direction detection electrode 101 obtains the angular velocity in the X-axis direction by detecting the change in capacitance.

[0061] When detecting angular velocity in the Y-axis direction, such as Figure 6 As shown, two mass blocks 1 distributed along the X-axis are subjected to Coriolis forces of equal magnitude and opposite direction along the Y-axis. The second direction detection electrode 102 obtains the angular velocity in the Y-axis direction by detecting the change in capacitance.

[0062] When detecting the angular velocity in the Z-axis direction, such as Figure 7 As shown, two mass blocks 1 distributed along the X-axis move synchronously in opposite directions along the Y-axis, two mass blocks 1 distributed along the Y-axis move along the X-axis, and four mass blocks 1 rotate clockwise or counterclockwise along the Z-axis, that is, mass blocks 1 rotate along the Z-axis. At this time, the first sub-electrode 81 and the second sub-electrode 82 of the third-direction detection electrode group 8 can obtain the angular velocity in the Z-axis direction by detecting the change in capacitance.

[0063] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A gyroscope with a lever, characterized in that, include: Four mass blocks are orthogonally and symmetrically distributed along a first direction and a second direction. Adjacent mass blocks are elastically connected. The mass blocks distributed along the second direction and the substrate directly opposite them form a first direction detection electrode, and the mass blocks distributed along the first direction and the substrate directly opposite them form a second direction detection electrode. A drive detection component is located outside the mass blocks distributed along the first direction. The drive detection component includes a drive detection electrode and a drive detection frame. The movable portion of the drive detection electrode is disposed on the drive detection frame. A driving assembly includes a driving electrode connected to the mass blocks distributed along the second direction, the driving electrode being capable of driving the mass blocks connected thereto and causing the remaining mass blocks to move; A lever is disposed on the substrate, and the lever is connected to the driving detection frame and the mass block distributed along the first direction, respectively. The first lever arm of the mass block is greater than the second lever arm of the driving detection frame. Four third-party directional detection electrode groups are distributed on the same circle with the center of symmetry of the four mass blocks as the center. The four third-party directional detection electrode groups are respectively arranged in one-to-one correspondence with the four mass blocks, and each third-party directional detection electrode group is arranged on one of the mass blocks. When detecting the angular velocity in the third direction, the two mass blocks distributed along the first direction move synchronously in opposite directions along the second direction, the two mass blocks distributed along the second direction move along the first direction, the detection frame rotates along the third direction, and the third-direction detection electrode group can detect the angular velocity in the third direction.

2. The lever-equipped gyroscope according to claim 1, characterized in that, The lever-driven gyroscope includes a first anchor point, a fixed straight beam, a first connecting straight beam, and a first connecting elastic beam. The first connecting elastic beam is capable of extending and retracting along the second direction. The lever is connected to the first anchor point via the fixed straight beam. One end of the lever is connected to the mass block via the first connecting straight beam, and the other end of the lever is connected to the drive detection frame via the first connecting elastic beam. The distances from the first connecting straight beam and the first connecting elastic beam along the length direction of the lever to the fixed straight beam are the first lever arm and the second lever arm, respectively.

3. The lever-equipped gyroscope according to claim 1, characterized in that, There are four levers and two drive detection components. Each drive detection component corresponds to two levers, and the two levers are located on both sides of the drive detection component along the second direction.

4. The lever-equipped gyroscope according to claim 1, characterized in that, Each of the three-dimensional detection electrode groups is a differential electrode and includes a third-dimensional first sub-electrode and a third-dimensional second sub-electrode. The movable parts of the third-dimensional first sub-electrode and the third-dimensional second sub-electrode are both disposed on the mass block. The comb teeth of the third-dimensional first sub-electrode and the comb teeth of the third-dimensional second sub-electrode are both arc comb teeth, and the center of the arc comb teeth is the center of symmetry of the four mass blocks.

5. The lever-equipped gyroscope according to claim 1, characterized in that, The lever-driven gyroscope further includes a second anchor point, a second connecting straight beam extending along the second direction, and a second connecting elastic beam capable of telescoping along the second direction. The drive assembly further includes a drive frame, which is connected to the second anchor point via the second connecting elastic beam and to the mass block via the second connecting straight beam.

6. The lever-equipped gyroscope according to claim 1, characterized in that, The lever-driven gyroscope further includes a third anchor point, a fourth anchor point, a third connecting elastic beam, and a fourth connecting elastic beam. The third anchor point and the fourth anchor point are respectively located on both sides of the drive detection frame along the first direction. The third connecting elastic beam and the fourth connecting elastic beam are both capable of extending and retracting along the first direction. The drive detection frame is connected to the third anchor point through the third connecting elastic beam and also to the fourth anchor point through the fourth connecting elastic beam.

7. The lever-equipped gyroscope according to claim 1, characterized in that, The lever-equipped gyroscope also includes a fifth anchor point and a fifth connecting elastic beam capable of stretching and contracting along the second direction and deforming along the third direction. The mass blocks distributed along the second direction are connected to the fifth anchor point through the fifth connecting elastic beam.

8. The lever-equipped gyroscope according to claim 1, characterized in that, The lever-equipped gyroscope also includes a central coupling component, which comprises four elastic movable components and four central anchor points. The four elastic movable components are respectively configured to correspond one-to-one with the four central anchor points and the four mass blocks. Each central anchor point is located between two elastic movable components. One end of each elastic movable component is connected to the mass block, and the other end is connected to the central anchor point.

9. The lever-equipped gyroscope according to claim 8, characterized in that, Each of the elastic movable components includes a first central elastic beam, a central straight beam, a connecting block, and a second central elastic beam connected in sequence. The first central elastic beam is connected to the mass block, and the second central elastic beam is connected to the central anchor point. The four connecting blocks are integrally formed into a central moving block.

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