An online monitoring device for electrode loss and microstructure forming quality and its usage method

Abstract

This invention discloses an online monitoring device and method for electrode loss and microstructure forming quality, belonging to the field of special processing technology. It includes a machine tool spindle mounted on an EDM machine, a height adjustment unit on one side of the spindle's moving platform, a steering unit on one side of the height adjustment unit, and an image acquisition module and a vision imaging module sequentially mounted on one side of the steering unit. The steering unit includes a first adapter plate fixedly connected to the height adjustment unit, an adjustable angle platform fixedly mounted on one side of the adapter plate, a first adjusting screw mounted on the adjustable angle platform, an adjusting block connected to the first adjusting screw, a driven rod rotatably connected to one end of the adjusting block, and a driven rod rotatably connected to a second adapter plate. An image acquisition module is mounted on the second adapter plate, and a vision imaging module is mounted on the side of the image acquisition module away from the second adapter plate. The image acquisition module, vision imaging module, and height adjustment unit are electromechanically connected to a PC. This invention has a simple and practical structure.

Description

Technical Field

[0001] This invention belongs to the field of special processing technology, and in particular relates to an online monitoring device and method for monitoring electrode wear and microstructure forming quality. Background Technology

[0002] Micro-electrical discharge machining (EDM) technology, due to its wide range of workable materials and powerful microscale manufacturing capabilities, is considered one of the most promising methods for machining microstructures and is widely used in the processing of key components in military defense, aerospace, information technology, and biomedical devices. As the feature size of the machined structure decreases, electrode wear control becomes a key issue restricting the application of micro-electrical discharge machining technology. Meanwhile, the surface morphology quality of the machined part is one of the main indicators of machining quality. During EDM, the erosion of workpiece material and the wear of the tool electrode occur simultaneously, and electrode wear can, to a certain extent, cause problems in machining accuracy and surface morphology. Summary of the Invention

[0003] The purpose of this invention is to provide an online monitoring device and method for electrode wear and microstructure forming quality, which realizes real-time monitoring of electrode end morphology during processing and acquisition and detection of workpiece surface morphology to evaluate workpiece surface forming quality. This reduces the mechanical repetitive operation of detecting workpiece surface morphology after EDM to a certain extent and improves detection efficiency.

[0004] To achieve the above objectives, the specific technical solution of the online monitoring device and method for electrode loss and microstructure forming quality of the present invention is as follows:

[0005] An online monitoring device for electrode wear and microstructure forming quality includes an electrical discharge machine (EDM) tool. The EDM tool is equipped with a machine tool spindle moving platform and a control platform. An XY moving platform is slidably mounted on the machine tool spindle moving platform, and a workpiece fixture is mounted on the XY moving platform, holding a workpiece to be processed. A rotary spindle is mounted on one side of the machine tool spindle moving platform, and an electrode fixture is mounted on the side of the rotary spindle facing the workpiece to be processed, holding a micro-electrode. A height adjustment unit is fixedly mounted on the other side of the machine tool spindle moving platform. A steering unit is rotatably mounted on the side of the height adjustment unit away from the machine tool spindle moving platform, and an image acquisition module and a vision imaging module are sequentially mounted on the side of the steering unit away from the height adjustment unit.

[0006] The steering unit includes a first adapter plate fixedly connected to the height adjustment unit. An adjustable angle platform is fixedly installed on the side of the first adapter plate away from the height adjustment unit. A first adjusting screw is rotatably installed on the adjustable angle platform. An adjusting knob is installed at the top of the first adjusting screw. An adjusting block is threadedly connected to the first adjusting screw. A driven rod is rotatably connected to the end of the adjusting block away from the first adjusting screw. The end of the driven rod away from the adjusting block is rotatably connected to the second adapter plate.

[0007] An image acquisition module is fixedly installed on adapter plate 2, and a vision imaging module is installed on the side of the image acquisition module away from adapter plate 2;

[0008] The control platform includes a PC processor, an image acquisition module, a vision imaging module, and a height adjustment unit that are electrically connected to the PC processor.

[0009] Furthermore, the height adjustment unit includes a connecting plate fixed on the machine tool spindle moving platform, a second adjusting screw rotatably mounted on the connecting plate, a precision slider threaded onto the second adjusting screw, one end of the second adjusting screw connected to a motor, the motor electrically connected to a motion controller, and the motion controller electrically connected to a PC processor.

[0010] Furthermore, the image acquisition module includes an image acquisition card disposed within the visual imaging module, and the image acquisition card is electrically connected to the PC processing unit.

[0011] Furthermore, the visual imaging module includes an industrial camera and lens fixed on the adapter plate 2, and a semi-transparent mirror, a reflector, a collimating beam expander, and an LED light source fixed below the industrial camera and lens. The light emitted by the LED light source is normalized into parallel light by the collimating beam expander. The parallel light source after the collimating beam expander is reflected onto the semi-transparent mirror. A portion of the parallel light is reflected onto the workpiece to be inspected, and then transmitted to the lens via the semi-transparent mirror. The lens then magnifies the area to be inspected and images it onto the image plane. Finally, the industrial camera records and displays the image.

[0012] The LED light source is electrically connected to the LED light controller, and the LED light controller is electrically connected to the PC processor.

[0013] This invention also provides a method for using an online monitoring device for electrode loss and microstructure forming quality, comprising the following steps, which are performed sequentially:

[0014] Step S1: Fix the height adjustment unit, steering unit, image acquisition module and vision imaging module onto the machine tool spindle moving platform respectively;

[0015] Step S2: Control the height adjustment unit through the PC processor to enable it to move within a certain range of the machine tool spindle moving platform, so as to achieve clear imaging by the vision imaging module.

[0016] Step S3: In the horizontal direction, a clear image is formed on the end of the micro electrode. The image is processed by the visual imaging module using image processing technology to extract the contour of the micro electrode during the processing, obtain the contour change of the end of the micro electrode during the electrical discharge machining, and stop the electrical discharge machining process when the micro electrode shows lateral wear.

[0017] Step S4: Using the steering unit, precisely adjust the vision imaging module to the vertical direction. The xy moving platform moves the workpiece to be processed to the direct below the image acquisition module, and the image acquisition module forms a clear image of the surface of the workpiece.

[0018] Step S5: Observe the surface morphology of the workpiece through the image acquired by the image acquisition module, and evaluate whether it meets the processing requirements;

[0019] Step S6: Sequentially turn off the vision imaging module and the height adjustment unit. Control the machine tool spindle moving platform to rise through the control platform, remove the workpiece to be processed and the micro electrode, and turn off the EDM machine tool to complete the processing.

[0020] The online monitoring device and method for electrode wear and microstructure forming quality of the present invention have the following advantages: This device can monitor the morphology of the micro electrode tip in real time during micro-electrical discharge machining, and can also collect the surface morphology of the workpiece and observe its surface forming quality, so as to evaluate the processing quality during electrical discharge machining. Attached Figure Description

[0021] Figure 1 This is the usage status of the online monitoring device for electrode loss and microstructure forming quality according to the present invention. Figure 1 (A clear image of the tip of the micro-electrode in the horizontal direction) Schematic diagram of the structure.

[0022] Figure 2 This is a schematic diagram of the structure of the height adjustment unit and steering unit of the online monitoring device for electrode loss and microstructure forming quality of the present invention when they are located in the horizontal direction.

[0023] Figure 3 This is the usage status of the online monitoring device for electrode loss and microstructure forming quality according to the present invention. Figure 2 (A clear image of the surface of the workpiece to be processed in the vertical direction) Structural diagram.

[0024] Figure 4 This is a schematic diagram of the structure of the height adjustment unit and the steering unit of the online monitoring device for electrode loss and microstructure forming quality of the present invention when they are located in the vertical direction.

[0025] Figure 5This is a simplified optical path diagram for monitoring electrodes in the horizontal direction using an online monitoring device for electrode loss and microstructure forming quality according to the present invention.

[0026] Figure 6 This is a simplified optical path diagram of an online monitoring device for electrode loss and microstructure forming quality of the present invention, used to detect the morphology of a workpiece in the vertical direction.

[0027] Figure 7 This is a flowchart illustrating the usage method of an online monitoring device for electrode loss and microstructure forming quality according to the present invention.

[0028] Figure 8 This is a flowchart illustrating the setup of the motion controller in the motion control system of the online monitoring device for electrode loss and microstructure forming quality according to the present invention.

[0029] Explanation of markings in the diagram: 1. Machine tool spindle moving platform; 2. Height adjustment unit; 201. Precision slider; 202. Motion controller; 203. Connecting plate; 204. Second adjusting screw; 205. Motor; 3. Steering unit; 301. Adjustable angle platform; 302. Adjustment knob; 303. Adapter plate one; 304. First adjusting screw; 305. Adjusting block; 306. Driven rod; 4. Image acquisition module; 401. Image acquisition card; 5. Vision imaging. Modules; 501, Industrial Camera; 502, Lens; 503, Semi-transparent Mirror; 504, Reflector; 505, Collimating and Expanding Mirror; 506, LED Light Source; 507, LED Light Controller; 6, Rotary Spindle; 7, Electrode Fixture; 8, Micro-electrode; 9, Workpiece to be Processed; 10, Workpiece Fixture; 11, Control Platform; 12, XY Moving Platform; 121, X-axis Moving Platform; 122, Y-axis Moving Platform; 13, Adapter Plate II; 14, Light-shielding Plate; 15, PC Processor. Detailed Implementation

[0030] To better understand the purpose, structure, and function of this invention, the following detailed description, in conjunction with the accompanying drawings, provides an online monitoring device for electrode loss and microstructure forming quality, as well as its usage method.

[0031] like Figure 1 As shown, the present invention designs an online monitoring device for electrode loss and microstructure forming quality, which includes four modules: height adjustment unit 2, steering unit 3, image acquisition module 4, and vision imaging module 5. All four modules are to be installed on the machine tool spindle moving platform 1, so the overall optical components are miniaturized as much as possible.

[0032] An online monitoring device for electrode wear and microstructure forming quality includes an SX-100HPM electrical discharge machine. The machine tool is equipped with a machine tool spindle moving platform 1 and a control platform 11. An xy-moving platform 12 is slidably mounted on the machine tool spindle moving platform 1, enabling x, y, and z-axis movement through the cooperation between the machine tool spindle moving platform 1 and the xy-moving platform 12. A workpiece fixture 10 is mounted on the xy-moving platform 12, holding a workpiece 9 to be processed. A rotary spindle 6 is mounted on one side of the machine tool spindle moving platform 1, and an electrode fixture 7 is mounted on the side of the rotary spindle 6 facing the workpiece, holding a micro-electrode 8. The device is characterized in that a height adjustment unit 2 is fixedly mounted on the other side of the machine tool spindle moving platform 1, and a steering unit 3 is rotatably mounted on the side of the height adjustment unit 2 away from the machine tool spindle moving platform 1. The side of the steering unit 3 away from the height adjustment unit 2 is sequentially equipped with… Image acquisition module 4 and vision imaging module 5; height adjustment unit 2 is used to drive steering unit 3, image acquisition module 4 and vision imaging module 5 to move up and down along the machine tool spindle moving platform 1, so that image acquisition module 4 and vision imaging module 5 are parallel to xy moving platform 12 and face the micro electrode 8, so that image acquisition module 4 can focus on micro electrode 8; steering unit 3 is used to drive image acquisition module 4 and vision imaging module 5 to rotate around height adjustment unit 2, so that image acquisition module 4 and vision imaging module 5 are perpendicular to xy moving platform 12. When the workpiece 9 to be processed is moved to directly below image acquisition module 4, image acquisition module 4 samples and analyzes workpiece 9; xy moving platform 12 is composed of x-axis moving platform 121 and y-axis moving platform. When adjusting the position of the workpiece, x-axis moving platform 121 and y-axis moving platform can move separately, not as a whole;

[0033] Steering unit 3 includes an adapter plate 303 fixedly connected to height adjustment unit 2. A PT-QX09 adjustable angle platform 301 is fixedly mounted on the side of the adapter plate 303 away from height adjustment unit 2. A first adjusting screw 304 is rotatably mounted on the PT-QX09 adjustable angle platform 301. An adjusting knob 302 is mounted at the top of the first adjusting screw 304. An adjusting block 305 is threadedly connected to the first adjusting screw 304. A driven rod 306 is rotatably connected to the end of the adjusting block 305 away from the first adjusting screw 304. The end away from the adjusting block 305 is rotatably connected to the adapter plate 2 13. In use, rotating the adjusting knob 302 causes the first adjusting screw 304 to rotate accordingly. The adjusting block 305, which is threadedly connected to the first adjusting screw 304, can move up and down along the line of action of the thread. This will further drive the driven rod 306 to move up and down at the end connected to the adjusting block 305. The driven rod 306 is then connected to the adapter plate 2 13, which pulls the adapter plate 2 13 to flip it over, thereby flipping the horizontal image acquisition module 4 and the visual imaging module 5 to a vertical setting.

[0034] An image acquisition module 4 is fixedly installed on the adapter plate 2 13, and a visual imaging module 5 is installed on the side of the image acquisition module 4 away from the adapter plate 2 13;

[0035] The control platform 11 includes a PC processor 15, an image acquisition module 4, a vision imaging module 5, and a height adjustment unit 2, which are electrically connected to the PC processor 15.

[0036] The micro-electrode 8 is clamped on the rotating spindle 6 by the electrode clamp 7, and the workpiece 9 to be processed is fixed on the xy moving platform 12 of the EDM machine tool by the workpiece clamp 10. The workpiece 9 to be processed can be moved in the xy plane by the control platform 11, so as to realize the imaging and acquisition of the surface morphology of the workpiece 9 by the vision imaging module 5 and the image acquisition module 4.

[0037] In this embodiment, the height adjustment unit 2 includes a connecting plate 203 fixed on the machine tool spindle moving platform 1. A second adjusting screw 204 is rotatably mounted on the connecting plate 203. A precision slider 201 is threadedly connected to the second adjusting screw 204. One end of the second adjusting screw 204 is connected to a motor 205. The motor 205 is electrically connected to a motion controller 202, and the motion controller 202 is electrically connected to a PC processor 15. The motion controller 202 consists of a circuit system and a control system. The circuit system mainly includes circuit designs for hardware such as a power supply and the motor 205. The control system receives instructions from the control platform 11 and controls the movement of the precision slider 201 to adjust the distance between the lens 502 and the micro electrode 8 to achieve focusing.

[0038] In this embodiment, the image acquisition module 4 includes an image acquisition card 401 disposed within the visual imaging module 5, and the image acquisition card 401 is electrically connected to the PC processor 15.

[0039] In this embodiment, the visual imaging module 5 includes an industrial camera 501 and a lens 502 fixed on the adapter plate 2 13, and a semi-transparent mirror 503, a reflector 504, a collimating beam expander 505, and an LED light source 506 fixed below the industrial camera 501 and the lens 502. The light emitted by the LED light source 506 is normalized into parallel light by the collimating beam expander 505 to ensure that the light at various angles can be kept consistent in the imaging. The parallel light source after passing through the collimating beam expander 505 is reflected onto the semi-transparent mirror 503, and a portion of the parallel light is reflected onto the object to be inspected, and then transmitted to the lens 502 via the semi-transparent mirror 503. The lens 502 magnifies the area to be inspected and images it onto the image plane, and finally the industrial camera 501 records and displays it.

[0040] When in use, the semi-transparent and semi-reflective mirror 503 and the reflector 504 need to be fixed by other external devices, and the positions of the semi-transparent and semi-reflective mirror 503 and the reflector 504 relative to the object to be measured need to be manually adjusted at any time as needed.

[0041] The vision imaging module 5 is fixed to the steering unit 3 via the adapter plate 13. It performs real-time online monitoring and acquisition of the end morphology of the micro-electrode 8 during processing in the horizontal direction. The image acquired by the industrial camera 501 is processed using image processing technology to extract the end contour. Processing is stopped when wear begins to appear on the side of the micro-electrode 8. The adjustment knob 302 in the steering unit 3 is then adjusted to acquire and detect the surface morphology of the workpiece 9 in the vertical direction, observing the quality of the formed workpiece.

[0042] LED light source 506 is electrically connected to LED light controller 507, and LED light controller 507 is electrically connected to PC processor 15.

[0043] In this embodiment, the diameter of the microelectrode 8 is 0.21 mm.

[0044] In this embodiment, the magnification of lens 502 is 50X.

[0045] In this embodiment, the LED light source 506 is a white light source.

[0046] In this embodiment, the morphology of the 0.21mm diameter end of the microelectrode 8 needs to be monitored online, ensuring the error is within 5μm. Generally, for optically magnified samples, the ideal pixel size typically does not exceed 1 / 3 to 1 / 4 of the target local feature size. Simultaneously, the target detection accuracy during pixel estimation is usually 5 times the required specification. This means that for a 210μm microelectrode 8, within a 10mm image field of view formed after 50x magnification, to maintain a detection accuracy within the 5μm range, the pixel size should not exceed 0.01mm. According to the formula:

[0047]

[0048] Calculations show that the unidirectional pixel count of industrial camera 501 should be greater than 2000. To meet the high-precision requirements for monitoring the micro-electrode 8, a resolution of 3840*2748 is selected for industrial camera 501.

[0049] In this embodiment, in the vertical direction, the height adjustment unit 2 sends a command to the motion controller 202 through the control platform 11 to realize the movement of the precision slider 201 along the length direction of the machine tool spindle moving platform 1, so that the vision imaging module 5 can clearly image the workpiece 9 to be processed on the xy moving platform 12.

[0050] In this embodiment, a microcontroller is used to control the motion controller 202 in the height adjustment unit 2. The selected microcontroller is an IAP13 microcontroller, and the precision slider 201 is a Thorlabs MTS50-Z8. A ULN2003 is used as the driver for the microcontroller to drive the precision slider 201 to move on the machine tool spindle moving platform 1. The specific working process of the microcontroller is shown in the appendix. Figure 8 First, the required pins and registers need to be initialized and the code needs to be written so that the microcontroller can receive displacement commands and control the precision slider 201 to move up and down along the main axis by a specified range, and then stop running after moving the specified range.

[0051] A method for using an online monitoring device for electrode loss and microstructure forming quality includes the following steps, which are performed sequentially:

[0052] Step S1: Fix the height adjustment unit 2, steering unit 3, image acquisition module 4 and vision imaging module 5 onto the machine tool spindle moving platform 1 respectively;

[0053] Step S2: Control the height adjustment unit 2 through the PC processor 15 to enable it to move within a certain range of the machine tool spindle moving platform 1, so as to achieve clear imaging by the vision imaging module 5.

[0054] Step S3: In the horizontal direction, a clear image is formed on the end of the microelectrode 8. The image is processed by the visual imaging module 5 using existing image processing technology to extract the contour of the microelectrode 8 during the processing. The contour changes of the end of the microelectrode 8 during the electrical discharge machining process are obtained, and the electrical discharge machining process is stopped when the microelectrode 8 shows lateral wear. It should be noted that when monitoring the wear morphology of the microelectrode 8 in the horizontal direction, a light shield 14 needs to be placed on the other side of the microelectrode 8, that is, the side without the optical path system, so that the visual imaging module 5 can capture a clear image.

[0055] Step S4: Through the steering unit 3, the vision imaging module 5 is precisely adjusted to turn to the vertical direction, and the xy moving platform 12 moves the workpiece 9 to be processed to the direct below the image acquisition module 4. The image acquisition module 4 then performs a clear imaging of the surface of the workpiece 9 to be processed.

[0056] Step S5: Observe the surface morphology of the workpiece through the image acquired by the image acquisition module 4, and evaluate whether it meets the processing requirements;

[0057] Step S6: Sequentially turn off the vision imaging module 5, specifically the LED light controller 507 and the height adjustment unit 2, specifically the motion controller 202. Control the machine tool spindle moving platform 1 to rise through the control platform 11, remove the workpiece 9 to be processed and the micro electrode 8, and turn off the EDM machine tool to complete the processing.

[0058] It is understood that the present invention has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the invention. Furthermore, under the teachings of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present invention.

Claims

1. An online monitoring device for electrode wear and microstructure forming quality, comprising an electrical discharge machine tool, wherein a machine tool spindle moving platform (1) and a control platform (11) are provided on the electrical discharge machine tool, an xy moving platform (12) is slidably provided on the machine tool spindle moving platform (1), a workpiece fixture (10) is provided on the xy moving platform (12), and a workpiece (9) to be processed is clamped on the workpiece fixture (10); a rotary spindle (6) is provided on one side of the machine tool spindle moving platform (1), and an electrode fixture (7) is provided on the side of the rotary spindle (6) facing the workpiece to be processed, and a micro-electrode (8) is clamped on the electrode fixture (7), characterized in that, A height adjustment unit (2) is fixedly installed on the other side of the machine tool spindle moving platform (1). A steering unit (3) is rotatably installed on the side of the height adjustment unit (2) away from the machine tool spindle moving platform (1). An image acquisition module (4) and a vision imaging module (5) are sequentially installed on the side of the steering unit (3) away from the height adjustment unit (2). The steering unit (3) includes a first adapter plate (303) fixedly connected to the height adjustment unit (2). An adjustable angle platform (301) is fixedly installed on the side of the first adapter plate (303) away from the height adjustment unit (2). A first adjusting screw (304) is rotatably installed on the adjustable angle platform (301). An adjusting knob (302) is installed at the top of the first adjusting screw (304). An adjusting block (305) is threadedly connected to the first adjusting screw (304). A driven rod (306) is rotatably connected to the end of the adjusting block (305) away from the first adjusting screw (304). The end of the driven rod (306) away from the adjusting block (305) is rotatably connected to the second adapter plate (13). An image acquisition module (4) is fixedly installed on the adapter plate 2 (13), and a visual imaging module (5) is installed on the side of the image acquisition module (4) away from the adapter plate 2 (13); The control platform (11) includes a PC processor (15), an image acquisition module (4), a vision imaging module (5), and a height adjustment unit (2) which are electrically connected to the PC processor (15). The height adjustment unit (2) includes a connecting plate (203) fixed on the machine tool spindle moving platform (1), a second adjusting screw (204) is rotatably set on the connecting plate (203), a precision slider (201) is threadedly connected to the second adjusting screw (204), one end of the second adjusting screw (204) is connected to a motor (205), the motor (205) is electrically connected to a motion controller (202), and the motion controller (202) is electrically connected to a PC processor (15); The motion controller (202) consists of two parts: a circuit system and a control system. The function of the control system is to receive instructions from the control platform (11) and control the movement of the precision slider (201) to adjust the distance between the lens (502) and the micro electrode (8) in order to achieve focusing. In the vertical direction, the height adjustment unit (2) sends a command to the motion controller (202) through the control platform (11) to realize the movement of the precision slider (201) along the length direction of the machine tool spindle moving platform (1), so that the vision imaging module (5) can clearly image the workpiece (9) to be processed on the xy moving platform (12).

2. The online monitoring device for electrode loss and microstructure forming quality according to claim 1, characterized in that, The image acquisition module (4) includes an image acquisition card (401) disposed in the visual imaging module (5), and the image acquisition card (401) is electrically connected to the PC processor (15).

3. The online monitoring device for electrode loss and microstructure forming quality according to claim 1, characterized in that, The visual imaging module (5) includes an industrial camera (501) and a lens (502) fixed on the adapter plate (13), and a semi-transparent mirror (503), a reflector (504), a collimating beam expander (505), and an LED light source (506) fixed below the industrial camera (501) and the lens (502). The light emitted by the LED light source (506) is normalized into parallel light by the collimating beam expander (505), and the parallel light after passing through the collimating beam expander (505) is... The light source is reflected onto the semi-transparent mirror (503), and a portion of the parallel light is reflected onto the object to be inspected. It is then transmitted to the lens (502) via the semi-transparent mirror (503). The lens (502) magnifies the area to be inspected and images it onto the image plane. Finally, the industrial camera (501) records and displays the image. The LED light source (506) is electrically connected to the LED light controller (507), and the LED light controller (507) is electrically connected to the PC processor (15).

4. A method for using the online monitoring device for electrode loss and microstructure forming quality according to any one of claims 1-3, characterized in that, Includes the following steps, The following steps are performed sequentially: Step S1: Fix the height adjustment unit (2), steering unit (3), image acquisition module (4), and vision imaging module (5) onto the machine tool spindle moving platform (1) respectively; Step S2: Control the height adjustment unit (2) to work through the PC processor (15) so that it can move within a certain range of the machine tool spindle moving platform (1) to achieve clear imaging by the vision imaging module (5); Step S3: Perform clear imaging on the end of the micro electrode (8) in the horizontal direction, and use image processing technology to extract the contour of the micro electrode (8) during the processing of the acquired image through the vision imaging module (5), obtain the contour change of the end of the micro electrode (8) during the electrical discharge machining process, and extract the contour of the micro electrode (8) during the electrical discharge machining process. When side wear occurs, stop the EDM process; Step S4: Through the steering unit (3), precisely adjust the vision imaging module (5) to turn to the vertical direction, and the xy moving platform (12) moves the workpiece (9) to be processed to the direct below the image acquisition module (4). The image acquisition module (4) clearly images the surface of the workpiece (9); Step S5: Observe the surface morphology of the workpiece through the image acquired by the image acquisition module (4) and evaluate whether it meets the processing requirements; Step S6: Turn off the vision imaging module (5) and the height adjustment unit (2) in sequence, control the machine tool spindle moving platform (1) to rise through the control platform (11), remove the workpiece (9) and the micro electrode (8) and turn off the EDM machine tool to complete the processing.

Images