Scanning magnetic detection system

Abstract

The present disclosure provides a scanning magnetic detection system, comprising: a magnetic field generation module adapted to generate a reference magnetic field; an optical module adapted to generate an excitation laser beam and collect fluorescent photons emitted by nitrogen-vacancy color centers and wide-field illumination imaging; a sample stage having a moving and leveling function, disposed in the reference magnetic field, adapted to support the measured sample; a refrigeration module adapted to provide a temperature environment in the low-temperature-to-room-temperature range to study the magnetic behavior of the measured sample at different temperatures; and a probe module adapted to receive the excitation laser beam to excite the nitrogen-vacancy color centers in the diamond, use the microwave antenna to radiate electromagnetic waves to control the quantum state of the nitrogen-vacancy color centers, use the optical module to detect the number of fluorescent photons emitted by the nitrogen-vacancy color centers, thereby obtaining the optical detection magnetic resonance spectrum of the nitrogen-vacancy color centers, and further obtaining the magnetic field information.

Description

Technical Field

[0001] At least one embodiment of this disclosure relates to the field of materials technology, which involves testing or analyzing materials by measuring their chemical or physical properties, and particularly to a scanning magnetic detection system suitable for measuring the magnetic characteristics of samples in ultra-low temperature environments. Background Technology

[0002] In low-temperature environments, materials often exhibit novel and unusual magnetic properties, such as magnetic transitions, the emergence of magnetic structures, and superconductivity, attracting researchers' attention. To understand the magnetic structure of materials at the microscopic scale and elucidate the mechanisms of magnetic interactions, many low-temperature magnetometry techniques have been developed, such as the superconducting quantum interference device (SSQUID), which infers the magnitude of magnetic flux by detecting changes in current in a superconducting loop, but requires the measuring device and the sample to operate in a low-temperature superconducting state; a spin-polarized scanning tunneling microscope (SP-STM) has also been proposed, which obtains information on surface spin electronic states and surface morphology by detecting the tunneling current between the tip and the sample surface, but requires low-temperature, ultra-high vacuum environmental conditions and conductive samples.

[0003] In recent years, with the continuous in-depth research on diamond NV centers, a scanning magnetic imaging system based on the diamond NV center magnetic field measurement device combined with an atomic force microscope has been proposed—the Diamond NV Center Atomic Force Microscope (QDAFM). Compared with the above-mentioned magnetic field measurement methods, QDAFM achieves high spatial resolution and high sensitivity magnetic detection, while its operating environment spans from low temperature to room temperature and from vacuum to high pressure. At the same time, diamond NV centers have advantages such as long coherence time, easy initialization, and readout, giving QDAFM a significant advantage among many magnetic field measurement methods.

[0004] QDAFM at room temperature is a mature technology, but QDAFM operating at low and ultra-low temperatures still has some shortcomings in practical operation. For example, existing cryogenic QDAFM devices generally use liquid nitrogen or liquid helium for cooling, which consumes a large amount of liquid helium, and the cryogenic constant temperature environment can only be maintained for 3-6 days; if liquid helium recovery and recycling are considered, it will lead to a series of complex structural designs. Summary of the Invention

[0005] To address the technical problems in the prior art, this disclosure provides a scanning magnetic detection system that uses a cooling module to keep the sample supported on the sample stage in an ultra-low temperature environment, and uses an optical module and a probe module to obtain the intensity of the surface magnetic field of the sample in the ultra-low temperature environment.

[0006] One aspect of this disclosure provides a scanning magnetic detection system, including a magnetic field generating module, an optical module, a sample stage, a cooling module, and a probe module. The magnetic field generating module is suitable for generating a reference magnetic field; the optical module is suitable for generating an excitation laser beam; the sample stage is disposed in the reference magnetic field and is suitable for supporting the sample under test; the cooling module is suitable for maintaining the sample supported on the sample stage at any temperature within the range of ultra-low temperature to room temperature, so as to study the magnetic behavior of the sample during temperature changes; the probe module is suitable for detecting the magnetic field information on the sample surface.

[0007] According to an embodiment of this disclosure, the cooling module includes: a first enclosed chamber, at least a portion of the optical module, the probe module, and the sample stage are disposed in the first enclosed chamber, and the first enclosed space contains a closed heat-conducting gas.

[0008] According to embodiments of this disclosure, the scanning magnetic detection system further includes a support device, which includes a first support disk. The cooling module further includes a connecting tube, which includes a light guide and a cavity wall. The light guide is configured to pass through the first support disk to deliver the excitation laser beam to the probe module and to deliver the fluorescence generated by the probe module to the optical module. The cavity wall is sleeved around the light guide, and an annular cooling space communicating with the first enclosed cavity is formed between the cavity wall and the light guide.

[0009] According to embodiments of this disclosure, the cooling module further includes a cold head, a second enclosed chamber, at least one stage of cascaded cooling components, and a terminal cooling component. The cold head is mounted on the upper part of the first support plate and configured to receive compressed cooling gas. The second enclosed chamber is formed by the first support plate, a first chassis opposite to the first support plate, and a first cylinder sealed between the first support plate and the first chassis. At least one stage of cascaded cooling components is installed in the second enclosed chamber, each stage of which is configured to receive compressed cooling gas from the cold head, and the at least one stage of the cascaded cooling components is configured to progressively cool the gas. The terminal cooling component is disposed inside the second enclosed chamber and below the last stage of the cascaded cooling components to further cool the gas to an ultra-low temperature state using a throttling process of the circulating cooling gas.

[0010] According to embodiments of this disclosure, the aforementioned terminal cooling assembly includes a third chamber, a first gas duct, and a cooler. The third chamber is formed by a second support plate suitable for separating the last-stage tandem cooling assembly and the terminal cooling assembly, a second chassis opposite to the second support plate, and a second cylindrical body sealed between the second support plate and the second chassis. A light guide tube of the connecting pipe extends through a first through-hole formed on the second chassis to the first enclosed chamber, and the lower end of the chamber wall is sealed to the upper edge of the first through-hole. The first gas duct passes from the first support plate through the second enclosed chamber into the third chamber. The cooler is mounted on the second chassis, and the first gas duct is partially wound around the cooler, allowing the second chassis to be further cooled to an ultra-low temperature state via the cooler.

[0011] According to embodiments of this disclosure, the terminal cooling assembly further includes a needle valve and an adjusting rod. The needle valve is disposed on a first gas duct located within the third chamber; the adjusting rod extends from the upper part of the first support plate through the second enclosed chamber to the third chamber, and the adjusting rod is configured to adjust the opening degree of the needle valve to regulate the rate of cooling to the aforementioned cryogenic state.

[0012] According to embodiments of this disclosure, the probe module includes a first support frame, a second support frame, and a probe assembly. The first support frame is mounted on the lower part of the second chassis; the second support frame is mounted below the first support frame, and the sample stage is mounted on the lower part of the second support frame; the probe assembly is mounted on the second support frame and located above the sample stage, the light guide extends to the second support frame, and the probe assembly includes an objective lens coupled to the lower end of the light guide.

[0013] According to embodiments of this disclosure, the probe assembly further includes a probe assembly and an electromagnetic wave emitting assembly. The probe assembly is movably mounted on the second support frame, with its NV color center located below the objective lens. Fluorescence emitted by the NV color center is incident on the objective lens and input to the optical module via the light guide tube. The electromagnetic wave emitting assembly is movably mounted on the second support frame and configured to emit electromagnetic waves toward the NV color center to manipulate its spin state.

[0014] According to an embodiment of this disclosure, the probe assembly further includes a first adjustment assembly mounted on the second support frame and configured to adjust the position of the NV color center according to the state of the NV color center relative to the objective lens focal point shown in the image.

[0015] According to an embodiment of this disclosure, the probe assembly further includes a second adjustment assembly mounted on the second support frame and configured to adjust the position of the antenna according to the positional state of the antenna of the electromagnetic wave emitting assembly relative to the sample shown in the image.

[0016] According to an embodiment of this disclosure, the sample stage further includes a third adjustment assembly mounted on the second support frame and configured to adjust the spatial position and angle of the sample stage according to the position of the NV color center shown in the above image.

[0017] According to embodiments of this disclosure, the optical module includes a laser transmission unit, a fluorescence detection unit, and an imaging unit. The laser transmission unit includes a first optical component adapted to transmit the excitation laser beam generated by the laser to the light guide tube; the fluorescence detection unit includes a second optical component and a fluorescence detector, the second optical component being adapted to transmit fluorescence emitted from the NV color center and transmitted through the objective lens and light guide tube; the fluorescence detector is adapted to detect the fluorescence transmitted through the second optical component. A light-emitting component is adapted to generate wide-field illumination light, illuminating the sample stage, the partial probe assembly, and the electromagnetic wave emitting assembly through the light guide tube and objective lens. The imaging unit captures images of the area illuminated by the light-emitting component.

[0018] According to embodiments of this disclosure, the support device further includes a third support frame, a fourth support frame, a third support plate, a fourth support plate, a fifth support plate, and a sixth support plate. The third support frame is mounted on the first support plate; the fourth support frame is disposed on the third support frame; the third support plate is mounted on the upper end of the fourth support frame; the fourth support plate is disposed above the third support plate; the fifth support plate is mounted on the lower end of the fourth support frame; and the sixth support plate is mounted on the fourth support frame between the upper and lower ends. The laser transmission unit further includes a fiber optic flange mounted on the fourth support plate. One end of the fiber optic flange is connected to a laser via a first optical fiber to receive the excitation laser beam generated by the laser. The other end of the fiber optic flange is connected to a first reflector of the first optical component disposed on the sixth support plate via a second optical fiber, so that the excitation laser beam generated by the laser is input into the light guide tube via the first optical component.

[0019] According to embodiments of this disclosure, the second optical component includes a second reflector, an optical fiber connector, and a collimator. The second reflector is mounted on the third support disk and configured to reflect fluorescence transmitted by the light guide tube; the optical fiber connector is mounted on the third support disk, and a first end of the optical fiber connector receives fluorescence reflected by the second reflector; the collimator is mounted on the fourth support disk, with its upper end connected to the fluorescence detector, and its lower end extending downward below the fourth support disk and optically coupled to the second end of the optical fiber connector via a third optical fiber.

[0020] According to an embodiment of this disclosure, the second optical component further includes a fourth adjustment component, which is mounted on the fourth support plate and configured to adjust the orientation of the fiber optic connector so that all the fluorescence reflected from the second reflector is input into the fiber optic connector.

[0021] According to embodiments of this disclosure, the support device further includes a seventh support plate, a fifth support frame, and a coupling plate. The seventh support plate is mounted on the third support frame; the fifth support frame is mounted on the seventh support plate; the fourth support plate is mounted on the upper end of the fifth support frame, the fourth support frame is disposed within the space defined by the fifth support frame and suspended from the fifth support frame by a plurality of first springs; the coupling plate is disposed on the seventh support plate, the coupling plate has a second through hole, the upper end of the light guide tube passes through the second through hole from the lower part of the coupling plate and is formed in the fifth support plate such that the light guide tube is sealed to the second through hole, and the upper end of the cavity wall is sealed to the lower side of the coupling plate around the second through hole.

[0022] According to an embodiment of this disclosure, an eddy current damping device is provided between the fifth support disk and the coupling disk.

[0023] According to the scanning magnetic detection system of this disclosure, an arbitrary temperature environment within the low-temperature to room-temperature range is provided by a cooling module to study the magnetic behavior of the sample under test at different temperatures; the probe module receives an excitation laser beam to excite nitrogen-vacancy color centers in diamond, uses a microwave antenna to radiate electromagnetic waves to modulate the quantum state of nitrogen-vacancy color centers, and uses an optical module to detect the number of fluorescent photons emitted by nitrogen-vacancy color centers, thereby obtaining the photodetector magnetic resonance spectrum of nitrogen-vacancy color centers, and thus obtaining magnetic field information. Attached Figure Description

[0024] Figure 1 The diagram schematically illustrates a first-view perspective perspective of a scanning magnetic detection system according to an embodiment of the present disclosure;

[0025] Figure 2 A second perspective view of the scanning magnetic detection system according to an embodiment of the present disclosure is schematically shown;

[0026] Figure 3 A first-view perspective perspective view of a cooling module according to an embodiment of the present disclosure is shown schematically;

[0027] Figure 4 A second perspective view of a cooling module according to an embodiment of the present disclosure is schematically shown;

[0028] Figure 5 A side view of a cooling module according to an embodiment of the present disclosure is shown schematically;

[0029] Figure 6 Schematic illustration based on Figure 5 A cross-sectional view of the AA-type cooling module shown;

[0030] Figure 7 A perspective view of the connecting pipe and the first enclosed chamber according to an embodiment of the present disclosure is shown schematically;

[0031] Figure 8 A schematic side view of the connecting tube and the first enclosed chamber according to an embodiment of the present disclosure is shown.

[0032] Figure 9 Schematic illustration Figure 8 The cross-sectional view of the connecting pipe and the first enclosed chamber shown;

[0033] Figure 10 A partial perspective view of the cavity wall interior of an embodiment of this disclosure is schematically shown;

[0034] Figure 11 A first-view perspective perspective view of the internal structure of the cooling module according to an embodiment of the present disclosure is shown schematically;

[0035] Figure 12 A second-view perspective perspective view of the internal structure of the cooling module according to an embodiment of the present disclosure is shown schematically.

[0036] Figure 13 A third-view perspective view schematically illustrates the internal structure of the cooling module according to an embodiment of the present disclosure;

[0037] Figure 14 The diagram illustrates the three-stage cooling process curves of the cooling module according to an embodiment of the present disclosure.

[0038] Figure 15 A perspective view of the probe module and sample stage according to an embodiment of the present disclosure is shown schematically;

[0039] Figure 16 A first-view perspective perspective view of a probe module according to an embodiment of the present disclosure is schematically shown;

[0040] Figure 17 Schematic illustration Figure 16A partial enlarged view of part A of the probe module shown;

[0041] Figure 18 A perspective view of the probe module according to an embodiment of the present disclosure is shown schematically from a second perspective.

[0042] Figure 19 A third-view perspective perspective view of a probe module according to an embodiment of the present disclosure is schematically shown;

[0043] Figure 20 A perspective view of a probe module according to an embodiment of the present disclosure is schematically shown from a fourth perspective.

[0044] Figure 21 A schematic block diagram illustrating the working principle of the launching component according to an embodiment of the present disclosure is shown.

[0045] Figure 22 A first-view perspective perspective view of the sample stage according to an embodiment of the present disclosure is shown schematically;

[0046] Figure 23 A perspective view of the sample stage according to an embodiment of the present disclosure is shown schematically from a second perspective.

[0047] Figure 24 A third-view perspective view of a sample stage according to an embodiment of the present disclosure is shown schematically;

[0048] Figure 25 A perspective view of an optical module according to an embodiment of the present disclosure is shown schematically;

[0049] Figure 26 A first-view perspective perspective view of the internal structure of an optical module according to an embodiment of the present disclosure is shown schematically;

[0050] Figure 27 A second-view perspective perspective view schematically illustrates the internal structure of an optical module according to an embodiment of the present disclosure;

[0051] Figure 28 A first-view perspective perspective view of the internal structure of the optical module of an embodiment of the present disclosure, showing the components located on the sixth support disk;

[0052] Figure 29 The diagram schematically shows a second perspective view of the internal structure of the optical module of an embodiment of the present disclosure, with elements located on the sixth support disk.

[0053] Figure 30 A first-view perspective perspective view of the internal structure of the optical module of an embodiment of the present disclosure, showing the components located on the third support disk;

[0054] Figure 31The diagram schematically illustrates a second perspective view of the internal structure of an optical module according to an embodiment of the present disclosure, showing elements located on a third support disk.

[0055] Figure 32 Schematic illustration Figure 31 A partial enlarged view of the components located on the third support disk of the internal structure of the optical module shown;

[0056] Figure 33 A block diagram illustrating the optical path of an embodiment of the present disclosure is shown schematically; and

[0057] Figure 34 A perspective view of an eddy current damping device according to an embodiment of the present disclosure is shown schematically.

[0058] Explanation of reference numerals in the attached figures:

[0059] 1-Magnetic field generation module;

[0060] 2-Optical module;

[0061] 21-Laser transmission unit;

[0062] 211 - First optical component;

[0063] 2111-First reflecting mirror; 2112-First dichroic mirror; 2113-Fourth optical coupler;

[0064] 212-Fiber optic flange; 213-Reflector assembly;

[0065] 22-Fluorescence detection unit;

[0066] 221 - Second optical component;

[0067] 2211-Second reflecting mirror; 2212-Fiber optic connector; 2213-Collider; 2214-Fourth adjustment assembly; 2215-Third reflecting mirror; 2216-Second convex lens; 2217-Fiber optic Z-axis displacement stage; 2218-Fiber optic X-axis displacement stage; 2219-Fiber optic Y-axis displacement stage; 2220-Second dichroic mirror; 2221-Fourth reflecting mirror; 2222-First filter; 2223-First convex lens; 2224-Fifth reflecting mirror;

[0068] 222-Fluorescence detector;

[0069] 23-Light-emitting component; 24-Beam splitter; 25-Sixth reflecting mirror; 26-Fluorescence; 27-Camera unit;

[0070] 3-Sample stage;

[0071] 31 - Sample support stage;

[0072] 32 - Third Adjustment Component;

[0073] 321 - Second cantilever; 322 - Ninth support plate; 323 - Sample support frame;

[0074] 324-Third Z-axis driver; 3241-Second actuator; 3242-Second moving block;

[0075] 325 - Third elastic component; 326 - First Z-axis scanning stage; 327 - First XY-axis scanning stage; 328 - First XY-axis displacement stage;

[0076] 4-Cooling module;

[0077] 41 - First enclosed chamber;

[0078] 411 - First barrel; 412 - Second barrel;

[0079] 42-Connecting pipe;

[0080] 421 - Light guide tube;

[0081] 422 - Cavity wall; 4221 - Heat-conducting gas inlet / outlet;

[0082] 423 - Sealing joint;

[0083] 4231 - Corrugated pipe; 4232 - Joint;

[0084] 424 - Annular heat sink; 425 - Positioning block; 426 - Lifting sling;

[0085] 43-Cold head;

[0086] 44 - Second closed chamber;

[0087] 441 - First chassis; 442 - First cylinder;

[0088] 45 - Series cooling unit;

[0089] 451 - Second cooling assembly;

[0090] 4511 - First cooling chamber; 4512 - First cooling plate; 4513 - First air intake pipe;

[0091] 4514 - First exhaust pipe; 4515 - First cooling device; 4516 - First cylindrical section;

[0092] 4517 - First elastic fin; 4518 - First auxiliary cooler;

[0093] 452 - Third cooling component;

[0094] 4521 - Second cooling chamber; 4522 - Second cooling plate; 4523 - Second air intake pipe;

[0095] 4524 - Second exhaust pipe; 4525 - Second cooling device; 4526 - Second cylinder section;

[0096] 4527 - Second elastic fin; 4528 - Second auxiliary cooler;

[0097] 46 - Terminal cooling components;

[0098] 461 - Third Chamber;

[0099] 462-First cooling assembly; 4621-First air duct; 4622-Cooler;

[0100] 463 - Second cylinder; 464 - Needle valve; 465 - Adjusting rod;

[0101] 466 - Second Chassis;

[0102] 48-Second vibration damping device; 49-Circulation pump;

[0103] 5-Probe module;

[0104] 51-First support frame; 511-First elastic component; 52-Second support frame; 521-Eighth support plate; 522-First cantilever; 53-Probe assembly; 531-Objective lens;

[0105] 54-Probe assembly; 541-NV color center; 542-First adjustment assembly; 5421-First Z-axis displacement stage; 5422-First Y-axis displacement stage; 5423-First X-axis displacement stage; 5424-Second elastic component; 5425-First moving block; 5426-First actuator;

[0106] 55-Electromagnetic wave transmitting assembly; 551-Transmitting antenna; 552-Second adjustment assembly; 5521-Second Y-axis displacement stage; 5522-Second Z-axis displacement stage; 5523-Second X-axis displacement stage; 544-Electrical connector; 545-Quartz tuning fork; 546-Objective lens XY-axis scanning stage;

[0107] 6-Support device; 61-First support plate; 62-Third support frame; 63-Fourth support frame; 64-Third support plate; 65-Fourth support plate; 66-Fifth support plate; 67-Sixth support plate; 68-Seventh support plate; 69-Fifth support frame; 610-Coupled plate; 611-Third elastic component; 612-Third cylinder; 613-Eleventh support plate; 614-Base; 615-Sixth support frame; 616-Tenth support plate;

[0108] 7-Eddy current damping device; 71-Metal damping component; 72-Magnet;

[0109] 8-First vibration damping device. Detailed Implementation

[0110] To make the objectives, technical solutions, and advantages of this disclosure clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings. However, this disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this disclosure to those skilled in the art. In the accompanying drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated, and the same reference numerals denote the same elements throughout.

[0111] The embodiments of the present disclosure will now be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the disclosure. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the present disclosure for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concepts of the present disclosure.

[0112] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0113] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0114] To facilitate understanding of the technical solutions disclosed herein by those skilled in the art, the following technical terms are explained.

[0115] When using expressions such as "at least one of A, B, and C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.). Similarly, when using expressions such as "at least one of A, B, or C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0116] Figure 1 A first-view perspective perspective view of a scanning magnetic detection system according to an embodiment of the present disclosure is schematically shown. Figure 2 A second-view perspective perspective view of a scanning magnetic detection system according to an embodiment of the present disclosure is shown schematically.

[0117] As one aspect of this disclosure, a scanning magnetic detection system is provided, such as... Figure 1 and Figure 2 As shown, the system includes a magnetic field generating module 1, an optical module 2, a sample stage 3, a cooling module 4, and a probe module 5. The magnetic field generating module 1 is used to generate a reference magnetic field. The optical module 2 is used to generate an excitation laser beam. The sample stage 3 is positioned within the reference magnetic field and is used to support the sample under test. The cooling module 4 is used to maintain the sample supported on the sample stage at any temperature within the range of ultra-low temperature to room temperature, in order to study the magnetic behavior of the sample during temperature changes. The probe module 5 is used to detect the magnetic field information on the sample surface.

[0118] According to the scanning magnetic detection system of this disclosure, the magnetic field generation module is suitable for generating a reference magnetic field; the optical module is suitable for generating an excitation laser beam and collecting fluorescent photons emitted by nitrogen-vacancy centers and wide-field illumination imaging; the sample stage has a moving and leveling function, is set in the reference magnetic field, and is suitable for supporting the sample under test; the cooling module is suitable for providing a temperature environment in the range of low temperature to room temperature to study the magnetic behavior of the sample under test at different temperatures; and the probe module is suitable for receiving the excitation laser beam to excite nitrogen-vacancy centers in diamond, using a microwave antenna to radiate electromagnetic waves to modulate the quantum state of nitrogen-vacancy centers, using the optical module to detect the number of fluorescent photons emitted by nitrogen-vacancy centers, thereby obtaining the optical detection magnetic resonance spectrum of nitrogen-vacancy centers, and thus obtaining magnetic field information.

[0119] According to embodiments of this disclosure, ultra-low temperature refers to the final cooling temperature of the cooling module, which can provide a constant temperature environment at any temperature within the range of ultra-low temperature to room temperature, such as 1.5 Kelvin (K), 4K, 70K, 200K, etc.

[0120] According to embodiments of this disclosure, the optically detected magnetic resonance (ODMR) spectrum of the NV color center is obtained by radiating electromagnetic waves through a microwave antenna and detecting the number of fluorescent photons emitted by the NV color center through an optical module, thereby obtaining the magnetic field information of the surface of the sample to be tested.

[0121] According to embodiments of this disclosure, the magnetic field generating module 1 includes a superconducting magnet for generating a uniform reference magnetic field in space that is adjustable in size and direction.

[0122] In one illustrative embodiment, optical module 2 generates a green excitation laser beam, and the NV color center emits red fluorescent photons, which are collected and counted by a fluorescence detection unit.

[0123] According to embodiments of this disclosure, the sample under test undergoes physical phenomena such as magnetic phase transition, magnetic structure generation, and superconductivity during temperature variation, resulting in changes in the stray magnetic field around the sample.

[0124] Figure 3 The illustration schematically shows a first-view perspective perspective view of a cooling module according to an embodiment of the present disclosure. Figure 4 This schematically illustrates a second perspective view of a cooling module according to an embodiment of the present disclosure. Figure 5 A side view of a cooling module according to an embodiment of the present disclosure is schematically shown. Figure 6 Schematic illustration Figure 5 The AA section view of the cooling module shown.

[0125] like Figure 5 As shown, Figure 5 It also includes a first support plate 61 and a tenth support plate 616, as well as a bellows located on the first support plate 61.

[0126] According to embodiments of this disclosure, such as Figures 1 to 6 As shown, the scanning magnetic detection system also includes a support device 6, which includes a first support disk 61. Figures 3-6 As shown, the cooling module 4 also includes a connecting tube 42, which includes a light guide tube 421 and a cavity wall 422. The light guide tube 421 is configured to pass through the first support plate 61 to deliver the excitation laser beam to the probe module 5 and to deliver the fluorescence generated by the probe module 5 to the optical module 2. The cavity wall 422 is sleeved around the light guide tube 421, and an annular cooling space is formed between the cavity wall 422 and the light guide tube 421, which communicates with the first closed cavity 41 (described in detail later).

[0127] According to embodiments of this disclosure, such as Figures 1 to 2 As shown, the support device 6 also includes a base 614 and a sixth support frame 615. The magnetic field generating module 1 is mounted on the base 614. The optical module 2, sample stage 3, cooling module 4, and probe module 5 are mounted on the base 614 via the sixth support frame 615.

[0128] Furthermore, such as Figures 1 to 2 As shown, the sixth support frame 615 is configured as a liftable support, and the sample stage 3 and probe module 5 are configured to extend or extend into the magnetic field generating module 1 as the sixth support frame 615 rises or falls.

[0129] Figure 7 A perspective view of the connecting pipe and the first enclosed chamber according to an embodiment of the present disclosure is shown schematically. Figure 8 A schematic side view of the connecting pipe and the first enclosed chamber according to an embodiment of the present disclosure is shown. Figure 9 Schematic illustration Figure 8 The diagram shows a cross-sectional view of the connecting pipe and the first enclosed chamber. Figure 10 A partial perspective view of the cavity wall interior of an embodiment of the present disclosure is shown schematically.

[0130] According to embodiments of this disclosure, such as Figures 3 to 10 As shown, the connecting tube 42 also includes a sealing joint 423, suitable for sealing the upper end of the cavity wall 422 to the periphery of the light guide tube 421. Figures 6 to 9 As shown, the lower end of the light guide tube 421 extends from the cavity wall 422 into the first closed chamber probe module. The annular cooling space is connected to the interior of the probe module 5. The terminal cooling component transfers the cooling energy to the sample stage through the closed heat-conducting gas, so that the sample to be tested in the probe module 5 is cooled to an ultra-low temperature.

[0131] According to embodiments of this disclosure, such as Figures 7 to 10 As shown, the sealing joint 423 includes a bellows 4231 and a joint 4232. (As...) Figures 7 to 9 As shown, the upper end of the bellows 4231 is sealed to the seventh support disk 68 of the optical module 2 (described in detail later). The upper end of the joint 4232 is sealed to the lower end of the bellows 4231, and the lower end of the joint 4232 is sealed to the upper end of the cavity wall 422.

[0132] According to embodiments of this disclosure, such as Figure 9 and Figure 10 As shown, the connecting tube 42 also includes at least one annular heat sink 424 disposed between the light guide tube 421 and the cavity wall 422 to transfer the cooling energy of the terminal cooling component to the light guide tube 421.

[0133] According to embodiments of this disclosure, such as Figure 9 and Figure 10As shown, the connecting tube 42 also includes at least one annular positioning block 425, which is disposed between the light guide tube 421 and the cavity wall 422 to keep the cavity wall 422 and the light guide tube 421 coaxially arranged.

[0134] According to embodiments of this disclosure, such as Figure 9 and Figure 10 As shown, the connecting tube 42 also includes multiple slings 426 configured to suspend the annular heat sink 424 and the positioning block 425 onto the joint 4232. This allows the annular heat sink 424 and the positioning block 425 to correspond to the light guide tube 421 and / or the cavity wall 422, while maintaining the annular heat sink 424 and the positioning block 425 within a predetermined height range.

[0135] According to embodiments of this disclosure, such as Figures 6 to 8 As shown, the cavity wall 422 is provided with a heat-conducting gas inlet and outlet 4221.

[0136] According to embodiments of this disclosure, optical signals are transmitted between the optical module and the probe module via a light guide. In one illustrative embodiment, the optical signals refer to the green laser generated by the optical module, the yellow illumination light generated by the illumination component, the red fluorescent photons emitted by the nitrogen-vacancy color center in the probe module, and the yellow light reflected by the object to be illuminated.

[0137] In one illustrative embodiment, the light guide tube is made of carbon fiber. On the one hand, the high rigidity of the carbon fiber tube ensures a rigid connection between the optical module and the probe module, preventing the relative position of the two modules from shifting during the cooling process. On the other hand, the poor thermal conductivity of the carbon fiber tube prevents heat from being conducted along the carbon fiber tube wall to the probe module, thus affecting the temperature state of the sample under test.

[0138] According to embodiments of this disclosure, the first sealed chamber is a closed chamber, and at least a portion of the optical module, probe module, and sample stage are located within the first sealed chamber. The first sealed chamber is filled with a thermally conductive gas, which conducts the cooling energy of the terminal cooling component to the sample stage, thereby cooling the sample to be tested located on the sample stage.

[0139] According to embodiments of this disclosure, a petal-shaped annular heat sink is connected to the terminal cooling assembly by a soft copper braided strip to cool it, which can effectively prevent heat from the upper part of the annular heat sink located in the first enclosed chamber from radiating to its lower part.

[0140] According to embodiments of this disclosure, the positioning block, the limiting sling, and the light guide tube are used to make the sling parallel to the light guide tube, which is beneficial for adjusting the light guide tube to be coaxial with the cavity wall.

[0141] According to embodiments of this disclosure, such as Figures 3 to 9 As shown, the cooling module 4 includes a first enclosed chamber 41, such as... Figure 7As shown, the probe module 5 and the sample stage 3 are disposed in the first sealed chamber 41, which contains sealed thermally conductive gas input through the thermally conductive gas inlet / outlet 4221. In this way, both the connecting pipe and the first sealed chamber 41 contain sealed thermally conductive gas, and the terminal cooling component conducts cold energy through the sealed thermally conductive gas to create an ultra-low temperature environment (e.g., 1.5K) in the first sealed chamber 41.

[0142] In one illustrative embodiment, the heat-conducting gas is helium. At room temperature, the pressure of helium filling the first sealed chamber 41 is approximately 10 mbar. As the series cooling components and terminal cooling components operate, the helium gradually cools down to a stable state, maintaining a low-temperature constant temperature environment within the first sealed chamber.

[0143] Figure 11 This schematically illustrates a first-view perspective perspective view of the internal structure of a cooling module according to an embodiment of the present disclosure. Figure 12 This schematically illustrates a second-view perspective perspective view of the internal structure of the cooling module according to an embodiment of the present disclosure. Figure 13 A third-view perspective view of the internal structure of the cooling module according to an embodiment of the present disclosure is shown schematically.

[0144] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the cooling module 4 also includes a cold head 43, a second chamber 44, at least one series-connected cooling assembly 45, and a terminal cooling assembly 46. The cold head 43 is mounted on the upper part of the first support plate 61 and is configured to receive compressed refrigerant gas. The second enclosed chamber 44 is formed by the first support plate 61, a first base plate 441 opposite to the first support plate, and a first cylinder 442 sealed between the first support plate 61 and the first base plate 441. At least one series-connected cooling assembly 45 is installed in the second enclosed chamber 44, each series-connected cooling assembly being configured to receive compressed refrigerant gas from the cold head 43 and cool it step by step through the adiabatic expansion of the gas. The terminal cooling assembly 46 is disposed inside the second enclosed chamber 44 and below the last series-connected cooling assembly, further cooling the gas to an ultra-low temperature state using a throttling process of the circulating refrigerant gas.

[0145] According to an embodiment of this disclosure, the second sealed chamber 44 is in a vacuum state to prevent external heat from being transferred to the first sealed chamber 41.

[0146] According to embodiments of this disclosure, such as Figures 1 to 2As shown, the refrigeration module 4 also includes a first gas supply assembly and a second gas supply assembly. The first gas supply assembly includes a compressor (not shown), a heat exchanger (not shown), and a rotary valve. The rotary valve is mounted on the first support plate 61 and is located between the cold head 43 and the compressor. The rotary valve serves as the inlet for high-pressure compressed refrigeration gas and the outlet for low-pressure compressed refrigeration gas. The compressed refrigeration gas is circulated and cooled in at least one stage of series refrigeration assembly through the cold head 43. The second gas supply assembly includes a circulation pump 49 (e.g., a scroll pump). The circulating refrigeration gas is driven by the circulation pump 49. The circulating refrigeration gas is liquefied after entering at least the last stage of series refrigeration assembly. After being throttled by the needle valve 464, it is further cooled and enters the cooler 4622 to cool the second chassis 466 to an ultra-low temperature state. After passing through the cooler 4622, the circulating refrigeration gas returns to the circulation pump 49 to enter the next cycle. After multiple cycles, the temperature of the terminal refrigeration assembly reaches a stable state and is maintained at an ultra-low temperature state.

[0147] According to embodiments of this disclosure, such as Figures 1 to 2 As shown, the second air supply assembly also includes a bellows, through which the vortex pump and the first air guide pipe 4621 are connected to reduce the impact of external vibrations on the scanning magnetic detection system. Furthermore, the first support plate 61 is also provided with multiple support blocks, which are used to support the bellows between the circulation pump 49 and the first air guide pipe.

[0148] In one illustrative embodiment, the compressed cooling gas is high-purity helium (99.999% purity). The high-purity helium (99.999% purity) compressed by an external compressor enters the cold head 43 through a high-pressure helium pipe, undergoes adiabatic expansion cooling, and then the low-pressure helium returns to the compressor from the cold head 43 through a low-pressure helium pipe. After being compressed by the compressor, the heat generated by the compression is carried away by an external heat exchanger. After multiple cycles, it is cooled to a low temperature.

[0149] According to embodiments of this disclosure, such as Figure 6 As shown, the first enclosed chamber 41 is surrounded by the second chassis 466 and the first barrel 411, and the first barrel 411 is configured to be detachably connected to the second chassis 466.

[0150] According to embodiments of this disclosure, such as Figure 6 As shown, the first barrel 411 is wrapped with multiple detachable second barrels 412. The second barrels 412 and the first barrel 411 are in a vacuum state. The multiple layers of second barrels can effectively prevent external heat from being conducted into the first closed chamber 41.

[0151] According to an embodiment of this disclosure, before using a scanning magnetic detection system to detect a sample, it is necessary to remove multiple second barrels 412 from the first barrel 411, place the sample on the sample stage 3, and then seal and install the first barrel 411 and multiple second barrels 412 in sequence.

[0152] According to embodiments of this disclosure, such as Figure 6 and Figures 11 to 13 As shown, at least one series cooling assembly 45 includes a second cooling assembly 451 and a third cooling assembly 452. The second cooling assembly 451 is configured to cool the first cooling plate 4512 therein to a first temperature of 40K, and the third cooling assembly is configured to cool the second cooling plate 4522 therein to a second temperature of 4K.

[0153] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the second cooling assembly 451 includes a first cooling chamber 4511, a first cooling plate 4512, a first air inlet pipe 4513, and a first air outlet pipe 4514. The first cooling chamber 4511 is disposed below the first support plate 61, and the first cooling plate 4512 is disposed below the first cooling chamber 4511. The first cooling chamber 4511 is configured to cool the first cooling plate 4512. The first air inlet pipe 4513 delivers compressed cooling gas from the first air supply assembly to the first cooling chamber 4511, and the first air outlet pipe 4514 delivers compressed cooling gas from the first cooling chamber 4511 to the first air supply assembly.

[0154] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the second cooling assembly 451 further includes a first cooling conduction device 4515, which includes a first cylindrical portion 4516 and a plurality of first elastic fins 4517. The first cylindrical portion 4516 is connected to the outside of the first cooling cavity 4511, and the plurality of first elastic fins 4517 extend from the first cylindrical portion 4516 to the surface of the first cooling plate 4512. The first elastic fins 4517 are configured to conduct the cold energy of the first cooling cavity 4511 to the first cooling plate 4512 and to dampen the vibration of the first cooling cavity 4511 on the first cooling plate 4512.

[0155] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the second cooling assembly 451 also includes a first auxiliary cooler 4518, which is installed on the first cooling plate 4512. The first air guide pipe 464 from the second air supply assembly is partially wrapped around the first auxiliary cooler 4518, so that the first cooling plate cools the first air guide pipe 464 through the first auxiliary cooler 4518.

[0156] According to embodiments of this disclosure, such as Figures 11 to 13As shown, the third cooling assembly 452 includes a second cooling chamber 4521, a second cooling plate 4522, a second air inlet pipe 4523, and a second air outlet pipe 4524. The second cooling chamber 4521 is located below the first cooling plate 4512, and the second cooling plate 4522 is located below the second cooling chamber. The second cooling chamber 4521 is configured to cool the second cooling plate 4522, which serves as a second support plate for the terminal cooling assembly. The second air inlet pipe 4523 delivers compressed cooling gas from the cold head, pre-cooled by the second cooling assembly, to the second cooling chamber 4521. The second air outlet pipe 4524 delivers the compressed cooling gas from the second cooling chamber 4521 through the first cooling chamber 4511 to the first air supply assembly.

[0157] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the first air guide pipe 4621 is partially wrapped around the second air intake pipe 4523, so that the second air intake pipe 4523 cools the first air guide pipe 4621.

[0158] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the third cooling assembly 452 also includes a second cooling device 4525, which includes a second cylindrical portion 4526 and a plurality of second elastic fins 4527. The second cylindrical portion is connected to the outside of the second cooling cavity, and the plurality of second elastic fins 4527 extend from the second cylindrical portion 4526 to the surface of the second cooling plate 4522. The second elastic fins 4527 are configured to conduct the cold energy of the second cooling cavity 4521 to the second cooling plate 4522 and to reduce the vibration of the second cooling cavity 4521 on the second cooling plate 4522.

[0159] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the third cooling assembly 452 also includes a second auxiliary cooler 4528, which is installed on the second cooling plate 4522. The first air duct 4621 from the second air supply assembly is partially wrapped around the second auxiliary cooler 4528, so that the second cooling plate cools the first air duct 4621 through the second auxiliary cooler 4518.

[0160] According to embodiments of this disclosure, such as Figures 11 to 13As shown, the terminal cooling assembly 46 includes a third chamber 461 and a first cooling assembly 462. The first cooling assembly 462 includes a first gas duct 4621 and a cooler 4622. The third chamber 461 is formed by a second support plate (i.e., a second cooling plate 4522) suitable for separating the last-stage tandem cooling assembly and the terminal cooling assembly, a second base plate 466 opposite to the second support plate, and a second cylinder 463 sealed between the second support plate and the second base plate 466. A light guide tube 421 of the connecting tube extends through a first through hole formed on the second base plate 467 to the first closed chamber 41. The lower end of the chamber wall is sealed to the upper edge of the first through hole. The sealed heat-conducting gas flows into the first closed chamber through the first through hole outside the light guide tube. The first gas duct 4621 enters the third chamber 461 from the first support plate 61 through the second closed chamber 44. Cooler 4622 is mounted on second chassis 466. First air pipe 4621 is partially wrapped around cooler 4622. First air pipe passes through cooler to further cool second chassis to ultra-low temperature state.

[0161] According to embodiments of this disclosure, the terminal cooling assembly 46 further includes a needle valve 464 and an adjusting rod 465. The needle valve 464 is disposed on a first vent pipe 4621 located in the third chamber, and the adjusting rod 465 extends from the upper part of the first support plate 61 through the second enclosed chamber 44 to the third chamber 461. The adjusting rod 465 is configured to adjust the opening of the needle valve 464 to regulate the rate of cooling to an ultra-low temperature state.

[0162] According to an embodiment of the present disclosure, the third chamber 461 is connected to the second enclosed chamber 44 and is disposed within the second enclosed chamber 44.

[0163] According to embodiments of this disclosure, such as Figures 1 to 2 As shown, the scanning magnetic detection system also includes a tenth support disk 616, which is installed at the lower part of the first support disk 61. The first enclosed cavity 41 passes through the tenth support disk 616. A plurality of first vibration damping devices 47 are provided between the first support disk 61 and the tenth support disk 64 to prevent external vibrations from being transmitted to the optical module 2.

[0164] In another illustrative embodiment, the first vibration damping device is an active vibration isolator.

[0165] According to embodiments of this disclosure, such as Figures 11 to 13 As shown, the cold head 43 is connected to the first support plate 61 by a second vibration damping device 48 to isolate the vibration of the cold head 43 from the first support plate 61.

[0166] In one illustrative embodiment, the second damping device includes a bellows or a spring.

[0167] Figure 14The diagram illustrates the three-stage cooling process curve of the cooling module according to an embodiment of the present disclosure.

[0168] According to embodiments of this disclosure, such as Figure 14 As shown, the horizontal axis represents time (h), and the vertical axis represents temperature (K). Figure 14 As shown, the cooling temperature of the first cooling plate 4512 is stable at 54.8K, the cooling temperature of the second cooling plate 4522 is stable at 3.6K, and the cooling temperature of the second chassis 466 is stable at 1.5K.

[0169] According to embodiments of this disclosure, a dry cooling method is provided for the cooling module, which consists of a multi-stage series cooling assembly and a terminal cooling assembly. The multi-stage series cooling assembly further cools the temperature based on the temperature state of the preceding stage cooling assembly, and the terminal cooling assembly further cools the temperature to an ultra-low temperature state based on the temperature state of the last stage series cooling assembly. Since dry cooling involves gas circulation, which can cause significant vibration, vibration damping measures are also designed into the cooling module.

[0170] In one illustrative experiment, the multi-stage series cooling assembly uses a two-stage pulse tube refrigerator, with each stage using helium as the cooling gas and utilizing the adiabatic expansion process of helium to cool down; the terminal cooling assembly uses a throttling circulation device, using helium as the circulating cooling gas and utilizing the throttling process of helium to cool down.

[0171] Figure 15 A perspective view of the probe module and sample stage according to an embodiment of the present disclosure is schematically shown.

[0172] According to embodiments of this disclosure, such as Figure 15 As shown, the probe module includes a first support frame 51, a second support frame 52, and a probe assembly 53. The first support frame 51 is mounted on the lower part of the second chassis 466, the second support frame 52 is mounted below the first support frame, and the sample stage 3 is mounted on the lower part of the second support frame 52. The probe assembly 53 is mounted on the second support frame 52 and located above the sample stage 3. A light guide tube 421 extends to the second support frame 52, and the probe assembly 53 includes an objective lens 531 attached to the lower end of the light guide tube 421.

[0173] According to an embodiment of this disclosure, the second support frame 52 is connected to the first support frame 51 via a plurality of first elastic members 511, and the lower end of the light guide tube is attached to the second support frame 52.

[0174] Figure 16 The diagram schematically illustrates a first-view perspective perspective view of a probe module according to an embodiment of the present disclosure. Figure 17 Schematic illustration Figure 16 A partially enlarged view of part A of the probe module shown. Figure 18A perspective view of the probe module according to an embodiment of the present disclosure is schematically shown from a second angle. Figure 19 This schematically illustrates a third-view perspective view of a probe module according to an embodiment of the present disclosure. Figure 20 A fourth-view perspective perspective view of a probe module according to an embodiment of the present disclosure is schematically shown.

[0175] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the probe assembly 53 also includes a probe assembly 54 and an electromagnetic wave emitting assembly 55. The probe assembly 54 is movably mounted on the second support frame 52, as shown... Figure 17 As shown, the NV color center 541 of the probe assembly 54 is located at the focal point of the objective lens 531. The electromagnetic wave emitting assembly 55 is movably mounted on the second support 52 and is configured to emit electromagnetic waves toward the NV color center 541 to manipulate the spin state of the NV color center.

[0176] A diamond nitrogen-vacancy (NV-) color center is a structure in which one of two adjacent carbon (C) sites is replaced by a nitrogen (N) atom, while the other is missing. The N atom provides two electrons, and the three adjacent C atoms each provide one unpaired electron, plus one additional captured electron, for a total of six electrons. This structure carries a negative charge and is also denoted as NV. - In this disclosure, NV color heart specifically refers to NV. - .

[0177] According to embodiments of this disclosure, the optical module can detect the number of fluorescent photons emitted by the NV color center, and the electromagnetic wave emitting component can emit electromagnetic waves of different frequencies to the NV color center via a microwave antenna. By recording the electromagnetic wave frequency and the corresponding number of fluorescent photons at that frequency, the photodetector magnetic resonance spectrum of the NV color center can be obtained, thereby obtaining magnetic field information.

[0178] According to embodiments of this disclosure, such as Figure 17 As shown, the probe assembly 54 consists of a diamond containing an NV color center 541 bonded to a quartz tuning fork 545. The NV color center 541 serves as a spin sensing unit to detect the magnetic field. The quartz tuning fork is a piezoelectric material. Applying an excitation voltage to the quartz tuning fork through electrode leads can achieve the vibration of the quartz tuning fork. At the same time, monitoring the feedback voltage can determine the amplitude of the quartz tuning fork's vibration.

[0179] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the second support frame 52 includes an eighth support plate 521 and a plurality of first cantilever arms 522. The eighth support plate is mounted on the light guide tube 421, and the plurality of first cantilever arms 522 extend downward from the lower part of the eighth support plate 521. The lower end of the first elastic member 511 is connected to the first cantilever arms 522.

[0180] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the probe assembly 54 also includes a first adjustment assembly 542, mounted on a plurality of first cantilever 522 of the second support 52, and configured to adjust the position of the NV color center according to the objective focal position relative to the positional state of the sample as shown in the image.

[0181] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the first adjustment assembly includes a first Z-axis displacement stage 5421, a first Y-axis displacement stage 5422, and a first X-axis displacement stage 5423. The first Z-axis displacement stage 5421 is mounted on the second support frame 52 and configured to generate displacement in the Z-axis direction relative to the second support plate. The first Y-axis displacement stage 5422 is mounted on the first Z-axis displacement stage to move along with it in the Z-axis direction, and is configured to generate displacement in the Y-axis direction relative to the second support plate. The first X-axis displacement stage 5423 is mounted on the first Y-axis displacement stage to move along with it in the Y-axis direction, and is configured to generate displacement in the X-axis direction relative to the second support plate. The first support assembly is mounted on the first X-axis displacement stage to move along with it in the X-axis direction.

[0182] According to embodiments of the present disclosure, each of the first Y-axis displacement stage and the first X-axis displacement stage includes a piezoelectric ceramic component.

[0183] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the first Z-axis displacement stage includes a first moving block 5425 and a first actuator 5426. The first moving block 5425 is suspended below the second support frame 52 by a second elastic member 5424, and the first Y-axis displacement stage is mounted on the first moving block 5425. The first actuator 5426 is mounted on the second support frame 52 and is configured to drive the first moving block 5425 to move in the Z-axis direction against the elastic force of the second elastic member 5424.

[0184] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the second elastic component 5424 is installed on both sides of the first moving block 5425. Due to the heavy load of the first moving block 5425, the first Z-axis displacement stage will not be able to move even at the maximum driving voltage. Therefore, the second elastic component 5424 is connected to both sides of the first moving block. The second elastic component is in a stretched state to balance the load on the first Z-axis displacement stage. A first actuator 5426 is added. The extension and retraction of the first actuator 5426 realizes the movement of the probe assembly in the Z-axis direction and moves with the first moving block as the guide.

[0185] According to embodiments of this disclosure, such as Figures 15 to 20As shown, the probe assembly also includes a second adjustment assembly 552, mounted on a plurality of first cantilever 522 of the second support frame 52, and configured to adjust the position of the transmitting antenna 551 of the electromagnetic wave transmitting assembly 55 relative to the NV color center according to the position state of the transmitting antenna 551 of the electromagnetic wave transmitting assembly 55 shown in the image.

[0186] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the second adjustment assembly 552 includes a second Y-axis displacement stage 5521, a second Z-axis displacement stage 5522, and a second X-axis displacement stage 5523. The second Y-axis displacement stage 5521 is mounted on the second support frame 52 and is configured to cause the electromagnetic wave emitting assembly to displace in the Y-axis direction relative to the second support frame 52. The second Z-axis displacement stage 5522 is mounted on the second Y-axis displacement stage to displace in the Y-axis direction along with the second Y-axis displacement stage, and the second Z-axis displacement stage is configured to cause displacement in the Z-axis direction relative to the second support plate.

[0187] According to embodiments of this disclosure, each of the second Z-axis displacement stage, the second Y-axis displacement stage, and the second X-axis displacement stage includes a piezoelectric ceramic component.

[0188] According to embodiments of this disclosure, such as Figures 15 to 20 As shown, the probe assembly also includes: an objective lens XY-axis displacement stage 546, which is mounted on the lower part of the second support frame 52 and axially aligned with the light guide tube 421; an objective lens 531 is mounted on the lower part of the objective lens XY-axis scanning stage 546; and the objective lens XY-axis scanning stage is configured to drive the objective lens to scan in the XY-axis direction.

[0189] According to embodiments of this disclosure, such as Figure 16 As shown, the X-axis and Y-axis represent two mutually perpendicular directions in a plane that is horizontal to the second chassis 466, and the Z-axis represents a direction perpendicular to the second chassis 466.

[0190] According to embodiments of this disclosure, the objective lens XY-axis scanning stage 546 employs piezoelectric ceramic components, enabling nanometer-level movement precision.

[0191] According to embodiments of this disclosure, the objective lens is used to converge the excitation laser beam and collect the fluorescence emitted by the NV color center. Since the NV color center is atomically small, the objective lens is precisely moved using the objective lens XY axis scanning stage 546 so that the focal point of the objective lens coincides with the NV color center.

[0192] Figure 21 A block diagram illustrating the working principle of the transmitting component according to an embodiment of the present disclosure is shown.

[0193] According to embodiments of this disclosure, such as Figure 21As shown, the electromagnetic wave transmitting assembly 55 also includes an external wave source, an external microwave switch, an external amplifier, and an external matching resistor. The output waveform, amplitude, and frequency parameters of the external wave source are set, and the electromagnetic wave transmission is controlled by the external microwave switch. After being amplified by the external amplifier, the electromagnetic wave enters the second enclosed chamber 44 through the electrical flange interface on the first support plate 61. Within the second enclosed chamber 44, the electromagnetic wave passes through the first cooling plate 4512, the second cooling plate 4522, and the second chassis 466, then enters the first enclosed chamber 41 and reaches the transmitting antenna 551. Finally, it exits the second enclosed chamber 44 through the electrical flange interface on the first support plate 61. An external matching resistor (e.g., 50Ω) is connected to enable the transmitting antenna 551 to emit electromagnetic waves to modulate the quantum state of the NV color center.

[0194] According to embodiments of this disclosure, such as Figure 16 and 17 As shown, the transmitting antenna 551 consists of a semi-circular copper wire with a diameter of tens of micrometers wound around the two terminals of a printed circuit board (PCB). The radius of the semi-circle can be, for example, 1 mm. The PCB is fixed on the second support frame 52. The spatial position of the transmitting antenna 551 relative to the NV color center is adjusted by the second adjustment component 552, so that the transmitting antenna generates uniformly distributed electromagnetic waves in the region where the NV color center is located, thereby modulating the quantum state of the NV color center.

[0195] Figure 22 The illustration schematically shows a first-view perspective perspective view of the sample stage according to an embodiment of the present disclosure. Figure 23 The diagram schematically illustrates a second perspective view of the sample stage according to an embodiment of the present disclosure. Figure 24 A third-view perspective view of a sample stage according to an embodiment of the present disclosure is shown schematically.

[0196] According to embodiments of this disclosure, such as Figures 22 to 24 As shown, the sample stage 3 includes a sample support stage 31 and a third adjustment assembly 32. The third adjustment assembly 32 is mounted on the second support frame 52 and is configured to adjust the orientation of the sample support stage according to the orientation of the sample shown in the image.

[0197] According to embodiments of this disclosure, such as Figures 22 to 24As shown, the third adjustment assembly 32 includes multiple second cantilever arms 321, a ninth support plate 322, a sample support frame 323, and three third Z-axis actuators 324. The multiple second cantilever arms 321 are detachably connected to the lower ends of the first cantilever arms 522. The ninth support plate 322 is mounted on the lower ends of the second cantilever arms. The sample support frame 323 is movably disposed inside the second cantilever arms 321. A sample support stage 31 is mounted on the sample support frame to support the sample to be tested. The three third Z-axis actuators 324 are mounted on the ninth support plate and arranged in an equilateral triangle in the horizontal plane. The three third Z-axis actuators are located at the three vertices of the equilateral triangle. The third Z-axis actuators 324 drive the sample support frame 323 to move in the Z-axis direction, thereby adjusting the position and angle of the sample to be tested in the Z-axis direction.

[0198] According to an embodiment of this disclosure, the sample stage is connected to the probe module via a second cantilever, enabling the diamond nitrogen-vacancy color centers located in the probe module to detect the magnetic field information on the sample surface.

[0199] According to an embodiment of this disclosure, the displacement stage and scanning stage in the third adjustment assembly are supported by a ninth support plate.

[0200] According to embodiments of this disclosure, each third Z-axis driver 324 includes a second actuator 3241 and a second moving block. The second actuator is mounted on a ninth support plate 322.

[0201] According to embodiments of this disclosure, the Z-axis position and spatial angle of the sample are adjusted by a third Z-axis actuator. In an illustrative experiment, the third Z-axis actuator consists of three second actuators arranged in an equilateral triangle. The three second actuators move simultaneously to adjust the Z-axis position of the sample; individual second actuators move to change the tilt state of the sample.

[0202] According to an embodiment of this disclosure, a second actuator presses against a second moving block, and movement in a single-axis direction is achieved by using a guide rail in the second moving block as a guide.

[0203] According to an embodiment of the present disclosure, a plurality of third elastic members 325 are provided between the ninth support plate 322 and the sample support frame 323, each adjacent to the second moving block.

[0204] In one illustrative embodiment, the sample support frame 323 and the ninth support plate 322 are connected by three springs.

[0205] According to embodiments of this disclosure, such as Figures 22 to 24As shown, the third adjustment assembly further includes: a first Z-axis scanning stage 326, a second XY-axis scanning stage 327, and a first XY-axis displacement stage 328. The stacked first Z-axis scanning stage 326, second XY-axis scanning stage 327, and first XY-axis displacement stage 328 are installed between the sample support stage 31 and the sample support frame 323. The first Z-axis scanning stage 326 is configured to drive the sample support stage to move in the Z-axis direction with a first preset accuracy; the second XY-axis scanning stage 327 is configured to drive the sample support stage to move in the XY-axis direction with a first preset accuracy; and the first XY-axis displacement stage 328 is configured to drive the sample support stage to move in the XY-axis direction with a second preset accuracy, wherein the first preset accuracy and the second preset accuracy are not equal.

[0206] In one illustrative embodiment, the first preset precision is at the nanometer level, and the second preset precision is at the hundred-micrometer level.

[0207] According to embodiments of this disclosure, the spatial position and placement angle of the sample are adjusted by a third adjustment component, including 5D movement and 3D scanning, namely: XYZ axis movement and two angle adjustments, and XYZ axis scanning.

[0208] According to embodiments of this disclosure, such as Figures 22 to 24 As shown, a plurality of electrical connectors 544 are also provided on the second support frame 52, which are respectively suitable for electrical connection of the first adjustment component, the second adjustment component and the third adjustment component.

[0209] Figure 25 A perspective view of an optical module according to an embodiment of the present disclosure is shown schematically. Figure 26 This schematically illustrates a first-view perspective perspective view of the internal structure of an optical module according to an embodiment of the present disclosure. Figure 27 A second-view perspective perspective view of the internal structure of an optical module according to an embodiment of the present disclosure is shown schematically.

[0210] According to embodiments of this disclosure, such as Figures 25 to 27 As shown, optical module 2 includes a laser transmission unit 21, a fluorescence detection unit 22, a light-emitting component 23, and an imaging unit 27. The laser transmission unit 21 includes a first optical component 211, suitable for transmitting the excitation laser beam generated by the laser through a light guide tube. The fluorescence detection unit 22 includes a second optical component 221 and a fluorescence detector 222. The second optical component 221 is suitable for transmitting fluorescence emitted by the NV color center transmitted through the objective lens and light guide tube 221, and the fluorescence detector 222 is suitable for detecting the fluorescence transmitted through the second optical component 221. The light-emitting component is suitable for generating wide-field illumination light, illuminating the sample stage, part of the probe assembly, and the electromagnetic wave emitting assembly through the light guide tube and objective lens. The imaging unit 27 captures images of the area illuminated by the light-emitting component.

[0211] According to embodiments of this disclosure, fluorescent photons emitted from diamond nitrogen-vacancy color centers and transmitted through the first and second optical components are detected by a fluorescence detector to obtain the number of photons detected per second.

[0212] According to embodiments of this disclosure, an illumination component emits light to illuminate a portion of the space inside a vacuum cavity. In one illuminating experiment, the illumination component is selected to emit yellow light based on the excitation wavelength of the diamond nitrogen-vacancy color center and the wavelength of the emitted fluorescent photons.

[0213] According to embodiments of this disclosure, an image is displayed on a portion of the vacuum cavity illuminated by the light-emitting component using a camera unit, so as to adjust the position of each component in the scanning magnetic detection experiment based on the image information.

[0214] According to embodiments of this disclosure, the light-emitting component includes an LED lamp.

[0215] According to embodiments of this disclosure, such as Figures 1 to 2 and Figures 25-26 As shown, the support device also includes a third support frame 62, a fourth support frame 63, a third support plate 64, a fourth support plate 65, a fifth support plate 66, and a sixth support plate 67. The third support frame 62 is mounted on the first support plate 61, the fourth support frame 63 is disposed on the third support frame 62, the third support plate 64 is mounted on the upper end of the fourth support frame 63, the fourth support plate 65 is disposed above the third support plate 64, the fifth support plate 66 is mounted on the lower end of the fourth support frame 63, and the sixth support plate 67 is mounted on the fourth support frame 63 between the upper and lower ends. The laser transmission unit also includes an optical fiber flange 212, which is mounted on the fourth support plate 64. One end of the optical fiber flange 212 is connected to an external laser via a first optical fiber (not shown in the figure) to receive the excitation laser beam generated by the laser. The other end of the optical fiber flange 212 is connected to the first reflector 2111 of the first optical component 211, which is located on the sixth support plate 67, via a second optical fiber (not shown in the figure), so that the excitation laser beam generated by the laser is input into the light guide tube 421 via the first optical component 211.

[0216] In one illustrative embodiment, the first and second optical fibers may include single-mode fiber patch cords.

[0217] According to an embodiment of this disclosure, a first optical fiber in an atmospheric environment and a second optical fiber in a vacuum environment are connected by an optical fiber flange 212, thereby enabling the transmission of an excitation laser beam from the first optical fiber into the vacuum cavity.

[0218] According to embodiments of this disclosure, fluorescent photons emitted from diamond nitrogen-vacancy color centers are transmitted to the detector target surface via a second optical component.

[0219] Figure 28 This schematically illustrates a first-view perspective perspective view of the internal structure of the optical module of an embodiment of the present disclosure, showing the components located on the sixth support disk. Figure 29 The diagram schematically shows a second perspective view of the internal structure of the optical module of an embodiment of the present disclosure, with elements located on the sixth support disk.

[0220] According to embodiments of this disclosure, such as Figures 25 to 28 As shown, the first optical component 211 also includes a first dichroic mirror 2112 and a fourth optical coupler 2113, respectively disposed on the sixth support disk 67. The fourth optical coupler 2113 receives the excitation laser beam transmitted through the second optical fiber and combines the excitation laser beam with the first reflector 2111. The first reflector 2111 reflects the excitation laser beam to the first dichroic mirror 2112, which is configured to reflect almost entirely the excitation laser beam and transmit almost entirely the fluorescence. It is understood that a through-hole is provided on the sixth support disk 67 below the first dichroic mirror 2112 to allow the fluorescence and / or excitation laser beam to pass through.

[0221] Figure 30 This schematically illustrates a first-view perspective perspective view of the internal structure of an optical module according to an embodiment of the present disclosure, showing components located on a third support disk. Figure 31 The diagram schematically illustrates a second perspective view of the internal structure of an optical module according to an embodiment of the present disclosure, showing elements located on a third support disk.

[0222] Figure 32 Schematic illustration Figure 31 A partial enlarged view of the internal structure of the optical module shown, showing the components located on the third support disk.

[0223] According to embodiments of this disclosure, such as Figures 25 to 31 As shown, the second optical component 221 includes a second reflector 2211, an optical fiber connector 2212, and a collimator 2213. The second reflector 2211 is mounted on a third support disk 64 and is configured to reflect fluorescence transmitted by the light guide tube 421. The optical fiber connector 2212 is mounted on the third support disk 64, and its first end receives the fluorescence reflected by the second reflector 2211. The collimator 2213 is mounted on a fourth support disk 65, and its upper end is coupled to the fluorescence detector 222, while its lower end is optically coupled to the second end of the optical fiber connector 2212 via a third optical fiber.

[0224] According to embodiments of this disclosure, fluorescent photons emitted from the diamond nitrogen-vacancy color center are first transmitted through the reverse optical path of the first optical component, then transmitted through the first dichroic mirror into the second optical component. The second mirror then reflects the fluorescent photons transmitted through the first dichroic mirror.

[0225] According to embodiments of this disclosure, fluorescent photons are received and transmitted via optical fiber connectors and optical fiber guidance, which can effectively avoid photon loss during transmission.

[0226] According to embodiments of this disclosure, a collimator receives fluorescent photons transmitted from a third optical fiber and collimates and outputs them as parallel light.

[0227] In one illustrative embodiment, the third optical fiber may include an SMA fiber.

[0228] According to embodiments of this disclosure, such as Figures 25 to 32 As shown, the second optical component 221 also includes a third reflecting mirror 2215 and a second convex lens 2216, which are respectively mounted on the fourth support disk 65. The fluorescence transmitted by the collimator 2213 is reflected by the third reflecting mirror 2215 and then focused onto the target surface of the fluorescence detector by the second convex lens 2216, where it is detected by the fluorescence detector.

[0229] In one illustrative embodiment, the second optical component may further include a long-pass filter disposed between the second convex lens 2216 and the fluorescence detector, suitable for filtering out stray light below the wavelength of the fluorescent photons emitted by the NV color center, thereby improving the signal-to-noise ratio of the measurement.

[0230] According to embodiments of this disclosure, the fluorescence detector includes a single-photon detector.

[0231] According to embodiments of this disclosure, such as Figures 26 to 31 As shown, the laser transmission unit 21 also includes a reflector group 213, which is disposed on the fifth support disk 66 and / or the sixth support disk 67. It is suitable for reflecting the excitation laser beam, fluorescence and illumination light multiple times, so that the excitation laser beam and illumination light enter the light guide tube 421 and the fluorescence transmitted by the light guide tube 421 enters the second reflector 2211.

[0232] In one illustrative embodiment, the mirror assembly 213 includes three mirrors, which are mounted on the fifth support plate 65 and the sixth support plate 67 via brackets, respectively.

[0233] According to an embodiment of this disclosure, the excitation laser reflected by the first dichroic mirror is transmitted into the light guide tube through a reflector group, and the optical path is adjusted to be concentric with the light guide tube. Figure 33 A block diagram of the optical path according to an embodiment of the present disclosure is shown schematically.

[0234] According to embodiments of this disclosure, such as Figure 33 As shown, G01 represents the path of the excitation laser beam, G02 represents the path of the fluorescence optical path, and G03 represents the optical path of the camera unit.

[0235] According to embodiments of this disclosure, such as Figures 25 to 33As shown, an external laser transmits the excitation laser beam to the fiber optic flange 212 located on the fourth support plate 65 via a first optical fiber. It then connects to the fourth optical coupler 2113 located on the sixth support plate 67 via a second optical fiber. After reflection by the first reflecting mirror 2111 and the first dichroic mirror 2112 mounted on the sixth support plate 67, the excitation laser beam is reflected to the mirror assembly 213 located on the fifth support plate 66. After multiple reflections by the mirror assembly 213, the excitation laser beam is transmitted to the light guide tube 421. Finally, after being focused by the objective lens 531 located below the light guide tube 421, the excitation laser beam illuminates the NV color center 541 located below the objective lens 531.

[0236] According to embodiments of this disclosure, such as Figures 25 to 33 As shown, after receiving the excitation laser beam, the NV color center emits fluorescence with a wavelength different from that of the excitation laser beam. The fluorescence is transmitted through the objective lens 531 located in the probe module 5 and the light guide tube 421 located above the objective lens 531. After multiple reflections by the reflector group 213 located on the fifth support disk 66, it is transmitted to the first dichroic mirror 2112 on the sixth support disk 67. The first dichroic mirror 2112 transmits almost all of the fluorescence, allowing it to be transmitted to the second reflector 2211 located on the third support disk 64. After being reflected by the second reflector 2211, the fluorescence is almost entirely transmitted by the second dichroic mirror 2220, reflected by the fourth reflector 2221, filtered by the first filter 2222, focused by the first convex lens 2223, and reflected by two fifth reflectors 2224 to the fiber optic connector 2212. Then, the fluorescence is transmitted through the third optical fiber to the collimator 2213 located on the fourth support disk 65, and then to the third reflector 2215. After being focused by the second convex lens 2216, it is detected by the fluorescence detector.

[0237] According to embodiments of this disclosure, a first filter is used to filter out light below the wavelength of fluorescent photons, thereby improving the signal-to-noise ratio of the detector.

[0238] According to embodiments of this disclosure, such as Figures 25 to 27 As shown, the support assembly 6 also includes an eleventh support disk 613, which is disposed on the fourth support disk 65. The light-emitting component 23 and the camera unit 27 are respectively mounted on the eleventh support disk 613.

[0239] In one illustrative embodiment, the camera unit 27 is a CCD camera.

[0240] According to embodiments of this disclosure, such as Figures 25 to 27 As shown, the optical module 2 includes a third convex lens (not shown in the figure), a beam splitter 24, and a sixth reflecting mirror 25, which are respectively mounted on the eleventh support disk 613.

[0241] According to embodiments of this disclosure, such as Figures 25 to 33As shown, the probe light emitted by the light-emitting component is reflected by the beam splitter 24 and the sixth reflector 25 on the eleventh support disk 613, and passes through the second dichroic mirror 2220 on the third support disk 64, the first dichroic mirror 2112 on the sixth support disk 67, and then reflected by the reflector group on the fifth support disk 66. The light then illuminates the sample stage, part of the probe assembly, and part of the electromagnetic wave emitting assembly via the light guide tube 421 and the objective lens 531. The illumination light is reflected by the aforementioned area, passes through the objective lens 531 and the light guide tube 421, and then by the reflector group on the fifth support disk 66. It then passes through the first dichroic mirror 2112 on the sixth support disk 67, the second dichroic mirror 2220 on the third support disk 64, and the sixth reflector 25 on the eleventh support disk 613. The light then passes through the beam splitter 24 on the eleventh support disk 613 and is focused by the third convex lens onto the imaging unit 27 to acquire and image the aforementioned area.

[0242] According to embodiments of this disclosure, the beam splitter reflects 50% of the transmitted light and transmits 50%. In an illustrative experiment, the beam splitter reflects the yellow light emitted by the light-emitting component and transmits the light reflected back from the object to be illuminated.

[0243] According to an embodiment of this disclosure, the light reflected from the object to be illuminated is reflected into the beam splitter via a sixth reflecting mirror.

[0244] According to embodiments of this disclosure, such as Figure 30 and Figure 31 As shown, the second optical component also includes a fourth adjustment component 2214, which is mounted on the third support plate 64 and configured to adjust the orientation of the fiber optic connector 2212 so that all the fluorescence reflected from the second reflector 2211 is input into the fiber optic connector 2212.

[0245] In one illustrative embodiment, such as Figures 30 to 32As shown, the fourth adjustment component includes a fiber optic Z-axis displacement stage 2217, a fiber optic X-axis displacement stage 2218, and a fiber optic Y-axis displacement stage 2219, which are respectively used to adjust the orientation of the fiber optic connector 2212 in the Z-axis, X-axis, and Y-axis directions. The fiber optic X-axis displacement stage 2218 and the fiber optic Y-axis displacement stage 2219 are stacked on the third support disk 64. The fiber optic Z-axis displacement stage 2217 is mounted on the third support disk 64 via a fiber optic bracket located on top of the fiber optic X-axis displacement stage 2218 and the fiber optic Y-axis displacement stage 2219. The fiber optic connector 2212 is mounted on the fiber optic Z-axis displacement stage 2217 to move with the fiber optic Z-axis displacement stage 2217, the fiber optic X-axis displacement stage 2218, and the fiber optic Y-axis displacement stage 2219, so that all the fluorescence 26 reflected from the second reflector 2211 enters the fiber optic connector 2212. It is understandable that the stacking order of the fiber X-axis displacement stage 2218, fiber Y-axis displacement stage 2219, and fiber Z-axis displacement stage 2217 can be adjusted according to actual needs.

[0246] According to an embodiment of the present disclosure, the second optical component further includes a light shield that covers the first filter 2222, the first convex lens 2223, the two fifth reflectors 2224, the fourth adjustment component 2214, and the fiber optic connector 2212 to block external stray light (e.g., ambient light) and improve the efficiency of the fiber optic connector 2219 in receiving the fluorescence 26.

[0247] According to embodiments of this disclosure, such as Figures 25 to 31 As shown, the support device 6 also includes a seventh support plate 68, a fifth support frame 69, and a coupling plate 610. The seventh support plate 68 is mounted on the third support frame 62, the fifth support frame 69 is mounted on the seventh support plate 68, the fourth support plate 65 is mounted on the upper end of the fifth support frame 69, and the fourth support frame 63 is disposed within the space defined by the fifth support frame 69 and suspended from the fifth support frame 69 by multiple third elastic members 611. The coupling plate 610 is disposed on the seventh support plate 68, and the coupling plate 610 is provided with a second through hole. The upper end of the light guide tube 421 passes through the second through hole from the lower part of the coupling plate 610 and is formed on the fifth support plate 66, so that the light guide tube 421 is sealed to the second through hole. The upper end of the cavity wall 422 is sealed to the lower side of the coupling plate 610 around the second through hole.

[0248] According to embodiments of this disclosure, a third elastic member securely connects the sample support frame and its lower portion. In an illustrative experiment, the third elastic member refers to a spring.

[0249] In one illustrative embodiment, the excitation laser beam is green light, and the fluorescence generated by the NV color center is red light.

[0250] According to embodiments of this disclosure, such as Figure 25As shown, the third cylinder 612 supports the fourth support plate 65 on the seventh support plate 68, and together with the fourth support plate 65 and the seventh support plate, they form a third chamber, which is connected to the light guide tube 421.

[0251] In one illustrative embodiment, the third chamber and the light guide tube 421 are in a vacuum state.

[0252] According to embodiments of this disclosure, such as Figures 1 to 2 As shown, the scanning magnetic detection system also includes a removable light shield to enclose the optical module and prevent ambient light from entering the optical module.

[0253] Figure 34 A perspective view of an eddy current damping device according to an embodiment of the present disclosure is shown schematically.

[0254] According to an embodiment of this disclosure, the optical module 2 and the probe module 5 are connected via a light guide tube 421. Since vibration can cause the light guide tube to shake for an extended period, such as... Figures 26 to 34 As shown, an eddy current damping device 7 is provided between the fifth support plate 66 and the coupling plate 610 to quickly restore balance when the connecting pipe 42 is subjected to vibration.

[0255] According to embodiments of this disclosure, such as Figures 26 to 34 As shown, the eddy current damping device 7 includes multiple metal damping elements 71 and multiple magnets 72. The multiple metal damping elements 71 are mounted on one of the fifth support disk 66 and the coupling disk 610. The multiple magnets are mounted on the other of the fifth support disk 66 and the coupling disk 610, each magnet inserted into the space formed by the corresponding metal damping element 71. The multiple magnets 72 are arranged in a circle on the fifth support disk 66 or the coupling disk 610 at equal intervals in an adjacent and mutually exclusive manner. Figure 33 and Figure 9 As shown, a connecting flange is installed at one end of the light guide tube 421. The light guide tube 421 is installed on the fifth support plate 66 through the connecting flange, and the axis of the light guide tube 421 is located at the center. When the fifth support plate 66 shakes relative to the coupling plate 610, the magnetic flux in the metal damping element 71 changes, generating an induced current. It is subjected to a damping force in the magnetic field generated by the magnet, so that the fifth support plate 66 and the coupling plate 610 can be restored to balance.

[0256] In one illustrative embodiment, such as Figure 34 As shown, the eddy current damping device includes 18 small magnets arranged in a circle at equal intervals on the coupling disk 610 in an adjacent repulsive manner. On the fifth support disk 66, there are 18 damping copper plates corresponding to the small magnets, with each small magnet inserted into the space formed by the corresponding damping copper plate.

[0257] According to embodiments of this disclosure, the structure of the damping metal element 71 may include a "U" shape.

[0258] According to embodiments of this disclosure, when it is necessary to detect the magnetic field of a sample at different temperatures, resistance wires for generating heat can be arranged around the sample support stage to change the temperature of the sample stage.

[0259] According to embodiments of this disclosure, magnet 72 includes a magnet.

[0260] It is understandable that the scanning magnetic detection system provided in this disclosure can detect the magnetic field strength of the sample under test at room temperature even when the cooling module is not working, that is, at room temperature.

[0261] It should be noted that implementations not illustrated or described in the accompanying drawings or the main text of the specification are all forms known to those skilled in the art and are not described in detail. Furthermore, the definitions of the various elements and methods described above are not limited to the specific structures, shapes, or methods mentioned in the embodiments, and those skilled in the art can easily modify or substitute them.

[0262] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of this disclosure. Throughout the drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted where they may cause confusion in understanding this disclosure, and the shapes and dimensions of the components in the drawings do not reflect actual size and proportion, but are only schematic representations of the embodiments of this disclosure.

[0263] Unless otherwise stated, the numerical parameters in this specification and the appended claims are approximate values ​​and can be varied according to desired characteristics derived from the content of this disclosure. Specifically, all figures used in the specification and claims to indicate composition, reaction conditions, etc., should be understood to be modified by the term "about" in all cases. Generally, this means that a specific amount varies by ±10% in some embodiments, ±5% in some embodiments, ±1% in some embodiments, and ±0.5% in some embodiments.

[0264] The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify the corresponding elements does not imply that the element has any ordinal number, nor does it represent the order of one element with another element, or the order of manufacturing methods. The use of these ordinal numbers is only to enable a named element to be clearly distinguished from another element with the same name.

[0265] Furthermore, unless specifically described or required to occur in a specific order, the order of the above steps is not limited to those listed above and can be varied or rearranged according to the desired design. Moreover, the above embodiments can be used in combination with each other or with other embodiments based on design and reliability considerations; that is, technical features from different embodiments can be freely combined to form more embodiments.

[0266] The specific embodiments described above further illustrate the purpose, technical solutions, and beneficial effects of this disclosure. It should be understood that the above descriptions are merely specific embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A scanning magnetic detection system, comprising: Magnetic field generation module, suitable for generating a reference magnetic field; Optical module, suitable for generating excitation laser beam; The sample stage, positioned within the reference magnetic field, is suitable for supporting the sample under test. The cooling module is suitable for maintaining a sample supported on the sample stage at any temperature within the range of ultra-low temperature to room temperature, so as to study the magnetic behavior of the sample during temperature variation. as well as The probe module is suitable for detecting the magnetic field information on the sample surface; The cooling module includes: A first sealed chamber is provided in which at least a portion of the optical module, the probe module, and the sample stage are disposed, and the first sealed chamber contains a sealed heat-conducting gas. The support device includes a first support plate. The cooling module further includes a connecting pipe, the connecting pipe comprising: A light guide tube, configured to pass through the first support disk to deliver the excitation laser beam to the probe module and to deliver the fluorescence generated by the probe module to the optical module; and The cavity wall is fitted around the light guide tube, and the cavity wall and the light guide tube form an annular cooling space that communicates with the first closed cavity. The cooling module also includes: A cold head is mounted on the upper part of the first support plate and is configured to receive compressed refrigerant gas. The second enclosed chamber is formed by the first support plate, the first base plate opposite to the first support plate, and the first cylinder sealed between the first support plate and the first base plate; At least one series-connected cooling assembly is installed in the second enclosed chamber. Each series-connected cooling assembly is configured to receive compressed cooling gas from the cold head, and to progressively cool the at least one series-connected cooling assembly through the adiabatic expansion of the compressed cooling gas. A terminal cooling component is disposed inside the second enclosed chamber and below the last stage of the series cooling component to further cool to an ultra-low temperature state by utilizing the throttling process of the circulating cooling gas. The probe module includes: The first support frame is installed on the lower part of the second chassis; A second support frame is installed below the first support frame, and the sample stage is installed at the lower part of the second support frame; and A probe assembly is mounted on the second support frame and located above the sample stage, the light guide extends to the second support frame, and the probe assembly includes an objective lens coupled to the lower end of the light guide; The probe assembly also includes: The probe assembly is movably mounted on the second support frame. The NV color center of the probe assembly is located below the objective lens. The fluorescence emitted by the NV color center is incident on the objective lens and input to the optical module through the light guide tube. An electromagnetic wave emitting component, movably mounted on the second support frame, is configured to emit electromagnetic waves toward the NV color center in order to manipulate the spin state of the NV color center.

2. The scanning magnetic detection system according to claim 1, wherein, The terminal cooling component includes: The third chamber is formed by a second support plate suitable for separating the last stage of the series cooling assembly and the terminal cooling assembly, a second base plate opposite to the second support plate, and a second cylinder sealed between the second support plate and the second base plate. The light guide tube of the connecting tube extends through a first through hole formed on the second base plate to the first closed chamber. The lower end of the chamber wall is sealed to the upper edge of the first through hole to seal the heat-conducting gas. The first air guide tube passes through the second closed chamber from the first support plate and enters the third chamber; A cooler is mounted on the second chassis, and the first air duct is partially wrapped around the cooler. The first air duct passes through the cooler to further cool the second chassis to an ultra-low temperature state.

3. The scanning magnetic detection system according to claim 2, wherein, The terminal cooling component also includes: A needle valve is installed on the first air guide tube located in the third chamber; An adjusting rod extends from the upper part of the first support plate through the second enclosed chamber to the third chamber. The adjusting rod is configured to adjust the opening of the needle valve to regulate the rate of cooling to the cryogenic state.

4. The scanning magnetic detection system according to claim 1, wherein, The probe assembly also includes a first adjustment assembly mounted on the second support frame and configured to adjust the position of the NV color center according to the position of the NV color center relative to the objective lens focal point.

5. The scanning magnetic detection system according to claim 4, wherein, The probe assembly also includes a second adjustment assembly mounted on the second support frame and configured to adjust the position of the antenna according to the position state of the antenna of the electromagnetic wave emitting assembly relative to the NV color center.

6. The scanning magnetic detection system according to claim 4, wherein, The sample stage also includes a third adjustment assembly mounted on the second support frame and configured to adjust the spatial position and angle of the sample stage according to the position of the NV color center.

7. The scanning magnetic detection system according to any one of claims 1-6, wherein, The optical module includes: A laser transmission unit includes a first optical component adapted to transmit the excitation laser beam generated by a laser to the light guide tube; The fluorescence detection unit includes: The second optical component is adapted to transmit the light emitted from the NV color center through the objective lens and guide lens. Fluorescence transmitted from the light tube; and A fluorescence detector suitable for detecting fluorescence transmitted via the second optical component; and The light-emitting component is suitable for generating wide-field illumination light, which illuminates the sample stage, part of the probe assembly, and part of the electromagnetic wave emitting component through the light guide tube and the objective lens; The camera unit captures images of the area illuminated by the light-emitting components.

8. The scanning magnetic detection system according to claim 7, wherein, The support device also includes: The third support frame is installed on the first support plate; The fourth support frame is mounted on the third support frame; The third support plate is installed at the upper end of the fourth support frame; The fourth support plate is positioned above the third support plate; The fifth support plate is installed at the lower end of the fourth support frame; A sixth support plate is mounted on the fourth support frame between the upper and lower ends of the fourth support frame; The laser transmission unit further includes an optical fiber flange, which is mounted on the fourth support plate. One end of the optical fiber flange is connected to the laser via a first optical fiber to receive the excitation laser beam generated by the laser. The other end of the optical fiber flange is connected to the first reflector of the first optical component, which is disposed on the sixth support plate, via a second optical fiber, so that the excitation laser beam generated by the laser is input into the light guide tube via the first optical component.

9. The scanning magnetic detection system according to claim 8, wherein, The second optical component includes: The second reflector is mounted on the third support plate and is configured to reflect the fluorescence transmitted by the light guide tube; An optical fiber connector, mounted on the third support plate, wherein a first end of the optical fiber connector receives fluorescence reflected by the second reflector; and A collimator is mounted on the fourth support disk. The upper end of the collimator is combined with the fluorescence detector, and the lower end of the collimator extends downward to the bottom of the fourth support disk and is optically coupled to the second end of the fiber optic connector through a third optical fiber.

10. The scanning magnetic detection system according to claim 9, wherein, The second optical component further includes a fourth adjustment component, which is mounted on the fourth support plate and configured to adjust the orientation of the fiber optic connector so that all the fluorescence reflected from the second reflector is input into the fiber optic connector.

11. The scanning magnetic detection system according to claim 9, wherein, The support device also includes: The seventh support plate is installed on the third support frame; The fifth support frame is installed on the seventh support plate, the fourth support plate is installed on the upper end of the fifth support frame, and the fourth support frame is arranged within the space defined by the fifth support frame and suspended on the fifth support frame by a plurality of first springs; A coupling disk is disposed on the seventh support disk. The coupling disk has a second through hole. The upper end of the light guide tube passes through the second through hole from the lower part of the coupling disk and is formed on the fifth support disk so that the light guide tube is sealed and connected to the second through hole. The upper end of the cavity wall is sealed and connected to the lower side of the coupling disk around the second through hole.

12. The scanning magnetic detection system according to claim 11, wherein, An eddy current damping device is provided between the fifth support plate and the coupling plate.

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