Superlens array acquisition method, superlens array and homogenizing system

Abstract

The application provides an ultralens array acquisition method, an ultralens array and a light homogenization system. The method comprises the following steps: simulating the incident light emitted by a light source to a periodic microlens array to obtain outgoing light; optimizing the conic coefficient of each microlens, randomizing the aperture and the curvature radius of each microlens, so that the outgoing light meets the expected light homogenization performance and the expected divergence angle, and a random microlens is obtained; based on the sag of each random microlens, the target phase corresponding to each random microlens is calculated; based on the target phase corresponding to each random microlens, the phase required to be provided by each ultralens is obtained; and based on the phase required to be provided by each ultralens, the ultralens array is obtained. The ultralens array obtained by the method provided by the application can not only reduce the volume of the lens array, but also ensure that the outgoing light sufficiently meets the expected light homogenization performance even if the light emitted by the light source is coherent light.

Description

Technical Field

[0001] This application relates to the field of lenses, specifically to a method for acquiring a superlens array, a superlens array, and a light homogenizing system. Background Technology

[0002] In fields such as laser optics, lighting, and medical aesthetics, it is often necessary to homogenize the light emitted by a light source. In related technologies, in order to reduce the size of the lens array, a periodic superlens array composed of periodically arranged superlenses is used as a lens array for homogenization. However, the homogenization performance of the periodic superlens array is relatively low when the light emitted by the light source is coherent. Summary of the Invention

[0003] One objective of this application is to provide a method for obtaining a superlens array, a superlens array, and a homogenizing system. The superlens array obtained by the method provided in this application reduces the volume of the lens array while ensuring that the emitted light fully meets both the expected divergence angle and the expected homogenizing performance, even if the light emitted by the light source is coherent.

[0004] According to one aspect of the embodiments of this application, a method for acquiring a superlens array is disclosed, the method comprising:

[0005] The light emitted by the light source is simulated and incident on a periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein the periodic microlens array includes at least two periodically arranged microlenses;

[0006] The conic coefficient of each microlens in the periodic microlens array is optimized to output an optimized periodic microlens array. The aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized so that the outgoing light meets the expected uniformity performance and the expected divergence angle, resulting in random microlenses with random aperture and random radius of curvature.

[0007] Based on the vector height of each random microlens, the target phase corresponding to each random microlens is calculated;

[0008] Based on the target phase corresponding to each random microlens, obtain the phase required by each superlens when homogenizing the light source;

[0009] Based on the phase required by each of the superlenses, a superlens array for homogenizing the light source is obtained.

[0010] In an exemplary embodiment of this application, the light source is a vertical cavity surface-emitting laser (VCSEL) or a VCSEL array.

[0011] In an exemplary embodiment of this application, the conic coefficient of each microlens in the periodic microlens array is optimized, including:

[0012] Under incoherent conditions, the conic coefficient of each microlens in the periodic microlens array is optimized until the outgoing light meets the expected uniformity and divergence angle under incoherent conditions.

[0013] In an exemplary embodiment of this application, the light emitted by the light source is coherent light; randomizing the aperture and radius of curvature of each microlens in the optimized periodic microlens array so that the emitted light meets the expected uniformity performance and the expected divergence angle includes:

[0014] Under coherent conditions, the radius of curvature and aperture of each microlens in the optimized periodic microlens array are randomized until the outgoing light meets the expected uniformity and divergence angle under coherent conditions.

[0015] In an exemplary embodiment of this application, the target phase corresponding to each random microlens is calculated based on the vector height of each random microlens, including:

[0016] The target phase is calculated using the following formula:

[0017]

[0018] Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and z be the wavelength of the light emitted by the light source. r Let max(z) be the vector height of the corresponding discrete position on the random microlens. r ) represents the maximum sagittal height on the random lens, and n represents the refractive index of the random microlens.

[0019] In an exemplary embodiment of this application, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including:

[0020] According to the one-to-one matching relationship between the superlens and the random microlenses, the target phase corresponding to each random microlens is assigned to the corresponding superlens to obtain the target phase corresponding to each superlens;

[0021] Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained.

[0022] In an exemplary embodiment of this application, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including:

[0023] Based on the target phase corresponding to each random microlens, the target phase corresponding to the random microlens array is obtained;

[0024] According to the target distribution position of the superlens in the superlens array, each superlens is matched with the target phase corresponding to the random microlens array to obtain the target phase corresponding to each superlens;

[0025] Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained.

[0026] In an exemplary embodiment of this application, obtaining the required phase for each superlens based on the target phase corresponding to each superlens includes:

[0027] The target phase corresponding to each superlens is determined as the phase that each superlens needs to provide.

[0028] In an exemplary embodiment of this application, before simulating the incident light emitted by the light source onto the periodic microlens array, the method further includes: applying a collimating phase to the light emitted by the light source;

[0029] Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained, including: superimposing the collimated phase with the target phase corresponding to each superlens to obtain the phase required to be provided by each superlens.

[0030] In an exemplary embodiment of this application, applying a collimation phase to the light emitted by the light source includes:

[0031] A collimation phase is applied to the light emitted by the light source using a binary plane.

[0032] According to one aspect of the embodiments of this application, a superlens array is disclosed, which is generated by the method provided in any of the above method embodiments; the superlens array is used to homogenize the light emitted by a light source.

[0033] According to one aspect of the embodiments of this application, a light homogenizing system is disclosed, the light homogenizing system comprising: a light source; a superlens array for homogenizing the light emitted by the light source; the superlens array being generated by the method provided in any of the above method embodiments.

[0034] According to one aspect of the embodiments of this application, a superlens array acquisition device is disclosed, the device comprising:

[0035] The simulation module is configured to simulate the incident light emitted by the light source onto the periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein the periodic microlens array includes at least two periodically arranged microlenses.

[0036] The optimization and randomization module is configured to optimize the conic coefficient of each microlens in the periodic microlens array, output the optimized periodic microlens array, and randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array so that the outgoing light meets the expected uniformity performance and the expected divergence angle, thereby obtaining random microlenses with random aperture and random radius of curvature.

[0037] The random microlens phase calculation module is configured to calculate the target phase corresponding to each random microlens based on the vector height of each random microlens.

[0038] The superlens phase acquisition module is configured to acquire the phase required by each superlens when homogenizing the light source, based on the target phase corresponding to each random microlens.

[0039] The superlens array acquisition module is configured to acquire a superlens array for homogenizing the light source based on the phase required by each superlens.

[0040] According to one aspect of the embodiments of this application, an electronic device is disclosed, comprising: one or more processors; and a memory for storing one or more programs, which, when executed by the one or more processors, cause the electronic device to perform the method provided in any of the above embodiments.

[0041] According to one aspect of the embodiments of this application, a computer-readable storage medium is disclosed, on which computer-readable instructions are stored, which, when executed by a computer's processor, cause the computer to perform the method provided in any of the above embodiments.

[0042] In this embodiment, after simulating the outgoing light emitted from the light source and modulated by a periodic microlens array, the conic coefficient of each microlens in the periodic microlens array is optimized. This ensures that the outgoing light meets both the expected divergence angle and a portion of the expected homogenization performance, resulting in an optimized periodic microlens array. Then, the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized, resulting in random microlenses with random apertures and radii of curvature. This effectively reduces the interference between the light emitted from the light source as it passes through different microlenses, ensuring that the outgoing light fully meets both the expected divergence angle and the expected homogenization performance. Next, based on the sag of each random microlens, the target phase corresponding to each random microlens is calculated. Then, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained. Finally, based on the phase required by each superlens, a superlens array for homogenizing the light source is obtained. The superlens array obtained by this method reduces the size of the lens array while ensuring that the emitted light fully meets both the expected divergence angle and the expected uniform light performance, even if the light emitted by the light source is coherent.

[0043] Other features and advantages of this application will become apparent from the following detailed description, or may be learned in part from practice of this application.

[0044] It should be understood that the above general description and the following detailed description are merely exemplary and do not limit this application. Attached Figure Description

[0045] The above and other objectives, features and advantages of this application will become more apparent from a detailed description of exemplary embodiments thereof with reference to the accompanying drawings.

[0046] Figure 1 A flowchart of a method for acquiring a superlens array according to an embodiment of this application is shown.

[0047] Figure 2 This illustration shows a schematic diagram of light modulation of a small divergence angle periodic microlens array composed of spherical lenses in one embodiment of this application.

[0048] Figure 3 An embodiment of this application is shown. Figure 2 A schematic diagram of the energy distribution of the emitted light spot of the small divergence angle periodic microlens array in the embodiment.

[0049] Figure 4 This illustration shows a schematic diagram of light modulation of a large divergence angle periodic microlens array composed of spherical lenses in one embodiment of this application.

[0050] Figure 5 An embodiment of this application is shown. Figure 4 A schematic diagram of the energy distribution of the emitted light from the large divergence angle periodic microlens array in the embodiment.

[0051] Figure 6 This illustration shows a schematic diagram of the light modulation of the optimized periodic microlens array obtained after optimizing the conic coefficient of each microlens in the large divergence angle periodic microlens array under incoherent conditions, according to one embodiment of this application.

[0052] Figure 7 An embodiment of this application is shown. Figure 6 A schematic diagram of the energy distribution of the emitted light from the optimized periodic microlens array in the embodiment under incoherent conditions.

[0053] Figure 8 An embodiment of this application is shown. Figure 6 A schematic diagram of the energy distribution of the emitted light from the optimized periodic microlens array in the embodiment under coherent conditions.

[0054] Figure 9 A schematic diagram of a cross-section obtained by cutting a plano-convex thin lens along the direction of light propagation in one embodiment of this application is shown.

[0055] Figure 10 This illustration shows a schematic diagram of the energy distribution of the emitted light from the optimized periodic microlens array under coherent conditions, according to an embodiment of this application.

[0056] Figure 11 This illustrates a view of the light spot center, parallel to the X-axis, in one embodiment of this application, with a cut-off image. Figure 10 The embodiment shows a schematic diagram of the energy distribution on a one-dimensional line segment in the two-dimensional region where the light spot is located.

[0057] Figure 12 This diagram illustrates the energy distribution of the emitted light from a random microlens array under coherent conditions, according to one embodiment of this application.

[0058] Figure 13 This illustrates a view of the light spot center, parallel to the X-axis, in one embodiment of this application, with a cut-off image. Figure 12 The embodiment shows a schematic diagram of the energy distribution on a one-dimensional line segment in the two-dimensional region where the light spot is located.

[0059] Figure 14 A schematic diagram of the final superlens array obtained in one embodiment of this application is shown.

[0060] Figure 15 A schematic diagram of the uniform light system in one embodiment of this application is shown.

[0061] Figure 16 A block diagram of a superlens array acquisition device according to one embodiment of this application is shown.

[0062] Figure label:

[0063] 2-Superlens array; 21-Superlens; 3-Light source. Detailed Implementation

[0064] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided to make the description of this application more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The drawings are merely illustrative of this application and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0065] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more exemplary embodiments. Numerous specific details are provided in the following description to give a full understanding of exemplary embodiments of this application. However, those skilled in the art will recognize that the technical solutions of this application can be practiced by omitting one or more of the specific details, or other modules, components, etc., can be employed. In other instances, well-known structures, methods, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of this application.

[0066] When using a microlens array composed of multiple microlenses for light homogenization, the array size is typically quite large. To reduce the size of the microlens array, related technologies have proposed using a superlens array instead of a microlens array. Specifically, in this approach, multiple superlenses are periodically arranged to form a periodic superlens array for light homogenization. Each superlens includes a substrate and multiple superstructure units disposed on the substrate surface. Each superstructure unit has a micro / nanostructure at its vertices and / or center, and the filling material between the micro / nanostructures is air or other materials transparent in the operating wavelength range.

[0067] However, it should be noted that when the light emitted by the light source is coherent, interference will occur between the emitted rays as they pass through the periodically arranged superlenses, resulting in a decrease in the homogenization performance of the outgoing light. Therefore, the solution provided by the relevant technology suffers from relatively low homogenization performance when the emitted light is coherent. Thus, how to design lens arrays for homogenization that maintain excellent homogenization performance while reducing size is a pressing technical problem that needs to be solved in this field.

[0068] To address the aforementioned technical problems, this application provides a method for obtaining a superlens array. The superlens array obtained by the method provided in this application reduces the size of the lens array while ensuring that, even if the light emitted by the light source is coherent, the outgoing light fully meets both the expected divergence angle and the expected uniform light performance.

[0069] Specifically, Figure 1 A flowchart of the method for acquiring a superlens array provided in this application is shown.

[0070] See Figure 1 The method for obtaining a superlens array provided in this application includes:

[0071] Step S110: Simulate the incident light emitted by the light source onto the periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein, the periodic microlens array includes at least two periodically arranged microlenses.

[0072] Step S120: Optimize the conic coefficient of each microlens in the periodic microlens array, output the optimized periodic microlens array, and randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array so that the outgoing light meets the expected uniform light performance and the expected divergence angle, and obtain random microlenses with random aperture and random radius of curvature.

[0073] Step S130: Based on the vector height of each random microlens, calculate the target phase corresponding to each random microlens;

[0074] Step S140: Based on the target phase corresponding to each random microlens, obtain the phase required by each superlens when homogenizing the light source;

[0075] Step S150: Based on the phase required by each superlens, obtain a superlens array for homogenizing the light source.

[0076] In this embodiment, a specific type of light source can be simulated in optical system simulation software, and multiple microlenses can be periodically arranged to simulate an initial periodic microlens array. Then, the incident light emitted by the light source onto the initial periodic microlens array is simulated. After the light emitted by the light source is incident on the initial periodic microlens array, its intensity and phase are recombined, thereby modulating it into an outgoing light with specific optical performance. In this application, the specific optical performance of the outgoing light mainly focuses on its homogenization performance and divergence angle.

[0077] In detail, uniformity performance mainly reflects the uniformity of the energy distribution of the emitted light rays. Higher uniformity performance indicates a more uniform energy distribution of the emitted light rays; conversely, lower uniformity performance indicates a more uneven energy distribution. Divergence angle mainly reflects the speed at which the emitted light rays diverge from the beam waist outwards. A larger divergence angle indicates a faster divergence speed from the beam waist outwards; conversely, a smaller divergence angle indicates a slower divergence speed.

[0078] It should be noted that the microlenses that make up the initial periodic microlens array are usually spherical lenses. This makes it difficult for the initial periodic microlens array to simultaneously achieve high uniformity of light and a large divergence angle.

[0079] Detailed Figure 2 This diagram illustrates light modulation using a small divergence angle periodic microlens array composed of spherical lenses in one embodiment. Figure 3 It shows Figure 2 A schematic diagram of the energy distribution of the emitted light spot of the small divergence angle periodic microlens array in the embodiment. Figure 4 A schematic diagram of light modulation using a large divergence angle periodic microlens array composed of spherical lenses is shown in one embodiment. Figure 5 It shows Figure 4 A schematic diagram of the energy distribution of the emitted light from the large divergence angle periodic microlens array in the embodiment. Figure 2 and Figure 4 All images are taken along the optical axis and show the effect of the light emitted by the light source being modulated into outgoing light by a periodic microlens array from the side. Figure 3 and Figure 5 This demonstrates the energy distribution of the light spot obtained by projecting the outgoing light rays onto a two-dimensional plane perpendicular to the light beam. Figure 3 and Figure 5 In the diagram, the X-coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, with units of mm; the Y-coordinate value represents the Y-axis coordinate of the two-dimensional plane in which the light spot is located, with units of mm; and the unit of irradiance is W·m. -2 .

[0080] Depend on Figure 3It is evident that a periodic microlens array composed of spherical lenses exhibits a uniform energy distribution in the emitted light beams when the divergence angle is small; however, when the emitted light beams have a small divergence angle, the energy distribution of the emitted light spot is uniform. Figure 5 It is evident that when a periodic microlens array composed of spherical lenses is required to have a large divergence angle in its outgoing light rays, the light spot corresponding to the outgoing light rays exhibits significant distortion, the energy distribution of the light spot is uneven, and the energy at the edge of the light spot is significantly lower than that at the center of the light spot.

[0081] As can be seen above, when the expected divergence angle is large, the outgoing light obtained by the initial periodic microlens array modulation generally fails to meet the expected uniform light performance. Therefore, in this embodiment, after obtaining the outgoing light modulated by the initial periodic microlens array, the conic coefficient of each microlens in the periodic microlens array is modified with the expected divergence angle and expected uniform light performance as the target, thereby optimizing the conic coefficient and thus correcting the microlens to aspherical lenses. This allows the outgoing light to meet both the expected divergence angle and part of the expected uniform light performance, resulting in an optimized periodic microlens array as the output.

[0082] It should be noted that when the light emitted by the light source is coherent, there will be some interference between the emitted light rays as they pass through the periodically arranged microlenses. Simply optimizing the conic coefficient is insufficient to effectively reduce the degree of interference between the emitted light rays as they pass through different microlenses. Therefore, while optimizing the conic coefficient of each microlens in the periodic microlens array can ensure that the emitted light fully meets the expected divergence angle, it only satisfies a portion of the expected uniformity performance, and there is still a certain gap between this and the final required uniformity performance.

[0083] To compensate for the shortcomings of the optimized periodic microlens array, after obtaining the optimized periodic microlens array, the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized. This effectively reduces the interference between the light emitted from the light source when passing through different microlenses, thus ensuring that the emitted light fully meets the expected divergence angle and also fully meets the expected uniform light performance. After randomization, randomized microlenses with random apertures and randomized radii of curvature are obtained.

[0084] After obtaining the random microlenses, the phase applied by each random microlens to the light emitted by the light source is calculated based on the height of each random microlens, that is, the target phase corresponding to each random microlens.

[0085] Furthermore, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source can be obtained. After determining the phase required by each superlens, each superlens for providing the corresponding phase can be designed and generated. Then, by arranging each superlens, a superlens array for homogenizing the light source is obtained. It should be noted that even if the light emitted by the light source is coherent, after being incident on this superlens array, the outgoing light can still have a large divergence angle while also possessing high homogenization performance.

[0086] In one embodiment, the light source is a vertical-cavity surface-emitting laser (VCSEL) or a VCSEL array.

[0087] Specifically, the superlens array obtained by the method provided in this application, when facing a single VCSEL, enables the emitted light to have a large divergence angle and high uniformity; when facing a VCSEL array composed of multiple VCSELs, it also improves the uniformity of the emitted light even with a large divergence angle. When the light source is a VCSEL, the light intensity emitted by the light source exhibits a ring-shaped distribution with low intensity at the center and high intensity at the edges. In this embodiment, using a VCSEL as the light source enables the light source to have advantages such as low power consumption, low manufacturing cost, high integration, and good heat dissipation performance.

[0088] In one embodiment, the conicity of each microlens in the periodic microlens array is optimized, including:

[0089] Under incoherent conditions, the conic coefficient of each microlens in the periodic microlens array is optimized until the outgoing light meets the expected uniformity and divergence angle under incoherent conditions.

[0090] Specifically, since optimizing the conic coefficient alone is insufficient to effectively reduce the interference between light emitted from the light source when passing through different microlenses, when optimizing the conic coefficient, if the interference between light emitted from the light source when passing through different microlenses is taken into account, it is difficult to use the expected uniform light performance as the criterion for termination of optimization, thus making it difficult for the optimization process of the conic coefficient to converge.

[0091] Therefore, in this embodiment, the interference between the light emitted by the light source and the light rays passing through different microlenses is not considered for the time being. That is, the conic coefficient of each microlens is optimized directly under incoherent conditions until the outgoing light rays meet the expected uniformity performance and the expected divergence angle under incoherent conditions. Thus, the optimization process of the conic coefficient can be terminated in a timely manner with accurate judgment conditions.

[0092] It should be noted that the fact that the emitted light meets the expected uniformity performance under incoherent conditions does not mean that the emitted light meets the expected uniformity performance required in the final application.

[0093] Detailed Figure 6 The diagram illustrates the light modulation of the optimized periodic microlens array after optimizing the conic coefficient of each microlens in the large divergence angle periodic microlens array under incoherent conditions in one embodiment. Figure 7 It shows Figure 6 A schematic diagram of the energy distribution of the emitted light from the optimized periodic microlens array in the embodiment under incoherent conditions. Figure 8 It shows Figure 6 A schematic diagram of the energy distribution of the emitted light from the optimized periodic microlens array in the embodiment under coherent conditions. Figure 7 and Figure 8 In the diagram, the X-coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, with units of mm; the Y-coordinate value represents the Y-axis coordinate of the two-dimensional plane in which the light spot is located, with units of mm; and the unit of irradiance is W·m. -2 .

[0094] Depend on Figures 6 to 8 It is evident that after optimizing the conic coefficient of each microlens in the periodic microlens array under incoherent conditions, the outgoing light from the optimized periodic microlens array exhibits both a large divergence angle and high uniformity under incoherent conditions. However, when transitioning to coherent conditions, although the outgoing light still possesses a large divergence angle, its spot exhibits more pronounced interference, falling short of the desired high uniformity. This demonstrates that the outgoing light meeting the expected uniformity under incoherent conditions does not guarantee that it will meet the final expected uniformity requirement.

[0095] In one embodiment, the light emitted by the light source is coherent light; the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized so that the emitted light meets the expected uniformity performance and the expected divergence angle, including:

[0096] Under coherent conditions, the radius of curvature and aperture of each microlens in the optimized periodic microlens array are randomized until the outgoing light meets the expected uniformity and divergence angle under coherent conditions.

[0097] Specifically, when the light emitted by the light source is coherent, the outgoing light obtained by modulation through the optimized periodic microlens array, while fully satisfying the large divergence angle, struggles to fully satisfy high uniformity performance. Therefore, after obtaining the optimized periodic microlens array, under coherent conditions, the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized. This effectively reduces the degree of interference between the light emitted by the light source as it passes through different microlenses, until the outgoing light satisfies the expected uniformity performance and the expected divergence angle under coherent conditions.

[0098] In one embodiment, when randomizing the aperture and radius of curvature of each microlens in the optimized periodic microlens array, the aperture and radius of curvature of the microlens before randomization can be determined first. Then, based on the aperture and radius of curvature before randomization, the aperture range and radius of curvature range where randomization is located can be determined. Then, the aperture is randomized within the aperture range and randomized within the radius of curvature range.

[0099] When determining the range of caliber and radius of curvature where randomization occurs, based on the caliber and radius of curvature before randomization, the caliber and radius of curvature before randomization can be used as the boundary values ​​of the range, or they can be used as the intermediate values ​​of the range.

[0100] For example, if the aperture of a microlens before randomization is 40μm, then 40μm can be used as the interval boundary value to determine the aperture interval where randomization occurs as [40μm, 50μm].

[0101] For example, if the radius of curvature of a microlens before randomization is 0.017 mm, then the radius of curvature range during randomization can be determined as [0.015 mm, 0.019 mm], with 0.017 mm as the midpoint of the range.

[0102] In one embodiment, the target phase corresponding to each random microlens is calculated based on the vector height of each random microlens, including:

[0103] The target phase is calculated using the following formula:

[0104]

[0105] Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and z be the wavelength of the light emitted by the light source. r Let max(z) be the vector height of the corresponding discrete position on the random microlens. r ) represents the maximum sag on the random lens, and n represents the refractive index of the random microlens.

[0106] Specifically, the random microlens can be discretely sampled to determine multiple discrete positions on the random microlens, and then the target phase corresponding to each discrete position on the random microlens can be calculated using the method provided in this embodiment.

[0107] Figure 9 A schematic cross-sectional view of a plano-convex thin lens taken along the direction of light propagation in one embodiment is shown. See also Figure 9 As can be seen, when the random microlens is a plano-convex thin lens, or can be approximated as a plano-convex thin lens, a tangent line can be drawn along the vertex of the plano-convex thin lens, thereby combining the plano-convex thin lens with the air above it to form an equivalent flat plate.

[0108] According to the formula that optical path length equals refractive index multiplied by the distance traveled by light, the sum of optical paths at each position on the equivalent plate, i.e., the sum of optical paths at each discrete position on the random microlens, is equal to the optical path length z of the lens layer. r *n and the optical path of the air layer [max(z)] r )-z r The sum of ]*1 is equal to {z r *n+[max(z r )-z r ]*1}. The equivalent plate surface perpendicular to the optical axis is two-dimensional. By iterating through the maximum values ​​of the vector height in these two dimensions, the maximum vector height max(z) on the random lens is obtained. r ); and 1 represents the refractive index of air.

[0109] After calculating the total optical path length at each discrete position on the random microlens, and combining this with the wavelength λ of the light emitted by the light source, the target phase corresponding to each discrete position on the random microlens can be calculated.

[0110] Furthermore, the vector height z at the corresponding discrete position on the random microlens r It can be calculated using the following formula:

[0111]

[0112] Where c is the curvature and k0 is the conic coefficient.

[0113] In one embodiment, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including:

[0114] Based on the one-to-one matching relationship between the superlens and the random microlenses, the target phase corresponding to each random microlens is assigned to the corresponding superlens to obtain the target phase corresponding to each superlens.

[0115] Based on the target phase corresponding to each superlens, obtain the phase required by each superlens.

[0116] In this embodiment, each superlens in the superlens array to be acquired is matched one-to-one with each random microlens. The number of superlenses is the same as the number of random microlenses, and preferably, the matched superlenses and random microlenses are in the same position in their respective arrays (for example, the superlens numbered M01 is matched with the random microlens numbered F01; if the superlens numbered M01 is located at the center of the superlens array, then the random microlens numbered F01 is also located at the center of the random microlens array).

[0117] Specifically, after calculating the target phase corresponding to each random microlens, the target phase corresponding to each random microlens can be assigned to a matching superlens according to the one-to-one matching relationship between superlenses and random microlenses, thereby determining the target phase corresponding to each superlens. Based on the target phase corresponding to each superlens, the phase required by each superlens for homogenizing the light source can be further determined.

[0118] It should be noted that the target phase corresponding to the superlens may be the same as or different from the phase that the superlens needs to provide.

[0119] In one embodiment, based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including:

[0120] Based on the target phase corresponding to each random microlens, obtain the target phase corresponding to the random microlens array;

[0121] According to the target distribution position of the superlens in the superlens array, each superlens is matched with the target phase corresponding to the random microlens array to obtain the target phase corresponding to each superlens;

[0122] Based on the target phase corresponding to each superlens, obtain the phase required by each superlens.

[0123] In this embodiment, each superlens in the superlens array to be acquired may not necessarily match each random microlens one-to-one. The number of superlenses may not be the same as the number of random microlenses, and the positional distribution of the superlenses in the superlens array may not be the same as the positional distribution of the random microlenses in the random microlens array.

[0124] Specifically, after calculating the target phase corresponding to each random microlens, a fitting method can be used to obtain the target phase corresponding to the random microlens array. Based on the target phase corresponding to the random microlens array, the target phase corresponding to any position in the random microlens array can be determined.

[0125] After determining the target distribution positions of the superlenses within the superlens array, the target phase of the random microlens array corresponding to those positions is determined. Then, the target phase of the random microlens array corresponding to the target distribution positions is assigned to the corresponding superlenses, thus obtaining the target phase corresponding to each superlens (for example, both the superlens array and the random microlens array are divided into m*n cells, and each cell is numbered using the same numbering method. After determining that the superlens numbered M01 is located in cell 01 of the superlens array, the target phase corresponding to the random microlens array in cell 01 can be determined, and this target phase is assigned to the superlens numbered M01, thus obtaining the target phase corresponding to the superlens numbered M01). Based on the target phase corresponding to each superlens, the phase required by each superlens for homogenizing the light source can be further determined.

[0126] It should be noted that the target phase corresponding to the superlens may be the same as or different from the phase that the superlens needs to provide.

[0127] In one embodiment, based on the target phase corresponding to each superlens, the required phase provided by each superlens is obtained, including:

[0128] The target phase corresponding to each superlens is determined as the phase that each superlens needs to provide.

[0129] In this embodiment, the target phase corresponding to each superlens is directly determined as the phase that needs to be provided.

[0130] In one embodiment, before simulating the incident light emitted by the light source onto the periodic microlens array, the method provided in this application further includes: applying a collimating phase to the light emitted by the light source.

[0131] Based on the target phase corresponding to each superlens, the phase required by each superlens is obtained, including: superimposing the collimated phase with the target phase corresponding to each superlens to obtain the phase required by each superlens.

[0132] Specifically, considering that the homogenization performance of a periodic microlens array for parallel light is generally better than that for non-parallel light, in this embodiment, a collimation phase is first applied to the light emitted by the light source to process the light emitted by the light source into parallel light. This enables the emitted light to have better homogenization performance when the light emitted by the light source is incident on the periodic microlens array for simulation.

[0133] Furthermore, considering that the light emitted by the light source in this embodiment is collimated before it is incident on the periodic microlens array, the superlens also needs to provide a collimated phase when homogenizing the light source. Therefore, after obtaining the target phase corresponding to each superlens, the collimated phase is superimposed with the target phase corresponding to each superlens to obtain the phase required by each superlens.

[0134] In one embodiment, applying a collimation phase to the light emitted by the light source includes:

[0135] A two-dimensional plane is used to apply a collimating phase to the light emitted by the light source.

[0136] Understandably, in addition to using a binary surface to apply collimation phase to the light emitted by the light source, other optical lenses can also be used to apply collimation phase to the light emitted by the light source.

[0137] In one embodiment, a radial light source is used in Zemax to simulate a VCSEL. The light emitted by this light source exhibits a distribution of low energy in the middle and high energy around the edges. Furthermore, when the injected current of the light source reaches the threshold current value and begins to operate, the emitted light has high coherence.

[0138] Before the light emitted by the light source is incident on the periodic microlens array, a binary surface is added in Zemax and the coefficient of the binary surface is optimized so that the binary surface can collimate the light emitted by the light source and apply collimation phase.

[0139] In this embodiment, the collimation phase applied by the binary plane to the light emitted by the light source is:

[0140]

[0141] in, is the collimated phase; r is the radius of the corresponding position on the binary plane, i.e., the distance between the corresponding position and the center of the binary plane, in mm; -4400 is the phase coefficient, in mm.

[0142] After collimation is performed in Zemax, the light emitted by the light source is incident on a periodic microlens array. In order to ensure that the emitted light modulated by the periodic microlens array has both high homogeneity and a large divergence angle, the conic coefficient of each microlens in the periodic microlens array needs to be optimized first. Then, the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized to break spatial coherence and reduce the degree of interference between the light emitted by the light source when passing through different microlenses.

[0143] When optimizing the conic coefficient, if the interference between different microlenses is considered, it is difficult to use the expected uniform light performance as the criterion for termination of optimization, which makes it difficult for the optimization process of the conic coefficient to converge. Therefore, in Zemax, the conic coefficient of each microlens is optimized under incoherent conditions until the outgoing light meets the expected uniform light performance and the expected divergence angle under incoherent conditions.

[0144] After optimization of the conicity coefficient, the conicity coefficient of each microlens in the optimized periodic microlens array is -0.94, the aperture (in this embodiment, the aperture refers to the diameter) is 40μm, and the radius of curvature is 0.017mm.

[0145] To reduce the interference between light rays emitted from the light source as they pass through different microlenses, it is necessary to randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array. Since randomization is difficult to achieve in Zemax, this embodiment uses MATLAB to randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array and simulates the uniformity effect of the emitted light before and after randomization.

[0146] The randomized microlenses obtained after randomization have apertures randomly distributed between 40 and 50 μm and radii of curvature randomly distributed between 0.015 and 0.019 mm.

[0147] Figure 10 This diagram illustrates the energy distribution of the emitted light from the optimized periodic microlens array under coherent conditions in this embodiment. Figure 10 In the figure, the X coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, in mm; the Y coordinate value represents the Y-axis coordinate of the two-dimensional plane in which the light spot is located, in mm; the normalized irradiance has no unit. Figure 11 This shows a point that passes through the center of the light spot and is parallel to the X-axis, and is intercepted. Figure 10 The embodiment shows a schematic diagram of the energy distribution on a one-dimensional line segment in the two-dimensional region where the light spot is located. Figure 11 In the figure, the X coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, and the unit is mm; the normalized irradiance has no unit.

[0148] Depend on Figure 10 and Figure 11 It is evident that, under coherent conditions, the emitted light from the optimized periodic microlens array before randomization exhibits a dot matrix pattern, indicating that the uniform light distribution performance of the optimized periodic microlens array before randomization is relatively low.

[0149] Figure 12 This diagram illustrates the energy distribution of the emitted light from the random microlens array under coherent conditions in this embodiment. Figure 12 In the diagram, the X coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, in mm; the Y coordinate value represents the Y-axis coordinate of the two-dimensional plane in which the light spot is located, in mm. Figure 12 The normalized irradiance is dimensionless, and... Figure 12 The normalized irradiance is based on Figure 10 The normalized irradiance values ​​were based on the range of values ​​before normalization. Figure 12 The maximum normalized irradiance is less than 1, at only 0.4. Figure 13 This shows a point that passes through the center of the light spot and is parallel to the X-axis, and is intercepted. Figure 12 The embodiment shows a schematic diagram of the energy distribution on a one-dimensional line segment in the two-dimensional region where the light spot is located. Figure 13 In the diagram, the X-coordinate value represents the X-axis coordinate of the two-dimensional plane in which the light spot is located, and the unit is mm; Figure 13 The normalized irradiance is dimensionless, and... Figure 13 The normalized irradiance is based on Figure 12 The normalized irradiance values ​​in the range [0, 0.4] were used as the reference for normalization.

[0150] Depend on Figure 12 and Figure 13 It is evident that, under coherent conditions, the lattice phenomenon in the emitted light spot of the randomized microlens array is reduced, indicating that the uniform light performance of the randomized microlens array is improved compared to the periodic microlens array before randomization.

[0151] After obtaining a random microlens array whose outgoing rays satisfy high uniformity and large divergence angle, the sag of each random microlens is calculated according to the following formula:

[0152]

[0153] Among them, z r Let be the sag of the corresponding discrete position on the random microlens, c be the curvature, and k0 be the conic coefficient.

[0154] Then, the target phase corresponding to each random microlens is calculated using the following formula:

[0155]

[0156] Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and z be the wavelength of the light emitted by the light source. r Let max(z) be the vector height of the corresponding discrete position on the random microlens. r ) represents the maximum sag on the random lens, and n represents the refractive index of the random microlens.

[0157] In this embodiment, the superlens is matched one-to-one with the random microlens. Therefore, the target phase corresponding to each random microlens is calculated. Then, according to the one-to-one matching relationship between the superlens and the random microlenses, the target phase corresponding to each random microlens is... The target phase is determined by assigning it to a matching superlens.

[0158] Then the collimation phase applied to the binary surface The target phase corresponding to each superlens Superposition is performed to obtain the phase required by each superlens.

[0159] Determine the phase required for each superlens Then, micro- and nano-structures can be selected based on factors such as operating wavelength and materials. These selected micro- and nano-structures are then arranged to obtain structures capable of providing phase information. Each of the superlenses is then arranged to form a superlens array whose outgoing rays simultaneously satisfy high uniformity and a large divergence angle.

[0160] In this embodiment, the final superlens array consists of 18*18 superlenses. Figure 14 A schematic diagram of the final superlens array obtained in this embodiment is shown. Figure 14 In this context, the unit of phase is radians; the number of samples is dimensionless and refers to the number of samples obtained when sampling the micro- and nano-structures in the superlens. In this embodiment, the sampling period of the micro- and nano-structures is 0.5 μm, that is, the spacing between two adjacent micro- and nano-structures obtained from sampling is 0.5 μm.

[0161] This application also provides a superlens array, which is generated by the method provided in any of the above-described method embodiments. This superlens array is used to homogenize the light emitted by a light source. Refer to the specific implementation details of any of the above-described method embodiments; the generation process of the superlens array will not be repeated here.

[0162] See Figure 14In one embodiment, the superlens array includes a plurality of superlenses, each superlens including a substrate and a superstructure unit located on the surface of the substrate. The apex and / or center of the superstructure unit is provided with a micro-nano structure, and the filling material between the micro-nano structures is air or other materials that are transparent in the working wavelength band.

[0163] Understandable. Figure 14 The illustrated superlens array is merely exemplary. For the superlens array provided in this application, Figure 14 There should be no restrictions on its shape, the number of superlenses it contains, the shape of the superlenses it contains, the arrangement of the superlenses it contains, the shape of the micro / nano structures on the superlenses it contains, or the number of micro / nano structures on the superlenses it contains.

[0164] This application also provides a light homogenizing system, comprising: a light source; and a superlens array for homogenizing the light emitted by the light source. The superlens array is generated by the method provided in any of the above-described method embodiments.

[0165] Figure 15 A schematic diagram of the light homogenizing system according to one embodiment of this application is shown. See also Figure 15 In one embodiment, the light homogenizing system includes a light source 3 and a superlens array 2. The superlens array 2 includes a plurality of superlenses 21, each superlens 21 including a substrate and a superstructure unit located on the surface of the substrate, wherein the apex and / or center of the superstructure unit is provided with a micro / nano structure (…). Figure 15 The black structure in the image is filled with air or other transparent materials in the working wavelength range.

[0166] In this homogenizing system, light propagates along the object side (A) to the image side (A') of the homogenizing system. Specifically, the light emitted by the light source 3 is incident on the superlens array 2, and after modulation by the superlens array 2, the resulting outgoing light satisfies the expected homogenizing performance and the expected divergence angle. Figure 15 In this embodiment, the micro-nano structure is disposed on the surface of the superlens 21 facing the light source 3, but this does not mean that the micro-nano structure can only be disposed on the surface of the superlens 21 facing the light source 3; in other embodiments, the micro-nano structure can also be disposed on the surface of the superlens 21 facing away from the light source 3.

[0167] Understandable. Figure 15 The light homogenizing system shown is merely exemplary. For the light homogenizing system provided in this application, Figure 15 There should be no restrictions on the surface on which the micro- or nanostructure is located, the shape of the micro- or nanostructure, or the number of superlenses contained in its superlens array.

[0168] Figure 16 A block diagram of the superlens array acquisition device provided in this application is shown. See also Figure 16 The superlens array acquisition device provided in this application includes:

[0169] The simulation module 410 is configured to simulate the incident light emitted by the light source onto the periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein the periodic microlens array includes at least two periodically arranged microlenses.

[0170] The optimization and randomization module 420 is configured to optimize the conic coefficient of each microlens in the periodic microlens array, output the optimized periodic microlens array, and randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array so that the outgoing light meets the expected uniformity performance and the expected divergence angle, resulting in random microlenses with random aperture and random radius of curvature.

[0171] The random microlens phase calculation module 430 is configured to calculate the target phase corresponding to each random microlens based on the vector height of each random microlens.

[0172] The superlens phase acquisition module 440 is configured to acquire the phase required by each superlens when homogenizing the light source, based on the target phase corresponding to each random microlens.

[0173] The superlens array acquisition module 450 is configured to acquire a superlens array for homogenizing the light source based on the phase required by each superlens.

[0174] In an exemplary embodiment of this application, the light source is a vertical cavity surface-emitting laser (VCSEL) or a VCSEL array.

[0175] In an exemplary embodiment of this application, the optimization and randomization module 420 is configured as follows:

[0176] Under incoherent conditions, the conic coefficient of each microlens in the periodic microlens array is optimized until the outgoing light meets the expected uniformity and divergence angle under incoherent conditions.

[0177] In an exemplary embodiment of this application, the light emitted by the light source is coherent light; the optimization and randomization module 420 is configured as follows:

[0178] Under coherent conditions, the radius of curvature and aperture of each microlens in the optimized periodic microlens array are randomized until the outgoing light meets the expected uniformity and divergence angle under coherent conditions.

[0179] In an exemplary embodiment of this application, the random microlens phase calculation module 430 is configured as follows:

[0180] The target phase is calculated using the following formula:

[0181]

[0182] Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and z be the wavelength of the light emitted by the light source. r Let max(z) be the vector height of the corresponding discrete position on the random microlens. r ) represents the maximum sag on the random lens, and n represents the refractive index of the random microlens.

[0183] In an exemplary embodiment of this application, the superlens phase acquisition module 440 is configured as follows:

[0184] Based on the one-to-one matching relationship between the superlens and the random microlenses, the target phase corresponding to each random microlens is assigned to the corresponding superlens to obtain the target phase corresponding to each superlens.

[0185] Based on the target phase corresponding to each superlens, obtain the phase required by each superlens.

[0186] In an exemplary embodiment of this application, the superlens phase acquisition module 440 is configured as follows:

[0187] Based on the target phase corresponding to each random microlens, obtain the target phase corresponding to the random microlens array;

[0188] According to the target distribution position of the superlens in the superlens array, each superlens is matched with the target phase corresponding to the random microlens array to obtain the target phase corresponding to each superlens;

[0189] Based on the target phase corresponding to each superlens, obtain the phase required by each superlens.

[0190] In an exemplary embodiment of this application, the superlens phase acquisition module 440 is configured as follows:

[0191] The target phase corresponding to each superlens is determined as the phase that each superlens needs to provide.

[0192] In an exemplary embodiment of this application, the apparatus provided in this application is configured to: apply a collimation phase to the light emitted by the light source before simulating the incident light of the light source onto the periodic microlens array;

[0193] The superlens phase acquisition module 440 is configured to superimpose the collimated phase with the target phase corresponding to each superlens to obtain the phase required by each superlens.

[0194] In one exemplary embodiment of this application, the apparatus provided in this application is configured as follows:

[0195] A two-dimensional plane is used to apply a collimating phase to the light emitted by the light source.

[0196] This application also provides an electronic device. This electronic device is manifested in the form of a general-purpose computing device. The components of the electronic device may include, but are not limited to: at least one processor, at least one memory, and a bus connecting different system components (including the memory and the processor).

[0197] The memory stores program code that can be executed by a processor, causing the processor to perform the steps of the various exemplary embodiments of the present invention described in the exemplary method embodiments described above. For example, the processor can perform actions such as... Figure 1 The processor may also include the steps shown in the diagram. Figure 16 The various modules shown are executed as follows: Figure 16 The steps configured for each module shown herein thus support Figure 16 The implementation of each module shown.

[0198] The memory may include readable media in the form of volatile memory, such as random access memory (RAM) and / or cache memory, and may further include read-only memory (ROM).

[0199] The memory may also include programs / utilities having a set (at least one) of program modules, including but not limited to: an operating system, one or more application programs, other program modules, and program data, each or some combination of these examples may include an implementation of a network environment.

[0200] A bus can represent one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, a graphics acceleration port, a processor, or a local bus that uses any of the various bus structures.

[0201] This application also provides a computer-readable storage medium storing computer-readable instructions thereon, which, when executed by a computer's processor, cause the computer to perform the method provided in any of the above embodiments.

[0202] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the appended claims.

Claims

1. A method for acquiring a superlens array, characterized in that, The method includes: The light emitted by the light source is simulated and incident on a periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein the periodic microlens array includes at least two periodically arranged microlenses; Under incoherent conditions, the conic coefficient of each microlens in the periodic microlens array is optimized until the outgoing light meets the expected uniformity and divergence angle under incoherent conditions. The optimized periodic microlens array is then output, and the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized so that the outgoing light meets the expected uniformity and divergence angle, resulting in random microlenses with random apertures and random radii of curvature. Based on the vector height of each random microlens, the target phase corresponding to each random microlens is calculated, including: The target phase is calculated using the following formula: Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and λ be the wavelength of the light emitted by the light source. Let be the vector height of the corresponding discrete position on the random microlens. The maximum sag on the random microlens is n, and the refractive index of the random microlens is n. Based on the target phase corresponding to each random microlens, obtain the phase required by each superlens when homogenizing the light source; Based on the phase required by each of the superlenses, a superlens array for homogenizing the light source is obtained.

2. The method according to claim 1, characterized in that, The light source is a vertical cavity surface-emitting laser (VCSEL) or a VCSEL array.

3. The method according to claim 1, characterized in that, The light emitted by the light source is coherent light; the aperture and radius of curvature of each microlens in the optimized periodic microlens array are randomized so that the emitted light meets the expected uniformity and divergence angle, including: Under coherent conditions, the radius of curvature and aperture of each microlens in the optimized periodic microlens array are randomized until the outgoing light meets the expected uniformity and divergence angle under coherent conditions.

4. The method according to claim 1, characterized in that, Based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including: According to the one-to-one matching relationship between the superlens and the random microlenses, the target phase corresponding to each random microlens is assigned to the corresponding superlens to obtain the target phase corresponding to each superlens; Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained.

5. The method according to claim 1, characterized in that, Based on the target phase corresponding to each random microlens, the phase required by each superlens for homogenizing the light source is obtained, including: Based on the target phase corresponding to each random microlens, the target phase corresponding to the random microlens array is obtained; According to the target distribution position of the superlens in the superlens array, each superlens is matched with the target phase corresponding to the random microlens array to obtain the target phase corresponding to each superlens; Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained.

6. The method according to claim 4 or 5, characterized in that, Based on the target phase corresponding to each superlens, obtain the phase required by each superlens, including: The target phase corresponding to each superlens is determined as the phase that each superlens needs to provide.

7. The method according to claim 4 or 5, characterized in that, Before simulating the incident light emitted by the light source onto the periodic microlens array, the method further includes: applying a collimating phase to the light emitted by the light source; Based on the target phase corresponding to each superlens, the phase required to be provided by each superlens is obtained, including: superimposing the collimated phase with the target phase corresponding to each superlens to obtain the phase required to be provided by each superlens.

8. The method according to claim 7, characterized in that, Applying a collimation phase to the light emitted by the light source includes: A collimation phase is applied to the light emitted by the light source using a binary plane.

9. A superlens array, characterized in that, The superlens array is generated by the method described in any one of claims 1 to 8; the superlens array is used to homogenize the light emitted by the light source.

10. A light homogenizing system, characterized in that, The light homogenizing system includes: a light source; and a superlens array for homogenizing the light emitted by the light source; the superlens array is generated by the method described in any one of claims 1 to 8.

11. A device for acquiring a superlens array, characterized in that, The device includes: The simulation module is configured to simulate the incident light emitted by the light source onto the periodic microlens array to obtain the outgoing light modulated by the periodic microlens array; wherein the periodic microlens array includes at least two periodically arranged microlenses. The optimization and randomization module is configured to optimize the conic coefficient of each microlens in the periodic microlens array under incoherent conditions until the outgoing light meets the expected uniformity performance and the expected divergence angle under incoherent conditions, output the optimized periodic microlens array, and randomize the aperture and radius of curvature of each microlens in the optimized periodic microlens array so that the outgoing light meets the expected uniformity performance and the expected divergence angle, thereby obtaining random microlenses with random aperture and random radius of curvature. The random microlens phase calculation module is configured to calculate the target phase corresponding to each random microlens based on the vector height of each random microlens, including: The target phase is calculated using the following formula: Where r is the radius of the corresponding discrete position on the random microlens. Let λ be the target phase corresponding to the discrete position on the random microlens, and λ be the wavelength of the light emitted by the light source. Let be the vector height of the corresponding discrete position on the random microlens. The maximum sag on the random microlens is n, and the refractive index of the random microlens is n. The superlens phase acquisition module is configured to acquire the phase required by each superlens when homogenizing the light source, based on the target phase corresponding to each random microlens. The superlens array acquisition module is configured to acquire a superlens array for homogenizing the light source based on the phase required by each superlens.

12. An electronic device, characterized in that, include: One or more processors; A memory for storing one or more programs that, when executed by one or more processors, cause the electronic device to perform the method as described in any one of claims 1 to 8.

13. A computer-readable storage medium, characterized in that, It stores computer-readable instructions that, when executed by a computer's processor, cause the computer to perform the method described in any one of claims 1 to 8.

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