A clean room ffu regulation design method, system and device based on personnel positioning

Abstract

The application discloses a clean room FFU regulation design method, system and equipment based on personnel positioning, which comprises a personnel positioning label, a UWB base station, a server, an FFU control system, a signal transmission device and the like; the application gives a clean room space division method and a personnel real-time positioning method which are universally applicable to different clean room grades; the relationship between personnel positions and dust emission, and the relationship between clean room positive pressure and outlet air speed are established; according to the positions of FFUs in each area and the positions and number of personnel, the FFU fan speed control logic under different conditions is established; through personnel position feedback, the relationship between personnel and fan positions and the FFU air speed regulation idea, the overall FFU power consumption of the clean room is greatly reduced while the cleanliness, temperature and humidity of the clean room are ensured, and problems such as clean room cold and heat offset caused by fan heat dissipation are reduced. The control logic of the application method is clear and reliable, and a reliable path is provided for efficient, energy-saving and emission-reducing operation of the clean room.

Description

Technical Field

[0001] This invention relates to the field of cleanroom airflow organization optimization design, specifically a cleanroom FFU control design method, system, and equipment based on personnel positioning. Background Technology

[0002] With the development of domestic semiconductors towards ultra-high-density semiconductor chips, especially in electronic and aerospace technologies, the requirements for environmental control during experiments and production processes are becoming increasingly stringent. The units of measurement in the electronics industry have also evolved from the micrometer level to the nanometer level. In this high-precision industry, dust, airflow, temperature, humidity, and electronic fields all have a significant impact on the quality of products manufactured in the electronics industry.

[0003] Because designers have long prioritized ensuring clean environment quality and product qualification rates, they have rarely considered energy-saving measures and have left a large margin during the design phase. This situation has led to even greater energy waste.

[0004] In high-level cleanrooms, people are one of the main sources of contaminants, and the required air volume for areas without contaminant sources differs significantly from that of other areas.

[0005] Therefore, the FFUs in existing cleanrooms operate with a global constant air volume. On the one hand, the air volume far exceeds the cleanliness required, resulting in wasted fan power consumption. On the other hand, the increase in fan power consumption will lead to a corresponding increase in cooling load, which will put a burden on the refrigeration unit.

[0006] The aforementioned problems result in huge annual energy consumption in cleanrooms, causing a large amount of unnecessary energy consumption. How to reduce energy consumption while ensuring the quality of the cleanroom environment is an important measure to achieve the goal of efficient and high-quality construction of cleanroom projects. Summary of the Invention

[0007] To address the shortcomings of existing technologies, this invention provides a cleanroom FFU control design method, system, and equipment based on personnel positioning, aiming to solve the aforementioned problems.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] A cleanroom FFU control design method based on personnel positioning includes the following steps:

[0010] Step 1: Based on the actual design drawings, the layout of cleanroom process equipment, and the characteristics of the production process, divide the cleanroom into several areas;

[0011] Step 2: Number and name the divided regions, and determine the FFU corresponding to each region based on the division results;

[0012] Step 3: Determine the cleanroom reference point, establish a three-dimensional coordinate system for the cleanroom area where the reference point is located, and combine the coordinates with the floor plan to present them to the control terminal;

[0013] Step 4: The pulse signals sent by the users are transmitted to the data processing system to obtain the real-time location of the indoor users, mark them in the three-dimensional coordinate system, and calculate the number of people in each numbered area in real time.

[0014] Step 5: Establish the relationship between personnel location and dust generation and outlet air velocity. Based on the relationship between FFU location and personnel location and number in each area, establish FFU fan speed control logic for different situations.

[0015] Step 6: Adjust the FFU speed in each area in real time based on the number of people in each area as fed back by the UWB base station in real time and the control logic in Step 5.

[0016] Preferably, the region is divided as follows:

[0017] Cleanroom areas are classified into three categories:

[0018] (1) The area directly below the FFU;

[0019] (2) The area between two parallel FFUs;

[0020] (3) Areas other than those mentioned above.

[0021] Preferably, the real-time pulse signal of the personnel location is fed back to the UWB base station in real time by the positioning tag carried by the personnel, and the real-time results are presented to the client through the switch so that the user can intuitively understand the personnel location and the fan speed.

[0022] Preferably, the UWB server obtains the relative position relationship between personnel and FFUs through a switch, and sends control signals to the FFU unit according to the FFU wind speed control program to adjust the FFU speed in real time.

[0023] Preferably, the FFU speed control step is as follows:

[0024] Step 1: Determine the origin of the coordinate system, construct a three-dimensional planar model of the cleanroom, divide each area into electronic fences, and determine the FFUs belonging to each area;

[0025] Step 2: The positioning tag carried by the personnel sends out pulse signals, which are received by multiple base stations in the clean room and fed back to the server;

[0026] Step 3: The UWB server converts the signal into coordinate information;

[0027] Step 4: The client starts the FFU control program, which calls the personnel location information from the UWB server;

[0028] Step 5: The FFU control program selects the target speed and trigger delay of the FFU, and issues a speed change command;

[0029] Step 6: If continuous operation is required, repeat steps 4 and 5 to obtain personnel location information in real time and update instructions; otherwise, end the operation and terminate the FFU control program.

[0030] Preferably, the cleanroom top view can be divided into multiple two-dimensional spatial ranges in the UWB web interface. When personnel enter the cleanroom carrying positioning tags, the spatial range in which the personnel are located can be identified, and the location of the personnel and the number of personnel in each area can be distinguished.

[0031] Considering the difference in size between the FFU vent and the blind flange, the electronic fence representing the FFU vent should be larger than the vent itself.

[0032] Preferably, the FFU control logic is divided into three categories: stationary personnel, moving personnel, and the intersection of stationary and moving personnel. The wind speed control logic is as follows:

[0033] When people are stationary:

[0034] (1) The personnel are directly below the FFU (position P1).

[0035] a. There is one and only one person directly below the FFU. The FFU rotation speed at this location is 0.35 m / s, while the wind speed of the FFU at other locations is 0.15 m / s.

[0036] b. When there are two or more people directly below the FFU, the FFU rotation speed at that location is 0.4 m / s, and the FFU wind speed at other locations is 0.15 m / s;

[0037] (2) Personnel are positioned between the two FFUs (position P2).

[0038] a. When there is one person between the two FFUs, the rotation speed of both FFUs is 0.35m / s, and the wind speed of the FFUs at other locations is 0.15m / s;

[0039] b. When there are two people between the two FFUs, the rotation speed of both FFUs is 0.4 m / s, and the wind speed of the FFUs at other locations is 0.15 m / s;

[0040] c. When there are 3 or more people between two FFUs, the rotation speed of both FFUs is 0.45m / s, and the wind speed of FFUs in other positions is 0.15m / s;

[0041] (3) Personnel are positioned between the four FFUs (position P3).

[0042] a. When there is one person between the four FFUs, the rotation speed of all four FFUs is 0.35m / s, and the wind speed of the FFUs in other positions is 0.15m / s;

[0043] b. When there are 2 people between the four FFUs, the rotation speed of all four FFUs is 0.4m / s, and the wind speed of the FFUs in other positions is 0.15m / s;

[0044] c. When there are 3 or more people between the four FFUs, the rotation speed of all four FFUs is 0.45m / s, and the wind speed of the FFUs in other positions is 0.15m / s;

[0045] (4) Calculate the FFU outlet velocity based on the number of air changes:

[0046] The concentration of particulate matter emitted by personnel is:

[0047] G = 5000 + 200000 P / F

[0048] Where P represents the number of personnel and F represents the area, in square meters (m²); the higher the cleanroom height, the greater the safety factor for particulate matter concentration per unit volume, and the safer the environment.

[0049] Considering the small area where personnel are located as having a uniform distribution of contaminants, the cleanroom air exchange rate n is:

[0050]

[0051] Where 'a' is the safety factor, taken as 0.5; and 'N' is the dust concentration limit corresponding to the cleanliness level, in cubic meters per cubic meter (pc / m³). 3 N s Dust concentration in the supply air, unit PC / m³ 3 ;

[0052] The corresponding outlet wind speed of the FFU is:

[0053]

[0054] The area of ​​the FFU control area corresponding to the personnel's location is S, in square meters; the height of the cleanroom is H, in meters; and the total area of ​​the corresponding FFU is P, in square meters.

[0055] (5) Minimum FFU rotation speed required to maintain positive pressure in cleanroom:

[0056]

[0057] Where m is the safety factor, taken as 1.2; G1 is the air volume required to maintain positive pressure in the cleanroom, in m³ / s. 3 / h;

[0058] G2 cleanroom exhaust volume, unit m 3 / h; S' is the total area of ​​the cleanroom FFUs, in m2;

[0059] The rotational speed of the FFU near the personnel in the above three cases (1), (2), and (3) is compared with that in (4), and the maximum value of the two is taken as the final wind speed of the FFU around the personnel.

[0060] The rotational speeds of the FFUs in the uninhabited areas under the above three conditions (1), (2), and (3) are compared with those under (5), and the maximum value of the two is taken as the final wind speed of the FFUs in the uninhabited areas.

[0061] When people move:

[0062] (1) When personnel walk directly under the FFU: Based on the walking position, turn on 2 FFUs in succession to 0.35m / s, and after a delay of 4s, reduce the FFU outlet wind speed to the corresponding rotation speed;

[0063] (2) When personnel walk between the two rows: according to the walking position, turn on 4 FFUs around the personnel to 0.35m / s, and after a delay of 4s, reduce the FFU outlet wind speed to the corresponding speed.

[0064] Cross-region of moving and stationary conditions: Calculate the FFU rotation speed when stationary and when moving, and take the maximum value as the FFU control wind speed value.

[0065] A cleanroom FFU control device based on personnel positioning includes a positioning tag, a base station, a UWB server, a computer memory and processor, an FFU wind speed controller, and a computer program stored in the memory and executable on the processor.

[0066] When the processor executes the computer program, it implements the steps of the cleanroom FFU control design method for personnel positioning as described in any one of claims 1 to 7.

[0067] A cleanroom FFU control system based on personnel positioning includes a positioning system, a data processing system, and an FFU speed control system;

[0068] The positioning system includes base stations and tags, which are used to report the number of people in each area, and then transmit the signal to the data processing system;

[0069] After receiving the signal, the data processing system processes the data to obtain the number of people in each area, then analyzes the optimal working plan for the FFU based on the personnel situation, and finally transmits the signal to the FFU speed control system.

[0070] The FFU speed control system receives a signal and controls the corresponding FFU to perform the corresponding operation.

[0071] Compared with the prior art, the present invention has the following beneficial effects:

[0072] (1) In view of the characteristics of the overall non-differential control of FFU fans in cleanrooms and the production process of the factory, this invention proposes a refined control scheme and control system for FFU based on different personnel operation processes and different personnel movement forms. The airflow environment in the cleanroom is precisely adjusted by zone, which can ensure the cleanliness requirements and save a lot of energy consumption.

[0073] (2) This invention provides a precise personnel positioning scheme, including real-time personnel location superimposed with the cleanroom floor plan, electronic fence space division method, signal transmission process, intelligent wind speed control at the FFU terminal, etc., to realize real-time monitoring and output of personnel location, and provide reliable information data for FFU fan control.

[0074] (3) This invention provides FFU wind speed control strategies when personnel are stationary, moving, or a combination of stationary and moving, and provides how to calculate the FFU wind speed control value for different situations based on the number of personnel under different cleanliness levels. Attached Figure Description

[0075] Figure 1 Overall flow chart of cleanroom FFU control based on personnel location;

[0076] Figure 2 Schematic diagram of FFU control signal transmission principle in cleanroom based on personnel positioning;

[0077] Figure 3 FFU control principle diagram based on personnel positioning in cleanrooms;

[0078] Figure 4 Schematic diagram of FFU-controlled UWB positioning principle based on personnel positioning in cleanroom;

[0079] Figure 5 Schematic diagram of FFU-controlled electronic fence division and numbering in a cleanroom based on personnel positioning;

[0080] Figure 6 Schematic diagram of FFU control at different positions when a person is stationary;

[0081] Figure 7 Schematic diagram of FFU control when personnel are in position 1;

[0082] Figure 8 Schematic diagram of FFU control when personnel are in position 2;

[0083] Figure 9 FFU wind speed regulation particulate matter flow CFD simulation image;

[0084] Figure 10 A global particulate matter concentration table for personnel movement location P1;

[0085] Figure 11 The particulate matter concentration table is located above the personnel at position P1. Detailed Implementation

[0086] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0087] In the embodiments, Figure 1 The overall flow chart for cleanroom FFU control based on personnel location includes the following steps:

[0088] Step 1: Based on the actual design drawings, the layout of cleanroom process equipment, and the characteristics of the production process, divide the cleanroom into several areas. The overall area division plan is as follows:

[0089] Cleanroom areas are classified into three categories:

[0090] (1) Area 1 directly below FFU;

[0091] (2) Region 2 between the two parallel FFUs;

[0092] (3) Area 3, excluding the above-mentioned cases;

[0093] Step 2, as follows Figure 5 The diagram shows the division and numbering of the FFU-controlled electronic fence in the cleanroom based on personnel positioning. The above areas are numbered and named, and the FFU corresponding to each area is determined according to the division results.

[0094] Step 3: Determine the cleanroom reference point, establish a three-dimensional coordinate system for the cleanroom area where the reference point is located, and combine the coordinates with the floor plan to present them to the control terminal.

[0095] Step 4: The pulse signal sent by the user is transmitted to the data processing system to obtain the location of the indoor user in real time, mark it in the three-dimensional coordinate system, and calculate the number of people in each numbered area in real time.

[0096] Step 5: Establish the relationship between personnel location, dust generation, and outlet air velocity. Based on the relationship between FFU location and personnel location and number in each area, establish FFU fan speed control logic for different situations.

[0097] Step 6: Adjust the FFU speed in each area in real time based on the number of people in each area as fed back by the UWB base station in real time and the control logic in Step 5.

[0098] Real-time personnel location information, such as Figure 6, Figure 7 , Figure 8 As shown, the real-time pulse signal of the personnel location is fed back to the UWB base station in real time by the positioning tag carried by the personnel, and the real-time results are presented to the client through the switch so that the user can intuitively understand the personnel location and the fan speed.

[0099] Figure 2 Schematic diagram of FFU control signal transmission principle in cleanroom based on personnel positioning. Figure 3 This is a diagram illustrating the FFU control principle for cleanrooms based on personnel positioning. The UWB server obtains the relative positional relationship between personnel and FFUs through a switch and sends control signals to the FFU unit according to the FFU fan speed control program to adjust the FFU speed in real time.

[0100] The steps for adjusting the FFU speed are as follows:

[0101] Step 1: Determine the origin of the coordinate system, construct a three-dimensional planar model of the cleanroom, divide each area into electronic fences, and determine the FFUs belonging to each area.

[0102] Step 2, as follows Figure 4 The diagram shows the principle of FFU-controlled UWB positioning based on personnel positioning in a cleanroom. The positioning tag carried by the personnel sends out pulse signals, which are received by multiple base stations in the cleanroom. The azimuth and elevation angles of the personnel are calculated by the time the signals are fed back to multiple base stations in different directions. The position of the personnel in spatial coordinates is obtained through coupling calculation and fed back to the server.

[0103] Step 3: The UWB server converts the signal into coordinate information.

[0104] Step 4: The client starts the FFU control program, which calls the personnel location information from the UWB server.

[0105] Step 5: The FFU control program selects the target speed and trigger delay of the FFU, and issues a speed change command.

[0106] Step 6: If continuous operation is required, repeat steps 4 and 5 to obtain personnel location information in real time and update instructions; otherwise, end the operation and terminate the FFU control program.

[0107] FFU control logic is divided into three categories: stationary personnel, moving personnel, and areas where stationary and moving personnel intersect. Taking a Class 1000 cleanroom with a 25% FFU deployment rate and stationary personnel positioned below the FFUs as an example, CFD numerical simulation technology is used to simulate the particulate matter concentration values ​​at different distances around personnel under different FFU outlet velocities. When the global velocity is 0.35 m / s, for example... Figure 9 FFU wind speed regulation particulate matter flow CFD simulation images and Figure 10 and Figure 11As shown, particulate matter is trapped around people, with a relatively high concentration of approximately 11,000 pc / m³ only in a very small area near them. 3 The corresponding concentration limit for the Class 1000 range is 35200 pc / m³. 3 To achieve precise control, the wind speed of the FFU above the FFU was kept constant, while the wind speed of other FFUs was reduced to 0.15 m / s. Due to some dispersion of particulate matter emitted by personnel, the particulate matter concentration increased in areas with reduced wind speed, while it decreased near personnel. Overall, the concentration remained far below the corresponding limit of 35,200 pc / m³ for Class 1000 air quality. 3 It meets the environmental requirements of the cleanroom.

[0108] Using this method, for different personnel statuses and locations, with cleanroom length, width, and height of 15.6m, 13.2m, and 4.5m, the FFU wind speed control logic was obtained as follows:

[0109] When people are stationary Figure 6 As shown:

[0110] (1) The personnel are directly below the FFU (position P1).

[0111] a. There is one and only one person directly below the FFU. The FFU rotation speed at this location is 0.35 m / s, while the wind speed of the FFU at other locations is 0.15 m / s.

[0112] b. When there are two or more people directly below the FFU, the FFU rotation speed at that location is 0.4 m / s, and the FFU wind speed at other locations is 0.15 m / s.

[0113] (2) Personnel are positioned between the two FFUs (position P2).

[0114] a. When there is one person between the two FFUs, the rotation speed of both FFUs is 0.35 m / s, and the wind speed of the FFUs at other locations is 0.15 m / s.

[0115] b. When there are two people between the two FFUs, the rotation speed of both FFUs is 0.4 m / s, and the wind speed of the FFUs at other locations is 0.15 m / s.

[0116] c. When there are 3 or more people between two FFUs, the rotation speed of both FFUs is 0.45m / s, and the wind speed of FFUs in other positions is 0.15m / s.

[0117] (3) Personnel are positioned between the four FFUs (position P3).

[0118] a. When there is one person between the four FFUs, the rotation speed of all four FFUs is 0.35m / s, and the wind speed of the FFUs in other positions is 0.15m / s.

[0119] b. When there are 2 people between the four FFUs, the rotation speed of all four FFUs is 0.4m / s, and the wind speed of the FFUs in other positions is 0.15m / s.

[0120] c. When there are 3 or more people between the four FFUs, the rotation speed of all four FFUs is 0.45m / s, and the wind speed of the FFUs in other positions is 0.15m / s.

[0121] (4) To promote the refined control of FFUs in different types of cleanrooms, the following calculation of the FFU outlet velocity based on the number of air changes is performed using one person as an example:

[0122] For location P1, the FFU area is 1.44㎡, and the concentration of particulate matter emitted by personnel is:

[0123]

[0124] Cleanroom air change rate n:

[0125]

[0126] Where 'a' is the safety factor, taken as 0.5; and 'N' is the dust concentration limit corresponding to the cleanliness level, in cubic meters per cubic meter (pc / m³). 3 N s The dust concentration in the supply air is taken as 0, and the unit is PC / m³. 3 .

[0127] The corresponding outlet wind speed of the FFU is:

[0128]

[0129] Take the larger of (1) and the calculated FFU speed, and do not exceed the maximum value, so it is 0.45 m / s.

[0130] For location P2, the FFU control area is 1.44 * 3 = 4.32 m², and the concentration of particulate matter emitted by personnel is:

[0131]

[0132] Cleanroom air change rate n:

[0133]

[0134] Where 'a' is the safety factor, taken as 0.5; and 'N' is the dust concentration limit corresponding to the cleanliness level, in cubic meters per cubic meter (pc / m³). 3 N s The dust concentration in the supply air is taken as 0, and the unit is PC / m³. 3 .

[0135] The corresponding outlet wind speed of the FFU is:

[0136]

[0137] The larger of (2) and the calculated FFU rotation speed is 0.35 m / s.

[0138] For location P3, the FFU control area is 1.44 * 5 = 7.2 m², and the concentration of particulate matter emitted by personnel is:

[0139]

[0140] Cleanroom air change rate n:

[0141]

[0142] Where 'a' is the safety factor, taken as 0.5; and 'N' is the dust concentration limit corresponding to the cleanliness level, in cubic meters per cubic meter (pc / m³). 3 N s The dust concentration in the supply air is taken as 0, and the unit is PC / m³. 3 .

[0143] The corresponding outlet wind speed of the FFU is:

[0144]

[0145] The larger of (3) and the calculated FFU rotation speed is 0.35 m / s.

[0146] (5) Minimum FFU rotation speed required to maintain positive pressure in cleanroom:

[0147] The cleanroom maintains a positive pressure of 10 Pa and has an exhaust volume of 10,000 m³ / h. 3 / h, the required airflow for infiltration through doors and windows is 3 air changes per hour, therefore

[0148] G1=15.6×13.2×4.5×3=2780m 3 / h

[0149]

[0150] The rotational speeds of the FFUs in the uninhabited areas under the three conditions (1), (2), and (3) are compared with those under (5). The maximum value of the two is taken as the final wind speed of the FFUs in the uninhabited areas. The final wind speed in the uninhabited areas is 0.15 m / s.

[0151] When people move:

[0152] (1) People walking directly under the FFU: such as Figure 7 As shown, based on the movement position, two FFUs are continuously turned on to 0.35m / s, and after a 4s delay, the FFU outlet wind speed is reduced to the corresponding rotation speed.

[0153] (2) People move between the two rows below: such as Figure 8 As shown, based on the location of the person, four FFUs around the person are turned on continuously to 0.35 m / s, and after a 4-second delay, the outlet air velocity of the FFUs is reduced to the corresponding rotation speed.

[0154] Cross-region of moving and stationary conditions: Calculate the FFU rotation speed when stationary and when moving, and take the maximum value as the FFU control wind speed value.

[0155] The FFU control device includes a positioning tag, a base station, a UWB server, a computer memory and processor, an FFU wind speed controller, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the steps of the cleanroom FFU control design method for personnel positioning as described above.

[0156] Based on a 20,000 square meter clean area with a 25% FFU (Fan Filter Unit) deployment rate, this equates to approximately 3,500 FFUs. Each FFU has a power of 300W. With a sophisticated FFU control device, areas 4 / 5 of the clean room operate at a low speed of 0.15m / s, while the remaining areas remain unchanged. This saves 54% of the FFU power consumption, resulting in a total annual reduction of 4,970,000 kWh and a saving of 4,970,000 kW in refrigeration unit capacity. Assuming a refrigeration unit COP=6 and an industrial electricity price of 2 yuan / kWh, this translates to an annual saving of 11.6 million yuan.

[0157] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0158] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cleanroom FFU control design method based on personnel positioning, characterized in that, The process includes the following steps: Step 1: Divide the cleanroom into several areas based on the actual design drawings, cleanroom process equipment layout, and production process characteristics; Step 2: Number and name the divided areas, and determine the corresponding FFU for each area based on the division results; Step 3: Determine the cleanroom reference point, establish a three-dimensional coordinate system for the area where the reference point is located, and combine the coordinates with the floor plan to present them to the control terminal; Step 4: Use the pulse signals sent by the users to transmit to the data processing system, obtain the real-time location of the users in the room, mark them in the three-dimensional coordinate system, and calculate the number of people in each numbered area in real time. Step 5: Establish and execute the FFU fan speed control logic, which includes: a) For personnel in a stationary state, establish a dual-track decision-making mechanism based on empirical setpoints and theoretical calculations: a1) Determine the empirically set wind speed value based on the precise position of personnel relative to the FFU and the number of personnel in the area; wherein, the empirical setpoint is determined through CFD numerical simulation optimization; a2) Calculate the theoretically required wind speed value to meet the air change rate requirements based on the number of personnel and the cleanliness level: the concentration of particulate matter emitted by personnel is: G = 5000 + 200000 P / F, Where P is the number of personnel, F is the area of ​​the cleanroom, and n is the number of air changes per minute in the cleanroom. ， Where 'a' is the safety factor, taken as 0.5; 'N' is the dust concentration limit corresponding to the cleanliness level; 'Ns' is the dust concentration in the supply air; then the corresponding outlet air velocity of the FFU is: Where the area of ​​the FFU control area corresponding to the area where the personnel are located is S; the height of the clean room is H; the total area of ​​the corresponding FFU is P; a3) Compare the empirical set value with the theoretically required wind speed value, and take the maximum value of the two as the final wind speed of the FFU around the personnel; b) For the personnel movement status, implement the prediction opening and delayed closing strategy: open the FFU in front along the personnel movement path in advance, and reduce the FFU outlet wind speed 4s after the personnel leave; Step 6, adjust the FFU rotation speed of each area in real time according to the number of personnel in each area based on the real-time feedback signal of the UWB base station and the control logic of step 5.

2. The cleanroom FFU control design method based on personnel positioning according to claim 1, characterized in that, The area division is as follows: the cleanroom area is divided into 3 types: (1) the area directly below the FFU; (2) the area between two parallel FFUs; (3) the area other than the above.

3. The cleanroom FFU control design method based on personnel positioning according to claim 2, characterized in that, The real-time pulse signal of personnel location is fed back to the UWB base station in real time by the positioning tag carried by the personnel, and the real-time results are presented to the client through the switch so that users can intuitively understand the personnel location and the wind turbine speed.

4. The cleanroom FFU control design method based on personnel positioning according to claim 3, characterized in that, The UWB server obtains the relative positions of personnel and FFUs through the switch and sends control signals to the FFU unit according to the FFU wind speed control program to adjust the FFU speed in real time.

5. The cleanroom FFU control design method based on personnel positioning according to claim 4, characterized in that, The FFU speed control steps are as follows: Step 1: Determine the coordinate origin, construct a three-dimensional planar model of the cleanroom, divide each area into electronic fences, and determine the FFUs belonging to each area; Step 2: The positioning tag carried by the personnel sends out pulse signals, which are received by multiple base stations in the cleanroom and fed back to the server; Step 3: The UWB server converts the signals into coordinate information; Step 4: The client starts the FFU control program, which calls the personnel location information from the UWB server; Step 5: The FFU control program selects the target FFU speed and trigger delay, and issues a speed change command; Step 6: When continuous operation is required, repeat steps 4 to 5 to obtain personnel location information in real time and update the command; otherwise, end the operation and terminate the FFU control program.

6. The cleanroom FFU control design method based on personnel positioning according to claim 5, characterized in that, The cleanroom top view can be divided into multiple two-dimensional spatial ranges on the UWB web interface. When personnel enter the cleanroom carrying positioning tags, the spatial range in which the personnel are located can be identified, and the location of the personnel and the number of personnel in each area can be distinguished. Considering the difference between the size of the FFU air vent and the size of the blind plate, the electronic fence representing the FFU air vent should be larger than the size of the air vent itself.

7. The cleanroom FFU control design method based on personnel positioning according to claim 6, characterized in that, The FFU control logic is divided into three categories: personnel stationary, personnel moving, and the intersection of stationary and moving areas. The wind speed control logic is as follows: When personnel are stationary: (1) When personnel are directly below the FFU (position P1) a. There is only one person directly below the FFU. The FFU rotation speed at this position is 0.35 m / s, and the FFU wind speed at other positions is 0.15 m / s; b. When there are two or more people directly below the FFU, the FFU rotation speed at that location is 0.4 m / s, and the FFU wind speed at other locations is 0.15 m / s; (2) When there is one person between the two FFUs (position P2), the rotation speed of both FFUs is 0.35m / s, and the wind speed of the FFUs in other positions is 0.15m / s; b. When there are two people between the two FFUs, the rotation speed of both FFUs is 0.4 m / s, and the wind speed of the FFUs at other locations is 0.15 m / s; c. When there are 3 or more people between two FFUs, the rotation speed of both FFUs is 0.45m / s, and the wind speed of FFUs in other positions is 0.15m / s; (3) When there are 4 people between four FFUs (P3 position) a. When there is 1 person between four FFUs, the rotation speed of all four FFUs is 0.35m / s, and the wind speed of FFUs in other positions is 0.15m / s; b. When there are 2 people between the four FFUs, the rotation speed of all four FFUs is 0.4m / s, and the wind speed of the FFUs in other positions is 0.15m / s; c. When there are 3 or more people between four FFUs, the rotation speed of all four FFUs is 0.45 m / s, and the air velocity of FFUs in other positions is 0.15 m / s; (4) Minimum rotation speed of FFU required to maintain positive pressure in cleanroom: , where m is the safety factor, taken as 1.2; G1 is the air volume required to maintain positive pressure in the cleanroom; G2 is the cleanroom exhaust volume; S' is the total area of ​​the cleanroom FFU; (5) The FFU speed in the unmanned area in the above three cases (1), (2), and (3) is compared with (4), and the maximum value of the two is taken as the final wind speed of the FFU in the unmanned area; When personnel move: (1) When personnel walk directly under the FFU: according to the walking position, continuously turn on 2 FFUs to 0.35m / s, and after a delay of 4s, reduce the FFU outlet wind speed to the corresponding speed; (2) When personnel walk below between two rows: according to the walking position, continuously turn on 4 FFUs around the personnel to 0.35m / s, and after a delay of 4s, reduce the FFU outlet wind speed to the corresponding speed; Cross area between walking and stationary: calculate the FFU speed when stationary and when moving, and take the maximum value as the FFU control wind speed value.

8. A cleanroom FFU control design method based on personnel positioning according to any one of claims 1-7, characterized in that, It also includes a cleanroom FFU control device based on personnel location, which includes a positioning tag, a base station, a UWB server, a computer memory and processor, an FFU wind speed controller, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the cleanroom FFU control design method based on personnel location as described in any one of claims 1 to 7.

9. A cleanroom FFU control design method based on personnel positioning according to any one of claims 1-7, characterized in that, The system also includes a cleanroom FFU control system based on personnel location, the system being configured to implement the steps of the method as described in any one of claims 1 to 7, the system specifically including a positioning system, a data processing system, and an FFU speed control system; the positioning system includes base stations and tags for feeding back the number of personnel in each area, and then transmitting the signal to the data processing system; after receiving the signal, the data processing system processes the data to obtain the number of personnel in each area, and then analyzes the optimal working scheme of the FFU based on the personnel situation, and finally transmits the signal to the FFU speed control system; the FFU speed control system receives the signal and controls the corresponding FFU to perform the corresponding operation.

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