Method for improving the efficiency of pressure bumping and outgassing of thin film vacuum gauge packages

Abstract

The application discloses a method for improving the packaging efficiency of pressure package of a thin film vacuum gauge, which comprises the following steps: vacuumizing the pressure package together with a furnace cavity of a vacuum furnace, and performing tail shearing packaging on the pressure package in the vacuum furnace cavity. Further, an exhaust hole of an external exhaust device is arranged on the cavity wall of the furnace cavity, a heating component is arranged in the furnace cavity, and the actuator of a clamp mechanism of a tail shearing device for performing tail shearing packaging and the actuator of a feeding device for tail shearing packaging are arranged in the furnace cavity, while the driving mechanism of the clamp mechanism and the feeding device is arranged outside the furnace cavity. The method has the advantages that the processing efficiency is greatly improved by reducing the flow link of conveying the workpiece between the furnace cavities and increasing the number of workpieces put into the furnace cavity and processed at one time; the number of furnace cavities in the vacuum furnace is reduced to one, the mechanism setting of the equipment is greatly simplified, the manufacturing cost of the equipment is greatly reduced, and the operation and the later maintenance of the equipment are facilitated.

Description

Technical Field

[0001] This invention relates to a method for improving the degassing and sealing efficiency of a pressure pack for a thin-film vacuum gauge, belonging to the field of vacuum sealing technology. Background Technology

[0002] A thin-film vacuum gauge is an instrument used to measure the degree of vacuum. Its principle is to measure the degree of vacuum by utilizing the movement of gas molecules in a vacuum. Its pressure tank has an exhaust tailpipe for evacuating the vacuum, an external pipe for connecting the object to be tested, and two positive and negative wire connectors for connecting the instrument.

[0003] Based on their measurement principles, thin-film vacuum gauges can be classified into several types, with a vacuum measurement range of 1.33 x 10⁻⁶. 5 —1.33x10 -2 Between Pa.

[0004] Thin-film vacuum gauges have a wide range of applications, including aerospace, electronics, chemical, and medical fields. For example, in the electronics field, thin-film vacuum gauges can be used to test the vacuum level of vacuum tubes and semiconductor devices to ensure their normal operation and lifespan.

[0005] The pressure pack of a thin-film vacuum gauge is a major component of the entire gauge. How to achieve more standardized, simplified, and efficient vacuuming and sealing of the pressure pack has been a long-standing research topic in this field. Traditionally, there are two solutions:

[0006] One approach is to place the sample in a high-temperature, high-vacuum environment and seal it using methods such as high-temperature eutectic welding, brazing, or glass sintering. However, vacuum welding has a relatively high void ratio, which affects the sealing performance of the sealing area and may consequently affect the maintenance of the vacuum level in the reference chamber.

[0007] Secondly, oxygen-free copper is used as the sealing material, and a clamping device is used for clamping under continuous vacuum conditions. However, the pre-sealing degassing process is not sufficient, making it difficult to improve the vacuum level in the reference chamber.

[0008] To address the aforementioned problems, existing technologies have proposed various solutions. Below are two typical technical solutions disclosed in patent documents:

[0009] Application number 202211376858.9, entitled "A Sealing Stage and Integrated Two-Stage Sealing Method for Active Vacuum Electric Devices," discloses a sealing stage comprising an external vacuum system, an internal vacuum system, a control system, a heating system, a high-voltage power supply, and a mechanical lifting system. The external vacuum system provides a high-vacuum environment within the external vacuum chamber of the furnace, providing a vacuum working environment for the active vacuum electric devices. The internal vacuum system evacuates the active vacuum electric devices within the furnace, providing an ultra-high vacuum environment. The heating system energizes the heating element to heat the active vacuum electric devices within the furnace. The high-voltage power supply drives the active vacuum electric devices to generate X-rays. This invention achieves high-quality integrated ultra-high vacuum sealing of metal-ceramic X-ray tubes while improving efficiency and energy conservation, and also improves production efficiency and yield. The specification discloses a general packaging method, and its appendix... Figure 7 The words "seal" are visible in the text.

[0010] Application number 202211282013.3, entitled "A Thin-Film Vacuum Gauge Reference Chamber Forming Apparatus and Method," discloses a thin-film vacuum gauge reference chamber forming apparatus comprising: a degassing module, including a baking chamber and a first vacuum pump group for evacuating the baking chamber; a clamping module, including a main chamber, a clamping mechanism disposed within the main chamber, and a second vacuum pump group for evacuating the main chamber; the main chamber is located downstream of the baking chamber and is connected to the baking chamber via a controllable first valve; a transfer module for sealingly transferring the sample to be processed between the degassing module and the clamping module; and a gas backfilling module, having multiple controllable backfilling branches and connected to the degassing module and the clamping module, for backfilling gas into the degassing module and the clamping module. This method avoids the problems of high temperature and large void ratio associated with vacuum welding, ensuring the sealing performance of the sealing area; pre-sealing degassing accelerates the release of gas from the sample material, improving the vacuum level inside the reference chamber.

[0011] Both of the above technical solutions involve performing vacuum evacuation and sealing operations on the vacuum components of a thin-film vacuum gauge within a vacuum chamber. Their inventive concepts focus solely on achieving product quality standards, without proposing specific and innovative technical solutions for solving the vacuum evacuation and sealing problems of the vacuum components in a simpler and more efficient manner. Despite reforms from traditional technologies to current techniques, the vacuum sealing technology for pressure packs still suffers from two major drawbacks:

[0012] First, the equipment has a complex structure. It requires at least two interconnected vacuum chambers: one for vacuuming at high temperatures and the other for sealing and tail-cutting. A precise conveying mechanism for clamping and pushing the workpiece is also needed between the two vacuum chambers.

[0013] Second, the process is complex. After the pressure pack is evacuated at high temperature in one chamber, it needs to be pushed to another chamber for tail-cutting and sealing. Summary of the Invention

[0014] The technical problem to be solved by this invention is: how to simplify the equipment and process flow and improve the processing efficiency of vacuum cutting and packaging of the pressure pack of the thin-film vacuum gauge while meeting the vacuum requirements.

[0015] To address the above problems, the technical solution proposed by this invention is as follows:

[0016] A method to improve the venting and sealing efficiency of a thin-film vacuum gauge pressure pack involves evacuating the pressure pack and the vacuum chamber together within the same chamber of a vacuum furnace, and then performing tail-cutting sealing on the pressure pack within the vacuum chamber.

[0017] Furthermore, an exhaust port for an external air extraction device is provided on the cavity wall of the furnace cavity, a heating component for heating is provided inside the furnace cavity, and the actuators of the clamping mechanism of the tail-cutting device for performing tail-cutting packaging and the actuators of the feeding device for feeding the tail-cutting packaging are located inside the furnace cavity, while the drive mechanisms of the clamping mechanism and the feeding device are located outside the furnace cavity.

[0018] Furthermore, the driving mechanism of the clamping mechanism is located outside the furnace cavity, including an outward-facing mounting hole for the tail-cutting device at the bottom of the furnace cavity, and a sealed space communicating with the furnace cavity outside the mounting hole for accommodating the driving mechanism of the tail-cutting device.

[0019] Furthermore, the clamping mechanism is configured as a clamp consisting of a left clamping arm and a right clamping arm connected by a hinge shaft, with the left and right clamping arms located on the left and right sides of the hinge shaft, respectively. Above the hinge shaft, the upper ends of the left and right clamping arms protrude towards each other to form left and right clamping teeth, respectively. An engaging gap is provided between the left and right clamping teeth. Below the hinge shaft, an opening gap is provided between the lower sections of the left and right clamping arms, which can be further opened. When the opening gap is opened, the left and right clamping teeth engage towards each other.

[0020] Furthermore, the driving mechanism of the tail-cutting device includes a push rod, the top of which is set as a wedge shape that is narrower at the top and wider at the bottom, with guide slopes on both sides. The narrow part of the top of the wedge-shaped push rod is located within the gap between the left and right clamping arms, and the lower ends of the left and right clamping arms respectively contact the guide slopes on both sides of the top of the wedge-shaped push rod. A metal bellows is installed below the mounting hole of the tail-cutting device. The sealed space communicating with the furnace cavity is a blind hole that can be axially expanded and contracted by the metal bellows. A bellows mounting flange is added to the upper end of the metal bellows for sealing and fixing to the bottom surface of the vacuum furnace. The blind hole has a bottom end plate. The lower section of the push rod is located in the blind hole and the bottom end of the push rod contacts the bottom end plate at the bottom of the blind hole. The push rod in the blind hole is raised by lifting the bottom end plate.

[0021] Furthermore, a clamp seat is provided for the clamp. A notch with an upward opening is provided in the upper section of the clamp seat. Hinge shaft mounting holes are provided on both sides of the notch wall. A through hole for the push rod to pass through is provided at the bottom of the notch. The left and right clamp arms are installed in the notch. The two ends of the hinge shaft are installed in the hinge shaft mounting holes. A clamp mounting flange and a lock nut are provided for the clamp mechanism. The clamp mounting flange has a flange hole. An inner ring boss is provided on the flange hole wall. The lower section of the clamp seat is a circular tube section. An outer flange is provided at the upper end of the outer periphery of the circular tube section. An external thread is provided at the lower end of the outer periphery. The circular tube section of the clamp seat is passed downward through the flange hole, so that its outer flange presses against the inner ring boss. The clamp mounting flange is locked onto the clamp seat upward through the external thread on the outer periphery of the circular tube section.

[0022] A guide sleeve is provided for the push rod, a guide hole is provided inside the guide sleeve, and an external thread is provided outside the guide sleeve. An internal thread is provided for the pipe hole of the round pipe section of the clamp seat. The guide sleeve is fixed to the clamp seat by its own external thread engaging with the internal thread of the pipe hole of the round pipe section of the clamp seat, so that the upper part of the push rod passes through the guide hole and contacts the clamp.

[0023] Secure the clamp mounting flange to the bottom surface of the furnace cavity at the edge of the mounting hole for the tail shearing device.

[0024] Furthermore, a reset spring is provided for the push rod of the clamping mechanism. An upper retaining spring and a lower retaining spring are respectively provided on the outer periphery of the upper section and the outer periphery of the lower section of the push rod. The reset spring is sleeved on the outer periphery of the push rod, with the lower end pressing against the lower retaining spring and the upper end pressing against the lower end of the push rod guide sleeve. After reset, the upper retaining spring presses against the upper end of the push rod guide sleeve.

[0025] Furthermore, the tips of the left and right clamping teeth are respectively provided with arc-shaped left and right tooth shaft grooves that are aligned with the axial direction of the hinge shaft, and engagement rollers are respectively provided in the left and right tooth shaft grooves; on the opposite side of the lower end of the left and right clamping arms, arc-shaped left and right opening shaft grooves that are aligned with the axial direction of the hinge shaft are respectively provided, and opening rollers are respectively provided in the left and right opening shaft grooves.

[0026] Furthermore, a feeding device mounting hole is provided at the center of the bottom of the furnace cavity for installing the feeding device. The workpiece disk drive mechanism includes a drive shaft for driving the workpiece disk to rotate, a servo motor for driving the drive shaft to rotate, and a sealed mounting structure. The drive shaft is vertically installed in the feeding device mounting hole through the sealed mounting structure. Its upper end is fixed to the workpiece disk through the shaft hole at the center of the workpiece disk, and its lower end is connected to the servo motor below the vacuum furnace outside the furnace cavity.

[0027] Furthermore, the sealing installation structure adopts a shaft magnetic fluid sealing sleeve, which is fitted onto the drive shaft below the vacuum furnace, and the upper end of the shaft magnetic fluid sealing sleeve seals with the bottom surface of the vacuum furnace around the installation hole of the feeding device.

[0028] Furthermore, multiple concentric pressure pack placement positions are arranged in a ring-shaped array on the workpiece plate from the inside out. An exhaust pipe hole is provided at the bottom of the pressure pack placement position to allow the exhaust tail pipe to extend downward. A clamping device is provided below the exhaust tail pipe of each ring of pressure pack placement positions.

[0029] Furthermore, a lifting mechanism is provided below the metal bellows. The lifting mechanism has a lifting rod connected to the hydraulic cylinder. The lifting rod and the push rod inside the metal bellows are on the same axis. The top of the lifting rod can apply an upward force to the bottom of the push rod through the bottom end plate of the metal bellows.

[0030] Furthermore, a blind flange plate is added to the bottom end of the metal bellows to replace the bottom plate. The outer edge of the blind flange plate is provided with a sliding rod hole. There are multiple suspended sliding rods on the outer edge of the bellows mounting flange. The lower end of the sliding rod passes through the sliding rod hole of the blind flange plate. An anti-negative pressure spring is fitted on the sliding rod between the blind flange plate and the bellows mounting flange. The oil cylinder is fixed to the lower end of the sliding rod under the oil cylinder. Beneficial effects

[0031] 1. Processing efficiency is greatly improved by reducing the number of steps involved in transferring workpieces between furnace chambers and by increasing the number of workpieces that can be placed and processed at one time in the furnace chamber.

[0032] 2. The number of furnace cavities in the existing vacuum furnace is reduced from 2-3 to one, and the transmission equipment between multiple furnace cavities is eliminated, which greatly simplifies the equipment's structure, significantly reduces the equipment's manufacturing cost, and facilitates the operation and maintenance of the equipment. Attached Figure Description

[0033] Figure 1 This is a three-dimensional schematic diagram of the vacuum furnace.

[0034] Figure 2 A three-dimensional schematic diagram showing the installation positions of the tail shearing device mounting holes and the feeding device mounting holes inside the vacuum furnace cavity;

[0035] Figure 3 A three-dimensional schematic diagram showing the location of the clamps and the top of the drive shaft of the feeding device inside the vacuum furnace cavity;

[0036] Figure 4 This is a three-dimensional schematic diagram of the clamping mechanism;

[0037] Figure 5 This is a schematic diagram showing the structural relationship between the clamp and the push rod;

[0038] Figure 6 This is a disassembly diagram of some components of the clamping mechanism;

[0039] Figure 7 for Figure 6 A partial schematic diagram;

[0040] Figure 8 for Figure 6 A partial schematic diagram;

[0041] Figure 9 This is a three-dimensional schematic diagram of the metal bellows;

[0042] Figure 10 This is a three-dimensional schematic diagram of the metal bellows at the bottom of the vacuum furnace;

[0043] Figure 11 A cross-sectional schematic diagram showing the installation of the metal bellows and the clamping mechanism;

[0044] Figure 12 This is a three-dimensional schematic diagram of the workpiece disk driving mechanism;

[0045] Figure 13 This is a three-dimensional schematic diagram of the workpiece tray installed inside a vacuum furnace;

[0046] Figure 14 This is a schematic diagram showing the installation of the workpiece disk drive mechanism at the bottom of the vacuum furnace;

[0047] Figure 15 This is a three-dimensional schematic diagram of the pressure pack;

[0048] Figure 16 A three-dimensional schematic diagram of the clamps cutting and sealing the exhaust tailpipe of the pressure pack.

[0049] In the diagram: 1. Vacuum furnace; 11. Furnace cavity; 12. Exhaust vent; 13. Furnace cover; 14. Tail shearing device mounting hole; 15. Feeding device mounting hole; 2. Clamping mechanism; 21. Clamp; 211. Left clamping arm; 2111. Left clamping tooth; 21111. Left tooth shaft groove; 2112. Left spreading shaft groove; 212. Right clamping arm; 2121. Right clamping tooth; 21211. Right tooth shaft groove; 2122. Right spreading shaft groove; 213. Hinge shaft; 214. Hinge shaft hole; 215. Engaging gap; 216. Spreading gap; 217. Engaging roller; 218. Spreading roller; 22. Clamping seat; 221. Notched groove; 222. Hinge shaft mounting hole; 223. Through hole; 224. Round tube Section; 225, outer flange; 23, clamp mounting flange; 231, flange hole; 232, inner ring boss; 24, lock nut; 25, push rod guide sleeve; 251, guide hole; 26, push rod; 261, guide bevel; 262, upper snap ring; 263, lower snap ring; 27, return spring; 3, metal bellows; 31, blind hole; 32, bellows mounting flange; 33, blind flange plate; 331, slide rod hole; 4, hydraulic cylinder; 41, lifting rod; 5, slide rod; 6, anti-negative pressure spring; 7, workpiece tray; 701, pressure pack placement position; 8, workpiece tray drive mechanism; 81, drive shaft; 82, servo motor; 83, shaft magnetic fluid sealing sleeve; 9, pressure pack; 901, exhaust tailpipe. Detailed Implementation

[0050] like Figure 1 , 2 As shown, the present invention provides a vacuum furnace 1. The basic configuration is that the vacuum furnace 1 has a cylindrical furnace cavity 11, an openable and sealable furnace cover 13 on the top, an exhaust hole 12 on the side wall, an air extraction device outside the furnace, and a heating mechanism and a cooling mechanism inside the furnace to help remove gases and volatile impurities from the surface of the furnace facilities during vacuuming.

[0051] The tail-cutting packaging described in this article is as follows: Figure 16 The exhaust tailpipe 901 of the pressure pack 9 is forcefully flattened and cut off, and the cut-off point is naturally sealed at a specific temperature.

[0052] The present invention will be further described below with reference to embodiments and accompanying drawings: Example 1

[0053] like Figure 1 , 2As shown in Figures 3, 13, 14, 15, and 16, a method for improving the degassing and sealing efficiency of a pressure pack in a thin-film vacuum gauge involves evacuating the pressure pack 9 along with the vacuum chamber 11 within the same chamber 11 of the vacuum furnace 1, and then performing tail-cutting sealing on the pressure pack 9 within the vacuum chamber 11. Compared to existing technologies, this eliminates the need for two or more interconnected vacuum chambers and workpiece conveying devices between chambers. Furthermore, the process flow eliminates the need for clamping and transferring workpieces between chambers, significantly improving processing efficiency, greatly simplifying the equipment's structure, reducing manufacturing costs, and facilitating subsequent operation and maintenance.

[0054] Furthermore, an exhaust port 12 for an external exhaust device is provided on the wall of the furnace cavity 11. A heating element for heating is provided inside the furnace cavity 11. The actuators of the clamping mechanism 2 for the tail-cutting packaging and the feeding device for feeding the tail-cutting packaging are located inside the furnace cavity 11, while the drive mechanisms of the clamping mechanism 2 and the feeding device are located outside the furnace cavity 11. This avoids the drive mechanism from being affected by high temperatures. At the same time, it frees up space in the furnace cavity 11 for more actuators of the tail-cutting device and a larger workpiece tray 7 for placing the pressure pack 9 in the feeding device. This allows more pressure packs 9 to be placed and processed at once, further improving processing efficiency.

[0055] The driving mechanism of the clamping mechanism 2 is located outside the furnace cavity 11, including an outward-facing tail-cutting device mounting hole 14 at the bottom of the furnace cavity 11, and a sealed space communicating with the furnace cavity 11 outside the tail-cutting device mounting hole 14 for accommodating the tail-cutting device driving mechanism.

[0056] like Figure 4 As shown in Figure 11, the actuator of the tail-cutting device is configured as a clamp 21 hinged to a left clamping arm 211 and a right clamping arm 212 via a hinge shaft 213. The left clamping arm 211 and the right clamping arm 212 are located on the left and right sides of the hinge shaft 213, respectively. The middle parts of the left clamping arm 211 and the right clamping arm 212 protrude towards each other, and a hinge shaft hole 214 is provided on the protruding part for the hinge shaft 213 to pass through. Above the hinge shaft 213, the left clamping arm 211 and the right clamping arm 212 are positioned so that the left clamping arm 211 and the right clamping arm 212 are connected by a hinge shaft 213. The upper ends of the arms 212 protrude towards each other to form a left clamping tooth 2111 and a right clamping tooth 2121, respectively. An interlocking gap 215 is provided between the left clamping tooth 2111 and the right clamping tooth 2121. Below the hinge shaft 213, an expandable gap 216 is provided between the lower sections of the left clamping arm 211 and the right clamping arm 212, so that when the expandable gap 216 is opened, the left clamping tooth 2111 and the right clamping tooth 2121 can interlock towards each other.

[0057] The drive mechanism of the above-mentioned device includes a push rod 26. The top of the push rod 26 is set as a wedge shape that is narrower at the top and wider at the bottom, with guide slopes 261 on both sides. The narrow part of the top of the wedge-shaped push rod 26 is located within the gap 216 between the left clamping arm 211 and the right clamping arm 212. The lower ends of the left clamping arm 211 and the right clamping arm 212 are in contact with the guide slopes 261 on both sides of the top of the wedge-shaped push rod 26. A metal bellows 3 is installed below the mounting hole 14 of the tail shearing device. The sealed space communicating with the furnace cavity 11 is a blind hole 31 that can be axially extended and retracted by the metal bellows 3. A bellows mounting flange 32 is added to the upper end of the metal bellows 3 for sealing and fixing to the bottom surface of the vacuum furnace 1. The blind hole 31 has a bottom end plate. The lower section of the push rod 26 is located in the blind hole 31 and the bottom end of the push rod 26 is in contact with the bottom end plate of the bottom of the blind hole 31. The push rod 26 in the blind hole is raised by lifting the bottom end plate.

[0058] Furthermore, a clamp seat 22 is provided for the clamp, and a notch 221 with an upward opening is provided on the upper part of the clamp seat 22. Hinge shaft mounting holes 222 are provided on both sides of the notch wall. A through hole 223 for the push rod 26 to pass through is provided at the bottom of the notch 221. The left clamping arm 211 and the right clamping arm 212 are installed in the notch 221, and both ends of the hinge shaft 213 are installed in the hinge shaft mounting holes 222. A clamp mounting flange 23 and a locking nut 24 are provided for the clamp mechanism 2. 3 has a flange hole 231, and an inner ring boss 232 is provided on the wall of the flange hole 231. The lower section of the clamp seat 22 is a circular pipe section 224. An outer flange 225 is provided at the upper end of the outer periphery of the circular pipe section 224, and an external thread is provided at the lower end of the outer periphery. The circular pipe section 224 of the clamp seat 22 is passed downward through the flange hole 231, so that its outer flange 225 is pressed on the inner ring boss 232. The clamp mounting flange 23 is locked onto the clamp seat 22 by the locking nut 24 through the external thread on the outer periphery of the circular pipe section 224.

[0059] A push rod guide sleeve 25 is provided for the push rod 26. A guide hole 251 is provided inside the push rod guide sleeve 25. An external thread is provided on the outside of the push rod guide sleeve 25. An internal thread is provided on the pipe hole of the round pipe section 224 of the clamp seat 22. The push rod guide sleeve 25 is fixed on the clamp seat 22 by its own external thread engaging with the internal thread of the pipe hole of the round pipe section 224 of the clamp seat 22. The upper section of the push rod 26 passes through the guide hole 251 and contacts the clamp 21.

[0060] Furthermore, a reset spring 27 is provided for the push rod 26 of the clamping mechanism 2. An upper retaining spring 262 and a lower retaining spring 263 are respectively provided on the outer periphery of the upper and lower sections of the push rod. The reset spring 27 is sleeved on the outer periphery of the push rod 26, with the lower end pressing against the lower retaining spring 263 and the upper end pressing against the lower end of the push rod guide sleeve 25. After reset, the upper retaining spring 262 presses against the upper end of the push rod guide sleeve 25.

[0061] By fixing the clamp mounting flange 23 to the bottom surface of the furnace cavity 11 at the edge of the tail shearing device mounting hole 14, the actuator and drive mechanism of the tail shearing device are installed and fixed. Due to the restriction of the push rod guide sleeve 25, the push rod 26 can be stably raised and lowered vertically.

[0062] A lifting mechanism is provided below the metal bellows 3. The lifting mechanism has a lifting rod 41 connected to the oil cylinder 4. The lifting rod 41 and the push rod 26 inside the metal bellows 3 are on the same axis. The top end of the lifting rod 41 can apply an upward force to the bottom end of the push rod 26 through the bottom end plate of the metal bellows 3.

[0063] When the top of the lifting rod 41 applies an upward force to the bottom of the lifting rod 26 through the bottom plate of the metal bellows 3, the lifting rod rises, causing the clamp 21 to perform a tail-cutting action. Since the tail-cutting operation is carried out under vacuum negative pressure in the furnace cavity 11 and the blind hole 31 of the metal bellows 3, the bottom plate of the metal bellows 3 is subjected to an upward air pressure force. For the lifting rod 26 to descend and reset, the reset spring 27 needs to overcome the upward air pressure force on the bottom plate of the metal bellows 3.

[0064] like Figure 12 As shown in Figure 14, a feeding device mounting hole 15 for installing a feeding device is further provided at the center of the bottom of the furnace cavity 11. The workpiece disk drive mechanism 8 includes a drive shaft 81 for driving the workpiece disk 7 to rotate, a servo motor 82 for driving the drive shaft 81 to rotate, and a sealed mounting structure. The drive shaft 81 is vertically installed in the feeding device mounting hole 15 through the sealed mounting structure. Its upper end is fixed to the workpiece disk 7 through the shaft hole at the center of the workpiece disk 7, and its lower end is connected to the servo motor 82 below the vacuum furnace 1 outside the furnace cavity 11.

[0065] The sealing installation structure uses a shaft magnetic fluid sealing sleeve 83, which is fitted onto the drive shaft 81 below the vacuum furnace 1, achieving a seal between the drive shaft 81 and the shaft magnetic fluid sealing sleeve 83 without affecting the rotation of the drive shaft 81. The upper end of the shaft magnetic fluid sealing sleeve 83 seals against the bottom surface of the vacuum furnace 1 around the feeding device mounting hole 15. This achieves a seal between the drive shaft 81 and the feeding device mounting hole 15.

[0066] like Figure 13 , 16As shown, multiple concentric rings of recessed pressure pack placement positions 701 are arranged on the workpiece disk 7 from the inside out. At the bottom of each pressure pack placement position 701, an exhaust pipe hole is provided to allow the exhaust tail pipe 901 to extend downwards. A clamping device 21 is installed below the exhaust tail pipe 901 of each ring of pressure pack placement positions 701. During operation, the control system controls the workpiece disk 7 to rotate at a set angle, so that the exhaust tail pipe 901 of the pressure pack precisely enters the meshing interval 215 between the left clamping teeth 2111 and the right clamping teeth 2121. Then, the control system controls the hydraulic cylinder 4 to raise the lifting rod 41, which in turn pushes the push rod 26 to make the left clamping teeth 2111 and the right clamping teeth 2121 mesh towards each other, thereby completing the tail-cutting seal.

[0067] The process flow for exhaust tail shearing of pressure pack 9 in this method includes the following steps:

[0068] Step 1: Open the furnace cover 13, place multiple pressure packs to be processed in the pressure pack placement position 701, and close the furnace cover;

[0069] Step 2: Activate the heating element to raise the temperature to 280-320 degrees Celsius;

[0070] Step 3: Turn on the vacuum device to evacuate the furnace chamber 11, and at the same time evacuate the pressure tank.

[0071] Step 4: Rotate workpiece tray 7 to feed material, and use clamps to perform tail cutting and sealing;

[0072] Step 5: Continue heating to 480-520 degrees Celsius to activate the getter (a sheet-like substance placed in the vacuum space of the pressure pack to adsorb gas molecules in the space and prevent trace amounts of gas molecules released from the inner wall of the vacuum space of the pressure pack from affecting the detection performance).

[0073] Step Six: Open the lid and remove from the oven. Example 2

[0074] like Figure 5 , 7As shown, the difference from Embodiment 1 is that the tips of the left clamping teeth 2111 and the right clamping teeth 2121 are respectively provided with arc-shaped left tooth shaft grooves 21111 and right tooth shaft grooves 21211 that are aligned with the axial direction of the hinge shaft 213. Engaging rollers 217 are respectively provided in the left tooth shaft grooves 21111 and right tooth shaft grooves 21211. The engaging rollers 217 can be made of a harder material so that the tail-cutting operation can be completed smoothly at a high temperature of 300 degrees Celsius, and they can also be replaced. The lower ends of the left clamping arm 211 and the right clamping arm 212 are respectively provided with arc-shaped left opening shaft grooves 2112 and right opening shaft grooves 2122 that are aligned with the axial direction of the hinge shaft 213. Opening rollers 218 are respectively provided in the left opening shaft grooves 2112 and right opening shaft grooves 2122, which facilitates the insertion and withdrawal of the wedge-shaped part at the top of the push rod 26 in the openable interval 216 under the clamp 21. Example 3

[0075] like Figure 10 , 11 As shown, the difference from Embodiment 1 is that a blind flange plate 33 is added to the bottom end of the metal bellows 3 instead of the bottom plate. The outer edge of the blind flange plate 33 is provided with a sliding rod hole 331. There are multiple suspended sliding rods 5 on the outer edge of the bellows mounting flange 32. The lower end of the sliding rod 5 passes through the sliding rod hole 331 of the blind flange plate 33. An anti-negative pressure spring 6 is fitted on the sliding rod 5 between the blind flange plate 33 and the bellows mounting flange 32. The hydraulic cylinder 4 is fixed to the lower end of the sliding rod 5 under the hydraulic cylinder 4. In this way, in application, the anti-negative pressure spring 6 and the return spring 27 together bear the anti-compression and reset of the metal bellows 3, while also solving the installation problem of the lifting mechanism. It can also ensure that the top rod 26, the blind flange plate 33, the lifting rod 41, and the hydraulic cylinder 4 are all on the same axis. The transmission of force from the hydraulic cylinder 4 is positive pressure linear transmission, which is beneficial to ensure the efficiency of force transmission and avoid related components from loosening or tilting due to force bias.

[0076] The above embodiments are only used to describe the present invention more clearly, and should not be regarded as limiting the scope of protection covered by the present invention. Any equivalent modifications should be regarded as falling within the scope of protection covered by the present invention.

Claims

1. A method of improving the efficiency of pressure bumping of a thin film vacuum gauge, the method comprising: The tail shearing and sealing is performed on the pressure package (9) in the same furnace cavity (11) of the vacuum furnace (1) after the pressure package (9) is vacuumized together with the furnace cavity (11), and the tail shearing device is arranged outside the cavity wall of the furnace cavity (11) and the heating component is arranged in the furnace cavity (11) for heating, and the driving mechanism of the clamp mechanism (2) of the tail shearing device and the driving mechanism of the feeding device for tail shearing and sealing are arranged in the furnace cavity (11), and the driving mechanism of the clamp mechanism (2) and the feeding device is arranged outside the furnace cavity (11); the driving mechanism of the clamp mechanism (2) is arranged outside the furnace cavity (11), including arranging the tail shearing device mounting hole (14) outward at the bottom of the furnace cavity (11), and arranging the sealing space communicated with the furnace cavity (11) for accommodating the driving mechanism of the tail shearing device outside the tail shearing device mounting hole (14); the driving mechanism of the clamp mechanism is arranged as the clamp (21) connected by the hinge shaft (213) of the left clamp arm (211) and the right clamp arm (212), the left clamp arm (211) and the right clamp arm (212) are respectively located on the left side and the right side of the hinge shaft (213) above the hinge shaft (213), the upper end portions of the left clamp arm (211) and the right clamp arm (212) are protruded towards each other to form the left clamp tooth (2111) and the right clamp tooth (2121) respectively, the left clamp tooth (2111) and the right clamp tooth (2121) are arranged with the engageable interval (215) capable of being engaged, below the hinge shaft (213), the lower segments of the left clamp arm (211) and the right clamp arm (212) are arranged with the further openable interval (216) capable of being further opened, when the interval (216) is opened, the left clamp tooth (2111) and the right clamp tooth (2121) are engaged towards each other; the recessed pressure package placing position (701) is arranged in multiple circles in the annular array from inside to outside on the workpiece disc (7), the exhaust pipe hole capable of extending downward the exhaust tail pipe (901) is arranged at the bottom of the pressure package placing position (701), and one clamp (21) of the clamp mechanism (2) is arranged below the exhaust tail pipe (901) passing through each circle of the pressure package placing position (701). ​ 2. The method of improving the pressure pumping out package efficiency of a thin film gauge as defined in claim 1, wherein, The driving mechanism of the tail-cutting device includes a push rod (26), the top of which is set as a wedge shape that is narrower at the top and wider at the bottom, with guide slopes (261) on both sides. The narrow part of the top of the wedge-shaped push rod (26) is located within the gap (216) that can be opened by the left clamping arm (211) and the right clamping arm (212). The lower ends of the left clamping arm (211) and the right clamping arm (212) respectively contact the guide slopes (261) on both sides of the top of the wedge-shaped push rod (26); a metal bellows is installed below the mounting hole (14) of the tail-cutting device. 3) The sealed space communicating with the furnace cavity (11) is a blind hole (31) that can be axially extended and retracted by the metal bellows (3). A bellows mounting flange (32) is added to the upper end of the metal bellows (3) for sealing and fixing with the vacuum furnace (1) on the bottom surface of the vacuum furnace (1). The blind hole (31) has a bottom plate. The lower section of the top rod (26) is located in the blind hole (31) and the bottom end of the top rod (26) contacts the bottom plate at the bottom of the blind hole (31). The top rod (26) in the blind hole is raised by lifting the bottom plate.

3. The method of improving the pressure pumping out package efficiency of a thin film gauge as defined in claim 2, wherein, A clamp seat (22) is provided for the clamp. A notch (221) with an upward opening is provided on the upper part of the clamp seat (22). Hinge shaft mounting holes (222) are provided on both sides of the notch. A through hole (223) for the top rod (26) to pass through is provided at the bottom of the notch (221). The left clamp arm (211) and the right clamp arm (212) are installed in the notch (221). The two ends of the hinge shaft (213) are installed in the hinge shaft mounting holes (222). A clamp mounting flange (23) and a locking nut (24) are provided for the clamp mechanism (2). The clamp mounting flange (23) has There is a flange hole (231), and an inner ring boss (232) is provided on the wall of the flange hole (231). The lower section of the clamp seat (22) is a round pipe section (224). An outer flange (225) is provided on the upper end of the outer periphery of the round pipe section (224), and an external thread is provided on the lower end of the outer periphery. The round pipe section (224) of the clamp seat (22) is passed downward through the flange hole (231) so that its outer flange (225) is pressed on the inner ring boss (232). The clamp mounting flange (23) is locked on the clamp seat (22) by the lock nut (24) through the external thread on the outer periphery of the round pipe section (224). A guide sleeve (25) is provided for the push rod (26), a guide hole (251) is provided inside the guide sleeve (25), an external thread is provided on the outside of the guide sleeve (25), an internal thread is provided on the pipe hole of the round pipe section (224) of the clamp seat (22), and the guide sleeve (25) is fixed on the clamp seat (22) by its own external thread engaging with the internal thread of the pipe hole of the round pipe section (224) of the clamp seat (22), so that the upper part of the push rod (26) passes through the guide hole (251) and contacts the clamp (21); Fix the clamp mounting flange (23) to the bottom surface of the furnace cavity (11) at the edge of the tail shearing device mounting hole (14).

4. The method of improving the pressure pumping out package efficiency of a thin film gauge as defined in claim 3, wherein, The reset spring (27) is arranged on the top rod (26) of the clamp mechanism (2), the upper and lower clamping springs (262) and (263) are arranged on the outer periphery of the upper and lower sections of the top rod (26) respectively, the reset spring (27) is sleeved on the outer periphery of the top rod (26), the lower end presses the lower clamping spring (263), and the upper end abuts against the lower end of the top rod guide sleeve (25); after reset, the upper clamping spring (262) presses the upper end of the top rod guide sleeve (25).

5. The method of improving the efficiency of the pressure bump-out gas- gettering package of a thin film gauge of any one of claims 1 to 4, wherein: The tooth tips of the left clamping tooth (2111) and the right clamping tooth (2121) are respectively provided with arc-shaped left tooth shaft grooves (21111) and right tooth shaft grooves (21211) which are consistent with the axial direction of the hinge shaft (213), and the occlusion rollers (217) are arranged in the left tooth shaft grooves (21111) and the right tooth shaft grooves (21211) respectively; the lower ends of the left clamping arm (211) and the right clamping arm (212) are respectively provided with arc-shaped left and right opening shaft grooves (2112) and (2122) which are consistent with the axial direction of the hinge shaft (213) on the sides facing each other, and the opening rollers (218) are arranged in the left and right opening shaft grooves (2112) and (2122) respectively.

6. The method of improving the efficiency of the pressure bump-out gas- gettering package of a thin film gauge of any one of claims 1 to 4, wherein A workpiece disc driving mechanism (8) is arranged on the bottom of the furnace cavity (11), and the workpiece disc driving mechanism (8) comprises a driving shaft (81) for driving the workpiece disc (7) to rotate, a servo motor (82) for driving the driving shaft (81) to rotate, and a sealing mounting structure, the driving shaft (81) is vertically mounted in the feeding device mounting hole (15) through the sealing mounting structure, the upper end of the driving shaft (81) is fixed with the workpiece disc (7) through the shaft hole at the center of the workpiece disc (7), and the lower end of the driving shaft (81) is connected with the servo motor (82) below the vacuum furnace (1) outside the furnace cavity (11).

7. The method of improving the efficiency of the pressure bump out gas package of a thin film gauge of claim 6, wherein, The sealing mounting structure adopts a shaft magnetic liquid sealing sleeve (83), the shaft magnetic liquid sealing sleeve (83) is sleeved on the driving shaft (81) below the vacuum furnace (1), and the upper end of the shaft magnetic liquid sealing sleeve (83) is sealed with the bottom surface of the vacuum furnace (1) around the feeding device mounting hole (15).

8. The method for improving the pressure package exhaust packaging efficiency of a thin film vacuum gauge according to claim 3, wherein, A jacking mechanism is arranged below the metal bellows (3), the jacking mechanism has a jacking rod (41) connected with an oil cylinder (4), the jacking rod (41) is on the same axis as the top rod (26) in the metal bellows (3), and the jacking rod (41) can apply an upward force to the bottom end of the top rod (26) through the bottom end plate of the metal bellows (3).

9. The method of improving the efficiency of the pressure bump out gas package of a thin film gauge of claim 8, wherein, A blind flange plate (33) is arranged at the bottom end of the metal bellows (3) instead of the bottom end plate, the blind flange plate (33) is provided with a slide rod hole (331) at the outer edge, the bellows mounting flange (32) is provided with a plurality of vertically suspended fixed slide rods (5) at the outer edge, the lower ends of the slide rods (5) pass through the slide rod hole (331) of the blind flange plate (33), and the anti-negative pressure spring (6) is sleeved on the slide rods (5) between the blind flange plate (33) and the bellows mounting flange (32); the oil cylinder (4) is fixed at the lower end of the slide rods (5) below the oil cylinder (4).

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