Fluid control device

Abstract

This invention relates to a fluid control device, comprising, from proximal to distal, a valve assembly, a vibration assembly, and a drive body stacked sequentially. The vibration assembly has a first through-hole at its distal end and a second through-hole at its proximal end, and includes a working chamber. The valve assembly contains a valve plate, which is an elastic plate and is held in place to elastically deform within the valve assembly. The valve plate has several fourth through-holes. The valve assembly also includes a valve chamber, with several fifth through-holes and a drainage chamber at its proximal end. The fifth through-holes are opposite to the fourth through-holes, and the drainage chamber is opposite to the third through-hole but not to the fourth through-hole. The fifth through-holes and the drainage chamber are connected. Airflow drives the valve plate to deform towards the drainage chamber, increasing the gap between the valve plate and the valve cover, thus increasing the flow rate and pressure of the airflow. This reduces the risk of excessive deformation of the valve plate leading to breakage, thereby improving the service life of the fluid control device.

Description

Technical Field

[0001] This invention relates to the field of fluid control device technology, and more particularly to fluid control devices. Background Technology

[0002] A piezoelectric pump, also known as a piezoelectric ceramic pump, is a pump structure that uses the inverse piezoelectric effect of piezoelectric ceramics to deform a piezoelectric oscillator. This deformation causes a change in the volume of the pump chamber, thereby increasing air pressure. Alternatively, it can use the piezoelectric oscillator to generate ripples to transport fluids. It can achieve fluid transport without the need for an additional drive motor and is widely used in aerospace, robotics, automobiles, medical devices, bioengineering, micro-mechanical fields, such as medical ventilators.

[0003] The commonly used piezoelectric pump structure has an air inlet on one side of the pump body and an air outlet on the other side. The piezoelectric element is installed in the pump body. The deformation of the piezoelectric element causes a change in the volume of the pump chamber, so that the gas enters the exhaust chamber from the air inlet chamber along the surrounding flow channels, and is then discharged through the air outlet.

[0004] Chinese invention patent CN107076137A discloses a valve and fluid control device, which includes a valve section and a nozzle section. The valve section functions to make the fluid flow unidirectional. The valve section is a cylindrical container with a valve chamber inside. The valve section includes a top plate, side wall plates, a bottom plate, and a membrane. Multiple discharge holes and multiple auxiliary holes are arranged in a predetermined pattern at the center of the top plate. In this technical solution, during nozzle actuation, the area of ​​the membrane opposite the auxiliary holes deforms towards the auxiliary holes due to the exhaust air from the first vent hole to the valve chamber. This increases the gap between the first plate and the membrane in this area, reducing the flow resistance of the valve and increasing the gas flow rate and pressure. However, when the airflow directly blows onto the membrane through the through holes, a portion of the membrane extends beyond the auxiliary holes when deforming towards them, causing excessive deformation of this portion of the membrane. This increases the possibility of membrane elastic failure or even rupture, thereby reducing the gas delivery capacity of the fluid control device. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a fluid control device that reduces the flow resistance of gas from the vibration component into the valve component by opening a drainage cavity in the valve seat that communicates with the fifth through hole, thereby facilitating the improvement of the pumping flow rate, pumping pressure and service life of the fluid control device.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows:

[0007] A fluid control device, stacked sequentially from proximal to distal end, comprises: a valve assembly, a vibration assembly, and a drive body. The vibration assembly has several first through holes at its distal end and several second through holes at its proximal end. The vibration assembly contains a working chamber that communicates with both the first and second through holes. The valve assembly has several third through holes at its distal end, which are opposite to the second through holes. A valve plate, which is an elastic plate, is disposed within the valve assembly and is held to elastically deform within the valve assembly. Several fourth through holes are formed on the valve plate, which are not opposite to the third through holes. The valve assembly contains a valve chamber, with several fifth through holes and a drainage cavity formed at its proximal end. The fifth through holes are opposite to the fourth through holes, and the drainage cavity is opposite to the third through holes but not opposite to the fourth through holes. The fifth through holes and the drainage cavity are connected. The drive body, when energized, undergoes buckling vibration, driving a portion of the vibration assembly to elastically deform, thereby pumping fluid into the valve assembly.

[0008] In this design, when the fluid-driven valve plate deforms towards the drainage chamber, the fluid in the drainage chamber enters the fifth through hole. Simultaneously, the fluid is also guided towards the fifth through hole as the valve plate deforms. The greater deformation of the valve plate towards the drainage chamber results in a larger gap between the valve plate and the valve cover compared to the case without a drainage chamber, further increasing the fluid flow rate and pressure. Furthermore, since the drainage chamber is opposite the third through hole, the deformation of the valve plate towards the drainage chamber improves the drainage effect for fluid flowing perpendicularly through the third through hole.

[0009] In a preferred embodiment of the valve assembly of the present invention, a venting groove is formed between the drainage cavity and the adjacent fifth through hole.

[0010] Preferably, the width of the vent groove is not greater than the inner diameter of the drainage cavity, which ensures the service life of the valve assembly while facilitating production.

[0011] Furthermore, the inner diameter of the drainage cavity is not greater than the inner diameter of the third through hole.

[0012] In another preferred embodiment of the valve assembly of the present invention, the drainage cavity partially overlaps with the fifth through hole, thereby increasing the flow rate and pressure of the airflow while reducing the number of production steps.

[0013] Furthermore, the drainage cavity and the fifth through hole are staggered, which can make full use of the surface space of the valve seat while ensuring the strength of the valve assembly.

[0014] Furthermore, the valve assembly includes: a valve cover having the third through hole; a valve seat having the fifth through hole and forming the valve chamber between the valve cover and the valve seat; and a valve plate being held to be elastically deformable within the valve chamber.

[0015] Furthermore, the vibration assembly is stacked sequentially from the distal end to the proximal end: a first support plate with the first through hole; a support ring with a hollow structure; and a second support plate with the second through hole, the first support plate, the support ring, and the second support plate forming the working cavity.

[0016] Furthermore, the fluid control device also includes a control component, which includes a positive electrode plate and a negative electrode plate. The positive electrode plate is fixed at the distal end of the drive body, and the negative electrode plate is fixed at the proximal end of the valve assembly.

[0017] Compared with the prior art, the beneficial technical effects of the present invention are as follows:

[0018] (i) The fluid control device of the present invention, by opening a plurality of fifth through holes and a drainage cavity on the valve seat of the valve assembly, wherein the fifth through holes and the drainage cavity are connected, and the drainage cavity is not opposite to the fourth through hole, the fluid drives the valve plate to deform toward the drainage cavity side, the fluid in the drainage cavity enters the fifth through hole, and at the same time the fluid is guided toward the fifth through hole as the valve plate deforms. The valve plate deforms more toward the drainage cavity side, the gap between the valve plate and the valve cover increases, the flow rate and pressure of the fluid increase, and the possibility of the valve plate breaking due to excessive deformation is reduced, thereby facilitating the purpose of improving the service life of the fluid control device.

[0019] (ii) Furthermore, a venting groove is provided between the fifth through hole and the adjacent drainage cavity. The width of the venting groove is not greater than the inner diameter of the drainage cavity, which further increases the deformation space of the valve plate, improves the flow rate and pressure of the fluid while ensuring the strength of the valve assembly, thereby facilitating the improvement of the service life of the fluid control device.

[0020] (iii) Furthermore, the outer circle of the drainage cavity partially overlaps with the outer circle of the fifth through hole, thereby increasing the flow rate and pressure of the fluid while reducing the number of production steps. Attached Figure Description

[0021] Figure 1 This is a front view structural schematic diagram of a fluid control device according to the present invention.

[0022] Figure 2 for Figure 1 An exploded isometric view of a fluid control device is shown.

[0023] Figure 3 for Figure 1 Side view section at AA.

[0024] Figure 4 This is a schematic diagram of the valve assembly in the air intake state in a fluid control device according to the present invention.

[0025] Figure 5This is a schematic diagram of the pumping state of a valve assembly in a fluid control device according to the present invention.

[0026] Figure 6 This is an isometric view of a valve seat in a fluid control device according to a second embodiment of the present invention.

[0027] Figure 7 This is a front view of the valve seat in a fluid control device according to a second embodiment of the present invention.

[0028] Figure 8 This is a front view of the valve seat in a fluid control device according to a third embodiment of the present invention.

[0029] Figure 9 This is a front view schematic diagram of the valve seat in the fluid control device of the second comparative example of the present invention.

[0030] Figure 10 This is a front view of the valve seat in the fluid control device of the third comparative example of the present invention.

[0031] Figure 11 The graph shows the relationship between the air flow rate and the driving voltage discharged from the fifth through hole by multiple fluid control devices with different diameters of the drainage cavity and a comparative fluid control device.

[0032] Figure 12 The graph shows the relationship between air pressure and driving voltage discharged from the fifth through hole by multiple fluid control devices with different diameters of the drainage cavity and a comparative fluid control device.

[0033] Figure 13 The image shows the cracked valve plate of the third comparative fluid control device under an electron microscope.

[0034] Marked in the attached diagram:

[0035] 1. Positive electrode plate; 2. Driving body; 3. Negative electrode plate; 4. Vibration assembly; 41. First support plate; 411. First through hole; 42. Support ring; 421. Working chamber; 43. Second support plate; 431. Second through hole; 5. Valve assembly; 51. Valve cover; 511. Third through hole; 512. Valve chamber; 52. Valve plate; 521. Fourth through hole; 53. Valve seat; 531. Fifth through hole; 532. Drainage chamber; 533. Vent groove. Detailed Implementation

[0036] To make the objectives, features, and advantages of this invention more apparent and understandable, please refer to the accompanying drawings. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the implementation conditions of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the invention, should still fall within the scope of the technical content disclosed in this invention.

[0037] In the description of this invention, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0038] To more clearly describe the fluid control device described above, this invention defines the terms "distal end" and "proximal end." Specifically, "distal end" refers to the end closer to the air inlet of the fluid control device, and "proximal end" refers to the end closer to the air outlet of the fluid control device. Figure 2 For example, Figure 2 The lower end of the middle valve assembly 5 is the proximal end. Figure 2 The upper end of the middle valve assembly 5 is the far end.

[0039] First embodiment:

[0040] Figure 1 This is a front view structural schematic diagram of a fluid control device according to the present invention. Figure 2 for Figure 1 An exploded isometric view of a fluid control device is shown. Figure 3 for Figure 1 Side view section at AA. Figure 4 This is a schematic diagram of the valve assembly in the air intake state in a fluid control device according to the present invention. Figure 5 This is a schematic diagram of the pumping state of a valve assembly in a fluid control device according to the present invention.

[0041] like Figures 1-5 As shown, a fluid control device comprises a drive body 2, a vibration assembly 4, and a valve assembly 5 stacked sequentially from distal to proximal. A control assembly is also connected to the distal end of the drive body 2 and the proximal end of the valve assembly 5. The drive body 2, vibration assembly 4, and valve assembly 5 are bonded together in a stacked manner.

[0042] For example, the driving body 2 is a piezoelectric element, which has piezoelectric properties and can expand and contract in the planar direction when a driving voltage is applied. Electrodes are formed on the surface of the piezoelectric element and polarized to give it piezoelectric properties. The control assembly consists of a positive electrode 1 and a negative electrode 3. The positive electrode 1 is bonded, welded, or integrally formed with the distal end of the driving body 2, and the negative electrode 3 is bonded with the proximal end of the valve assembly 5, etc. Any assembly that can supply power to the piezoelectric element and drive its vibration is acceptable; the present invention does not impose further limitations on this.

[0043] Furthermore, the vibration components 4 are stacked sequentially from the distal end to the proximal end:

[0044] A first support plate 41, on which a plurality of first through holes 411 are formed;

[0045] Support ring 42, support ring 42 has a hollow structure;

[0046] The second support plate 43 has several second through holes 431. The first support plate 41, the support ring 42, and the second support plate 43 form a working cavity 421. The working cavity 421 is connected to the first through holes 411 and the second through holes 431.

[0047] For example, the first support plate 41 and the second support plate 43 are both circular, the support ring 42 is annular, and the first through holes 411 are arranged annularly around the outer periphery of the piezoelectric element. The piezoelectric element is attached to the circumference of the first through holes 411, and the diameter of the circumscribed circle formed by all the first through holes 411 is smaller than the inner diameter of the support ring 42. The piezoelectric element, the first support plate 41, the support ring 42, and the second support plate 43 are coaxially arranged.

[0048] The first support plate 41, support ring 42, second support plate 43, and valve cover 51 are made of stainless steel, while the valve seat 53 is made of copper.

[0049] Furthermore, valve assembly 5 is stacked sequentially from distal to proximal end:

[0050] Valve cover 51, with several third through holes 511 provided on the valve cover 51, the third through holes 511 being opposite to the second through holes 431;

[0051] The valve plate 52 is an elastic sheet that is held in place by elastic deformation within the valve chamber 512. Several fourth through holes 521 are formed on the valve plate 52, with the third through holes 511 and the fourth through holes 521 staggered, ensuring that the third through holes 511 and the fourth through holes 521 cannot communicate when the valve plate 52 deforms and adheres to the valve cover 51. For example, adhesive dots are added to both ends of the valve plate 52 to keep its circumferential position fixed relative to the valve cover 51 and the valve seat 53, preventing rotation.

[0052] Valve seat 53, with several fifth through holes 531 and drainage chambers 532 opened at the far end of valve seat 53. The fifth through holes 531 and drainage chambers 532 are connected. The fifth through holes 531 are opposite to the fourth through holes 521. When the valve plate 52 is deformed and adsorbed onto the valve seat 53, the third through hole 511 is connected to the second through hole 431 and the fifth through hole 531 is connected to the fourth through hole 522, thereby realizing the pumping of air.

[0053] For example, the drainage cavity 532 is a circular blind hole. Of course, in other embodiments of the present invention, the drainage cavity 532 can also be square or other shapes, as long as it can allow the valve plate 52 to deform into the drainage cavity 532. The present invention does not impose further limitations on this. The fifth through hole 531 and the drainage cavity 532 are opened at the center of the valve seat 53 and are arranged in a dot matrix. The outer edge of the proximal end of the valve cover 51 is bonded to the inner edge of the valve seat 53. The proximal end of the valve cover 51 has a valve chamber 512 for accommodating the valve plate 52 and allowing the valve plate 52 to deform. The valve cover 51, valve plate 52, and valve seat 53 are all circular plates and are coaxially arranged. Preferably, the drainage cavity 532 and the fifth through hole 531 are staggered to effectively utilize the surface space of the valve seat 53 and improve the pumping air flow rate.

[0054] Furthermore, the drainage cavity 532 is opposite to the third through hole 511 but not to the fourth through hole 521. When the valve plate 52 deforms toward the drainage cavity 532, the drainage cavity 532 has a better drainage effect for airflow passing perpendicularly through the third through hole 511.

[0055] The specific workflow of this invention is as follows:

[0056] In manufacturing this fluid control device, firstly, epoxy resin is used to bond and fix the piezoelectric element, the first support plate 41, the support ring 42, and the second support plate 43 arranged sequentially from top to bottom; secondly, epoxy resin is used to bond and fix the proximal end of the second support plate 43 to the distal end of the valve cover 51; then, epoxy resin is used to bond and fix the proximal end of the valve cover 51 to the valve plate 52 and the valve seat 53 sequentially; finally, the positive electrode plate 1 is welded to the piezoelectric element, and the negative electrode plate 3 is welded to the valve seat 53.

[0057] Positive electrode 1 and negative electrode 3 supply power to the piezoelectric element, which vibrates and deforms under electromagnetic influence. When the middle of the piezoelectric element bulges upward, it drives the vibration assembly 4, valve assembly 5, and valve plate 52 to deform synchronously, causing the middle of the fluid control device to bulge upward and the surrounding area to be concave. At this time, the middle of the valve plate 52 bulges upward and fits against the near end of the valve cover 51. Since the fourth through hole 521 in the valve plate 52 and the third through hole 511 in the valve cover 51 are staggered, when the middle of the valve plate 52 fits against the near end of the valve cover 51, it can block the third through hole 511, so that a negative pressure is formed in the working chamber 421. At this time, the gas enters the working chamber 421 along the first through hole 411.

[0058] When the piezoelectric element is concave in the middle, it causes the vibration assembly 4, valve assembly 5, and valve plate 52 to deform synchronously, causing the middle of the fluid control device to be concave and the surrounding area to be raised. At this time, the middle of the valve plate 52 is concave and fits against the near end of the valve plate 52 mounting assembly, compressing the gas temporarily stored in the working chamber 421 and discharging it from the fluid control device through the second through hole 431, the third through hole 511, the fourth through hole 521, and the fifth through hole 531. At the same time, the valve plate 52 also deforms towards the drainage chamber 532 and the venting groove 533, increasing the deformation space of the valve plate 52. Since the fifth through holes 531 are interconnected and the flow path is not obstructed, the pumping speed and flow rate increase, realizing the gas pressure pumping and delivery.

[0059] Second embodiment:

[0060] Figure 6 This is an isometric view of a valve seat in a fluid control device according to a second embodiment of the present invention. Figure 7 This is a front view of the valve seat in a fluid control device according to a second embodiment of the present invention.

[0061] Based on the first embodiment, the second embodiment further optimizes and refines the structure of the fifth through hole 531 and the drainage cavity 532 in the first embodiment.

[0062] like Figures 6-7 As shown, furthermore, a venting groove 533 is formed between the fifth through hole 531 and the adjacent drainage cavity 532. The venting groove 533 is used to increase the deformation space of the valve plate 52, and at the same time, it allows the fifth through holes 531 to be interconnected, ensuring that the flow path is not obstructed and improving the pump air velocity and flow rate. Specifically, the fifth through holes 531 in the same row are connected to the adjacent drainage cavities 532 through the venting groove 533. Of course, in other embodiments of the present invention, the fifth through holes 531 in the same row and the same column can be connected to the adjacent drainage cavities 532 through the venting groove 533, as long as the valve seat 53 has sufficient strength to support the valve plate 52. The present invention does not impose further limitations on this.

[0063] Furthermore, the width of the vent groove 533 is no greater than the inner diameter of the drainage cavity 532, ensuring the strength of the valve seat 53, while also facilitating the protection of the valve plate 52 and reducing excessive deformation of the valve plate 52.

[0064] Third embodiment:

[0065] Figure 8 This is a front view of the valve seat in a fluid control device according to a third embodiment of the present invention.

[0066] Based on the first embodiment, the third embodiment further optimizes and refines the structure of the fifth through hole 531 and the drainage cavity 532 in the first embodiment.

[0067] like Figure 8 As shown, the drainage cavity 532 partially overlaps with the fifth through hole 531, allowing direct communication between them. For example, both the drainage cavity 532 and the fifth through hole 531 are circular, with their outer circular portions overlapping. The drainage cavity 532 also increases the deformation space of the valve plate 52, while simultaneously ensuring communication between the fifth through hole 531 and the drainage cavity 532. This facilitates maintaining unobstructed flow, increasing pump air velocity and flow rate, and eliminating the need for the ventilation slot 533.

[0068] First comparison example:

[0069] The first comparative example is largely the same as the second embodiment in terms of structure and workflow, except that the ventilation slot 533 is omitted and the drainage cavity 532 is not connected to the fifth through hole 531.

[0070] Second comparison:

[0071] Figure 9 This is a front view schematic diagram of the valve seat in the fluid control device of the second comparative example of the present invention.

[0072] like Figure 9 As shown, the second comparative example has the same structure and workflow as the second embodiment, except that the drainage cavity 532 and the ventilation groove 533 are omitted.

[0073] Third comparison:

[0074] Figure 10 This is a front view of the valve seat in the fluid control device of the third comparative example of the present invention.

[0075] like Figure 10 As shown, the third comparative example is largely the same as the second embodiment in terms of structure and workflow, except that the ventilation groove 533 is removed and the drainage cavity 532 is replaced with a through hole.

[0076] First experimental example:

[0077] The performance of the fluid control device in terms of discharge fluid flow rate was compared. The positive electrode 1 and negative electrode 3 of the second embodiment, the first comparative example, and the second comparative example were energized, and the relationship between the air flow rate discharged from the fifth through hole 531 of the fluid control device and the driving voltage was recorded.

[0078] Figure 11 The graph shows the relationship between the air flow rate and the driving voltage discharged from the fifth through hole by multiple fluid control devices with different diameters of the drainage cavity and a comparative fluid control device.

[0079] Furthermore, in this experimental example, the diameters of the fluid control device drainage cavity 532 in the second embodiment are 0.3 mm, 0.5 mm, and 0.7 mm, respectively.

[0080] Experiments show that the flow rate when the drainage chamber 532 is connected to the fifth through hole 531 in the fluid control device is greater than the flow rate when the drainage chamber 532 is not connected to the fifth through hole 531, and greater than the flow rate when there is no drainage chamber 532. Furthermore, the larger the diameter of the drainage chamber 532 and the closer it is to the diameter of the third through hole 511, the greater the flow rate. The reason for these results is believed to be that the valve plate 52 deforms more towards the drainage chamber 532, increasing the gap between the valve plate 52 and the valve cover 51, thus increasing the airflow rate.

[0081] Second experimental example:

[0082] The performance of the fluid control device in terms of discharge fluid pressure was compared. The positive electrode 1 and negative electrode 3 of the second embodiment, the first comparative example, and the second comparative example were energized, and the relationship between the air flow rate discharged from the fifth through hole 531 of the fluid control device and the driving voltage was recorded.

[0083] Figure 12 This is a graph showing the relationship between air pressure and driving voltage discharged from the fifth through hole 531 by multiple fluid control devices with different diameters of the drainage cavity and a comparative fluid control device.

[0084] Furthermore, in this experimental example, the diameters of the fluid control device drainage cavity 532 in the second embodiment are 0.3 mm, 0.5 mm, and 0.7 mm, respectively.

[0085] Experiments show that when the drainage chamber 532 is connected to the fifth through hole 531 in the fluid control device, the pressure of the air discharged is greater than when the drainage chamber 532 is not connected to the fifth through hole 531, which is greater than when there is no drainage chamber 532. Furthermore, the larger the diameter of the drainage chamber 532 and the closer it is to the diameter of the third through hole 511, the greater the pressure of the discharged air. The reason for these results is believed to be that the valve plate 52 deforms more towards the drainage chamber 532, increasing the gap between the valve plate 52 and the valve cover 51, thus increasing the airflow pressure.

[0086] Third experimental example:

[0087] The service life of the fluid control devices were compared. The positive electrode 1 and negative electrode 3 of the second embodiment and the third comparative embodiment were energized, and the relationship between the displacement of the valve plate 52 in the fluid control device and the energizing time was recorded.

[0088] Figure 13The image shows the fracture of the valve plate in the third comparative fluid control device under an electron microscope. After one year of continuous use, the valve plate 52 in the third comparative fluid control device fractured, while the valve plate 52 in the second embodiment fluid control device did not fracture. This is believed to be because the design of the drainage cavity 532 and the vent groove 533 prevented excessive deformation of the valve plate 52, thus improving its service life.

[0089] In addition, in the above embodiments, the fluid is not limited to air, but can also be other gaseous or liquid media.

[0090] In addition, in the above embodiments, the materials of the vibration component 4 and the valve component 5 can be metals and alloys such as copper and stainless steel.

[0091] In addition, in the above embodiments, the driving body is not limited to piezoelectric elements, but may also be a nozzle or the like that performs pumping action by electromagnetic drive.

[0092] In addition, in the above embodiments, the piezoelectric element is not limited to ceramic materials, but can also be non-lead-based piezoelectric ceramic materials such as potassium sodium niobate ceramics and niobate-base ceramics.

[0093] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0094] The above embodiments merely illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A fluid control device, characterized by, Stacked sequentially from proximal to distal: valve assembly, vibration assembly, and drive unit; The vibration component has several first through holes at its distal end and several second through holes at its proximal end. The vibration component has a working cavity, which is connected to the first through holes and the second through holes respectively. The valve assembly has several third through holes at its distal end, which are opposite to the second through holes. A valve plate, which is an elastic plate, is disposed within the valve assembly and is held to elastically deform within the valve assembly. Several fourth through holes are formed on the valve plate, which are not opposite to the third through holes. The valve assembly has a valve chamber, with several fifth through holes and a drainage cavity formed near its proximal end. The fifth through holes are opposite to the fourth through holes, and the drainage cavity is opposite to the third through holes but not to the fourth through holes. The fifth through holes and the drainage cavity are connected. A vent groove is formed between the drainage cavity and an adjacent fifth through hole. The drive body is energized to generate buckling vibration, which in turn drives a portion of the vibration assembly to undergo elastic deformation, thereby pumping fluid into the valve assembly.

2. The fluid control device of claim 1, wherein: The width of the ventilation groove is not greater than the inner diameter of the drainage cavity.

3. The fluid control device of claim 1, wherein: The inner diameter of the drainage cavity is not greater than the inner diameter of the third through hole.

4. The fluid control device of claim 1, wherein: The drainage cavity partially overlaps with the fifth through hole.

5. The fluid control device of any one of claims 1 to 4, wherein: The drainage cavity and the fifth through hole are arranged alternately.

6. The fluid control device of claim 1, wherein: The valve assembly includes: Valve cover, with the third through hole provided; The valve seat has the fifth through hole and forms the valve chamber between itself and the valve cover; The valve plate is held in a position to elastically deform within the valve chamber.

7. The fluid control device of claim 1, wherein: The vibration components are stacked sequentially from the distal end to the proximal end: A first support plate, wherein the first through hole is formed on the first support plate; Support ring, the support ring having a hollow structure; The second support plate has the second through hole formed thereon; wherein the first support plate, the support ring, and the second support plate together form the working cavity.

8. The fluid control device of claim 1, wherein: The fluid control device further includes a control component, which includes a positive electrode plate and a negative electrode plate. The positive electrode plate is fixed at the distal end of the drive body, and the negative electrode plate is fixed at the proximal end of the valve assembly.

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