Energy-saving precise temperature control heat exchange system

Abstract

The present application relates to temperature control system technical field, specifically to a kind of energy-saving precision temperature control heat exchange system;The present application is realized with the purpose of water heat exchange with circulating fluid system by the first refrigerant circuit of adjustable flow, the outlet water temperature is controlled by changing the way of inlet water temperature control circulating fluid system, in the case where outlet water temperature meets use, the refrigerant in exhaust loop is cooled by the second refrigerant circuit of adjustable flow, to save the use of plant water, while according to the temperature feedback of second temperature sensor, the refrigerant temperature discharged by compressor is controlled using the third refrigerant circuit of adjustable flow, to prevent the compressor damage caused by too high or too low refrigerant temperature, improve safety, so as to realize the accurate control of circulating fluid system outlet water temperature by changing the flow of first refrigerant circuit, second refrigerant circuit and third refrigerant circuit;Solve the problem of poor reliability of temperature control heat exchange system in prior art when controlling temperature.

Description

Technical Field

[0001] This invention relates to the field of temperature control system technology, specifically to an energy-saving precision temperature control heat exchange system. Background Technology

[0002] In semiconductor precision manufacturing processes, there is a need for precise temperature control of the coolant, as even slight temperature changes can have a serious impact on product quality.

[0003] For precision temperature control heat exchange systems with traditional compressors as the core, since the compressor only has two states, start and stop, corresponding to two results of 0 and 100% cooling capacity, the method of adding an energy regulating valve is usually adopted. However, the system has limited regulation capability and there is a risk of excessively high exhaust temperature of the refrigeration system.

[0004] While precision temperature control heat exchange systems based on variable frequency compressors are superior to traditional refrigeration systems in terms of temperature control accuracy, their temperature control performance is poor and their temperature control accuracy is inadequate when the demand load is low and the compressor is operating at low frequency.

[0005] Therefore, the reliability of the two commonly used temperature control heat exchange systems mentioned above is relatively poor during use, making it difficult to meet the requirements of the semiconductor precision processing industry for precise temperature control of the coolant, thus affecting the processing quality of the products. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides an energy-saving precision temperature control heat exchange system, which solves the problem of poor reliability in temperature control heat exchange systems in the prior art.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] An energy-saving precision temperature control heat exchange system includes a circulating fluid system for heating, a refrigeration system for cooling the fluid in the circulating fluid system with a refrigerant, and a plant water system for cooling the refrigerant in the refrigeration system.

[0009] The refrigeration system includes a compressor, an exhaust circuit that exchanges heat with the plant water system is connected to the exhaust side of the compressor, a gas-liquid separator is connected to the intake side of the compressor, and a first refrigerant circuit, a second refrigerant circuit and a third refrigerant circuit with adjustable flow rate are connected in parallel between the end of the exhaust circuit away from the compressor and the intake port of the gas-liquid separator.

[0010] The first refrigerant circuit exchanges heat with the circulating fluid system, and the second refrigerant circuit exchanges heat with the exhaust circuit;

[0011] The circulating fluid system is equipped with a first temperature sensor for detecting the temperature of the outlet water.

[0012] Preferably, the exhaust circuit includes an exhaust pipe connected to the exhaust side of the compressor, and a second temperature sensor, an evaporator-condenser, a condenser and a dryer filter are installed sequentially on the exhaust pipe. The evaporator-condenser is used for heat exchange between the exhaust pipe and the second refrigerant circuit, and the condenser is used for heat exchange between the plant water system and the exhaust pipe.

[0013] Preferably, the first refrigerant circuit includes a first refrigerant pipeline connecting the outlet of the dryer filter and the inlet of the gas-liquid separator, wherein a first electronic expansion valve and an evaporator for cooling the fluid in the circulating fluid system are sequentially installed on the first refrigerant pipeline.

[0014] Preferably, the second refrigerant circuit includes a second refrigerant line connecting the outlet of the dryer filter and the inlet of the gas-liquid separator. An adjustable second electronic expansion valve is installed on the second refrigerant line, and an evaporator-condenser is used for heat exchange between the second refrigerant line and the exhaust line.

[0015] Preferably, the third refrigerant circuit includes a third refrigerant pipeline, on which a third electronic expansion valve is installed.

[0016] Preferably, the circulating fluid system includes a water tank, an electric heater, a water pump, and an inlet pipe installed on the water tank. The water pump is equipped with an outlet pipe with a first temperature sensor. A bypass pipe connects the inlet pipe and the outlet pipe, and a bypass valve is installed on the bypass pipe. A pressure sensor for detecting the output water pressure is installed on the outlet pipe, and a flow meter for detecting the flow rate is installed on the inlet pipe. An evaporator is installed on the inlet pipe.

[0017] Preferably, the water inlet pipe is also connected to a drain pipe, and the drain pipe is connected to a drain valve.

[0018] Preferably, the plant water system includes a plant water pipeline with a condenser installed, and a pressure-type water flow regulating valve is installed on the plant water pipeline on the water inlet side of the condenser. The pressure detection port of the pressure-type water flow regulating valve is located on the exhaust pipe on the refrigerant outlet side of the condenser.

[0019] Compared with the prior art, the present invention provides an energy-saving precision temperature control heat exchange system, which has the following beneficial effects:

[0020] 1. This invention utilizes a first refrigerant circuit, a second refrigerant circuit, and a third refrigerant circuit with adjustable flow rates connected in parallel between the exhaust circuit and the air inlet of the gas-liquid separator. The first refrigerant circuit achieves heat exchange with the inlet water of the circulating fluid system. The outlet water temperature is controlled by changing the inlet water temperature of the circulating fluid system. When the outlet water temperature meets the usage requirements, the second refrigerant circuit cools the refrigerant in the exhaust circuit to save plant water usage. Simultaneously, based on the temperature feedback from the second temperature sensor, the third refrigerant circuit controls the refrigerant temperature discharged from the compressor to prevent compressor damage caused by excessively high or low refrigerant temperatures, thus improving safety. Therefore, precise control of the outlet water temperature of the circulating fluid system is achieved by changing the flow rates of the first, second, and third refrigerant circuits.

[0021] 2. By installing a pressure-type water flow regulating valve on the plant water pipeline, the pressure of the refrigerant in the exhaust pipeline after passing through the condenser is measured to indirectly reflect the temperature of the refrigerant. The pressure-type water flow regulating valve adaptively changes the flow rate of the plant water pipeline according to the measured pressure, thereby realizing automatic control of the refrigerant temperature in the exhaust pipeline, which is more convenient and automated. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0023] Figure 1 This is a schematic diagram of the heat exchange system of the present invention;

[0024] Figure 2 This is a schematic diagram of the refrigeration system of the present invention;

[0025] Figure 3 This is a schematic diagram of the plant water system of the present invention;

[0026] Figure 4 This is a schematic diagram of the circulating fluid system of the present invention.

[0027] In the diagram: 1. Circulating fluid system; 11. Water tank; 12. Electric heater; 13. Water pump; 14. Inlet pipe; 15. Outlet pipe; 16. Bypass pipe; 17. Bypass valve; 18. Pressure sensor; 19. Flow meter; 201. Drain pipe; 202. Drain valve; 2. Refrigeration system; 21. Compressor; 22. Exhaust circuit; 221. Exhaust pipe; 222. Second temperature sensor; 223. Evaporator-condenser; 224. Condenser; 225. 23. Dryer filter; 24. Gas-liquid separator; 25. First refrigerant circuit; 26. First refrigerant pipeline; 27. First electronic expansion valve; 28. Evaporator; 29. ​​Second refrigerant circuit; 20. Second refrigerant pipeline; 21. Second electronic expansion valve; 22. Second electronic expansion valve; 30. Third refrigerant circuit; 21. Third refrigerant pipeline; 22. Third electronic expansion valve; 31. Plant water system; 32. Pressure-type water flow regulating valve; 4. First temperature sensor. Detailed Implementation

[0028] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0029] Example 1

[0030] Figures 1-2 In one embodiment of the present invention, in order to improve the existing temperature control heat exchange system, enhance its reliability during use, and better meet the needs of the semiconductor precision processing industry for precise temperature control of the refrigerant, this embodiment provides an energy-saving precision temperature control heat exchange system, including a circulating fluid system 1 for heating, which exchanges heat with the refrigerant in the semiconductor precision processing process through hot water at a certain temperature to achieve temperature control; and a refrigeration system 2 for cooling the fluid in the circulating fluid system 1 through a refrigerant, which cools the water flowing in the circulating fluid system 1. The circulating fluid system 1 itself can heat the water, and the two work together to achieve precise control of the outlet water temperature. It also includes a plant water system 3 for cooling the refrigerant in the refrigeration system 2.

[0031] The refrigeration system 2 includes a compressor 21, which is used to compress and transport refrigerant vapor to provide power for the refrigerant circulation. The exhaust side of the compressor 21 is connected to an exhaust circuit 22 that exchanges heat with the plant water system 3. After the refrigerant in the refrigeration system 2 cools the water in the circulating fluid system 1, the refrigerant temperature will rise. At this time, it is necessary to exchange heat with the plant water system 3 through the exhaust circuit 22 to lower the refrigerant temperature before exchanging heat with the circulating fluid system 1. The intake side of the compressor 21 is connected to a gas-liquid separator 23 to prevent refrigerant liquid from hitting the compressor 21 and to ensure the safe and normal operation of the compressor 21. The end of the exhaust circuit 22 away from the compressor 21 and the intake port of the gas-liquid separator 23 are connected in parallel to a first refrigerant circuit 24, a second refrigerant circuit 25 and a third refrigerant circuit 26 with adjustable flow rates. The flow ratio of the three circuits is adjusted by electronic valves installed on the circuits.

[0032] The first refrigerant circuit 24 exchanges heat with the circulating fluid system 1 to meet the cooling requirements of the incoming water in the circulating fluid system 1, and works with the heating device of the circulating fluid system 1 to achieve temperature control. The second refrigerant circuit 25 exchanges heat with the exhaust circuit 22. After the first refrigerant circuit 24 meets the cooling requirements of the incoming water in the circulating fluid system 1, the excess refrigerant is cooled by the second refrigerant circuit 25 to cool the refrigerant just sprayed by the compressor 21 in the exhaust circuit 22, thereby reducing the load of the plant water system 3 on the cooling of the refrigerant in the exhaust circuit 22, reducing the consumption of plant water, and making it more energy-efficient and environmentally friendly.

[0033] The circulating fluid system 1 is equipped with a first temperature sensor 4 for detecting the outlet water temperature. The temperature feedback of the first temperature sensor 4 serves as the basis for adjusting the flow rate of each loop of the first refrigerant loop 24, the second refrigerant loop 25, and the third refrigerant loop 26. The flow rate ratio of the three loops is controlled by the PID control system to achieve a stable temperature control effect.

[0034] As a preferred technical solution in this embodiment, the exhaust circuit 22 includes an exhaust pipe 221 connected to the exhaust side of the compressor 21. A second temperature sensor 222, an evaporator-condenser 223, a condenser 224, and a dryer filter 225 are sequentially installed on the exhaust pipe 221. The second temperature sensor 222 is used to monitor the temperature of the refrigerant injected by the compressor 21, thereby opening and closing the third refrigerant circuit 26 in a timely manner. When the temperature of the refrigerant injected by the compressor 21 is between 20°C and 80°C, the flow rate of the third refrigerant circuit 26 needs to be adjusted to cool the intake air of the compressor 21 to 20°C ± 5°C. When the temperature of the refrigerant injected by the compressor 21 is between -20°C and 20°C, the third refrigerant circuit 26 is closed to prevent the compressor 21 from being damaged by liquid slugging due to excessively low intake air temperature. The evaporator-condenser 223 is used for heat exchange between the exhaust pipe 221 and the second refrigerant circuit 25, and the condenser 224 is used for heat exchange between the plant water system 3 and the exhaust pipe 221.

[0035] As a preferred technical solution in this embodiment, the first refrigerant circuit 24 includes a first refrigerant pipeline 241 connecting the outlet of the dryer filter 225 and the inlet of the gas-liquid separator 23. A first electronic expansion valve 242 and an evaporator 243 for cooling the fluid in the circulating fluid system 1 are installed sequentially on the first refrigerant pipeline 241. The opening and closing ratio of the first electronic expansion valve 242 is automatically controlled by the PID control system according to the temperature feedback of the first temperature sensor 4, so as to control the refrigerant flow rate in the first refrigerant pipeline 241, thereby controlling the cooling effect of the refrigerant on the water entering the circulating fluid system 1 through the evaporator 243.

[0036] As a preferred technical solution in this embodiment, the second refrigerant circuit 25 includes a second refrigerant pipeline 251 connecting the outlet of the dryer filter 225 and the inlet of the gas-liquid separator 23. An adjustable second electronic expansion valve 252 is installed on the second refrigerant pipeline 251. The evaporator condenser 223 is used for heat exchange between the second refrigerant pipeline 251 and the exhaust pipeline 221. By opening the second electronic expansion valve 252, while meeting the cooling requirements of the fluid in the circulating fluid system 1, excess refrigerant can flow through the second electronic expansion valve 252 and the second refrigerant pipeline 251 to the evaporator condenser 223, thereby cooling the refrigerant vapor output by the compressor 21 and reducing the plant water consumption of the plant water system 3 when cooling the refrigerant in the exhaust circuit 22.

[0037] As a preferred embodiment, the third refrigerant circuit 26 includes a third refrigerant pipe 261, on which a third electronic expansion valve 262 is installed. The control of the third electronic expansion valve 262 is based on the temperature feedback from the second temperature sensor 222. When the temperature displayed by the second temperature sensor 222 is between 20°C and 80°C, the third electronic expansion valve 262 adjusts to the set opening value, requiring the suction gas of the compressor 21 to be cooled to 20°C ± 5°C. When the temperature displayed by the second temperature sensor 222 is between -20°C and 20°C, the third electronic expansion valve 262 closes to prevent excessively low suction gas temperature from causing liquid slugging and damaging the compressor 21.

[0038] Example 2

[0039] Figure 3 In one embodiment of the present invention, the heating and transportation of incoming water are achieved through a circulating fluid system 1.

[0040] Example 2 is basically the same as Example 1, except that: the circulating fluid system 1 includes a water tank 11, on which an electric heater 12, a water pump 13, and an inlet pipe 14 are installed. The water pump 13 provides power for water delivery. An outlet pipe 15 equipped with a first temperature sensor 4 is installed on the water pump 13. A bypass pipe 16 connects the inlet pipe 14 and the outlet pipe 15. A bypass valve 17 is installed on the bypass pipe 16. A pressure sensor 18 for detecting the output water pressure is installed on the outlet pipe 15. When the water supply pressure is too high, the bypass valve 17 on the bypass pipe 16 is opened, allowing excess hot water to return to the water tank 11. A flow meter 19 for detecting the flow rate is installed on the inlet pipe 14. Evaporator 243 is installed on water inlet pipe 14. The first refrigerant pipe 241 and water inlet pipe 14 exchange heat through evaporator 243, reducing the water temperature in water inlet pipe 14 to a predetermined temperature. Since the power of electric heater 12 is not easy to adjust and the pumping speed of water pump 13 is relatively fixed, water can absorb a relatively fixed amount of heat and rise to a relatively fixed temperature when passing through water tank 11. Therefore, when the water temperature in water outlet pipe 15 is too high or too low, the flow rate of refrigerant entering evaporator 243 can be controlled by adjusting the first electronic expansion valve 242, thereby changing the inlet water temperature in water inlet pipe 14 and adjusting the outlet water temperature in water outlet pipe 15 to achieve the purpose of temperature control.

[0041] As a preferred technical solution in this embodiment, the water inlet pipe 14 is also connected to the drain pipe 201, and the drain pipe 201 is connected to the drain valve 202. Excess water in the circulating fluid system 1 is discharged through the drain pipe 201 and the drain valve 202, or the water in the pipe is discharged during maintenance.

[0042] Example 3

[0043] Figure 4 In one embodiment of the present invention, the plant water system 3 is further optimized so that it can automatically adjust the cooling water volume according to the temperature of the refrigerant after it has cooled down through the condenser 224.

[0044] Compared with Example 1, Example 3 is further optimized in that: the plant water system 3 includes a plant water pipeline 31 with a condenser 224 installed. A pressure-type water flow regulating valve 32 is installed on the plant water pipeline 31 on the water inlet side of the condenser 224. The pressure detection port of the pressure-type water flow regulating valve 32 is set on the exhaust pipe 221 on the refrigerant outlet side of the condenser 224. When the refrigerant flows through the condenser 224 in the exhaust pipe 221 and is cooled down, its temperature is relatively high. Due to thermal expansion and contraction, the pressure will also be relatively high. At this time, the pressure-type water flow regulating valve 32 detects the pressure at the refrigerant outlet side of the condenser 224. When the pressure on the exhaust pipe 221 increases, the pressure-type water flow regulating valve 32 will correspondingly increase its opening, thereby increasing the water flow in the plant water pipe 31 to cool the refrigerant in the exhaust pipe 221. Conversely, when the pressure-type water flow regulating valve 32 detects a decrease in the refrigerant pressure in the exhaust pipe 221, it will also decrease its opening, reducing the cooling water flow in the plant water pipe 31. This achieves temperature control of the refrigerant delivered from the exhaust pipe 221 to the dryer filter 225, adjusts the inlet water temperature in the circulating fluid system 1, and ultimately achieves precise temperature control.

[0045] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0046] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An energy-saving precision temperature-controlled heat exchange system, comprising a circulating fluid system (1) for heating, and a refrigeration system (2) for cooling the fluid in the circulating fluid system (1) using a refrigerant, and further comprising a plant water system (3) for cooling the refrigerant in the refrigeration system (2), characterized in that: The refrigeration system (2) includes a compressor (21), an exhaust circuit (22) connected to the exhaust side of the compressor (21) for heat exchange with the plant water system (3), a gas-liquid separator (23) connected to the intake side of the compressor (21), and a first refrigerant circuit (24), a second refrigerant circuit (25) and a third refrigerant circuit (26) with adjustable flow rate connected in parallel between the end of the exhaust circuit (22) away from the compressor (21) and the intake port of the gas-liquid separator (23). The first refrigerant circuit (24) exchanges heat with the circulating fluid system (1), and the second refrigerant circuit (25) exchanges heat with the exhaust circuit (22); The circulating fluid system (1) is equipped with a first temperature sensor (4) for detecting the outlet water temperature. The exhaust circuit (22) includes an exhaust pipe (221) connected to the exhaust side of the compressor (21). A second temperature sensor (222), an evaporator-condenser (223), a condenser (224), and a dryer filter (225) are installed sequentially on the exhaust pipe (221). The evaporator-condenser (223) is used for heat exchange between the exhaust pipe (221) and the second refrigerant circuit (25). The condenser (224) is used for heat exchange between the plant water system (3) and the exhaust pipe (221). The plant water system (3) includes a plant water pipeline (31) on which a condenser (224) is installed. A pressure-type water flow regulating valve (32) located on the water inlet side of the condenser (224) is installed on the plant water pipeline (31). The pressure detection port of the pressure-type water flow regulating valve (32) is set on the exhaust pipeline (221) on the refrigerant outlet side of the condenser (224).

2. The energy-saving precision temperature control heat exchange system according to claim 1, characterized in that: The first refrigerant circuit (24) includes a first refrigerant line (241) connecting the outlet of the dryer filter (225) and the inlet of the gas-liquid separator (23). A first electronic expansion valve (242) and an evaporator (243) for cooling the fluid in the circulating fluid system (1) are installed sequentially on the first refrigerant line (241).

3. The energy-saving precision temperature control heat exchange system according to claim 1, characterized in that: The second refrigerant circuit (25) includes a second refrigerant line (251) connecting the outlet of the dryer filter (225) and the inlet of the gas-liquid separator (23). An adjustable second electronic expansion valve (252) is installed on the second refrigerant line (251). An evaporator condenser (223) is used for heat exchange between the second refrigerant line (251) and the exhaust line (221).

4. The energy-saving precision temperature control heat exchange system according to claim 1, characterized in that: The third refrigerant circuit (26) includes a third refrigerant line (261), on which a third electronic expansion valve (262) is installed.

5. The energy-saving precision temperature control heat exchange system according to claim 2, characterized in that: The circulating fluid system (1) includes a water tank (11), an electric heater (12), a water pump (13) and an inlet pipe (14) are installed on the water tank (11), an outlet pipe (15) equipped with a first temperature sensor (4) is installed on the water pump (13), a bypass pipe (16) is connected between the inlet pipe (14) and the outlet pipe (15), a bypass valve (17) is installed on the bypass pipe (16), a pressure sensor (18) for detecting the output water pressure is installed on the outlet pipe (15), a flow meter (19) for detecting the flow rate is installed on the inlet pipe (14), and an evaporator (243) is installed on the inlet pipe (14).

6. The energy-saving precision temperature control heat exchange system according to claim 5, characterized in that: The water inlet pipe (14) is also connected to a drain pipe (201), and a drain valve (202) is connected to the drain pipe (201).

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