Overhead transport vehicle

Abstract

This invention relates to an elevated transport vehicle, comprising a lifting unit having a gripping part for holding items and being raised and lowered by a plurality of lifting components arranged on the left and right. The lifting unit includes: a base portion having the gripping part; a left support member and a right support member, mounted on the lower end of the lifting components and arranged on the left and right, respectively supporting the base portion via elastic bodies; and a left arm member and a right arm member, mounted between the left support member and the right support member and the base portion, each including a first end mounted to the left support member and the right support member via a first rotating shaft, and a second end mounted to the base portion via a second rotating shaft.

Description

Technical Field

[0001] This invention relates to an elevated transport vehicle. Background Technology

[0002] Conventionally, as described in Patent Document 1, there are known overhead transport vehicles that include a main body capable of traveling along a track and a lifting unit that moves up and down relative to the main body via a lifting member. The lifting unit has a gripping part for holding articles. A base portion on which the gripping part is provided is supported by a support portion. The support portion is mounted at the lower end of the lifting member and moves up and down via the lifting member. A spring member is provided between the base portion and the support portion.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: International Publication No. 2018 / 079146 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In the structure described in Patent Document 1, the spring component functions as a vibration damping part, reducing the vibration transmitted between the contacting components. However, in this structure, multiple spring components, shaft components, and support components are provided for each lifting component, which tends to complicate the structure.

[0008] This invention describes an elevated transport vehicle that can suppress vibration of the base section through a simple configuration.

[0009] Methods for solving problems

[0010] One aspect of the present invention is an elevated conveyor vehicle comprising a lifting unit having a gripping part for holding items, and being raised and lowered by a plurality of lifting components arranged on the left and right. The lifting unit comprises: a base portion having the gripping part; a left support component and a right support component, mounted on the lower end of the lifting components and arranged on the left and right, respectively supporting the base portion via an elastic body; and a left arm component and a right arm component, mounted between the left support component and the right support component and the base portion, each including a first end mounted on the left support component and the right support component via a first rotating shaft, and a second end mounted on the base portion via a second rotating shaft.

[0011] According to this elevated transport vehicle, left and right support members, namely the left and right support members, are suspended by a hoisting component, and these left and right support members support the base. The left and right arm members are rotatable relative to the left and right support members via first rotation shafts provided at their first ends. The base can rotate relative to the left and right arm members while an elastic body extends and retracts, via second rotation shafts provided at their second ends. Thus, the base is configured to swing via the left and right arm members. An elastic body is provided between the base and the left and right support members, thereby suppressing vibration of the base. Compared to conventional structures, the number of elastic bodies (e.g., spring members) can be reduced, and vibration of the base can be suppressed with a simpler configuration.

[0012] The second ends of the left arm component and the right arm component can also be mounted to the base via a common second rotating shaft. According to this configuration, the base is connected to the left and right support components via the left arm component, the right arm component, and the common second rotating shaft disposed between them. The left arm component, the right arm component, and the second rotating shaft form a C-shaped connection structure when viewed from above, thus making the posture of the base more stable.

[0013] A rubber bushing, serving as a bearing, can also be installed on the shared second rotating shaft. This configuration allows for vibration damping in both the left and right arm components.

[0014] The support position of the base portion supported by the elastic body can also be different from the suspension positions of the left and right support components when viewed from above. With this configuration, the support position where the elastic body is installed can be offset from the suspension position, allowing the lifting unit to be more compact in the height direction.

[0015] The number of support positions that support the base via the elastic body can also be the same as or less than the number of suspension positions that suspend the left and right support members by the suspension member. With this configuration, the number of support positions (i.e., the number of elastic bodies) can be reduced to the required minimum, further simplifying the configuration.

[0016] The effects of the invention

[0017] The elevated transport vehicle according to the present invention can suppress vibration of the base section through a simple configuration. Attached Figure Description

[0018] Figure 1 This is a side view of an elevated transport vehicle according to one embodiment of the present invention.

[0019] Figure 2 This is a front view showing the general internal structure of the lifting drive unit.

[0020] Figure 3 This is a top view showing the general internal structure of the lifting drive unit.

[0021] Figure 4 This is a top view of the lifting section of the elevated transport vehicle according to the first embodiment.

[0022] Figure 5 yes Figure 4 The right side view of the lifting section.

[0023] Figure 6 yes Figure 4 Left side view of the lifting section.

[0024] Figure 7 This is a top view of the lifting section of the elevated transport vehicle according to the second embodiment.

[0025] Figure 8 yes Figure 7 The front view of the lifting section.

[0026] Figure 9 yes Figure 7 Left side view of the lifting section.

[0027] Figure 10 This is a top view of the lifting section of the elevated transport vehicle according to the third embodiment.

[0028] Figure 11 yes Figure 10 The front view of the lifting section.

[0029] Figure 12 yes Figure 10 Left side view of the lifting section. Detailed Implementation

[0030] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, in the description of the drawings, the same reference numerals are used for the same elements, and repeated descriptions are omitted.

[0031] First, refer to Figure 1 The overall structure of the elevated transport vehicle 1 will be described. Figure 1 The overhead conveyor 1 shown travels along a track 2 positioned at a height equal to or above the ground level on the ceiling of the cleanroom. The overhead conveyor 1, for example, transports FOUP (Front Opening Unified Pod) 90 as items between storage equipment and designated loading ports. The FOUP 90 may contain, for example, multiple semiconductor wafers or intermediate masks. The FOUP 90 has a flange 95 held by the overhead conveyor 1.

[0032] In the following explanation, for ease of explanation, Figure 1 The left and right directions (X-axis direction) are set as the front and rear directions of the elevated conveyor vehicle 1. Figure 1 The vertical direction is defined as the vertical (Z-axis) direction of the overhead conveyor 1. Figure 1 The depth direction is set as the left-right direction or the width direction (Y-axis direction) of the elevated conveyor 1. The X-axis, Y-axis and Z-axis are orthogonal to each other. In this specification, the illustration of the elevated conveyor 1 (including all parts of the elevated conveyor 1) is set as the front view from the direction of travel of the elevated conveyor 1, i.e., the X-axis direction.

[0033] like Figure 1 As shown, the elevated transport vehicle 1 includes a driving unit 3, a horizontal driving unit 5, a rotating driving unit 6, a lifting driving unit 7, a lifting unit 10, and a holding unit 11. The horizontal driving unit 5, the rotating driving unit 6, and the lifting driving unit 7 constitute the main body that can move along the travel track 2. On the elevated transport vehicle 1, a pair of covers 8, 8 are provided in the front-rear direction to cover the horizontal driving unit 5, the rotating driving unit 6, the lifting driving unit 7, the lifting unit 10, and the holding unit 11. When the lifting unit 10 is raised to its raised end, the pair of covers 8, 8 form a space below the holding unit 11 to accommodate the FOUP 90. A fall prevention mechanism 8A prevents the FOUP 90 held by the holding unit 11 from falling when the lifting unit 10 is raised to its raised end. In addition, a swing suppression mechanism 8B suppresses the FOUP 90 held by the holding unit 11 from swinging in the front-rear direction (travel direction) and the left-right direction of the elevated transport vehicle 1 during travel.

[0034] The travel drive unit 3 moves the overhead conveyor 1 along the travel track 2. The travel drive unit 3 is disposed within the travel track 2. The travel drive unit 3 drives rollers (not shown) that move the travel track 2. A horizontal drive unit 5 is provided at the lower part of the travel drive unit 3 via shaft 3A. The horizontal drive unit 5 moves the rotary drive unit 6, the lifting drive unit 7, and the lifting unit 10 in the horizontal plane in a direction orthogonal to the extending direction of the travel track 2 (left-right direction). The rotary drive unit 6 rotates the lifting drive unit 7 and the lifting unit 10 in the horizontal plane.

[0035] The lifting unit 10 is configured to be raised and lowered by the lifting drive unit 7, functioning as a lifting platform in the overhead conveyor 1. The lifting drive unit 7 raises and lowers the lifting unit 10 by winding and unwinding the three belts (holding components) 9. The lifting unit 10 rises and falls relative to the main body via the three belts. The three (or more) belts 9 are arranged on the left and right sides. In this embodiment, two of the three belts 9 are arranged on the left side and one on the right side. Furthermore, the holding components are not limited to the belts 9; other components such as wire ropes and ropes can also be used.

[0036] The lifting unit 10 has a left anti-vibration mechanism (first anti-vibration mechanism) 30 and a right anti-vibration mechanism (second anti-vibration mechanism) 40 equipped with three belts 9, and a base part 20 provided with a handle part 11 (see reference). Figures 4-6 The gripping part 11 grips (or holds) the FOUP 90. The gripping part 11 includes a pair of L-shaped arms 12, 12, handles 13, 13 fixed to each arm 12, 12, and an opening and closing mechanism 15 for opening and closing the pair of arms 12, 12. The pair of arms 12, 12 and the opening and closing mechanism 15 are mounted on the base part 20.

[0037] A pair of arms 12, 12 are provided on the opening and closing mechanism 15. The opening and closing mechanism 15 moves the pair of arms 12, 12 in the direction of approaching each other and in the direction of separation from each other. The operation of the opening and closing mechanism 15 causes the pair of arms 12, 12 to move forward and backward in the front-back direction. As a result, a pair of handles 13, 13 fixed to the arms 12 are opened and closed. In this embodiment, when the pair of handles 13, 13 are in the open state, the height position of the holding part 11 (lifting part 10) is adjusted so that the holding surface of the handle 13 is lower than the height of the lower surface of the flange 95. Then, by closing the pair of handles 13, 13 in this state, the holding surface of the handles 13, 13 moves forward below the lower surface of the flange 95, and the lifting part 10 is raised in this state, thereby holding (gripping) the flange 95 by the pair of handles 13, 13, and supporting the FOUP 90.

[0038] The left anti-vibration mechanism 30 and the right anti-vibration mechanism 40 are buffer mechanisms in the lifting unit 10, functioning as stabilizers for the overhead conveyor 1. The composition of the left anti-vibration mechanism 30 and the right anti-vibration mechanism 40 will be described in detail later.

[0039] Next, refer to Figure 2 as well as Figure 3 The structure of the lifting drive unit 7 will be explained. Figure 2 This is a front view showing the general internal structure of the lifting drive unit 7. Figure 3 This is a top view showing the approximate internal structure of the lifting drive unit 7. (Example) Figure 2 as well as Figure 3 As shown, the lifting drive unit 7 has a main frame 61, a support 62, three (or more) take-up rollers 63, a first idler roller 64, a second idler roller 65, a third idler roller 66, an idler wheel adjustment mechanism 69 including an actuator 67 and a swinging component 68, and three belts (lifting components) 9.

[0040] The main frame 61 is suspended and supported on the drive unit 3. The main frame 61 supports the take-up rollers 63 and the first idler roller 64 via a support 62. The support 62 supports the three take-up rollers 63 so that they can rotate. One end of each belt 9 is connected to the gripping part 11, and the other end of each belt 9 is connected to the respective take-up roller 63. The three take-up rollers 63 are arranged in a front-rear direction, and are driven by the drive motor 63A to wind or unwind the three belts 9 respectively. Each take-up roller 63 is rotatably mounted on the main frame 61 via the support 62. The drive motor 63A is the drive source for rotating each take-up roller 63 and is fixed to the main frame 61. The three take-up rollers 63 are mounted on a common rotating shaft 63B (see reference). Figure 3 Thus, it is driven by drive motor 63A. Alternatively, the three take-up rollers 63 can also be driven by drive motor 63A via a linkage mechanism not shown.

[0041] like Figure 3 As shown, in the lifting drive unit 7, two idler roller adjustment mechanisms 69 are provided for the two pairs of first idler rollers 64 and second idler rollers 65 (i.e., the two belts 9 on the left side) located on the front and rear sides. The two idler roller adjustment mechanisms 69 are disposed on the left side of the main frame 61. In addition, the lifting drive unit 7 has two rotation adjustment control boards 71 ​​and one horizontal adjustment control board 72. These rotation adjustment control boards 71 ​​and horizontal adjustment control board 72 are disposed on the left side of the main frame 61.

[0042] In this embodiment, the lifting drive unit 7 uses three belts 9, thereby achieving weight reduction compared to the case with four belts. Each belt 9 requires components and equipment such as clamping parts or winding rollers, but their weight is reduced. Furthermore, the drive motor 63A is positioned at the front, thus setting the center of gravity of the lifting drive unit 7 forward. This suppresses the lifting of the overhead conveyor 1 during deceleration. The lifting phenomenon of the overhead conveyor 1 is stronger during deceleration than during acceleration, so shifting the center of gravity forward is advantageous.

[0043] Furthermore, the idler wheel adjustment mechanism 69 is located on the left side, so if it were configured as before, the center of gravity of the lifting drive unit 7 would be biased to the left. Therefore, by... Figure 2 The take-up roller 63, idler roller, and idler wheel adjustment mechanism 69 shown are all positioned on the right side, thereby improving the center of gravity position of the lifting drive unit 7. The center of gravity G of FOUP90 is located to the right of the center of FOUP90 in the left-right direction (shown by a single dotted line in the figure), but by making the positions of the left and right belts 9, 9, not equal distances from this center, but equal distances from the center of gravity G in the left and right directions, it is possible to prevent the load applied to the belts 9 from becoming unbalanced.

[0044] Next, refer to Figures 4-6 The left anti-vibration mechanism 30 and the right anti-vibration mechanism 40 are described in detail. Three belts 9 are configured to suspend the lifting unit 10 at three points. (Example...) Figure 4 as well as Figure 5 As shown, the left side portion of the base portion 20 is suspended from the lower ends of the two bands 9 on the left side via the left anti-vibration mechanism 30. Figure 4 as well as Figure 6 As shown, the right side portion of the base portion 20 is suspended from the lower end of the right-side strip 9 via the right anti-vibration mechanism 40. Additionally, in Figure 5 In the following right and left views, the gripping part 11 is omitted, and the positional relationship between the lifting part 10 and the FOUP90 held by the gripping part 11 is shown.

[0045] like Figure 4 As shown, the base portion 20 is, for example, a rectangular plate. A left anti-vibration mechanism 30 is provided on the left side of the base portion 20, and a right anti-vibration mechanism 40 is provided on the right side of the base portion 20. The left anti-vibration mechanism 30 and the right anti-vibration mechanism 40 extend approximately along the front-rear direction (i.e., the direction of travel).

[0046] like Figure 4 as well as Figure 5 As shown, the left vibration damping mechanism 30 has a left support member 31 mounted on the lower ends of the two belts 9 and disposed on the left side of the base portion 20. The lower ends of each belt 9 are connected to the left support member 31 via a clamping portion 34. The left support member 31 includes an outer member 32 and an inner member 33 that face each other in parallel in the left-right direction and extend in the front-back direction. The outer member 32 and the inner member 33 are made of metal, for example, and are considered as rigid bodies. The outer member 32 includes two connecting portions 32c corresponding to the positions of each belt 9, and the inner member 33 includes two connecting portions (in) corresponding to the positions of each belt 9. Figure 5 (The connecting portion of the inner component 33 is obscured and cannot be observed). The lower ends of each belt 9 are connected to the connecting portion 32c of the outer component 32 and the connecting portion of the inner component 33 via the clamping portion 34 and the connecting shaft 35 extending in the left-right direction.

[0047] A rectangular opening 25 is formed on the left side of the base portion 20. The opening 25 extends vertically and faces to the left. The left support member 31 is positioned at the opening 25 when viewed from above. The base portion 20 includes a left front end portion 21 located in front of the opening 25 and a left rear end portion 22 located behind the opening 25.

[0048] The left support member 31, including the connecting portion 32c, is mostly disposed on the base portion 20, but the outer member 32 includes a pair of downwardly extending portions 32e, 32e. The downwardly extending portions 32e, 32e are disposed within the opening 25 and traverse the base portion 20. The lower ends of the downwardly extending portions 32e, 32e are located below the base portion 20. A left front support plate portion 32a and a left rear support plate portion 32b extending horizontally (along the left-right direction and the front-back direction) are provided at the lower ends of the downwardly extending portions 32e, 32e.

[0049] The left front support plate portion 32a faces the left front end portion 21 of the base portion 20 in the vertical direction, and a left front elastic body 39A is sandwiched between the left front support plate portion 32a and the left front end portion 21. The left rear support plate portion 32b faces the left rear end portion 22 of the base portion 20 in the vertical direction, and a left rear elastic body 39B is sandwiched between the left rear support plate portion 32b and the left rear end portion 22. The left front elastic body 39A and the left rear elastic body 39B are, for example, rubbers with the same elasticity (e.g., elastic modulus), and for example, have a cylindrical shape. Alternatively, the left front elastic body 39A and the left rear elastic body 39B can also be spring components.

[0050] like Figure 4 as well as Figure 6 As shown, the right vibration damping mechanism 40 has a right support member 41 mounted on the lower end of a belt 9 and disposed on the right side of the base portion 20. The lower end of the belt 9 is connected to the right support member 41 via a clamping portion 34. The right support member 41 is positioned corresponding to the belt 9 at the center of the base portion 20 in the front-rear direction and extends in the vertical direction. The right support member 41 is, for example, made of metal and is considered a rigid body. The lower end of the belt 9 is connected to the right support member 41 via the clamping portion 44 and a right rotation shaft 47 extending in the left-right direction.

[0051] The upper end of the right support member 41, which is provided with a right rotation shaft 47, is disposed on the base portion 20, but the right support member 41 traverses the base portion 20 laterally. The lower end of the right support member 41 is located lower than the base portion 20. A right support plate portion 41a extending horizontally (along the left-right direction and the front-back direction) is provided at the lower end of the right support member 41.

[0052] The right support plate portion 41a faces the right central portion 23 of the base portion 20 in the vertical direction, and a right elastic body 49 is sandwiched between the right support plate portion 41a and the right central portion 23. The right elastic body 49 is, for example, rubber with the same elasticity (e.g., elastic coefficient) as the left front elastic body 39A and the left rear elastic body 39B of the left anti-vibration mechanism 30, and has a cylindrical shape. Alternatively, the right elastic body 49 may also be a spring component.

[0053] Thus, the left support member 31 of the left anti-vibration mechanism 30 supports the base portion 20 via the left front elastic body 39A and the left rear elastic body 39B, and the right support member 41 of the right anti-vibration mechanism 40 supports the base portion 20 via the right elastic body 49.

[0054] Moreover, such as Figure 4 as well as Figure 5 As shown, the left vibration damping mechanism 30 has a left arm member 38 that is mounted between the left support member 31 and the base portion 20 and extends in the front-rear direction. The left arm member 38 is made of metal, for example, and is considered a rigid body. The left arm member 38 is arranged parallel to the left support member 31 and has a length equivalent to the front half of the base portion 20. The first end 38a of the rear side of the left arm member 38 is mounted to the left support member 31 via a left rotation shaft (first rotation shaft) 37 extending in the left-right direction. The left arm member 38 is a swing arm that can rotate around the left rotation shaft 37. The left rotation shaft 37 passes through the outer member 32, the inner member 33, and the first end 38a of the left arm member 38. The outer member 32, the inner member 33, and the left arm member 38 can rotate around the left rotation shaft 37. The left rotation shaft 37, which is a cantilever shaft, has a specified rigidity.

[0055] In addition, such as Figure 4 as well as Figure 6 As shown, the right vibration damping mechanism 40 has a right arm member 48 that is mounted between the right support member 41 and the base portion 20 and extends in the front-rear direction. The right arm member 48 is made of metal, for example, and is considered a rigid body. The right arm member 48 has a length equivalent to the front half of the base portion 20. The first end 48a of the rear side of the right arm member 48 is mounted to the right support member 41 via a right rotation shaft (first rotation shaft) 47 extending in the left-right direction. The right arm member 48 is a swing arm that can rotate about the right rotation shaft 47. The right rotation shaft 47 passes through the right support member 41, the clamping portion 44, and the first end 48a of the right arm member 48. The right support member 41 and the right arm member 48 can rotate about the right rotation shaft 47. The right rotation shaft 47, which is a cantilever shaft, has a specified rigidity.

[0056] like Figure 4 As shown, the second end 38b on the front side of the left arm component 38 and the second end 48b on the front side of the right arm component 48 are mounted to the base portion 20 via a front rotation shaft (second rotation shaft) 51 extending in the left-right direction. That is, the second end 38b on the front side of the left arm component 38 and the second end 48b on the front side of the right arm component 48 are mounted to the base portion 20 via a common front rotation shaft 51. The left arm component 38 and the right arm component 48 are, for example, fixedly mounted to the front rotation shaft 51 and cannot rotate around the front rotation shaft 51.

[0057] On the front rotating shaft 51, rubber bushings 52, serving as bearings, are provided near the second end 38b of the left arm component 38 and near the second end 48b of the right arm component 48. These rubber bushings 52 are configured to house cylindrical rubber components, and the axial load of the front rotating shaft 51 is borne by the inner circumferential surface of the rubber components. The rubber bushings 52 constitute a rotating shaft based on the torsion of the rubber components. Alternatively, a general rotary bearing may be used instead of the bearings constructed from the rubber bushings 52. The rubber bushings 52 are vibration damping elements.

[0058] In the left anti-vibration mechanism 30 and the right anti-vibration mechanism 40, which have the above-described configurations, different degrees of freedom of rotation are employed regarding the left rotation axis 37 and the right rotation axis 47, respectively. In the left anti-vibration mechanism 30, free rotation around the left rotation axis 37 is difficult due to the support structure via the left support member 31 and two elastic bodies, namely the left front elastic body 39A and the left rear elastic body 39B. On the other hand, in the right anti-vibration mechanism 40, free rotation around the right rotation axis 47 can be achieved through the support structure via the right support member 41 and one elastic body, namely the right elastic body 49. Thus, a configuration is formed that moderately allows swaying (swaying about the Y-axis) accompanying the acceleration or deceleration of the overhead conveyor 1.

[0059] On the other hand, a rigid connecting structure 50, which appears C-shaped when viewed from above, is formed by the left arm component 38, the front rotation shaft 51, and the right arm component 48. In the connecting structure 50, the left swing arm (left arm component 38) and the right swing arm (right arm component 48) are coaxially fixed, thereby achieving the function of a stabilizer. At this time, the left and right elastic bodies contract in the same amount. The rubber bushing 52 provides damping for the left arm component 38 and the right arm component 48, enabling them to be elastic in the X, Y, and Z directions.

[0060] According to the elevated transport vehicle 1 of this embodiment, the base portion 20 is supported by left support members 31 and right support members 41, which are suspended by belt 9. The left and right support members 31 and 41 support the base portion 20. The left and right arm members 38 and 48 are rotatable relative to the left and right support members 31 and 41 respectively, via left and right rotation shafts 37 and 47 provided at the first ends 38a and 48a of the left and right arm members 38 and 48 respectively. The base portion 20 is able to rotate slightly relative to the left and right arm members 38 and 48 while extending and retracting via a front rotation shaft 51 provided at the second ends 38b and 48b of the left and right arm members 38 and 48 respectively. Thus, the base portion 20 is configured to swing via the left and right arm members 38 and 48. By providing an elastic body between the base portion 20 and the left and right support members 31 and 41, vibration of the base portion 20 can be suppressed. Compared to conventional designs, fewer elastic elements (such as rubber or spring components) are required, and vibration of the base portion 20 can be suppressed through a simple configuration.

[0061] With a shared front rotation shaft 51, the base portion 20 is connected to the left support member 31 and the right support member 41 via a left arm member 38, a right arm member 48, and the shared front rotation shaft 51 disposed between them. The left arm member 38, the right arm member 48, and the front rotation shaft 51 form a C-shaped connection structure when viewed from above, thus making the posture of the base portion 20 more stable.

[0062] A rubber bushing 52 serving as a bearing is provided on the common front rotating shaft 51. With this configuration, vibration damping can also be provided in the left arm component 38 and the right arm component 48.

[0063] The support position of the base portion 20 supported by the elastic body is different from the suspension position of the left support member 31 and the right support member 41 suspended by the belt 9 when viewed from above. With this configuration, the support position where the elastic body is installed can be offset from the belt 9, and the lifting part 10 can be made more compact in the height direction.

[0064] The number of support positions via the elastic support base 20 (three in the above embodiment) is the same as the number of suspension positions via the belt 9 suspending the left support member 31 and the right support member 41 (three in the above embodiment). With this configuration, the number of support positions (i.e., the number of elastic elements) can be reduced to the required minimum, further simplifying the configuration.

[0065] The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. For example, as Figures 7-9As described, by installing a right vibration damping mechanism 40A with a right support member 41A extending in the front-rear direction at the lower ends of the two belts 9, 9, and a lifting part 10A, the same function and effect as the lifting part 10 in the above embodiment can be achieved. In the right vibration damping mechanism 40A, four belts 9 are provided as lifting members. Figure 8 As shown, the right support plate portion 41a is positioned opposite the right central portion 23 of the base portion 20 via the downward-hanging portion 41e. A right elastic body 49 is sandwiched between the right support plate portion 41a and the right central portion 23. The downward-hanging portion 41e is positioned to avoid interference with the FOUP 90. Figure 7 As shown, the right support member 41 includes an outer member 42 and an inner member 43 that face each other in parallel in the left-right direction and extend in the front-back direction. The outer member 42 and the inner member 43 are made of metal, for example, and are considered rigid bodies. Two clamping parts 44 are connected to the right support member 41A via a connecting shaft 45 extending in the left-right direction. In the lifting part 10A, the number of support positions via the elastic body support base part 20 (3 in this embodiment) is less than the number of suspension positions of the left support member 31 and the right support member 41 via the belt 9 (4 in this embodiment).

[0066] In addition, such as Figures 10-12 As described, by installing a right vibration damping mechanism 40B with a right support member 41B at the lower ends of the two belts 9,9 via the central body 46 and a lifting part 10B, the same function and effect as the lifting part 10 in the above embodiment can be achieved. In the right vibration damping mechanism 40B, four belts 9 are provided as lifting members. Figure 11 As shown, the right support plate portion 41a of the right support member 41, extending along the front-rear direction via the central body 46, the horizontal portion 41f, and the downward portion 41e, is positioned facing the right front portion 24 and the right rear portion 26 of the base portion 20. A right front elastic body 49A and a right rear elastic body 49B are sandwiched between the right support plate portion 41a and the right front portion 24 and the right rear portion 26. The downward portion 41e is positioned to avoid interference with the FOUP90.

[0067] Alternatively, as a variation, the second end 38b on the front side of the left arm component 38 and the second end 48b on the front side of the right arm component 48 can also be mounted on the base portion 20 via independent second rotating shafts. A bearing other than the rubber bushing 52 can also be used as the bearing for the front rotating shaft 51.

[0068] Compliant explanation

[0069] 1: Overhead conveyor vehicle; 2: Travel track; 7: Lifting drive unit; 10: Lifting unit; 11: Holding unit; 20: Base unit; 21: Left front end; 22: Left rear end; 23: Right central part; 24: Right front part; 26: Right rear part; 30: Left anti-vibration mechanism (first anti-vibration mechanism); 31: Left support component; 32: Outer component; 33: Inner component; 37: Left rotating shaft (first rotating shaft); 38: Left arm component; 38a: First end; 38b: Second end. End, 39A: left front elastomer, 39B: left rear elastomer, 40, 40A, 40B: right anti-vibration mechanism (second anti-vibration mechanism), 41: right support component, 42: outer component, 43: inner component, 47: right rotating shaft (first rotating shaft), 48: right arm component, 48a: first end, 48b: second end, 49: right elastomer, 49A: right front elastomer, 49B: right rear elastomer, 51: front rotating shaft (second rotating shaft), 52: rubber bushing.

Claims

1. An elevated conveyor vehicle, comprising a lifting unit, the lifting unit having a gripping part for holding items, and being raised and lowered by multiple lifting components arranged on the left and right, wherein... The lifting unit has: The base portion is provided with the aforementioned gripping portion; The left and right support components are installed at the lower end of the lifting component and are arranged left and right, respectively supporting the base portion via an elastic body; as well as A left arm component is mounted between the left support component and the base portion; and a right arm component is mounted between the right support component and the base portion; wherein, a first end of the left arm component is connected to the left support component via a left rotation shaft, and a second end of the left arm component is connected to the base portion via a front rotation shaft; a first end of the right arm component is connected to the right support component via a right rotation shaft, and a second end of the right arm component is connected to the base portion via the front rotation shaft; and the left rotation shaft, the right rotation shaft, and the front rotation shaft all extend in the left-right direction; The left arm component and the right arm component are rotatable relative to the left support component and the right support component, respectively. Furthermore, the base portion is rotatable relative to the left arm component and the right arm component while the elastomer is extended and retracted via the front rotation shaft provided at the second end of the left arm component and the right arm component.

2. The elevated transport vehicle as described in claim 1, wherein, The second end of the left arm component and the second end of the right arm component are mounted to the base via a common front rotating shaft.

3. The elevated conveyor vehicle as described in claim 2, wherein, A rubber bushing serving as a bearing is provided on the shared front rotating shaft.

4. The elevated transport vehicle as described in any one of claims 1 to 3, wherein, The support position of the base portion supported by the elastic body is different from the suspension position of the left support member and the right support member when viewed from above.

5. The elevated transport vehicle as described in any one of claims 1 to 4, wherein, The number of support positions that support the base portion via the elastic body is the same as or less than the number of suspension positions that suspend the left support member and the right support member by the suspension member.

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