Timing adjustment valve and back suction valve with timing adjustment valve

Abstract

A timing adjustment valve (101) is provided with: a guide body formed with a first port, a second port, and a drive port; a check valve mechanism portion (101b) that allows passage of fluid from the first port to the second port and prevents passage of fluid from the second port to the first port; and a timing adjustment mechanism portion (101a) that opens and closes an internal flow path by supplying and discharging drive fluid to and from the drive port, wherein the timing adjustment mechanism portion (101a) is arranged in parallel with the check valve mechanism portion (101b) in the internal flow path, and configured to allow passage of fluid between the first port and the second port when a pressure of the drive fluid supplied to and discharged from the timing adjustment mechanism portion through the drive port becomes equal to or less than a predetermined value.

Description

Technical Field

[0001] The present invention relates to a timing adjustment valve capable of adjusting the opening and closing timing of fluid flow in an internal flow path, and a back suction valve having a timing adjustment valve. Background Technology

[0002] In pipelines used for supplying liquids such as solutions to semiconductor wafers in semiconductor manufacturing equipment, a backflow valve is used to prevent leakage from the end of the pipeline after the liquid supply is stopped. The backflow valve typically has a mechanism that supplies and discharges fluid to a cylinder housing a piston, causing the piston to move. Through the elastic deformation of a diaphragm linked to the piston, the volume of the backflow chamber connected to the pipeline increases or decreases, thereby drawing back the liquid from the pipeline (see, for example, Patent Document 1). Such a backflow valve is positioned downstream of an on / off valve used for opening and closing the fluid passage within the pipeline. Furthermore, as described in Patent Documents 2 and 3, there are also backflow valves where the on / off valve for opening and closing the fluid passage and the backflow mechanism for drawing back the liquid from the fluid passage are integrated into one unit.

[0003] When the operation of the individual control valves and suction valves is controlled, it becomes difficult to coordinate the closing of the liquid flow through the control valves and the timing of the liquid backflow through the suction valves, making control complex. Therefore, a branch line from a single switching valve that controls the supply and discharge of the driving fluid is often connected to the control valve section and the suction mechanism section, so that the operation of the control valve section and the suction mechanism section is controlled by the operation of the single switching valve.

[0004] In cases where the opening / closing valve section and the suction mechanism section are operated by a single switching valve, for example, the suction valve has a valve body, an opening / closing valve section and a suction mechanism section, and the valve body has a fluid passage containing an inlet flow path and an outlet flow path, a valve chamber with the inlet flow path opening and a suction chamber located between the valve chamber and the outlet flow path.

[0005] The opening and closing valve section moves the piston by supplying and discharging driving fluid into the cylinder chamber housing the piston, causing the valve body, which is linked to the piston, to approach or move away from the valve seat formed around the inlet flow path opening in the valve chamber. A biasing spring is disposed in the cylinder chamber, biasing the piston in the direction that pushes the valve body towards the valve seat. In this configuration, when driving fluid is supplied to the cylinder chamber, the pressure of the driving fluid within the cylinder chamber resists the biasing force of the biasing spring, causing the piston to move and thus moving the valve body away from the valve seat. Furthermore, when driving fluid is discharged from the cylinder chamber, the biasing force caused by the biasing spring exceeds the pressure of the driving fluid within the cylinder chamber, causing the piston to move towards the valve seat, pressing the valve body against the valve seat. This opens and closes the fluid passage.

[0006] The backflow mechanism moves the piston by supplying and discharging driving fluid into the cylinder chamber housing the piston. This movement, in conjunction with the piston, deforms the diaphragm facing the backflow chamber, increasing or decreasing the volume of the backflow chamber. Inside the cylinder chamber, a biasing spring is positioned away from the backflow chamber to bias the piston. In this configuration, when driving fluid is supplied to the cylinder chamber, the pressure of the driving fluid within the cylinder chamber resists the biasing force of the biasing spring, causing the piston to move and the diaphragm to bulge towards the backflow chamber, entering a standby state. Furthermore, when driving fluid is discharged from the cylinder chamber, the biasing force caused by the biasing spring exceeds the pressure of the driving fluid within the cylinder chamber, causing the piston to move in a direction that retracts the diaphragm from the backflow chamber, returning the diaphragm to its original shape. Through this increase or decrease in the volume of the backflow chamber, accompanied by diaphragm deformation, liquid is drawn back from the fluid passage (specifically, the outlet flow path).

[0007] In the backflow valve configured as described above, when the driving fluid is supplied from the switching valve to the cylinder chamber of the on / off valve section and the backflow mechanism section, the valve body moves away from the valve seat via the on / off valve section, and the flow of liquid in the fluid passage begins. At the same time, the diaphragm expands into the backflow chamber via the backflow mechanism section, entering a standby state. On the other hand, when the driving fluid in the cylinder chamber of the on / off valve section and the backflow mechanism section is discharged through the switching valve, the valve body is pressed against the valve seat via the on / off valve section, and the flow of liquid in the fluid passage is closed. At the same time, the diaphragm retracts from the backflow chamber via the backflow mechanism section, increasing the volume of the backflow chamber, and causing the liquid in the fluid passage (specifically the outlet flow path) to be backflowed.

[0008] [Prior art literature] [Patent Documents] [Patent Document 1] Japanese Utility Model Publication No. 08-010399 [Patent Document 2] Japanese Utility Model Application Publication No. 3-115267 [Patent Document 3] Japanese Patent Application Publication No. 11-37327 Summary of the Invention

[0009] [The problem the invention aims to solve] To achieve closure via the on / off valve section, as described above, the switching valve must be switched by discharging drive fluid from the on / off valve section. When switching the supply and discharge of drive fluid between the on / off valve section and the suction mechanism section via a common switching valve, discharging drive fluid from the on / off valve section simultaneously initiates the discharge of drive fluid from the suction mechanism section. However, even after the discharge of drive fluid from the on / off valve section begins, the on / off valve section does not immediately become closed. To close the on / off valve section, it is necessary to reduce the pressure of the drive fluid in the cylinder chamber of the on / off valve section to a predetermined value, and then use the biasing force of the biasing spring to press the valve body against the valve seat. However, there are cases where the suction operation of the suction mechanism section begins before the flow of fluid is closed by the on / off valve section. In this case, the amount of liquid supplied downstream of the suction valve is affected, making it unsuitable for applications such as semiconductor manufacturing where precise control of the liquid supply is required.

[0010] As a method for changing the timing of initiating the back suction operation via the back suction mechanism after the flow of liquid through the opening and closing valve is closed, a variable throttle valve is generally installed between the switching valve and the back suction mechanism to adjust the discharge flow rate of the drive fluid from the back suction mechanism. However, adjusting the variable throttle valve to initiate the back suction operation via the back suction mechanism after the flow of liquid through the opening and closing valve is closed is not an easy task. Therefore, it is desirable to be able to supply drive fluid to the back suction mechanism regardless of the pressure of the opening and closing valve, and simultaneously to be able to initiate the discharge of drive fluid from the back suction mechanism after the pressure of the drive fluid in the cylinder chamber of the opening and closing valve drops to a predetermined value. As a method for controlling the timing of the discharge of drive fluid from the back suction mechanism, the use of a pilot valve that can open and close the valve based on the pressure of the pilot fluid is also being considered. However, a typical pilot valve is a mechanism that closes when the pressure of the pilot fluid decreases. Therefore, in cases where the pressure of the driving fluid in the opening and closing valve is synchronized with the pressure of the driving fluid, the flow of fluid cannot be started when the pressure of the driving fluid decreases. The control of the pilot fluid used to open and close the pilot valve must be performed separately, making the control cumbersome.

[0011] Therefore, the object of the present invention is to provide a timing adjustment valve that allows liquid flow when the pressure of the guide fluid drops below a predetermined value, thereby solving the problems existing in the prior art.

[0012] [Technical means to solve the problem] In view of the above objectives, as a first embodiment, the present invention provides a timing adjustment valve, comprising: a guide body having a first port, a second port, and a drive port, the guide body forming an internal flow path extending between the first port and the second port; a check valve mechanism that allows fluid to flow from the first port to the second port within the internal flow path and prevents fluid from flowing from the second port to the first port within the internal flow path; and a timing adjustment mechanism that opens and closes the internal flow path by supplying and discharging drive fluid to the drive port; wherein the timing adjustment mechanism is configured to be parallel to the check valve mechanism in the internal flow path and is configured to allow fluid to flow between the first port and the second port when the pressure of the drive fluid supplied and discharged to the timing adjustment mechanism through the drive port is below a predetermined value.

[0013] In the aforementioned timing adjustment valve, a check valve mechanism that allows fluid flow from the first port to the second port within the internal flow path and prevents fluid flow from the second port to the first port, and a timing adjustment mechanism that opens and closes the internal flow path via the supply and discharge of drive fluid from the drive port, are arranged side-by-side in the internal flow path extending between the first and second ports. Therefore, regardless of the pressure of the drive fluid in the timing adjustment mechanism, fluid flow from the first port to the second port is possible via the check valve mechanism. On the other hand, when the drive fluid supplied and discharged to the timing adjustment mechanism via the drive port falls below a predetermined value, fluid flow from the second port to the first port begins, and the timing of the start of fluid flow from the second port to the first port can be controlled.

[0014] As one embodiment of the aforementioned timing adjustment valve, a guide cylinder chamber, a guide valve chamber, a connecting hole, a first flow path, and a second flow path are further formed within the guide body. The guide cylinder chamber communicates with the drive port, and the guide valve chamber communicates with the second port. The connecting hole connects the guide cylinder chamber and the guide valve chamber. The first flow path extends from the guide valve chamber to the first port, and the second flow path extends parallel to the first flow path and communicates with both the first and second ports. A guide valve seat is provided at the periphery of the opening of the first flow path leading to the guide valve chamber. The check valve mechanism is disposed between the second port and the second flow path to prevent the flow of fluid from the second port to the second flow path and to allow the flow of fluid from the second flow path to the second port. The adjustment mechanism includes a guide piston, a guide rod, a guide valve body, a bolt member, and a guide biasing member. The guide piston is disposed in the guide cylinder chamber. The guide rod extends from the guide piston and is inserted into the connection hole. The guide valve body is located at the front end of the guide rod and is disposed in the guide valve chamber opposite to the guide valve seat. The bolt member extends through a flow hole and is installed at the end of the first flow path connected to the first port. The guide biasing member biases the guide piston in a direction that moves the guide valve body away from the guide valve seat. Drive fluid is supplied to the guide cylinder chamber through the drive port, thereby resisting the biasing force of the guide biasing member and pressing the guide valve body against the guide valve seat, thus blocking the flow of fluid in the first flow path.

[0015] In the aforementioned timing adjustment valve, the first flow path and the second flow path extend side-by-side between the first port and the second port. The guide piston in the guide cylinder chamber of the timing adjustment mechanism is biased by a guide biasing member in a direction that moves the guide valve body away from the guide valve seat. Drive fluid is supplied to the guide cylinder chamber, resisting the biasing force of the guide biasing member. By moving the guide piston, the guide valve body is pushed against the guide valve seat, sealing the flow of fluid in the first flow path. Therefore, when the pressure of the drive fluid in the guide cylinder chamber of the timing adjustment mechanism decreases, the guide valve body moves away from the guide valve seat by the biasing force of the guide biasing member, allowing the flow of fluid in the first flow path to begin. Furthermore, a check valve mechanism is provided between the second port and the second flow path to prevent the flow of fluid from the second port to the second flow path, while allowing the flow of fluid from the second flow path to the second port. Therefore, at least the flow of fluid from the first port through the second flow path is ensured from the first port to the second port. On the other hand, from the second port to the first port, the flow of fluid from the second port to the second flow path is prevented by the check valve mechanism. Only when the pressure of the driving fluid in the guide cylinder chamber of the timing adjustment mechanism decreases, the flow of fluid from the second port through the guide valve chamber and the first flow path is ensured.

[0016] The guide biasing member is preferably configured to be clamped between the guide valve body and the plug member.

[0017] In this case, it is better to screw the bolt member to the end of the first flow path and adjust the position of the bolt member in the first flow path by rotating the bolt member.

[0018] The guide body is constructed via a first guide frame and a second guide frame. The first guide frame is provided with a drive port, a guide cylinder chamber, a connecting hole, a guide valve chamber, and a first flow path. The second guide frame is provided with a through-hole extending through it, a second flow path extending parallel to the insertion hole, a first port, and a second port. The first guide frame is inserted into the insertion hole of the second guide frame, so that the second flow path is connected to the gap passage formed between the inner peripheral surface of the insertion hole and the outer peripheral surface of the first guide frame. The second port is connected to the guide valve chamber via a connecting path extending across the first guide frame and the second guide frame. The gap passage is connected to the connecting path. The check valve mechanism is disposed in the gap passage.

[0019] The check valve mechanism is disposed between the inner peripheral surface of the insertion hole and the outer peripheral surface of the first guide frame, and the check valve mechanism is a lip seal with a flexible lip structure, the lip seal being configured such that the lip structure is located close to the communication passage. For example, the lip seal is selected from one of a U-type seal, a V-type seal, and a Y-type seal.

[0020] As a second embodiment, the present invention provides a backflow valve, comprising: an on / off valve section, a backflow mechanism section, and the aforementioned timing adjustment valve. The on / off valve section opens and closes a fluid passage. The backflow mechanism section is disposed downstream of the on / off valve section and, after the fluid passage through the on / off valve section is closed, backflows the fluid within the fluid passage. The on / off valve section and the backflow mechanism section are connected to a common switching valve, through which the driving fluid for the on / off valve section and the backflow mechanism section is supplied and discharged. When the driving fluid is supplied through the switching valve, the on / off valve section is open and the backflow mechanism section is in a standby state. When the driving fluid is discharged through the switching valve, the on / off valve section is closed and the backflow mechanism section performs a backflow action. The first port and the second port of the timing adjustment valve are respectively connected to the switching valve and the backflow mechanism section, and the drive port of the timing adjustment valve is connected to a pipeline between the switching valve and the on / off valve section.

[0021] In the aforementioned backflow valve, the opening / closing valve section for opening and closing the fluid passage and the backflow mechanism section for backflow of fluid within the fluid passage are connected to a common switching valve. The switching valve supplies and discharges the drive fluid to the opening / closing valve section and the backflow mechanism section. Furthermore, the first and second ports of the timing adjustment valve are respectively connected to the switching valve and the backflow mechanism section, and the drive port of the timing adjustment valve is connected to the pipeline between the switching valve and the opening / closing valve section. Therefore, the pressure of the drive fluid supplied and discharged from the drive port of the timing adjustment valve to the cylinder chamber is equal to the pressure within the opening / closing valve section. By discharging the drive fluid from the opening / closing valve section through the switching valve, when the pressure of the drive fluid within the opening / closing valve section drops below a predetermined value, the flow of drive fluid from the second port to the first port of the timing adjustment valve becomes possible, enabling the discharge of drive fluid from the backflow mechanism section. As long as the timing adjustment valve is set so that the opening and closing valve section becomes closed when the pressure of the driving fluid in the opening and closing valve section becomes below a predetermined value, the timing adjustment valve can start the back suction operation through the back suction mechanism section after the flow of fluid through the opening and closing valve section is closed.

[0022] As one embodiment, the backflow valve further includes a valve body with an internal flow path and a backflow chamber. The internal flow path includes an inlet flow path and an outlet flow path for fluid flow. The backflow chamber communicates with the outlet flow path. After the flow of fluid through the internal flow path of the opening and closing valve is closed, the volume of the backflow chamber is increased by the backflow mechanism, thereby drawing fluid back from the outlet flow path. The backflow mechanism includes a backflow drive frame and a backflow piston. A back suction biasing member is provided. The back suction drive unit frame forms a back suction cylinder chamber inside. The back suction piston is housed in the back suction cylinder chamber and can slide along the inner circumferential surface of the back suction cylinder chamber. The back suction biasing member is disposed in the back suction cylinder chamber and biases the back suction piston in the direction that increases the volume of the back suction chamber. By supplying drive fluid to the back suction cylinder chamber, the biasing force of the back suction biasing member is resisted, and the back suction piston moves in the direction that decreases the volume of the back suction chamber.

[0023] Furthermore, the suction mechanism includes a diaphragm at its outer periphery. The diaphragm is sandwiched between the suction drive unit frame and the valve body, thus separating the suction drive unit frame and the valve body. The diaphragm extends from the suction piston and is connected to the front end of a suction rod. The suction rod is inserted into a through hole at the bottom of the suction cylinder chamber. The volume of the suction chamber increases or decreases due to the deformation of the diaphragm as the suction piston moves.

[0024] Furthermore, the valve body is provided with a valve chamber, which is connected to the inlet flow path and to the suction chamber through a connecting passage. A valve seat, which is close to or away from the valve body, is formed on the periphery of the opening from the inlet flow path to the valve chamber. The opening and closing valve part includes: an opening and closing drive part frame, an opening and closing piston, an opening and closing rod, and an opening and closing biasing member. The opening and closing drive part frame forms an opening and closing cylinder chamber inside. The opening and closing piston is housed in the opening and closing cylinder chamber and can slide along the inner peripheral surface of the opening and closing cylinder chamber. The opening and closing rod extends from the opening and closing piston, passes through the bottom of the opening and closing cylinder chamber, and protrudes into the valve chamber. The opening and closing biasing member biases the opening and closing piston in a direction that brings the valve body, which is connected to the front end of the opening and closing rod, closer to the valve seat. By supplying driving fluid to the opening and closing cylinder chamber, the biasing force of the opening and closing biasing member is resisted, causing the opening and closing piston to move away from the valve body in a direction that moves away from the valve seat.

[0025] [Comparison with the effectiveness of previous technologies] According to the timing adjustment valve of the present invention, regardless of the pressure of the drive fluid in the timing adjustment mechanism, the flow of fluid from the first port to the second port is made possible via the check valve mechanism. Furthermore, while the check valve mechanism does not allow the flow of drive fluid from the second port to the first port, the timing adjustment mechanism initiates the flow of fluid from the second port to the first port when the pressure of the drive fluid supplied and discharged to the timing adjustment mechanism via the drive port falls below a predetermined value. Therefore, the timing of the initiation of the flow of fluid from the second port to the first port can be controlled via the timing adjustment valve. An opening / closing valve for opening and closing the fluid passage and a suction mechanism for drawing back fluid within the fluid passage are connected to a common switching valve and a suction valve for supplying and discharging drive fluid to the opening / closing valve and the suction mechanism via the switching valve. The first and second ports of the timing adjustment valve are respectively connected to the switching valve and the suction mechanism, and the drive port of the timing adjustment valve is connected to the pipeline between the switching valve and the opening / closing valve. In this case, if the setting is such that the opening and closing valve section closes when the pressure of the drive fluid in the guide cylinder chamber of the opening and closing valve section falls below a predetermined value, then the back suction operation via the back suction mechanism section can begin immediately after the flow of fluid through the opening and closing valve section is closed. Furthermore, when drive fluid is supplied to the back suction mechanism section, fluid can pass through the timing adjustment mechanism section and the check valve assembly in the timing adjustment valve, thus allowing the drive fluid to be supplied to the back suction mechanism section at a greater flow rate than when it is discharged from the back suction mechanism section. Attached Figure Description

[0026] [ Figure 1 [This is a schematic diagram showing the overall configuration of the timing adjustment valve and the backflow valve equipped with the timing adjustment valve according to the present invention.]

[0027] [ Figure 2 [To indicate] Figure 1The diagram shows a longitudinal cross-sectional view of the valve body, the opening and closing valve section, and the back suction mechanism section of the back suction valve.

[0028] [ Figure 3 [To indicate] Figure 1 The diagram shows a longitudinal cross-sectional view of one embodiment of the timing adjustment valve of the back suction valve, and shows the timing adjustment mechanism of the timing adjustment valve in the open state.

[0029] [ Figure 4 [To indicate] Figure 1 The diagram shows a longitudinal cross-sectional view of one embodiment of the timing adjustment valve of the back suction valve, and shows the timing adjustment mechanism of the timing adjustment valve in the closed state. Detailed Implementation

[0030] The following describes embodiments of the timing adjustment valve and the back suction valve having the timing adjustment valve according to the present invention with reference to the drawings. However, the present invention is not limited to the embodiments shown in the drawings.

[0031] Initially, refer to Figure 1 The overall configuration of a backflow valve 11 according to an embodiment of the present invention will be described. The backflow valve 11 includes: a valve body 13 having a fluid passage; an on / off valve section 15 for opening and closing the fluid passage; a backflow mechanism section 17 for backflowing fluid in the fluid passage; a switching valve 83 connected to the on / off valve section 15 and the backflow mechanism section 17 via a branch pipeline; and a timing adjustment valve 101 disposed on the pipeline connecting the backflow mechanism section 17 and the switching valve 83. The on / off valve section 15 and the backflow mechanism section 17 are mounted on the upper part of the valve body 13. The backflow mechanism section 17 is disposed downstream of the on / off valve section 15. After the fluid passage is closed by the on / off valve section 15 to block the flow of fluid, the fluid in the fluid passage is backflowed, thereby preventing fluid from leaking out and dripping from the nozzle at the end of the fluid passage. It is preferable to install a variable throttle valve 85 with a check valve and a variable throttle valve 87 with a check valve on the pipeline between the switching valve 83 and the on / off valve section 15 and between the switching valve 83 and the timing adjustment valve 101.

[0032] When the opening / closing valve 15 is in the open state, driving fluid is supplied from a driving fluid source (not shown) via the switching valve 83. Conversely, when it is in the closed state, the switching valve 83 is switched to discharge driving fluid. Furthermore, when driving fluid is supplied from the driving fluid source via the switching valve 83, the suction mechanism 17 enters a standby state. Conversely, when the switching valve 83 is switched to discharge driving fluid, a suction operation is performed to draw fluid back from the fluid passage. That is, when the switching valve 83 is switched to supply driving fluid, synchronously with the opening / closing valve 15 entering the open state, the suction mechanism 17 enters a standby state. Conversely, when the switching valve 83 is switched to discharge driving fluid, synchronously with the opening / closing valve 15 entering the closed state, the suction mechanism 17 begins its suction operation.

[0033] The timing adjustment valve 101 includes a timing adjustment mechanism 101a and a check valve mechanism 101b arranged side-by-side in the flow path. The check valve mechanism 101b is connected to the switching valve 83 and the suction mechanism 17 via a pipeline, allowing the flow of drive fluid from the switching valve 83 to the suction mechanism 17, while preventing the flow of drive fluid from the suction mechanism 17 to the switching valve 83. The timing adjustment mechanism 101a is a guide valve that operates by guiding fluid. It is connected via a pipeline between the switching valve 83 and the suction mechanism 17, and also to a pipeline connecting the switching valve 83 and the on / off valve 15. The drive fluid in this pipeline is used as the guide fluid to operate the valve, thereby switching the flow and closure of fluid between the switching valve 83 and the suction mechanism 17. Furthermore, the timing adjustment mechanism 101a is configured such that when the pressure of the drive fluid, which serves as the guide fluid, supplied and discharged from the pipeline connecting the switching valve 83 and the on / off valve 15 becomes below a predetermined value (the pressure of the drive fluid within the on / off valve 15 when it is in the closed state), it becomes in the open state, allowing the flow of drive fluid between the switching valve 83 and the suction mechanism 17. In other words, the timing adjustment mechanism 101a essentially allows the flow of drive fluid when the on / off valve 15 is in the closed state and prevents the flow of drive fluid when the on / off valve 15 is in the open state.

[0034] Therefore, when the switching valve 83 is switched to supply drive fluid, the drive fluid is supplied to the on / off valve section 15, and the pressure of the drive fluid in the on / off valve section 15 increases. The on / off valve section 15 changes from a closed state to an open state. Therefore, the timing adjustment valve 101 supplies drive fluid to the suction mechanism section 17 through both the timing adjustment mechanism section 101a and the check valve mechanism section 101b. On the other hand, when the switching valve 83 is switched to discharge drive fluid, drive fluid is discharged from the on / off valve section 15, and the pressure of the drive fluid in the on / off valve section 15 decreases. The on / off valve section 15 changes from an open state to a closed state. Therefore, until the opening / closing valve section 15 is in the closed state, neither the timing adjustment mechanism section 101a nor the check valve mechanism section 101b allows the flow of driving fluid in the timing adjustment valve 101. Thus, the driving fluid will not be discharged from the suction mechanism section 17. After the opening / closing valve section 15 is in the closed state, the timing adjustment mechanism section 101a allows the flow of driving fluid. Therefore, the driving fluid is discharged from the suction mechanism section 17 only through the timing adjustment mechanism section 101a. In this way, the timing adjustment valve 101 can cause the suction mechanism section 17 to perform a suction operation after the opening / closing valve section 15 is in the closed state.

[0035] Furthermore, when the timing adjustment valve 101 supplies the driving fluid to the back suction mechanism 17, it allows the driving fluid to flow to the back suction mechanism 17 through both the timing adjustment mechanism 101a and the check valve mechanism 101b. As a result, a larger flow rate of driving fluid than when the driving fluid is discharged from the back suction mechanism 17 can be allowed to flow, enabling the back suction mechanism 17 to quickly return to the standby state.

[0036] Additionally, the variable throttle valve 85 with a check valve includes a variable throttle valve section 85a and a check valve section 85b arranged in parallel on the flow path, and similarly, the variable throttle valve 87 with a check valve includes a variable throttle valve section 87a and a check valve section 87b arranged in parallel on the flow path. The variable throttle valve section 85a can adjust the flow rate of the driving fluid passing through it, thereby adjusting the flow rate of the driving fluid supplied to and discharged from the on / off valve section 15, and thus adjusting the timing of the start and completion of the opening and closing action as well as the speed of the opening and closing action. Similarly, the variable throttle valve section 87a can adjust the flow rate of the driving fluid passing through it, thereby adjusting the flow rate of the driving fluid supplied to and discharged from the back suction mechanism section 17, and thus adjusting the timing of the start and completion of the back suction action as well as the speed of the opening and closing action. Furthermore, check valve sections 85b and 87b allow the passage of driving fluid in the direction of supplying driving fluid from the driving fluid source to the on / off valve section 15 and the back suction mechanism section 17, but prevent the passage of driving fluid in the direction of discharging driving fluid from the on / off valve section 15 and the back suction mechanism section 17 to the outside. Therefore, the return of the on / off valve section 15 to the open state and the return of the back suction mechanism section 17 to the standby state can be performed quickly.

[0037] Next, refer to Figures 2 to 4 The specific structure of the back suction valve 11 will be explained.

[0038] Figure 2 To indicate Figure 1 Details of the configuration of the valve body 13, the opening and closing valve section 15, and the back suction mechanism section 17 of the back suction valve 11 shown.

[0039] The valve body 13 has a fluid passage including an inlet flow path 19 and an outlet flow path 21 inside. Furthermore, a valve chamber 23 opening upwards is provided downstream of the inlet flow path 19, and a suction chamber 25 opening upwards is provided upstream of the outlet flow path 21. The valve chamber 23 and the suction chamber 25 are connected via a connecting passage 27. In this configuration of the valve body 13, fluid supplied to the inlet flow path 19 passes through the valve chamber 23, the connecting passage 27, and the suction chamber 25 and is discharged from the outlet flow path 21. In the embodiment shown in the attached drawings, the inlet flow path 19 opens onto the bottom surface of the valve chamber 23, and the outlet flow path 21 opens onto the bottom surface of the suction chamber 25. Furthermore, the connecting passage 27 opens onto the side surface of the valve chamber 23 and the bottom surface of the suction chamber 25. Around the opening of the inlet flow path 19 into the valve chamber 23, an annular valve seat 29 is formed, which is close to or away from the valve body 49 described later. Furthermore, couplings 31 and 33 for connecting pipes are provided at the upstream end of the inlet flow path 19 and the downstream end of the outlet flow path 21, respectively. However, the fluid passage is not limited to the configuration shown in the figure as long as the fluid flowing into the inlet flow path 19 can be discharged from the outlet flow path 21 through the valve chamber 23, the connecting passage 27 and the suction chamber 25.

[0040] The opening / closing valve section 15 includes: an opening / closing drive unit frame 35 with an opening / closing cylinder chamber 37 formed inside; an opening / closing piston 39 housed within the opening / closing cylinder chamber 37; and an opening / closing biasing member 41 biasing the opening / closing piston 39. The opening / closing drive unit frame 35 includes an opening / closing cap 35a with a circular cross-section and a generally cylindrical housing space inside; and an opening / closing cover 35b installed on the upper part of the opening / closing cap 35a to close the opening of the opening / closing cap 35a. The opening / closing cylinder chamber 37 is formed by the space enclosed by the inner circumferential surface and bottom surface of the housing space of the opening / closing cap 35a and the bottom surface of the opening / closing cover 35b. The opening / closing piston 39 has a generally circular plate shape and is housed within the opening / closing cylinder chamber 37, allowing it to slide along its circumferential wall (inner circumferential surface) in the vertical direction shown in the figure. The cylinder chamber 37 is divided into: a first chamber 37a, located near the valve chamber 23, surrounded by the inner circumferential surface of the cylinder chamber 37 (specifically, the opening and closing cap 35a) and the bottom surface of the cylinder chamber 37 (i.e., the bottom of the opening and closing cap 35a); and a second chamber 37b, located away from the valve chamber 23, surrounded by the inner circumferential surface of the cylinder chamber 37 (specifically, the opening and closing cap 35a) and the top surface of the cylinder chamber 37 (i.e., the bottom surface of the opening and closing cover 35b). Figure 2 In the embodiment shown, the first air chamber 37a is located below the opening and closing piston 39, and the second air chamber 37b is located above the opening and closing piston 39.

[0041] The opening / closing piston 39 is connected to an opening / closing rod 43, which is thinner than the opening / closing piston 39 and extends downward in the direction near the valve chamber 23, and a guide shaft 45, which is thinner than the opening / closing piston 39 and extends upward in the direction opposite to the opening / closing rod 43 and away from the valve chamber 23. The opening / closing rod 43 is slidably inserted through a through hole 47 provided at the bottom of the opening / closing cylinder chamber 37 (specifically, the opening / closing cap 35a) of the opening / closing drive unit frame 35, and extends into the valve chamber 23, with its front end connected to the valve body 49. The valve body 49 has a shape with a truncated cone connected to a cylinder, and its bottom surface is arranged opposite to the valve seat 29. The guide shaft 45 is inserted through a through hole 51 provided at the bottom of the opening / closing cover 35b and extends to the outside, and is configured to guide the reciprocating motion of the opening / closing piston 39. The valve body 49 moves up and down along with the reciprocating motion of the opening and closing piston 39 in the opening and closing cylinder chamber 37, and moves closer to or further away from the valve seat 29 formed in the valve chamber 23 via the opening and closing rod 43, thereby opening and closing the fluid passage.

[0042] The biasing member 41 for opening and closing is configured within the second air chamber 37b, compressed between the ceiling surface of the opening and closing cylinder chamber 37 (i.e., the bottom surface of the opening and closing cover 35b) and the opening and closing piston 39 (specifically, its top surface), thereby normally biasing the opening and closing piston 39 in a direction that causes the valve body 49 connected to the front end of the opening and closing rod 43 to approach the valve seat 29. Figure 2 In the illustrated embodiment, a coil spring is used as the opening and closing biasing member 41, which is arranged in a spiral shape extending around the guide shaft 45 in the second air chamber 37b. However, the opening and closing biasing member 41 is not limited to a coil spring, as long as it can bias the opening and closing piston 39 to bring the valve body 49 closer to the valve seat 29; for example, a cylindrical elastic body may also be used.

[0043] On the peripheral wall of the cylinder chamber 37 (specifically, the opening and closing cap 35a), at a position not closed by the opening and closing piston 39, there is an opening and closing drive fluid port 53. When the valve body 49 is pressed against the valve seat 29 by the biasing force of the opening and closing biasing member 41, drive fluid is supplied to the first air chamber 37a through the opening and closing drive fluid port 53. As a result, the pressure of the drive fluid in the first air chamber 37a increases, and the force acting on the opening and closing piston 39 by the pressure of the drive fluid in the first air chamber 37a (hereinafter also referred to as "force caused by the drive fluid") is higher than the force acting on the opening and closing piston 39 by the opening and closing biasing member 41 (hereinafter also referred to as "biasing force caused by the opening and closing biasing member 41"). The opening and closing piston 39 resists the biasing force caused by the opening and closing biasing member 41 and moves in a direction away from the valve chamber 23, thereby increasing the volume of the first air chamber 37a. Therefore, by means of the opening / closing lever 43, the valve body 49 connected to the opening / closing piston 39 can be moved away from the valve seat 29, allowing fluid to flow in the fluid passage. When the pressure of the driving fluid in the first air chamber 37a reaches its maximum, the opening / closing piston 39 stops at the open position. On the other hand, when the valve body 49 is in the state away from the valve seat 29, the driving fluid in the first air chamber 37a is discharged through the opening / closing driving fluid port 53, reducing the pressure of the driving fluid in the first air chamber 37a. The force caused by the driving fluid is lower than the biasing force caused by the opening / closing biasing member 41, and the opening / closing piston 39 moves towards the valve chamber 23 according to the biasing force caused by the opening / closing biasing member 41, reducing the volume of the first air chamber 37a. Therefore, by means of the opening / closing lever 43, the valve body 49 connected to the opening / closing piston 39 can be pressed against the valve seat 29, and the opening / closing piston 39 stops at the closed position, closing the fluid passage. As the driving fluid, compressed air can be used, for example.

[0044] Furthermore, the air in the second chamber 37b is released to the outside through the gap between the outer peripheral surface of the guide shaft 45 and the inner peripheral surface of the through hole 51 of the opening and closing cover 35b, so that the air in the second chamber 37b does not easily hinder the sliding of the opening and closing piston 39 of the opening and closing cylinder chamber 37. Moreover, a seal 55 is installed on the outer peripheral surface of the opening and closing piston 39, so that the opening and closing piston 39 can slide in a sealed state, preventing the driving fluid from leaking from the first chamber 37a to the second chamber 37b. Furthermore, a seal 56 such as an O-ring is also installed on the outer peripheral surface of the opening and closing rod 43, so that the opening and closing rod 43 can slide in a closed state, preventing the driving fluid from leaking from the first chamber 37a to the outside, while the inner peripheral surface of the through hole 47 is sealed.

[0045] Figure 2 In the illustrated embodiment, a thin-film diaphragm portion 49a is provided, extending radially outward from the outer periphery of the upper end of the valve body 49. The outer periphery of this diaphragm portion 49a is sandwiched between the valve body 13 and the opening / closing cap 35a, so that the valve body 49 is supported within the valve chamber 23 via the diaphragm portion 49a. In this way, by supporting the valve body 49 within the valve chamber 23 via the diaphragm portion 49a, the valve chamber 23 and the opening / closing drive unit frame 35 are separated via the diaphragm portion 49a. Therefore, when the fluid flowing through the fluid passage is corrosive or the like, it is possible to prevent fluid from the valve chamber 23 from intruding into the opening / closing cylinder chamber 37 and corroding the opening / closing drive unit frame 35.

[0046] The back-suction mechanism 17 includes: a back-suction drive unit frame 57 that forms a back-suction cylinder chamber 59 inside, a back-suction piston 61 housed in the back-suction cylinder chamber 59, and a back-suction biasing member 63 that biases the back-suction piston 61. The back-suction drive unit frame 57 consists of a back-suction cap 57a that forms a roughly cylindrical housing space with a circular cross-section inside, and a back-suction cover 57b that is installed on the upper part of the back-suction cap 57a and closes the opening at the upper part of the back-suction cap 57a. The back-suction cylinder chamber 59 is formed by the space enclosed by the inner peripheral surface and bottom surface of the housing space of the back-suction cap 57a and the bottom surface of the back-suction cover 57b. The back-suction piston 61 has a roughly circular plate shape and is housed in the back-suction cylinder chamber 59, and can slide along its peripheral wall (inner peripheral surface) in the vertical direction shown in the figure. The suction cylinder chamber 59 is divided into: a first chamber 59a, located near the suction chamber 25, surrounded by the suction piston 61 (specifically its bottom surface), the inner circumferential surface of the suction cylinder chamber 59 (i.e., the suction cap 57a), and the bottom surface of the suction cylinder chamber 59 (i.e., the bottom of the suction cap 57a); and a second chamber 59b, located away from the suction chamber 25, surrounded by the suction piston 61 (specifically its top surface), the inner circumferential surface of the suction cylinder chamber 59 (i.e., the suction cap 57a), and the top surface of the suction cylinder chamber 59 (i.e., the bottom surface of the suction cover 57b). Figure 2In the illustrated embodiment, the first air chamber 59a is located below the suction piston 61, and the second air chamber 59b is located above the suction piston 61.

[0047] The back suction piston 61 is connected to a back suction rod 65, which is thinner than the back suction piston 61 and extends downward in the direction near the back suction chamber 25. The back suction rod 65 is slidably inserted through a through hole 67 provided at the bottom of the back suction cap 57a that passes through the back suction drive unit frame 57, and extends into the back suction chamber 25, with its front end connected to a diaphragm 69. The outer periphery of the diaphragm 69 is held between the valve body 13 and the back suction cap 57a, and the diaphragm 69 separates the back suction chamber 25 from the back suction drive unit frame 57. The diaphragm 69 thus constructed, along with the reciprocating motion of the suction piston 61 in the suction cylinder chamber 59 in the up and down direction, expands or retracts relative to the suction chamber via the suction rod 65, thereby increasing or decreasing the volume of the suction chamber 25. By increasing the volume of the suction chamber 25, the fluid in the outlet flow path 21 connected to the downstream side of the suction chamber 25 can be suctioned back.

[0048] The back suction biasing member 63 is configured within the first air chamber 59a, compressed between the bottom of the back suction cylinder chamber 59 (i.e., the bottom of the back suction cap 57a) and the back suction piston 61 (specifically, its bottom surface), and normally biases the back suction piston 61 in a direction that causes the diaphragm 69 connected to the front end of the back suction rod 65 to retract from the back suction chamber 25 (i.e., away from the valve body 13). Figure 2 In the illustrated embodiment, a coil spring is used as the back suction biasing member 63, which is arranged in a spiral shape extending around the back suction rod 65 in the first air chamber 59a. However, the back suction biasing member 63 is not limited to a coil spring, as long as it can bias the back suction piston 61 to retract the diaphragm 69 from the back suction chamber 25; for example, a cylindrical elastomer may also be used.

[0049] In the back-suction cylinder chamber 59 (more specifically, the back-suction drive unit frame 57), a back-suction drive fluid port 71 is provided at a position not closed by the back-suction piston 61. In the embodiment shown in the figure, the back-suction drive fluid port 71 is provided on the back-suction cover 57b of the back-suction drive unit frame 57 such that it opens into the ceiling surface of the back-suction cylinder chamber 59. When the diaphragm 69 is retracted from the back suction chamber 25 by the biasing force of the back suction biasing member 63, driving fluid is supplied to the second air chamber 59b through the back suction driving fluid port 71. This increases the pressure of the driving fluid in the second air chamber 59b, causing the force acting on the back suction piston 61 by the pressure of the driving fluid in the second air chamber 59b (hereinafter also referred to as "force caused by the driving fluid") to be higher than the force acting on the back suction piston 61 by the back suction biasing member 63 (hereinafter also referred to as "biasing force caused by the back suction biasing member 63"). The back suction piston 61 resists the biasing force caused by the back suction biasing member 63 and moves in a direction closer to the back suction chamber 25, thereby increasing the volume of the second air chamber 59b. As a result, the diaphragm 69 connected to the back suction piston 61 expands into the back suction chamber 25 via the back suction rod 65. When the pressure of the driving fluid in the second air chamber 59b reaches its maximum, the back suction piston 61 stops in the standby position. On the other hand, when the back suction piston 61 is in the standby position and the diaphragm 69 is bulging towards the back suction chamber 25, the driving fluid in the second air chamber 59b is discharged through the back suction driving fluid port 71, reducing the pressure of the driving fluid in the second air chamber 59b. The force caused by the driving fluid is then lower than the biasing force caused by the back suction biasing member 63. The back suction piston 61 moves towards the back suction chamber 25 due to the biasing force caused by the back suction biasing member 63, reducing the volume of the second air chamber 59b. As a result, the diaphragm 69, connected to the back suction piston 61, retracts from the back suction chamber 25 via the back suction rod 65, increasing the volume of the back suction chamber 25 and drawing back the fluid in the outlet flow path 21 connected to the back suction chamber 25. The back suction action is completed when the back suction piston 61 reaches the back suction position.

[0050] In the back-suction mechanism 17, the back-suction piston 61 can slide between a top dead center position on the upper side (the side away from the back-suction chamber 25) and a bottom dead center position on the lower side (the side closer to the back-suction chamber 25) within the back-suction cylinder chamber 59. The "bottom dead center position" refers to the limit of movement of the back-suction piston 61 due to its contact with a specific part of another component. In the illustrated embodiment, the back-suction cylinder chamber 59 includes a large-diameter portion that houses the back-suction piston 61 and a small-diameter portion with a smaller diameter than the large-diameter portion. A step is provided between the large-diameter portion and the small-diameter portion, and the bottom dead center position of the back-suction piston 61 is defined by interfering with the step. Furthermore, in the illustrated embodiment, a through hole 75 is formed in the center of the back-suction cover 57b, extending through and having a threaded groove on at least a portion of its inner circumferential surface. The adjusting screw 77 is screwed into this through hole 75 such that it protrudes from the ceiling of the back-suction cylinder chamber 59 into the second air chamber 59b in a sealed state. A portion of the adjusting screw 77, which protrudes outward from the back suction cover 57b, is screwed with a nut 79. Tightening the nut 79 locks the rotation of the adjusting screw 77. When the adjusting screw 77 protrudes into the second air chamber 59b, the back suction piston 61 (specifically, its top surface) abuts against the adjusting screw 77, restricting its movement. When the adjusting screw 77 does not protrude into the second air chamber 59b, the back suction piston 61 abuts against the ceiling of the back suction cylinder chamber 59 (specifically, the bottom of the back suction cover 57b), restricting its movement, thus reaching the top dead center position of the back suction piston 61. That is, the back suction position of the back suction piston 61 when the back suction action of the back suction mechanism 17 is completed, and the pressure of the driving fluid in the second air chamber 59b at that time, can be adjusted via the adjusting screw 77.

[0051] In addition, a vent hole 81 is provided on the peripheral wall of the small diameter portion of the suction cylinder chamber 59, that is, the position not closed by the suction piston 61, so that the first chamber 59a can be vented to the outside, and the air in the first chamber 59a does not easily hinder the movement of the suction piston 61.

[0052] The opening / closing drive fluid port 53 of the opening / closing valve section 15 and the suction drive fluid port 71 of the suction mechanism section 17 are connected to a common switching valve 83 via branch lines, and are connected to a common single drive fluid source (not shown) via the switching valve 83. The switching valve 83 can switch the supply of drive fluid from the drive fluid source to the opening / closing drive fluid port 53 and the suction drive fluid port 71, and the discharge of drive fluid from the opening / closing drive fluid port 53 and the suction drive fluid port 71 to the outside.

[0053] Furthermore, the suction mechanism 17 uses a lip seal as the seal 73. Here, a lip seal refers to a seal with a flexible lip-shaped structure in the sealing portion (pressure-bearing portion), which deforms with the movement of the sliding surface and changes in pressure to appropriately maintain the contact pressure of the sealing surface. Lip seals include J-type, L-type, U-type, V-type, and Y-type seals. In the illustrated embodiment, a Y-type seal is used as the seal 73. When using a Y-type seal, the bifurcated lip-shaped structure of the Y-type seal is positioned towards the second air chamber 59b. This improves the function of preventing the driving fluid in the second air chamber 59b from leaking into the first air chamber 59a.

[0054] Furthermore, since the required sealing performance between the movable and stationary components is not high compared to the on / off valve section 15, no seal is provided between the movable and stationary components except for the seal 73, and no seal is installed on the outer peripheral surface of the suction rod 65. Moreover, the on / off valve section 15 can also use a lip seal as the seal 55, similar to the seal 73, as shown in the illustrated embodiment.

[0055] Figure 3 and Figure 4 express Figure 1 The configuration of one embodiment of the timing adjustment valve 101 of the back suction valve 11 shown.

[0056] The timing adjustment valve 101 is provided with a first port 105, a second port 107, and a drive port 109, and has: a guide body 103 with an internal flow path extending between the first port 105 and the second port 107, a timing adjustment mechanism 101a, and a check valve mechanism 101b. The timing adjustment mechanism 101a and the check valve mechanism 101b are arranged side by side in the internal flow path. The guide body 103 has: a guide cylinder chamber 111 communicating with the drive port 109, a guide valve chamber 113 communicating with the second port 107, a connecting hole 114 connecting the guide cylinder chamber 111 and the guide valve chamber 113, a first flow path 115 extending between the guide valve chamber 113 and the first port 105, and a second flow path 117 extending alongside the first flow path 115 and communicating with the first port 105 and the second port 107. A guide valve seat 119 is provided at the periphery of the opening of the first flow path 115 leading to the guide valve chamber 113.

[0057] In the illustrated embodiment, the guide body 103 is composed of a first guide frame 121 and a second guide frame 123. The first guide frame 121 includes: an enlarged portion 121a, a reduced portion 121b that is thinner than the enlarged portion 121a, and an intermediate portion 121c that is thinner than the enlarged portion 121a and thicker than the reduced portion 121b, located between the enlarged portion 121a and the reduced portion 121b. The first guide frame 121 is provided with: a drive port 109 located at the end and opening to the outside, a guide cylinder chamber 111, a guide valve chamber 113, and a first flow path 115. The guide cylinder chamber 111 opens into the drive port 109. In the illustrated embodiment, a first coupling 141 is mounted on the drive port 109. The second guide frame 123 is formed with a first port 105, a second port 107, a through insertion hole 125 extending through the second guide, and a second flow path 117 extending parallel to the insertion hole 125. The insertion hole 125 includes an enlarged hole portion 125a and a smaller hole portion 125b. A second port 107 is formed on the side of the second guide frame 123 and is connected to the enlarged hole portion 125a via a portion of the connecting passage 129 described later.

[0058] By inserting the reduced portion 121b of the first guide frame 121 into the reduced hole portion 125b of the insertion hole 125 of the second guide frame 123 and inserting the middle portion 121c into the enlarged hole portion 125a, the first guide frame 121 and the second guide frame 123 are connected with the enlarged portion 121a protruding from the insertion hole 125. With the first guide frame 121 inserted into the insertion hole 125 of the second guide frame 123, a gap passage 127 is formed between the outer peripheral surface of the middle portion 121c of the first guide frame 121 and the inner peripheral surface of the enlarged hole portion 125a of the second guide frame 123, and the second flow path 117 communicates with the gap passage 127. Furthermore, a connecting passage 129 is formed through a through hole extending from the guide valve chamber 113 of the first guide frame 121 through the side wall and a through hole extending from the second port 107 of the second guide frame 123 to the enlarged hole portion 125a of the insertion hole 125. The second port 107 and the guide valve chamber 113 are connected through the connecting passage 129. Furthermore, a slot passage 127 is connected to the connecting passage 129.

[0059] The first port 105 is provided at the end of the second guide frame 123 in such a way that it connects to both the reduced hole portion 125b of the insertion hole 125 and the second flow path 117, and a second coupling 143 is installed on the first port 105.

[0060] A guide cylinder chamber 111 houses a guide piston 131. A guide rod 133 extends from the guide piston 131 through a connecting hole 114 and protrudes into the guide valve chamber 113. A guide valve body 135 is provided at the front end of the guide rod 133 protruding into the guide valve chamber 113, and the guide valve body 135 is configured to face the guide valve seat 119 within the guide valve chamber 113. In the illustrated embodiment, the guide valve body 135 is composed of an O-ring mounted on the outer peripheral surface of the front end of the guide rod 133. By pressing this O-ring against the guide valve seat 119, which forms a periphery opening from the first flow path 115 into the guide valve chamber 113, the flow of fluid in the first flow path 115 is blocked. However, the configuration of the guide valve body 135 is not limited as long as it can abut against the guide valve seat 119 to block the flow of fluid in the first flow path 115; it can also be, for example, a frustum-shaped elastic body fixed to the front end of the guide rod 133.

[0061] In addition, seals 145 and 147 are respectively installed on the outer peripheral surfaces of the guide piston 131 and the guide rod 133 to seal the inner peripheral surface of the guide cylinder chamber 111 and the outer peripheral surface of the guide piston 131, as well as the inner peripheral surface of the connecting hole 114 and the outer peripheral surface of the guide rod 133.

[0062] A plug member 137 is installed at the end of the first flow path 115 of the guide body 103, which communicates with the first port 105. The plug member 137 has a through-flow hole 137a, so that the first port 105 can communicate with the first flow path 115 even when the plug member 137 is installed at the end of the first flow path 115. In the first flow path 115, a guide biasing member 139 is disposed in a compressed state between the front end of the guide valve body 135 and the plug member 137, and is normally biased against the guide piston 131 in a direction that moves the guide valve body 135 away from the guide valve seat 119 by the guide rod 133. In the illustrated embodiment, a coil spring is used as the guide biasing member 139. However, as long as the guide piston 131 can be normally biased against the guide valve body 135 in a direction that moves the guide valve seat 119 away from the guide valve seat 119 and fluid can pass through, the guide biasing member 139 is not limited to a coil spring, and can also be, for example, a cylindrical elastic body. Furthermore, as long as the guide valve body 135 can be normally biased toward the guide piston 131 in a direction that keeps the guide valve seat 119 away from the guide valve body 135, the guide biasing member 139 does not need to be disposed between the front end of the guide valve body 135 and the plug member 137, and can also be disposed, for example, in the guide cylinder chamber 111.

[0063] The bolt member 137 is provided with threads on its outer peripheral surface and at the end of the first flow path 115 where it is installed, and it is preferable to install the bolt member 137 at the end of the first flow path 115 by screwing. When the bolt member 137 is screwed into the first flow path 115, the position of the bolt member 137 in the first flow path 115 can be adjusted by rotating the bolt member 137 relative to the first flow path 115.

[0064] With this configuration, driving fluid can be supplied to the guide cylinder chamber 111 via the drive port 109, so that the force caused by the driving fluid is higher than the biasing force caused by the guide biasing member 139, thus resisting the biasing force caused by the guide biasing member 139, and causing the guide piston 131 to move in a direction closer to the guide valve chamber 113. As a result, the guide valve body 135 can be pressed against the guide valve seat 119 by the guide rod 133, sealing the flow of fluid in the first flow path 115. Furthermore, by discharging driving fluid from the guide cylinder chamber 111, the force caused by the driving fluid is lower than the biasing force caused by the guide biasing member 139, and the guide piston 131 moves in a direction away from the guide valve chamber 113 according to the biasing force caused by the guide biasing member 139. As a result, the guide valve body 135 can be moved away from the guide valve seat 119 by the guide rod 133, allowing fluid to flow between the first flow path 115 and the guide valve chamber 113 through the gap between the guide valve seat 119 and the guide valve body 135. That is, fluid can flow between the first port 105 and the second port 107 via the first flow path 115, the guide valve chamber, and the connecting passage 129.

[0065] Furthermore, by adjusting the biasing force caused by the guide biasing member 139, the pressure of the drive fluid in the guide cylinder chamber 111 can be adjusted when the guide valve body 135 is away from the guide valve seat 119, thereby discharging the drive fluid from the guide cylinder chamber 111. The adjustment of the biasing force caused by the guide biasing member 139 can be achieved, for example, by selecting a guide biasing member 139 with a suitable biasing force, such that when the pressure of the drive fluid in the guide cylinder chamber 111 is below the desired pressure, the guide valve body 135 is away from the guide valve seat 119, allowing fluid flow. Furthermore, in the illustrated embodiment, when the bolt member 137 is screwed into the first flow path 115 and the guide biasing member 139 is disposed between the bolt member 137 and the guide valve body 135, by rotating the bolt member 137 to change the position of the bolt member 137 in the first flow path 115, the compression state of the guide biasing member 139 when the guide valve body 135 abuts against the guide valve seat 119 can be changed. Therefore, by rotating the bolt member 137, the position of the bolt member 137 in the first flow path 115 is changed, and the pressure of the driving fluid in the guide cylinder chamber 111 when the driving fluid is discharged from the guide cylinder chamber 111 and the guide valve body 135 is moved away from the guide valve seat 119 can be adjusted.

[0066] In the embodiment shown in the figure, the drive port 109, the guide cylinder chamber 111, the guide valve chamber 113, the connecting hole 114, the guide piston 131, the guide rod 133, the guide valve body 135, the bolt member 137, and the guide biasing member 139 constitute the timing adjustment mechanism 101a.

[0067] Furthermore, in the illustrated embodiment, when the driving fluid is discharged from the guide cylinder chamber 111 through the drive port 109, and the pressure of the driving fluid in the guide cylinder chamber 111 decreases to below the pressure of the driving fluid in the opening / closing cylinder chamber 37 (specifically, its first air chamber 37a) when the valve body 49 of the opening / closing valve section 15 abuts against the valve seat 29, as long as the biasing force caused by the guide biasing member 139 is adjusted such that the biasing force of the guide biasing member 139 is higher than the force caused by the driving fluid in the guide cylinder chamber 111, causing the guide valve body section 135 to move away from the guide valve seat 119, when the opening / closing valve section 15 is in the closed state, the timing adjustment mechanism section 101a allows the flow of driving fluid from the second port 107 to the first port 105. As a result, driving fluid can be discharged from the suction cylinder chamber 59 (specifically, its second air chamber 59b) of the suction mechanism section 17 through the timing adjustment valve 101 and the switching valve 83, thus initiating the suction operation via the suction mechanism section 17.

[0068] A check valve mechanism 101b is disposed within the slit passage 127. The check valve mechanism 101b, for example, as shown in the illustrated embodiment, is composed of a lip seal 149 with a flexible lip structure, including U-shaped, V-shaped, and Y-shaped seals, disposed between the outer peripheral surface of the first guide frame 103a and the inner peripheral surface of the enlarged hole 125a of the insertion hole 125 of the second guide frame 103b. In this case, the lip structure of the lip seal 149 is disposed on the side closest to the connecting passage 129 in the slit passage 127. Thus, the lip seal 149 allows fluid to flow from the first port 105 towards the second port 107 via the second flow path 117 and the slit passage 127, and prevents fluid from flowing from the second port 107 towards the first port 105 via the slit passage 127 and the second flow path 117. In the illustrated embodiment, the check valve mechanism 101b is composed of a Y-type seal.

[0069] Next, the explanation Figure 1The operation of the backflow valve 11 is shown. Here, the first port 105 of the timing adjustment valve 101 is connected to the switching valve 83, and the second port 107 is connected to the backflow drive fluid port 71 of the backflow mechanism 17. Furthermore, the timing adjustment mechanism 101a of the timing adjustment valve 101 is set such that the pressure of the drive fluid in the opening / closing cylinder chamber 37 (specifically, its first chamber 37a) when the valve body 49 in the opening / closing valve section 15 abuts against the valve seat 29 is set as the valve closing pressure P. When the pressure of the drive fluid in the guide cylinder chamber 111 decreases to below the valve closing pressure P, the biasing force caused by the guide biasing member 139 is higher than the force caused by the drive fluid in the guide cylinder chamber 111, and the guide valve body 135 is moved away from the guide valve seat 119, thereby allowing the flow of drive fluid from the second port 107 through the guide valve chamber 113 and the first flow path 115 to the first port 105.

[0070] When the opening / closing valve section 15 of the suction valve 11 is in the open state, the switching valve 83 switches to supply driving fluid from a driving fluid source (not shown) to the opening / closing driving fluid port 53 and the suction driving fluid port 71. As a result, the force caused by the driving fluid supplied to the first chamber 37a of the opening / closing cylinder chamber 37 through the opening / closing driving fluid port 53 is higher than the biasing force of the opening / closing biasing member 41. The opening / closing piston 39, resisting the biasing force caused by the driving fluid in the first chamber 37a, moves to the open position by pushing away from the valve chamber 23. Consequently, the valve body 49 connected to the front end of the opening / closing rod 43 moves away from the valve seat 29 as the opening / closing piston 39 rises, and the fluid flowing into the inlet flow path 19 flows out from the outlet flow path 21 through the valve chamber 23, the connecting passage 27, and the suction chamber 25.

[0071] At this time, the pressure of the drive fluid in the opening / closing cylinder chamber 37 of the opening / closing valve section 15 is higher than the closing valve pressure P. As a result, the pressure of the drive fluid supplied to the guide cylinder chamber 111 via the drive port 109 of the timing adjustment valve 101 is also higher than the closing valve pressure P. Therefore, in the timing adjustment mechanism section 101a of the timing adjustment valve 101, the force caused by the drive fluid in the guide cylinder chamber 111 is higher than the biasing force caused by the guide biasing member 139, and the guide piston 131 moves in a direction close to the guide valve chamber 113 against the biasing force caused by the guide biasing member 139. Figure 4As shown, the guide valve body 135 is pressed against the guide valve seat 119. That is, the timing adjustment mechanism 101a of the timing adjustment valve 101 is made to prevent the flow of drive fluid between the first port 105 and the second port 107. On the other hand, the check valve mechanism 101b allows the flow of drive fluid from the first port 105 to the second port 107. As a result, the drive fluid supplied via the switching valve 83 flows in from the first port 105 of the timing adjustment valve 101 and flows out from the second port 107 via the check valve mechanism 101b, and is also supplied to the suction drive fluid port 71. As a result, the suction piston 61 moves to the standby position by resisting the biasing force caused by the suction biasing member 63 and pushing down in the direction close to the suction chamber 25, due to the force caused by the drive fluid supplied to the second chamber 59b of the suction cylinder chamber 59 through the suction drive fluid port 71. As a result, the diaphragm 69 connected to the front end of the suction piston 61 expands toward the suction chamber 25, and the suction mechanism 17 becomes a standby state.

[0072] When the opening and closing valve section 15 of the back suction valve 11 is in the closed state to block the flow of fluid, the switching valve 83 is switched so that the driving fluid can be discharged to the outside from the pipeline connected to the opening and closing driving fluid port 53 and the back suction driving fluid port 71.

[0073] When driving fluid is discharged from the first chamber 37a of the opening / closing cylinder chamber 37 towards the switching valve 83 through the opening / closing driving fluid port 53, the pressure of the driving fluid in the first chamber 37a decreases. The force caused by the driving fluid in the first chamber 37a is lower than the biasing force caused by the opening / closing biasing member 41, and the opening / closing piston 39 is pushed down in the direction close to the valve chamber 23 by the biasing force caused by the opening / closing biasing member 41. When the pressure of the driving fluid in the first chamber 37a decreases to the valve closing pressure P, the valve body 49 connected to the front end of the opening / closing rod 43 is pressed against the valve seat, thereby closing the inflow of fluid from the inlet flow path 19 to the valve chamber 23.

[0074] On the other hand, even if the switching valve 83 is switched to allow the drive fluid to be discharged to the outside via the switching valve 83, the pressure of the drive fluid in the opening / closing cylinder chamber 37 of the opening / closing valve section 15 is higher than the closing pressure P until the opening / closing valve section 15 is in the closed state. At this time, the pressure of the drive fluid supplied to the guide cylinder chamber 111 via the drive port 109 of the timing adjustment valve 101 is higher than the closing pressure P. Therefore, in the timing adjustment mechanism section 101a of the timing adjustment valve 101, the force caused by the drive fluid in the guide cylinder chamber 111 is higher than the biasing force caused by the guide biasing member 139, so the guide valve body section 135 is still pressed against the guide valve seat 119. That is, the timing adjustment mechanism section 101a of the timing adjustment valve 101 does not allow the flow of drive fluid between the first port 105 and the second port 107. Furthermore, the check valve mechanism section 101b also prevents the flow of drive fluid from the second port 107 to the first port 105. Therefore, even if the switching valve 83 is switched to allow the drive fluid to be discharged to the outside via the switching valve 83, the timing adjustment valve 101 does not allow the drive fluid to flow from the second port 107 to the first port 105 until the opening and closing valve section 15 is in the closed state. As a result, the drive fluid cannot be discharged from the second air chamber 59b of the back suction cylinder chamber 59 of the back suction mechanism section 17, and the standby state is maintained, so the back suction operation will not be performed.

[0075] When the switching valve 83 is switched to allow the drive fluid to be discharged to the outside, and the opening / closing valve section 15 is in the closed state, the pressure of the drive fluid in the opening / closing cylinder chamber 37 of the opening / closing valve section 15 decreases to below the closing pressure P. At this time, the pressure of the drive fluid in the guide cylinder chamber 111 of the timing adjustment valve 101 also decreases to below the closing pressure P. Therefore, in the timing adjustment mechanism section 101a of the timing adjustment valve 101, the biasing force caused by the guide biasing member 139 is higher than the force caused by the drive fluid in the guide valve chamber 113, and the guide piston 131 moves away from the guide valve chamber 113 according to the biasing force caused by the guide biasing member 139. Figure 3As shown, the guide valve body 135 is located away from the guide valve seat 119. Therefore, the timing adjustment mechanism 101a of the timing adjustment valve 101 allows the flow of drive fluid between the first port 105 and the second port 107. On the other hand, the check valve mechanism 101b prevents the flow of drive fluid from the second port 107 to the first port 105. Therefore, the timing adjustment valve 101 allows only the flow of drive fluid from the second port 107 to the first port 105 via the timing adjustment mechanism 101a. As a result, drive fluid is discharged from the second chamber 59b of the suction cylinder chamber 59 to the switching valve 83 through the suction drive fluid port 71 of the suction mechanism 17. Consequently, the biasing force caused by the suction biasing member 63 is higher than the force caused by the drive fluid in the second chamber 59b of the suction cylinder chamber 59, and the suction piston 61 moves upward in a direction away from the suction chamber 25 due to the biasing force caused by the suction biasing member 63. As the back suction piston 61 moves upward, the diaphragm 69 connected to the back suction piston 61 retracts from the back suction chamber 25 via the back suction rod 65, increasing the volume of the back suction chamber 25. As a result, a back suction action is performed.

[0076] In this way, after the flow of fluid through the opening and closing valve section 15 is closed, the back suction valve 11 can perform a back suction action through the back suction mechanism section 17, thereby preventing fluid from leaking or dripping from the nozzle connected to the outlet flow path 21 after the valve is closed.

[0077] The backflow valve 11 according to the present invention has been described above with reference to the illustrated embodiments; however, the present invention is not limited to the illustrated embodiments. For example, in the illustrated embodiment, the guide biasing member 139 is disposed within the first flow path 115 and located between the guide valve body portion 135 and the plug member 137; however, it may also be disposed within the guide cylinder chamber 111.

[0078] [Symbol Explanation] 11 Back suction valve 13 Valve Body 15 On / off valve section 17. Back-suction mechanism 19 Inlet Flow Path 21Exit flow path 23 valve chambers 25 back suction chamber 29 valve seat 35 Opening and closing drive unit frame 37 Opening and closing cylinder chamber 39 Opening and closing piston 41. Offset component for opening and closing 43 Opening and closing levers 49 Valve Body 57 Back-suction drive unit frame 59 Back-suction cylinder chamber 61 suction piston 63. Back suction bias component 65 back suction rod 67 through holes 69 diaphragm 83 switching valve 101 Timing Adjustment Valve 101a Timing Adjustment Mechanism Department 101b Check Valve Mechanism 103 Guide Body 105 First Port 107 Second Port 109 driver port 111 Guide cylinder chamber 113 pilot valve chamber 114 connection hole 115 first flow path 117 Second Flow Path 119 pilot valve seat 121 First Guide Frame 123 Second Guide Frame 125 insertion hole 127 Gap Passage 129 connecting road 131 Guide Piston 133 guide rod 135 pilot valve body 137 bolt components 137a Flow Hole 139 Guided bias component

Claims

1. A timing adjustment valve, comprising: The guide body is provided with a first port, a second port and a drive port, and the guide body forms an internal flow path that extends between the first port and the second port. The check valve mechanism allows fluid to flow from the first port to the second port within the internal flow path, and prevents fluid from flowing from the second port to the first port within the internal flow path. The timing adjustment mechanism opens and closes the internal flow path by supplying and discharging the drive fluid to the drive port; in, The timing adjustment mechanism is configured to be located alongside the check valve mechanism in the internal flow path, and is configured to allow fluid flow between the first port and the second port when the pressure of the drive fluid supplied and discharged to the timing adjustment mechanism through the drive port is below a predetermined value.

2. The timing adjustment valve as claimed in claim 1, wherein a guide cylinder chamber, a guide valve chamber, a connecting hole, a first flow path, and a second flow path are further formed within the guide body; the guide cylinder chamber communicates with the drive port; the guide valve chamber communicates with the second port; the connecting hole connects the guide cylinder chamber and the guide valve chamber; the first flow path extends from the guide valve chamber to the first port; the second flow path extends parallel to the first flow path and communicates with the first port and the second port; and a guide valve seat is provided at the periphery of the opening of the first flow path leading to the guide valve chamber. The check valve mechanism is disposed between the second port and the second flow path to prevent fluid flow from the second port to the second flow path and allow fluid flow from the second flow path to the second port. The timing adjustment mechanism includes a guide piston, a guide rod, a guide valve body, a bolt member, and a guide biasing member. The guide piston is disposed in the guide cylinder chamber. The guide rod extends from the guide piston and passes through the connection hole. The guide valve body is located at the front end of the guide rod and is disposed in the guide valve chamber opposite to the guide valve seat. The bolt member extends through a flow hole and is installed at the end of the first flow path connected to the first port. The guide biasing member biases the guide piston in a direction that moves the guide valve body away from the guide valve seat. Drive fluid is supplied to the pilot cylinder chamber through the drive port, thereby resisting the biasing force of the pilot biasing member and pressing the pilot valve body against the pilot valve seat to close the flow of fluid in the first flow path.

3. The timing adjustment valve as claimed in claim 2, wherein the guide biasing member is configured to be clamped between the guide valve body and the plug member.

4. The timing adjustment valve as claimed in claim 3, wherein the plug member is screwed to the end of the first flow path, and the position of the plug member in the first flow path is adjusted by rotating the plug member.

5. The timing adjustment valve as claimed in claim 2, wherein the guide body includes a first guide frame and a second guide frame, the first guide frame is provided with the drive port, the guide cylinder chamber, the connecting hole, the guide valve chamber and the first flow path, the second guide frame is provided with a through-hole extending therefrom, a second flow path extending parallel to the insertion hole, a first port and the second port, the first guide frame is inserted into the insertion hole of the second guide frame, such that the second flow path communicates with the gap passage formed between the inner peripheral surface of the insertion hole and the outer peripheral surface of the first guide frame, and the second port communicates with the guide valve chamber via a connecting path extending across the first guide frame and the second guide frame, the gap passage is connected to the connecting path, and the check valve mechanism is disposed in the gap passage.

6. The timing adjustment valve as claimed in claim 5, wherein the check valve mechanism is disposed between the inner peripheral surface of the insertion hole and the outer peripheral surface of the first guide frame, and the check valve mechanism is a lip seal having a flexible lip structure, the lip seal being configured to position the lip structure close to the communication path.

7. The timing adjustment valve as claimed in claim 6, wherein the lip seal is selected from one of a U-shaped seal, a V-shaped seal, and a Y-shaped seal.

8. A backflow valve, comprising: an on / off valve section, a backflow mechanism section, and a timing adjustment valve as described in any one of claims 1 to 7, wherein the on / off valve section opens and closes a fluid passage, and the backflow mechanism section is disposed downstream of the on / off valve section and performs backflow of fluid within the fluid passage after the fluid passage via the on / off valve section is closed. in, The opening / closing valve section and the back suction mechanism section are connected to a common switching valve. The switching valve supplies and discharges the driving fluid to the opening / closing valve section and the back suction mechanism section. When the driving fluid is supplied through the switching valve, the opening / closing valve section is open and the back suction mechanism section is in a standby state. When the driving fluid is discharged through the switching valve, the opening / closing valve section is closed and the back suction mechanism section performs a back suction action. The first port and the second port of the timing adjustment valve are respectively connected to the switching valve and the back suction mechanism section, and the driving port of the timing adjustment valve is connected to the pipeline between the switching valve and the opening / closing valve section.

9. The backflow valve as claimed in claim 8, further comprising a valve body having an internal flow path and a backflow chamber, the internal flow path including an inlet flow path and an outlet flow path for allowing fluid to flow, the backflow chamber communicating with the outlet flow path, wherein after the flow of fluid through the internal flow path of the opening and closing valve is closed, the volume of the backflow chamber is increased by the backflow mechanism, thereby drawing fluid back from the outlet flow path. The back suction mechanism includes a back suction drive unit frame, a back suction piston, and a back suction biasing member. The back suction drive unit frame forms a back suction cylinder chamber inside. The back suction piston is housed in the back suction cylinder chamber and can slide along the inner circumferential surface of the back suction cylinder chamber. The back suction biasing member is disposed in the back suction cylinder chamber and biases the back suction piston in a direction that increases the volume of the back suction chamber. By supplying drive fluid to the back suction cylinder chamber, the biasing force of the back suction biasing member is resisted, causing the back suction piston to move in a direction that decreases the volume of the back suction chamber.

10. The backflow valve as claimed in claim 9, wherein the backflow mechanism further includes a diaphragm at its outer peripheral portion, the diaphragm being sandwiched between the backflow drive unit frame and the valve body, thereby separating the backflow drive unit frame and the valve body, the diaphragm extending from the backflow piston and connected to the front end of a backflow rod, the backflow rod being inserted into a through hole provided at the bottom of the backflow cylinder chamber, the volume of the backflow chamber increasing or decreasing by the deformation of the diaphragm as the backflow piston moves.

11. The backflow valve as claimed in claim 9, wherein the valve body has a valve chamber, the valve chamber being in communication with the inlet flow path and connected to the backflow chamber via a connecting passage, and a valve seat, located near or away from the valve body, is formed at the periphery of the opening from the inlet flow path to the valve chamber. The opening and closing valve includes: an opening and closing drive unit frame, an opening and closing piston, an opening and closing rod, and an opening and closing biasing member. The opening and closing drive unit frame forms an opening and closing cylinder chamber inside. The opening and closing piston is housed in the opening and closing cylinder chamber and can slide along the inner circumferential surface of the opening and closing cylinder chamber. The opening and closing rod extends from the opening and closing piston, passes through the bottom of the opening and closing cylinder chamber, and protrudes into the valve chamber. The opening and closing biasing member biases the opening and closing piston in a direction that brings the valve body, which is connected to the front end of the opening and closing rod, closer to the valve seat. By supplying drive fluid to the opening and closing cylinder chamber, the biasing force of the opening and closing biasing member is resisted, causing the opening and closing piston to move away from the valve body from the valve seat.

12. The backflow valve as claimed in claim 10, wherein the valve body has a valve chamber, the valve chamber being in communication with the inlet flow path and connected to the backflow chamber via a connecting passage, and a valve seat, located near or away from the valve body, is formed at the periphery of the opening from the inlet flow path to the valve chamber. The opening and closing valve includes: an opening and closing drive unit frame, an opening and closing piston, an opening and closing rod, and an opening and closing biasing member. The opening and closing drive unit frame forms an opening and closing cylinder chamber inside. The opening and closing piston is housed in the opening and closing cylinder chamber and can slide along the inner circumferential surface of the opening and closing cylinder chamber. The opening and closing rod extends from the opening and closing piston, passes through the bottom of the opening and closing cylinder chamber, and protrudes into the valve chamber. The opening and closing biasing member biases the opening and closing piston in a direction that brings the valve body, which is connected to the front end of the opening and closing rod, closer to the valve seat. By supplying drive fluid to the opening and closing cylinder chamber, the biasing force of the opening and closing biasing member is resisted, causing the opening and closing piston to move away from the valve body from the valve seat.

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