A method for argon arc welding of thin-walled cooling disc body

Abstract

The application provides an argon arc welding method for a thin-wall cooling disc body, which comprises the following steps: (1) after cleaning the main body and a water channel cover plate of the thin-wall cooling disc body, assembling is performed to obtain a semi-finished thin-wall cooling disc body; the water channel cover plate is in a boss shape, the total thickness is 2.5-3 mm, and the boss thickness is 0.5-1 mm; (2) after argon arc welding is performed on the semi-finished thin-wall cooling disc body in step (1), shaping and machining are sequentially performed to obtain a finished thin-wall cooling disc body. The argon arc welding method is simple to operate, reduces the machining allowance after welding, guarantees that the flatness of the finished thin-wall cooling disc body meets the requirements, has excellent cooling effect, and is suitable for large-scale popularization and application.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an argon arc welding method for thin-walled cooling pads. Background Technology

[0002] In semiconductor MOCVD equipment, stainless steel cover plates are welded to the stainless steel body, requiring excellent sealing with a leakage rate of 1.0 × 10⁻⁶. -12 Pa.m 3 / s, water pressure 0.6MPa, product flatness requirement ≤0.05mm. The existing method is to use ordinary argon arc welding for welding. Before welding, the stainless steel cover plate leaves a margin of more than 2mm. On the one hand, argon arc welding filler wire causes large deformation of the product. On the other hand, the more than 2mm margin that needs to be removed after welding generates very large stress. Conventional argon arc welding method cannot achieve a product flatness of ≤0.05mm.

[0003] CN108807311A discloses a cooling plate and a method for processing the cooling plate. The cooling plate includes a cover plate and a base plate. The base plate has a first groove, and the cover plate is embedded in the first groove. A channel for cooling water to pass through is provided between the cover plate and the base plate. The first groove in the cooling plate can limit the position of the cover plate, ensuring precise alignment between the cover plate and the base plate and preventing misalignment of the channel.

[0004] CN113310331A discloses a cooling plate with an internal annular channel and its manufacturing method. The cooling plate includes a main plate and a cover plate. The main plate has uniformly distributed annular grooves. The cover plate is used in conjunction with the main plate, covering one side of the annular grooves on the main plate. The annular grooves constitute the internal annular channel of the cooling plate. The cooling plate is generally volute-shaped, including a volute body and a volute inlet. The inlet and outlet of the annular channel are both located at the volute inlet, communicating with the outside. Through the structural design of the internal annular channel of the cooling plate, the contact surface with the product to be cooled is flat, the contact area is large, and the cooling medium can be evenly distributed and circulated rapidly, achieving rapid cooling of the product. The cooling plate has a reasonable structural design, simple manufacturing process, good sealing performance, and high product qualification rate. It can greatly reduce rework operations, lower production costs, and is more conducive to applications in high-precision product cooling.

[0005] CN114046627A discloses a water-cooling device with a double-layer spiral water channel and its manufacturing method. The water-cooling device includes a main body and a cover plate. The main body has a double-layer spiral water channel inside, and the area of ​​the double-layer spiral water channel accounts for 30% to 45% of the area of ​​the water-cooling device. The manufacturing method includes grinding the surface of the double-layer spiral water channel inside the main body to obtain a semi-finished main body; welding the semi-finished main body to the cover plate to obtain a semi-finished water-cooling device; and subjecting the semi-finished water-cooling device to rough milling and fine milling to obtain the water-cooling device with the double-layer spiral water channel. The water-cooling device with the double-layer spiral water channel has a reasonable internal water channel structure design, high welding stability, and good cooling effect, making it suitable for large-scale application.

[0006] However, the water channel cover of the aforementioned cooling plate is relatively thick and has low requirements for its flatness. Therefore, the above preparation method is not suitable for welding thin-walled cooling plates with a relatively thin total thickness of water channel cover. Summary of the Invention

[0007] In view of the problems existing in the prior art, the present invention provides an argon arc welding method for thin-walled cooling discs, which assembles the main body of the thin-walled cooling disc with a boss-shaped water channel cover plate and performs argon arc welding under specific conditions. The welding process results in small machining allowance, small flatness of the finished thin-walled cooling disc, excellent cooling effect, and wide range of applications.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This invention provides an argon arc welding method for thin-walled cooling discs, the argon arc welding method comprising the following steps:

[0010] (1) After cleaning the main body and water channel cover of the thin-walled cooling plate, assemble them to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.5-3mm and a boss thickness of 0.5-1mm.

[0011] (2) After the semi-finished thin-walled cooling plate body described in step (1) is argon arc welded, it is then shaped and machined in sequence to obtain the finished thin-walled cooling plate body.

[0012] In the argon arc welding method for the thin-walled cooling plate described in this invention, the water channel cover is in the shape of a boss with a total thickness of 2.5-3mm. After argon arc welding under specific conditions, the amount of welding allowance to be removed is small, and the stress generated will be greatly reduced, thereby achieving a flatness of ≤0.05mm for the finished thin-walled cooling plate and significantly improving the cooling effect of the cooling plate.

[0013] The total thickness of the waterway cover plate described in this invention is 2.5 to 3 mm, for example, it can be 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 2.95 mm or 3 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0014] Preferably, the area of ​​the boss of the waterway cover plate in step (1) accounts for 20% to 30% of the total area of ​​the waterway cover plate. For example, it can be 20%, 22%, 24%, 25%, 27%, 28%, 29%, 29.5% or 30%, etc., but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0015] In this invention, the area of ​​the boss of the water channel cover is preferably 20% to 30% of the total area of ​​the water channel cover. This does not affect the argon arc welding of the semi-finished thin-walled cooling plate, and can significantly reduce the machining allowance after the argon arc welding of the semi-finished thin-walled cooling plate, thereby improving the flatness of the finished thin-walled cooling plate.

[0016] Preferably, the single-sided gap between the main body and the waterway cover in step (1) is <0.3mm, for example, it can be 0.29mm, 0.25mm, 0.22mm, 0.2mm, 0.18mm, 0.15mm, 0.13mm or 0.1mm, etc., but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0017] Preferably, the cleaning solution used in step (1) includes a hydrofluoric acid solution with a mass concentration of 10-15%, such as 10%, 11%, 12%, 13%, 13.5%, 14%, 14.5% or 15%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0018] Preferably, the cleaning time in step (1) is 15 to 30 seconds, for example, it can be 15 seconds, 16 seconds, 17 seconds, 18 seconds, 20 seconds, 25 seconds or 30 seconds, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0019] Preferably, the argon arc welding in step (2) includes self-fusion welding.

[0020] Preferably, the welding current of the argon arc welding in step (2) is 70 to 100 mA, for example, it can be 70 mA, 72 mA, 75 mA, 77 mA, 80 mA, 90 mA or 100 mA, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0021] The preferred welding current for argon arc welding in this invention is 70-100mA. When the welding current of argon arc welding is low, the welding effect is poor, and in severe cases, it will lead to the scrapping of the finished thin-walled cooling plate. When the welding current of argon arc welding is high, the flatness of the finished thin-walled cooling plate is large, and the cooling effect is poor.

[0022] Preferably, the welding speed of the argon arc welding in step (2) is 2.1 to 2.6 mm / s, for example, it can be 2.1 mm / s, 2.2 mm / s, 2.3 mm / s, 2.4 mm / s, 2.45 mm / s, 2.5 mm / s or 2.6 mm / s, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0023] Preferably, the shielding gas for argon arc welding in step (2) includes hydrogen with a volume fraction of 2% to 8%, such as 2%, 3%, 4%, 4.5%, 5%, 5.5%, 6%, 7%, or 8%, but is not limited to the listed values; other unlisted values ​​within this range are also applicable. The shielding gas includes argon with a volume fraction of 92% to 98%, such as 92%, 93%, 94%, 94.5%, 95%, 95.5%, 96%, 97%, or 98%, but is not limited to the listed values; other unlisted values ​​within this range are also applicable.

[0024] The preferred shielding gas for argon arc welding in this invention comprises hydrogen with a volume fraction of 2% to 8% and argon with a volume fraction of 92% to 98%. When the volume fraction of hydrogen is low, the welding effect will be poor, and the flatness of the resulting thin-walled cooling plate will be high. When the volume fraction of hydrogen is high, an explosion may occur, which will seriously affect the safety of the welding operation.

[0025] Preferably, the machining in step (2) includes milling.

[0026] Preferably, the total thickness of the water channel cover plate in the finished thin-walled cooling plate body in step (2) is 1 to 1.5 mm, for example, it can be 1 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.35 mm, 1.4 mm, 1.45 mm or 1.5 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0027] As a preferred technical solution of the present invention, the argon arc welding method includes the following steps:

[0028] (1) The main body and water channel cover of the thin-walled cooling plate are cleaned with a hydrofluoric acid solution with a mass concentration of 10-15% for 15-30 seconds, and then assembled to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.5-3mm and a boss thickness of 0.5-1mm; the area of ​​the boss of the water channel cover accounts for 20%-30% of the total area of ​​the water channel cover; the single-sided gap between the main body and the water channel cover is <0.3mm;

[0029] (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 70-100mA and a welding speed of 2.1-2.6mm / s, it is then shaped and milled to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1-1.5mm.

[0030] The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes hydrogen with a volume fraction of 2% to 8% and argon with a volume fraction of 92% to 98%.

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] The present invention provides an argon arc welding method for thin-walled cooling plates. The method is simple to operate. It uses a boss-shaped water channel cover plate to assemble with the main body of the thin-walled cooling plate, and then performs argon arc welding under specific parameter conditions. This reduces the machining allowance after welding, ensures that the flatness of the finished thin-walled cooling plate meets the requirements, and has excellent cooling effect. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the structure of the thin-walled cooling plate provided by the present invention.

[0034] In the diagram: 1-Waterway cover; 2-Main body; 3-Waterway. Detailed Implementation

[0035] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0036] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims.

[0037] The structural schematic diagram of the thin-walled cooling plate in the following embodiments of the present invention is shown below. Figure 1 As shown, the water channel cover 1 is installed on the main body 2, forming a water channel 3 in the middle for cooling water to pass through.

[0038] Example 1

[0039] This embodiment provides an argon arc welding method for a thin-walled cooling plate, the argon arc welding method comprising the following steps:

[0040] (1) After cleaning the main body and water channel cover of the thin-walled cooling plate with a 13% hydrofluoric acid solution for 20 seconds, the plates are assembled to obtain a semi-finished thin-walled cooling plate. The water channel cover is in the shape of a boss, with a total thickness of 2.5 mm and a boss thickness of 0.5 mm. The area of ​​the boss of the water channel cover accounts for 23% of the total area of ​​the water channel cover. The single-sided gap between the main body and the water channel cover is <0.3 mm.

[0041] (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 74mA and a welding speed of 2.3mm / s, it is then shaped and milled to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1.5mm.

[0042] The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes 5% hydrogen and 95% argon by volume.

[0043] Example 2

[0044] This embodiment provides an argon arc welding method for a thin-walled cooling plate, the argon arc welding method comprising the following steps:

[0045] (1) The main body and water channel cover of the thin-walled cooling plate are cleaned with a 10% hydrofluoric acid solution for 15 seconds and then assembled to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 3 mm and a boss thickness of 0.7 mm; the area of ​​the boss of the water channel cover accounts for 30% of the total area of ​​the water channel cover; the single-sided gap between the main body and the water channel cover is <0.3 mm;

[0046] (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 100mA and a welding speed of 2.6mm / s, it is then shaped and milled in sequence to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1mm.

[0047] The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes 2% hydrogen and 98% argon by volume.

[0048] Example 3

[0049] This embodiment provides an argon arc welding method for a thin-walled cooling plate, the argon arc welding method comprising the following steps:

[0050] (1) The main body and water channel cover of the thin-walled cooling plate are cleaned with a hydrofluoric acid solution with a mass concentration of 11.5% for 18 seconds, and then assembled to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.7 mm and a boss thickness of 1 mm; the area of ​​the boss of the water channel cover accounts for 25% of the total area of ​​the water channel cover; the single-sided gap between the main body and the water channel cover is <0.3 mm;

[0051] (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 80mA and a welding speed of 2.2mm / s, it is then shaped and milled to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1.3mm.

[0052] The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes 7% hydrogen and 93% argon by volume.

[0053] Example 4

[0054] This embodiment provides an argon arc welding method for a thin-walled cooling plate, the argon arc welding method comprising the following steps:

[0055] (1) The main body and water channel cover of the thin-walled cooling plate are cleaned with a 15% hydrofluoric acid solution for 30 seconds and then assembled to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.8 mm and a boss thickness of 0.8 mm; the area of ​​the boss of the water channel cover accounts for 20% of the total area of ​​the water channel cover; the single-sided gap between the main body and the water channel cover is <0.3 mm;

[0056] (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 70mA and a welding speed of 2.1mm / s, it is then shaped and milled in sequence to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1.1mm.

[0057] The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes 8% hydrogen and 92% argon by volume.

[0058] Example 5

[0059] This embodiment provides an argon arc welding method for a thin-walled cooling plate. Except for the argon arc welding current of 60mA in step (2), the argon arc welding method is the same as that in embodiment 1.

[0060] Example 6

[0061] This embodiment provides an argon arc welding method for a thin-walled cooling plate. Except for the welding current of 110mA in step (2), the argon arc welding method is the same as that in embodiment 1.

[0062] Example 7

[0063] This embodiment provides an argon arc welding method for a thin-walled cooling plate. Except for the shielding gas in step (2), which includes 1% hydrogen and 99% argon, the argon arc welding method is the same as in embodiment 1.

[0064] Example 8

[0065] This embodiment provides an argon arc welding method for a thin-walled cooling plate. Except for the shielding gas in step (2), which includes 10% hydrogen and 90% argon, the argon arc welding method is the same as in embodiment 1.

[0066] Comparative Example 1

[0067] This comparative example provides an argon arc welding method for a thin-walled cooling plate. Except for the water channel cover plate in step (1) being planar with a total thickness of 2.5 mm, the argon arc welding method is the same as that in Example 1.

[0068] The flatness of the finished thin-walled cooling discs obtained from the above embodiments and comparative examples was measured, and the results are shown in Table 1.

[0069] Table 1

[0070] Example 1 0.04mm Example 2 0.05mm Example 3 0.05mm Example 4 0.05mm Example 5 / Example 6 0.12mm Example 7 0.08mm Example 8 / Comparative Example 1 0.15mm

[0071] In Table 1, " / " indicates that there is no data.

[0072] As can be seen from Table 1:

[0073] (1) As can be seen from the comprehensive examples 1 to 4, the argon arc welding method for the thin-walled cooling plate provided by the present invention is simple to operate, and the flatness of the final thin-walled cooling plate is ≤0.05mm, with good cooling effect;

[0074] (2) It can be seen from the combined examples 1 and 5-6 that the welding current of the argon arc welding described in example 5 is 60mA, the welding effect is poor, and in severe cases it will lead to the scrapping of the finished thin-walled cooling plate; the welding current of the argon arc welding described in example 6 is 110mA, the flatness of the finished thin-walled cooling plate is large, and the cooling effect is poor.

[0075] (3) It can be seen from the combined examples 1 and 7-8 that in example 7, the low volume fraction of hydrogen in the shielding gas of argon arc welding leads to a poor welding effect and a high flatness of the finished thin-walled cooling plate; in example 8, the high volume fraction of hydrogen in the shielding gas of argon arc welding can cause an explosion, which seriously affects the safety of welding construction.

[0076] (4) It can be seen from the comprehensive comparison of Example 1 and Comparative Example 1 that the water channel cover plate described in Comparative Example 1 is planar with a total thickness of 2.5 mm. The amount to be removed after argon arc welding is more than 2 mm, and the stress generated is very large, making it impossible to achieve a finished thin-walled cooling plate of ≤0.05 mm.

[0077] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. An argon arc welding method for a thin-walled cooling plate, characterized in that, The argon arc welding method includes the following steps: (1) After cleaning the main body and water channel cover of the thin-walled cooling plate, assemble them to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.5~3mm and a boss thickness of 0.5~1mm; the area of ​​the boss of the water channel cover accounts for 20%~30% of the total area of ​​the water channel cover; (2) After the semi-finished thin-walled cooling plate body described in step (1) is argon arc welded, it is shaped and machined in sequence to obtain the finished thin-walled cooling plate body; The welding current for the argon arc welding is 70~100mA; the total thickness of the water channel cover plate in the finished thin-walled cooling plate is 1~1.5mm.

2. The argon arc welding method according to claim 1, characterized in that, The single-sided gap between the main body and the waterway cover plate in step (1) is <0.3mm.

3. The argon arc welding method according to claim 1, characterized in that, The cleaning solution used in step (1) includes a hydrofluoric acid solution with a mass concentration of 10-15%.

4. The argon arc welding method according to claim 1, characterized in that, The cleaning time in step (1) is 15~30s.

5. The argon arc welding method according to claim 1, characterized in that, The argon arc welding in step (2) includes self-fusion welding.

6. The argon arc welding method according to claim 1, characterized in that, The welding speed of the argon arc welding in step (2) is 2.1~2.6 mm / s.

7. The argon arc welding method according to claim 1, characterized in that, The shielding gas for argon arc welding in step (2) includes hydrogen with a volume fraction of 2% to 8% and argon with a volume fraction of 92% to 98%.

8. The argon arc welding method according to claim 1, characterized in that, The machining process described in step (2) includes milling.

9. The argon arc welding method according to claim 1, characterized in that, The argon arc welding method includes the following steps: (1) The main body and water channel cover of the thin-walled cooling plate are cleaned with a hydrofluoric acid solution with a mass concentration of 10~15% for 15~30s, and then assembled to obtain a semi-finished thin-walled cooling plate; the water channel cover is in the shape of a boss, with a total thickness of 2.5~3mm; the area of ​​the boss of the water channel cover accounts for 20%~30% of the total area of ​​the water channel cover; the single-sided gap between the main body and the water channel cover is <0.3mm; (2) After the semi-finished thin-walled cooling plate body described in step (1) is welded by argon arc welding with a welding current of 70~100mA and a welding speed of 2.1~2.6mm / s, it is then shaped and milled to obtain the finished thin-walled cooling plate body; the total thickness of the water channel cover plate in the finished thin-walled cooling plate body is 1~1.5mm. The argon arc welding includes self-fusion welding; the shielding gas for the argon arc welding includes hydrogen with a volume fraction of 2% to 8% and argon with a volume fraction of 92% to 98%.

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