A steam turbine exhaust steam humidity on-line measuring device based on microwave resonance technology

Abstract

This application relates to the field of wet steam measurement technology, and provides an online measurement device for turbine exhaust steam humidity based on microwave resonance technology. The device is installed inside an exhaust cylinder, which has a groove containing a lifting component. The device includes an outer cavity, a microwave resonant cavity, a linear telescopic component, a movable cone, and a conical shell. The outer cavity is mounted on the lifting component and has openings at both ends. The conical shell is located at one end of the outer cavity and has an inlet. The movable cone is mounted on the linear telescopic component. Both the linear telescopic component and the microwave resonant cavity are located within the outer cavity. The linear telescopic component drives the movable cone to open or close the inlet. The outer cavity, conical shell, movable cone, and linear telescopic component effectively solve the problem of water droplets splashing onto the microwave resonant cavity when measuring dry steam in the groove.

Description

Technical Field

[0001] This application belongs to the field of wet steam measurement technology, and more specifically, relates to an online measurement device for turbine exhaust steam humidity based on microwave resonance technology. Background Technology

[0002] In the last few stages of thermal power turbines and all stages of nuclear power turbines, the two-phase condensation flow of wet steam significantly affects unit efficiency and blade safety. Accurate measurement of steam humidity is crucial for improving operational efficiency and safety. The microwave resonant cavity testing device, based on the equivalent complex permittivity relationship of wet steam two-phase flow, and taking advantage of the difference in permittivity between dry steam and wet steam at the same humidity, can effectively measure the relative humidity of steam within the turbine exhaust cylinder.

[0003] However, with the significant integration of renewable energy in recent years, power plant boilers often play a crucial role in deep peak shaving, causing turbine flow rates to fluctuate rapidly between 30% and 100%. This results in turbulent flow fields within the exhaust cylinder. Under low-load conditions, the wet steam flow is mainly distributed at the blade tips, allowing water droplets to enter the resonant cavity and affect the determination of the reference resonant frequency. Existing microwave resonant cavity structures, such as those disclosed in patents CN201138333Y and CN102253059A, do not meet the requirements for resisting droplet interference. Therefore, a flow disturbance device is urgently needed to prevent the influence of splashed water droplets when measuring dry steam in the resonant cavity. Summary of the Invention

[0004] To address the shortcomings of the prior art, the purpose of this application is to provide an online turbine exhaust humidity measurement device based on microwave resonance technology, which can effectively prevent exhaust droplets from entering the resonant cavity, thereby improving the durability of the device and the accuracy of the measurement.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows: A turbine exhaust steam humidity online measurement device based on microwave resonance technology is provided, which is installed inside the exhaust cylinder. This turbine exhaust steam humidity online measurement device based on microwave resonance technology includes: an outer cavity, a microwave resonant cavity, a linear telescopic component, a movable cone, and a cone shell. The exhaust cylinder has a groove, and a lifting component is installed within the groove. The outer cavity is mounted on the lifting component, and both ends of the outer cavity have openings. The cone shell is located at one end of the outer cavity and has an inlet. The movable cone is mounted on the linear telescopic component. Both the linear telescopic component and the microwave resonant cavity are located within the outer cavity. The linear telescopic component drives the movable cone to open or close the inlet.

[0006] In one embodiment, the outer cavity is a circular or square tube structure.

[0007] In one embodiment, the linear telescopic member is a multi-stage telescopic rod.

[0008] In one embodiment, the linear telescopic component includes a primary telescopic rod, a secondary telescopic rod, a tertiary telescopic rod, a base frame, a motor, and a lead screw. The primary, secondary, and tertiary telescopic rods are slidably sleeved together and connected by a transmission belt assembly. The motor and the lead screw are connected and disposed at the bottom of the base frame. The lead screw is threadedly connected to the base frame of the tertiary telescopic rod. The motor drives the lead screw to rotate forward or reverse, thereby raising and lowering the tertiary telescopic rod and synchronously raising and lowering the secondary and primary telescopic rods via the transmission belt assembly. The movable cone is disposed on the primary telescopic rod.

[0009] In one embodiment, the transmission belt assembly includes: a first belt group and a second belt group, wherein two first belt groups are symmetrically arranged on the third-stage telescopic rod, and two second belt groups are symmetrically arranged on the second-stage telescopic rod. A first clamping block is provided on the side wall of the bottom frame, a second clamping block is provided on the inner side wall of the third-stage telescopic rod, a third clamping block is provided on the outer side wall of the second-stage telescopic rod, and a fourth clamping block is provided on the outer side wall of the first-stage telescopic rod. The first belt group includes a first pulley and a second pulley spaced apart, and a first annular transmission belt sleeved on the first pulley and the second pulley. The second belt assembly includes a third pulley and a fourth pulley spaced apart, and a second annular transmission belt sleeved on the third pulley and the fourth pulley. The sidewall of the three-stage telescopic rod is located inside the first annular transmission belt, and the sidewall of the two-stage telescopic rod is located inside the second annular transmission belt. The first clamping block clamps the first annular transmission belt on the outer side of the three-stage telescopic rod, and the third clamping block clamps the first annular transmission belt on the inner side of the three-stage telescopic rod. The second clamping block clamps the second annular transmission belt on the outer side of the two-stage telescopic rod, and the fourth clamping block clamps the second annular transmission belt on the inner side of the two-stage telescopic rod.

[0010] In one embodiment, the outer wall of the bottom frame is configured as a flow-around surface.

[0011] In one embodiment, the diameter of the movable cone gradually increases toward the linear telescopic member.

[0012] In one embodiment, the outer cavity is integrally formed with the conical shell.

[0013] In one embodiment, the lifting component includes: an inner cylinder, an outer cylinder, a sealing ring, and a tensioner. The inner cylinder is disposed inside the outer cylinder and sealed by the sealing ring. The tensioner is disposed at one end of the outer cylinder and locks or unlocks the inner cylinder. The other end of the outer cylinder is connected to an outer cavity. One end of the inner cylinder is connected to a microwave resonant cavity, and the other end is for insertion of a microwave probe.

[0014] The beneficial effects of the online turbine exhaust humidity measurement device based on microwave resonance technology provided in this application are as follows: By setting an outer cavity and a conical shell outside the microwave resonant cavity to form a large flow-blocking cavity, wet steam is allowed to flow around the tail of the outer cavity, separating a dry steam section for measurement to reduce the damage to the resonant cavity caused by water droplets splashing. After the movable cone head is retracted under the control of the linear telescopic component, the flow measurement of wet steam is realized through the inlet, effectively solving the problem of the influence of water droplets splashing on the microwave resonant cavity when measuring dry steam in the groove. In addition, the pressure is evenly distributed across the entire surface of the conical shell through the conical shell, improving the long-term operating capability of the equipment. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram illustrating the state of dry steam measurement using the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application embodiment;

[0017] Figure 2 A schematic diagram illustrating the state of wet steam measurement in the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application embodiment;

[0018] Figure 3 A schematic diagram of the structure of the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application, installed in a groove;

[0019] Figure 4 A three-dimensional structural diagram of the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application embodiment, omitting the outer cavity;

[0020] Figure 5 A schematic diagram of the state of the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application when measuring dry steam;

[0021] Figure 6 A schematic diagram of the state of the online steam exhaust humidity measurement device based on microwave resonance technology provided in this application embodiment when measuring wet steam;

[0022] Figure 7 A schematic diagram of the linear telescopic component in the online measurement device for turbine exhaust humidity based on microwave resonance technology provided in the embodiments of this application.

[0023] The following are the labeling elements in the figure:

[0024] 1. Exhaust cylinder body; 11. Groove; 2. Lifting component; 21. Inner cylinder; 22. Outer cylinder; 23. Sealing ring; 24. Tensioner; 3. Outer cavity; 4. Microwave resonant cavity; 5. Linear telescopic component; 51. First-stage telescopic rod; 511. Fourth clamping block; 52. Second-stage telescopic rod; 521. Third clamping block; 53. Third-stage telescopic rod; 531. Base frame; 532. Second clamping block; 54. Base frame; 541. First 542. Clamping block; 55. Flow-around curved surface; 56. Motor; 57. Lead screw; 58. Transmission belt assembly; 59. First belt group; 50.11. First pulley; 51.2. Second pulley; 51.3. First annular transmission belt; 57.2. Second belt group; 57.21. Third pulley; 57.22. Fourth pulley; 57.23. Second annular transmission belt; 6. Movable cone; 61. Sealing plate; 7. Conical shell; 72. Inlet. Detailed Implementation

[0025] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0026] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0027] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0029] like Figures 1-7 As shown, an online turbine exhaust humidity measurement device based on microwave resonance technology provided in this application embodiment will now be described. This online turbine exhaust humidity measurement device based on microwave resonance technology is installed inside an exhaust cylinder 1. The exhaust cylinder 1 has a groove 11, and a lifting component 2 is installed within the groove 11. The online turbine exhaust humidity measurement device based on microwave resonance technology is mounted on the lifting component 2 and can retract into the groove 11 under the drive of the lifting component 2 to measure dry steam (e.g., ...). Figure 1 As shown), it can also extend from the groove 11 for wet steam measurement (e.g. Figure 2 As shown, the exhaust cylinder 1, lifting component 2, microwave resonant cavity 4, and microwave probe all adopt existing structures.

[0030] Specifically, wet steam as Figure 1 The direction shown indicates entry into the exhaust cylinder 1. The groove 11 is an artificially created opening primarily for placing measuring devices. At the upper interface of the groove 11, water droplets in the wet steam will form a liquid film and, due to inertia, continue to move forward, generally not entering the groove 11 space. Therefore, a dry steam region at the same temperature and pressure is formed. Thus, dry steam measurement can be performed in the groove (e.g., ...). Figure 1 As shown), the measurement of wet steam requires the microwave resonant cavity to be inserted into the wet steam fluid space inside the exhaust cylinder 1 under the drive of the lifting component (e.g., Figure 2 As shown in the figure, the relative humidity can be calculated by comparing the difference in dielectric constant between dry steam and wet steam.

[0031] Specifically, such as Figures 3-7As shown, in this embodiment, the online turbine exhaust humidity measurement device based on microwave resonance technology includes: an outer cavity 3, a microwave resonant cavity 4, a linear telescopic component 5, a movable cone 6, and a conical shell 7. The outer cavity 3 is mounted on the lifting component 2, and both ends of the outer cavity 3 have openings. The conical shell 7 is located at one end of the outer cavity 3 and has an inlet 71. The movable cone 6 is mounted on the linear telescopic component 5. Both the linear telescopic component 5 and the microwave resonant cavity 4 are located within the outer cavity 3. The linear telescopic component 5 drives the movable cone 6 to open or close the inlet 71. When the inlet 71 is closed by the movable cone 6, the conical shell 7 can cover and block the entrance of the microwave resonant cavity 4, effectively preventing exhaust droplets from entering the interior of the microwave resonant cavity 4, thus improving the durability of the equipment; simultaneously, as... Figure 5 As shown, the conical shell 7 diverts the moist steam. Some droplets in the moist steam impact the wall surface, forming a liquid film. This liquid film moves forward under the inertial force of its velocity. As the droplets gradually detach at their ends, they flow downwards to the lower left of the diagram under the influence of gravity and inertia. The dry steam rapidly turns towards the interior of the outer cavity 3, forming a dry steam region. The microwave resonant cavity 4 emits microwaves into this dry steam region, allowing the resonant frequency of the dry steam to be measured. When the inlet 71 is open, as... Figure 6 As shown, the wet steam flows in the outer cavity 3. At this time, the microwave resonant cavity 4 can just form a flow channel. When measuring the wet steam, the entire device is extended from the groove 11 into the exhaust cylinder. The wet steam enters the cavity through the inlet 71. The microwave resonant cavity 4 emits microwaves to the wet fluid, and the dielectric constant of the wet steam can be measured.

[0032] In this embodiment, the outer cavity 3 is a circular tube or a square tube structure, preferably a circular tube structure. The outer cavity 3 and the conical shell 7 are integrally formed, and the conical shell 7 is a conical structure.

[0033] In this embodiment, the linear telescopic component 5 is a multi-stage telescopic rod, which reduces its size. Specifically, the linear telescopic component 5 includes a primary telescopic rod 51, a secondary telescopic rod 52, a tertiary telescopic rod 53, a base frame 54, a motor 55, and a lead screw 56. In this embodiment, the primary telescopic rod 51, the secondary telescopic rod 52, the tertiary telescopic rod, and the base frame 54 are all rectangular frame structures. The primary telescopic rod 51, the secondary telescopic rod 52, and the tertiary telescopic rod 53 are slidably sleeved and connected by a transmission belt assembly 57. The motor 55 is connected to the lead screw 56 and is located at the inner bottom of the base frame 54. The lead screw 56 is threadedly connected to the base frame 531 of the tertiary telescopic rod 53. Specifically, a set of lead screws 56 is fixed on the base frame 531, and the set of lead screws 56 is threadedly connected to the lead screw 56. The motor 55 drives the lead screw 56 to rotate forward or reverse, thereby raising and lowering the third-stage telescopic rod 53. The second-stage telescopic rod 52 and the first-stage telescopic rod 51 are raised and lowered synchronously through the transmission belt assembly 57. The movable cone 6 is set on the first-stage telescopic rod 51, thereby realizing the extension or retraction of the movable cone 6.

[0034] In this embodiment, the transmission belt assembly 57 includes: a first belt group 571 and a second belt group 572. Two first belt groups 571 are provided and symmetrically arranged on the third-stage telescopic rod 53. Two second belt groups 572 are provided and symmetrically arranged on the second-stage telescopic rod 52. A first clamping block 541 is provided on the inner side wall of the bottom frame 54, a second clamping block 532 is provided on the inner side wall of the third-stage telescopic rod 53, a third clamping block 521 is provided on the outer side wall of the second-stage telescopic rod 52, and a fourth clamping block 511 is provided on the outer side wall of the first-stage telescopic rod 51. The first belt group 571 includes a first pulley 5711 and a second pulley 5712 spaced apart, and a first annular transmission belt 5713 sleeved on the first pulley 5711 and the second pulley 5712. The second belt group 572 includes a third pulley 5721 and a fourth pulley 5722 spaced apart, and a second annular transmission belt 5723 sleeved on the third pulley 5721 and the fourth pulley 5722. The sidewall of the third-stage telescopic rod 53 is located within the first annular transmission belt 5713, and the sidewall of the second-stage telescopic rod 52 is located within the second annular transmission belt 5723. The first clamping block 541 clamps the first annular transmission belt 5713 on the outer side of the third-stage telescopic rod 53, and the third clamping block 521 clamps the first annular transmission belt 5713 on the inner side of the third-stage telescopic rod 53. The second clamping block 532 clamps the second annular transmission belt 5723 on the outer side of the second-stage telescopic rod 52, and the fourth clamping block 511 clamps the second annular transmission belt 5723 on the inner side of the second-stage telescopic rod 52. When the motor 55 drives the lead screw 56 to rotate forward, it causes the third-stage telescopic rod 53 to rise, pulling the second-stage telescopic rod 52 upward via the first annular transmission belt 5713. As the second-stage telescopic rod 52 rises, it pulls the first-stage telescopic rod 51 upward via the second annular transmission belt 5723, thus extending the movable cone 6.

[0035] In this embodiment, the outer wall of the bottom frame 54 is provided as a flow-around curved surface 542, which has a flow-guiding function and can reduce the impact caused by the wet steam flow.

[0036] In this embodiment, the diameter of the movable cone 6 gradually increases towards the linear telescopic member 5. This is designed to ensure the sealing performance of the movable cone 6 on the inlet 71.

[0037] In this embodiment, the lifting component 2 includes at least an inner cylinder 21, an outer cylinder 22, a sealing ring 23, and a tensioner 24. The inner cylinder 21 is disposed inside the outer cylinder 22 and sealed by the sealing ring 23. The tensioner 24 is disposed at one end of the outer cylinder 22 and locks or unlocks with the inner cylinder 21, thereby achieving a fixed connection between the outer cylinder 22 and the inner cylinder 21. The other end of the outer cylinder 22 is connected to the outer cavity 3. One end of the inner cylinder 21 is connected to the microwave resonant cavity 4, and the other end is used for the insertion of a microwave probe. The outer cylinder 22 can be raised and lowered under the drive of a cylinder or a hydraulic cylinder, thereby causing the outer cavity 3 to extend out of the groove 11 or retract into the groove 11.

[0038] In this embodiment, by placing the microwave resonant cavity 4 inside the outer cavity 3, when measuring dry steam in the groove 11, a dry steam area can be separated in the wet steam flow field for dry steam measurement, and water droplets can be prevented from splashing, thus protecting the microwave resonant cavity 4. When measuring humid gas in the exhaust cylinder, the movable cone can be retracted to realize the flow of humid gas. The outer wall of the bottom frame 54 is provided with a flow-around curved surface 542, which can reduce the impact force of the humid steam flow and ensure the stability of the linear telescopic component 5. Moreover, the extension and retraction of the movable cone 6 can evenly distribute the pressure of the humid steam flow and reduce the damage to the device caused by water droplets splashing, and can also realize the flow of humid steam.

[0039] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An online measurement device for turbine exhaust steam humidity based on microwave resonance technology, installed inside the exhaust cylinder (1), characterized in that, include: The structure comprises an outer cavity (3), a microwave resonant cavity (4), a linear telescopic component (5), a movable cone (6), and a conical shell (7). The exhaust cylinder (1) has a groove (11) inside, and a lifting component (2) is located within the groove (11). The outer cavity (3) is mounted on the lifting component (2), and both ends of the outer cavity (3) have openings. The conical shell (7) is located at one end of the outer cavity (3), and an inlet (71) is provided on the conical shell (7). The movable cone (6) is mounted on the linear telescopic component (5). Both the linear telescopic component (5) and the microwave resonant cavity (4) are located within the outer cavity (3). The linear telescopic component (5) drives the movable cone (6) to open or close the inlet (71). When the inlet (71) is closed by the movable cone (6), the conical shell (7) controls the microwave resonant cavity. The entrance of the resonant cavity (4) is covered and blocked. The conical shell (7) will divert the wet steam. Some droplets in the wet steam hit the wall to form a liquid film. The liquid film moves forward under the inertial force of the velocity. When the droplets gradually fall off at the end, they flow to the lower left under the influence of gravity and inertial force. The dry steam quickly turns into the interior of the outer cavity (3) to form a dry steam region. The microwave resonant cavity (4) emits microwaves into the dry steam region, and the resonant frequency of the dry steam can be measured. When the inlet (71) is open, the wet steam fluid flows in the outer cavity (3). At this time, a flow channel is formed in the microwave resonant cavity (4). When measuring the wet steam, it is inserted into the exhaust cylinder from the groove (11). The wet steam enters the microwave resonant cavity (4) through the inlet (71). The microwave resonant cavity (4) emits microwaves into the wet fluid, and the dielectric constant of the wet steam can be measured.

2. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in claim 1, characterized in that: The outer cavity (3) is a circular or square tube structure.

3. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in claim 1, characterized in that: The linear telescopic component (5) is a multi-stage telescopic rod.

4. The online measurement device for turbine exhaust humidity based on microwave resonance technology as described in claim 3, characterized in that: The linear telescopic component (5) includes a primary telescopic rod (51), a secondary telescopic rod (52), a tertiary telescopic rod (53), a base frame (54), a motor (55), and a lead screw (56). The primary telescopic rod (51), the secondary telescopic rod (52), and the tertiary telescopic rod (53) are slidably sleeved and connected by a transmission belt assembly (57). The motor (55) and the lead screw (56) are connected by a transmission belt assembly (57) and are located at the bottom of the base frame (54). The lead screw (56) is threadedly connected to the base frame (531) of the tertiary telescopic rod (53). The motor (55) drives the lead screw (56) to rotate forward or backward, thereby driving the tertiary telescopic rod (53) to rise and fall, and synchronously driving the secondary telescopic rod (52) and the primary telescopic rod (51) to rise and fall through the transmission belt assembly (57). The movable cone (6) is located on the primary telescopic rod (51).

5. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in claim 4, characterized in that: The transmission belt assembly (57) includes: a first belt group (571) and a second belt group (572). Two first belt groups (571) are provided and symmetrically arranged on the third-stage telescopic rod (53). Two second belt groups (572) are provided and symmetrically arranged on the second-stage telescopic rod (52). A first clamping block (541) is provided on the side wall of the bottom frame (54), a second clamping block (532) is provided on the inner side wall of the third-stage telescopic rod (53), a third clamping block (521) is provided on the outer side wall of the second-stage telescopic rod (52), and a fourth clamping block (511) is provided on the outer side wall of the first-stage telescopic rod (51). The first belt group (571) includes a first pulley (5711) and a second pulley (5712) spaced apart, and a first annular transmission belt (5713) sleeved on the first pulley (5711) and the second pulley (5712). 72) Includes a third pulley (5721) and a fourth pulley (5722) spaced apart, and a second annular transmission belt (5723) sleeved on the third pulley (5721) and the fourth pulley (5722). The side wall of the three-stage telescopic rod (53) is located inside the first annular transmission belt (5713), and the side wall of the second-stage telescopic rod (52) is located inside the second annular transmission belt (5723). The first clamping block (541) clamps the first annular transmission belt (5713) outside the three-stage telescopic rod (53), and the third clamping block (521) clamps the first annular transmission belt (5713) inside the three-stage telescopic rod (53). The second clamping block (532) clamps the second annular transmission belt (5723) outside the second-stage telescopic rod (52), and the fourth clamping block (511) clamps the second annular transmission belt (5723) inside the second-stage telescopic rod (52).

6. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in claim 5, characterized in that: The outer side wall of the bottom frame (54) is provided as a flow-around curved surface (542).

7. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in claim 1, characterized in that: The diameter of the movable cone (6) gradually increases toward the linear telescopic member (5).

8. The online measurement device for turbine exhaust humidity based on microwave resonance technology as described in claim 1, characterized in that: The outer cavity (3) and the conical shell (7) are integrally formed.

9. The online turbine exhaust humidity measurement device based on microwave resonance technology as described in any one of claims 1-8, characterized in that: The lifting component (2) includes: an inner cylinder (21), an outer cylinder (22), a sealing ring (23), and a tensioner (24). The inner cylinder (21) is disposed inside the outer cylinder (22) and sealed by the sealing ring (23). The tensioner (24) is disposed at one end of the outer cylinder (22) and is locked or unlocked by the inner cylinder (21). The other end of the outer cylinder (22) is connected to the outer cavity (3). One end of the inner cylinder (21) is connected to the microwave resonant cavity (4), and the other end is used for the insertion of a microwave probe.

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