Haptic reproduction device, method for manufacturing the same, and haptic reproduction apparatus

Abstract

The embodiment of the present application provides a kind of haptic reproduction device, its manufacturing method and haptic reproduction device, by adopting piezoelectric material layer of whole surface arrangement, so that the slope angle of insulating layer on piezoelectric material layer cannot be formed, to avoid the electrode wiring like in the related art on the insulating layer with large slope angle the problem of climbing, further avoid the risk of electrode wiring fracture;In addition, the piezoelectric material layer of the whole surface arrangement of the present application is covered by the area of second electrode effective driving area, the rest area is non-driving area, to improve the reliability of piezoelectric material layer non-driving area, deposit low dielectric constant insulating layer between piezoelectric material layer and second electrode layer, by reasonably setting the thickness of insulating layer, insulating layer can drop more than 70% voltage of piezoelectric material layer non-driving area, so that the voltage that piezoelectric material layer non-driving area can withstand is less than 30% of total driving voltage, so as to avoid piezoelectric material layer breakdown.

Description

Technical Field

[0001] This invention relates to the field of tactile feedback technology, and in particular to a tactile reproduction device, its manufacturing method, and a tactile reproduction apparatus. Background Technology

[0002] Haptics is a key area of ​​technological development today, enabling interaction between the device and the human body through touch. Summary of the Invention

[0003] This invention provides a tactile reproduction device, its manufacturing method, and a tactile reproduction apparatus, the specific solutions of which are as follows:

[0004] This invention provides a tactile reproduction device, comprising:

[0005] Substrate;

[0006] A first electrode layer is disposed on one side of the substrate.

[0007] A piezoelectric material layer is disposed on the side of the first electrode layer away from the substrate.

[0008] An insulating layer is disposed on the side of the piezoelectric material layer away from the substrate, the insulating layer having a plurality of hollow structures spaced apart from each other, and the dielectric constant of the insulating layer is less than 10;

[0009] The second electrode layer is disposed on the side of the insulating layer away from the substrate. The second electrode layer includes: a plurality of second electrodes that are disposed one-to-one with the cutout structures and cover each of the cutout structures, and electrode traces that are electrically connected to the second electrodes.

[0010] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the material of the insulating layer includes at least one of Al2O3 and AlN.

[0011] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the thickness of the insulating layer is greater than 50 nm and less than 100 nm.

[0012] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the second electrode layer further includes a driving voltage terminal electrically connected to the electrode traces, and the driving voltage terminal is disposed near the edge of the substrate.

[0013] The first electrode layer has a ground terminal disposed near the edge of the substrate, and the piezoelectric material layer, the insulating layer and the second electrode layer at least expose a portion of the ground terminal.

[0014] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the driving voltage terminal and the ground terminal are located on the same side of the plurality of second electrodes, the ground terminal is a strip structure, and the orthographic projection of the driving voltage terminal on the substrate and the orthographic projection of the ground terminal on the substrate overlap each other.

[0015] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the plurality of second electrodes are arranged in an array, each second electrode located in the same column is electrically connected to the same electrode trace, and the second electrodes located in different columns are electrically connected to different electrode traces.

[0016] Each of the electrode traces is electrically connected to a corresponding driving voltage terminal, or each of the electrode traces is electrically connected to the same driving voltage terminal.

[0017] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the thickness of the second electrode layer is greater than or equal to 250 nm.

[0018] In one possible implementation, in the tactile reproduction device provided in the embodiments of the present invention, the thickness of the piezoelectric material layer is greater than or equal to 2 μm.

[0019] Accordingly, embodiments of the present invention also provide a tactile reproduction device, including the tactile reproduction device described above in the embodiments of the present invention.

[0020] Accordingly, embodiments of the present invention also provide a method for manufacturing a tactile reproduction device, comprising:

[0021] A first electrode layer is formed on a substrate.

[0022] A piezoelectric material layer is formed on the side of the first electrode layer that is away from the substrate.

[0023] An insulating layer is formed on the side of the piezoelectric material layer away from the substrate; wherein the insulating layer has a plurality of spaced-apart perforated structures, and the dielectric constant of the insulating layer is less than 10;

[0024] A second electrode layer is formed on the side of the insulating layer away from the substrate; the second electrode layer includes: a plurality of second electrodes corresponding to and covering each of the cutout structures, and electrode traces electrically connected to the second electrodes.

[0025] The beneficial effects of the embodiments of the present invention are as follows:

[0026] This invention provides a tactile reproduction device, its manufacturing method, and a tactile reproduction apparatus. By employing a piezoelectric material layer that is disposed across an entire surface, the insulating layer does not form a slope angle on the piezoelectric material layer. This avoids the problem of electrode traces climbing up an insulating layer with a large slope angle, as is seen in related technologies. It reduces the slope angle of the electrode traces, thereby avoiding the risk of electrode trace breakage and achieving reliable electrical connection of the electrode traces. Furthermore, although the piezoelectric material layer is equivalent to an insulating layer, it is susceptible to breakdown due to various defects within it, such as grain boundaries and pores. In this invention, the area covered by the second electrode in the piezoelectric material layer disposed across an entire surface is an effective driving layer. The piezoelectric material layer has a driving region, while the remaining regions are non-driving regions. To improve the reliability of the non-driving regions of the piezoelectric material layer, an insulating layer with an extremely low dielectric constant (e.g., less than 10) is deposited between the piezoelectric material layer and the second electrode layer. By reasonably setting the thickness of the insulating layer, it can divert more than 70% of the voltage from the non-driving regions of the piezoelectric material layer. This allows the voltage experienced by the non-driving regions of the piezoelectric material layer to be less than 30% of the total driving voltage, thus avoiding the problem of the piezoelectric material layer being broken down and failing. This improves the working stability of the non-driving regions of the piezoelectric material layer and enhances the reliability of the entire device under high voltage. Furthermore, the use of a piezoelectric material layer covering the entire surface in this invention simplifies the manufacturing process. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a tactile reproduction device provided in related technologies;

[0028] Figure 2 A schematic diagram of a planar structure of a tactile reproduction device provided in an embodiment of the present invention;

[0029] Figure 3 for Figure 2 A cross-sectional view along the CC' direction;

[0030] Figure 4 A schematic diagram showing the relationship between the thickness (H) of the insulating layer and the ratio (E1 / E) of the driving voltage (E1) of the non-driving region of the piezoelectric material layer to the total driving voltage (E) when the insulating layer material is Al2O3 or AlN, respectively.

[0031] Figure 5 A schematic diagram of a planar structure of another tactile reproduction device provided in an embodiment of the present invention;

[0032] Figure 6 A schematic diagram illustrating a method for manufacturing a tactile reproduction device according to an embodiment of the present invention;

[0033] Figures 7A-7D To produce Figure 2 A planar diagram showing each step in the production process;

[0034] Figures 8A-8D To produce Figure 3 Cross-sectional diagrams corresponding to each step in the manufacturing process. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Furthermore, the embodiments and features in the embodiments of the present invention can be combined with each other without conflict. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "comprising" or "including," and similar terms used in this invention, mean that the element or object preceding the term encompasses the element or object listed following the term and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as "inner," "outer," "upper," and "lower" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0037] It should be noted that the dimensions and shapes of the figures in the accompanying drawings do not reflect actual proportions and are intended only to illustrate the content of the invention. Furthermore, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0038] Thin-film piezoelectric materials, with their high dielectric constant and transparency, are ideally suited for use in tactile feedback devices integrated into screens. Tactile feedback devices based on piezoelectric materials can achieve tactile feedback by generating vibrational displacement through excitation of the resonance between the piezoelectric material and the glass backplate.

[0039] In related technologies, such as Figure 1As shown, the tactile reproduction device includes: a substrate 1, a first electrode layer 2 (e.g., ITO) disposed on the substrate 1, a piezoelectric material layer 3 (e.g., PZT) disposed on the first electrode layer 1, a second electrode layer 4 (e.g., ITO) disposed on the piezoelectric material layer 3, an insulating layer 5 disposed on the second electrode layer 4, and a wiring layer 6 disposed on the insulating layer 5; one end of the wiring layer 6 is electrically connected to the second electrode layer 4 through a via penetrating the insulating layer 5, and the other end of the wiring layer 6 is electrically connected to a driving voltage terminal 7 located at the edge of the substrate. During the operation of the tactile reproduction device, the first electrode layer 2 is grounded using the inverse piezoelectric effect, and a high-frequency AC voltage signal (V0) is applied to the second electrode layer 4 through the driving voltage terminal 7. AC This allows for the application of a high-frequency AC voltage signal to the piezoelectric material layer 3, thereby generating high-frequency vibration. However, for tactile reproduction devices based on piezoelectric materials, the PZT thickness must be greater than 2 μm to drive the substrate to achieve sufficient amplitude. Due to the relatively thick film thickness of the piezoelectric material layer 3 and its patterned structure, the slope angle of the insulating layer 5 at the edge of the thick film increases. The wiring layer 6 climbs on the insulating layer 5 with a large slope angle, which can lead to the wiring layer 6 breaking due to the large slope angle of the insulating layer 5.

[0040] In view of this, in order to solve the problem of wiring layer breakage due to the large slope angle of the insulation layer, embodiments of the present invention provide a tactile reproduction device, such as... Figure 2 and Figure 3 As shown, Figure 2 This is a planar schematic diagram of a tactile reproduction device provided in an embodiment of the present invention. Figure 3 for Figure 2 A cross-sectional view along the CC' direction shows that the tactile reproduction device includes:

[0041] Substrate 1;

[0042] The first electrode layer 2 is disposed on one side of the substrate 1;

[0043] The piezoelectric material layer 3 is disposed on the side of the first electrode layer 2 that is away from the substrate 1.

[0044] An insulating layer 5 is disposed on the side of the piezoelectric material layer 3 away from the substrate 1. The insulating layer 5 has a plurality of hollow structures 51 arranged at intervals. The dielectric constant of the insulating layer 5 is less than 10.

[0045] The second electrode layer 4 is disposed on the side of the insulating layer 5 away from the substrate 1. The second electrode layer 4 includes: a plurality of second electrodes 41 that are disposed one-to-one with the cutout structures 51 and cover each cutout structure 51, and electrode traces 42 that are electrically connected to the second electrodes 41.

[0046] The tactile reproduction device provided in this embodiment of the invention employs a piezoelectric material layer that is disposed across the entire surface. This prevents the insulating layer from forming a slope angle on the piezoelectric material layer, thus avoiding the problem of electrode traces climbing up an insulating layer with a large slope angle, as seen in related technologies. This reduces the slope angle of the electrode traces, thereby avoiding the risk of trace breakage and achieving reliable electrical connection of the electrode traces. Furthermore, although the piezoelectric material layer is essentially an insulating layer, it is susceptible to breakdown due to various defects such as grain boundaries and pores. In this invention, the area covered by the second electrode in the piezoelectric material layer is the effective driving area, while the remaining area... The region is a non-driving region. To improve the reliability of the non-driving region of the piezoelectric material layer, an insulating layer with an extremely low dielectric constant (e.g., less than 10) is deposited between the piezoelectric material layer and the second electrode layer. By reasonably setting the thickness of the insulating layer, the insulating layer can absorb more than 70% of the voltage in the non-driving region of the piezoelectric material layer. This allows the voltage borne by the non-driving region of the piezoelectric material layer to be less than 30% of the total driving voltage, thereby avoiding the problem of the piezoelectric material layer being broken down and failing. This improves the working stability of the non-driving region of the piezoelectric material layer and the reliability of the entire device under high voltage. Furthermore, the use of a piezoelectric material layer that covers the entire surface in this invention can also simplify the manufacturing process.

[0047] In specific implementation, the substrate provided by the present invention can be a substrate made of glass, a substrate made of silicon or silicon dioxide (SiO2), a substrate made of sapphire, or a substrate made of metal wafers. No limitation is made here. Those skilled in the art can set the above-mentioned substrate according to the actual application needs.

[0048] In specific implementations, in the tactile reproduction device provided in the embodiments of the present invention, the material of the insulating layer may include, but is not limited to, at least one of Al2O3 and AlN. For example... Figure 4 As shown, Figure 4 The diagram shows the relationship between the thickness (H) of the insulating layer and the ratio (E1 / E) of the driving voltage (E1) of the non-driving region of the piezoelectric material layer to the total driving voltage (E) when the insulating layer material is Al2O3 or AlN. It can be seen that when the thickness (H) of the insulating layer is greater than 50nm, the driving voltage (E1) of the non-driving region of the piezoelectric material layer separated by the insulating layer can reach more than 70%.

[0049] It should be noted that the insulating layer in this invention uses Al2O3 and AlN materials, which can not only serve as an insulating layer, but also contribute some piezoelectric functions because Al2O3 and AlN are also piezoelectric materials, which is beneficial to enhancing the overall vibration displacement of the tactile reproduction device.

[0050] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, such as Figure 3 As shown, the thickness of the second electrode layer 4 is generally greater than or equal to 250 nm, that is, the thickness of the electrode trace 42 is greater than or equal to 250 nm. In order to avoid the problem of large ramp-up of the electrode trace 42 on the insulating layer 5, the thickness of the insulating layer 5 provided in this embodiment of the invention is less than 100 nm. Therefore, the thickness of the insulating layer 5 provided in this embodiment of the invention is greater than 50 nm and less than 100 nm. In this way, the insulating layer 5 can both separate more than 70% of the driving voltage in the non-driving area of ​​the piezoelectric material layer 3 and avoid the problem of large ramp-up of the electrode trace 42 on the insulating layer 5.

[0051] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, such as Figure 3 and Figure 5 As shown, the second electrode layer 4 also includes a driving voltage terminal 43 electrically connected to the electrode trace 42, and the driving voltage terminal 43 is disposed near the edge of the substrate 1.

[0052] The first electrode layer 2 has a ground terminal 21 disposed near the edge of the substrate 1. The piezoelectric material layer 3, the insulating layer 5, and the second electrode layer 4 expose at least a portion of the ground terminal 21. During the operation of the tactile reproduction device, a ground signal is applied to the first electrode layer 2 through the ground terminal 21 using the inverse piezoelectric effect, and a high-frequency AC voltage signal (V) is applied to the second electrode layer 4 through the driving voltage terminal 43. AC This allows for the application of a high-frequency AC voltage signal to the piezoelectric material layer 3, thereby generating high-frequency vibration.

[0053] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, such as Figure 5 As shown, the driving voltage terminal 43 and the ground terminal 21 can be located on the same side of the multiple second electrodes 41. The ground terminal 21 can be a strip structure. The orthographic projection of the driving voltage terminal 43 on the substrate 1 overlaps with the orthographic projection of the ground terminal 21 on the substrate 1. This allows for the achievement of a narrow bezel.

[0054] Specifically, such as Figure 5 As shown, a piezoelectric material layer 3 and an insulating layer 5 are provided between the driving voltage terminal 43 and the ground terminal 21. This ensures that the driving voltage terminal 43 and the electrode trace 42 are fabricated on a film layer of the same thickness, preventing the risk of film layer breakage at the driving voltage terminal 43.

[0055] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, such as Figure 5 As shown, multiple second electrodes 41 are arranged in an array. Each second electrode 41 located in the same column is electrically connected to the same electrode trace 42, and the second electrodes 41 located in different columns are electrically connected to different electrode traces 42.

[0056] Each electrode trace 42 is electrically connected to the same driving voltage terminal 43. This allows a high-frequency AC voltage signal (V) to be applied to the driving voltage terminal 43. AC This allows for the full-area driving of tactile reproduction devices.

[0057] Of course, in practice, Figure 2 The tactile reproduction device shown can also be driven in a column-driven manner. For example, each electrode line 42 is electrically connected to the driving voltage terminal 43 in a one-to-one correspondence. In this way, one or several columns of piezoelectric material layers can be driven as needed to achieve partitioned excitation, thereby reducing the power consumption of the tactile reproduction device.

[0058] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, such as Figure 5 As shown, the first electrode layer 2 can be a planar electrode with an integral structure. Therefore, when fabricating the piezoelectric material layer 3 and the insulating layer 5, it is necessary to pattern the piezoelectric material layer 3 and the insulating layer 5 to expose the edge position of the first electrode layer 2, so as to facilitate the application of electrical signals to the first electrode layer.

[0059] In specific implementations, in the tactile reproduction device provided in the embodiments of the present invention, the thickness of the piezoelectric material layer is greater than or equal to 2 μm. This ensures that the tactile reproduction device can drive the substrate to achieve sufficient amplitude during operation, thereby improving the tactile reproduction effect.

[0060] In specific implementations, the piezoelectric material layer is not limited to lead zirconate titanate (Pb(Zr,Ti)O3, PZT) mentioned above, but can also be aluminum nitride (AlN), ZnO (zinc oxide), barium titanate (BaTiO3), lead titanate (PbTiO3), potassium niobate (KNbO3), lithium niobate (LiNbO3), lithium tantalate (LiTaO3), or lanthanum gallium silicate (La3Ga5SiO3). 14 At least one of the following can be used: In this way, while ensuring the transparency of the tactile reproduction device, the vibration characteristics of the tactile reproduction device are also guaranteed. Specifically, the material used to fabricate the piezoelectric material layer can be selected according to the actual needs of those skilled in the art, and no limitation is made here. When using PZT to fabricate the piezoelectric material layer, because PZT has a high piezoelectric coefficient, the piezoelectric characteristics of the corresponding tactile reproduction device are guaranteed. The corresponding tactile reproduction device can be applied to tactile feedback devices. Furthermore, PZT has high light transmittance, so when integrated into a display device, it does not affect the display quality of the display device.

[0061] In specific implementations, in the tactile reproduction device provided in the embodiments of the present invention, the materials of the first electrode layer and the second electrode layer can be transparent conductive materials, such as indium tin oxide (ITO) or indium zinc oxide (IZO). Those skilled in the art can set the materials of the first electrode layer and the second electrode layer according to actual application needs, and no limitation is made here. The structure of the tactile reproduction device provided in the embodiments of the present invention can be a glass-based transparent tactile feedback device, which can be used for display integration. Its overall average transmittance is >75%.

[0062] Of course, the materials of the first electrode layer and the second electrode layer can also be metallic materials such as Ti / Au and Ti / Pt. The materials of the first electrode layer and the second electrode layer can be selected according to actual needs.

[0063] In specific implementation, in the tactile reproduction device provided in the embodiments of the present invention, in addition to the various film layers mentioned above, other film layers can be set according to the actual application.

[0064] The tactile reproduction device provided in this invention can be applied to fields such as medical, automotive electronics, and motion tracking systems. It is particularly suitable for wearable devices, external or implantable medical monitoring and treatment, or applications in fields such as artificial intelligence-based electronic skin. Specifically, the tactile reproduction device can be applied to devices that generate vibrations and mechanical properties, such as brake pads, keyboards, mobile terminals, game controllers, and automotive components.

[0065] Based on the same inventive concept, embodiments of the present invention also provide a method for manufacturing a tactile reproduction device, such as... Figure 6 As shown, it includes:

[0066] S601. A first electrode layer is formed on a substrate.

[0067] S602, A piezoelectric material layer is formed on the side of the first electrode layer away from the substrate.

[0068] S603. An insulating layer is formed on the side of the piezoelectric material layer away from the substrate; wherein the insulating layer has multiple hollow structures spaced apart from each other, and the dielectric constant of the insulating layer is less than 10.

[0069] S604. A second electrode layer is formed on the side of the insulating layer away from the substrate. The second electrode layer includes: a plurality of second electrodes that are disposed one-to-one with the cutout structures and cover each cutout structure, and electrode traces that are electrically connected to the second electrodes.

[0070] The tactile reproduction device manufactured by the above-described method in this embodiment of the invention has the same technical effect as that described in the aforementioned tactile reproduction device. For specific technical effects, please refer to the description in the aforementioned tactile reproduction device, which will not be repeated here.

[0071] The following is based on Figure 2 and Figure 3 Taking the tactile reproduction device shown as an example, the manufacturing process of the tactile reproduction device will be described. Figure 2 The corresponding diagrams for each step in the production process are as follows: Figures 7A-7D As shown, Figure 3 The corresponding diagrams for each step in the production process are as follows: Figures 8A-8D As shown, the specific steps include the following:

[0072] (1) As Figure 7A and 8A As shown, a first electrode layer 2 is formed by depositing a metal material (e.g., Ti / Au, Ti / Pt) or a metal oxide material (e.g., ITO) on a substrate 1 (e.g., a glass substrate), wherein the electrode preparation and heat treatment temperature is lower than the softening point of the glass.

[0073] (2) Figure 7B and 8B As shown, a full-surface PZT thin film is deposited on the side of the first electrode layer 2 away from the substrate 1 using magnetron sputtering or sol-gel methods. The PZT thin film is then etched along one side of the long side of the substrate 1 to expose the edge region (ground end) of the first electrode layer 2, thereby forming the piezoelectric material layer 3. Specifically, the thickness of the piezoelectric material layer 3 is ≥2μm. The PZT thin film deposition is also performed at a temperature below the glass softening point. If the material of the first electrode layer 2 is a metal oxide, the heat treatment temperature should be further reduced to below the metal oxide failure temperature; if the material of the first electrode layer 2 is ITO, the heat treatment temperature should be ≤650℃.

[0074] (3) Figure 7C and 8C As shown, an insulating film (dielectric constant less than 10, such as Al2O3 or AlN material) is formed on the side of the piezoelectric material layer 2 away from the substrate 1 using PLD atomic layer deposition. The insulating film is then etched using a dry etching method to form multiple hollow structures 51 that are spaced apart from each other and correspond to the second electrode (to be fabricated later), so as to expose the fabrication area of ​​the second electrode and the power application area (grounding terminal) of the first electrode layer 2, thereby forming the insulating layer 5.

[0075] (4) Figure 7D and 8D As shown, a metal thin film is formed by depositing a metal material (e.g., Ti / Au, Ti / Pt) or a metal oxide material (e.g., ITO) on the side of the insulating layer 5 away from the substrate 1. The metal thin film is etched to form a plurality of second electrodes 41 covering each hollow structure and electrode traces 42 electrically connected to the second electrodes 41, so as to form a second electrode layer.

[0076] In summary, the tactile reproduction device provided in the embodiments of the present invention can be manufactured by using the above steps (1)-(4).

[0077] Based on the same inventive concept, this invention also provides a tactile reproduction device, including the tactile reproduction device described above. Since the principle by which this tactile reproduction device solves the problem is similar to that of the aforementioned tactile reproduction device, the implementation of this tactile reproduction device can refer to the implementation of the aforementioned tactile reproduction device, and repeated details will not be elaborated further.

[0078] In practical implementation, the haptic reproduction device can be integrated with a touchscreen. The touchscreen can determine the location of the human touch, thereby generating corresponding vibration waveforms, amplitudes, and frequencies, enabling human-computer interaction. Alternatively, the haptic reproduction device can be reused as a piezoelectric element. The haptic reproduction device can determine the location of the human touch, thereby generating corresponding vibration waveforms, amplitudes, and frequencies, also enabling human-computer interaction. Of course, haptic reproduction devices can also be applied in fields such as medical care, automotive electronics, and motion tracking systems, depending on actual needs, which will not be detailed here.

[0079] This invention provides a tactile reproduction device, its manufacturing method, and a tactile reproduction apparatus. By employing a piezoelectric material layer that is disposed across an entire surface, the insulating layer does not form a slope angle on the piezoelectric material layer. This avoids the problem of electrode traces climbing up an insulating layer with a large slope angle, as is seen in related technologies. It reduces the slope angle of the electrode traces, thereby avoiding the risk of electrode trace breakage and achieving reliable electrical connection of the electrode traces. Furthermore, although the piezoelectric material layer is equivalent to an insulating layer, it is susceptible to breakdown due to various defects within it, such as grain boundaries and pores. In this invention, the area covered by the second electrode in the piezoelectric material layer disposed across an entire surface is an effective driving layer. The piezoelectric material layer has a driving region, while the remaining regions are non-driving regions. To improve the reliability of the non-driving regions of the piezoelectric material layer, an insulating layer with an extremely low dielectric constant (e.g., less than 10) is deposited between the piezoelectric material layer and the second electrode layer. By reasonably setting the thickness of the insulating layer, it can divert more than 70% of the voltage from the non-driving regions of the piezoelectric material layer. This allows the voltage experienced by the non-driving regions of the piezoelectric material layer to be less than 30% of the total driving voltage, thus avoiding the problem of the piezoelectric material layer being broken down and failing. This improves the working stability of the non-driving regions of the piezoelectric material layer and enhances the reliability of the entire device under high voltage. Furthermore, the use of a piezoelectric material layer covering the entire surface in this invention simplifies the manufacturing process.

[0080] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0081] Obviously, those skilled in the art can make various modifications and variations to the embodiments of the present invention without departing from the spirit and scope of the embodiments of the present invention. Thus, if these modifications and variations to the embodiments of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and variations.

Claims

1. A tactile reproduction device, characterized in that, include: Substrate; A first electrode layer is disposed on one side of the substrate. A piezoelectric material layer is disposed on the side of the first electrode layer that is away from the substrate. An insulating layer is disposed on the side of the piezoelectric material layer away from the substrate, the insulating layer having a plurality of hollow structures spaced apart from each other, and the dielectric constant of the insulating layer is less than 10; The second electrode layer is disposed on the side of the insulating layer away from the substrate. The second electrode layer includes: a plurality of second electrodes that are disposed one-to-one with the cutout structures and cover each of the cutout structures, and electrode traces that are electrically connected to the second electrodes.

2. The tactile reproduction device according to claim 1, characterized in that, The insulating layer is made of at least one of Al2O3 and AlN.

3. The tactile reproduction device according to claim 2, characterized in that, The thickness of the insulating layer is greater than 50 nm and less than 100 nm.

4. The tactile reproduction device according to any one of claims 1-3, characterized in that, The second electrode layer further includes a driving voltage terminal electrically connected to the electrode trace, and the driving voltage terminal is disposed near the edge of the substrate. The first electrode layer has a ground terminal disposed near the edge of the substrate, and the piezoelectric material layer, the insulating layer and the second electrode layer at least expose a portion of the ground terminal.

5. The tactile reproduction device according to claim 4, characterized in that, The driving voltage terminal and the ground terminal are located on the same side of the plurality of second electrodes. The ground terminal has a strip-shaped structure. The orthographic projection of the driving voltage terminal on the substrate and the orthographic projection of the ground terminal on the substrate overlap each other.

6. The tactile reproduction device according to claim 5, characterized in that, The plurality of second electrodes are arranged in an array, and each second electrode located in the same column is electrically connected to the same electrode trace, while the second electrodes located in different columns are electrically connected to different electrode traces. Each of the electrode traces is electrically connected to a corresponding driving voltage terminal, or each of the electrode traces is electrically connected to the same driving voltage terminal.

7. The tactile reproduction device according to any one of claims 1-3, 5, and 6, characterized in that, The thickness of the second electrode layer is greater than or equal to 250 nm.

8. The tactile reproduction device according to any one of claims 1-3, 5, and 6, characterized in that, The thickness of the piezoelectric material layer is greater than or equal to 2 μm.

9. A tactile reproduction device, characterized in that, Includes the tactile reproduction device according to any one of claims 1-8.

10. A method for manufacturing a tactile reproduction device, characterized in that, include: A first electrode layer is formed on a substrate. A piezoelectric material layer is formed on the side of the first electrode layer that is away from the substrate. An insulating layer is formed on the side of the piezoelectric material layer away from the substrate; wherein the insulating layer has a plurality of spaced-apart perforated structures, and the dielectric constant of the insulating layer is less than 10; A second electrode layer is formed on the side of the insulating layer away from the substrate; the second electrode layer includes: a plurality of second electrodes corresponding to and covering each of the cutout structures, and electrode traces electrically connected to the second electrodes.

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